CN103687820B - Ozone water supply apparatus and method of ozone water supply - Google Patents
Ozone water supply apparatus and method of ozone water supply Download PDFInfo
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- CN103687820B CN103687820B CN201280033875.0A CN201280033875A CN103687820B CN 103687820 B CN103687820 B CN 103687820B CN 201280033875 A CN201280033875 A CN 201280033875A CN 103687820 B CN103687820 B CN 103687820B
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
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Abstract
The invention provides a kind of with can not producing the situation that ozone concn is reduced by ozone water supply to the ozone water supply apparatus of use location and method of ozone water supply.Ozone water supply apparatus (10), it possesses: the take-off pipe (15,16,17) of the ozone water generating device (1) of generating ozone liquid, the supervisor (11) being formed with the tapping point (12,13,14) that the ozone water from ozone water generating device (1) is shunted, connection component point and use location and prevent the flow velocity holdout device of reduction of flow velocity of the ozone water flowed in supervisor and take-off pipe.The stream sectional area of supervisor (11), compared with the upstream side of tapping point (12,13,14), reduces in downstream side.The reduction of the stream sectional area of supervisor (11), corresponds to and is branched to the flow of the ozone water of take-off pipe at tapping point.
Description
Technical field
The present invention relates to ozone water supply apparatus and method of ozone water supply.More specifically, relate to the ozone concn not making electronic material etc. is carried out the ozone water of wet treatment and ozone water is generated from ozone water ozone water supply apparatus and the method for ozone water supply that place is supplied to use location (ozone water field of employment) with reducing.
Background technology
In the prior art, the substrate of semi-conductor silicon substrate, liquid crystal glass substrate or photomask quartz base plate etc. and cleaning of other electronic components, as with RCA Corp. of the U.S. (Radio Corporation of America: Radio of Corporation of America Corp.) the RCA that develops clean representative, use the liquid of high density or lotion and carry out for a large amount of pure water of doing to wash to it or ultrapure water.In order to reach the object or making as suppression and the object etc. of protection of the environment for a large amount of washing waters of cutting down the cost cleaning operation, carried out the research of the various simplification for cleaning technology, and its achievement constantly promotes.As its representational cleaning technology, there is the cleaning technology undertaken by the washing water of the specific gas being dissolved with ozone or hydrogen etc.
Such as, in pure water, be dissolved with the ozone water of ozone, deposit the lower concentration that ozone concn is several mg/L even if molten, also still have Strong oxdiative power.Therefore, ozone water, is used in the operation of removing such as the impurity of the organism be attached on substrate surface or metal etc. or is formed on the surface of silicon substrate in the operation of oxide skin rete.In this kind of operation, significantly affect because used ozone concn can cause for the clearing power of substrate surface or the thickness formed, therefore, the management of ozone concn becomes very important.
Ozone, easily oneself decomposes, and when ozone water generates the situation of the distance between place and use location, be delivered in the way of use location by generated ozone water, the ozone concn in ozone water can reduce.
When having the situation of multiple use location, carried generating the ozone water that place generates in ozone water by pipe arrangement if adopt, and sequentially shunting is supplied to the method for use location, then each ozone water is shunted time, the flow velocity of the ozone water flowed in pipe arrangement can reduce.Therefore, in the use location being positioned at downstream side, until during ozone water arrival, can expend time in, when ozone water arrives use location, ozone can oneself decompose, and the ozone concn in ozone water can reduce.
In patent documentation 1,2, record the technology preventing the ozone concn in ozone water from reducing.
In patent documentation 1, when carrying the ozone water making ozone solution generate in pure water, by ozone water generating device by carbonic acid gas or organic compound solubilization in pure water or ozone water, suppress the oneself of ozone to decompose.In patent documentation 2, until the arbitrary position of vent pipe the water-supply pipe of the ozone water from ozone water supply apparatus, medicine feeding apparatus is set, and adds the one kind or two or more ozone decomposed inhibitor selected from the group be made up of nitrous acid, nitrite, carbonic acid, carbonate, supercarbonate, sulfurous acid, sulphite, hydrosulphite and hydrazine.
In patent documentation 3 ~ 5, record and the ozone concn in ozone water is carried out adjusting and easily can supply the technology of the ozone water of desired ozone concn.
In patent documentation 3, in the density adjusting method of ozone water making ozone excessive dissolution, by the length in water flowing path, heat, ultrasonic wave, ultraviolet or turbulent flowization, promote the decomposition of ozone and adjust ozone concn.In patent documentation 4, make to contact with glass containing ozone water, and adjust the ozone concn of ozone water.
In patent documentation 5, record the technology of the ozone water of the desired concentration of stably supply.In patent documentation 5, the ozone water having ozone decomposed inhibitory substance is delivered to use location, and near use location, makes it be reduced to the ozone concn of regulation by concentration regulator.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2000-37695 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2002-18454 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2000-180433 publication
Patent documentation 4: Japanese Unexamined Patent Publication 2000-334468 publication
Patent documentation 5: Japanese Unexamined Patent Publication 2005-294377 publication
Summary of the invention
Invent problem to be solved
When the object of the present invention is to provide a kind of situation of the distance between ozone water generating device and use location and/or when having the situation of multiple use location, the ozone concn in ozone water can not be made to reduce ozone water supply apparatus and the method for ozone water supply of ground ozone supply water.
Solve the method for problem
The ozone water supply apparatus of the 1st scheme, it is characterized in that, it possesses: the ozone water generating device generating the ozone water for being supplied to use location; Be connected to aforementioned ozone water generating device and be formed and the ozone water in internal flow is shunted and the supervisor of the tapping point corresponding with the quantity of aforementioned use location; The take-off pipe of contact aforementioned branches point and aforementioned use location; And the flow velocity holdout device preventing the flow velocity of the ozone water flowed in aforementioned supervisor and aforementioned branches pipe from reducing.
According to the 1st scheme, then can prevent the reduction of the flow velocity of ozone water, and carry out delivery of ozone water with desired flow velocity, can ozone concn in ozone water reduce before by ozone water supply to use location.Therefore, the 1st scheme can be suitable for the situation of the distance be used between ozone water generating device and use location.
In the 2nd scheme, aforementioned flow velocity holdout device is configured to: by the stream sectional area of aforementioned supervisor, be formed as compared with the upstream side of aforementioned branches point, reduce in downstream side, and, the reduction of the stream sectional area of aforementioned supervisor, corresponds to and is branched to the flow of the ozone water of aforementioned branches pipe at aforementioned branches point.
According to the 2nd scheme, then, after ozone water having been carried out from supervisor shunting, also can prevent the reduction of the flow velocity of ozone water.This ozone water supply apparatus, can preferably be used in when ozone water sequentially being shunted from the supervisor of the supply pipe arrangement as ozone water and being supplied to the situation of multiple use location.
In the 3rd scheme, the quantity corresponding to aforementioned use location is arranged makes roundabout roundabout pipe arrangement by making towards the flowing of the ozone water of aforementioned use location, and setting makes ozone water flow to the shifter of aforementioned use location or aforementioned roundabout pipe arrangement.
According to the 3rd scheme, even during situation then not for any one ozone supply water of use location, ozone water also can be made to flow so far in roundabout pipe arrangement.Therefore, corresponding to the downstream side of the not tapping point of the supervisor of the use location of ozone supply water, the ozone water of the flow matched with the stream section of supervisor that can flow, suitably can maintain the flow velocity of ozone water.
In the ozone water supply apparatus of the 4th scheme, to make the mode becoming at least 30m/ minute at the flow velocity of the ozone water being next to the aforementioned branches Bottomhole pressure before aforementioned use location, control.
According to the 4th scheme, then can in ozone water ozone generation oneself decomposes and make molten deposit ozone concn reduction before, by ozone water supply to use location.
The ozone water supply apparatus of the 5th scheme, the pH value suppression having the ozone water by being supplied to aforementioned use location is the pH value restraining device of less than 6.
According to the 5th scheme, the pH value of ozone water is adjusted to acid, suppresses the oneself of ozone to decompose, effectively can prevent the molten reduction of depositing ozone concn in ozone water.
The method of ozone water supply of the 6th scheme, it is the method for ozone water supply ozone water generated by ozone water generating device being supplied to the use location using ozone water via pipe arrangement, it is characterized in that, the flow velocity of the ozone water flowed in aforementioned pipe arrangement is maintained more than prescribed value, and by ozone water supply to aforementioned use location.
According to the 6th scheme, then can prevent the reduction of the flow velocity of ozone water, and carry out delivery of ozone water with desired flow velocity.Owing to preventing the reduction of the flow velocity of ozone water, therefore, it is possible to before ozone concn in ozone water reduces, by ozone water supply to use location.6th scheme, preferably can be used in the situation of the distance between ozone water generating device and use location.
In the 7th scheme, aforementioned pipe arrangement, be connected to aforementioned ozone water generating device, and by being formed, the ozone water in internal flow is shunted and the supervisor of the tapping point corresponding with the quantity of aforementioned use location, form with the take-off pipe of contact aforementioned branches point and aforementioned use location, and, by the stream sectional area of aforementioned supervisor, be formed as compared with the upstream side of aforementioned branches point, reduce in downstream side, and, make the reduction of the stream sectional area of aforementioned supervisor with corresponding by the flow of the ozone water branched in aforementioned branches pipe at aforementioned branches point, prevent the reduction of the flow velocity of the ozone water flowed in supervisor, and ozone supply water.
According to the 7th scheme, then, after ozone water having been carried out from supervisor shunting, also can prevent the reduction of the flow velocity of the ozone water flowed in supervisor.7th scheme can preferably be used in when ozone water sequentially being shunted from the supervisor of the supply pipe arrangement as ozone water and being supplied to the situation of multiple use location.
In the 8th scheme, quantity corresponding to aforementioned use location is arranged makes roundabout roundabout pipe arrangement by making towards the flowing of the ozone water of aforementioned use location, and, arranging makes ozone water flow to the shifter of aforementioned use location or aforementioned roundabout pipe arrangement, and by the aforementioned shifter corresponding with selected aforementioned use location, ozone water is made to flow to aforementioned roundabout pipe arrangement, prevent the reduction of the flow velocity of the ozone water flowed in the supervisor in the downstream side of the tapping point corresponding with selected aforementioned use location, and ozone supply water.
In the 8th scheme, even during situation not for any one ozone supply water of use location, ozone water also can be made to flow so far in roundabout pipe arrangement.Therefore, corresponding to the downstream side of the not tapping point of the supervisor of the use location of ozone supply water, the ozone water of the flow matched with the stream section of supervisor that can flow, suitably can maintain the flow velocity of ozone water.
In the method for ozone water supply of the 9th scheme, to make the mode becoming at least 30m/ minute at the flow velocity of the ozone water being next to the aforementioned branches Bottomhole pressure before aforementioned use location, carry out control and ozone supply water.
According to the 9th scheme, then can in ozone water ozone generation oneself decomposes and make molten deposit ozone concn reduction before, by ozone water supply to use location.
In the method for ozone water supply of the 10th scheme, the pH value of ozone water is set to less than 6 and ozone supply water.
According to the 10th scheme, the pH value of ozone water is adjusted to acid, suppresses oneself to decompose, effectively can prevent the molten reduction of depositing concentration of ozone.
The effect of invention
According to ozone water supply apparatus of the present invention and method of ozone water supply, even during the situation of the distance then between ozone water generating device and use location, also can carry out delivery of ozone water with desired flow velocity, ozone supply water before ozone concn reduces can be deposited molten.
According to ozone water supply apparatus of the present invention and method of ozone water supply, even then when ozone water is sequentially carried out shunting and being supplied to the situation of multiple use location from the supervisor of delivery of ozone water, can after shunting, not make the flow velocity of the ozone water flowed in supervisor reduce yet carry.Its result, even the use location being positioned at downstream side, also can carry out ozone supply water, can supply and prevent molten ozone water of depositing the reduction of ozone concn with desired flow velocity.
Accompanying drawing explanation
Fig. 1 is the working procedure systems figure of the ozone water supply apparatus of the 1st embodiment of the present invention.
Fig. 2 represents to form the supervisor of ozone water supply apparatus and the local sectility orthographic plan of take-off pipe.
Fig. 3 is the explanatory view of the symbol of the magnetic valve representing the stream switching ozone water.
Fig. 4 represents the explanatory view using and have the shifter of the stream of the switching ozone water of block valve.
Fig. 5 is the working procedure systems figure of the local of the ozone water supply apparatus representing the 2nd embodiment of the present invention.
Fig. 6 is the explanatory view of the symbol of the magnetic valve representing the stream switching ozone water.
Fig. 7 represents the explanatory view using and have the shifter of the stream of the switching ozone water of block valve.
Embodiment
Below, with reference to accompanying drawing, explain for embodiments of the present invention.In addition, technical scope of the present invention, is not defined in following contents or accompanying drawing.
[the 1st embodiment]
Ozone water supply apparatus 10, as shown in fig. 1, has the pipe arrangement for the ozone water that flows.Pipe arrangement, by being connected to the supervisor 11 of ozone water generating device 1 and forming from multiple take-off pipes 15,16,17 that supervisor 11 branches out.At supervisor 11 place, until downstream side from the upstream side of supervisor 11, be provided with in different positions with use location 21,22,23 corresponding tapping points 12,13,14.Take-off pipe 15,16,17, is arranged to tapping point 12,13,14 and the use location 21,22,23 of getting in touch with these respectively.
Be respectively arranged with the roundabout pipe arrangement 31,32,33 from each take-off pipe 15,16,17 branch.These roundabout pipe arrangement 31,32,33, when not making for use location 21,22,23 situation supplied, send water to recovery line 37 by ozone water.
< ozone water generating device >
Ozone water generating device 1, have as the ozonizer 4 of ozone gas supply source and by ozone solution to the ozone dissolver 5 in water (such as pure water).
At ozonizer 4 place, be connected with oxygen groove 2 and carbonic acid gas groove 3, and be supplied to the mixed gas of oxygen and carbonic acid gas.This ozonizer 4, generates ozone by various ozone generating modes.Such as, the ozone generator (Ozonizer) of silent discharge mode, electric isolation or ultraviolet mode can be used, generate ozone.
Ozone dissolver 5, be supplied to water (such as pure water, also can be ultrapure water) and by ozonizer 4 generate containing ozone gas, and generating ozone liquid.About ozone dissolver 5, and be not particularly limited, such as, can use: utilize air penetrating film to the device of the mode making ozone gas dissolve or use injector to the device etc. making ozone gas be dissolved in the mode in the pure water of high pressure.
In this ozone water generating device 1, carbonic acid gas be dissolved in the water and the pH of ozone water be set to acidity, decomposing to suppress the oneself of the ozone in ozone water.Controlled by the meltage for carbonic acid gas, adjust the pH of ozone water.
In this embodiment, carbonic acid gas and oxygen are mixed, but, also can in the ozone gas generated by ozonizer 4 mixed carbonic acid gas, also can add carbonic acid gas and make it dissolve in the ozone water come from ozone dissolver 5.But, because carbonic acid gas is for suppressing the oneself of ozone to decompose, therefore, preferably when making ozone gas dissolve, or before making ozone gas dissolving, carbonic acid gas is dissolved in the water.In order to the pH of ozone water being adjusted to acid, also before and after the inside of ozone water generating device 1 or its, other medicines (pH adjusts liquid) can be used.
For the ozone water after adjustment pH, preferred pH is less than 7, is particularly preferably less than 6, is more preferably 2 ~ 6.
< use location >
At use location 21,22,23 place, use the ozone water that supplies, the substrate of semi-conductor silicon substrate, liquid crystal glass substrate or photomask quartz base plate etc. or other electronic component are cleaned.At use location 21,22,23 place, substrate etc. be impregnated in the treatment trough being supplied to ozone water and process, or the shower of ozone water sprayed for substrate etc. and processes.In the ozone water supply apparatus 10 shown in Fig. 1, be provided with the use location 21,22,23 of 3 positions, but this use location, also can arrange more than 1 position, 2 positions or 4 positions.
< supervisor and take-off pipe >
Supervisor 11, carries the ozone water come from ozone water generating device 1.Preferably be provided with at supervisor 11 place and send water pump.Pump, also can be arranged on the upstream side of ozone dissolver 5.
Supervisor 11, as shown in Figure 2, has the tapping point 12,13,14 with the number of use location 21,22,23, and ozone water is shunted.Supervisor 11, near each tapping point 12,13,14, becomes the tapered shape along with the stream sectional area towards downstream side reduces gradually.
Take-off pipe 15,16,17, gets in touch with tapping point 12,13,14 and the use location 21,22,23 of supervisor 11 respectively, and send water to use location 21,22,23 by each tapping point 12,13,14 place from the ozone water that supervisor 11 shunts.
Flow velocity holdout device, as shown in Figure 2, by being configured to realize as lower device: supervisor 11 be formed as making the stream sectional area of supervisor 11 reducing in downstream side compared with the upstream side of tapping point 12,13,14, further, make the reduction of the stream sectional area of supervisor 11 corresponding with the flow of punishing the ozone water flow in take-off pipe 15,16,17 at tapping point 12,13,14.
A part for the ozone water come even flow in the supervisor 11a of tapping point 12 upstream side, take-off pipe 15 is branched to from tapping point 12, also because the caliber of the supervisor 11b in the downstream side of tapping point 12 becomes little compared with the supervisor 11a of upstream side, therefore, the flow velocity of the ozone water flowed in supervisor 11b, becomes in specialized range.
Similarly, even ozone water branches to take-off pipe 16,17 from tapping point 13,14, also because the caliber of supervisor 11c, 11d in tapping point 12,13 downstream side becomes less respectively, therefore, the flow velocity of the ozone water in supervisor 11c, 11d becomes in specialized range.
By so forming supervisor 11 and take-off pipe 15,16,17, even after ozone water branches to take-off pipe 15,16,17 from supervisor 11, the reduction of the flow velocity of the ozone water flowed in supervisor 11 also can be prevented.The tube diameter of this supervisor 11, the flow velocity according to the ozone water that will obtain designs.
In supervisor 11, the flow velocity of the ozone water of flowing, controls according to the distance between ozone water generating device 1 and use location 21,22,23.In order to molten the depositing before ozone concn reduces in ozone water ozone water can be used in use location 21,22,23, preferably the flow velocity of ozone water is set to 30m/ minute ~ 180m/ minute, more preferably be set to 30m/ minute ~ 120m/ minute, be particularly preferably set to 40m/ minute ~ 90m/ minute.
Be used in the material of the pipe arrangement of supervisor 11 and take-off pipe 15,16,17, and be not particularly limited, but, preferably use the pipe arrangement having ozone resistance.Such as, the PFA pipe arrangement etc. formed by perfluoro alkoxy fluoro-resin can be used.
The roundabout pipe arrangement > of <
Roundabout pipe arrangement 31,32,33, can make the roundabout use location 21,22,23 excessively of ozone water and flow to recovery line 37.Roundabout pipe arrangement 31,32,33, is connected to each take-off pipe 15,16,17, when situation not for use location 21,22,23 ozone supply water, makes the ozone water flowing to take-off pipe 15,16,17 roundabout to recovery line 37.
At take-off pipe 15 ~ 17 and roundabout pipe arrangement 31 ~ 33 place, be provided with for carrying out the shifter (valve) that switches between stream selection ozone water supply to the stream of use location 21 ~ 23 being selected and made ozone water flow to roundabout pipe arrangement 31 ~ 33.
Such as, when the use location 21 being positioned at the 1st position in the use location 21,22,23 3 positions not by use situation time, will the full dose of the ozone water of take-off pipe 15 be flowed to, flow to recovery line 37 from roundabout pipe arrangement 31.So, even when having the situation of untapped use location 21, also ozone water can be done by roundabout pipe arrangement 31 roundabout, and the flow velocity of the ozone water flowed in the supervisor 11b in tapping point 12 downstream side of supervisor 11 is maintained in specialized range.
Similarly, when not using other the situation of use location 22 or 23, also making the full dose of the ozone water flowed in the take-off pipe 16,17 towards each use location 22,23, flowing to recovery line 37 from roundabout pipe arrangement 32,33.Thus, the flow velocity of the ozone water in supervisor 11c, the 11d in tapping point 13,14 downstream side of supervisor 11 is maintained at prescribed value.
The caliber of roundabout pipe arrangement 31,32,33 is preferably identical with the caliber of take-off pipe 15,16,17.The material of roundabout pipe arrangement 31,32,33, though and be not particularly limited, but, preferably use the pipe arrangement having ozone resistance, such as, can use the PFA pipe arrangement etc. formed by perfluoro alkoxy fluoro-resin.
The shifter that the stream that roundabout pipe arrangement 31,32,33 was selected and flowed to stream for carrying out making the full dose of the ozone water flowed in take-off pipe 14,15,16 to flow to use location 21,22,23 is selected, such as, use magnetic valve 40 as shown in Figure 3 or block valve 41,42 as shown in Figure 4 and form.
Magnetic valve 40 shown in Fig. 3, via the movement of the slide-bar (spool) in valve, switch to the state that makes the full dose of the ozone water flowed in take-off pipe 15,16,17 flow to use location 21,22,23 and flow in the state of roundabout pipe arrangement 31,32,33 any one.The movement of slide-bar is ON, OFF(open and close of the electric current by the solenoid possessed for magnetic valve 40) carry out.
Block valve 41 shown in Fig. 4, is arranged on take-off pipe 15,16,17 place in the downstream side of the tapping point of take-off pipe 15,16,17 and roundabout pipe arrangement 31,32,33, block valve 42, is arranged on roundabout pipe arrangement 31,32,33 place.When stopping the supply for the ozone water of use location 21,22,23, and when making ozone water flow to the situation of roundabout pipe arrangement 31,32,33, the block valve 41 of take-off pipe 15,16,17 cuts out, and the block valve 42 of roundabout pipe arrangement 31,32,33 is opened.When make ozone water flow to use location 21,22,23 place time, block valve 41 is set to out, and block valve 42 is set to pass.
In addition, the switching of stream, is not defined to the shifter using the magnetic valve 40 shown in Fig. 3 or the block valve shown in Fig. 4 41,42, can uses other shifters formed yet.
The action > of < ozone water supply apparatus
Above-mentioned ozone water supply apparatus 10, as described belowly carries out action.
By the ozone water that ozone water generating device 1 generates, flow in supervisor 11.As aforementioned, when flow in supervisor 11 ozone water time, by ozone water, send with the flow velocity of at least 30m/ minute, be preferably the flow velocity of 30m/ minute ~ 180m/ minute, be more preferably the flow velocity of 30m/ minute ~ 120m/ minute, be particularly preferably the flow velocity of 40m/ minute ~ 90m/ minute.Now, the pH value of ozone water is preferably set to less than 7, is particularly preferably set to less than 6, is more preferably set to 2 ~ 6.
Be sent to the ozone water at supervisor 11 place, flow in the interval 11a of supervisor 11, and arrive initial tapping point 12 place.Arrive the ozone water of tapping point 12, its part is branched in take-off pipe 15, and remaining part flows in the interval 11b of supervisor 11.
Branch to the ozone water of take-off pipe 15 from supervisor 11, be supplied to use location 21.The ozone water be supplied to, in use location 21, the substrate being used in semi-conductor silicon substrate, liquid crystal glass substrate or photomask quartz base plate etc. is also or in the cleaning of other electronic component.
Do not branched to the ozone water of take-off pipe 15, by tapping point 12, and flowed in interval 11b.Owing to becoming mild taper near tapping point 12, therefore, near tapping point 12, can't turbulent flow be generated in the ozone water of internal flow, not have the situation that ozone water flow velocity that the loss due to energy causes reduces.Supervisor 11, relative to interval 11a stream sectional area and the stream sectional area of interval 11b is formed as less, therefore, the flow velocity of the ozone water of interval 11b, becomes more than prescribed value, is preferably 30 ~ 180m/ minute, be more preferably 30 ~ 120m/ minute, be particularly preferably 40 ~ 90m/ minute.
The ozone water flowed in interval 11b, when arriving tapping point 13,14 afterwards, making one branching part in take-off pipe 16,17, and nubbin is flowed in the interval 11d in tapping point 14 downstream side in supervisor 11.
At take-off pipe 15,16,17 place, the ozone water flowed from supervisor 11 with flow velocity more than prescribed value, flows under the state maintaining this flow velocity.Branched to the ozone water of take-off pipe 15,16,17, flow in take-off pipe 15,16,17 and be supplied to use location 21,22,23, and be used in cleaning of electronic component etc. in each use location 21,22,23.At tapping point 12 ~ 14 not by the ozone water branched in take-off pipe 15 ~ 16, flow in supervisor 11 with flow velocity more than prescribed value.
So, because the reduction of the flow velocity of ozone water flowed in supervisor 11 is prevented from, therefore, it is possible to make ozone water promptly arrive each use location 21,22,23 place.Therefore, the ozone in ozone water can't produce oneself decompose, molten deposit ozone concn reduce before, ozone water is supplied to each use location 21,22,23.
The ozone water flowed in the interval 14d of supervisor 11, collaborates afterwards and is recovered in recovery line 37.
When the situation of any one the not ozone supply water for use location 21,22,23, ozone water is flowed in corresponding roundabout pipe arrangement 31,32,33 and roundabout to recovery line 37.
Therefore, even in the use location for more than 1 or 2 during the situation of not ozone supply water, do not have and make the flow velocity of the ozone water in the supervisor 11 in the tapping point downstream side towards this use location become excessive situation, can be maintained in specialized range yet.
If use this ozone water supply apparatus 10 to carry out ozone supply water, even during the situation of the distance then between ozone water generating device 1 and use location 21,22,23, also can carry out delivery of ozone water with desired flow velocity, ozone supply water before ozone concn reduces can be deposited molten.
When sequentially carrying out from the supervisor 11 of delivery of ozone water the situation shunting also ozone supply water for multiple use location 21,22,23, can after shunting, not make the flow velocity of the ozone water flowed in supervisor 11 reduce carry, even for the use location 22,23 being positioned at downstream side, also ozone supply water can be carried out with desired flow velocity.When carrying out the situation of ozone supply water by ozone water supply apparatus 10, also have the situation of use location (such as, being positioned at the use location 21 of side, most upstream) the not ozone supply water for regulation.In this situation, similarly, for the use location 22,23 in downstream side being positioned at this use location 21, can supply with ozone water being maintained at desired flow velocity.
[the 2nd embodiment]
In the above-described embodiment, roundabout pipe arrangement 31 ~ 33, though from the Tu Zhong branch of take-off pipe 15 ~ 17, but, also can from the tapping point between supervisor and take-off pipe or branch near it.
In Figure 5, an example of the formation near the tapping point indicating this kind of embodiment.
The working procedure systems figure being connected with the ozone water supply apparatus 10A of take-off pipe 55,56,57 and roundabout pipe arrangement 61,62,63 at each tapping point 52,53,54 place of the supervisor 51 be connected with ozone water generating device is indicated in Fig. 5.The formation of the ozone water generating device used in this 2nd embodiment, identical with the 1st embodiment, therefore, at this, the description thereof will be omitted.
Be arranged on the tapping point 52,53,54 of 3 of supervisor 51, be connected to take-off pipe 55,56,57 and take-off pipe 55,56,57 therewith independent mutually set by roundabout pipe arrangement 61,62,63.These take-off pipe 55,56,57 and roundabout pipe arrangement 61,62,63, use caliber to be formed each other with the pipe of size, its stream sectional area is designed to identical value.Again, these take-off pipe 55,56,57 and the stream sectional area of roundabout pipe arrangement 61,62,63, corresponding with the reduction of the downstream-side channel sectional area of the upstream-side channel sectional area relative to tapping point 52,53,54 of supervisor 51.
The caliber of the supervisor 51b in the downstream side of tapping point 51, compared with the caliber of the supervisor 51a of the upstream side of tapping point 51, for less, the caliber of the supervisor 51c in the downstream side of tapping point 52, compared with the caliber of the supervisor 51b of the upstream side of tapping point 52, for less, the caliber of the supervisor 51c in the downstream side of tapping point 53, compared with the caliber of the supervisor 51b of the upstream side of tapping point 53, for less.
At each tapping point 52,53,54 place, be provided with shifter, this shifter, for make from supervisor 51 the part of ozone water that flows, branch to any one in take-off pipe 55,56,57 or roundabout pipe arrangement 61,62,63, further, nubbin is made to flow to the downstream side of the tapping point 52,53,54 of supervisor 51.
Fig. 6 is the magnetic valve 70 of the example represented as shifter.This magnetic valve 70, by by electric current ON, OFF(open and close), the position of the slide-bar that magnetic valve 70 is possessed is moved, go forward side by side exercise flowing and come ozone water flow to take-off pipe 55,56,57 and supervisor 51 downstream side state and make ozone water flow to roundabout pipe arrangement 61,62,63 and be responsible for 51 downstream side state between switching.
The example of the block valve 71,72 employed as shifter is indicated in Fig. 7.Block valve 71, is arranged on the take-off pipe 55,56,57 be connected with tapping point 52,53,54, block valve 72, is arranged on roundabout pipe arrangement 61,62,63.In the shifter shown in Fig. 7, when making a part for ozone water branch to take-off pipe 55,56,57 and make nubbin flow to the situation in the downstream side of supervisor 51, block valve 71 being set to out, and block valve 72 is set to pass.Contrary, when making a part for ozone water branch to roundabout pipe arrangement 61,62,63 and make nubbin flow to the situation in the downstream side of supervisor 51, block valve 71 being set to pass, and block valve 72 is set to out.
In the situation of Fig. 7, the branch location from supervisor 51 of roundabout pipe arrangement 61,62,63, as long as be take-off pipe 55,56,57 near the branch location of supervisor 51, also can do a little skew on tube axial direction.
Roundabout pipe arrangement 61,62,63, is connected to recovery line 67, and when not using the situation of ozone water in use location 21,22,23, roundabout pipe arrangement 61,62,63 makes ozone water roundabout to recovery line 67.
In the ozone water supply apparatus 10A of this 2nd embodiment, similarly, supervisor 51 is formed as the stream sectional area relative to the upstream side of each tapping point 52,53,54 and makes the stream sectional area in downstream side become less, and is formed to make the reduction of this stream sectional area become the mode corresponding with the flow of the ozone water branching to take-off pipe 55,56,57.Therefore, it is possible to by the flow velocity of the ozone water of flowing in the supervisor 51 in the downstream side of each tapping point 52,53,54, be set in specialized range.Even when the situation not for use location ozone supply water, also owing to making ozone water branch to roundabout pipe arrangement 61,62,63, therefore, the downstream side of the tapping point 52,53,54 corresponding with the use location of not ozone supply water in supervisor 51, the flow velocity not having the ozone water of flowing in supervisor 51 becomes excessive situation.Can be set in the scope of regulation.
Embodiment
Below, list embodiment, the present invention is further elaborated, but the present invention is not done any restriction by following embodiment.
In addition, in following illustrated embodiment and comparative example, use the accurate industry (strain) in the ozonizer 4(Sumitomo shown in Fig. 1, silent discharge type ozonizer GR-RD) and ozone dissolver 5(JAPAN GORE-TEX(strain), ozone solution film, GNK-01K), generating ozone liquid is carried out.In addition, moltenly deposit ozone concn, use molten ozonometer (weak former industry (strain), molten deposit ozonometer, EL-700A) of depositing to measure respectively.
[embodiment]
In this embodiment, the ozone water supply apparatus 10 having supervisor 11 and take-off pipe 15,16,17 shown in Fig. 1 is used.Use location 21,22,23, as being set to 3 positions shown in Fig. 1, and by until the water distance of sending of use location 21 is set to 30m, by until the water distance of sending of use location 22 is set to 60m, by until the water distance of sending of use location 23 is set to 90m.Use the pipe arrangement that set as follows by internal diameter: until correspond in the interval 11a of the tapping point 12 of the 1st use location 21, the internal diameter of supervisor 11 is 32mm, from corresponding to the tapping point 12 of the 1st use location 21 until the internal diameter of supervisor 11 corresponding to the interval 11b of the tapping point 13 of the 2nd use location 22 is 25mm, from corresponding to the tapping point 13 of the 2nd use location 22 until the internal diameter corresponding to the supervisor 11 of the interval 11c of the tapping point 14 of the 3rd use location 23 is 20mm.
For the mixed gas of ozonizer 4 oxygen gas-supplying and carbonic acid gas, and make generation ozone gas, then the ozone gas of generation is directed into the ozone solution film as ozone dissolver 5, dissolved ozone in pure water generating ozone liquid.Be 25mg/L at the molten ozone concn of depositing in the exit of ozone dissolver 5.The pH value of the ozone water generated is 5.
At each use location 21,22,23 place, because molten ozone concn of depositing at least needs for 20mg/L, therefore, the molten target value of depositing ozone concn when arriving each use location 21,22,23 is 20mg/L.
The ozone water generated, be sent to supervisor 11, and by the usage quantity of the ozone water in each use location 21,22,23, being set to each position is 10L/ minute with pushing quantity 35L/ minute.
By following formula (1), calculate the flow velocity of the ozone water of flowing in supervisor 11.
Pipe arrangement flow velocity LV(m/ minute)=pushing quantity (m
3/ minute)/pipe arrangement sectional area (m
2) (1)
In this formula (1), if by pushing quantity=0.035(m
3/ minute), pipe arrangement sectional area=16
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11a place, then become about 43.5m/ minute.
Similarly, in formula (1), if by pushing quantity=0.035-0.010=0.025(m
3/ minute), pipe arrangement sectional area=12.5
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11b place, then become about 51.0m/ minute.In addition, in formula (1), if by pushing quantity=0.025-0.010=0.015(m
3/ minute), pipe arrangement sectional area=10
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11c place, then become about 47.8m/ minute.
In the molten measurement result of depositing ozone concn of the ozone water of each use location 21,22,23, being 24mg/L the 1st use location 21, is 24mg/L the 2nd use location 22, is 23mg/L the 3rd use location 23.
So, depositing after ionic concn done to measure for use location 21,22,23 place molten, can confirm, the reduction that the ozone water supplied molten deposits ozone concn is suppressed, and molten ozone concn of depositing is more than target value.
[comparative example]
In this comparative example, except the internal diameter of supervisor 11 is all formed as except 32mm in whole intervals, uses the ozone water supply apparatus 10 identical with the ozone water supply apparatus 10 shown in Fig. 1, and measure via identical method.Identically with embodiment, use location 21,22,23, is set to 3 positions, and by until the water distance of sending of use location 21 is set to 30m, by until the water distance of sending of use location 22 is set to 60m, by until the water distance of sending of use location 23 is set to 90m.The generation of ozone water and the molten of ozone water generated deposit ozone concn (25mg/L), are also set to identical with embodiment.
The ozone water generated, be sent to supervisor 11, and by the usage quantity of the ozone water in each use location 21,22,23, being set to each position is 10L/ minute with pushing quantity 35L/ minute.
In formula (1), if by pushing quantity=0.035(m
3/ minute), pipe arrangement sectional area=16
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11a place, then become about 43.5m/ minute.About this point, identical with the above embodiments.
In contrast, in formula (1), if by pushing quantity=0.035-0.010=0.025(m
3/ minute), pipe arrangement sectional area=16
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11b place, then become about 31.1m/ minute.In addition, in formula (1), if by pushing quantity=0.025-0.010=0.015(m
3/ minute), pipe arrangement sectional area=16
2× 3.14 × 10
-6(m
2) substitute into, and obtain the pipe arrangement flow velocity at interval 11c place, then become about 18.7m/ minute.
Under such condition, use the molten ozone concn of depositing in region to make mensuration, its result in each ozone water, being 24mg/L the 1st use location 21, is 22mg/L the 2nd use location 22, is 18mg/L the 3rd use location 23.
So, in a comparative example, depositing after ionic concn done to measure for use location 21,22,23 place molten, its result, can learn, sequentially reduces at the molten ozone concn of depositing of the use location in downstream side.The 3rd use location, moltenly deposit ozone concn, be reduced to 18mg/L, more than the 20mg/L as target value cannot be become.
Show the pipe arrangement flow velocity of embodiment and comparative example in Table 1, show in table 2 and moltenly deposit ozone concn.
Table 1
Table 2
From table 1 obviously, using the pipe arrangement footpath of supervisor 11 with in the embodiment of the pipe arrangement often formed by the mode just sequentially reduced during tapping point, be formed as maintaining compared with the comparative example of the pipe arrangement of identical size with not reduced in pipe arrangement footpath, in supervisor 11, the reduction of the flow velocity of the ozone water of flowing is prevented from.Further, as shown in table 2, deposit ozone concn the molten of ozone water of each use location 21,22,23, in an embodiment, in whole use location 21,22,23 places, all can become molten more than the ozone concn 20mg/L that deposits as target value.In contrast, in a comparative example, in each use location 21,22,23, the molten of place deposits ozone concn, reduce along with the growth of the fed distance of ozone water, at the 3rd use location 23 place, molten ozone concn of depositing is reduced to 18mg/L, deposits ozone concn 20mg/L lower than as the molten of target value.
Can learn thus, by being suitable for the ozone water supply apparatus of embodiment, the flow velocity of ozone water can not being made to reduce, and carry out ozone supply water with flow velocity more than certain value, and effectively can prevent the molten reduction of depositing ozone concn of ozone water.
Although use specific scheme for invention has been detailed description, to those skilled in the art, under the prerequisite not departing from the intent of the present invention and scope, obviously can carry out various changes.
In addition, its full content, based on the Japanese patent application (Patent 2011-151832) proposed on July 8th, 2011, is incorporated herein at this by the application by way of reference.
Claims (12)
1. an ozone water supply apparatus, is characterized in that, it possesses:
Generate the ozone water generating device of the ozone water for being supplied to use location;
Be connected to aforementioned ozone water generating device and be formed and the ozone water in internal flow is shunted and the supervisor of the tapping point corresponding with the quantity of aforementioned use location;
The take-off pipe of contact aforementioned branches point and aforementioned use location; And
Prevent the flow velocity holdout device that the flow velocity of the ozone water flowed in aforementioned supervisor and aforementioned branches pipe reduces,
And, aforementioned flow velocity holdout device is configured to: by the stream sectional area of aforementioned supervisor, be formed as compared with the upstream side of aforementioned branches point, reduce in downstream side, and, the reduction of the stream sectional area of aforementioned supervisor, corresponds to and is branched to the flow of the ozone water of aforementioned branches pipe at aforementioned branches point.
2. ozone water supply apparatus as claimed in claim 1, wherein, near the aforementioned branches point of supervisor, the taper portion that the caliber being provided with supervisor diminishes from upstream side gradually to downstream side.
3. ozone water supply apparatus as claimed in claim 2, wherein, aforementioned branches pipe is connected near aforementioned taper portion or aforementioned taper portion.
4. the ozone water supply apparatus according to any one of claims 1 to 3, wherein,
Have for making the aforementioned use location of the roundabout mistake of ozone water and flowing to the roundabout pipe arrangement of recovery line from aforementioned take-off pipe branch,
And, be provided with stream selecting arrangement, this stream selecting arrangement switches between the stream that the stream making the full dose of the ozone water flowed in this take-off pipe from this supervisor flow to use location selects and make the full dose of the ozone water flowed in this take-off pipe from this supervisor to flow to roundabout pipe arrangement is selected.
5. the ozone water supply apparatus according to any one of claims 1 to 3, wherein,
Near aforementioned tapping point, branch has for making the aforementioned use location of the roundabout mistake of ozone water and flowing to the roundabout pipe arrangement of recovery line,
And, be provided with stream selecting arrangement, this stream selecting arrangement switches between the stream that the stream making a part for the ozone water flowing into this tapping point from this supervisor only flow to aforementioned branches pipe selects and make a part for the ozone water flowing into this tapping point from this supervisor only to flow to roundabout pipe arrangement is selected.
6. the ozone water supply apparatus according to any one of claims 1 to 3, wherein, the flow velocity of the ozone water in the aforementioned supervisor of the upstream side of the tapping point of most downstream side is 30 ~ 180m/ minute.
7. ozone water supply apparatus as claimed in claim 4, wherein, the flow velocity of the ozone water in the aforementioned supervisor of the upstream side of the tapping point of most downstream side is 30 ~ 180m/ minute.
8. ozone water supply apparatus as claimed in claim 5, wherein, the flow velocity of the ozone water in the aforementioned supervisor of the upstream side of the tapping point of most downstream side is 30 ~ 180m/ minute.
9. the ozone water supply apparatus according to any one of claims 1 to 3,7,8, wherein, it has the pH setting device pH of aforementioned ozone water being set to less than 6.
10. ozone water supply apparatus as claimed in claim 4, wherein, it has the pH setting device pH of aforementioned ozone water being set to less than 6.
11. ozone water supply apparatus as claimed in claim 5, wherein, it has the pH setting device pH of aforementioned ozone water being set to less than 6.
12. 1 kinds of method of ozone water supply, it is the method for ozone water supply ozone water generated by ozone water generating device being supplied to use location via pipe arrangement, it is characterized in that,
The flow velocity of the ozone water flowed in aforementioned pipe arrangement is set to more than prescribed value,
Further, ozone supply water is carried out via the ozone water supply apparatus according to any one of claim 1 ~ 11.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-151832 | 2011-07-08 | ||
| JP2011151832A JP5874223B2 (en) | 2011-07-08 | 2011-07-08 | Ozone water supply apparatus and ozone water supply method |
| PCT/JP2012/067205 WO2013008721A1 (en) | 2011-07-08 | 2012-07-05 | Device for supplying ozone water and method for supplying ozone water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103687820A CN103687820A (en) | 2014-03-26 |
| CN103687820B true CN103687820B (en) | 2015-08-05 |
Family
ID=47506012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280033875.0A Active CN103687820B (en) | 2011-07-08 | 2012-07-05 | Ozone water supply apparatus and method of ozone water supply |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5874223B2 (en) |
| KR (1) | KR101974667B1 (en) |
| CN (1) | CN103687820B (en) |
| TW (1) | TWI538877B (en) |
| WO (1) | WO2013008721A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107720941A (en) * | 2017-12-11 | 2018-02-23 | 重庆丰望环保科技有限公司 | A kind of sewage disposal system with sterilizing function |
| JP7452050B2 (en) | 2020-02-04 | 2024-03-19 | 株式会社大林組 | piping system |
| WO2021250745A1 (en) * | 2020-06-08 | 2021-12-16 | 三菱電機株式会社 | Ozone water production apparatus, water treatment apparatus, and ozone water production method |
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| JPS614587A (en) * | 1984-06-15 | 1986-01-10 | Toshiba Corp | Demineralized water supply system and its method |
| JPS6369588A (en) * | 1986-09-09 | 1988-03-29 | Mitsubishi Electric Corp | System for supplying pure water to semiconductor washing vessel |
| JP2606910B2 (en) * | 1988-11-21 | 1997-05-07 | 神鋼パンテツク株式会社 | Ultrapure water production and supply equipment |
| JPH0625424B2 (en) * | 1989-03-09 | 1994-04-06 | 須賀工業株式会社 | Method of determining return pipe diameter in forced circulation hot water supply piping equipment |
| JP2689662B2 (en) * | 1989-12-19 | 1997-12-10 | トヨタ自動車株式会社 | Paint circulation device |
| JP2652301B2 (en) * | 1992-05-28 | 1997-09-10 | 株式会社荏原製作所 | Cleaning water production equipment |
| JPH1147754A (en) * | 1997-07-31 | 1999-02-23 | Nec Corp | Method and apparatus for sterilizing piping |
| JPH11138182A (en) * | 1997-11-10 | 1999-05-25 | Kurita Water Ind Ltd | Ozonized ultrapure water feeder |
| JP2000037695A (en) | 1998-07-24 | 2000-02-08 | Kurita Water Ind Ltd | Apparatus for supplying ozone water |
| JP5037748B2 (en) | 1998-12-15 | 2012-10-03 | 栗田工業株式会社 | Ozone water concentration adjustment method and ozone water supply system |
| JP4508311B2 (en) | 1999-05-26 | 2010-07-21 | 栗田工業株式会社 | Adjustment method of ozone concentration |
| JP4538702B2 (en) | 2000-07-05 | 2010-09-08 | 栗田工業株式会社 | Ozone dissolved water supply device |
| JP4221551B2 (en) * | 2002-01-25 | 2009-02-12 | 株式会社ササクラ | Ozone water supply device |
| JP4513122B2 (en) | 2004-03-31 | 2010-07-28 | 栗田工業株式会社 | Ozone water supply method and ozone water supply device |
| JP4942067B2 (en) * | 2004-10-08 | 2012-05-30 | オルガノ株式会社 | Viable bacteria measurement method |
| CN104355391B (en) * | 2005-01-24 | 2017-07-11 | 纽泰科O3公司 | Ozone injection method and system |
| JP4843339B2 (en) * | 2006-03-10 | 2011-12-21 | 株式会社ササクラ | Ozone water supply device |
| JP4950915B2 (en) * | 2008-02-20 | 2012-06-13 | パナソニック株式会社 | Ozone water production equipment |
-
2011
- 2011-07-08 JP JP2011151832A patent/JP5874223B2/en not_active Expired - Fee Related
-
2012
- 2012-07-05 KR KR1020137030369A patent/KR101974667B1/en active IP Right Grant
- 2012-07-05 WO PCT/JP2012/067205 patent/WO2013008721A1/en active Application Filing
- 2012-07-05 CN CN201280033875.0A patent/CN103687820B/en active Active
- 2012-07-06 TW TW101124427A patent/TWI538877B/en active
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| "臭氧水稳定性的研究";方敏等;《食品科学》;20021231;第23卷(第9期);第39-43页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201318963A (en) | 2013-05-16 |
| KR101974667B1 (en) | 2019-05-02 |
| TWI538877B (en) | 2016-06-21 |
| JP5874223B2 (en) | 2016-03-02 |
| KR20140032403A (en) | 2014-03-14 |
| JP2013017932A (en) | 2013-01-31 |
| WO2013008721A1 (en) | 2013-01-17 |
| CN103687820A (en) | 2014-03-26 |
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