KR101593856B1 - 미세 요철 구조를 표면에 갖는 부재의 검사 장치 및 검사 방법, 양극 산화 알루미나층을 표면에 갖는 부재의 제조 방법, 및 광학 필름의 제조 방법 - Google Patents

미세 요철 구조를 표면에 갖는 부재의 검사 장치 및 검사 방법, 양극 산화 알루미나층을 표면에 갖는 부재의 제조 방법, 및 광학 필름의 제조 방법 Download PDF

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KR101593856B1
KR101593856B1 KR1020147005180A KR20147005180A KR101593856B1 KR 101593856 B1 KR101593856 B1 KR 101593856B1 KR 1020147005180 A KR1020147005180 A KR 1020147005180A KR 20147005180 A KR20147005180 A KR 20147005180A KR 101593856 B1 KR101593856 B1 KR 101593856B1
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South Korea
Prior art keywords
mold
alumina layer
image processing
inspection
color
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KR1020147005180A
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English (en)
Korean (ko)
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KR20140043487A (ko
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미츠후미 후쿠야마
데루타 이시마루
유우지 마츠바라
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미쯔비시 레이온 가부시끼가이샤
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Publication of KR20140043487A publication Critical patent/KR20140043487A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020147005180A 2011-09-26 2012-09-26 미세 요철 구조를 표면에 갖는 부재의 검사 장치 및 검사 방법, 양극 산화 알루미나층을 표면에 갖는 부재의 제조 방법, 및 광학 필름의 제조 방법 KR101593856B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JPJP-P-2011-209705 2011-09-26
JP2011209706 2011-09-26
JP2011209705 2011-09-26
JP2011209707 2011-09-26
JPJP-P-2011-209707 2011-09-26
JPJP-P-2011-209706 2011-09-26
PCT/JP2012/074726 WO2013047593A1 (ja) 2011-09-26 2012-09-26 微細凹凸構造を表面に有する部材の検査装置および検査方法、陽極酸化アルミナ層を表面に有する部材の製造方法、及び光学フィルムの製造方法

Publications (2)

Publication Number Publication Date
KR20140043487A KR20140043487A (ko) 2014-04-09
KR101593856B1 true KR101593856B1 (ko) 2016-02-12

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KR1020147005180A KR101593856B1 (ko) 2011-09-26 2012-09-26 미세 요철 구조를 표면에 갖는 부재의 검사 장치 및 검사 방법, 양극 산화 알루미나층을 표면에 갖는 부재의 제조 방법, 및 광학 필름의 제조 방법

Country Status (5)

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JP (1) JP5449570B2 (zh)
KR (1) KR101593856B1 (zh)
CN (1) CN103842803B (zh)
TW (1) TWI529385B (zh)
WO (1) WO2013047593A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102194261B1 (ko) 2019-08-01 2020-12-22 연세대학교 산학협력단 멀티포인트 편광 정보를 이용한 에지 및 표면 상태 검사 장치 및 방법

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* Cited by examiner, † Cited by third party
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JP6314798B2 (ja) * 2014-11-12 2018-04-25 Ｊｆｅスチール株式会社 表面欠陥検出方法及び表面欠陥検出装置
JP6465345B2 (ja) * 2014-12-26 2019-02-06 株式会社荏原製作所 研磨パッドの表面性状測定方法および装置
PL3761070T3 (pl) * 2015-11-16 2022-11-21 Dexerials Corporation Korpus optyczny, matryca, oraz sposób wytwarzania korpusu optycznego
EP3546927A4 (en) * 2017-05-26 2020-09-09 Sintokogio, Ltd. INSPECTION DEVICE AND CASTING SYSTEM
JP7288273B2 (ja) * 2019-02-27 2023-06-07 株式会社新菱 検査装置、検査システム及び検査方法
KR20210093682A (ko) * 2020-01-20 2021-07-28 (주)포인트엔지니어링 양극산화막 구조체의 제조 방법 및 양극산화막 구조체

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JP2008249386A (ja) * 2007-03-29 2008-10-16 Dainippon Screen Mfg Co Ltd 欠陥検査装置および欠陥検査方法
WO2011111669A1 (ja) * 2010-03-08 2011-09-15 シャープ株式会社 離型処理方法、型、反射防止膜の製造方法、離型処理装置および型の洗浄乾燥装置

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GB9912081D0 (en) * 1999-05-25 1999-07-21 Secr Defence Brit Multilayer surface
US7586607B2 (en) * 2006-04-21 2009-09-08 Rudolph Technologies, Inc. Polarization imaging
JP2010015109A (ja) * 2008-07-07 2010-01-21 Sony Corp 光学フィルムおよびその製造方法、防眩性偏光子、ならびに表示装置
JP5381040B2 (ja) * 2008-11-21 2014-01-08 大日本印刷株式会社 モスアイ型反射防止フィルム製造用金型の評価方法、製造方法及び再生方法並びにモスアイ型反射防止フィルムの製造方法
JP2011047681A (ja) * 2009-08-25 2011-03-10 Sumitomo Chemical Co Ltd 防眩処理用金型の検査装置
JP5049405B2 (ja) * 2010-03-25 2012-10-17 三菱レイヨン株式会社 陽極酸化アルミナの製造方法、検査装置および検査方法
RU2515123C1 (ru) * 2010-05-19 2014-05-10 Шарп Кабусики Кайся Способ контроля формы

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249386A (ja) * 2007-03-29 2008-10-16 Dainippon Screen Mfg Co Ltd 欠陥検査装置および欠陥検査方法
WO2011111669A1 (ja) * 2010-03-08 2011-09-15 シャープ株式会社 離型処理方法、型、反射防止膜の製造方法、離型処理装置および型の洗浄乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102194261B1 (ko) 2019-08-01 2020-12-22 연세대학교 산학협력단 멀티포인트 편광 정보를 이용한 에지 및 표면 상태 검사 장치 및 방법

Also Published As

Publication number Publication date
TWI529385B (zh) 2016-04-11
JP5449570B2 (ja) 2014-03-19
WO2013047593A1 (ja) 2013-04-04
TW201321740A (zh) 2013-06-01
JPWO2013047593A1 (ja) 2015-03-26
CN103842803A (zh) 2014-06-04
CN103842803B (zh) 2016-07-06
KR20140043487A (ko) 2014-04-09

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