WO2013047593A1 - 微細凹凸構造を表面に有する部材の検査装置および検査方法、陽極酸化アルミナ層を表面に有する部材の製造方法、及び光学フィルムの製造方法 - Google Patents

微細凹凸構造を表面に有する部材の検査装置および検査方法、陽極酸化アルミナ層を表面に有する部材の製造方法、及び光学フィルムの製造方法 Download PDF

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Publication number
WO2013047593A1
WO2013047593A1 PCT/JP2012/074726 JP2012074726W WO2013047593A1 WO 2013047593 A1 WO2013047593 A1 WO 2013047593A1 JP 2012074726 W JP2012074726 W JP 2012074726W WO 2013047593 A1 WO2013047593 A1 WO 2013047593A1
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WIPO (PCT)
Prior art keywords
mold
anodized alumina
image processing
inspection
alumina layer
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PCT/JP2012/074726
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English (en)
French (fr)
Japanese (ja)
Inventor
三文 福山
輝太 石丸
松原　雄二
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三菱レイヨン株式会社
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Application filed by 三菱レイヨン株式会社 filed Critical 三菱レイヨン株式会社
Priority to KR1020147005180A priority Critical patent/KR101593856B1/ko
Priority to JP2012547195A priority patent/JP5449570B2/ja
Priority to CN201280046980.8A priority patent/CN103842803B/zh
Publication of WO2013047593A1 publication Critical patent/WO2013047593A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Definitions

  • the present invention relates to an inspection apparatus and inspection method for a member having a fine concavo-convex structure on its surface, a method for manufacturing a member having an anodized alumina layer on its surface, and a method for manufacturing an optical film.
  • a member such as a sheet having a surface with a fine concavo-convex structure having a pitch of visible light wavelength or less on the surface exhibits functions such as super hydrophilicity, super water repellency, and low reflection.
  • functions such as super hydrophilicity, super water repellency, and low reflection.
  • An anodized alumina layer formed by anodizing the surface of an aluminum substrate is an aluminum oxide film (alumite) and has a plurality of pores (fine concavo-convex structure) whose pitch is equal to or less than the wavelength of visible light. .
  • the anodized alumina layer having such a fine concavo-convex structure there is unevenness in the concentration and temperature of the electrolytic solution in which the aluminum substrate is immersed during anodization, or unevenness in the surface properties of the aluminum substrate.
  • the surface of the anodized alumina layer has unevenness in the shape of the fine concavo-convex structure (the depth and inner diameter of the pores, the pitch between the pores, etc.), the thickness of the anodized alumina, and the like. In such a case, it is not possible to transfer the fine concavo-convex structure optimum for the sheet member or the like.
  • the aluminum base material used as the material of the anodized alumina has a high purity, but the crystal grains of the high purity aluminum used to produce the high purity aluminum base material are coarsened by casting or the like. Coarse crystal grains that are easily formed and can be observed with the naked eye are generated on the aluminum substrate. For this reason, the same grain boundary pattern will arise also on the surface of the anodic oxidation alumina of the mold manufactured using such an aluminum base material.
  • an aluminum substrate is manufactured by rolling, extrusion, forging, or the like.
  • a mold having an anodized alumina layer having such a fine concavo-convex structure has a mold release agent attached to the surface in order to improve the mold releasability of the molded product. If this mold release agent is excessively adhered to the surface of the anodized alumina layer having a positive fine concavo-convex structure, the fine concavo-convex structure is filled with the mold release agent, and the optimal fine concavo-convex structure is formed on the surface of the transparent substrate or the like. The problem of not being transferred occurs. On the other hand, when the amount of the release agent is too small, a desired release property cannot be obtained, which is a problem.
  • the present invention provides an inspection apparatus and inspection method capable of easily inspecting the surface state of a member having a fine concavo-convex structure such as anodized alumina used in a mold as described above, and a fine concavo-convex structure having a good surface state. It aims at providing the manufacturing method of the member which has the anodized alumina which has it on the surface.
  • the inventors of the present invention reflect on the surface of a member having such a fine concavo-convex structure depending on whether the surface state of the member having a fine concavo-convex structure such as anodized alumina is good. I found out that the color of the light changes. That is, it has been found that the color of light reflected by anodized alumina reflects the quality of the surface state of a member having a fine concavo-convex structure.
  • the inventors of the present invention indicate that the light reflected on the surface having the fine concavo-convex structure includes information on the quality of the surface state of the member having the fine concavo-convex structure, and the reflected light has the fine concavo-convex structure. It has been found that the light is polarized in a direction perpendicular to the surface on which the anodized alumina is formed or in a direction parallel to the surface on which the anodized alumina is formed, depending on the surface state of the member.
  • an inspection apparatus for a member having a fine concavo-convex structure composed of a plurality of pores on the surface, and irradiating means for irradiating irradiation light to a member to be inspected and reflected light reflected by the member are imaged.
  • the polarizing means has a polarization direction of ⁇ 50 ° to 50 ° with respect to a direction perpendicular to a tangential plane at a point where the optical axis of the imaging means and the surface of the member are in contact with each other. It is arranged to be.
  • the polarizing means has a polarization direction of ⁇ 50 ° to 50 ° with respect to a direction parallel to a tangential plane at a point where the optical axis of the imaging means and the surface of the member are in contact with each other. It is arranged to be.
  • the image processing means determines the adhesion state of the release agent on the surface of the member.
  • the image processing means creates an output that can determine the flow pattern of the member.
  • the member is a member having an anodized alumina layer having a fine relief structure formed on the surface.
  • the image processing means also determines the state of the fine uneven structure of the anodized alumina layer.
  • the imaging means is arranged such that its optical axis forms an angle of 45 ° or more and less than 90 ° with respect to the normal of the surface of the member.
  • the imaging means outputs an RGB image signal as color information
  • the image processing means determines the surface state of the member based on the RGB image signal.
  • the imaging unit outputs an RGB image signal as color information
  • the image processing unit includes a conversion unit that converts the RGB image signal into HSL color system information, and an HSL table. The surface state of the member is determined based on the color system information.
  • a method for inspecting a member having a fine concavo-convex structure composed of a plurality of pores on the surface the irradiation step of irradiating the member to be inspected with irradiation light, and reflection on the surface of the member
  • An imaging step for imaging the reflected light, the irradiation light or the reflected light to be imaged is polarized by the deflecting means, and the method is further based on color information obtained from the captured image.
  • an image processing step for determining whether or not the surface condition is good is
  • the polarization direction is ⁇ 50 ° to 50 ° with respect to the direction perpendicular to the tangential plane at the point where the optical axis of the imaging means and the member are in contact with each other.
  • the polarization direction is ⁇ 50 ° to 50 ° with respect to the direction parallel to the tangential plane at the point where the optical axis of the imaging means and the member are in contact.
  • the adhesion state of the release agent on the surface of the member is determined in the image processing step.
  • an output capable of determining the flow pattern of the member is created in the image processing step.
  • the member is a member having an anodized alumina layer having a fine relief structure formed on the surface.
  • the state of the fine uneven structure of the anodized alumina layer is determined in the image processing step.
  • the imaging means is arranged such that its optical axis forms an angle of 45 ° or more and less than 90 ° with respect to the normal of the surface of the member.
  • the imaging means outputs an RGB image signal as color information, and the surface state of the member is determined based on the RGB image signal in the image processing step.
  • the imaging means outputs an RGB image signal as color information, and in the image processing step, the RGB image signal is converted into HSL color system information, and based on the HSL color system information.
  • the surface state of the member is determined.
  • the step of forming an anodized alumina layer on the surface of the aluminum substrate by anodizing the surface of the aluminum substrate, and attaching a release agent to the surface of the anodized alumina layer there is provided a method for producing a member having an anodized alumina layer on the surface, the method comprising the steps of: and a step of inspecting the adhesion state of the release agent by the inspection method.
  • anodizing the surface of the aluminum substrate to form an anodized alumina layer on the surface of the aluminum substrate, and inspecting the anodized alumina described above Provided is a method for producing a member having an anodized alumina layer on the surface.
  • the step of forming an anodized alumina layer on the surface of the aluminum substrate by anodizing the surface of the aluminum substrate and the presence or absence of a flow pattern are inspected by the above inspection method. And a step of producing a member having an anodized alumina on the surface thereof.
  • an optical film manufacturing method for manufacturing an optical film by transferring a surface shape of a member manufactured by the above manufacturing method.
  • the present invention it is possible to easily inspect the surface state of a member having a fine concavo-convex structure such as anodized alumina used for a mold or the like.
  • the member which has on the surface can be manufactured.
  • FIG. 5 obtained from an image captured by an imaging unit having an optical axis angle ⁇ 1 of 5 °. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 15 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 25 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 35 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 45 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 55 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 65 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 15 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 15 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 25 degrees. It is
  • FIG. 6 which made optical axis angle (theta) 1 75 degrees. It is the same graph as FIG. 6 which made optical axis angle (theta) 1 85 degrees.
  • 6 is a graph in which the maximum value of the hue difference with respect to the normal portion in each pixel of the line 102 in FIG. 5 is plotted for each optical axis angle ⁇ 1. It is the graph by the Example of this invention which plotted the angle (theta) 2 of the polarization direction L2 of the polarizing plate with respect to the normal line on the vertical axis
  • FIG. 2 is a graph showing a result of imaging the mold before the mold release process with the inspection apparatus of FIG.
  • FIG. 2 is a graph showing a result of picking up an image of the mold after the mold release processing by the inspection apparatus of FIG. 2, converting the RGB image signal into a hue (H) signal by the image processing apparatus, and extracting one turn around the center in the mold longitudinal direction. It is.
  • the mold after removing the attached release agent is imaged by the inspection apparatus of FIG. 2, and the image processing apparatus converts the RGB image signal into the hue (H) signal, and extracts one round around the center in the mold longitudinal direction. It is a graph which shows.
  • the method of manufacturing a mold having an anodized alumina on the surface includes a step of anodizing the surface of an aluminum substrate to obtain a member having an anodized alumina on the surface (anodizing step), and an anodizing alumina.
  • a step of inspecting the state of the fine concavo-convex structure (first inspection step), a step of repairing the anodized alumina as necessary (first repair step), and a step of attaching a release agent to the surface of the anodized alumina (The mold release process step), the step of inspecting the adhesion state of the release agent (second inspection step) by the inspection apparatus and method of the present invention, and the step of repairing the adhesion state of the mold release agent as required ( A second repair step).
  • Steps (a) to (f) (A) a first oxide film forming step of forming an oxide film on the surface of an aluminum substrate by anodizing a mirror-finished aluminum substrate in an electrolytic solution under a constant voltage; (B) an oxide film removing step for removing the oxide film and forming pore generation points for anodization on the surface of the aluminum substrate; (C) Second oxide film formation for forming an oxide film having pores corresponding to the pore generation point by anodizing the aluminum substrate on which the pore generation point has been formed in the electrolytic solution again at a constant voltage Process, (D) a pore diameter expansion process step for expanding the diameter of the pores; (E) After the step (d), an oxide film growth step in which anodization is again performed in the electrolytic solution under a constant voltage; (F) Repeating step of obtaining a fine concavo-convex shape pattern in which anodized
  • the surface of the mirror-finished aluminum base material has a tapered shape whose diameter gradually decreases in the depth direction from the opening, and is periodically arranged. A large number of pores are formed, and as a result, a mold is obtained in which anodized alumina having a plurality of pores (fine concavo-convex structure) is formed on the surface.
  • the step (a) may be omitted from the step (c) depending on the use of the material to which the mold surface is transferred.
  • a cylindrical aluminum substrate is used as the aluminum substrate, but a flat aluminum substrate may be used.
  • the surface of the mirror-finished aluminum substrate 10 shown in FIG. 1 (a) is anodized in an electrolytic solution under a constant voltage, so that the surface of the aluminum substrate 10 is finely divided as shown in FIG. 1 (b).
  • An oxide film 14 having holes 12 is formed.
  • the electrolytic solution include an acidic electrolytic solution and an alkaline electrolytic solution, and an acidic electrolytic solution is preferable.
  • the acidic electrolyte include oxalic acid, sulfuric acid, and a mixture thereof.
  • the concentration of oxalic acid is preferably 0.7 M or less. If the concentration of oxalic acid exceeds 0.7M, the current value during anodic oxidation becomes too high, and the surface of the oxide film may become rough.
  • the voltage during anodization is set to 30 to 60 V, it is possible to obtain a mold having anodized alumina having highly regular pores with a pitch of about 100 nm formed on the surface. Regardless of whether the voltage during anodization is higher or lower than this range, the regularity tends to decrease, and the pitch may be larger than the wavelength of visible light.
  • the temperature of the electrolytic solution is preferably 60 ° C. or lower, and more preferably 45 ° C. or lower.
  • a phenomenon called “burning” tends to occur, and the pores may be broken or the surface may melt and the regularity of the pores may be disturbed.
  • the concentration of sulfuric acid is preferably 0.7M or less. If the concentration of sulfuric acid exceeds 0.7M, the current value at the time of anodization may become too high to maintain a constant voltage.
  • a mold having anodized alumina having highly regular pores with a pitch of about 63 nm formed on the surface can be obtained. Regardless of whether the voltage during anodization is higher or lower than this range, the regularity tends to decrease, and the pitch may be larger than the wavelength of visible light.
  • the oxide film 14 formed by anodization for a long time becomes thick and the regularity of the arrangement of the pores can be improved.
  • the thickness of the oxide film 14 is reduced to 0.
  • the thickness of the oxide film 14 is more preferably 0.5 to 10 ⁇ m, and further preferably 1 to 3 ⁇ m.
  • the thickness of the oxide film 14 can be observed with a field emission scanning electron microscope or the like.
  • the regularity of the finally formed pores can be improved (for example, Masuda, “Applied Physics”). ", 2000, 69, No. 5, p. 558.).
  • Examples of the method for removing the oxide film 14 include a method in which aluminum is not dissolved but a solution that selectively dissolves alumina is used. Examples of such a solution include a chromic acid / phosphoric acid mixed solution.
  • anodization is performed under the same conditions (electrolyte concentration, electrolyte temperature, chemical conversion voltage, etc.) as in step (a).
  • an oxide film 14 ′ having columnar pores 12 ′ can be formed.
  • deeper pores can be obtained as the anodic oxidation time is lengthened.
  • An oxide film having a thickness of about 0.01 to 0.5 ⁇ m may be formed, and it is not necessary to form an oxide film having a thickness as large as that formed in the step (a).
  • the pore is 12 ′′.
  • the pore diameter formed in the step (c) is expanded by etching by dipping in a solution dissolving alumina.
  • a solution dissolving alumina examples include a phosphoric acid aqueous solution of about 5% by mass. The longer the time of step (d), the larger the pore diameter.
  • step (d) and step (e) By appropriately setting the conditions of step (d) and step (e), for example, the time of anodization and the time of pore diameter expansion treatment, various shapes of pores can be formed. Therefore, these conditions may be appropriately set according to the use of the member to be manufactured from the mold.
  • this mold is for manufacturing an antireflection member such as an antireflection film
  • the pitch and depth of the pores can be arbitrarily changed by appropriately setting the conditions in this way, so that it is optimal. It is also possible to design a refractive index change.
  • the mold thus obtained has a surface with a fine concavo-convex structure as a result of the formation of many periodic pores on the surface. And when the pitch of the pores in this fine concavo-convex structure is not more than the wavelength of visible light, that is, not more than 400 nm, a so-called moth-eye structure is obtained.
  • pitch refers to the distance from the center of the recess (pore) of the fine relief structure to the center of the recess (pore) adjacent thereto.
  • the pitch is larger than 400 nm, visible light scattering occurs, so that a sufficient antireflection function is not exhibited, and it is not suitable for manufacturing an antireflection member such as an antireflection film.
  • the pitch of the pores is not more than the wavelength of visible light, and the depth of the pores is preferably 50 nm or more, and 100 nm. More preferably.
  • the depth refers to the distance from the opening of the concave portion (pore) of the fine concavo-convex structure to the deepest portion. If the depth of the pore is 50 nm or more, the reflectance of the surface of the member for optical use formed by the transfer of the mold surface, that is, the transfer surface is lowered.
  • the aspect ratio (depth / pitch) of the mold pores is preferably 1.0 to 4.0, preferably 1.3 to 3.5, more preferably 1.8 to 3.5. Most preferred is 0 to 3.0.
  • the aspect ratio is 1.0 or more, a transfer surface with low reflectance can be formed, and the incident angle dependency and wavelength dependency thereof are sufficiently reduced. If the aspect ratio is greater than 4.0, the mechanical strength of the transfer surface tends to decrease.
  • the surface on which the fine concavo-convex structure of the mold is formed may be subjected to a release treatment so that the release is easy.
  • the release treatment method include a method of coating a silicone-based polymer or a fluorine polymer, a method of depositing a fluorine compound, a method of coating a fluorine-based or fluorine-silicone-based silane compound, and the like.
  • the mold manufactured in this way is, for example, sandwiching an active energy ray-curable resin composition between the mold and a transparent substrate film, and irradiating the active energy ray-curable resin composition with active energy rays.
  • the active energy ray-curable resin composition is cured to produce a sheet in which a cured layer having a shape complementary to the fine uneven structure on the mold surface (aluminum oxide surface) is formed on the base film (For example, refer to Patent Document 1).
  • This inspection apparatus is used in a step (first and second inspection steps) for inspecting the state of the fine concavo-convex structure of anodized alumina.
  • FIGS. 2 to 4 are a schematic plan view, a side view, and a rear view showing an inspection apparatus 20 for anodized alumina according to a preferred embodiment of the present invention.
  • the inspection apparatus 20 includes a rotating means (not shown) that holds a roll-shaped mold R having an anodized alumina layer having a plurality of pores (fine concavo-convex structure) formed on the surface and rotates the mold R around a longitudinal axis.
  • Illumination device (irradiation means) 22 for irradiating the outer surface of the mold R with a linear light beam extending in the axial direction of the mold R, a color line CCD for imaging the light irradiated from the illumination device 22 and reflected by the outer peripheral surface of the mold R
  • a camera (imaging means) 24, an image processing device (image processing means) 26 for processing image signals from the color line CCD camera 24, a mold R, an illumination device 22, and a color line CCD camera 24 are arranged in the longitudinal direction of the mold R.
  • Moving means (not shown) for relatively moving along.
  • the inspection apparatus 20 further includes a polarizing plate 28 that is disposed in front of the color line CCD camera 24 and polarizes light incident on the color line CCD camera 24.
  • the anodized alumina and the release agent are generally transparent, the light reflected on the surface of the anodized alumina and the light incident on the anodized alumina layer are not shaped in the form of fine concavo-convex structure of the anodized alumina.
  • the light is polarized in accordance with the depth and inner diameter of the holes, the pitch between the holes, the thickness of the anodized alumina, and the thickness of the release agent. For this reason, by arranging a polarizing plate that transmits polarized light in front of the color line CCD camera 24, it is possible to selectively receive the light transmitted through the anodized alumina layer, thereby detecting defects in the anodized alumina more accurately. can do.
  • the illuminating device 22 is arranged so that the linear light beam is irradiated on the outer peripheral surface of the mold R in an orientation extending along the longitudinal axis of the mold R.
  • Examples of the lighting device 22 include a high-frequency fluorescent lamp lighting device, rod lighting, optical fiber lighting arranged in a line, LED lighting, and the like.
  • the color line CCD camera 24 is a camera in which a plurality of color CCD elements are arranged one-dimensionally.
  • the color CCD element 24 receives the light irradiated from the illumination device 22 and reflected by the anodized alumina of the mold R. Output an RGB image signal.
  • the color line CCD camera 24 is arranged such that the linearly extending imaging range is irradiated on the outer peripheral surface of the mold R so as to extend along the longitudinal axis of the mold R.
  • the color line CCD camera 24 has a surface (tangent plane) where the angle ⁇ 1 (FIG. 3) of the optical axis L1 of the color line CCD camera 24 is at the contact point between the optical axis L1 and the anodized alumina of the mold R in the imaging range. It is preferable to be disposed at 45 to 89.9 ° with respect to the normal line N1.
  • the angle ⁇ 1 is 45 ° or more, the color of the reflected light from the anodized alumina corresponding to the fine uneven structure of the anodized alumina appears clearly.
  • the angle ⁇ 1 is preferably 65 ° or more, more preferably 70 ° or more, and further preferably 80 ° or more.
  • the angle ⁇ 1 is 90 ° or more, imaging becomes difficult, and therefore the angle ⁇ 1 is less than 90 °.
  • the imaging means may be arranged so that it can receive the light irradiated to the mold by the irradiating means and reflected by the mold R, but the optical axis of the imaging means and the optical axis of the irradiating means are legal. It is preferable to arrange them symmetrically with respect to the line N1.
  • anodized alumina Since anodized alumina is generally transparent, the light reflected on the surface of the anodized alumina and the light incident on the anodized alumina layer are not affected by the shape of the fine concavo-convex structure of the anodized alumina (depth and inner diameter of the pores). , The pitch between the pores) and the thickness of the anodized alumina.
  • the polarization direction of the polarizing plate is a direction perpendicular to the plane on which the anodized alumina is formed or the plane on which the anodized alumina is formed, depending on the shape of the fine concavo-convex structure of the anodized alumina and the thickness of the anodized alumina. Is appropriately selected in either one of the parallel directions.
  • the polarization direction of the polarizing plate 28 is the direction perpendicular to the plane on which the anodized alumina is formed, on the tangent plane of the mold at the point where the optical axis of the imaging means and the mold contact, or the anodized alumina. Is arranged so as to be ⁇ 50 ° to 50 ° with respect to a horizontal direction with respect to the plane on which is formed.
  • the detection sensitivity is equal to or higher than that without the polarizing plate.
  • the detection sensitivity is clearly higher in the range of ⁇ 45 ° to 45 ° than in the case without the polarizing plate, the detection sensitivity is further increased in the range of ⁇ 30 ° to 30 °, and more in the range of ⁇ 15 ° to 15 °. Detection sensitivity is increased, and 0 ° is most preferable.
  • the polarizing plate 28 has an angle ⁇ 2 formed between the normal line N1 of the surface (tangent plane) of the anodized alumina layer of the mold R in the imaging range and the polarization direction L2 of the polarizing plate 28. Is arranged within a predetermined range.
  • the angle formed by N1 and L2 is 0 degree.
  • the angle formed by N1 and L2 is 0 degree to 180 degrees
  • the normal line N1 is 0 to -180 degrees.
  • the angle ⁇ 2 between the normal line N1 and the polarization direction L2 of the polarizing plate is ⁇ 50 ° to 50 ° depending on the shape of the fine uneven structure of the anodized alumina to be inspected and the thickness of the anodized alumina.
  • 40 ° to 140 ° are preferably arranged.
  • the angle ⁇ 2 is ⁇ 50 ° to 50 °, longitudinally polarized light can be efficiently imaged. Therefore, reflected light that often contains information such as the shape of the fine concavo-convex structure of the anodized alumina and the thickness of the anodized alumina is anodized. It can be efficiently inspected in a mold that is polarized in a direction perpendicular to the plane on which the alumina is formed.
  • the angle ⁇ 2 is 40 ° to 140 °, it is possible to efficiently image laterally polarized light. Therefore, the reflected light that often includes information such as the shape of the fine concavo-convex structure of the anodized alumina and the thickness of the anodized alumina is reflected on the anode. It is possible to inspect efficiently in a mold that is polarized in a direction horizontal to the plane on which the alumina oxide is formed.
  • the image processing device 26 determines whether the surface condition of the mold R is good, that is, the fine uneven structure of the anodized alumina.
  • Judgment unit for determining the shape (depth and inner diameter of pores, pitch between pores, etc.), the thickness of anodized alumina, the presence or absence of a flow pattern, and the adhesion state of a release agent, and a CCD camera
  • an interface unit (not shown) that electrically connects the determination unit and the like, and a storage unit (not shown) that stores a threshold value used for color information determination.
  • the determination unit further converts the flow pattern state of the mold R on the image (that is, whether or not the flow pattern in the anodized alumina layer is within an allowable range) to an RGB image signal.
  • Image processing such as increasing the contrast is performed.
  • an image processing apparatus that outputs an image so that the flow pattern state can be visually confirmed is used as the processing apparatus. Others may be used as long as they perform the above. In the following description, an example using an image processing apparatus will be described.
  • the image processing device 26 may include a conversion unit that converts RGB image signals into HSL color system information as necessary.
  • the determination unit determines the quality of the state of the anodized alumina and the adhesion state of the release agent based on the information of the HSL color system.
  • the determination unit, conversion unit, and the like may be realized by dedicated hardware, or are configured by a personal computer memory and a central processing unit (CPU) to realize the functions of the determination unit, conversion unit, and the like.
  • the function may be realized by loading a program to be executed into a memory and executing the program.
  • the determination unit, the conversion unit, and the like may be provided in one image processing apparatus, or each may be provided in an individual image processing apparatus.
  • an input device a display device, etc. are connected to the image processing device as peripheral devices.
  • the input device refers to an input device such as a display touch panel, a switch panel, or a keyboard
  • the display device refers to a CRT, a liquid crystal display device, or the like.
  • the moving means (not shown) moves the mold R, the illumination device 22, the color line CCD camera 24, and the deflection plate 28 along the longitudinal direction of the mold R in order to image the entire outer periphery of the mold R. , Has a function of relatively moving in parallel.
  • the moving means moves the illumination device 22 and the color line CCD camera 24 in parallel with the fixed mold R along the longitudinal direction of the mold R.
  • the mold R may be translated with respect to the line CCD camera 24 along the longitudinal direction of the imaging range of the color line CCD camera 24.
  • the anodization of the surface of the roll-shaped aluminum substrate is performed so that the pore depth and the pitch between the pores of the fine concavo-convex structure of anodized alumina are 200 nm and 100 nm, respectively.
  • a mold R is obtained.
  • the mold R is attached to the rotating means of the inspection apparatus 20, and the surface of the anodized alumina of the rotating roll-shaped mold R is irradiated with light from the line illumination device 22, and the reflected light from the anodized alumina is applied to the polarizing plate.
  • the image is taken by the color line CCD camera 24 through 28.
  • the illumination device 22 and the color line CCD camera 24 are translated along the longitudinal direction of the mold R, the mold R is further rotated, and the entire outer circumference of the cylindrical anodized alumina is imaged.
  • the image data output from the color line CCD camera 24 for the entire outer circumference of the anodized alumina of the mold R is converted into an HSL color system for each pixel in the image processing device 26 as necessary, for each pixel.
  • Digital information of a color (hue (H)) expressed in 256 gradations is obtained.
  • the determination unit of the image processing device 26 acquires 256-tone RGB image signals for each pixel output from the color line CCD camera 24, and based on the acquired image signals, the shape of the fine concavo-convex structure of the anodized alumina It is determined whether the depth and inner diameter of the pores, the pitch between the pores, the thickness of the anodized alumina, and the like are within a predetermined range. Further, it is visually confirmed whether or not the flow pattern state of the mold R is within an allowable range on the image obtained from the image signal that has been processed to increase the contrast.
  • the conversion unit converts the RGB image signal into the HSL color system, and based on the digital information of the gradation hue (H), the fine uneven structure of the anodized alumina It is also possible to determine whether the shape (depth and inner diameter of pores, pitch between pores, etc.), the thickness of anodized alumina, and the like are within a predetermined range. In this case, it is visually confirmed whether or not the flow pattern state of the mold R is within an allowable range on the image obtained from the image signal that has been processed to increase the contrast.
  • NG pixels whose color gradation is outside the range of the preset gradation (threshold) are extracted, and the ratio of NG pixels in a predetermined region (for example, 2000 ⁇ 4000 pixels) is When a predetermined ratio (for example, 5%) is exceeded, it is determined that the mold R to be inspected is a defective product.
  • a predetermined ratio for example, 5%
  • RGB or HSL signal of the obtained image signal is subjected to Fourier transform, and it is determined whether or not the flow pattern of the mold R is within the allowable range depending on whether the intensity of the frequency band within the predetermined range is within the predetermined range. You can also.
  • the method for determining whether or not the flow pattern of the mold R is within a predetermined range is not limited to the above-described method.
  • the threshold value when performing determination using RGB image signals can be determined as follows. Three types of molds A, B, and C having a pore depth of anodized alumina and a pitch between pores of 200 nm and 100 nm, 100 nm and 100 nm, 200 nm, and 200 nm, respectively, are prepared.
  • the difference in G signal is the largest at 49.
  • the mold A is a good product and the color threshold is 40, the mold B can be determined as a defective product from the difference in the G signal.
  • the difference in the depth of the pores was 100 nm. However, if the difference in depth is smaller than 100 nm, the determination can be made by reducing the threshold value.
  • the difference in G signal is the largest at 17. For example, if the mold A is a non-defective product and the color threshold is 10, the mold C can be determined as a defective product from the difference in the G signal.
  • the pitch difference between the pores was 100 nm. However, when the pitch difference between the pores is smaller than 100 nm, it can be determined by reducing the threshold value.
  • the G signal The difference is as large as 32.
  • the mold B is a non-defective product and the color threshold is 30, the mold C can be determined as a defective product from the difference in the G signal.
  • the difference in the depth of the pores and the difference in the pitch between the pores were both 100 nm.
  • the difference in the depth of the pores and the difference in the pitch between the pores are smaller than 100 nm, It is possible to make a determination by reducing.
  • the color threshold can be set to 10, for example, so that the determination can be made with the G signal.
  • the shape of the fine concavo-convex structure of the anodized alumina (the depth and inner diameter of the pores, the pitch between the pores, etc.), the thickness of the anodized alumina, etc. are within a predetermined range using RGB image signals.
  • the threshold for determination is determined by paying attention to the G signal having the largest difference among the R, G, and B signals, but the method for determining the threshold is not limited to the above-described method.
  • the threshold value for determining using the HSL color system can be determined as follows. Three types of molds A, B, and C having a pore depth of anodized alumina and a pitch between pores of 200 nm and 100 nm, 100 nm and 100 nm, 200 nm, and 200 nm, respectively, are prepared.
  • the difference is 10.
  • the mold A is a non-defective product and the color threshold is 5
  • the mold B can be determined as a defective product.
  • the difference in the depth of the pores is 100 nm.
  • the determination can be made by reducing the threshold value.
  • the difference is 24.
  • the mold A is a non-defective product and the color threshold is 20
  • the mold C can be determined as a defective product.
  • the pitch difference between the pores was 100 nm. However, when the pitch difference between the pores is smaller than 100 nm, it can be determined by reducing the threshold value.
  • the depth of the pores and the pitch between the pores are both different, when the aspect ratio (depth of the pore / pitch between the pores) is 1.0 and the same mold B and C are compared, the difference is 14 It is.
  • the mold B is a good product and the color threshold is 10
  • the mold C can be determined as a defective product.
  • the difference in the depth of the pores and the difference in the pitch between the pores were both 100 nm.
  • the difference in the depth of the pores and the difference in the pitch between the pores are smaller than 100 nm, It is possible to make a determination by reducing.
  • the shape of fine concavo-convex structure of anodized alumina (depth and inner diameter of pores, pitch between pores, etc.), thickness of anodized alumina, etc. are within a predetermined range using the HSL color system
  • the method for determining the threshold value for determining is not limited to the method described above.
  • the image processing device 26 extracts NG pixels whose gradation is out of a preset range from the image signal obtained from the color line CCD camera 24, and the ratio of NG pixels in a predetermined region (for example, 2000 ⁇ 4000 pixels). However, when a predetermined ratio (for example, 5%) is exceeded, it is determined that the mold R to be inspected is a defective product.
  • a predetermined ratio for example, 5%
  • the degree of the flow pattern of the mold R is within a predetermined range, there is no defect such as a flaw, and the abnormality of the fine concavo-convex structure of the entire mold (the depth of the pore is generally deep or shallow, If the pitch of the pores is only wide or narrow as a whole, any one of the steps (a) to (f) is performed again on the mold R to repair the anodized alumina.
  • steps (a) to (f) may occur when the fine concavo-convex structure is partially abnormal rather than the entire mold, the flow pattern of the mold R is out of a predetermined range, or there are defects such as scratches. ) May not be repaired alone, the anodized alumina may be partially removed from the aluminum substrate, and the above steps (a) to (f) may be performed from the beginning.
  • the fine concavo-convex structure is repaired by removing the foreign matter by cleaning or the like. Also good. After the mold R is repaired, the inspection is performed again, and the repair process and the inspection process are repeated until the mold R becomes a non-defective product.
  • the mold R determined to be a non-defective product (not a defective product) by the inspection in the first inspection step is sent to a step (mold release treatment step) for attaching a release agent to the surface of the anodized alumina.
  • a mold release process is performed on the surface of the mold having the fine relief structure.
  • the release treatment method include a method of coating a silicone-based polymer or a fluorine polymer, a method of depositing a fluorine compound, a method of coating a fluorine-based or fluorine-silicone-based silane compound, and the like.
  • the mold R having the release agent attached to the surface in this way is sent to the second inspection step, and the attached state of the release agent is inspected.
  • the determination (second inspection step) as to whether the release agent adhesion state is within a predetermined range is performed in the same manner as the first inspection step using the inspection device 20 of FIG.
  • the mold R is irradiated with a linear light beam from the irradiation device 22, and the reflected light from the anodized alumina of the mold R is imaged by the color line CCD camera 24.
  • the determination unit of the image processing device 26 acquires 256-gradation RGB image signals for each pixel output from the color line CCD camera 24, and performs determination based on the acquired image signals. .
  • Each RGB average value (average value after the release process) of the image signal (color information) from the color line CCD camera 24 is calculated as an average value of each RGB value of the image signal (color information) before the release process.
  • the average value after the release processing is within a predetermined threshold range with respect to the average value of the image signal RGB before the release processing, it is determined that the release agent is in a good adhesion state.
  • the RGB image signal (color information) for each pixel of the anodized alumina output from the color line CCD camera 24 is converted into an HSL color system and converted into a color (hue (H)).
  • This hue is compared before and after the treatment, and when the value after the release treatment is within a predetermined threshold range with respect to the value before the release treatment, it is determined that the release agent is in a good adhesion state.
  • the structure to do may be sufficient.
  • the threshold value set based on the measurement data of the non-defective mold measured in advance is compared with the image signal after the mold release processing of the mold to be inspected, and the release agent of the mold R to be inspected is attached. It may be configured to determine whether or not the state is appropriate. In this case, the comparison may use data converted into the HSL color system or RGB data.
  • the threshold value for determining whether the release agent adhesion state is within a predetermined range is appropriately set according to the application of the mold.
  • the mold R determined in the second inspection step that the release agent adhesion state is defective is sent to the second repair step.
  • the second restoration step when the release agent is excessively adhered, the excess release agent is removed by cleaning or the like, and when the release agent is insufficient, the release treatment is performed again. Add release agent.
  • the mold R is inspected again.
  • the second inspection process and the second repair process are repeated until the release agent adheres well.
  • the mold manufactured in this way is, for example, sandwiching an active energy ray-curable resin composition between the mold and a transparent substrate film, and irradiating the active energy ray-curable resin composition with active energy rays.
  • the active energy ray-curable resin composition is cured to produce a sheet in which a cured layer having a shape complementary to the fine uneven structure on the mold surface (aluminum oxide surface) is formed on the base film (For example, refer to Patent Document 1).
  • the first inspection step and the second inspection step are performed separately.
  • the mold release processing step is performed without performing the first inspection step, and in the second inspection step, it is determined that the product is non-defective.
  • the measured value of the molded mold and the measured value of the mold to be inspected may be compared to determine both the shape of the fine concavo-convex structure and the state of adhesion of the release agent.
  • the mold inspection apparatus includes an irradiation unit that irradiates light on anodized alumina, an imaging unit that images light reflected from the anodized alumina by the irradiation unit, and an image captured by the imaging unit.
  • Image processing means for generating an output capable of determining the quality of the anodized alumina state and the adhesion state of the release agent based on the obtained color information and determining the state of the flow pattern in the anodized alumina layer; What is necessary is just to have, and it is not limited to what has the structure of the said embodiment.
  • the irradiating means is not limited to the illumination device 22 that irradiates the line-shaped light beam described above, and may be a planar illumination device or a spot illumination device. Moreover, you may combine auxiliary members, such as a diffusion plate, a reflecting plate, a cylindrical lens, and a condensing lens, with an illuminating device.
  • the image pickup means is not limited to the color line CCD camera 24 described above, and may be a combination of a monochrome line CCD camera and a color filter, and a part of data taken by the area CCD is taken out and taken by the line CCD. As described above, the data may be reconstructed. Moreover, the photodetector which measures a reflection spectrum may be sufficient.
  • the moving means described above is unnecessary.
  • a plurality of illumination devices and color line CCD cameras may be arranged along the longitudinal direction of the mold R, and the entire outer peripheral surface of the mold R may be imaged at once.
  • the polarizing plate 28 may be disposed between the irradiation unit and the anodized alumina, or may be disposed between the imaging unit and the anodized alumina and between the irradiation unit and the anodized alumina.
  • the method for determining that the mold R to be inspected is a defective product is not limited to the above-described method.
  • an area having a large gradation difference compared to the normal part is counted as one defect even if the size is small, and even if the gradation difference is small. Even when the area is large, the defect may be counted, and the quality may be determined based on the total number of defects counted.
  • the image signal is processed as an image signal of 256 gradations, but it is sufficient that the normal part and the abnormal part can be discriminated from the image signal.
  • the output from the processing device 26 may be an image signal having 512 gradations, 1024 gradations, or an analog signal. Further, the processing device 26 may output only pass / fail without outputting an image.
  • the determination unit may determine whether the product is non-defective or defective from the reflection spectrum measured by the photodetector.
  • the reflection spectrum may be measured in a visible wavelength range (for example, 380 nm to 780 nm) at regular intervals (for example, every 1 nm), may be measured in a range exceeding the visible wavelength, or may be a wavelength in a local range ( For example, it may be measured in the vicinity of 700 nm, or may be a combination measured in a plurality of local ranges of wavelengths (for example, in the vicinity of 400 nm and 700 nm).
  • a visible wavelength range for example, 380 nm to 780 nm
  • regular intervals for example, every 1 nm
  • may be measured in a range exceeding the visible wavelength or may be a wavelength in a local range ( For example, it may be measured in the vicinity of 700 nm, or may be a combination measured in a plurality of local ranges of wavelengths (for example, in the vicinity of 400 nm and 700 nm).
  • the image for the entire outer surface of the mold R is processed at once.
  • a method of processing in a plurality of small regions may be used.
  • the fine concavo-convex structure of the anodized alumina is inspected by the illumination device (irradiation means) and the color line CCD camera (imaging means). did.
  • Mold a was used as the mold.
  • a fluorescent light source FL20SS ⁇ EX-N / 18 manufactured by Panasonic was used at 40 kHz.
  • a CV-L107CL-3CCD manufactured by JAI Co. was used as a color line CCD camera.
  • MIL9 manufactured by Matrox was used as the image processing apparatus.
  • the angle ⁇ 1 of the optical axis L1 of the color line CCD camera with respect to the normal line N1 of the surface (tangent plane) of the anodized alumina of the mold a in the imaging range is changed between 5 ° and 85 °.
  • the surface of the mold a was imaged.
  • the distance between the mold a and the color line CCD camera was about 50 cm.
  • the illumination device was arranged so that the reflected light from the surface of the mold a entered the color line CCD camera.
  • the abnormal portion 31 of the fine concavo-convex structure of the anodized alumina is imaged black near the center of the image.
  • the image captured by changing the angle ⁇ 1 of the optical axis L1 between 10 ° and 5 ° to 85 ° was converted from an RGB image signal to a hue (H) signal by the image processing device 26.
  • 6 to 14 are graphs in which the hue difference with respect to the normal portion in each pixel of the line 32 including the abnormal portion 31 in FIG. 5 is plotted.
  • the hue (H) is usually expressed by 0 to 360 °, but 0 to 360 ° is expressed by 8 bit data of 0 to 255 in the image processing apparatus 26.
  • the vertical axis of each graph in FIGS. 6 to 14 is a value obtained by taking the difference from the hue (H) of the abnormal part with the hue (H) of the normal part as a reference.
  • the horizontal axis is a pixel.
  • the threshold value is set to a hue difference of 1.0 or more
  • FIG. 15 shows a plot of the maximum value of the hue difference between the normal part and the abnormal part in each image.
  • the angle ⁇ 1 of the optical axis L1 of the color line CCD camera with respect to the normal line N1 of the surface (tangent plane) of the anodized alumina of the mold in the imaging range is preferably 45 ° or more, more preferably 65 ° or more, It can be seen that 80 ° or more is more preferable, and 85 ° or more is particularly preferable.
  • Example 2 Next, an inspection of the fine concavo-convex structure of anodized alumina was performed using the inspection apparatus shown in FIG. Mold R was mold a.
  • the illumination device, the color line CCD camera, and the image processing device are the same as in Experimental Example 1.
  • the polarizing plate used was PL filter 52 S PL manufactured by Kenko Tokina.
  • the angle ⁇ 1 of the optical axis L1 of the color line CCD camera 24 with respect to the normal line N1 was fixed at 80 °.
  • the distance between the mold R and the color line CCD camera 24 was about 50 cm.
  • the line illumination device 22 was arranged so that the reflected light from the surface of the mold R entered the color line CCD camera 24.
  • An image captured by changing the angle ⁇ 2 of the polarization direction L2 of the polarizing plate with respect to the normal line N1 every 10 ° between ⁇ 90 ° and 90 ° is changed from an RGB image signal to a hue (H) signal by the image processing device 26.
  • one line including an abnormal part was cut out in the same manner as in the comparative example.
  • the position where one line is cut out is the same position as the line 102 including the abnormal part in FIG.
  • the hue (H) is 8-bit data of 0 to 255.
  • FIG. 16 shows a plot of the peak value of one line including the abnormal part cut out by the above procedure on the vertical axis and the angle ⁇ 2 of the polarization direction L2 of the polarizing plate with respect to the normal N1 on the horizontal axis.
  • the broken line in a figure is a peak value of the abnormal part when there is no polarizing plate.
  • the detection sensitivity is clearly higher in the range than without the polarizing plate, the detection sensitivity is further increased in the range of ⁇ 30 ° to 30 °, and the detection sensitivity is higher in the range of ⁇ 15 ° to 15 °. It can be seen that the detection sensitivity is highest at °.
  • the angle ⁇ 2 of the polarization direction L2 of the polarizing plate with respect to the normal line N1 in the mold a is preferably ⁇ 50 ° to 50 °, more preferably ⁇ 45 ° to 45 °, and ⁇ 30 ° to 30 °. Is more preferable, ⁇ 15 ° to 15 ° is particularly preferable, and 0 ° is most preferable.
  • the angle ⁇ 2 of the polarization direction L2 of the polarizing plate with respect to the normal line N1 of the surface (tangent plane) of the anodized alumina of the mold R in the imaging range is larger than 40 ° and smaller than 140 °.
  • the detection sensitivity of the abnormal part was equal or equal to or higher than when there was no polarizing plate, and the detection sensitivity increased as it approached 90 °.
  • Example 4 The inspection apparatus shown in FIG. 2 was used to inspect the state of adhesion of the release agent on the surface of the anodized alumina using the illumination device 22 (irradiation means) and the color line CCD camera 24 (imaging means). Mold R was mold b. The illumination device 22, the color line CCD camera 24, and the image processing device 26 are the same as in the comparative example.
  • the angle ⁇ 1 of the optical axis L1 of the color line CCD camera 24 with respect to the normal line N1 of the surface (tangent plane) of the anodized alumina of the mold b in the imaging range was 80 °.
  • the positional relationship between the mold b, the color line CCD camera 24, and the illumination device 22 is the same as in the comparative example.
  • FIG. 17 shows an image of one round of the surface of the mold in a state where the mold release process is not performed, and the image processing device 30 converts the RGB image signal into a hue (H) signal, and 1 around the center in the mold longitudinal direction. This is the result of extracting the circumference.
  • hue (H) is usually expressed by 0 to 360 °, but 0 to 360 ° is expressed by 8 bit data of 0 to 255 in the image processing apparatus 30.
  • TDP-8 manufactured by Nikko Chemicals Co., Ltd.
  • the mold b1 was obtained by performing the mold release process by drying.
  • FIG. 18 shows a result obtained by converting this imaging result from an RGB image signal to a hue (H) signal by the image processing device 26, and extracting one round around the center in the mold longitudinal direction.
  • FIG. 17 which is the result before the release processing, the hue value is around 150, but in FIG. 18 after the release processing, the hue has changed to around 146.
  • This mold was incorporated into the manufacturing apparatus 100 of FIG. 20 to manufacture a long member S having a fine concavo-convex structure on the surface.
  • the manufacturing apparatus 100 of FIG. 20 is an apparatus shown in Patent Document 1, and is a roll-shaped mold R and a transparent substrate that moves along the surface of the lower half of the roll-shaped mold R in synchronization with the rotation of the mold R.
  • the transparent substrate 102 and the active energy ray-curable resin composition are nipped between the roll 104 and the tank 104 that supplies the active energy ray-curable resin composition between the material 102 and the roll-shaped mold R.
  • Active energy rays that are installed below the roll-shaped mold R and irradiate the active energy ray-curable resin composition with the active energy rays through the nip roll 106, the pneumatic cylinder 108 that adjusts the nip pressure of the nip roll 106, and the roll-shaped mold R.
  • the peeling device 110 for peeling off the irradiation device 110 and the transparent substrate 102 having the cured resin layer 112 formed on the surface from the roll-shaped mold R. And a roll 114.
  • FIG. 19 shows the result of inspecting this mold b2 using the inspection apparatus shown in FIG. As shown in FIG. 19, in the mold b2, the hue value is in the vicinity of 150 before the release treatment, and the possibility that the release agent adheres well is high.
  • the mold b2 was attached to the manufacturing apparatus shown in FIG. 20 to obtain a member having a fine uneven structure on the surface.
  • a member having a target reflectance was obtained, and it was confirmed that both the adhesion of the release agent and the state of the anodized alumina were normal, and the desired member could be manufactured.
  • Example 5 Using the inspection apparatus shown in FIG. 2, the anodized alumina was inspected by the illumination device 22 (irradiation means) and the color line CCD camera 24 (imaging means). Mold R was mold c.
  • the line illumination device 22, the color line CCD camera 24, and the image processing device 26 are the same as those in the first embodiment.
  • the angle ⁇ 1 of the optical axis L1 of the color line CCD camera 24 with respect to the normal line N1 of the surface (tangent plane) of the anodized alumina of the mold R in the imaging range was 80 °.
  • the positional relationship between the mold R, the color line CCD camera 24, and the illumination device 22 is the same as in the first embodiment.
  • FIG. 21 shows an image in which a part of an image obtained by capturing one round of the surface of the mold R is cut out, the color is converted into monochrome, and the flow pattern state of the mold can be determined.
  • the flow pattern in the anodized alumina layer was imaged over the entire image, and by viewing this image, it was found that the degree of the flow pattern was outside the allowable range for the anodized alumina.
  • an optical sheet S having a fine concavo-convex structure on its surface was manufactured using the manufacturing apparatus 100 of FIG.
  • FIG. 22 is an image obtained by taking an image of the manufactured optical sheet S having a fine concavo-convex structure on the surface with a line CCD and cutting out a portion corresponding to FIG.
  • the manufactured optical sheet S having the fine uneven structure on the surface is a defective product, and the flow pattern of the mold R makes the optical sheet S a defective product. Was confirmed.
  • FIG. 21 and FIG. 22 show that the light and darkness are reversed, but the flow pattern has the same shape.
  • the fine concavo-convex structure is surfaced. It was also confirmed that the flow pattern-like appearance defects of the optical sheet S included in the optical sheet S can be detected by inspecting the anodized alumina.
  • Inspection device 22 Illumination device (irradiation means) 24: Color line CCD camera (imaging means) 26: Image processing apparatus (image processing means) 28: Polarizing plate R: Mold

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CN110678740A (zh) * 2017-05-26 2020-01-10 新东工业株式会社 检查装置以及铸造系统
JP2020139821A (ja) * 2019-02-27 2020-09-03 株式会社新菱 検査装置、検査システム及び検査方法

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KR102194261B1 (ko) 2019-08-01 2020-12-22 연세대학교 산학협력단 멀티포인트 편광 정보를 이용한 에지 및 표면 상태 검사 장치 및 방법
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