WO2013039017A1 - Touch panel, method for manufacturing touch panel, and display device - Google Patents

Touch panel, method for manufacturing touch panel, and display device Download PDF

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Publication number
WO2013039017A1
WO2013039017A1 PCT/JP2012/072991 JP2012072991W WO2013039017A1 WO 2013039017 A1 WO2013039017 A1 WO 2013039017A1 JP 2012072991 W JP2012072991 W JP 2012072991W WO 2013039017 A1 WO2013039017 A1 WO 2013039017A1
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WO
WIPO (PCT)
Prior art keywords
electrode
touch panel
insulating layer
electrodes
interlayer insulating
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Application number
PCT/JP2012/072991
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French (fr)
Japanese (ja)
Inventor
美崎　克紀
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シャープ株式会社
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Publication of WO2013039017A1 publication Critical patent/WO2013039017A1/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • the present invention relates to a touch panel, a touch panel manufacturing method, and a display device with a touch panel.
  • a touch panel implements a function that allows a finger or an input pen as an input means to touch a display surface and is selected according to the contact position.
  • Display devices have been generalized.
  • a resistance film method (a method in which an input position is detected by contact between an upper conductive substrate and a lower conductive substrate when pressed) or capacitance
  • the system (method of detecting the input position by detecting the change in the capacity of the touched place) has been mainly used.
  • the capacitive touch panel is capable of detecting the contact position with a simple operation and is capable of multi-touch (detecting multiple touch positions simultaneously). It has become.
  • FIG. 13 shows an example of a capacitive touch panel.
  • the drive electrode line 101D and the sense electrode line 101S that are thin and have high detection performance are formed on the same plane.
  • 1 is a diagram showing a schematic configuration of a single-layer mutual capacitance touch panel 100.
  • FIG. 13 shows a touch detection area on the substrate 105.
  • diamond-shaped unit electrodes 101U are arranged so as to be adjacent to each other in the horizontal direction in the figure, and each unit electrode 101U is connected.
  • a plurality of electrically connected drive electrode lines 101D are formed in parallel with each other in the vertical direction in the figure through the portion 101C, while the rhomboid unit electrode 101U 'is in the vertical direction in the figure.
  • a plurality of sense electrode lines 101S arranged adjacent to each other and electrically connected to each unit electrode 101U ′ via the first bridge electrode 103 are formed in parallel to each other in the horizontal direction in the figure. ing.
  • the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are provided so as to be electrically separated from each other and intersect each other.
  • the unit electrode 101U and the unit electrode 101U ′ are formed on the same plane so as not to overlap each other in a plan view.
  • the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the first bridge electrode 103 are all made of ITO (Indium Tin) which is a transparent conductive layer. Oxide) thin film.
  • the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C are formed in the same layer on the same plane.
  • the first bridge electrode 103 is formed through the interlayer insulating film 102 formed on the connection portion 101C at a place where the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S intersect each other. Therefore, the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are electrically separated from each other.
  • a photosensitive acrylic resin-based organic interlayer insulating film is used as the interlayer insulating film 102 in consideration of the transmittance in the touch detection region.
  • Japanese Patent Publication Japanese Patent Laid-Open No. 11-24101 (published Jan. 29, 1999)”
  • the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is Since the taper shape is difficult to control, the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected in the subsequent process.
  • FIG. 15 (a) to 15 (d) are diagrams for schematically explaining the manufacturing process of the conventional touch panel 100.
  • FIG. 15 (a) shows a unit electrode 101U (not shown) and a unit electrode 101U. ′ And the connecting portion 101C are formed of the same ITO layer, and
  • FIG. 15B shows the formation of the interlayer insulating film 102 so as to cover the connecting portion 101C and a part of the unit electrode 101U ′.
  • the process to perform is shown.
  • the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is difficult to control the taper shape, as shown in FIG. It is easy to form so as to have a relatively sharp slope.
  • FIG. 15C shows a step of forming the first bridge electrode 103 made of an ITO layer on the interlayer insulating film 102. As shown in FIG. 15C, the end portion (relatively sharp) of the interlayer insulating film 102 is shown. In the portion having an inclination, the first bridge electrode 103 is disconnected.
  • FIG. 15D shows a process for forming the protective film 104.
  • the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected, so that the yield is not so good. .
  • Patent Document 1 describes a configuration in which an interlayer insulating film 117 having a gently inclined tapered portion 117c is provided at an end portion 117b of the interlayer insulating film 117, as shown in FIG. ing.
  • the interlayer insulating film 117 described in Patent Document 1 is not for forming an electrode layer that remains permanently and without a step on the gently inclined tapered portion 117c of the interlayer insulating film 117.
  • the electrode layer temporarily formed on the interlayer insulating film 117 is reliably removed without residue using the gently inclined tapered portion 117c of the interlayer insulating film 117.
  • the gently sloping tapered portion 117c of the interlayer insulating film 117 is disposed so as to be located between the mounting terminals 116a.
  • the electrode layer formed on the interlayer insulating film 117 is removed without residue, so that a short circuit between the mounting terminals 116a can be reliably prevented.
  • the insulating layer 111 is a layer formed on the entire surface as the lowermost layer on the substrate.
  • the gently sloping tapered portion 117c of the interlayer insulating film 117 described in Patent Document 1 utilizes the shape of the electrode layer temporarily formed on the interlayer insulating film 117. Since it is intended to remove without any residue and not to form an electrode layer that remains permanently on the upper portion thereof, the gently inclined tapered portion 117c of the interlayer insulating film 117 is formed as shown in FIG. In the conventional touch panel 100 shown in FIG. 1, it cannot be used to form the first bridge electrode 103 that remains permanently.
  • the present invention has been made in view of the above problems, a touch panel with improved yield in the manufacturing process, a method for manufacturing a touch panel with improved yield, and a display with a touch panel with improved yield in the manufacturing process. It is an object to provide a device.
  • the touch panel of the present invention has a plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction.
  • a touch panel formed on an insulating substrate such that the electrodes cross each other, wherein the plurality of first electrodes and the plurality of second electrodes are electrically separated, and the first electrode
  • Each of the second electrodes is formed by electrically connecting a plurality of unit electrodes having a predetermined shape, and the unit electrode of the first electrode and the unit electrode of the second electrode overlap each other in plan view.
  • the unit electrode of the first electrode and the unit electrode of the second electrode which are formed on the same plane so as to be adjacent to each other and electrically connect the adjacent unit electrodes in each of the first electrodes.
  • a first connection portion formed by a layer and a second connection portion formed by a layer different from the first connection portion for electrically connecting adjacent unit electrodes in each of the second electrodes; And at the intersection of the first electrode and the second electrode, either the first connection portion or the second connection portion is formed on the other via an insulating layer, and the insulation
  • the first connection portion is formed on the layer, the thickness of at least part of both end portions in the second direction of the insulating layer is continuously reduced as the end portion is approached.
  • the second connection portion is formed on the insulating layer, the film thickness of at least a part of both end portions in the first direction of the insulating layer continuously decreases as the end portion is approached. It is characterized by being formed.
  • the insulating layer formed between the first connection portion and the second connection portion at the intersection of the first electrode and the second electrode is formed on the insulating layer.
  • the connection portion is formed, it is formed so that the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as the end portion is approached, and on the insulating layer
  • the second connection portion is formed, the thickness of at least a part of both end portions in the first direction of the insulating layer is formed so as to continuously decrease toward the end portion.
  • the both end portions in the first direction or both end portions in the second direction of the insulating layer there are portions where the film thickness gradually changes.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the display device of the present invention is characterized by including the touch panel and a display panel in order to solve the above-described problems.
  • a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • the touch panel manufacturing method of the present invention includes a plurality of first electrodes arranged in a first direction and a plurality of electrodes arranged in a second direction different from the first direction.
  • the second electrode is formed on the insulating substrate so as to intersect with each other, and a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode, and in the second electrode
  • the apex angle is 9
  • the insulating layer In the case where the film thickness of at least a part of both end portions in the second direction is formed so as to decrease continuously as approaching the end portion, and the connection portion is formed on the insulating layer, It is characterized in that it is formed such that the film thickness of at least a part of both end portions in the first direction decreases continuously as it approaches the end portions.
  • the amount of light wraps around during exposure, but as the distance from the apex angle goes away, the amount of wrap around light gradually decreases.
  • the film it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
  • the plurality of first electrodes and the plurality of second electrodes are electrically separated, and each of the first electrode and the second electrode includes a plurality of the first electrodes and the plurality of second electrodes.
  • the unit electrode of the predetermined shape is electrically connected, and the unit electrode of the first electrode and the unit electrode of the second electrode are the same so as not to overlap each other in plan view and adjacent to each other
  • a first electrode formed on a plane and electrically connected between adjacent unit electrodes of each of the first electrodes is formed of a layer different from the unit electrode of the first electrode and the unit electrode of the second electrode.
  • the display device of the present invention is configured to include the touch panel and the display panel.
  • the method for manufacturing a touch panel electrically connects a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode and adjacent unit electrodes in the second electrode.
  • a first step of forming a portion, a second step of forming a bridge electrode for electrically connecting adjacent unit electrodes in the first electrode, and an intersection of the first electrode and the second electrode And a third step of forming an insulating layer so as to cover the connection portion or the bridge electrode, and the third step has a triangular light shielding region whose apex angle is 90 degrees or less.
  • both end portions in the second direction of the insulating layer are reduced.
  • at least a part of the film thickness is formed so as to decrease continuously as it approaches the end portion, and when the connection portion is formed on the insulating layer, both end portions in the first direction of the insulating layer In this method, at least a part of the film thickness is continuously reduced as it approaches the end.
  • a touch panel with improved yield in the manufacturing process a touch panel manufacturing method with improved yield, and a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • FIG. 5 is a diagram for explaining an exposure / development process when a negative interlayer insulating film is used in the manufacturing process of the touch panel according to the embodiment of the present invention shown in FIG. 1. It is a figure which shows schematic structure of the terminal part and wiring formation area of the touchscreen of one Embodiment of this invention shown in FIG. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows an example of 2D liquid crystal display device provided with the touchscreen of one embodiment of this invention.
  • FIG. 1 shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention. It is a figure which shows an example of 3D liquid crystal display device provided with the touch panel of one embodiment of this invention. It is a figure which shows schematic structure of the touchscreen of other one Embodiment of this invention. It is a figure which shows schematic structure of the touchscreen of further another embodiment of this invention. It is a figure which shows the cross section of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. It is a figure which shows schematic structure of the conventional touch panel. It is a figure which shows the cross section of the B1-B1 'line of the conventional touch panel shown in FIG. It is a figure which shows the manufacturing process of the conventional touch panel shown in FIG. It is a figure which shows the interlayer insulation film described in patent document 1.
  • FIG. 1 shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention
  • FIG. 1 is a diagram showing a schematic configuration of the touch panel 1.
  • the plurality of drive electrode lines 101D arranged on the substrate 105 are formed on the substrate 105 so as to cross each other.
  • a connecting portion 101C (second connecting portion) that connects adjacent unit electrodes 101U in the drive electrode line 101D and a first bridge that electrically connects adjacent unit electrodes 101U ′ in the sense electrode line 101S.
  • the interlayer insulating film 2 is formed between the electrode 103 (first connecting portion) and the both ends of the interlayer insulating film 2 extending in the vertical direction in the drawing, which is the direction in which the first bridge electrode 103 extends.
  • a notch 3 (taper-shaped forming portion) that continuously decreases as the film thickness of the interlayer insulating film 2 approaches the end is formed based on FIG. 13 to FIG. It is different from the conventional touch panel 100 described above, and other configurations are as described in the touch panel 100.
  • members having the same functions as those shown in the drawing of the touch panel 100 are denoted by the same reference numerals and description thereof is omitted.
  • the film thickness of the interlayer insulating film 2 is at a part of both ends in the vertical direction in the drawing of the interlayer insulating film 2 in the direction in which the first bridge electrode 103 extends.
  • the notch portion 3 it is possible to suppress the occurrence of disconnection (disconnection) in the step of forming the first bridge electrode 103 on the interlayer insulating film 2 after forming the interlayer insulating film 2. Therefore, the yield can be improved in the manufacturing process of the touch panel 1.
  • FIG. 2 is a view showing a cross section taken along line B1-B1 ′ of the touch panel 1 shown in FIG.
  • the connecting portion 101C for connecting adjacent unit electrodes 101U (not shown) in the drive electrode line 101D and a part of the adjacent unit electrode 101U ′ in the sense electrode line 101S are covered.
  • An interlayer insulating film 2 is formed.
  • a portion formed on the unit electrode 101U ′ of the sense electrode line 101S is a notch portion 3 (taper-shaped forming portion) that continuously decreases as the film thickness approaches the end portion. It has become.
  • the first bridge electrode 103 for electrically connecting the adjacent unit electrodes 101U ′ in the sense electrode line 101S is cut on the interlayer insulating film 2 by using the notch 3 as described above. It can be formed without.
  • a protective film 104 that is an organic layer is formed so as to cover the unit electrode 101U ′ and the first bridge electrode 103.
  • the unit electrode 101U of the illustrated drive electrode line 101D and the unit electrode 101U ′ of the sense electrode line 101S are formed so as to be adjacent to each other, and there is a capacitance C F between the adjacent unit electrodes 101U and 101U ′.
  • the capacitance C F is different between when the detection object such as a finger or a pen is not touched and when it is touched.
  • the non-touch capacity becomes larger than the touch capacity (C F_untouch > C F_touch ). Using this principle, the touch position can be detected.
  • Signals having a predetermined waveform are sequentially input from a later-described terminal portion (not shown) electrically connected to the drive electrode line 101D, and a later-described terminal portion (not shown) electrically connected to the sense electrode line 101S. ), A detection signal is output.
  • a negative photosensitive acrylic resin is used to form the interlayer insulating film 2 having the notches 3.
  • an interlayer insulation formed on the entire surface of the substrate 105 using a mask 4 having an opening 5 and a triangular light shielding region 6 having an apex angle A of 90 degrees or less.
  • the triangular notch 3 can be formed in the interlayer insulating film 2 by exposing the film 2 and then developing the film.
  • the notch 3 appears to have a triangular notch formed in the interlayer insulating film 2 in plan view, but its cross-sectional shape is as shown in FIG. It has a tapered shape in which the film thickness continuously decreases as it approaches the end.
  • the cross-sectional shape of the notch 3 is the above-described taper shape.
  • the amount of sneaking of light is large at the time of exposure near the apex angle A of the triangular light shielding region 6 of the mask 4, it is far from the apex angle A. This is because the amount of sneak of light gradually decreases as the process proceeds, and in this embodiment, since the negative photosensitive acrylic resin is used, the film thickness of the interlayer insulating film 2 is easily increased to the apex angle A.
  • a taper-shaped portion that continuously decreases from the end toward the end can be formed.
  • the notch 3 is formed using a negative photosensitive acrylic resin as the interlayer insulating film 2, but the present invention is not limited to this, and the interlayer insulating film 2 is not limited thereto. May not have photosensitivity.
  • the interlayer insulating film has no photosensitivity, for example, it is formed only of an inorganic transparent insulating layer, a negative photosensitive resin (resist) is used to form the above-mentioned inorganic transparent insulating layer. Then, a resist film having a portion (inclined portion) having the same shape as the cutout portion 3 is formed.
  • a negative photosensitive resin resist
  • the resist film In the resist film, a portion having the same shape as the cutout portion 3 is formed thinner than the other portions. Therefore, when the resist film is removed by etching, the same shape as the cutout portion 3 in the resist film is formed. When the portion is removed first and further etched, the inorganic transparent insulating layer is formed to have a portion (inclined portion) having the same shape as the cutout portion 3. Then, the resist film remaining on the inorganic transparent insulating layer may be peeled off.
  • the resist film may be transparent or non-transparent.
  • the interlayer insulating film is composed of two layers of an inorganic transparent insulating layer having no photosensitivity and a photosensitive negative photosensitive acrylic resin layer formed on the inorganic transparent insulating layer.
  • the negative photosensitive acrylic resin layer is formed so as to have a portion (inclined portion) having the same shape as the cutout portion 3.
  • the negative photosensitive acrylic resin layer since the portion having the same shape as the notch 3 is formed thinner than the other portions, the negative photosensitive acrylic resin layer is removed by etching.
  • the inorganic transparent insulating layer has the same shape as the notch 3 ( (Inclined portion).
  • ashing is preferably performed when the inorganic transparent insulating layer becomes an overhang shape by side etching.
  • the triangular notch 3 can be formed also in an interlayer insulating film having no photosensitivity or an interlayer insulating film having a layer having no photosensitivity.
  • the notch 3 in the interlayer insulating film 2 is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed.
  • the present invention is not limited to this.
  • the notch portion 3 in the interlayer insulating film 2 is adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the unit electrode 101U is formed.
  • the formation area thereof can be reduced.
  • the notch 3 in the interlayer insulating film 2 may be formed asymmetrically in the above direction.
  • the notch 3 in the interlayer insulating film 2 is formed at substantially the center of both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed.
  • the present invention is not limited to this, and when the connection portion 101C is formed on the interlayer insulating film as in the third embodiment to be described later, the notch portion 3 in the interlayer insulating film 2 is driven. It can also be formed at substantially the center of both end portions in the direction in which the unit electrode 101U adjacent to the electrode line 101D is formed.
  • the notch 3 of the interlayer insulating film 2 is formed to have a taper angle of 45 degrees.
  • the taper angle of the notch 3 of the interlayer insulating film 2 may be 70 degrees or less, and more preferably 45 degrees or less.
  • FIG. 4 is a diagram showing a wiring formation region R2 of the touch panel 1 shown in FIG.
  • a plurality of drive electrode lines 101D and a plurality of sense electrode lines 101S are connected to a plurality of terminal portions via metal wirings 106, respectively.
  • connection electrode 101E for electrically connecting the drive electrode line 101D and the metal wiring 106, and the sense electrode line 101S and the metal wiring 106 are electrically connected to the wiring formation region R2.
  • the present invention is not limited to this.
  • connection electrode 101E, the relay electrode 101G, and the terminal portion 101F are formed of an ITO layer that is the same layer as the unit electrodes 101U and 101U ′ and the connection portion 101C.
  • connection electrode 101E connected to the drive electrode line 101D and the terminal portion 101F are directly electrically connected by the metal wiring 106, so the drive electrode line 101D is connected to the terminal. It can be electrically connected to the portion 101F.
  • the relay electrode 101G and the terminal portion 101F that are electrically separated from the sense electrode line 101S are directly electrically connected by the metal wiring 106, the relay electrode 101G is electrically connected to the terminal portion 101F. Can be connected.
  • the sense electrode line 101S and the relay electrode 101G are electrically connected to each other through the through hole 106C in the metal wiring 106 formed on the relay electrode 101G and the interlayer insulating film formed on the relay electrode 101G and the metal wiring 106. 2 and the second bridge electrode 103A formed of the same layer as the first bridge electrode 103 through the through hole 2C. Therefore, the sense electrode line 101S can be electrically connected to the terminal portion 101F.
  • the ground wiring 106X that serves to shield the electric field of the wiring on the outside is provided in the horizontal direction in the drawing. Since it is provided at a position closest to the sense electrode line 101S so as to extend, the relay electrode 101G is used.
  • FIG. 5A to 5E show the manufacturing process of the touch panel 1, and FIG. 5A shows the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the terminal portion 101F.
  • FIG. 5B shows a process of forming a metal wiring 106 having a three-layer structure of MoNb / Al / MoNb, and a wiring formation region R2 in the vicinity of the terminal portion 101F.
  • the metal wiring 106 is provided on the terminal portion 101F, and the terminal portion 101F formed at one end portion outside the wiring formation region R2 is exposed to be electrically connected to the outside.
  • FIG. 5C shows a process of forming the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion
  • FIG. FIG. 5 shows a step of forming the first bridge electrode 103 on the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion)
  • FIG. 5E shows a step of forming the protective film 105.
  • the terminal portion 101F formed at one end portion outside the wiring formation region R2 is electrically connected to the outside, the protective film 105 is not formed thereon and is exposed. Yes.
  • a liquid crystal display device will be described as an example of the display device having the touch panel described above.
  • FIG. 6 is a diagram illustrating an example of the 2D liquid crystal display device 10 including a touch panel.
  • a touch panel 61 corresponding to the touch panel described above includes a substrate 105, a substrate 61b provided so as to face the substrate 105, and between the substrates, and either of the substrates 105 and 61b. And a plurality of films 61a formed on one side.
  • the liquid crystal panel 62 includes a TFT substrate 62a, a color filter substrate 62b, a sealing material 62c for bonding the two substrates, a liquid crystal layer 62d sealed between the bonded substrates, and a TFT substrate 62a. And a polarizing plate 62e provided on the opposite side of the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f provided on the opposite side of the surface in contact with the liquid crystal layer 62d in the color filter substrate 62b.
  • touch panel 61 and the liquid crystal panel 62 are not shown, they can be bonded together using an adhesive layer (not shown) or the like to complete the 2D liquid crystal display device 10 with a touch panel.
  • FIG. 7 is a diagram illustrating an example of the liquid crystal display device 20 including an on-cell type touch panel.
  • a plurality of films 61a are formed on the surface opposite to the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f is formed thereon.
  • 6 is different from the 2D liquid crystal display device 10 having the touch panel shown in FIG. 6 in that a substrate 61b is formed.
  • the liquid crystal display device 20 can be thinned by one less substrate provided on the touch panel side.
  • FIG. 8 is a diagram illustrating an example of a 3D liquid crystal display device 30 including a touch panel.
  • the 3D liquid crystal display device 30 is provided with a switch liquid layer panel 63 between the touch panel 61 and the liquid crystal panel 62 in addition to the touch panel 61 and the liquid crystal panel 62.
  • a lower switch substrate 63a and an upper switch substrate 63b are bonded together by a sealing material 63c, and a liquid crystal layer 63d is provided between the two substrates.
  • a common electrode 64 is formed on the surface of the lower switch substrate 63a that is in contact with the liquid crystal layer 63d, while a plurality of segment electrodes are formed on the surface of the upper switch substrate 63b that is in contact with the liquid crystal layer 63d. 65 is formed.
  • a polarizing plate 63e is provided on the surface in contact with the touch panel 61, and an adhesive layer 66 is formed on the surface in contact with the liquid crystal panel 62 in the lower switch substrate 63a. ing.
  • the switch liquid crystal panel 63 plays a role of alternately displaying a right image and a left image having binocular parallax displayed by the liquid crystal panel 62 at a predetermined cycle.
  • the liquid crystal display device provided with the touch panel has been described as an example.
  • the type of the display unit is not limited to the liquid crystal panel, and for example, an organic EL display provided with the touch panel. Of course, it may be a device or the like.
  • the notch 3 in the interlayer insulating film 2 is the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed (vertical direction in the figure).
  • the notch 3a in the interlayer insulating film 2a is adjacent to the sense electrode line 101S of the interlayer insulating film 2a.
  • This embodiment is different from the first embodiment in that a plurality of unit electrodes 101U ′ are provided at both ends in the direction in which the unit electrode 101U ′ is formed (vertical direction in the drawing). Just as you did.
  • members having the same functions as those shown in the drawings of the first embodiment are given the same reference numerals, and descriptions thereof are omitted.
  • FIG. 9 is a diagram showing a schematic configuration of the touch panel 1a.
  • the notch portions 3a in the interlayer insulating film 2a are respectively formed at both end portions in the direction in which the unit electrode 101U 'adjacent to the sense electrode line 101S of the interlayer insulating film 2a is formed. Three are provided.
  • the three cutout portions 3a in the interlayer insulating film 2a are formed at one end of the interlayer insulating film 2a, for example, the first bridge electrode 103 or the Even when misalignment occurs when forming the connection portion 101C, it is possible to establish that a part of the first bridge electrode 103 and a part of the connection portion 101C are formed on the notch 3a of the interlayer insulating film 2a. Get higher.
  • the number of the notched portions 3a is not limited to this. There is no limit.
  • the notch 3a in the interlayer insulating film 2a is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed.
  • the present invention is not limited to this.
  • the connection portion 101C is formed on the interlayer insulating film 2a as in the third embodiment to be described later, the notch portion 3a in the interlayer insulating film 2a is replaced with a unit adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the electrode 101U is formed.
  • the notch 3a in the interlayer insulating film 2a can be formed asymmetrically in the above direction.
  • connection portion 101C is formed on interlayer insulating film 2b, and adjacent to drive electrode line 101D of interlayer insulating film 2b in the direction in which connection portion 101C extends. It differs from the first and second embodiments in that notches 3b in the interlayer insulating film 2b are provided at both ends in the direction in which the unit electrode 101U is formed (left and right in the figure). Other configurations are as described in the first and second embodiments.
  • members having the same functions as those shown in the drawings of Embodiment 1 and Embodiment 2 described above are given the same reference numerals, and descriptions thereof are omitted.
  • FIG. 10 is a diagram showing a schematic configuration of the touch panel 1b.
  • the notch 3b in the interlayer insulating film 2b is in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed (left-right direction in the figure).
  • a single object is provided in the approximate center of both ends.
  • the touch panel 1b can be realized.
  • FIG. 11A is a diagram showing a cross section taken along line B1-B1 ′ of touch panel 1b shown in FIG. 10, and FIG. 11B is a cross section taken along line C1-C1 ′ of touch panel 1b shown in FIG. FIG.
  • FIG. 11A shows both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2b is formed. In the present embodiment, both end portions in this direction are shown at both ends. Since the notched portion 3b is not provided, a step break (disconnection) occurs in the unit electrode 101U ′ adjacent to the sense electrode line 101S formed on the interlayer insulating film 2b.
  • the adjacent unit electrodes 101U ′ of the sense electrode line 101S are electrically connected to each other using the first bridge electrode 103 formed in the lower layer of the interlayer insulating film 2b. Therefore, there is no problem even if the unit electrode 101U ′ adjacent to the sense electrode line 101S formed at both ends of the interlayer insulating film 2b is disconnected (disconnected).
  • FIG. 11B shows both end portions in the direction (left and right direction in the figure) in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed.
  • the notches 3b are provided at both ends in this direction, no step break (disconnection) occurs in the unit electrode 101U adjacent to the drive electrode line 101D formed on the interlayer insulating film 2b.
  • connection portion 101C on the interlayer insulating film 2b after the interlayer insulating film 2b is formed, disconnection (disconnection) hardly occurs, so that the touch panel 1b with improved yield in the manufacturing process is realized. can do.
  • FIG. 12A to 12E show the manufacturing process of the touch panel 1b.
  • a cross section taken along line B2-B2 'of the formation region R2 is shown.
  • FIG. 12A shows a process of forming the first bridge electrode 103 and the terminal portion 101F with the same ITO layer
  • FIG. 12B has a three-layer structure of MoNb / Al / MoNb.
  • the process for forming the metal wiring 106 is shown.
  • the metal wiring 106 is provided on the terminal portion 101F.
  • the terminal portion 101F formed at one end on the outer side of the wiring formation region R2 is exposed to be electrically connected to the outside as in the case shown in FIG.
  • FIG. 12C shows a process of forming an interlayer insulating film 2b having a notch portion 3b (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion. These are formed only at both ends in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed. As shown in the drawing, the interlayer insulating film 2b is not formed in the portion where the metal wiring 106 is provided on the terminal portion 101F in the wiring formation region R2.
  • FIG. 12D shows a process of forming the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C with the same ITO layer
  • FIG. 12E shows a process of forming the protective film 104. Yes.
  • the portions formed such that the film thickness continuously decreases as approaching the end portions are formed symmetrically at the corresponding end portions.
  • the portion formed so as to continuously decrease as the film thickness approaches the end portion (portion formed in a gently tapered shape) Since it is formed symmetrically, the first connection part and the second connection part can be formed in a straight line on the insulating layer, so the formation area of the first connection part and the second connection part Can be reduced.
  • a portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is formed at a substantially central portion of the corresponding end portion.
  • a portion formed so as to continuously decrease as the film thickness approaches the end portion Since it is formed in the central part, for example, even when a positional shift occurs when forming the first connection part or the second connection part on the insulating layer, a part of the first connection part or the above The probability that a part of the second connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes high.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • a plurality of portions at one end portion are formed in the insulating layer so as to continuously decrease as the film thickness approaches the end portion.
  • a portion (a portion formed in a gently tapered shape) formed so as to continuously decrease as the film thickness approaches the end portion is a plurality of portions at one end portion. For example, even when misalignment occurs when forming the first connection portion or the second connection portion on the insulating layer, a part of the first connection portion or the second connection portion is formed. The probability that a part of the connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes higher.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the second connection portion is formed on the first connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the first direction is continuously reduced as approaching the end portions.
  • the first connection portion is formed on the second connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the second direction is continuously reduced as the end portion is approached.
  • a taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 70 degrees or less.
  • the taper angle in the portion formed so that the film thickness continuously decreases as it approaches the end portion is formed at 70 degrees or less, so that it is relatively gentle. Has a tapered shape.
  • connection in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process.
  • a touch panel can be realized.
  • the taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 45 degrees or less.
  • the taper angle in the portion where the film thickness is continuously reduced as it approaches the end is formed at 45 degrees or less, so that the taper is gentler. Has a shape.
  • a portion formed so as to continuously decrease as the film thickness approaches the end portion is cut out in a triangular shape in plan view, and the triangular shape is cut out. It is preferable that the apex angle in the place where it is left is 90 degrees or less.
  • the amount of light wrapping is large at the time of exposure, but as the distance from the apex angle increases, the amount of wrapping of light gradually decreases. If a film is used, it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
  • the display panel is preferably a liquid crystal panel including a liquid crystal layer.
  • the display panel is preferably an organic EL panel provided with an organic EL layer.
  • a display device with a touch panel with improved yield in the manufacturing process can be realized.
  • the present invention can be suitably used for a touch panel and a display device including the touch panel.

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Abstract

A touch panel can be provided wherein, in the points of intersection between sense electrode lines (101S) and drive electrode lines (101D), first bridge electrodes (103) are formed on connecting parts (101c) with interlayer insulating films (2) in between, the top ends and/or the bottom ends of the interlayer insulating films (2) in the drawing have recessed parts (3) formed wherein the film thickness decreases progressively toward the end, and the yield rate in the manufacturing process is therefore improved.

Description

タッチパネル、タッチパネルの製造方法および表示装置Touch panel, touch panel manufacturing method, and display device
　本発明は、タッチパネル、タッチパネルの製造方法およびタッチパネル付き表示装置に関するものである。 The present invention relates to a touch panel, a touch panel manufacturing method, and a display device with a touch panel.
　近年、特にスマートフォンや携帯電話などの携帯機器の分野においては、入力手段としての指や入力ペンなどを表示面上に接触させ、その接触位置に応じて選択される機能が具現されるタッチパネルを備えた表示装置が一般化されている。 In recent years, particularly in the field of mobile devices such as smartphones and mobile phones, a touch panel is provided that implements a function that allows a finger or an input pen as an input means to touch a display surface and is selected according to the contact position. Display devices have been generalized.
　従来から、このような表示装置に備えられるタッチパネルとしては、抵抗膜方式（押されると上の導電性基板と下の導電性基板とが接触することによって入力位置を検知する方式）や静電容量方式（触った場所の容量変化を検知することによって入力位置を検知する方式）のものが主に用いられてきた。 Conventionally, as a touch panel provided in such a display device, a resistance film method (a method in which an input position is detected by contact between an upper conductive substrate and a lower conductive substrate when pressed) or capacitance The system (method of detecting the input position by detecting the change in the capacity of the touched place) has been mainly used.
　その中でも、静電容量方式のタッチパネルは、簡便な操作で接触位置を検出することができることと、マルチタッチ（複数のタッチ位置を同時に検出）に対応可能であることから、現在、タッチパネルの主流となっている。 Among them, the capacitive touch panel is capable of detecting the contact position with a simple operation and is capable of multi-touch (detecting multiple touch positions simultaneously). It has become.
　図１３は、静電容量方式のタッチパネルの一例を示しており、静電容量方式のタッチパネルの中でも、薄型で検出性能の高い、ドライブ電極ライン１０１Ｄとセンス電極ライン１０１Ｓとが同一平面上に形成された単層式の相互容量方式のタッチパネル１００の概略構成を示す図である。 FIG. 13 shows an example of a capacitive touch panel. Among the capacitive touch panels, the drive electrode line 101D and the sense electrode line 101S that are thin and have high detection performance are formed on the same plane. 1 is a diagram showing a schematic configuration of a single-layer mutual capacitance touch panel 100.
　図１３は、基板１０５上におけるタッチ検出領域を示しており、上記タッチ検出領域には菱形のユニット電極１０１Ｕが、図中の左右方向に互いに隣接するように配置され、各々のユニット電極１０１Ｕが接続部１０１Ｃを介して、電気的に接続されたドライブ電極ライン１０１Ｄが、図中の上下方向に互いに平行に複数個形成されており、一方、菱形のユニット電極１０１Ｕ′は、図中の上下方向に互いに隣接するように配置され、各々のユニット電極１０１Ｕ′が第１のブリッジ電極１０３を介して、電気的に接続されたセンス電極ライン１０１Ｓは、図中の左右方向に互いに平行に複数個形成されている。 FIG. 13 shows a touch detection area on the substrate 105. In the touch detection area, diamond-shaped unit electrodes 101U are arranged so as to be adjacent to each other in the horizontal direction in the figure, and each unit electrode 101U is connected. A plurality of electrically connected drive electrode lines 101D are formed in parallel with each other in the vertical direction in the figure through the portion 101C, while the rhomboid unit electrode 101U 'is in the vertical direction in the figure. A plurality of sense electrode lines 101S arranged adjacent to each other and electrically connected to each unit electrode 101U ′ via the first bridge electrode 103 are formed in parallel to each other in the horizontal direction in the figure. ing.
　複数のドライブ電極ライン１０１Ｄと複数のセンス電極ライン１０１Ｓとは、互いに電気的に分離され、かつ、互いに交差するように設けられている。 The plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are provided so as to be electrically separated from each other and intersect each other.
　そして、上記タッチ検出領域においては、ユニット電極１０１Ｕとユニット電極１０１Ｕ′とは、平面視において重ならず、互いに隣接するように、同一平面上に形成されている。 In the touch detection region, the unit electrode 101U and the unit electrode 101U ′ are formed on the same plane so as not to overlap each other in a plan view.
　なお、タッチパネル１００においては、上記タッチ検出領域におけるパターン見えを考慮し、ユニット電極１０１Ｕ、ユニット電極１０１Ｕ′、接続部１０１Ｃおよび第１のブリッジ電極１０３は、何れも透明導電層であるＩＴＯ（Ｉｎｄｉｕｍ　Ｔｉｎ　Ｏｘｉｄｅ）の薄膜で形成している。 In the touch panel 100, in consideration of the pattern appearance in the touch detection region, the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the first bridge electrode 103 are all made of ITO (Indium Tin) which is a transparent conductive layer. Oxide) thin film.
　そして、ユニット電極１０１Ｕとユニット電極１０１Ｕ′と接続部１０１Ｃとは、同一平面上に同一層で形成されている。 The unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C are formed in the same layer on the same plane.
　また、複数のドライブ電極ライン１０１Ｄと複数のセンス電極ライン１０１Ｓとが、互いに交差する箇所においては、接続部１０１Ｃ上に形成された層間絶縁膜１０２を介して、第１のブリッジ電極１０３が形成されているので、複数のドライブ電極ライン１０１Ｄと複数のセンス電極ライン１０１Ｓとは、互いに電気的に分離されている。 In addition, the first bridge electrode 103 is formed through the interlayer insulating film 102 formed on the connection portion 101C at a place where the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S intersect each other. Therefore, the plurality of drive electrode lines 101D and the plurality of sense electrode lines 101S are electrically separated from each other.
　また、タッチパネル１００においては、上記タッチ検出領域における透過率を考慮し、層間絶縁膜１０２として、感光性を有するアクリル樹脂系の有機層間絶縁膜を用いている。 In the touch panel 100, a photosensitive acrylic resin-based organic interlayer insulating film is used as the interlayer insulating film 102 in consideration of the transmittance in the touch detection region.
　上記構成によれば、タッチ検出領域においてパターン見えがなく、薄型で検出性能の高い、相互容量方式のタッチパネル１００を実現することができる。 According to the above configuration, it is possible to realize the mutual capacitive touch panel 100 that has no pattern in the touch detection area, is thin, and has high detection performance.
日本国公開特許公報「特開平１１－２４１０１号公報（１９９９年１月２９日公開）」Japanese Patent Publication “Japanese Patent Laid-Open No. 11-24101 (published Jan. 29, 1999)”
　しかしながら、図１３に示す従来のタッチパネル１００のＢ１－Ｂ１′線の断面を示す図１４に図示されているように、感光性を有するアクリル樹脂系の有機層間絶縁膜で形成した層間絶縁膜１０２は、そのテーパ形状の制御が困難であるため、後工程において、層間絶縁膜１０２上に形成される薄膜である第１のブリッジ電極１０３には、段切れが生じやすいという問題がある。 However, as shown in FIG. 14 showing a cross section taken along line B1-B1 ′ of the conventional touch panel 100 shown in FIG. 13, the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is Since the taper shape is difficult to control, the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected in the subsequent process.
　図１５（ａ）から図１５（ｄ）は、従来のタッチパネル１００の製造工程を概略的に説明するための図であり、図１５（ａ）は、ユニット電極１０１Ｕ（未図示）とユニット電極１０１Ｕ′と接続部１０１Ｃとを、同一層であるＩＴＯ層で形成する工程を示し、図１５（ｂ）は、接続部１０１Ｃとユニット電極１０１Ｕ′の一部とを覆うように層間絶縁膜１０２を形成する工程を示す。そして、上述したように、感光性を有するアクリル樹脂系の有機層間絶縁膜で形成した層間絶縁膜１０２は、そのテーパ形状の制御が困難であるため、図示されているように、そのテーパ形状は比較的鋭い傾斜を有するように形成されやすい。 15 (a) to 15 (d) are diagrams for schematically explaining the manufacturing process of the conventional touch panel 100. FIG. 15 (a) shows a unit electrode 101U (not shown) and a unit electrode 101U. ′ And the connecting portion 101C are formed of the same ITO layer, and FIG. 15B shows the formation of the interlayer insulating film 102 so as to cover the connecting portion 101C and a part of the unit electrode 101U ′. The process to perform is shown. As described above, since the interlayer insulating film 102 formed of a photosensitive acrylic resin-based organic interlayer insulating film is difficult to control the taper shape, as shown in FIG. It is easy to form so as to have a relatively sharp slope.
　図１５（ｃ）は、層間絶縁膜１０２上にＩＴＯ層からなる第１のブリッジ電極１０３を形成する工程を示しており、図示されているように、層間絶縁膜１０２の端部（比較的鋭い傾斜を有する部分）においては、第１のブリッジ電極１０３に、段切れが生じてしまう。 FIG. 15C shows a step of forming the first bridge electrode 103 made of an ITO layer on the interlayer insulating film 102. As shown in FIG. 15C, the end portion (relatively sharp) of the interlayer insulating film 102 is shown. In the portion having an inclination, the first bridge electrode 103 is disconnected.
　また、図１５（ｄ）は、保護膜１０４の形成工程を示している。 FIG. 15D shows a process for forming the protective film 104.
　以上のように、タッチパネル１００の製造工程においては、層間絶縁膜１０２上に形成される薄膜である第１のブリッジ電極１０３に、段切れが生じやすいので、その歩留まりがあまりよくないという問題がある。 As described above, in the manufacturing process of the touch panel 100, the first bridge electrode 103 which is a thin film formed on the interlayer insulating film 102 is likely to be disconnected, so that the yield is not so good. .
　一方、上記特許文献１には、図１６に図示されているように、層間絶縁膜１１７の端部１１７ｂに緩やかな傾斜状のテーパ形状部１１７ｃを有する層間絶縁膜１１７を備えた構成について記載されている。 On the other hand, Patent Document 1 describes a configuration in which an interlayer insulating film 117 having a gently inclined tapered portion 117c is provided at an end portion 117b of the interlayer insulating film 117, as shown in FIG. ing.
　しかしながら、上記特許文献１に記載の層間絶縁膜１１７は、層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃ上に、段切れなく永久的に残存する電極層を形成するためのものではなく、層間絶縁膜１１７上に一時的に形成される電極層を、層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃを利用して、残渣なく確実に除去するためのものである。 However, the interlayer insulating film 117 described in Patent Document 1 is not for forming an electrode layer that remains permanently and without a step on the gently inclined tapered portion 117c of the interlayer insulating film 117. The electrode layer temporarily formed on the interlayer insulating film 117 is reliably removed without residue using the gently inclined tapered portion 117c of the interlayer insulating film 117.
　したがって、図１６に図示されているように、層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃは、実装端子１１６ａ間に位置するように配置されており、層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃにおいては、層間絶縁膜１１７上に形成される電極層が残渣なく除去されるので、実装端子１１６ａ間でのショートを確実に防止することができるようになっている。 Accordingly, as shown in FIG. 16, the gently sloping tapered portion 117c of the interlayer insulating film 117 is disposed so as to be located between the mounting terminals 116a. In the tapered portion 117c, the electrode layer formed on the interlayer insulating film 117 is removed without residue, so that a short circuit between the mounting terminals 116a can be reliably prevented.
　なお、絶縁層１１１は、基板上に最下層として全面に形成されている層である。 The insulating layer 111 is a layer formed on the entire surface as the lowermost layer on the substrate.
　以上のように、上記特許文献１に記載の層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃは、その形状を利用して、層間絶縁膜１１７上に一時的に形成される電極層を残渣なく確実に除去するためのものであり、その上部に永久的に残存する電極層を形成するためのものではないので、層間絶縁膜１１７の緩やかな傾斜状のテーパ形状部１１７ｃを、図１３に示す従来のタッチパネル１００において、永久的に残存する第１のブリッジ電極１０３を形成するために用いることはできない。 As described above, the gently sloping tapered portion 117c of the interlayer insulating film 117 described in Patent Document 1 utilizes the shape of the electrode layer temporarily formed on the interlayer insulating film 117. Since it is intended to remove without any residue and not to form an electrode layer that remains permanently on the upper portion thereof, the gently inclined tapered portion 117c of the interlayer insulating film 117 is formed as shown in FIG. In the conventional touch panel 100 shown in FIG. 1, it cannot be used to form the first bridge electrode 103 that remains permanently.
　本発明は、上記の問題点に鑑みてなされたものであり、製造工程において歩留まりが向上されたタッチパネルと、歩留まりが向上されたタッチパネルの製造方法と、製造工程において歩留まりが向上されたタッチパネル付き表示装置と、を提供することを目的とする。 The present invention has been made in view of the above problems, a touch panel with improved yield in the manufacturing process, a method for manufacturing a touch panel with improved yield, and a display with a touch panel with improved yield in the manufacturing process. It is an object to provide a device.
　本発明のタッチパネルは、上記の課題を解決するために、第１の方向に配列された複数の第１電極と、上記第１の方向とは異なる第２の方向に配列された複数の第２電極とが、互いに交差するように絶縁基板上に形成されたタッチパネルであって、上記複数の第１電極同士および上記複数の第２電極同士は、電気的に分離されており、上記第１電極および上記第２電極の各々は、複数の所定形状のユニット電極が電気的に接続されて形成されており、上記第１電極のユニット電極と上記第２電極のユニット電極とは、平面視において重ならず、互いに隣接するように、同一平面上に形成され、上記各々の第１電極における隣接するユニット電極同士を電気的に接続する、上記第１電極のユニット電極および上記第２電極のユニット電極とは異なる層で形成された第１接続部と、上記各々の第２電極における隣接するユニット電極同士を電気的に接続する、上記第１接続部とは異なる層によって形成された第２接続部と、を備え、上記第１電極と上記第２電極との交差部分において、上記第１接続部および上記第２接続部の何れか一方は、他方上に絶縁層を介して形成されており、上記絶縁層上に上記第１接続部が形成される場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成され、上記絶縁層上に上記第２接続部が形成される場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることを特徴としている。 In order to solve the above problems, the touch panel of the present invention has a plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction. A touch panel formed on an insulating substrate such that the electrodes cross each other, wherein the plurality of first electrodes and the plurality of second electrodes are electrically separated, and the first electrode Each of the second electrodes is formed by electrically connecting a plurality of unit electrodes having a predetermined shape, and the unit electrode of the first electrode and the unit electrode of the second electrode overlap each other in plan view. The unit electrode of the first electrode and the unit electrode of the second electrode, which are formed on the same plane so as to be adjacent to each other and electrically connect the adjacent unit electrodes in each of the first electrodes. What is A first connection portion formed by a layer and a second connection portion formed by a layer different from the first connection portion for electrically connecting adjacent unit electrodes in each of the second electrodes; And at the intersection of the first electrode and the second electrode, either the first connection portion or the second connection portion is formed on the other via an insulating layer, and the insulation When the first connection portion is formed on the layer, the thickness of at least part of both end portions in the second direction of the insulating layer is continuously reduced as the end portion is approached. When the second connection portion is formed on the insulating layer, the film thickness of at least a part of both end portions in the first direction of the insulating layer continuously decreases as the end portion is approached. It is characterized by being formed.
　上記構成によれば、上記第１電極と上記第２電極との交差部分において上記第１接続部と上記第２接続部との間に形成された絶縁層は、上記絶縁層上に上記第１接続部が形成される場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成され、上記絶縁層上に上記第２接続部が形成される場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されているので、上記絶縁層の上記第１の方向における両端部または上記第２の方向における両端部には、その膜厚が緩やかに変化する箇所が存在することとなる。 According to the above configuration, the insulating layer formed between the first connection portion and the second connection portion at the intersection of the first electrode and the second electrode is formed on the insulating layer. When the connection portion is formed, it is formed so that the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as the end portion is approached, and on the insulating layer When the second connection portion is formed, the thickness of at least a part of both end portions in the first direction of the insulating layer is formed so as to continuously decrease toward the end portion. In the both end portions in the first direction or both end portions in the second direction of the insulating layer, there are portions where the film thickness gradually changes.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部や上記第２接続部を形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process. A touch panel can be realized.
　本発明の表示装置は、上記の課題を解決するために、上記タッチパネルと、表示パネルと、を備えていることを特徴としている。 The display device of the present invention is characterized by including the touch panel and a display panel in order to solve the above-described problems.
　上記構成によれば、製造工程において歩留まりが向上されたタッチパネル付き表示装置を実現することができる。 According to the above configuration, a display device with a touch panel with improved yield in the manufacturing process can be realized.
　本発明のタッチパネルの製造方法は、上記の課題を解決するために、第１の方向に配列された複数の第１電極と、上記第１の方向とは異なる第２の方向に配列された複数の第２電極とを、互いに交差するように絶縁基板上に形成するタッチパネルの製造方法であって、上記第１電極および上記第２電極における複数の所定形状のユニット電極と、上記第２電極における隣接するユニット電極同士を電気的に接続する接続部と、を形成する第１工程と、上記第１電極における隣接するユニット電極同士を電気的に接続するブリッジ電極を形成する第２工程と、上記第１電極と上記第２電極との交差部分において、上記接続部または、上記ブリッジ電極を覆うように、絶縁層を形成する第３工程と、を備え、上記第３工程においては、頂角が９０度以下である三角形状の遮光領域を有するマスクを用いて、ネガ型の感光性絶縁膜を露光した後、現像し、上記絶縁層上に上記ブリッジ電極を形成する場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成し、上記絶縁層上に上記接続部を形成する場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成することを特徴としている。 In order to solve the above-described problems, the touch panel manufacturing method of the present invention includes a plurality of first electrodes arranged in a first direction and a plurality of electrodes arranged in a second direction different from the first direction. The second electrode is formed on the insulating substrate so as to intersect with each other, and a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode, and in the second electrode A first step of forming a connection portion that electrically connects adjacent unit electrodes; a second step of forming a bridge electrode that electrically connects adjacent unit electrodes in the first electrode; and And a third step of forming an insulating layer so as to cover the connection portion or the bridge electrode at the intersection of the first electrode and the second electrode. In the third step, the apex angle is 9 When a negative photosensitive insulating film is exposed using a mask having a triangular light-shielding region that is less than or equal to the degree of development and developed to form the bridge electrode on the insulating layer, the insulating layer In the case where the film thickness of at least a part of both end portions in the second direction is formed so as to decrease continuously as approaching the end portion, and the connection portion is formed on the insulating layer, It is characterized in that it is formed such that the film thickness of at least a part of both end portions in the first direction decreases continuously as it approaches the end portions.
　上記方法によれば、頂角が９０度以下である三角形状の遮光領域を有するマスクを用いて、露光・現像することで、上記絶縁層において上記三角形状に切欠かれている箇所を形成することができる。 According to the above method, by using a mask having a triangular light-shielding region with an apex angle of 90 degrees or less, exposure and development are performed, so that a portion that is cut out in the triangular shape is formed in the insulating layer. Can do.
　上記マスクの三角形状の遮光領域における、頂角付近においては、露光時に光の回り込み量が多いが、頂角から離れていくにつれてなだらかに光の回り込み量が減少するので、ネガ型の感光性絶縁膜を用いて、容易に、上記絶縁層の膜厚が頂角から端部に近づくにつれて連続的に減少するような部分を形成することができる。 In the triangular light shielding area of the mask, near the apex angle, the amount of light wraps around during exposure, but as the distance from the apex angle goes away, the amount of wrap around light gradually decreases. By using the film, it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記接続部や上記ブリッジ電極を形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりを向上することができる。 Accordingly, in the process of forming the connecting portion and the bridge electrode on the insulating layer after the insulating layer is formed, disconnection (disconnection) hardly occurs, and thus the yield can be improved in the manufacturing process. .
　本発明のタッチパネルは、以上のように、上記複数の第１電極同士および上記複数の第２電極同士は、電気的に分離されており、上記第１電極および上記第２電極の各々は、複数の所定形状のユニット電極が電気的に接続されて形成されており、上記第１電極のユニット電極と上記第２電極のユニット電極とは、平面視において重ならず、互いに隣接するように、同一平面上に形成され、上記各々の第１電極における隣接するユニット電極同士を電気的に接続する、上記第１電極のユニット電極および上記第２電極のユニット電極とは異なる層で形成された第１接続部と、上記各々の第２電極における隣接するユニット電極同士を電気的に接続する、上記第１接続部とは異なる層によって形成された第２接続部と、を備え、上記第１電極と上記第２電極との交差部分において、上記第１接続部および上記第２接続部の何れか一方は、他方上に絶縁層を介して形成されており、上記絶縁層上に上記第１接続部が形成される場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成され、上記絶縁層上に上記第２接続部が形成される場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されている構成である。 In the touch panel of the present invention, as described above, the plurality of first electrodes and the plurality of second electrodes are electrically separated, and each of the first electrode and the second electrode includes a plurality of the first electrodes and the plurality of second electrodes. The unit electrode of the predetermined shape is electrically connected, and the unit electrode of the first electrode and the unit electrode of the second electrode are the same so as not to overlap each other in plan view and adjacent to each other A first electrode formed on a plane and electrically connected between adjacent unit electrodes of each of the first electrodes is formed of a layer different from the unit electrode of the first electrode and the unit electrode of the second electrode. A connecting portion and a second connecting portion formed by a layer different from the first connecting portion for electrically connecting adjacent unit electrodes in each of the second electrodes, and the first electrode, At the intersection with the second electrode, either the first connection portion or the second connection portion is formed on the other via an insulating layer, and the first connection portion is formed on the insulating layer. Is formed such that the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as approaching the end portions, and the first layer is formed on the insulating layer. When two connecting portions are formed, the thickness of at least a part of both end portions in the first direction of the insulating layer is formed so as to continuously decrease as approaching the end portions. .
　本発明の表示装置は、以上のように、上記タッチパネルと、表示パネルと、を備えている構成である。 As described above, the display device of the present invention is configured to include the touch panel and the display panel.
　本発明のタッチパネルの製造方法は、以上のように、上記第１電極および上記第２電極における複数の所定形状のユニット電極と、上記第２電極における隣接するユニット電極同士を電気的に接続する接続部と、を形成する第１工程と、上記第１電極における隣接するユニット電極同士を電気的に接続するブリッジ電極を形成する第２工程と、上記第１電極と上記第２電極との交差部分において、上記接続部または、上記ブリッジ電極を覆うように、絶縁層を形成する第３工程と、を備え、上記第３工程においては、頂角が９０度以下である三角形状の遮光領域を有するマスクを用いて、ネガ型の感光性絶縁膜を露光した後、現像し、上記絶縁層上に上記ブリッジ電極を形成する場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成し、上記絶縁層上に上記接続部を形成する場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成する方法である。 As described above, the method for manufacturing a touch panel according to the present invention electrically connects a plurality of unit electrodes having a predetermined shape in the first electrode and the second electrode and adjacent unit electrodes in the second electrode. A first step of forming a portion, a second step of forming a bridge electrode for electrically connecting adjacent unit electrodes in the first electrode, and an intersection of the first electrode and the second electrode And a third step of forming an insulating layer so as to cover the connection portion or the bridge electrode, and the third step has a triangular light shielding region whose apex angle is 90 degrees or less. When a negative photosensitive insulating film is exposed using a mask and then developed, and the bridge electrode is formed on the insulating layer, both end portions in the second direction of the insulating layer are reduced. In the case where at least a part of the film thickness is formed so as to decrease continuously as it approaches the end portion, and when the connection portion is formed on the insulating layer, both end portions in the first direction of the insulating layer In this method, at least a part of the film thickness is continuously reduced as it approaches the end.
　それゆえ、製造工程において歩留まりが向上されたタッチパネルと、歩留まりが向上されたタッチパネルの製造方法と、製造工程において歩留まりが向上されたタッチパネル付き表示装置と、を実現することができる。 Therefore, a touch panel with improved yield in the manufacturing process, a touch panel manufacturing method with improved yield, and a display device with a touch panel with improved yield in the manufacturing process can be realized.
本発明の一実施の形態のタッチパネルの概略構成を示す図である。It is a figure which shows schematic structure of the touchscreen of one embodiment of this invention. 図１に示す本発明の一実施の形態のタッチパネルのＢ１－Ｂ１′線の断面を示す図である。It is a figure which shows the cross section of the B1-B1 'line of the touch panel of one embodiment of this invention shown in FIG. 図１に示す本発明の一実施の形態のタッチパネルの製造工程において、ネガ型の層間絶縁膜を用いた場合における露光・現像工程を説明するための図である。FIG. 5 is a diagram for explaining an exposure / development process when a negative interlayer insulating film is used in the manufacturing process of the touch panel according to the embodiment of the present invention shown in FIG. 1. 図１に示す本発明の一実施の形態のタッチパネルの端子部および配線形成領域の概略構成を示す図である。It is a figure which shows schematic structure of the terminal part and wiring formation area of the touchscreen of one Embodiment of this invention shown in FIG. 図１に示す本発明の一実施の形態のタッチパネルの製造工程を示す図である。It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. 本発明の一実施の形態のタッチパネルを備えた２Ｄ液晶表示装置の一例を示す図である。It is a figure which shows an example of 2D liquid crystal display device provided with the touchscreen of one embodiment of this invention. 本発明の一実施の形態のオンセル型のタッチパネルを備えた液晶表示装置の一例を示す図である。It is a figure which shows an example of the liquid crystal display device provided with the on-cell type touch panel of one embodiment of this invention. 本発明の一実施の形態のタッチパネルを備えた３Ｄ液晶表示装置の一例を示す図である。It is a figure which shows an example of 3D liquid crystal display device provided with the touch panel of one embodiment of this invention. 本発明の他の一実施の形態のタッチパネルの概略構成を示す図である。It is a figure which shows schematic structure of the touchscreen of other one Embodiment of this invention. 本発明のさらに他の一実施の形態のタッチパネルの概略構成を示す図である。It is a figure which shows schematic structure of the touchscreen of further another embodiment of this invention. 図１０に示す本発明の一実施の形態のタッチパネルの断面を示す図である。It is a figure which shows the cross section of the touchscreen of one embodiment of this invention shown in FIG. 図１０に示す本発明の一実施の形態のタッチパネルの製造工程を示す図である。It is a figure which shows the manufacturing process of the touchscreen of one embodiment of this invention shown in FIG. 従来のタッチパネルの概略構成を示す図である。It is a figure which shows schematic structure of the conventional touch panel. 図１３に示す従来のタッチパネルのＢ１－Ｂ１′線の断面を示す図である。It is a figure which shows the cross section of the B1-B1 'line of the conventional touch panel shown in FIG. 図１３に示す従来のタッチパネルの製造工程を示す図である。It is a figure which shows the manufacturing process of the conventional touch panel shown in FIG. 特許文献１に記載されている層間絶縁膜を示す図である。It is a figure which shows the interlayer insulation film described in patent document 1. FIG.
　以下、図面に基づいて本発明の実施の形態について詳しく説明する。ただし、この実施の形態に記載されている構成部品の寸法、材質、形状、その相対配置などはあくまで一実施形態に過ぎず、これらによってこの発明の範囲が限定解釈されるべきではない。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in this embodiment are merely one embodiment, and the scope of the present invention should not be construed as being limited thereto.
　〔実施の形態１〕
　以下、図１から図５に基づいて、本発明の第１の実施形態について説明する。 [Embodiment 1]
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
　図１は、タッチパネル１の概略構成を示す図である。 FIG. 1 is a diagram showing a schematic configuration of the touch panel 1.
　図１に示すタッチパネル１においては、第１の方向（図中の左右方向）に配列された複数のセンス電極ライン１０１Ｓと、上記第１の方向とは異なる第２の方向（図中の上下方向）に配列された複数のドライブ電極ライン１０１Ｄとが、互いに交差するように基板１０５上に形成されている。 In the touch panel 1 shown in FIG. 1, a plurality of sense electrode lines 101S arranged in a first direction (left-right direction in the figure) and a second direction (up-down direction in the figure) different from the first direction. The plurality of drive electrode lines 101D arranged on the substrate 105 are formed on the substrate 105 so as to cross each other.
　そして、ドライブ電極ライン１０１Ｄにおける隣接するユニット電極１０１Ｕ同士を接続する接続部１０１Ｃ（第２の接続部）と、センス電極ライン１０１Ｓにおける隣接するユニット電極１０１Ｕ′同士を電気的に接続する第１のブリッジ電極１０３（第１の接続部）と、の間には層間絶縁膜２が形成されており、第１のブリッジ電極１０３が延びる方向である層間絶縁膜２の図中の上下方向における両端部の一部には、層間絶縁膜２の膜厚が端部に近づくにつれて連続的に減少する切欠き部３（テーパー形状形成部）が形成されている点において、図１３から図１５に基づいて、上述した従来のタッチパネル１００とは異なっており、その他の構成についてはタッチパネル１００において説明したとおりである。説明の便宜上、タッチパネル１００の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。 Then, a connecting portion 101C (second connecting portion) that connects adjacent unit electrodes 101U in the drive electrode line 101D and a first bridge that electrically connects adjacent unit electrodes 101U ′ in the sense electrode line 101S. The interlayer insulating film 2 is formed between the electrode 103 (first connecting portion) and the both ends of the interlayer insulating film 2 extending in the vertical direction in the drawing, which is the direction in which the first bridge electrode 103 extends. In part, a notch 3 (taper-shaped forming portion) that continuously decreases as the film thickness of the interlayer insulating film 2 approaches the end is formed based on FIG. 13 to FIG. It is different from the conventional touch panel 100 described above, and other configurations are as described in the touch panel 100. For convenience of explanation, members having the same functions as those shown in the drawing of the touch panel 100 are denoted by the same reference numerals and description thereof is omitted.
　図１に示すタッチパネル１のように、第１のブリッジ電極１０３が延びる方向である層間絶縁膜２の図中の上下方向における両端部の一部に、層間絶縁膜２の膜厚が端部に近づくにつれて連続的に減少する切欠き部３を設けた構成とすることにより、層間絶縁膜２の図中の上下方向における両端部には、その膜厚が緩やかに変化する箇所が存在することとなる。 As shown in the touch panel 1 shown in FIG. 1, the film thickness of the interlayer insulating film 2 is at a part of both ends in the vertical direction in the drawing of the interlayer insulating film 2 in the direction in which the first bridge electrode 103 extends. By adopting a configuration in which the notch 3 that continuously decreases as it approaches, there are locations where the film thickness changes gently at both ends in the vertical direction of the interlayer insulating film 2 in the drawing. Become.
　したがって、切欠き部３を有することにより、層間絶縁膜２を形成した後に、層間絶縁膜２上に、第１のブリッジ電極１０３を形成する工程において、段切れ（断線）が生じるのを抑制することができるので、タッチパネル１の製造工程において歩留まりを向上することができる。 Therefore, by having the notch portion 3, it is possible to suppress the occurrence of disconnection (disconnection) in the step of forming the first bridge electrode 103 on the interlayer insulating film 2 after forming the interlayer insulating film 2. Therefore, the yield can be improved in the manufacturing process of the touch panel 1.
　図２は、図１に示すタッチパネル１のＢ１－Ｂ１′線の断面を示す図である。 FIG. 2 is a view showing a cross section taken along line B1-B1 ′ of the touch panel 1 shown in FIG.
　図示されているように、ドライブ電極ライン１０１Ｄにおける隣接するユニット電極１０１Ｕ（未図示）同士を接続する接続部１０１Ｃと、センス電極ライン１０１Ｓにおける隣接するユニット電極１０１Ｕ′の一部と、を覆うように層間絶縁膜２が形成されている。 As shown in the figure, the connecting portion 101C for connecting adjacent unit electrodes 101U (not shown) in the drive electrode line 101D and a part of the adjacent unit electrode 101U ′ in the sense electrode line 101S are covered. An interlayer insulating film 2 is formed.
　そして、層間絶縁膜２において、センス電極ライン１０１Ｓのユニット電極１０１Ｕ′上に形成される部分は、その膜厚が端部に近づくにつれて連続的に減少する切欠き部３（テーパー形状形成部）となっている。 In the interlayer insulating film 2, a portion formed on the unit electrode 101U ′ of the sense electrode line 101S is a notch portion 3 (taper-shaped forming portion) that continuously decreases as the film thickness approaches the end portion. It has become.
　したがって、このような切欠き部３を利用して、センス電極ライン１０１Ｓにおける隣接するユニット電極１０１Ｕ′同士を電気的に接続するための第１のブリッジ電極１０３を、層間絶縁膜２上に段切れなく形成することができる。 Accordingly, the first bridge electrode 103 for electrically connecting the adjacent unit electrodes 101U ′ in the sense electrode line 101S is cut on the interlayer insulating film 2 by using the notch 3 as described above. It can be formed without.
　それから、ユニット電極１０１Ｕ′および第１のブリッジ電極１０３を覆うように、有機層である保護膜１０４が形成されている。 Then, a protective film 104 that is an organic layer is formed so as to cover the unit electrode 101U ′ and the first bridge electrode 103.
　以下、図１に基づいて、タッチパネル１の駆動原理について説明する。 Hereinafter, the driving principle of the touch panel 1 will be described with reference to FIG.
　図示されているドライブ電極ライン１０１Ｄのユニット電極１０１Ｕとセンス電極ライン１０１Ｓのユニット電極１０１Ｕ′とは、互いに隣接するように形成されており、隣接するユニット電極１０１Ｕ・１０１Ｕ′間には、容量ＣＦが形成されるが、この容量ＣＦは、指やペンなどの検出対象物の非タッチ時とタッチ時とで異なる。非タッチ時の容量がタッチ時の容量より大きくなる（ＣＦ_untouch＞ＣＦ_touch）。この原理を利用して、タッチ位置を検出することができる。 The unit electrode 101U of the illustrated drive electrode line 101D and the unit electrode 101U ′ of the sense electrode line 101S are formed so as to be adjacent to each other, and there is a capacitance C F between the adjacent unit electrodes 101U and 101U ′. However, the capacitance C F is different between when the detection object such as a finger or a pen is not touched and when it is touched. The non-touch capacity becomes larger than the touch capacity (C F_untouch > C F_touch ). Using this principle, the touch position can be detected.
　ドライブ電極ライン１０１Ｄと電気的に接続された後述する端子部（未図示）からは、所定波形を有する信号が順次入力され、センス電極ライン１０１Ｓと電気的に接続された後述する端子部（未図示）からは、検出信号が出力されるようになっている。 Signals having a predetermined waveform are sequentially input from a later-described terminal portion (not shown) electrically connected to the drive electrode line 101D, and a later-described terminal portion (not shown) electrically connected to the sense electrode line 101S. ), A detection signal is output.
　以下、図３に基づいて、図１に示すタッチパネル１に備えられた層間絶縁膜２の形成方法について説明する。 Hereinafter, a method of forming the interlayer insulating film 2 provided in the touch panel 1 shown in FIG. 1 will be described with reference to FIG.
　本実施の形態においては、切欠き部３を有する層間絶縁膜２を形成するため、ネガ型の感光性アクリル樹脂を用いた。 In the present embodiment, a negative photosensitive acrylic resin is used to form the interlayer insulating film 2 having the notches 3.
　そして、図示されているように、開口部５と、頂角Ａが９０度以下である三角形状の遮光領域６と、を有するマスク４を用いて、基板１０５上の全面に形成された層間絶縁膜２の露光を行い、その後、現像することにより、層間絶縁膜２において三角形状の切欠き部３を形成することができる。 Then, as shown in the drawing, an interlayer insulation formed on the entire surface of the substrate 105 using a mask 4 having an opening 5 and a triangular light shielding region 6 having an apex angle A of 90 degrees or less. The triangular notch 3 can be formed in the interlayer insulating film 2 by exposing the film 2 and then developing the film.
　なお、切欠き部３は、平面視においては、単に層間絶縁膜２に三角形状の切欠き部が形成されているように見えるが、その断面形状は、図２に図示されているように、その膜厚が端部に近づくにつれて連続的に減少するテーパー形状となっている。 Note that the notch 3 appears to have a triangular notch formed in the interlayer insulating film 2 in plan view, but its cross-sectional shape is as shown in FIG. It has a tapered shape in which the film thickness continuously decreases as it approaches the end.
　切欠き部３の断面形状が、上述したテーパー形状となるのは、マスク４の三角形状の遮光領域６の頂角Ａ付近においては、露光時に光の回り込み量が多いが、頂角Ａから離れていくにつれてなだらかに光の回り込み量が減少するからであり、本実施の形態においては、ネガ型の感光性アクリル樹脂を用いているので、容易に、層間絶縁膜２の膜厚が頂角Ａから端部に近づくにつれて連続的に減少するようなテーパー形状部分を形成することができる。 The cross-sectional shape of the notch 3 is the above-described taper shape. Although the amount of sneaking of light is large at the time of exposure near the apex angle A of the triangular light shielding region 6 of the mask 4, it is far from the apex angle A. This is because the amount of sneak of light gradually decreases as the process proceeds, and in this embodiment, since the negative photosensitive acrylic resin is used, the film thickness of the interlayer insulating film 2 is easily increased to the apex angle A. A taper-shaped portion that continuously decreases from the end toward the end can be formed.
　なお、本実施の形態においては、層間絶縁膜２として、ネガ型の感光性アクリル樹脂を用いて、切欠き部３を形成しているが、これに限定されることはなく、層間絶縁膜２は感光性を有さないものであってもよい。 In the present embodiment, the notch 3 is formed using a negative photosensitive acrylic resin as the interlayer insulating film 2, but the present invention is not limited to this, and the interlayer insulating film 2 is not limited thereto. May not have photosensitivity.
　層間絶縁膜が、感光性を有さない、例えば、無機系の透明絶縁層のみで形成される場合には、ネガ型の感光性樹脂（レジスト）を用いて、上記無機系の透明絶縁層上に、切欠き部３と同じ形状の部分（傾斜部分）を有するレジスト膜を形成する。 When the interlayer insulating film has no photosensitivity, for example, it is formed only of an inorganic transparent insulating layer, a negative photosensitive resin (resist) is used to form the above-mentioned inorganic transparent insulating layer. Then, a resist film having a portion (inclined portion) having the same shape as the cutout portion 3 is formed.
　上記レジスト膜において、切欠き部３と同じ形状の部分は、その他の部分より薄く形成されているため、エッチングによって上記レジスト膜を除去していくと、上記レジスト膜における切欠き部３と同じ形状の部分が先に除去され、さらにエッチングされると、上記無機系の透明絶縁層が切欠き部３と同じ形状の部分（傾斜部分）を有するように形成される。そして、上記無機系の透明絶縁層上に残ったレジスト膜は剥離すればよい。 In the resist film, a portion having the same shape as the cutout portion 3 is formed thinner than the other portions. Therefore, when the resist film is removed by etching, the same shape as the cutout portion 3 in the resist film is formed. When the portion is removed first and further etched, the inorganic transparent insulating layer is formed to have a portion (inclined portion) having the same shape as the cutout portion 3. Then, the resist film remaining on the inorganic transparent insulating layer may be peeled off.
　なお、上記レジスト膜は、透明であっても非透明であってもよい。 Note that the resist film may be transparent or non-transparent.
　一方、層間絶縁膜が、感光性を有さない無機系の透明絶縁層と、上記無機系の透明絶縁層上に形成される感光性を有するネガ型の感光性アクリル樹脂層と、の２層構造で有る場合には、上記ネガ型の感光性アクリル樹脂層を切欠き部３と同じ形状の部分（傾斜部分）を有するように形成する。 On the other hand, the interlayer insulating film is composed of two layers of an inorganic transparent insulating layer having no photosensitivity and a photosensitive negative photosensitive acrylic resin layer formed on the inorganic transparent insulating layer. When it has a structure, the negative photosensitive acrylic resin layer is formed so as to have a portion (inclined portion) having the same shape as the cutout portion 3.
　上記ネガ型の感光性アクリル樹脂層において、切欠き部３と同じ形状の部分は、その他の部分より薄く形成されているため、エッチングによって上記ネガ型の感光性アクリル樹脂層を除去していくと、上記ネガ型の感光性アクリル樹脂層における切欠き部３と同じ形状の部分が先に除去され、さらにエッチングされると、上記無機系の透明絶縁層が切欠き部３と同じ形状の部分（傾斜部分）を有するように形成される。 In the negative photosensitive acrylic resin layer, since the portion having the same shape as the notch 3 is formed thinner than the other portions, the negative photosensitive acrylic resin layer is removed by etching. When the portion having the same shape as the notch 3 in the negative photosensitive acrylic resin layer is first removed and further etched, the inorganic transparent insulating layer has the same shape as the notch 3 ( (Inclined portion).
　なお、上記無機系の透明絶縁層が、サイドエッチングでオーバーハング形状となった場合などには、アッシングを行うことが好ましい。 Note that ashing is preferably performed when the inorganic transparent insulating layer becomes an overhang shape by side etching.
　以上のように、感光性を有さない層間絶縁膜や感光性を有さない層を備えた層間絶縁膜においても、三角形状の切欠き部３を形成することができる。 As described above, the triangular notch 3 can be formed also in an interlayer insulating film having no photosensitivity or an interlayer insulating film having a layer having no photosensitivity.
　なお、本実施の形態においては、層間絶縁膜２における切欠き部３を、センス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向において、対称的に形成しているが、これに限定されることはなく、後述する実施の形態３のように、層間絶縁膜上に接続部１０１Ｃが形成される場合には、層間絶縁膜２における切欠き部３を、ドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向において、対称的に形成することもできる。 In the present embodiment, the notch 3 in the interlayer insulating film 2 is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed. However, the present invention is not limited to this. In the case where the connection portion 101C is formed on the interlayer insulating film as in the third embodiment to be described later, the notch portion 3 in the interlayer insulating film 2 is adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the unit electrode 101U is formed.
　このような構成によれば、層間絶縁膜２上に、第１のブリッジ電極１０３や接続部１０１Ｃを直線状に形成することができるので、これらの形成面積を減らすことができる。 According to such a configuration, since the first bridge electrode 103 and the connecting portion 101C can be formed linearly on the interlayer insulating film 2, the formation area thereof can be reduced.
　さらには、層間絶縁膜２における切欠き部３は、上記方向において、非対称的に形成してもよい。 Furthermore, the notch 3 in the interlayer insulating film 2 may be formed asymmetrically in the above direction.
　また、本実施の形態においては、層間絶縁膜２における切欠き部３を、層間絶縁膜２のセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向の両端部の略中央部に形成したが、これに限定されることはなく、後述する実施の形態３のように、層間絶縁膜上に接続部１０１Ｃが形成される場合には、層間絶縁膜２における切欠き部３を、ドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向の両端部の略中央部に形成することもできる。 In the present embodiment, the notch 3 in the interlayer insulating film 2 is formed at substantially the center of both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed. However, the present invention is not limited to this, and when the connection portion 101C is formed on the interlayer insulating film as in the third embodiment to be described later, the notch portion 3 in the interlayer insulating film 2 is driven. It can also be formed at substantially the center of both end portions in the direction in which the unit electrode 101U adjacent to the electrode line 101D is formed.
　このような構成によれば、例えば、層間絶縁膜２上に、第１のブリッジ電極１０３や接続部１０１Ｃを形成する際に、位置ずれが生じても、第１のブリッジ電極１０３の一部や接続部１０１Ｃの一部が、層間絶縁膜２における切欠き部３上に形成される確立が高くなる。 According to such a configuration, for example, even when misalignment occurs when forming the first bridge electrode 103 or the connection portion 101C on the interlayer insulating film 2, a part of the first bridge electrode 103 or The probability that a part of the connection part 101C is formed on the notch part 3 in the interlayer insulating film 2 is increased.
　したがって、層間絶縁膜２を形成した後に、層間絶縁膜２上に、第１のブリッジ電極１０３や接続部１０１Ｃを形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネル１を実現することができる。 Therefore, in the process of forming the first bridge electrode 103 and the connecting portion 101C on the interlayer insulating film 2 after the interlayer insulating film 2 is formed, the disconnection (disconnection) is unlikely to occur, so that the yield in the manufacturing process is increased. An improved touch panel 1 can be realized.
　また、本実施の形態においては、より緩やかなテーパー形状を形成するため、層間絶縁膜２の切欠き部３のテーパー角が４５度となるように形成しているが、これに限定されることはなく、層間絶縁膜２の切欠き部３のテーパー角は７０度以下であればよく、４５度以下で形成することがさらに好ましい。 Further, in this embodiment, in order to form a gentler taper shape, the notch 3 of the interlayer insulating film 2 is formed to have a taper angle of 45 degrees. However, the present invention is not limited to this. The taper angle of the notch 3 of the interlayer insulating film 2 may be 70 degrees or less, and more preferably 45 degrees or less.
　図４は、図１に示すタッチパネル１の配線形成領域Ｒ２を示す図である。 FIG. 4 is a diagram showing a wiring formation region R2 of the touch panel 1 shown in FIG.
　図示されているように、タッチパネル１のタッチ検出領域Ｒ１の周辺には、複数のドライブ電極ライン１０１Ｄの各々と複数のセンス電極ライン１０１Ｓの各々とを、金属配線１０６を介して、複数の端子部１０１Ｆの各々に電気的に接続する領域である配線形成領域Ｒ２が設けられている。 As shown in the drawing, around the touch detection region R1 of the touch panel 1, a plurality of drive electrode lines 101D and a plurality of sense electrode lines 101S are connected to a plurality of terminal portions via metal wirings 106, respectively. A wiring formation region R2, which is a region electrically connected to each of 101F, is provided.
　本実施の形態においては、配線形成領域Ｒ２に、ドライブ電極ライン１０１Ｄと金属配線１０６とを電気的に接続するための接続電極１０１Ｅと、センス電極ライン１０１Ｓと金属配線１０６とを電気的に接続するための中継電極１０１Ｇと、を設けた構成を用いているが、これに限定されることはない。 In the present embodiment, the connection electrode 101E for electrically connecting the drive electrode line 101D and the metal wiring 106, and the sense electrode line 101S and the metal wiring 106 are electrically connected to the wiring formation region R2. However, the present invention is not limited to this.
　なお、接続電極１０１Ｅと中継電極１０１Ｇと端子部１０１Ｆとは、ユニット電極１０１Ｕ・１０１Ｕ′と接続部１０１Ｃと同一層であるＩＴＯ層で形成されている。 The connection electrode 101E, the relay electrode 101G, and the terminal portion 101F are formed of an ITO layer that is the same layer as the unit electrodes 101U and 101U ′ and the connection portion 101C.
　そして、図示されているように、ドライブ電極ライン１０１Ｄに接続されている接続電極１０１Ｅと端子部１０１Ｆとは、金属配線１０６によって、直接、電気的に接続されているので、ドライブ電極ライン１０１Ｄを端子部１０１Ｆと電気的に接続することができる。 As shown in the figure, the connection electrode 101E connected to the drive electrode line 101D and the terminal portion 101F are directly electrically connected by the metal wiring 106, so the drive electrode line 101D is connected to the terminal. It can be electrically connected to the portion 101F.
　一方、センス電極ライン１０１Ｓとは電気的に分離されている中継電極１０１Ｇと端子部１０１Ｆとは、金属配線１０６によって、直接、電気的に接続されているので、中継電極１０１Ｇを端子部１０１Ｆと電気的に接続することができる。 On the other hand, since the relay electrode 101G and the terminal portion 101F that are electrically separated from the sense electrode line 101S are directly electrically connected by the metal wiring 106, the relay electrode 101G is electrically connected to the terminal portion 101F. Can be connected.
　そして、センス電極ライン１０１Ｓと中継電極１０１Ｇとの電気的な接続は、中継電極１０１Ｇ上に形成された金属配線１０６における貫通孔１０６Ｃと、中継電極１０１Ｇおよび金属配線１０６上に形成された層間絶縁膜２における貫通孔２Ｃと、を介して、第１のブリッジ電極１０３と同一層によって形成された第２のブリッジ電極１０３Ａによってなされている。したがって、センス電極ライン１０１Ｓを端子部１０１Ｆと電気的に接続することができる。 The sense electrode line 101S and the relay electrode 101G are electrically connected to each other through the through hole 106C in the metal wiring 106 formed on the relay electrode 101G and the interlayer insulating film formed on the relay electrode 101G and the metal wiring 106. 2 and the second bridge electrode 103A formed of the same layer as the first bridge electrode 103 through the through hole 2C. Therefore, the sense electrode line 101S can be electrically connected to the terminal portion 101F.
　なお、センス電極ライン１０１Ｓを金属配線１０６を介して、端子部１０１Ｆと電気的に接続する際には、外側にある配線の電界をシールドする役割をするグランド配線１０６Ｘが、図中の左右方向に延びるように、センス電極ライン１０１Ｓと最隣接する箇所に設けられているため、中継電極１０１Ｇを用いる構成となっている。 When the sense electrode line 101S is electrically connected to the terminal portion 101F via the metal wiring 106, the ground wiring 106X that serves to shield the electric field of the wiring on the outside is provided in the horizontal direction in the drawing. Since it is provided at a position closest to the sense electrode line 101S so as to extend, the relay electrode 101G is used.
　そして、図５（ａ）から図５（ｅ）は、タッチパネル１の製造工程を示しており、図５（ａ）はユニット電極１０１Ｕとユニット電極１０１Ｕ′と接続部１０１Ｃと端子部１０１Ｆとを、同一層であるＩＴＯ層で形成する工程を示し、図５（ｂ）はＭｏＮｂ/Ａｌ/ＭｏＮｂの３層構造からなる金属配線１０６の形成工程を示しており、端子部１０１Ｆ近傍の配線形成領域Ｒ２においては、端子部１０１Ｆ上に、金属配線１０６が設けられており、配線形成領域Ｒ２の外側の一端部に形成された端子部１０１Ｆは、外部と電気的に接続するため露出されている。 5A to 5E show the manufacturing process of the touch panel 1, and FIG. 5A shows the unit electrode 101U, the unit electrode 101U ′, the connection portion 101C, and the terminal portion 101F. FIG. 5B shows a process of forming a metal wiring 106 having a three-layer structure of MoNb / Al / MoNb, and a wiring formation region R2 in the vicinity of the terminal portion 101F. In FIG. 2, the metal wiring 106 is provided on the terminal portion 101F, and the terminal portion 101F formed at one end portion outside the wiring formation region R2 is exposed to be electrically connected to the outside.
　それから、図５（ｃ）は、その膜厚が端部に近づくにつれて連続的に減少する切欠き部３（テーパー形状形成部）を有する層間絶縁膜２の形成工程を示し、図５（ｄ）は、切欠き部３（テーパー形状形成部）を有する層間絶縁膜２上に第１のブリッジ電極１０３を形成する工程を示し、図５（ｅ）は保護膜１０５の形成工程を示している。なお、図示されているように、配線形成領域Ｒ２の外側の一端部に形成された端子部１０１Ｆは、外部と電気的に接続するため、その上に保護膜１０５が形成されず、露出されている。 Then, FIG. 5C shows a process of forming the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion, and FIG. FIG. 5 shows a step of forming the first bridge electrode 103 on the interlayer insulating film 2 having the notch portion 3 (taper shape forming portion), and FIG. 5E shows a step of forming the protective film 105. As shown in the figure, since the terminal portion 101F formed at one end portion outside the wiring formation region R2 is electrically connected to the outside, the protective film 105 is not formed thereon and is exposed. Yes.
　次に、図６から図８に基づいて、上述したタッチパネルを備えた表示装置の一例として、液晶表示装置を例に挙げて説明する。 Next, based on FIGS. 6 to 8, a liquid crystal display device will be described as an example of the display device having the touch panel described above.
　図６は、タッチパネルを備えた２Ｄ液晶表示装置１０の一例を示す図である。 FIG. 6 is a diagram illustrating an example of the 2D liquid crystal display device 10 including a touch panel.
　図示されているように、上述したタッチパネルに相当するタッチパネル６１は、基板１０５と、基板１０５と対向するように設けられた基板６１ｂと、両基板間であって、両基板１０５・６１ｂの何れか一方側に形成された複数の膜６１ａと、を備えている。 As shown in the figure, a touch panel 61 corresponding to the touch panel described above includes a substrate 105, a substrate 61b provided so as to face the substrate 105, and between the substrates, and either of the substrates 105 and 61b. And a plurality of films 61a formed on one side.
　一方、液晶パネル６２は、ＴＦＴ基板６２ａと、カラーフィルタ基板６２ｂと、両基板を貼り合わせるためのシール材６２ｃと、貼り合わせられた両基板間に封入された液晶層６２ｄと、ＴＦＴ基板６２ａにおいて、液晶層６２ｄと接する面側の反対面に設けられた偏光板６２ｅと、カラーフィルタ基板６２ｂにおいて、液晶層６２ｄと接する面側の反対面に設けられた偏光板６２ｆと、を備えている。 On the other hand, the liquid crystal panel 62 includes a TFT substrate 62a, a color filter substrate 62b, a sealing material 62c for bonding the two substrates, a liquid crystal layer 62d sealed between the bonded substrates, and a TFT substrate 62a. And a polarizing plate 62e provided on the opposite side of the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f provided on the opposite side of the surface in contact with the liquid crystal layer 62d in the color filter substrate 62b.
　なお、タッチパネル６１と液晶パネル６２とは、図示されてないが、接着層（未図示）などを用いて、貼り合わせられ、タッチパネル付き２Ｄ液晶表示装置１０を完成させることができる。 Although the touch panel 61 and the liquid crystal panel 62 are not shown, they can be bonded together using an adhesive layer (not shown) or the like to complete the 2D liquid crystal display device 10 with a touch panel.
　図７は、オンセル型のタッチパネルを備えた液晶表示装置２０の一例を示す図である。 FIG. 7 is a diagram illustrating an example of the liquid crystal display device 20 including an on-cell type touch panel.
　図示されているように、液晶表示装置２０においては、カラーフィルタ基板６２ｂにおいて、液晶層６２ｄと接する面側の反対面に複数の膜６１ａが形成され、その上に偏光板６２ｆが形成され、最後に基板６１ｂが形成されるという点で、図６に示したタッチパネルを備えた２Ｄ液晶表示装置１０とは異なる。 As illustrated, in the liquid crystal display device 20, in the color filter substrate 62b, a plurality of films 61a are formed on the surface opposite to the surface in contact with the liquid crystal layer 62d, and a polarizing plate 62f is formed thereon. 6 is different from the 2D liquid crystal display device 10 having the touch panel shown in FIG. 6 in that a substrate 61b is formed.
　液晶表示装置２０においては、タッチパネル側に備えられる基板が一つ少ない分、薄型化することができる。 The liquid crystal display device 20 can be thinned by one less substrate provided on the touch panel side.
　図８は、タッチパネルを備えた３Ｄ液晶表示装置３０の一例を示す図である。 FIG. 8 is a diagram illustrating an example of a 3D liquid crystal display device 30 including a touch panel.
　図示されているように、３Ｄ液晶表示装置３０には、タッチパネル６１と液晶パネル６２との他に、タッチパネル６１と液晶パネル６２との間にスイッチ液層パネル６３が備えられている。 As shown in the figure, the 3D liquid crystal display device 30 is provided with a switch liquid layer panel 63 between the touch panel 61 and the liquid crystal panel 62 in addition to the touch panel 61 and the liquid crystal panel 62.
　スイッチ液層パネル６３は、下側スイッチ基板６３ａと上側スイッチ基板６３ｂとが、シール材６３ｃによって張り合わせられており、上記両基板間には液晶層６３ｄが備えられている。 In the switch liquid layer panel 63, a lower switch substrate 63a and an upper switch substrate 63b are bonded together by a sealing material 63c, and a liquid crystal layer 63d is provided between the two substrates.
　下側スイッチ基板６３ａにおいて、液晶層６３ｄと接する側の面には、コモン電極６４が形成されており、一方、上側スイッチ基板６３ｂにおいて、液晶層６３ｄと接する側の面には、複数のセグメント電極６５が形成されている。 A common electrode 64 is formed on the surface of the lower switch substrate 63a that is in contact with the liquid crystal layer 63d, while a plurality of segment electrodes are formed on the surface of the upper switch substrate 63b that is in contact with the liquid crystal layer 63d. 65 is formed.
　そして、上側スイッチ基板６３ｂにおいて、タッチパネル６１と接する側の面には偏光板６３ｅが設けられており、下側スイッチ基板６３ａにおいて、液晶パネル６２と接する側の面には、接着層６６が形成されている。 In the upper switch substrate 63b, a polarizing plate 63e is provided on the surface in contact with the touch panel 61, and an adhesive layer 66 is formed on the surface in contact with the liquid crystal panel 62 in the lower switch substrate 63a. ing.
　なお、スイッチ液晶パネル６３は、液晶パネル６２によって表示される両眼視差を有する右画像と左画像とを、所定周期で交互に表示させる役割をする。 The switch liquid crystal panel 63 plays a role of alternately displaying a right image and a left image having binocular parallax displayed by the liquid crystal panel 62 at a predetermined cycle.
　なお、本実施の形態においては、タッチパネルを備えた液晶表示装置を例に挙げて説明をしたが、表示部の種類は液晶パネルに限定されることはなく、例えば、タッチパネルを備えた有機ＥＬ表示装置などであってもよいのは勿論である。 In this embodiment, the liquid crystal display device provided with the touch panel has been described as an example. However, the type of the display unit is not limited to the liquid crystal panel, and for example, an organic EL display provided with the touch panel. Of course, it may be a device or the like.
　〔実施の形態２〕
　次に、図９に基づいて、本発明の第２の実施形態について説明する。上述した実施の形態１のタッチパネル１においては、層間絶縁膜２における切欠き部３が、層間絶縁膜２のセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向（図中上下方向）の両端部に、それぞれ一つずつ設けられているのに対し、本実施の形態のタッチパネル１ａにおいては、層間絶縁膜２ａにおける切欠き部３ａが、層間絶縁膜２ａのセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向（図中上下方向）の両端部に、それぞれ複数個設けられている点において実施の形態１とは異なっており、その他の構成については実施の形態１において説明したとおりである。説明の便宜上、上記の実施の形態１の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。 [Embodiment 2]
Next, a second embodiment of the present invention will be described based on FIG. In the touch panel 1 of the first embodiment described above, the notch 3 in the interlayer insulating film 2 is the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2 is formed (vertical direction in the figure). In contrast, in the touch panel 1a of the present embodiment, the notch 3a in the interlayer insulating film 2a is adjacent to the sense electrode line 101S of the interlayer insulating film 2a. This embodiment is different from the first embodiment in that a plurality of unit electrodes 101U ′ are provided at both ends in the direction in which the unit electrode 101U ′ is formed (vertical direction in the drawing). Just as you did. For convenience of explanation, members having the same functions as those shown in the drawings of the first embodiment are given the same reference numerals, and descriptions thereof are omitted.
　図９は、タッチパネル１ａの概略構成を示す図である。 FIG. 9 is a diagram showing a schematic configuration of the touch panel 1a.
　図示されているように、タッチパネル１ａにおいては、層間絶縁膜２ａにおける切欠き部３ａが、層間絶縁膜２ａのセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向の両端部に、それぞれ３個ずつ設けられている。 As shown in the figure, in the touch panel 1a, the notch portions 3a in the interlayer insulating film 2a are respectively formed at both end portions in the direction in which the unit electrode 101U 'adjacent to the sense electrode line 101S of the interlayer insulating film 2a is formed. Three are provided.
　上記構成によれば、層間絶縁膜２ａにおける切欠き部３ａが、層間絶縁膜２ａの一端部において、３個形成されているため、例えば、層間絶縁膜２ａ上に、第１のブリッジ電極１０３や接続部１０１Ｃを形成する際に、位置ずれが生じても、第１のブリッジ電極１０３の一部や接続部１０１Ｃの一部が、層間絶縁膜２ａの切欠き部３ａ上に形成される確立が高くなる。 According to the above configuration, since the three cutout portions 3a in the interlayer insulating film 2a are formed at one end of the interlayer insulating film 2a, for example, the first bridge electrode 103 or the Even when misalignment occurs when forming the connection portion 101C, it is possible to establish that a part of the first bridge electrode 103 and a part of the connection portion 101C are formed on the notch 3a of the interlayer insulating film 2a. Get higher.
　したがって、層間絶縁膜２ａを形成した後に、層間絶縁膜２ａ上に、第１のブリッジ電極１０３や接続部１０１Ｃを形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネル１ａを実現することができる。 Therefore, in the process of forming the first bridge electrode 103 and the connecting portion 101C on the interlayer insulating film 2a after the interlayer insulating film 2a is formed, the disconnection (disconnection) hardly occurs, so that the yield in the manufacturing process is increased. An improved touch panel 1a can be realized.
　なお、本実施の形態においては、層間絶縁膜２ａにおける切欠き部３ａを、層間絶縁膜２ａの両端部に、それぞれ３個ずつ設けた場合について説明したが、切欠き部３ａの数がこれに限定されることはない。 In the present embodiment, a case has been described in which three notches 3a in the interlayer insulating film 2a are provided at both ends of the interlayer insulating film 2a. However, the number of the notched portions 3a is not limited to this. There is no limit.
　また、本実施の形態においては、層間絶縁膜２ａにおける切欠き部３ａを、センス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向において、対称的に形成したが、これに限定されることはなく、後述する実施の形態３のように、層間絶縁膜２ａ上に接続部１０１Ｃが形成される場合には、層間絶縁膜２ａにおける切欠き部３ａを、ドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向において、対称的に形成することもできる。 In the present embodiment, the notch 3a in the interlayer insulating film 2a is formed symmetrically in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S is formed. However, the present invention is not limited to this. In the case where the connection portion 101C is formed on the interlayer insulating film 2a as in the third embodiment to be described later, the notch portion 3a in the interlayer insulating film 2a is replaced with a unit adjacent to the drive electrode line 101D. It can also be formed symmetrically in the direction in which the electrode 101U is formed.
　さらには、層間絶縁膜２ａにおける切欠き部３ａは、上記方向において、非対称的に形成することもできる。 Furthermore, the notch 3a in the interlayer insulating film 2a can be formed asymmetrically in the above direction.
　〔実施の形態３〕
　次に、図１０から図１２に基づいて、本発明の第３の実施形態について説明する。本実施の形態のタッチパネル１ｂにおいては、層間絶縁膜２ｂ上に接続部１０１Ｃが形成されており、接続部１０１Ｃが延びるように形成される方向である層間絶縁膜２ｂのドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向（図中左右方向）の両端部に、それぞれ層間絶縁膜２ｂにおける切欠き部３ｂが設けられている点において実施の形態１および実施の形態２とは異なっており、その他の構成については実施の形態１および実施の形態２において説明したとおりである。説明の便宜上、上記の実施の形態１および実施の形態２の図面に示した部材と同じ機能を有する部材については、同じ符号を付し、その説明を省略する。 [Embodiment 3]
Next, a third embodiment of the present invention will be described with reference to FIGS. In touch panel 1b of the present embodiment, connection portion 101C is formed on interlayer insulating film 2b, and adjacent to drive electrode line 101D of interlayer insulating film 2b in the direction in which connection portion 101C extends. It differs from the first and second embodiments in that notches 3b in the interlayer insulating film 2b are provided at both ends in the direction in which the unit electrode 101U is formed (left and right in the figure). Other configurations are as described in the first and second embodiments. For convenience of explanation, members having the same functions as those shown in the drawings of Embodiment 1 and Embodiment 2 described above are given the same reference numerals, and descriptions thereof are omitted.
　図１０は、タッチパネル１ｂの概略構成を示す図である。 FIG. 10 is a diagram showing a schematic configuration of the touch panel 1b.
　図示されているように、タッチパネル１ｂにおいては、層間絶縁膜２ｂにおける切欠き部３ｂが、層間絶縁膜２ｂのドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向（図中左右方向）の両端部の略中央部に、対象的にそれぞれ１個ずつ設けられている。 As shown in the drawing, in the touch panel 1b, the notch 3b in the interlayer insulating film 2b is in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed (left-right direction in the figure). A single object is provided in the approximate center of both ends.
　上記構成によれば、層間絶縁膜２ｂを形成した後に、層間絶縁膜２ｂ上に、接続部１０１Ｃを形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネル１ｂを実現することができる。 According to the above configuration, after forming the interlayer insulating film 2b, in the process of forming the connection portion 101C on the interlayer insulating film 2b, the disconnection (disconnection) hardly occurs, and thus the yield is improved in the manufacturing process. The touch panel 1b can be realized.
　図１１（ａ）は、図１０に示すタッチパネル１ｂのＢ１－Ｂ１′線の断面を示す図であり、図１１（ｂ）は、図１０に示すタッチパネル１ｂのＣ１－Ｃ１′線の断面を示す図である。 11A is a diagram showing a cross section taken along line B1-B1 ′ of touch panel 1b shown in FIG. 10, and FIG. 11B is a cross section taken along line C1-C1 ′ of touch panel 1b shown in FIG. FIG.
　図１１（ａ）は、層間絶縁膜２ｂのセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′が形成される方向の両端部を示しており、本実施の形態においては、この方向の両端部には、切欠き部３ｂを設けてないため、層間絶縁膜２ｂ上に形成されるセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′には、段切れ（断線）が生じる。 FIG. 11A shows both end portions in the direction in which the unit electrode 101U ′ adjacent to the sense electrode line 101S of the interlayer insulating film 2b is formed. In the present embodiment, both end portions in this direction are shown at both ends. Since the notched portion 3b is not provided, a step break (disconnection) occurs in the unit electrode 101U ′ adjacent to the sense electrode line 101S formed on the interlayer insulating film 2b.
　しかしながら、本実施の形態においては、図示されているように、層間絶縁膜２ｂの下層に形成した第１のブリッジ電極１０３を用いて、センス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′同士を電気的に接続しているため、層間絶縁膜２ｂの両端部に形成されたセンス電極ライン１０１Ｓの隣接するユニット電極１０１Ｕ′に、段切れ（断線）が生じても問題は生じない。 However, in the present embodiment, as shown in the drawing, the adjacent unit electrodes 101U ′ of the sense electrode line 101S are electrically connected to each other using the first bridge electrode 103 formed in the lower layer of the interlayer insulating film 2b. Therefore, there is no problem even if the unit electrode 101U ′ adjacent to the sense electrode line 101S formed at both ends of the interlayer insulating film 2b is disconnected (disconnected).
　一方、図１１（ｂ）は、層間絶縁膜２ｂのドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向（図中左右方向）の両端部を示しており、本実施の形態においては、この方向の両端部に切欠き部３ｂを設けているため、層間絶縁膜２ｂ上に形成されるドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕには、段切れ（断線）が生じない。 On the other hand, FIG. 11B shows both end portions in the direction (left and right direction in the figure) in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed. In the present embodiment, Since the notches 3b are provided at both ends in this direction, no step break (disconnection) occurs in the unit electrode 101U adjacent to the drive electrode line 101D formed on the interlayer insulating film 2b.
　したがって、層間絶縁膜２ｂを形成した後に、層間絶縁膜２ｂ上に、接続部１０１Ｃを形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネル１ｂを実現することができる。 Therefore, in the process of forming the connection portion 101C on the interlayer insulating film 2b after the interlayer insulating film 2b is formed, disconnection (disconnection) hardly occurs, so that the touch panel 1b with improved yield in the manufacturing process is realized. can do.
　そして、図１２（ａ）から図１２（ｅ）は、タッチパネル１ｂの製造工程を示しており、図１０におけるＢ１－Ｂ１′線の断面とＣ１－Ｃ１′線の断面と、図４に示す配線形成領域Ｒ２のＢ２－Ｂ２′線の断面を示す。 12A to 12E show the manufacturing process of the touch panel 1b. The cross section taken along the line B1-B1 'and the cross section taken along the line C1-C1' in FIG. 10, and the wiring shown in FIG. A cross section taken along line B2-B2 'of the formation region R2 is shown.
　図１２（ａ）は、第１のブリッジ電極１０３と端子部１０１Ｆとを、同一層であるＩＴＯ層で形成する工程を示し、図１２（ｂ）はＭｏＮｂ/Ａｌ/ＭｏＮｂの３層構造からなる金属配線１０６の形成工程を示しており、端子部１０１Ｆ近傍の配線形成領域Ｒ２においては、端子部１０１Ｆ上に、金属配線１０６が設けられている。また、図示してないが、配線形成領域Ｒ２の外側の一端部に形成された端子部１０１Ｆは、図５に示す場合と同様に、外部と電気的に接続するため露出されている。 FIG. 12A shows a process of forming the first bridge electrode 103 and the terminal portion 101F with the same ITO layer, and FIG. 12B has a three-layer structure of MoNb / Al / MoNb. The process for forming the metal wiring 106 is shown. In the wiring formation region R2 near the terminal portion 101F, the metal wiring 106 is provided on the terminal portion 101F. Although not shown, the terminal portion 101F formed at one end on the outer side of the wiring formation region R2 is exposed to be electrically connected to the outside as in the case shown in FIG.
　それから、図１２（ｃ）は、その膜厚が端部に近づくにつれて連続的に減少する切欠き部３ｂ（テーパー形状形成部）を有する層間絶縁膜２ｂの形成工程を示し、切欠き部３ｂは、層間絶縁膜２ｂのドライブ電極ライン１０１Ｄの隣接するユニット電極１０１Ｕが形成される方向の両端部にのみ形成されている。そして、図示されているように、配線形成領域Ｒ２において、端子部１０１Ｆ上に、金属配線１０６が設けられている部分には、層間絶縁膜２ｂは形成されない。 Then, FIG. 12C shows a process of forming an interlayer insulating film 2b having a notch portion 3b (taper shape forming portion) whose thickness continuously decreases as it approaches the end portion. These are formed only at both ends in the direction in which the unit electrode 101U adjacent to the drive electrode line 101D of the interlayer insulating film 2b is formed. As shown in the drawing, the interlayer insulating film 2b is not formed in the portion where the metal wiring 106 is provided on the terminal portion 101F in the wiring formation region R2.
　図１２（ｄ）は、ユニット電極１０１Ｕとユニット電極１０１Ｕ′と接続部１０１Ｃとを、同一層であるＩＴＯ層で形成する工程を示し、図１２（ｅ）は保護膜１０４の形成工程を示している。 FIG. 12D shows a process of forming the unit electrode 101U, the unit electrode 101U ′, and the connection portion 101C with the same ITO layer, and FIG. 12E shows a process of forming the protective film 104. Yes.
　本発明のタッチパネルの上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、該当両端部において、対称的に形成されていることが好ましい。 In the insulating layer of the touch panel of the present invention, it is preferable that the portions formed such that the film thickness continuously decreases as approaching the end portions are formed symmetrically at the corresponding end portions.
　上記構成によれば、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分（緩やかなテーパー形状に形成されている部分）は、該当両端部において、対称的に形成されているので、上記絶縁層上に上記第１接続部や上記第２接続部を直線状に形成することができるので、上記第１接続部や上記第２接続部の形成面積を減らすことができる。 According to the above configuration, in the insulating layer, the portion formed so as to continuously decrease as the film thickness approaches the end portion (portion formed in a gently tapered shape) Since it is formed symmetrically, the first connection part and the second connection part can be formed in a straight line on the insulating layer, so the formation area of the first connection part and the second connection part Can be reduced.
　本発明のタッチパネルは、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、該当端部の略中央部に形成されていることが好ましい。 In the touch panel of the present invention, it is preferable that a portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is formed at a substantially central portion of the corresponding end portion.
　上記構成によれば、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分（緩やかなテーパー形状に形成されている部分）は、該当端部の略中央部に形成されているので、例えば、上記絶縁層上に上記第１接続部や上記第２接続部を形成する際に、位置ずれが生じても、上記第１接続部の一部や上記第２接続部の一部が、上記膜厚が端部に近づくにつれて連続的に減少するように形成されている部分上に形成される確立が高くなる。 According to the above configuration, in the insulating layer, a portion formed so as to continuously decrease as the film thickness approaches the end portion (portion formed in a gently tapered shape) Since it is formed in the central part, for example, even when a positional shift occurs when forming the first connection part or the second connection part on the insulating layer, a part of the first connection part or the above The probability that a part of the second connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes high.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部や上記第２接続部を形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process. A touch panel can be realized.
　本発明のタッチパネルは、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、一端部において複数であることが好ましい。 In the touch panel of the present invention, it is preferable that a plurality of portions at one end portion are formed in the insulating layer so as to continuously decrease as the film thickness approaches the end portion.
　上記構成によれば、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分（緩やかなテーパー形状に形成されている部分）は、一端部において、複数個形成されているため、例えば、上記絶縁層上に上記第１接続部や上記第２接続部を形成する際に、位置ずれが生じても、上記第１接続部の一部や上記第２接続部の一部が、上記膜厚が端部に近づくにつれて連続的に減少するように形成されている部分上に形成される確立が高くなる。 According to the above-described configuration, in the insulating layer, a portion (a portion formed in a gently tapered shape) formed so as to continuously decrease as the film thickness approaches the end portion is a plurality of portions at one end portion. For example, even when misalignment occurs when forming the first connection portion or the second connection portion on the insulating layer, a part of the first connection portion or the second connection portion is formed. The probability that a part of the connection part is formed on a part formed so as to continuously decrease as the film thickness approaches the end part becomes higher.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部や上記第２接続部を形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process. A touch panel can be realized.
　本発明のタッチパネルにおいては、上記第１電極と上記第２電極との交差部分において、上記第２接続部は、上記第１接続部上に上記絶縁層を介して形成されており、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることが好ましい。 In the touch panel of the present invention, the second connection portion is formed on the first connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the first direction is continuously reduced as approaching the end portions.
　上記構成によれば、上記絶縁層の上記第１の方向における両端部には、その膜厚が緩やかに変化する箇所が存在することとなる。 According to the above configuration, there are portions where the film thickness gradually changes at both ends of the insulating layer in the first direction.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第２接続部を上記第１の方向に延びるように形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the second connecting portion on the insulating layer so as to extend in the first direction after forming the insulating layer, disconnection (disconnection) is unlikely to occur. A touch panel with improved yield can be realized.
　本発明のタッチパネルにおいては、上記第１電極と上記第２電極との交差部分において、上記第１接続部は、上記第２接続部上に上記絶縁層を介して形成されており、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることが好ましい。 In the touch panel of the present invention, the first connection portion is formed on the second connection portion via the insulating layer at the intersection of the first electrode and the second electrode, and the insulating layer It is preferable that the film thickness of at least a part of both end portions in the second direction is continuously reduced as the end portion is approached.
　上記構成によれば、上記絶縁層の上記第２の方向における両端部には、その膜厚が緩やかに変化する箇所が存在することとなる。 According to the above configuration, there are portions where the film thickness gradually changes at both ends of the insulating layer in the second direction.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部を上記第２の方向に延びるように形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, after forming the insulating layer, in the step of forming the first connection portion on the insulating layer so as to extend in the second direction, disconnection (disconnection) hardly occurs. A touch panel with improved yield can be realized.
　本発明のタッチパネルは、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、７０度以下であることが好ましい。 In the touch panel of the present invention, it is preferable that a taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 70 degrees or less.
　上記構成によれば、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、７０度以下で形成されているため、比較的に緩やかなテーパー形状を有する。 According to the above configuration, in the insulating layer, the taper angle in the portion formed so that the film thickness continuously decreases as it approaches the end portion is formed at 70 degrees or less, so that it is relatively gentle. Has a tapered shape.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部や上記第２接続部を形成する工程においては、段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the first connection portion and the second connection portion on the insulating layer after forming the insulating layer, disconnection (disconnection) is unlikely to occur, so the yield is improved in the manufacturing process. A touch panel can be realized.
　本発明のタッチパネルは、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、４５度以下であることが好ましい。 In the touch panel of the present invention, it is preferable that the taper angle in a portion where the thickness of the insulating layer is continuously reduced as it approaches the end portion is 45 degrees or less.
　上記構成によれば、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、４５度以下で形成されているため、より緩やかなテーパー形状を有する。 According to the above configuration, in the insulating layer, the taper angle in the portion where the film thickness is continuously reduced as it approaches the end is formed at 45 degrees or less, so that the taper is gentler. Has a shape.
　したがって、上記絶縁層を形成した後に、上記絶縁層上に、上記第１接続部や上記第２接続部を形成する工程においては、さらに段切れ（断線）が生じにくいので、製造工程において歩留まりが向上されたタッチパネルを実現することができる。 Therefore, in the process of forming the first connection portion and the second connection portion on the insulating layer after the insulating layer is formed, further disconnection (disconnection) is less likely to occur, and thus the yield in the manufacturing process is increased. An improved touch panel can be realized.
　本発明のタッチパネルは、上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、平面視において、三角形状に切欠かれており、上記三角形状に切欠かれている箇所における頂角は、９０度以下であることが好ましい。 In the touch panel of the present invention, in the insulating layer, a portion formed so as to continuously decrease as the film thickness approaches the end portion is cut out in a triangular shape in plan view, and the triangular shape is cut out. It is preferable that the apex angle in the place where it is left is 90 degrees or less.
　上記構成によれば、頂角が９０度以下である三角形状の遮光部を有するマスクを用いて、露光・現像することで、上記絶縁層において上記三角形状に切欠かれている箇所を形成することができる。 According to the above configuration, by using a mask having a triangular light shielding portion with an apex angle of 90 degrees or less, exposure and development are performed, so that a portion that is cut out in the triangular shape is formed in the insulating layer. Can do.
　上記マスクの三角形状の遮光部における、頂角付近においては、露光時に光の回り込み量が多いが、頂角から離れていくにつれてなだらかに光の回り込み量が減少するので、ネガ型の感光性絶縁膜を用いれば、容易に、上記絶縁層の膜厚が頂角から端部に近づくにつれて連続的に減少するような部分を形成することができる。 In the triangular light-shielding part of the mask, near the apex angle, the amount of light wrapping is large at the time of exposure, but as the distance from the apex angle increases, the amount of wrapping of light gradually decreases. If a film is used, it is possible to easily form a portion where the thickness of the insulating layer continuously decreases as it approaches the end portion from the apex angle.
　本発明の表示装置において、上記表示パネルは、液晶層を備えた液晶パネルであることが好ましい。 In the display device of the present invention, the display panel is preferably a liquid crystal panel including a liquid crystal layer.
　本発明の表示装置において、上記表示パネルは、有機ＥＬ層を備えた有機ＥＬパネルであることが好ましい。 In the display device of the present invention, the display panel is preferably an organic EL panel provided with an organic EL layer.
　上記構成によれば、製造工程において歩留まりが向上されたタッチパネル付き表示装置を実現することができる。 According to the above configuration, a display device with a touch panel with improved yield in the manufacturing process can be realized.
　本発明は上記した各実施の形態に限定されるものではなく、請求項に示した範囲で種々の変更が可能であり、異なる実施の形態にそれぞれ開示された技術的手段を適宜組み合わせて得られる実施の形態についても本発明の技術的範囲に含まれる。 The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and the present invention can be obtained by appropriately combining technical means disclosed in different embodiments. Embodiments are also included in the technical scope of the present invention.
　本発明は、タッチパネルおよびタッチパネルを備えた表示装置に好適に用いることができる。 The present invention can be suitably used for a touch panel and a display device including the touch panel.
　１、１ａ、１ｂ、６１　　タッチパネル
　２、２ａ、２ｂ　　　　　層間絶縁膜（絶縁層）
　２′　　　　　　　　　　層間絶縁膜（絶縁層）
　２Ｃ　　　　　　　　　　貫通孔
　３、３ａ、３ｂ　　　　　切欠き部
　４　　　　　　　　　　　マスク
　５　　　　　　　　　　　開口部
　６　　　　　　　　　　　遮光領域
　１０　　　　　　　　　　液晶表示装置（表示装置）
　２０　　　　　　　　　　液晶表示装置（表示装置）
　３０　　　　　　　　　　液晶表示装置（表示装置）
　１０１Ｄ　　　　　　　　ドライブ電極ライン（第２電極）
　１０１Ｓ　　　　　　　　センス電極ライン（第１電極）
　１０１Ｕ、１０１Ｕ′　　ユニット電極
　１０１Ｃ　　　　　　　　接続部（第２接続部）
　１０１Ｅ　　　　　　　　接続電極
　１０１Ｆ　　　　　　　　端子部
　１０１Ｇ　　　　　　　　中継電極
　１０２　　　　　　　　　層間絶縁膜
　１０３　　　　　　　　　第１のブリッジ電極（第１接続部）
　１０３Ａ　　　　　　　　第２のブリッジ電極
　１０４　　　　　　　　　保護膜
　１０５　　　　　　　　　基板（絶縁基板）
　１０６　　　　　　　　　金属配線
　１０６Ｃ　　　　　　　　貫通孔
　１０６Ｘ　　　　　　　　グランド配線
　Ａ　　　　　　　　　　　頂角 1, 1a, 1b, 61 Touch panel 2, 2a, 2b Interlayer insulating film (insulating layer)
2 'Interlayer insulation film (insulation layer)
2C Through- hole 3, 3a, 3b Notch 4 Mask 5 Opening 6 Light-shielding area 10 Liquid crystal display device (display device)
20 Liquid crystal display device (display device)
30 Liquid crystal display device (display device)
101D Drive electrode line (second electrode)
101S sense electrode line (first electrode)
101U, 101U ′ unit electrode 101C connection part (second connection part)
101E Connection electrode 101F Terminal portion 101G Relay electrode 102 Interlayer insulating film 103 First bridge electrode (first connection portion)
103A Second bridge electrode 104 Protective film 105 Substrate (insulating substrate)
106 Metal wiring 106C Through hole 106X Ground wiring A Vertical angle

Claims (13)

  1. 　第１の方向に配列された複数の第１電極と、上記第１の方向とは異なる第２の方向に配列された複数の第２電極とが、互いに交差するように絶縁基板上に形成されたタッチパネルであって、
    　上記複数の第１電極同士および上記複数の第２電極同士は、電気的に分離されており、
    　上記第１電極および上記第２電極の各々は、複数の所定形状のユニット電極が電気的に接続されて形成されており、
    　上記第１電極のユニット電極と上記第２電極のユニット電極とは、平面視において重ならず、互いに隣接するように、同一平面上に形成され、
    　上記各々の第１電極における隣接するユニット電極同士を電気的に接続する、上記第１電極のユニット電極および上記第２電極のユニット電極とは異なる層で形成された第１接続部と、
    　上記各々の第２電極における隣接するユニット電極同士を電気的に接続する、上記第１接続部とは異なる層によって形成された第２接続部と、を備え、
    　上記第１電極と上記第２電極との交差部分において、上記第１接続部および上記第２接続部の何れか一方は、他方上に絶縁層を介して形成されており、
    　上記絶縁層上に上記第１接続部が形成される場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成され、
    　上記絶縁層上に上記第２接続部が形成される場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることを特徴とするタッチパネル。     A plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction are formed on the insulating substrate so as to cross each other. Touch panel,
    The plurality of first electrodes and the plurality of second electrodes are electrically separated,
    Each of the first electrode and the second electrode is formed by electrically connecting a plurality of unit electrodes of a predetermined shape,
    The unit electrode of the first electrode and the unit electrode of the second electrode are formed on the same plane so as not to overlap each other in plan view,
    A first connection portion formed of a layer different from the unit electrode of the first electrode and the unit electrode of the second electrode, which electrically connect adjacent unit electrodes in each of the first electrodes;
    A second connection part formed by a layer different from the first connection part for electrically connecting adjacent unit electrodes in each of the second electrodes;
    At the intersection of the first electrode and the second electrode, one of the first connection part and the second connection part is formed on the other via an insulating layer,
    When the first connection portion is formed on the insulating layer, the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as the end portion is approached. Formed,
    When the second connection portion is formed on the insulating layer, the film thickness of at least a part of both end portions in the first direction of the insulating layer continuously decreases as approaching the end portion. A touch panel that is formed.
  2. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、該当両端部において、対称的に形成されていることを特徴とする請求項１に記載のタッチパネル。 The portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is formed symmetrically at the corresponding end portions. Touch panel.
  3. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、該当端部の略中央部に形成されていることを特徴とする請求項１または２に記載のタッチパネル。 The portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is formed at a substantially central portion of the corresponding end portion. The touch panel described.
  4. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、一端部において複数であることを特徴とする請求項１から３の何れか１項に記載のタッチパネル。 The said insulating layer WHEREIN: The part currently formed so that a film thickness may reduce continuously as it approaches an edge part is plural in one end part, The any one of Claim 1 to 3 characterized by the above-mentioned. Touch panel.
  5. 　上記第１電極と上記第２電極との交差部分において、上記第２接続部は、上記第１接続部上に上記絶縁層を介して形成されており、
    　上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることを特徴とする請求項１から４の何れか１項に記載のタッチパネル。     At the intersection of the first electrode and the second electrode, the second connection part is formed on the first connection part via the insulating layer,
    The thickness of at least one part of the both ends in the said 1st direction of the said insulating layer is formed so that it may decrease continuously, as it approaches an edge part. The touch panel according to item.
  6. 　上記第１電極と上記第２電極との交差部分において、上記第１接続部は、上記第２接続部上に上記絶縁層を介して形成されており、
    　上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成されていることを特徴とする請求項１から４の何れか１項に記載のタッチパネル。     At the intersection of the first electrode and the second electrode, the first connection part is formed on the second connection part via the insulating layer,
    5. The method according to claim 1, wherein the thickness of at least a part of both end portions in the second direction of the insulating layer is continuously reduced as the end portion is approached. The touch panel according to item.
  7. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、７０度以下であることを特徴とする請求項１から６の何れか１項に記載のタッチパネル。 7. The taper angle in a portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is 70 degrees or less. 7. Touch panel as described in 1.
  8. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分におけるテーパー角は、４５度以下であることを特徴とする請求項７に記載のタッチパネル。 The touch panel according to claim 7, wherein a taper angle in a portion of the insulating layer formed so as to continuously decrease as the film thickness approaches the end portion is 45 degrees or less.
  9. 　上記絶縁層において、膜厚が端部に近づくにつれて連続的に減少するように形成されている部分は、平面視において、三角形状に切欠かれており、
    　上記三角形状に切欠かれている箇所における頂角は、９０度以下であることを特徴とする請求項１から８の何れか１項に記載のタッチパネル。     In the insulating layer, the portion formed so as to continuously decrease as the film thickness approaches the end portion is cut out in a triangular shape in plan view,
    The touch panel according to any one of claims 1 to 8, wherein an apex angle at a location where the triangular shape is cut is 90 degrees or less.
  10. 　請求項１から９の何れか１項に記載のタッチパネルと、表示パネルと、を備えていることを特徴とする表示装置。 A display device comprising the touch panel according to any one of claims 1 to 9 and a display panel.
  11. 　上記表示パネルは、液晶層を備えた液晶パネルであることを特徴とする請求項１０に記載の表示装置。 The display device according to claim 10, wherein the display panel is a liquid crystal panel including a liquid crystal layer.
  12. 　上記表示パネルは、有機ＥＬ層を備えた有機ＥＬパネルであることを特徴とする請求項１０に記載の表示装置。 The display device according to claim 10, wherein the display panel is an organic EL panel including an organic EL layer.
  13. 　第１の方向に配列された複数の第１電極と、上記第１の方向とは異なる第２の方向に配列された複数の第２電極とを、互いに交差するように絶縁基板上に形成するタッチパネルの製造方法であって、
    　上記第１電極および上記第２電極における複数の所定形状のユニット電極と、上記第２電極における隣接するユニット電極同士を電気的に接続する接続部と、を形成する第１工程と、
    　上記第１電極における隣接するユニット電極同士を電気的に接続するブリッジ電極を形成する第２工程と、
    　上記第１電極と上記第２電極との交差部分において、上記接続部または、上記ブリッジ電極を覆うように、絶縁層を形成する第３工程と、を備え、
    　上記第３工程においては、頂角が９０度以下である三角形状の遮光領域を有するマスクを用いて、ネガ型の感光性絶縁膜を露光した後、現像し、
    　上記絶縁層上に上記ブリッジ電極を形成する場合には、上記絶縁層の上記第２の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成し、
    　上記絶縁層上に上記接続部を形成する場合には、上記絶縁層の上記第１の方向における両端部の少なくとも一部の膜厚が端部に近づくにつれて連続的に減少するように形成することを特徴とするタッチパネルの製造方法。     A plurality of first electrodes arranged in a first direction and a plurality of second electrodes arranged in a second direction different from the first direction are formed on the insulating substrate so as to cross each other. A touch panel manufacturing method,
    A first step of forming a plurality of unit electrodes of a predetermined shape in the first electrode and the second electrode, and a connection portion for electrically connecting adjacent unit electrodes in the second electrode;
    A second step of forming a bridge electrode that electrically connects adjacent unit electrodes in the first electrode;
    And a third step of forming an insulating layer so as to cover the connection portion or the bridge electrode at the intersection of the first electrode and the second electrode,
    In the third step, the negative photosensitive insulating film is exposed using a mask having a triangular light shielding region having an apex angle of 90 degrees or less, and then developed.
    When the bridge electrode is formed on the insulating layer, it is formed such that the film thickness of at least a part of both end portions in the second direction of the insulating layer continuously decreases as the end portion is approached,
    When the connection portion is formed on the insulating layer, it is formed so that the film thickness of at least a part of both end portions in the first direction of the insulating layer continuously decreases as the end portion is approached. A manufacturing method of a touch panel characterized by the above.
PCT/JP2012/072991 2011-09-14 2012-09-07 Touch panel, method for manufacturing touch panel, and display device WO2013039017A1 (en)

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WO2017094693A1 (en) * 2015-11-30 2017-06-08 東レ株式会社 Insulating paste for supporting electrode layer, touchscreen, and touchscreen manufacturing method
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