WO2013039017A1 - Écran tactile, procédé de fabrication d'écran tactile et dispositif d'affichage - Google Patents

Écran tactile, procédé de fabrication d'écran tactile et dispositif d'affichage Download PDF

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Publication number
WO2013039017A1
WO2013039017A1 PCT/JP2012/072991 JP2012072991W WO2013039017A1 WO 2013039017 A1 WO2013039017 A1 WO 2013039017A1 JP 2012072991 W JP2012072991 W JP 2012072991W WO 2013039017 A1 WO2013039017 A1 WO 2013039017A1
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Prior art keywords
electrode
touch panel
insulating layer
electrodes
interlayer insulating
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PCT/JP2012/072991
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English (en)
Japanese (ja)
Inventor
美崎　克紀
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シャープ株式会社
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Publication of WO2013039017A1 publication Critical patent/WO2013039017A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • the present invention relates to a touch panel, a touch panel manufacturing method, and a display device with a touch panel.
  • a touch panel implements a function that allows a finger or an input pen as an input means to touch a display surface and is selected according to the contact position.
  • Display devices have been generalized.
  • a resistance film method (a method in which an input position is detected by contact between an upper conductive substrate and a lower conductive substrate when pressed) or capacitance
  • the system (method of detecting the input position by detecting the change in the capacity of the touched place) has been mainly used.
  • the capacitive touch panel is capable of detecting the contact position with a simple operation and is capable of multi-touch (detecting multiple touch positions simultaneously). It has become.
  • FIG. 13 shows an example of a capacitive touch panel.
  • the drive electrode line 101D and the sense electrode line 101S that are thin and have high detection performance are formed on the same plane.
  • 1 is a diagram showing a schematic configuration of a single-layer mutual capacitance touch panel 100.
  • FIG. 13 shows a touch detection area on the substrate 105.
  • diamond-shaped unit electrodes 101U are arranged so as to be adjacent to each other in the horizontal direction in the figure, and each unit electrode 101U is connected.
  • a plurality of electrically connected drive electrode lines 101D are formed in parallel with each other in the vertical direction in the figure through the portion 101C, while the rhomboid unit electrode 101U 'is in the vertical direction in the figure.
  • a plurality of sense electrode lines 101S arranged adjacent to each other and electrically connected to each unit electrode 101U ′ via the first bridge electrode 103 are formed in parallel to each other in the horizontal direction in the figure. ing.
  • the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are provided so as to be electrically separated from each other and intersect each other.
  • the unit electrode 101U and the unit electrode 101U ′ are formed on the same plane so as not to overlap each other in a plan view.
  • the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the first bridge electrode 103 are all made of ITO (Indium Tin) which is a transparent conductive layer. Oxide) thin film.
  • the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C are formed in the same layer on the same plane.
  • the first bridge electrode 103 is formed through the interlayer insulating film 102 formed on the connection portion 101C at a place where the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S intersect each other. Therefore, the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are electrically separated from each other.
  • a photosensitive acrylic resin-based organic interlayer insulating film is used as the interlayer insulating film 102 in consideration of the transmittance in the touch detection region.
  • Japanese Patent Publication Japanese Patent Laid-Open No. 11-24101 (published Jan. 29, 1999)”
  • the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is Since the taper shape is difficult to control, the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected in the subsequent process.
  • FIG. 15 (a) to 15 (d) are diagrams for schematically explaining the manufacturing process of the conventional touch panel 100.
  • FIG. 15 (a) shows a unit electrode 101U (not shown) and a unit electrode 101U. ′ And the connecting portion 101C are formed of the same ITO layer, and
  • FIG. 15B shows the formation of the interlayer insulating film 102 so as to cover the connecting portion 101C and a part of the unit electrode 101U ′.
  • the process to perform is shown.
  • the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is difficult to control the taper shape, as shown in FIG. It is easy to form so as to have a relatively sharp slope.
  • FIG. 15C shows a step of forming the first bridge electrode 103 made of an ITO layer on the interlayer insulating film 102. As shown in FIG. 15C, the end portion (relatively sharp) of the interlayer insulating film 102 is shown. In the portion having an inclination, the first bridge electrode 103 is disconnected.
  • FIG. 15D shows a process for forming the protective film 104.
  • the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected, so that the yield is not so good. .
  • Patent Document 1 describes a configuration in which an interlayer insulating film 117 having a gently inclined tapered portion 117c is provided at an end portion 117b of the interlayer insulating film 117, as shown in FIG. ing.
  • the interlayer insulating film 117 described in Patent Document 1 is not for forming an electrode layer that remains permanently and without a step on the gently inclined tapered portion 117c of the interlayer insulating film 117.
  • the electrode layer temporarily formed on the interlayer insulating film 117 is reliably removed without residue using the gently inclined tapered portion 117c of the interlayer insulating film 117.
  • the gently sloping tapered portion 117c of the interlayer insulating film 117 is disposed so as to be located between the mounting terminals 116a.
  • the electrode layer formed on the interlayer insulating film 117 is removed without residue, so that a short circuit between the mounting terminals 116a can be reliably prevented.
  • the insulating layer 111 is a layer formed on the entire surface as the lowermost layer on the substrate.
  • the gently sloping tapered portion 117c of the interlayer insulating film 117 described in Patent Document 1 utilizes the shape of the electrode layer temporarily formed on the interlayer insulating film 117. Since it is intended to remove without any residue and not to form an electrode layer that remains permanently on the upper portion thereof, the gently inclined tapered portion 117c of the interlayer insulating film 117 is formed as shown in FIG. In the conventional touch panel 100 shown in FIG. 1, it cannot be used to form the first bridge electrode 103 that remains permanently.
  • the present invention has been made in view of the above problems, a touch panel with improved yield in the manufacturing process, a method for manufacturing a touch panel with improved yield, and a display with a touch panel with improved yield in the manufacturing process. It is an object to provide a device.
  • the touch panel of the present invention has a plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction.
  • a touch panel formed on an insulating substrate such that the electrodes cross each other, wherein the plurality of first electrodes and the plurality of second electrodes are electrically separated, and the first electrode
  • Each of the second electrodes is formed by electrically connecting a plurality of unit electrodes having a predetermined shape, and the unit electrode of the first electrode and the unit electrode of the second electrode overlap each other in plan view.
  • the unit electrode of the first electrode and the unit electrode of the second electrode which are formed on the same plane so as to be adjacent to each other and electrically connect the adjacent unit electrodes in each of the first electrodes.
  • a first connection portion formed by a layer and a second connection portion formed by a layer different from the first connection portion for electrically connecting adjacent unit electrodes in each of the second electrodes; And at the intersection of the first electrode and the second electrode, either the first connection portion or the second connection portion is formed on the other via an insulating layer, and the insulation
  • the first connection portion is formed on the layer, the thickness of at least part of both end portions in the second direction of the insulating layer is continuously reduced as the end portion is approached.
  • the second connection portion is formed on the insulating layer, the film thickness of at least a part of both end portions in the first direction of the insulating layer continuously decreases as the end portion is approached. It is characterized by being formed.
  • the insulating layer formed between the first connection portion and the second connection portion at the intersection of the first electrode and the second electrode is formed on the insulating layer.
  • the connection portion is formed, it is formed so that the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as the end portion is approached, and on the insulating layer
  • the second connection portion is formed, the thickness of at least a part of both end portions in the first direction of the insulating layer is formed so as to continuously decrease toward the end portion.
  • the both end portions in the first direction or both end portions in the second direction of the insulating layer there are portions where the film thickness gradually changes.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the display device of the present invention is characterized by including the touch panel and a display panel in order to solve the above-described problems.
  • a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • the touch panel manufacturing method of the present invention includes a plurality of first electrodes arranged in a first direction and a plurality of electrodes arranged in a second direction different from the first direction.
  • the second electrode is formed on the insulating substrate so as to intersect with each other, and a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode, and in the second electrode
  • the apex angle is 9
  • the insulating layer In the case where the film thickness of at least a part of both end portions in the second direction is formed so as to decrease continuously as approaching the end portion, and the connection portion is formed on the insulating layer, It is characterized in that it is formed such that the film thickness of at least a part of both end portions in the first direction decreases continuously as it approaches the end portions.
  • the amount of light wraps around during exposure, but as the distance from the apex angle goes away, the amount of wrap around light gradually decreases.
  • the film it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
  • the plurality of first electrodes and the plurality of second electrodes are electrically separated, and each of the first electrode and the second electrode includes a plurality of the first electrodes and the plurality of second electrodes.
  • the unit electrode of the predetermined shape is electrically connected, and the unit electrode of the first electrode and the unit electrode of the second electrode are the same so as not to overlap each other in plan view and adjacent to each other
  • a first electrode formed on a plane and electrically connected between adjacent unit electrodes of each of the first electrodes is formed of a layer different from the unit electrode of the first electrode and the unit electrode of the second electrode.
  • the display device of the present invention is configured to include the touch panel and the display panel.
  • the method for manufacturing a touch panel electrically connects a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode and adjacent unit electrodes in the second electrode.
  • a first step of forming a portion, a second step of forming a bridge electrode for electrically connecting adjacent unit electrodes in the first electrode, and an intersection of the first electrode and the second electrode And a third step of forming an insulating layer so as to cover the connection portion or the bridge electrode, and the third step has a triangular light shielding region whose apex angle is 90 degrees or less.
  • both end portions in the second direction of the insulating layer are reduced.
  • at least a part of the film thickness is formed so as to decrease continuously as it approaches the end portion, and when the connection portion is formed on the insulating layer, both end portions in the first direction of the insulating layer In this method, at least a part of the film thickness is continuously reduced as it approaches the end.
  • a touch panel with improved yield in the manufacturing process a touch panel manufacturing method with improved yield, and a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • FIG. 5 is a diagram for explaining an exposure / development process when a negative interlayer insulating film is used in the manufacturing process of the touch panel according to the embodiment of the present invention shown in FIG. 1. It is a figure which shows schematic structure of the terminal part and wiring formation area of the touchscreen of one Embodiment of this invention shown in FIG. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows an example of 2D liquid crystal display device provided with the touchscreen of one embodiment of this invention.
  • FIG. 1 shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention. It is a figure which shows an example of 3D liquid crystal display device provided with the touch panel of one embodiment of this invention. It is a figure which shows schematic structure of the touchscreen of other one Embodiment of this invention. It is a figure which shows schematic structure of the touchscreen of further another embodiment of this invention. It is a figure which shows the cross section of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows schematic structure of the conventional touch panel. It is a figure which shows the cross section of the B1-B1 'line of the conventional touch panel shown in FIG. It is a figure which shows the manufacturing process of the conventional touch panel shown in FIG. It is a figure which shows the interlayer insulation film described in patent document 1.
  • FIG. 1 shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention
  • FIG. 1 is a diagram showing a schematic configuration of the touch panel 1.
  • the plurality of drive electrode lines 101D arranged on the substrate 105 are formed on the substrate 105 so as to cross each other.
  • a connecting portion 101C (second connecting portion) that connects adjacent unit electrodes 101U in the drive electrode line 101D and a first bridge that electrically connects adjacent unit electrodes 101U ′ in the sense electrode line 101S.
  • the interlayer insulating film 2 is formed between the electrode 103 (first connecting portion) and the both ends of the interlayer insulating film 2 extending in the vertical direction in the drawing, which is the direction in which the first bridge electrode 103 extends.
  • a notch 3 (taper-shaped forming portion) that continuously decreases as the film thickness of the interlayer insulating film 2 approaches the end is formed based on FIG. 13 to FIG. It is different from the conventional touch panel 100 described above, and other configurations are as described in the touch panel 100.
  • members having the same functions as those shown in the drawing of the touch panel 100 are denoted by the same reference numerals and description thereof is omitted.
  • the film thickness of the interlayer insulating film 2 is at a part of both ends in the vertical direction in the drawing of the interlayer insulating film 2 in the direction in which the first bridge electrode 103 extends.
  • the notch portion 3 it is possible to suppress the occurrence of disconnection (disconnection) in the step of forming the first bridge electrode 103 on the interlayer insulating film 2 after forming the interlayer insulating film 2. Therefore, the yield can be improved in the manufacturing process of the touch panel 1.
  • FIG. 2 is a view showing a cross section taken along line B1-B1 ′ of the touch panel 1 shown in FIG.
  • the connecting portion 101C for connecting adjacent unit electrodes 101U (not shown) in the drive electrode line 101D and a part of the adjacent unit electrode 101U ′ in the sense electrode line 101S are covered.
  • An interlayer insulating film 2 is formed.
  • a portion formed on the unit electrode 101U ′ of the sense electrode line 101S is a notch portion 3 (taper-shaped forming portion) that continuously decreases as the film thickness approaches the end portion. It has become.
  • the first bridge electrode 103 for electrically connecting the adjacent unit electrodes 101U ′ in the sense electrode line 101S is cut on the interlayer insulating film 2 by using the notch 3 as described above. It can be formed without.
  • a protective film 104 that is an organic layer is formed so as to cover the unit electrode 101U ′ and the first bridge electrode 103.
  • the unit electrode 101U of the illustrated drive electrode line 101D and the unit electrode 101U ′ of the sense electrode line 101S are formed so as to be adjacent to each other, and there is a capacitance C F between the adjacent unit electrodes 101U and 101U ′.
  • the capacitance C F is different between when the detection object such as a finger or a pen is not touched and when it is touched.
  • the non-touch capacity becomes larger than the touch capacity (C F_untouch > C F_touch ). Using this principle, the touch position can be detected.
  • Signals having a predetermined waveform are sequentially input from a later-described terminal portion (not shown) electrically connected to the drive electrode line 101D, and a later-described terminal portion (not shown) electrically connected to the sense electrode line 101S. ), A detection signal is output.
  • a negative photosensitive acrylic resin is used to form the interlayer insulating film 2 having the notches 3.
  • an interlayer insulation formed on the entire surface of the substrate 105 using a mask 4 having an opening 5 and a triangular light shielding region 6 having an apex angle A of 90 degrees or less.
  • the triangular notch 3 can be formed in the interlayer insulating film 2 by exposing the film 2 and then developing the film.
  • the notch 3 appears to have a triangular notch formed in the interlayer insulating film 2 in plan view, but its cross-sectional shape is as shown in FIG. It has a tapered shape in which the film thickness continuously decreases as it approaches the end.
  • the cross-sectional shape of the notch 3 is the above-described taper shape.
  • the amount of sneaking of light is large at the time of exposure near the apex angle A of the triangular light shielding region 6 of the mask 4, it is far from the apex angle A. This is because the amount of sneak of light gradually decreases as the process proceeds, and in this embodiment, since the negative photosensitive acrylic resin is used, the film thickness of the interlayer insulating film 2 is easily increased to the apex angle A.
  • a taper-shaped portion that continuously decreases from the end toward the end can be formed.
  • the notch 3 is formed using a negative photosensitive acrylic resin as the interlayer insulating film 2, but the present invention is not limited to this, and the interlayer insulating film 2 is not limited thereto. May not have photosensitivity.
  • the interlayer insulating film has no photosensitivity, for example, it is formed only of an inorganic transparent insulating layer, a negative photosensitive resin (resist) is used to form the above-mentioned inorganic transparent insulating layer. Then, a resist film having a portion (inclined portion) having the same shape as the cutout portion 3 is formed.
  • a negative photosensitive resin resist
  • the resist film In the resist film, a portion having the same shape as the cutout portion 3 is formed thinner than the other portions. Therefore, when the resist film is removed by etching, the same shape as the cutout portion 3 in the resist film is formed. When the portion is removed first and further etched, the inorganic transparent insulating layer is formed to have a portion (inclined portion) having the same shape as the cutout portion 3. Then, the resist film remaining on the inorganic transparent insulating layer may be peeled off.
  • the resist film may be transparent or non-transparent.
  • the interlayer insulating film is composed of two layers of an inorganic transparent insulating layer having no photosensitivity and a photosensitive negative photosensitive acrylic resin layer formed on the inorganic transparent insulating layer.
  • the negative photosensitive acrylic resin layer is formed so as to have a portion (inclined portion) having the same shape as the cutout portion 3.
  • the negative photosensitive acrylic resin layer since the portion having the same shape as the notch 3 is formed thinner than the other portions, the negative photosensitive acrylic resin layer is removed by etching.
  • the inorganic transparent insulating layer has the same shape as the notch 3 ( (Inclined portion).
  • ashing is preferably performed when the inorganic transparent insulating layer becomes an overhang shape by side etching.
  • the triangular notch 3 can be formed also in an interlayer insulating film having no photosensitivity or an interlayer insulating film having a layer having no photosensitivity.
  • the notch 3 in the interlayer insulating film 2 is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed.
  • the present invention is not limited to this.
  • the notch portion 3 in the interlayer insulating film 2 is adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the unit electrode 101U is formed.
  • the formation area thereof can be reduced.
  • the notch 3 in the interlayer insulating film 2 may be formed asymmetrically in the above direction.
  • the notch 3 in the interlayer insulating film 2 is formed at substantially the center of both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed.
  • the present invention is not limited to this, and when the connection portion 101C is formed on the interlayer insulating film as in the third embodiment to be described later, the notch portion 3 in the interlayer insulating film 2 is driven. It can also be formed at substantially the center of both end portions in the direction in which the unit electrode 101U adjacent to the electrode line 101D is formed.
  • the notch 3 of the interlayer insulating film 2 is formed to have a taper angle of 45 degrees.
  • the taper angle of the notch 3 of the interlayer insulating film 2 may be 70 degrees or less, and more preferably 45 degrees or less.
  • FIG. 4 is a diagram showing a wiring formation region R2 of the touch panel 1 shown in FIG.
  • a plurality of drive electrode lines 101D and a plurality of sense electrode lines 101S are connected to a plurality of terminal portions via metal wirings 106, respectively.
  • connection electrode 101E for electrically connecting the drive electrode line 101D and the metal wiring 106, and the sense electrode line 101S and the metal wiring 106 are electrically connected to the wiring formation region R2.
  • the present invention is not limited to this.
  • connection electrode 101E, the relay electrode 101G, and the terminal portion 101F are formed of an ITO layer that is the same layer as the unit electrodes 101U and 101U ′ and the connection portion 101C.
  • connection electrode 101E connected to the drive electrode line 101D and the terminal portion 101F are directly electrically connected by the metal wiring 106, so the drive electrode line 101D is connected to the terminal. It can be electrically connected to the portion 101F.
  • the relay electrode 101G and the terminal portion 101F that are electrically separated from the sense electrode line 101S are directly electrically connected by the metal wiring 106, the relay electrode 101G is electrically connected to the terminal portion 101F. Can be connected.
  • the sense electrode line 101S and the relay electrode 101G are electrically connected to each other through the through hole 106C in the metal wiring 106 formed on the relay electrode 101G and the interlayer insulating film formed on the relay electrode 101G and the metal wiring 106. 2 and the second bridge electrode 103A formed of the same layer as the first bridge electrode 103 through the through hole 2C. Therefore, the sense electrode line 101S can be electrically connected to the terminal portion 101F.
  • the ground wiring 106X that serves to shield the electric field of the wiring on the outside is provided in the horizontal direction in the drawing. Since it is provided at a position closest to the sense electrode line 101S so as to extend, the relay electrode 101G is used.
  • FIG. 5A to 5E show the manufacturing process of the touch panel 1, and FIG. 5A shows the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the terminal portion 101F.
  • FIG. 5B shows a process of forming a metal wiring 106 having a three-layer structure of MoNb / Al / MoNb, and a wiring formation region R2 in the vicinity of the terminal portion 101F.
  • the metal wiring 106 is provided on the terminal portion 101F, and the terminal portion 101F formed at one end portion outside the wiring formation region R2 is exposed to be electrically connected to the outside.
  • FIG. 5C shows a process of forming the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion
  • FIG. FIG. 5 shows a step of forming the first bridge electrode 103 on the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion)
  • FIG. 5E shows a step of forming the protective film 105.
  • the terminal portion 101F formed at one end portion outside the wiring formation region R2 is electrically connected to the outside, the protective film 105 is not formed thereon and is exposed. Yes.
  • a liquid crystal display device will be described as an example of the display device having the touch panel described above.
  • FIG. 6 is a diagram illustrating an example of the 2D liquid crystal display device 10 including a touch panel.
  • a touch panel 61 corresponding to the touch panel described above includes a substrate 105, a substrate 61b provided so as to face the substrate 105, and between the substrates, and either of the substrates 105 and 61b. And a plurality of films 61a formed on one side.
  • the liquid crystal panel 62 includes a TFT substrate 62a, a color filter substrate 62b, a sealing material 62c for bonding the two substrates, a liquid crystal layer 62d sealed between the bonded substrates, and a TFT substrate 62a. And a polarizing plate 62e provided on the opposite side of the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f provided on the opposite side of the surface in contact with the liquid crystal layer 62d in the color filter substrate 62b.
  • touch panel 61 and the liquid crystal panel 62 are not shown, they can be bonded together using an adhesive layer (not shown) or the like to complete the 2D liquid crystal display device 10 with a touch panel.
  • FIG. 7 is a diagram illustrating an example of the liquid crystal display device 20 including an on-cell type touch panel.
  • a plurality of films 61a are formed on the surface opposite to the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f is formed thereon.
  • 6 is different from the 2D liquid crystal display device 10 having the touch panel shown in FIG. 6 in that a substrate 61b is formed.
  • the liquid crystal display device 20 can be thinned by one less substrate provided on the touch panel side.
  • FIG. 8 is a diagram illustrating an example of a 3D liquid crystal display device 30 including a touch panel.
  • the 3D liquid crystal display device 30 is provided with a switch liquid layer panel 63 between the touch panel 61 and the liquid crystal panel 62 in addition to the touch panel 61 and the liquid crystal panel 62.
  • a lower switch substrate 63a and an upper switch substrate 63b are bonded together by a sealing material 63c, and a liquid crystal layer 63d is provided between the two substrates.
  • a common electrode 64 is formed on the surface of the lower switch substrate 63a that is in contact with the liquid crystal layer 63d, while a plurality of segment electrodes are formed on the surface of the upper switch substrate 63b that is in contact with the liquid crystal layer 63d. 65 is formed.
  • a polarizing plate 63e is provided on the surface in contact with the touch panel 61, and an adhesive layer 66 is formed on the surface in contact with the liquid crystal panel 62 in the lower switch substrate 63a. ing.
  • the switch liquid crystal panel 63 plays a role of alternately displaying a right image and a left image having binocular parallax displayed by the liquid crystal panel 62 at a predetermined cycle.
  • the liquid crystal display device provided with the touch panel has been described as an example.
  • the type of the display unit is not limited to the liquid crystal panel, and for example, an organic EL display provided with the touch panel. Of course, it may be a device or the like.
  • the notch 3 in the interlayer insulating film 2 is the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed (vertical direction in the figure).
  • the notch 3a in the interlayer insulating film 2a is adjacent to the sense electrode line 101S of the interlayer insulating film 2a.
  • This embodiment is different from the first embodiment in that a plurality of unit electrodes 101U ′ are provided at both ends in the direction in which the unit electrode 101U ′ is formed (vertical direction in the drawing). Just as you did.
  • members having the same functions as those shown in the drawings of the first embodiment are given the same reference numerals, and descriptions thereof are omitted.
  • FIG. 9 is a diagram showing a schematic configuration of the touch panel 1a.
  • the notch portions 3a in the interlayer insulating film 2a are respectively formed at both end portions in the direction in which the unit electrode 101U 'adjacent to the sense electrode line 101S of the interlayer insulating film 2a is formed. Three are provided.
  • the three cutout portions 3a in the interlayer insulating film 2a are formed at one end of the interlayer insulating film 2a, for example, the first bridge electrode 103 or the Even when misalignment occurs when forming the connection portion 101C, it is possible to establish that a part of the first bridge electrode 103 and a part of the connection portion 101C are formed on the notch 3a of the interlayer insulating film 2a. Get higher.
  • the number of the notched portions 3a is not limited to this. There is no limit.
  • the notch 3a in the interlayer insulating film 2a is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed.
  • the present invention is not limited to this.
  • the connection portion 101C is formed on the interlayer insulating film 2a as in the third embodiment to be described later, the notch portion 3a in the interlayer insulating film 2a is replaced with a unit adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the electrode 101U is formed.
  • the notch 3a in the interlayer insulating film 2a can be formed asymmetrically in the above direction.
  • connection portion 101C is formed on interlayer insulating film 2b, and adjacent to drive electrode line 101D of interlayer insulating film 2b in the direction in which connection portion 101C extends. It differs from the first and second embodiments in that notches 3b in the interlayer insulating film 2b are provided at both ends in the direction in which the unit electrode 101U is formed (left and right in the figure). Other configurations are as described in the first and second embodiments.
  • members having the same functions as those shown in the drawings of Embodiment 1 and Embodiment 2 described above are given the same reference numerals, and descriptions thereof are omitted.
  • FIG. 10 is a diagram showing a schematic configuration of the touch panel 1b.
  • the notch 3b in the interlayer insulating film 2b is in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed (left-right direction in the figure).
  • a single object is provided in the approximate center of both ends.
  • the touch panel 1b can be realized.
  • FIG. 11A is a diagram showing a cross section taken along line B1-B1 ′ of touch panel 1b shown in FIG. 10, and FIG. 11B is a cross section taken along line C1-C1 ′ of touch panel 1b shown in FIG. FIG.
  • FIG. 11A shows both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2b is formed. In the present embodiment, both end portions in this direction are shown at both ends. Since the notched portion 3b is not provided, a step break (disconnection) occurs in the unit electrode 101U ′ adjacent to the sense electrode line 101S formed on the interlayer insulating film 2b.
  • the adjacent unit electrodes 101U ′ of the sense electrode line 101S are electrically connected to each other using the first bridge electrode 103 formed in the lower layer of the interlayer insulating film 2b. Therefore, there is no problem even if the unit electrode 101U ′ adjacent to the sense electrode line 101S formed at both ends of the interlayer insulating film 2b is disconnected (disconnected).
  • FIG. 11B shows both end portions in the direction (left and right direction in the figure) in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed.
  • the notches 3b are provided at both ends in this direction, no step break (disconnection) occurs in the unit electrode 101U adjacent to the drive electrode line 101D formed on the interlayer insulating film 2b.
  • connection portion 101C on the interlayer insulating film 2b after the interlayer insulating film 2b is formed, disconnection (disconnection) hardly occurs, so that the touch panel 1b with improved yield in the manufacturing process is realized. can do.
  • FIG. 12A to 12E show the manufacturing process of the touch panel 1b.
  • a cross section taken along line B2-B2 'of the formation region R2 is shown.
  • FIG. 12A shows a process of forming the first bridge electrode 103 and the terminal portion 101F with the same ITO layer
  • FIG. 12B has a three-layer structure of MoNb / Al / MoNb.
  • the process for forming the metal wiring 106 is shown.
  • the metal wiring 106 is provided on the terminal portion 101F.
  • the terminal portion 101F formed at one end on the outer side of the wiring formation region R2 is exposed to be electrically connected to the outside as in the case shown in FIG.
  • FIG. 12C shows a process of forming an interlayer insulating film 2b having a notch portion 3b (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion. These are formed only at both ends in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed. As shown in the drawing, the interlayer insulating film 2b is not formed in the portion where the metal wiring 106 is provided on the terminal portion 101F in the wiring formation region R2.
  • FIG. 12D shows a process of forming the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C with the same ITO layer
  • FIG. 12E shows a process of forming the protective film 104. Yes.
  • the portions formed such that the film thickness continuously decreases as approaching the end portions are formed symmetrically at the corresponding end portions.
  • the portion formed so as to continuously decrease as the film thickness approaches the end portion (portion formed in a gently tapered shape) Since it is formed symmetrically, the first connection part and the second connection part can be formed in a straight line on the insulating layer, so the formation area of the first connection part and the second connection part Can be reduced.
  • a portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is formed at a substantially central portion of the corresponding end portion.
  • a portion formed so as to continuously decrease as the film thickness approaches the end portion Since it is formed in the central part, for example, even when a positional shift occurs when forming the first connection part or the second connection part on the insulating layer, a part of the first connection part or the above The probability that a part of the second connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes high.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • a plurality of portions at one end portion are formed in the insulating layer so as to continuously decrease as the film thickness approaches the end portion.
  • a portion (a portion formed in a gently tapered shape) formed so as to continuously decrease as the film thickness approaches the end portion is a plurality of portions at one end portion. For example, even when misalignment occurs when forming the first connection portion or the second connection portion on the insulating layer, a part of the first connection portion or the second connection portion is formed. The probability that a part of the connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes higher.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the second connection portion is formed on the first connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the first direction is continuously reduced as approaching the end portions.
  • the first connection portion is formed on the second connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the second direction is continuously reduced as the end portion is approached.
  • a taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 70 degrees or less.
  • the taper angle in the portion formed so that the film thickness continuously decreases as it approaches the end portion is formed at 70 degrees or less, so that it is relatively gentle. Has a tapered shape.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 45 degrees or less.
  • the taper angle in the portion where the film thickness is continuously reduced as it approaches the end is formed at 45 degrees or less, so that the taper is gentler. Has a shape.
  • a portion formed so as to continuously decrease as the film thickness approaches the end portion is cut out in a triangular shape in plan view, and the triangular shape is cut out. It is preferable that the apex angle in the place where it is left is 90 degrees or less.
  • the amount of light wrapping is large at the time of exposure, but as the distance from the apex angle increases, the amount of wrapping of light gradually decreases. If a film is used, it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
  • the display panel is preferably a liquid crystal panel including a liquid crystal layer.
  • the display panel is preferably an organic EL panel provided with an organic EL layer.
  • a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • the present invention can be suitably used for a touch panel and a display device including the touch panel.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)

Abstract

L'invention concerne un écran tactile dans lequel, dans les points d'intersection entre des lignes d'électrode de détection (101S) et des lignes d'électrode d'excitation (101D), des premières électrodes de pont (103) sont formées sur des parties de connexion (101c) avec des films d'isolation inter-couches (2) entre elles, les extrémités supérieures et/ou les extrémités inférieures des films d'isolation inter-couches (2) dans le dessin ont des parties renfoncées (3) formées dans celles-ci, l'épaisseur de film diminue progressivement vers l'extrémité, et le taux de rendement dans le processus de fabrication est donc amélioré.
PCT/JP2012/072991 2011-09-14 2012-09-07 Écran tactile, procédé de fabrication d'écran tactile et dispositif d'affichage WO2013039017A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017094693A1 (fr) * 2015-11-30 2017-06-08 東レ株式会社 Pâte isolante de support de couche d'électrode, écran tactile, et procédé de fabrication d'écran tactile

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138238A (ja) * 2009-12-26 2011-07-14 Kyocera Corp 入力装置、およびこれを備えた表示装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138238A (ja) * 2009-12-26 2011-07-14 Kyocera Corp 入力装置、およびこれを備えた表示装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017094693A1 (fr) * 2015-11-30 2017-06-08 東レ株式会社 Pâte isolante de support de couche d'électrode, écran tactile, et procédé de fabrication d'écran tactile
CN108292540A (zh) * 2015-11-30 2018-07-17 东丽株式会社 电极层支承用绝缘糊剂、触控面板、触控面板的制造方法

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