WO2013008721A1 - Device for supplying ozone water and method for supplying ozone water - Google Patents

Abstract

Provided are a device for supplying ozone water and a method for supplying ozone water that supply ozone water to a point of use without reductions in ozone concentration. A device (10) for supplying ozone water is provided with: an ozone water producing means (1) that produces ozone water; a main pipe (11) on which branch points (12, 13, 14), at which the flow of ozone water from the ozone water producing means (1) splits, are formed; branch pipes (15, 16, 17) that connect the branch points and points of use; and a flow rate maintaining means that prevents the flow rate of ozone water flowing in the main pipe and branch pipes from being reduced. The cross-sectional area of the flow path in the main pipe (11) decreases on the downstream side of the branch points (12, 13, 14) from that on the upstream side. The decrease in the cross-sectional area of the flow path of the main pipe (11) corresponds to the amount of flow of ozone water flowing into the branch pipes at the branch points.

Description

Ozone water supply apparatus and ozone water supply method

The present invention relates to an ozone water supply device and an ozone water supply method. More specifically, an ozone water supply device that supplies ozone water from a location where ozone water is generated to a use point (a location where ozone water is used) and ozone without reducing the ozone concentration of ozone water that performs wet treatment on electronic materials and the like The present invention relates to a water supply method.

Conventionally, cleaning of substrates and other electronic parts such as silicon substrates for semiconductors, glass substrates for liquid crystals or quartz substrates for photomasks is represented by RCA cleaning developed by RCA Corporation (Radio of Corporation of America Corp.). As described above, a high concentration chemical solution or detergent and a large amount of pure water or ultrapure water for rinsing it have been used. For the purpose of reducing the cost of the cleaning process and for the purpose of preserving the environment by suppressing the use of a large amount of cleaning water, various efforts have been made to simplify the cleaning technology, and the results have been achieved. As a typical cleaning technique, there is a cleaning technique using cleaning water in which a specific gas such as ozone or hydrogen is dissolved.

For example, ozone water in which ozone is dissolved in pure water has strong oxidizing power even though the dissolved ozone concentration is as low as several mg / L. Therefore, ozone water is used in the process of removing impurities such as organic substances and metals adhering to the surface of the substrate and the process of forming an oxide film layer on the surface of the silicon substrate. In such a process, since the concentration of ozone used greatly affects the cleaning power of the substrate surface and the film thickness to be formed, the management of the ozone concentration is extremely important.

Ozone is easily self-decomposing, and when the distance between the ozone water generation site and the use point is long, the ozone concentration in the ozone water decreases during the transfer of the generated ozone water to the use point.

When there are multiple use points, the ozone water generated at the ozone water generation site is transferred by piping, and the ozone water that flows through the piping each time the ozone water is divided is supplied to the use points in a divided manner. The water flow rate decreases. For this reason, at the use point located downstream, it takes time until the ozone water reaches, and when the ozone water reaches the use point, the ozone self-decomposes and the ozone concentration in the ozone water decreases. .

Patent Documents 1 and 2 describe techniques for preventing a decrease in ozone concentration in ozone water.

In Patent Document 1, when ozone water generated by dissolving ozone in pure water is transferred, the self-decomposition of ozone is suppressed by dissolving carbon dioxide or an organic compound in pure water or ozone water using an ozone water generator. To do. In patent document 2, the chemical | medical agent supply apparatus is installed in the arbitrary positions from the ozone water supply pipe to the discharge pipe of the ozone water supply apparatus, and nitrous acid, nitrite, carbonic acid, carbonate, bicarbonate, sulfite, sulfite, One or more ozone decomposition inhibitors selected from the group consisting of bisulfite and hydrazine are added.

Patent Documents 3 to 5 describe technologies for adjusting ozone concentration in ozone water and easily supplying ozone water having a desired ozone concentration.

In Patent Document 3, in a method for adjusting the concentration of ozone water in which ozone is excessively dissolved, the ozone concentration is adjusted by promoting the decomposition of ozone by the length of the water passage, heating, ultrasonic waves, ultraviolet rays, or turbulence. To do. In patent document 4, ozone containing water is made to contact glass and the ozone concentration of ozone water is adjusted.

Patent Document 5 describes a technique for stably supplying ozone water having a desired concentration. In Patent Document 5, ozone water in which an ozone decomposition inhibiting substance is present is transferred to a use point, and is reduced to a predetermined ozone concentration by a concentration adjusting means in the vicinity of the use point.

JP 2000-37695 A JP 2002-18454 A JP 2000-180433 A JP 2000-334468 A JP 2005-294377 A

The object of the present invention is to supply ozone water without lowering the ozone concentration in ozone water when the distance between the ozone water generating means and the use point is long and / or when a plurality of use points are provided. Another object of the present invention is to provide an ozone water supply device and an ozone water supply method.

The ozone water supply device according to the first aspect is connected to the ozone water generating means for generating ozone water to be supplied to a use point, and the ozone water generating means is divided into the ozone water flowing inside, A main pipe in which a branch point corresponding to the number of use points is formed, a branch pipe connecting the branch point and the use point, and a decrease in the flow velocity of ozone water flowing through the main pipe and the branch pipe are prevented. And a flow rate maintaining means.

According to the first aspect, the flow rate of the ozone water can be prevented from being lowered, the ozone water can be transferred at a desired flow rate, and the ozone water can be supplied to the use point before the ozone concentration in the ozone water is lowered. Therefore, the first aspect can be preferably applied when the distance between the ozone water generating means and the use point is long.

In the second aspect, the flow rate maintaining means is formed such that the flow passage cross-sectional area of the main pipe is decreased on the downstream side of the upstream side of the branch point, and the flow passage cross-sectional area of the main pipe is reduced. The ozone water is divided into the branch pipes at the branch points so as to correspond to the flow rate.

According to the second aspect, it is possible to prevent a decrease in the flow rate of the ozone water even after the ozone water is diverted from the main pipe. This ozone water supply device can be preferably applied to a case where ozone water is supplied by diverting sequentially from a main pipe which is a supply pipe for ozone water to a plurality of use points.

In the third aspect, a bypass pipe for bypassing the flow of ozone water to the use point is provided corresponding to the number of the use points, and switching means for flowing ozone water to the use point or the bypass pipe is provided. .

According to the third aspect, even when ozone water is not supplied to any of the use points, it is possible to flow ozone water through this bypass pipe. For this reason, on the downstream side of the main branch point corresponding to the use point that does not supply ozone water, it is possible to flow ozone water at a flow rate suitable for the cross-sectional area of the main flow path, Can be maintained.

In the ozone water supply device according to the fourth aspect, the flow rate of the ozone water flowing in the branch pipe immediately before the use point is controlled to be at least 30 m / min.

According to the fourth aspect, the ozone water can be supplied to the use point before the ozone in the ozone water self-decomposes and the dissolved ozone concentration decreases.

The ozone water supply device according to the fifth aspect includes pH value suppression means for suppressing the pH value of the ozone water supplied to the use point to 6 or less.

According to the fifth aspect, the pH value of the ozone water is adjusted to be acidic, the self-decomposition of ozone is suppressed, and the decrease of the dissolved ozone concentration in the ozone water can be effectively prevented.

The ozone water supply method according to the sixth aspect is an ozone water supply method for supplying ozone water generated by ozone water generating means to a use point where ozone water is used by piping, wherein the ozone water flows through the piping. The ozone water is supplied to the use point while maintaining the flow rate of the water at a certain level or higher.

According to the sixth aspect, the ozone water can be transferred at a desired flow rate by preventing the flow rate of the ozone water from being lowered. Since the decrease in the flow rate of the ozone water is prevented, the ozone water can be supplied to the use point before the ozone concentration in the ozone water decreases. The sixth aspect can be preferably applied when the distance between the ozone water generating means and the use point is long.

In the seventh aspect, the pipe is connected to the ozone water generating means and shunts ozone water flowing inside, and a main pipe in which branch points corresponding to the number of use points are formed, and the branch point And a branch pipe that communicates with the use point, the flow passage cross-sectional area of the main pipe is formed so that the downstream side is smaller than the upstream side of the branch point, and the flow passage break of the main pipe is formed. The decrease in the area is made to correspond to the flow rate of the ozone water that is diverted to the branch pipe at the branch point, so that the decrease in the flow velocity of the ozone water flowing through the main pipe is prevented and ozone water is supplied.

According to the seventh aspect, it is possible to prevent a decrease in the flow rate of the ozone water flowing through the main pipe even after the ozone water is divided from the main pipe. The seventh aspect can be preferably applied to a case where ozone water is supplied to a plurality of use points by sequentially diverting from a main pipe which is a supply pipe for ozone water.

In the eighth aspect, a bypass pipe for bypassing the flow of ozone water to the use point is provided corresponding to the number of the use points, and switching means for flowing ozone water to the use point or the bypass pipe is provided. The flow of ozone water is caused to flow to the bypass pipe by the switching means corresponding to the selected use point, and the flow rate of the ozone water flowing through the main pipe downstream from the branch point corresponding to the selected use point is decreased. Prevent ozone and supply ozone water.

In the eighth aspect, even when ozone water is not supplied to any of the use points, it is possible to flow ozone water through the bypass pipe. For this reason, on the downstream side of the main branch point corresponding to the use point that does not supply ozone water, it is possible to flow ozone water at a flow rate suitable for the cross-sectional area of the main flow path, Can be maintained.

In the ozone water supply method according to the ninth aspect, the ozone water is supplied by controlling the flow rate of the ozone water flowing in the branch pipe immediately before the use point to be at least 30 m / min.

According to the ninth aspect, the ozone water can be supplied to the use point before the ozone in the ozone water self-decomposes and the dissolved ozone concentration decreases.

In the ozone water supply method according to the tenth aspect, ozone water is supplied with the pH value of ozone water being 6 or less.

According to the tenth aspect, the pH value of ozone water can be adjusted to acidity, self-decomposition can be suppressed, and a decrease in the dissolved concentration of ozone can be effectively prevented.

According to the ozone water supply device and the ozone water supply method according to the present invention, even when the distance between the ozone water generating means and the use point is long, the ozone water can be transferred at a desired flow rate, and the dissolved ozone concentration is reduced. Ozone water can be supplied before.

According to the ozone water supply apparatus and the ozone water supply method according to the present invention, even when ozone water is supplied to a plurality of use points by sequentially diverting from the main pipe for transferring ozone water, the main water flows after the diversion. It can be transferred without reducing the flow rate of ozone water. As a result, it is possible to supply ozone water at a desired flow rate to the use point located on the downstream side, and it is possible to supply ozone water that prevents a decrease in the dissolved ozone concentration.

It is a process flow diagram of an ozone water supply device concerning a 1st embodiment of the present invention. It is a partially notched top view which shows the main pipe and branch pipe which comprise an ozone water supply apparatus. It is explanatory drawing which shows the symbol of the solenoid valve which switches the flow path of ozone water. It is explanatory drawing which shows the switching means which switches the flow path of ozone water which uses a stop valve. It is a process flow diagram showing a part of an ozone water supply device concerning a 2nd embodiment of the present invention. It is explanatory drawing which shows the symbol of the solenoid valve which switches the flow path of ozone water. It is explanatory drawing which shows the switching means which switches the flow path of ozone water which uses a stop valve.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The technical scope of the present invention is not limited only to the following description and drawings.

[First Embodiment]
As shown in FIG. 1, the ozone water supply device 10 includes a pipe for flowing ozone water. The pipe is composed of a main pipe 11 connected to the ozone water generating means 1 and a plurality of branch pipes 15, 16, 17 branched from the main pipe 11. In the main pipe 11, branch points 12, 13 and 14 corresponding to the use points 21, 22 and 23 are provided at different positions from the upstream side to the downstream side of the main pipe 11. The branch pipes 15, 16, and 17 are provided so as to communicate these branch points 12, 13, and 14 with the use points 21, 22, and 23, respectively.

Detour pipes 31, 32, and 33 branching from the branch pipes 15, 16, and 17, respectively, are provided. These bypass pipes 31, 32, 33 send ozone water to the collection line 37 when not supplied to the use points 21, 22, 23.

<Ozone water generating means>
The ozone water generating means 1 includes an ozone generator 4 that is an ozone gas supply source, and an ozone dissolving device 5 that dissolves ozone gas in water (for example, pure water).

The ozone generator 4 is connected to an oxygen gas tank 2 and a carbon dioxide gas tank 3 and supplied with a mixed gas of oxygen gas and carbon dioxide gas. The ozone generator 4 generates ozone by various ozone generation methods. For example, ozone is generated using a silent discharge type, electrolysis type or ultraviolet type ozonizer.

The ozone dissolving device 5 is supplied with water (for example, pure water or may be ultrapure water) and the ozone-containing gas generated by the ozone generator 4 to generate ozone water. The ozone dissolving device 5 is not particularly limited, and for example, a device that dissolves ozone gas using a gas permeable film, a device that dissolves ozone gas in high-pressure pure water using an ejector, or the like can be used. .

In this ozone water generating means 1, carbon dioxide gas is dissolved in water to make the pH of the ozone water acidic, thereby suppressing the self-decomposition of ozone in the ozone water. The pH of ozone water is adjusted by controlling the amount of carbon dioxide dissolved.

In this embodiment, carbon dioxide gas is mixed with oxygen gas. However, carbon dioxide gas may be mixed with ozone gas generated by the ozone gas generator 4, and carbon dioxide gas is added to ozone water from the ozone dissolving device 5. May be dissolved. However, since carbon dioxide gas is used for suppressing the self-decomposition of ozone, it is preferable to dissolve it in water before or before the ozone gas is dissolved. In order to adjust the pH of the ozone water to be acidic, other chemicals (pH adjusting liquid) may be used inside or around the ozone water generating means 1.

The pH of the ozone water after adjusting the pH is preferably 7 or less, more preferably 6 or less, and more preferably 2 to 6.

<Use point>
At the use points 21, 22, and 23, the supplied ozone water is used to clean a substrate such as a semiconductor silicon substrate, a liquid crystal glass substrate, or a photomask quartz substrate and other electronic components. In the use points 21, 22, and 23, a substrate or the like is immersed in a treatment tank to which ozone water is supplied, and treatment is performed by spraying ozone water on the substrate or the like. In the ozone water supply apparatus 10 shown in FIG. 1, three use points 21, 22, and 23 are provided, but this use point may be provided at one place, two places, or four or more places.

<Main pipe and branch pipe>
The main pipe 11 transfers ozone water from the ozone water generating means 1. The main pipe 11 is preferably provided with a water supply pump. The pump may be installed on the upstream side of the ozone dissolving device 5.

As shown in FIG. 2, the main pipe 11 has the same number of branch points 12, 13, and 14 as the number of use points 21, 22, and 23, and diverts ozone water. The main pipe 11 has a tapered shape in which the cross-sectional area of the flow path gradually decreases toward the downstream side in the vicinity of the branch points 12, 13, and 14.

Branch pipes 15, 16, and 17 communicate branch points 12, 13, and 14 of main pipe 11 with use points 21, 22, and 23, respectively. The diverted ozone water is sent to use points 21, 22, and 23.

As shown in FIG. 2, the flow rate maintaining means forms the main pipe 11 such that the flow passage cross-sectional area of the main pipe 11 is reduced on the downstream side from the upstream side of the branch points 12, 13, and 14. The decrease in the flow path cross-sectional area is configured to correspond to the flow rate of the ozone water diverted to the branch pipes 15, 16, and 17 at the branch points 12, 13, and 14.

Even if a portion of the ozone water that has flowed through the main pipe 11a upstream from the branch point 12 is branched from the branch point 12 to the branch pipe 15, the pipe diameter of the main pipe 11b downstream from the branch point 12 is the upstream side. Therefore, the flow rate of the ozone water flowing through the main pipe 11b is within a predetermined range.

Similarly, even if ozone water is diverted from the branch points 13 and 14 to the branch pipes 16 and 17, the pipe diameters of the main pipes 11c and 11d on the downstream side of the branch points 12 and 13 are further reduced. The flow rate of ozone water in the pipes 11c and 11d is within a predetermined range.

By configuring the main pipe 11 and the branch pipes 15, 16, and 17 in this manner, the flow rate of the ozone water flowing through the main pipe 11 can be reduced even after the ozone water is branched from the main pipe 11 to the branch pipes 15, 16, and 17. Reduction is prevented. The pipe diameter of the main pipe 11 is designed according to the flow velocity of ozone water to be obtained.

The flow rate of the ozone water flowing through the main pipe 11 is controlled according to the distance between the ozone water generating means 1 and the use points 21, 22, and 23. The flow rate of ozone water is preferably 30m / min to 180m / min, and 30m / min to 120m so that ozone water can be used at use points 21, 22, and 23 before the concentration of dissolved ozone in ozone water decreases. It is more desirable that the rate be 40 m / min to 90 m / min.

The material of the pipe used for the main pipe 11 and the branch pipes 15, 16, and 17 is not limited, but it is preferable to use a pipe having ozone resistance. For example, a PFA pipe formed of perfluoroalkoxy fluororesin may be used.

<By-pass piping>
The bypass pipes 31, 32, and 33 can flow ozone water to the collection line 37 by bypassing the use points 21, 22, and 23. The bypass pipes 31, 32 and 33 are connected to the branch pipes 15, 16 and 17, and flow through the branch pipes 15, 16 and 17 when ozone water is not supplied to the use points 21, 22 and 23. Diverted ozone water to the recovery line 37.

The branch pipes 15 to 17 and the bypass pipes 31 to 33 are switching means (valves) for switching between the flow path selection for supplying ozone water to the use points 21 to 23 and the flow path selection for flowing to the bypass pipes 31 to 33. ) Is provided.

For example, when the first use point 21 among the three use points 21, 22, and 23 is not used, the entire amount of ozone water flowing through the branch pipe 15 is transferred from the bypass pipe 31 to the recovery line 37. Shed. As described above, even when there is a use point 21 that is not used, the flow rate of the ozone water that flows through the main pipe 11b downstream of the branch point 12 of the main pipe 11 by detouring the ozone water by the bypass pipe 31 is within a predetermined range. Keep in.

Similarly, when other use points 22 or 23 are not used, the total amount of ozone water flowing through the branch pipes 16 and 17 to the respective use points 22 and 23 is transferred from the bypass pipes 32 and 33 to the recovery line 37. Shed. Thereby, the flow velocity of the ozone water in the main pipes 11c and 11d on the downstream side of the branch points 13 and 14 of the main pipe 11 is maintained constant.

The pipe diameters of the bypass pipes 31, 32, and 33 are preferably the same as the pipe diameters of the branch pipes 15, 16, and 17. The material of the bypass pipes 31, 32, 33 is not particularly limited, but it is preferable to use ozone-resistant pipes, for example, PFA pipes formed of perfluoroalkoxy fluororesin are preferably used.

The switching means for selecting the flow path for flowing the total amount of ozone water flowing into the branch pipes 14, 15, 16 to the use points 21, 22, 23 and the flow path for flowing to the bypass pipes 31, 32, 33, For example, the solenoid valve 40 shown in FIG. 3 and the stop valves 41 and 42 shown in FIG. 4 are used.

The solenoid valve 40 shown in FIG. 3 has a state in which the total amount of ozone water flowing through the branch pipes 15, 16, and 17 flows to the use points 21, 22, and 23 by the movement of the spool in the valve and the bypass pipes 31, 32, and 33. Switch to one of the states to flow to. The spool is moved by turning on / off the current to the solenoid provided in the solenoid valve 40.

The stop valve 41 shown in FIG. 4 is provided in the branch pipes 15, 16, and 17 on the downstream side of the branch point between the branch pipes 15, 16, and 17 and the bypass pipes 31, 32, and 33, and the stop valve 42 is bypassed. It is provided in the piping 31, 32, 33 for use. When the supply of ozone water to the use points 21, 22, 23 is stopped and ozone water is allowed to flow to the bypass pipes 31, 32, 33, the stop valve 41 of the branch pipes 15, 16, 17 is closed and the bypass is bypassed. The stop valve 42 of the pipes 31, 32, 33 is opened. When flowing ozone water to the use points 21, 22, and 23, the stop valve 41 is opened and the stop valve 42 is closed.

Note that the switching of the flow path is not limited to the switching means using the solenoid valve 40 shown in FIG. 3 or the stop valves 41 and 42 shown in FIG. 4, and switching means having other configurations may be used.

<Operation of ozone water supply device>
The above ozone water supply apparatus 10 operates as follows.

The ozone water generated by the ozone water generating means 1 flows to the main pipe 11. As described above, when flowing ozone water through the main pipe 11, the ozone water is flowed at a flow rate of at least 30 m / min, preferably 30 m / min to 180 m / min, more preferably 30 m / min to It is sent out at a flow rate of 120 m / min, especially 40 m / min to 90 m / min. At this time, the pH value of the ozone water is preferably 7 or less, particularly 6 or less, and more preferably 2 to 6.

The ozone water sent out to the main pipe 11 flows through the section 11a of the main pipe 11 and reaches the first branch point 12. Part of the ozone water that has reached the branch point 12 is diverted to the branch pipe 15, and the remainder flows through the section 11 b of the main pipe 11.

The ozone water branched from the main pipe 11 to the branch pipe 15 is supplied to the use point 21. The supplied ozone water is used at a use point 21 to clean a substrate such as a semiconductor silicon substrate, a liquid crystal glass substrate, or a photomask quartz substrate and other electronic components.

The ozone water that has not been diverted to the branch pipe 15 passes through the branch point 12 and flows into the section 11b. Since the vicinity of the branch point 12 has a gentle taper, no turbulent flow is generated in the ozone water flowing in the vicinity of the branch point 12, and the flow rate of the ozone water does not decrease due to energy loss. Since the main pipe 11 is formed such that the flow passage cross-sectional area of the section 11b is smaller than the flow passage cross-sectional area of the section 11a, the flow rate of the ozone water in the section 11b is not less than a predetermined value, preferably 30 to 180 m / More preferably, it is 30 to 120 m / min, and particularly preferably 40 to 90 m / min.

Each time the ozone water flowing through the section 11 b reaches the branch points 13 and 14, a part thereof is diverted to the branch pipes 16 and 17, and the remainder is a section downstream of the branch point 14 in the main pipe 11. It flows to 11d.

Ozone water that has flowed through the main pipe 11 at a flow rate higher than a predetermined value flows into the branch pipes 15, 16, and 17 while maintaining the flow rate. The ozone water branched into the branch pipes 15, 16, and 17 flows through the branch pipes 15, 16, and 17 and is supplied to the use points 21, 22, and 23. Used for cleaning. The ozone water that has not been diverted to the branch pipes 15 to 16 at the branch points 12 to 14 flows through the main pipe 11 at a flow rate of a predetermined value or more.

Thus, since the decrease in the flow velocity of the ozone water flowing through the main pipe 11 is prevented, the ozone water can be quickly reached to the respective use points 21, 22, and 23. For this reason, ozone water is supplied to each use point 21, 22, 23 before the dissolved ozone concentration falls without causing ozone in the ozone water to self-decompose.

The ozone water that has flowed through the section 14d of the main pipe 11 is then joined to the collection line 37 and collected.

When ozone water is not supplied to any of the use points 21, 22, and 23, the ozone water is caused to flow through the corresponding bypass pipes 31, 32, and 33 so as to bypass the recovery line 37.

Therefore, even when ozone water is not supplied to one or two or more use points, the flow rate of ozone water in the main pipe 11 on the downstream side of the branch point to the use points is kept within a predetermined range. Can be maintained.

If ozone water is supplied using this ozone water supply device 10, even when the distance between the ozone water generating means 1 and the use points 21, 22, 23 is long, the ozone water can be transferred at a desired flow rate, and dissolved ozone Ozone water can be supplied before the concentration decreases.

When the ozone water is supplied to the multiple use points 21, 22, 23 sequentially from the main pipe 11, the ozone water can be transferred without decreasing the flow velocity of the ozone water flowing through the main pipe 11 after the diversion. The ozone water can be supplied to the use points 22 and 23 located on the downstream side at a desired flow rate. When supplying ozone water with the ozone water supply apparatus 10, ozone water may not be supplied to a predetermined use point (for example, the use point 21 located on the most upstream side). Even in this case, ozone water can be supplied to the use points 22 and 23 located downstream from the use point 21 while maintaining a desired flow rate.

[Second Embodiment]
In the above embodiment, the bypass pipes 31 to 33 are branched from the middle of the branch pipes 15 to 17, but may be branched from a branch point between the main pipe and the branch pipe or in the vicinity thereof.

FIG. 5 shows an example of the configuration in the vicinity of the branch point in this embodiment.

FIG. 5 shows an ozone water supply apparatus 10A in which branch pipes 55, 56, 57 and detour pipes 61, 62, 63 are connected to branch points 52, 53, 54 of the main pipe 51 connected to the ozone water generating means. The process system diagram of is shown. Since the configuration of the ozone water generating means used in the second embodiment is the same as that of the first embodiment, the description thereof is omitted here.

Three branch points 52, 53, and 54 provided in the main pipe 51 include branch pipes 55, 56, and 57, and bypass pipes 61, 62, and 57 provided separately from the branch pipes 55, 56, and 57, respectively. 63 are connected to each other. These branch pipes 55, 56, 57 and bypass pipes 61, 62, 63 have pipe diameters that are the same, and the flow passage cross-sectional areas are designed to have the same value. The flow passage cross-sectional areas of these branch pipes 55, 56, 57 and the bypass pipes 61, 62, 63 are downstream of the flow passage cross-sectional area upstream of the branch points 52, 53, 54 of the main pipe 51. Corresponds to the decrease in road cross-sectional area.

The pipe diameter of the main pipe 51b downstream of the branch point 51 is smaller than the pipe diameter of the main pipe 51a upstream of the branch point 51, and the pipe diameter of the main pipe 51c downstream of the branch point 52 is the branch point. The pipe diameter of the main pipe 51 c on the downstream side of the branch point 53 is smaller than the pipe diameter of the main pipe 51 b on the upstream side of the branch point 53.

At each branch point 52, 53, 54, a part of the ozone water flowing through the main pipe 51 is diverted to one of the branch pipes 55, 56, 57 or the bypass pipes 61, 62, 63, and the remainder Is provided for switching the downstream side of the main pipe 51 downstream of the branch points 52, 53, 54.

FIG. 6 shows a solenoid valve 70 as an example of switching means. The solenoid valve 70 is configured to move the position of a spool provided in the solenoid valve 70 by turning on and off the current, and to flow the flowing ozone water downstream of the branch pipes 55, 56, 57 and the main pipe 51. And the state of flowing to the downstream side of the bypass pipes 61, 62, 63 and the main pipe 51 are performed.

FIG. 7 shows an example in which stop valves 71 and 72 as switching means are used. The stop valve 71 is provided in the branch pipes 55, 56, 57 connected to the branch points 52, 53, 54, and the stop valve 72 is provided in the bypass pipes 61, 62, 63. In the switching means shown in FIG. 7, when part of the ozone water is diverted to the branch pipes 55, 56, 57 and the remaining part is made to flow downstream of the main pipe 51, the stop valve 71 is opened and the stop valve 72 is turned on. Closed. Conversely, when part of the ozone water is diverted to the bypass pipes 61, 62, and 63 and the remaining part is made to flow downstream of the main pipe 51, the stop valve 71 is closed and the stop valve 72 is opened.

In the case of FIG. 7, the branch points from the main pipe 51 of the bypass pipes 61, 62, 63 may be in the vicinity of the branch points from the main pipe 51 of the branch pipes 55, 56, 57, and slightly in the pipe axis direction. It may shift.

The bypass pipes 61, 62, and 63 are connected to the recovery line 67. When the ozone water is not used at the use points 21, 22, and 23, the bypass distribution pipes 61, 62, and 63 recover the ozone water. Detour to 67.

Also in the ozone water supply apparatus 10A according to the second embodiment, the main pipe 51 has a downstream cross-sectional area that is smaller than the upstream cross-sectional area of each of the branch points 52, 53, and 54. The decrease in the flow path cross-sectional area formed is formed corresponding to the flow rate of the ozone water branched into the branch pipes 55, 56 and 57. Therefore, the flow rate of the ozone water flowing through the main pipe 51 on the downstream side of each branch point 52, 53, 54 can be set within a predetermined range. Even when the ozone water is not supplied to the use point, the ozone water is diverted to the bypass pipes 61, 62, and 63. Therefore, the branch points 52, 53, and 54 in the main pipe 51 corresponding to the use points that do not supply the ozone water are used. Without excessively increasing the flow velocity of the ozone water flowing through the main pipe 51 on the downstream side. It can be within a predetermined range.

Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to the following examples.

In the examples and comparative examples described below, the ozone generator 4 (Sumitomo Seimitsu Kogyo Co., Ltd., silent discharge type ozone generator GR-RD) shown in FIG. 1 and the ozone dissolver 5 (Japan Gore-Tech) are shown. Ozone water was generated using an ozone-dissolved membrane (GNK-01K). Further, the dissolved ozone concentration was measured using a dissolved ozone meter (Sugawara Business Co., Ltd., dissolved ozone meter EL-700A).

[Example]
In this embodiment, the ozone water supply apparatus 10 including the main pipe 11 and the branch pipes 15, 16, and 17 shown in FIG. 1 was used. As shown in FIG. 1, there are three use points 21, 22, and 23. The water supply distance to the use point 21 is set to 30 m, the water supply distance to the use point 22 is set to 60 m, and the water supply distance to the use point 23 is set to 90 m. . The inner diameter of the main pipe 11 in the section 11a to the branch point 12 corresponding to the first use point 21 is 32 mm, and the branch point 13 corresponding to the second use point 22 from the branch point 12 corresponding to the first use point 21. The inner diameter of the main pipe 11 in the section 11b from the branch point 13 corresponding to the second use point 22 to the branch point 14 corresponding to the third use point 23 is 20 mm. Each of the pipes formed was used.

A mixed gas of oxygen gas and carbon dioxide gas is supplied to the ozone generator 4 to generate ozone gas, and the generated ozone gas is introduced into an ozone dissolving film which is the ozone dissolving device 5, and ozone is dissolved in pure water to dissolve ozone. Water was produced. The dissolved ozone concentration at the outlet of the ozone dissolving device 5 was 25 mg / L. The pH value of the generated ozone water was 5.

Since each use point 21, 22, 23 needs to have a dissolved ozone concentration of at least 20 mg / L, the target value of the dissolved ozone concentration when reaching each use point 21, 22, 23 is 20 mg / L L.

The generated ozone water was sent to the main pipe 11 at a water supply amount of 35 L / min, and the amount of ozone water used at each use point 21, 22, 23 was 10 L / min per location.

The flow rate of ozone water flowing through the main pipe 11 is calculated by the following equation (1).

Pipe flow velocity LV (m / min) = Water supply amount (m ³ / min) / Pipe cross-sectional area (m ² ) (1)

Substituting into this equation (1) the amount of water delivered = 0.035 (m ³ / min) and the cross-sectional area of the pipe = 16 ² × 3.14 × 10 ⁻⁶ (m ² ), the pipe flow velocity in the section 11a is obtained. About 43.5 m / min.

Similarly, in the formula (1), the water supply amount = 0.035−0.010 = 0.025 (m ³ / min), the pipe cross-sectional area = 12.5 ² × 3.14 × 10 ⁻⁶ (m ² ) And the pipe flow velocity in the section 11b is calculated to be about 51.0 m / min. Further, substituting into the equation (1) the amount of water delivered = 0.025−0.010 = 0.015 (m ³ / min) and the cross-sectional area of the pipe = 10 ² × 3.14 × 10 ⁻⁶ (m ² ) The pipe flow velocity in the section 11c is about 47.8 m / min.

The measurement result of the dissolved ozone concentration of the ozone water at each use point 21, 22, 23 is 24mg / L at the first use point 21, 24mg / L at the second use point 22, and 23mg at the third use point 23. / L.

Thus, when the dissolved ion concentration at the use points 21, 22, and 23 was measured, it was confirmed that the decrease in the dissolved ozone concentration of the supplied ozone water was suppressed and the dissolved ozone concentration was equal to or higher than the target value.

[Comparative example]
In this comparative example, the ozone water supply device 10 similar to the ozone water supply device 10 shown in FIG. 1 is used, except that the inner diameter of the main pipe 11 is 32 mm in all sections, and measurement is performed by the same method. went. As in the example, there were three use points 21, 22, 23, the water supply distance to the use point 21 was set to 30 m, the water supply distance to the use point 22 was set to 60 m, and the water supply distance to the use point 23 was set to 90 m. . The generation of ozone water and the dissolved ozone concentration (25 mg / L) of the generated ozone water were the same as in the examples.

The generated ozone water was sent to the main pipe 11 at a water supply amount of 35 L / min, and the amount of ozone water used at each use point 21, 22, 23 was 10 L / min per location.

Substituting into equation (1) the amount of water delivered = 0.035 (m ³ / min) and the cross-sectional area of the pipe = 16 ² × 3.14 × 10 ^-6 (m ² ), the pipe flow velocity in the section 11a is obtained. About 43.5 m / min. This is the same as in the above-described embodiment.

In contrast, in equation (1), the amount of water delivered = 0.035−0.010 = 0.025 (m ³ / min), the cross-sectional area of the pipe = 16 ² × 3.14 × 10 ⁻⁶ (m ² ) By substituting and calculating the pipe flow velocity in the section 11b, it is about 31.1 m / min. In addition, substituting into the equation (1) the amount of water delivered = 0.025−0.010 = 0.015 (m ³ / min) and the cross-sectional area of the pipe = 16 ² × 3.14 × 10 ⁻⁶ (m ² ) The pipe flow velocity in the section 11c is about 18.7 m / min.

When the dissolved ozone concentration in each ozone water use area was measured under such conditions, the first use point 21 was 24 mg / L, the second use point 22 was 22 mg / L, and the third use point 23 was 18 mg. / L.

Thus, in the comparative example, when the dissolved ion concentration at the use points 21, 22, and 23 is obtained, it can be seen that the dissolved ozone concentration at the downstream use point gradually decreases. At the third use point, the dissolved ozone concentration decreased to 18 mg / L dissolved ozone concentration, and could not be set to the target value of 20 mg / L or more.

The pipe flow rates of Examples and Comparative Examples are shown in Table 1, and the dissolved ozone concentration is shown in Table 2.

As is apparent from Table 1, in the embodiment using the pipe formed so that the pipe diameter of the main pipe 11 gradually decreases every time it passes through the branch point, the pipe 11 is formed in the same size without reducing the pipe diameter. Compared to the comparative example using the pipe, the decrease in the flow velocity of the ozone water flowing through the main pipe 11 is prevented. As shown in Table 2, the dissolved ozone concentration of ozone water at each of the use points 21, 22, 23 is the dissolved ozone concentration that is the target value at all the use points 21, 22, 23 in the embodiment. It could be 20 mg / L or more. On the other hand, in the comparative example, the dissolved ozone concentration at each of the use points 21, 22, 23 decreases as the transfer distance of the ozone water increases, and at the third use point 23, the dissolved ozone concentration is 18 mg. / L has fallen below the target ozone concentration of 20 mg / L.

From this, by applying the ozone water supply device according to the embodiment, ozone water can be supplied at a flow rate of a certain value or more without reducing the flow rate of ozone water, and the dissolved ozone concentration of ozone water decreases. It can be effectively prevented.

Although the present invention has been described in detail using specific embodiments, it will be apparent to those skilled in the art that various modifications can be made without departing from the spirit and scope of the invention.
The present application is based on a Japanese patent application (Japanese Patent Application No. 2011-151832) filed on July 8, 2011, which is incorporated by reference in its entirety.

Claims (11)

1. An ozone water supply device for supplying ozone water to a use point, ozone water generating means for generating ozone water,
   A main through which ozone water from the ozone water generating means flows;
   A branch point provided at a plurality of locations in the middle of the main pipe for diverting ozone water in the main pipe,
   A branch pipe connecting the branch point and the use point;
   In an ozone water supply device having
   An ozone water supply device characterized in that the flow rate of ozone water is equal to or higher than a predetermined value in the entire area in the main pipe upstream of the branch point on the most downstream side.
2. 2. The ozone water supply device according to claim 1, wherein the flow rate of the ozone water is set within a predetermined range in the entire area in the main pipe upstream of the branch point on the most downstream side.
3. 3. The ozone water supply device according to claim 1 or 2, wherein the flow passage cross-sectional area of the main pipe downstream from the branch point is smaller than the flow passage cross-sectional area upstream.
4. 4. The ozone water supply apparatus according to claim 3, wherein a taper portion in which the diameter of the main pipe gradually decreases from the upstream side toward the downstream side is provided near the branch point of the main pipe.
5. 5. The ozone water supply apparatus according to claim 4, wherein the branch pipe is connected to the tapered portion or the vicinity thereof.
6. In any one of Claims 1 thru | or 5, the bypass piping for flowing ozone water from the said branch pipe around the said use point to a collection line branches off from the said branch pipe,
   Ozone having a flow path selection means for switching between flow path selection for flowing the total amount of ozone water flowing into the branch pipe from the main pipe to a use point and flow path selection for flowing to a bypass pipe Water supply device.
7. In any one of Claims 1 thru | or 5, from the said branch point vicinity, the bypass piping for flowing ozone water around the said use point and flowing into a collection line branches.
   A flow path selection means for switching between a flow path selection in which a part of the ozone water flowing from the main pipe to the branch point flows only to the branch pipe and a flow path selection to flow only to the bypass pipe is provided. A featured ozone water supply device.
8. The ozone water supply device according to any one of claims 1 to 7, wherein the flow rate of ozone water in the main pipe upstream from the most downstream branch point is 30 to 180 m / min.
9. 9. The ozone water supply apparatus according to claim 1, further comprising pH adjusting means for adjusting the pH of the ozone water to 6 or less.
10. In the ozone water supply method of supplying ozone water generated by the ozone water generating means to the use point by piping,
    A method for supplying ozone water, wherein a flow rate of ozone water flowing through the pipe is set to a predetermined value or more.
11. 10. An ozone water supply method according to claim 10, wherein ozone water is supplied by the ozone water supply device according to any one of claims 1 to 9.

Images