JP5874223B2 - Ozone water supply apparatus and ozone water supply method - Google Patents

Description

  The present invention relates to an ozone water supply device and an ozone water supply method. More specifically, the present invention relates to an ozone water supply device and an ozone water supply method for supplying ozone water from an ozone water generation place to an ozone water use place without reducing the ozone concentration of ozone water that performs wet treatment on electronic materials and the like. .

  Conventionally, cleaning of a substrate such as a silicon substrate for a semiconductor, a glass substrate for a liquid crystal, or a quartz substrate for a photomask is represented by an RCA cleaning developed by RCA (Radio of Corporation of America Corp.) in the United States. As described above, a high concentration chemical solution or detergent and a large amount of pure water or ultrapure water for rinsing it have been used. On the other hand, various simplifications have been made to the cleaning technology for the purpose of reducing the cost of the cleaning process and the purpose of conserving the environment by suppressing the use of a large amount of cleaning water, and have achieved results. It was. As a typical cleaning technique, there is a cleaning technique using cleaning water in which a specific gas such as ozone or hydrogen is dissolved.

  For example, ozone water in which ozone is dissolved in pure water has a strong oxidizing power even though the dissolved ozone concentration is as low as several mg / L. Therefore, ozone water is used in the process of removing impurities such as organic substances and metals adhering to the surface of the substrate and the process of forming an oxide film layer on the surface of the silicon substrate. In such a process, since the concentration of ozone used greatly affects the cleaning power of the substrate surface and the film thickness to be formed, the management of the ozone concentration is extremely important.

  However, ozone is easily self-decomposing, and if the distance between the ozone water generation site and the ozone water use location is long, the ozone concentration in the ozone water decreases during the transfer of the generated ozone water to the ozone water use location. .

  In addition, when there are multiple locations where ozone water is used, the ozone water generated at the ozone water generation site is transferred by piping, and the ozone water is sequentially divided and supplied to the location where ozone water is used. The flow rate of ozone water flowing in the pipe decreases. For this reason, it takes time for the ozone water to reach the location where the ozone water is used on the downstream side, and when the ozone water reaches the location where the ozone water is used, the ozone self-decomposes and the ozone concentration in the ozone water It will decline.

  As for the technology for preventing such a decrease in ozone concentration in the ozone water, the present applicant has so far proposed various technologies.

  In Patent Document 1, when ozone water generated by dissolving ozone in pure water is transferred, ozone self-decomposition is suppressed by dissolving carbon dioxide gas or an organic compound in pure water or ozone water using an ozone water generator. It proposes a technology that can be used. Moreover, in patent document 2, the chemical | medical agent supply apparatus is provided in the arbitrary positions from the ozone water supply pipe to the discharge pipe in the ozone water supply apparatus, and nitrous acid, nitrite, carbonic acid, carbonate, bicarbonate, sulfurous acid, A technique for adding one or more ozone decomposition inhibitors selected from the group consisting of sulfite, bisulfite and hydrazine is proposed.

  On the other hand, the present applicant has also proposed various techniques for adjusting ozone concentration in ozone water and easily supplying ozone water having a desired ozone concentration.

  For example, in Patent Document 3, in a method for adjusting the concentration of ozone water in which ozone is excessively dissolved, ozone is decomposed by promoting the decomposition of ozone by the length of a water passage, heating, ultrasonic waves, ultraviolet rays, or turbulence. A technique for adjusting the concentration is proposed. Patent Document 4 proposes a technique related to an ozone concentration adjustment method in which ozone-containing water is brought into contact with glass to obtain ozone water having a desired ozone concentration.

  Furthermore, the present applicant has also proposed a technique for stably supplying ozone water having a desired concentration. For example, Patent Document 5 proposes a technique for supplying ozone water by transferring ozone water containing an ozone decomposition inhibitor to a use point and reducing it to a predetermined ozone concentration by a concentration adjusting means in the vicinity of the use point. ing.

JP 2000-37695 A JP 2002-18454 A JP 2000-180433 A JP 2000-334468 A JP 2005-294377 A

  The present invention was made in order to prevent a decrease in ozone concentration in ozone water following the above-described technique, and its purpose is when the distance between the ozone water generating means and the location where the ozone water is used is long, and / or Alternatively, an object is to provide an ozone water supply device and an ozone water supply method that can supply ozone water without lowering the ozone concentration in the ozone water when a plurality of ozone water use locations are provided.

  An ozone water supply device according to the present invention for solving the above-mentioned problems is connected to the ozone water generating means for generating ozone water to be supplied to the ozone water use location, the ozone water generating means, and the inside A main pipe in which branching points corresponding to the number of the ozone water use locations are formed, a branch pipe connecting the branch points and the ozone water use locations, the main pipe and the branches. And a flow rate maintaining means for preventing a decrease in the flow rate of the ozone water flowing through the pipe.

  According to this invention, while being connected to the ozone water generation means, the ozone water flowing inside is shunted, a main pipe formed with branch points corresponding to the number of ozone water use points, and the branch points and ozone water use And a flow rate maintaining means for preventing a decrease in the flow rate of the ozone water flowing through the main tube and the branch tube. Therefore, the decrease in the flow rate of the ozone water is prevented, and the ozone water is supplied at a desired flow rate. Can be transported. Such an ozone water supply device prevents a decrease in the flow rate of the ozone water, so the ozone water can be supplied to the location where the ozone water is used before the ozone concentration in the ozone water decreases. It can be preferably applied when the distance to the location is long.

  In the ozone water supply apparatus according to the present invention, the flow rate maintaining means is formed such that the cross-sectional area of the main pipe is reduced on the downstream side of the upstream side of the branch point, and the reduced amount of the cross-sectional area of the main pipe is reduced. Is configured to correspond to the flow rate of ozone water diverted to the branch pipe at the branch point.

  According to the present invention, the flow rate maintaining means is formed so that the cross-sectional area of the main pipe is reduced on the downstream side of the upstream side of the branch point, and the decrease in the cross-sectional area of the main pipe is reduced to the branch pipe at the branch point. Since it is configured so as to correspond to the flow rate of the ozone water to be diverted, it is possible to prevent a decrease in the flow rate of the ozone water even after the ozone water is diverted from the main pipe. This ozone water supply device can be preferably applied to a case where ozone water is supplied by diverting sequentially from a main pipe which is a supply pipe for ozone water to a plurality of locations where ozone water is used.

  In the ozone water supply apparatus according to the present invention, a bypass pipe for bypassing the flow of ozone water to the ozone water use place is provided corresponding to the number of the ozone water use places, and the ozone water use place or the bypass is provided. A switching means for flowing ozone water in the piping is provided.

  According to the present invention, even when ozone water is not supplied to any of the locations where ozone water is used, the bypass pipe for bypassing the flow of ozone water is provided, so the ozone water is allowed to flow through the bypass pipe. Can do. For this reason, on the downstream side of the main branch point corresponding to the location where ozone water is not supplied, ozone water with a flow rate suitable for the cross-sectional area of the main water can be flowed, and the flow rate of ozone water is appropriate. Can be maintained.

  In the ozone water supply apparatus according to the present invention, the flow rate of the ozone water flowing in the branch pipe immediately before the location where the ozone water is used is controlled to be at least 30 m / min.

  According to this invention, the ozone water can be supplied to the location where the ozone water is used before the ozone in the ozone water self-decomposes and the dissolved ozone concentration decreases.

  The ozone water supply apparatus according to the present invention further comprises pH value suppression means for suppressing the pH value of the ozone water supplied to the ozone water use site to 6 or less.

  According to this invention, the pH value of ozone water can be adjusted to acidity, the self-decomposition of ozone can be suppressed, and the fall of the dissolved ozone concentration in ozone water can be prevented effectively.

  Moreover, the ozone water supply method which concerns on this invention for solving the said subject is the ozone water supply method which supplies the ozone water produced | generated by the ozone water production | generation means to the ozone water use location where ozone water is used by piping. The ozone water is supplied to the ozone water use place while maintaining a flow rate of the ozone water flowing through the pipe at a certain level or more.

  According to this invention, when supplying the ozone water generated by the ozone water generating means to the ozone water use location where the ozone water is used by the pipe, the flow rate of the ozone water flowing through the pipe is maintained above a certain level. Therefore, the ozone water can be transferred at a desired flow rate while preventing a decrease in the flow rate of the ozone water. Since such ozone water supply method prevents the flow rate of ozone water from decreasing, ozone water can be supplied to the location where ozone water is used before the ozone concentration in ozone water decreases. It can be preferably applied when the distance to the location is long.

  In the ozone water supply method according to the present invention, the piping is connected to the ozone water generating means, and the ozone water flowing inside is divided to form a branch point corresponding to the number of locations where the ozone water is used. A main pipe, and a branch pipe connecting the branch point and the ozone water use location, and forming a cross-sectional area of the main pipe so that the downstream side is smaller than the upstream side of the branch point; and The decrease in the cross-sectional area of the main pipe is made to correspond to the flow rate of the ozone water diverted to the branch pipe at the branch point, and the decrease in the flow velocity of the ozone water flowing through the main pipe is prevented to supply ozone water. .

  According to this invention, the ozone water is formed so that the cross-sectional area of the main pipe is reduced on the downstream side of the upstream side of the branch point, and the reduced cross-sectional area of the main pipe is diverted to the branch pipe at the branch point. Therefore, it is possible to prevent a decrease in the flow rate of the ozone water flowing through the main pipe even after the ozone water is diverted from the main pipe. This ozone water supply method can be preferably applied to a case where ozone water is supplied to a plurality of locations where ozone water is used by sequentially diverting from a main pipe which is a supply pipe for ozone water.

  In the ozone water supply method according to the present invention, a bypass pipe for bypassing the flow of ozone water to the ozone water use location is provided corresponding to the number of the ozone water use locations, and the ozone water use location or the bypass is provided. A switching means for flowing ozone water to the piping for use, and the switching means corresponding to the selected location where the ozone water is used causes the ozone water to flow to the bypass piping, and a branch point corresponding to the selected location where the ozone water is used The ozone water is supplied by preventing a decrease in the flow rate of the ozone water flowing through the main pipe on the downstream side.

  According to this invention, even if it is a case where ozone water is not supplied to any ozone water use location, ozone water can be poured into the bypass pipe. For this reason, on the downstream side of the main branch point corresponding to the location where ozone water is not supplied, ozone water with a flow rate suitable for the cross-sectional area of the main water can be flowed, and the flow rate of ozone water is appropriate. Can be maintained.

  In the ozone water supply method according to the present invention, the ozone water is supplied by controlling the flow rate of the ozone water flowing in the branch pipe immediately before the ozone water use portion to be at least 30 m / min.

  According to this invention, ozone water can be supplied to the location where ozone water is used before the ozone in the ozone water self-decomposes and the dissolved ozone concentration decreases.

  In the ozone water supply method according to the present invention, ozone water is supplied at a pH value of 6 or less.

  According to this invention, the pH value of ozone water can be adjusted to acidity, self-decomposition can be suppressed, and the fall of the dissolved concentration of ozone can be prevented effectively.

  According to the ozone water supply device and the ozone water supply method according to the present invention, even when the distance between the ozone water generating means and the ozone water use location is long, the ozone water can be transferred at a desired flow rate, and the dissolved ozone concentration is reduced. Ozone water can be supplied before.

  In addition, according to the ozone water supply device and the ozone water supply method according to the present invention, even when ozone water is supplied to a plurality of locations where ozone water is used by sequentially diverting from the main for transferring ozone water, It can be transferred without reducing the flow rate of ozone water flowing through the main pipe. As a result, the ozone water can be supplied at a desired flow rate to the location where the ozone water is used on the downstream side, and the ozone water in which the decrease in the dissolved ozone concentration is prevented can be supplied.

It is a process flow diagram of an ozone water supply device concerning a 1st embodiment of the present invention. It is a partially notched top view which shows the main pipe and branch pipe which comprise an ozone water supply apparatus. It is explanatory drawing which shows the symbol of the solenoid valve which switches the flow path of ozone water. It is explanatory drawing which shows the switching means which switches the flow path of ozone water which uses a stop valve. It is a process flow diagram showing a part of an ozone water supply device concerning a 2nd embodiment of the present invention. It is explanatory drawing which shows the symbol of the solenoid valve which switches the flow path of ozone water. It is explanatory drawing which shows the switching means which switches the flow path of ozone water which uses a stop valve.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The technical scope of the present invention is not limited only to the following description and drawings.

  As shown in FIG. 1, the ozone water supply device 10 according to the present invention is connected to the ozone water generating means 1 and the ozone water generating means 1, and the ozone water flowing inside is shunted to use the ozone water. The main pipe 11 in which the branch points 12, 13, and 14 corresponding to the numbers 21, 22, and 23 are formed, and the branch pipe 15 that connects the branch points 12, 13, and 14 with the ozone water use locations 21, 22, and 23. , 16 and 17. Moreover, the flow rate maintenance means which prevents the fall of the flow rate of the ozone water which flows through the main pipe 11 and the branch pipes 15, 16, and 17 is provided.

  If ozone water is supplied using this ozone water supply device 10, even when the distance between the ozone water generating means 1 and the ozone water use locations 21, 22, 23 is long, the ozone water can be transferred at a desired flow rate, Ozone water can be supplied before the dissolved ozone concentration decreases.

  Moreover, even when supplying ozone water to the plurality of ozone water use locations 21, 22, and 23 sequentially from the main pipe 11 for transferring the ozone water, the flow rate of the ozone water flowing through the main pipe 11 is reduced after the diversion. It has a special effect that it can be transported without causing the ozone water to be supplied to the ozone water use points 22 and 23 located on the downstream side at a desired flow rate. When supplying ozone water with such an ozone water supply apparatus 10, ozone water may not be supplied to a predetermined ozone water use location (for example, the ozone water use location 21 located on the most upstream side). Even in that case, the ozone water can be supplied to the ozone water use locations 22 and 23 located downstream from the ozone water use location 21 while maintaining the desired flow rate.

  In the ozone water supply device according to the present invention, both the first embodiment in which the bypass piping arrangement is connected to the branch pipe and the second embodiment in which the bypass pipe is connected to the main pipe are conceivable. These forms will be described in further detail below.

[First Embodiment]
As shown in FIG. 1, the ozone water supply device 10 includes a pipe for flowing ozone water. The pipe is composed of a main pipe 11 connected to the ozone water generating means 1 and a plurality of branch pipes 15, 16, 17 branched from the main pipe 11. In the main pipe 11, branch points 12, 13, and 14 corresponding to the ozone water use locations 21, 22, and 23 are provided at different positions in the axial direction of the main pipe 11 from the upstream side to the downstream side. The branch pipes 15, 16, and 17 are provided so as to communicate these branch points 12, 13, and 14 with the ozone water use locations 21, 22, and 23, respectively.

  In the embodiment shown in FIG. 1, three ozone water use locations 21, 22, and 23 are provided, and three branch points 12, 13, and 14 are provided according to the number of ozone water use locations 21, 22, and 23. In addition, three branch pipes 15, 16, and 17 that connect the branch points 12, 13, and 14 with the ozone water use locations 21, 22, and 23 are provided. The branch pipes 15, 16, and 17 are provided with bypass pipes 31, 32, and 33 that further branch from the branch pipes 15, 16, and 17, respectively. These bypass pipes 31, 32, 33 transfer ozone water when not supplied to the ozone water use locations 21, 22, 23.

(Ozone water generation means)
If the ozone water production | generation means 1 can produce | generate ozone water, there will be no restriction | limiting in the structure. Here, an apparatus including an ozone generator 4 that is an ozone gas supply source and an ozone dissolving device 5 that dissolves ozone gas in the supplied water (for example, pure water) will be described as an example.

  An oxygen gas tank 2 and a carbon dioxide gas tank 3 are connected to an ozone generator 4 provided in the ozone water generating means 1 and a mixed gas of oxygen gas and carbon dioxide gas is supplied. The ozone generator 4 generates ozone by various ozone generation methods. For example, ozone gas is generated using a silent discharge type, electrolysis type or ultraviolet type ozonizer.

  An ozone generator 4 is connected to the ozone dissolving device 5, and ozone gas and water (for example, pure water) generated by the ozone generator 4 are supplied. The ozone dissolving device 5 is not particularly limited, and for example, a device that dissolves ozone gas using an ozone dissolving film, a device that dissolves ozone gas in high-pressure pure water using an ejector, or the like can be used. .

  In the ozone water generating means 1, carbon dioxide is mixed to make the pH acidic, and the self-decomposition of ozone dissolved in the ozone water is suppressed. The adjustment of pH by mixing carbon dioxide gas may be performed by controlling the amount of carbon dioxide gas supplied as ozone raw material gas, or may be mixed with ozone gas generated by the ozone gas generator 4. Further, the ozone gas may be adjusted by mixing with ozone water after the ozone gas is dissolved by the ozone dissolving device 5. However, since the purpose is to suppress self-decomposition, it is preferable to mix and adjust before dissolving the ozone gas. However, in adjusting the pH of the ozone water to acidic, it does not preclude the use of other chemicals (pH adjusting liquid) inside or around the ozone water generating means 1.

  The ozone water after adjusting the pH preferably has a pH of 7 or less, and more preferably has a pH of 6-2.

(Use of ozone water)
Ozone water use locations 21, 22, and 23 are locations where a substrate such as a silicon substrate for a semiconductor, a glass substrate for a liquid crystal, or a quartz substrate for a photomask and other electronic components are cleaned using the supplied ozone water. is there. In the ozone water use locations 21, 22, and 23, the substrate is immersed in a treatment tank to which ozone water is supplied, and treatment is performed by spraying ozone water on the substrate. In the ozone water supply apparatus 10 shown in FIG. 1, an example in which three ozone water use places 21, 22, and 23 are provided, but this ozone water use place is one place, two places, or four places or more. Multiple locations may be provided.

(Main and branch pipes)
The main pipe 11 is a pipe that is connected to the ozone water generating means 1 and transfers ozone water downstream. As shown in FIG. 2, the main pipe 11 has branch points 12, 13, 14 corresponding to the number of ozone water use places 21, 22, 23, and diverts ozone water flowing inside. Further, the main pipe 11 is formed so as to taper toward the downstream side at the respective branch points 12, 13, and 14 so that the cross-sectional area is gently reduced. On the other hand, the branch pipes 15, 16, and 17 connect the branch points 12, 13, and 14 of the main pipe 11 with the ozone water use locations 21, 22, and 23, respectively. The ozone water shunted from 11 is transferred to the ozone water use locations 21, 22 and 23.

  The flow rate maintaining means constituting the present invention includes the main pipe 11 and the branch pipes 15, 16, and 17. As shown in FIG. 2, the flow rate maintaining means forms the main pipe 11 such that the cross-sectional area of the main pipe 11 is reduced on the downstream side from the upstream side of the branch points 12, 13, and 14. The reduction in the cross-sectional area is realized by configuring so as to correspond to the flow rate of ozone water diverted to the branch pipes 15, 16, and 17 at the branch points 12, 13, and 14.

  This means that if there is no reduction in the cross-sectional area in the main pipe 11, the flow rate of ozone water that should have flowed through the reduction in the cross-sectional area is It means to correspond to the flow rate. By configuring the main pipe 11 and the branch pipes 15, 16, and 17 in this way, the ozone water pressure of the ozone water flowing through the main pipe 11 can be reduced even after the ozone water is diverted from the main pipe 11 to the branch pipes 15, 16, and 17. A decrease does not occur, and a decrease in the flow rate of ozone water is prevented. The pipe diameter of the main pipe 11 is designed according to the flow rate of ozone water to be obtained.

  The flow rate of the ozone water flowing through the main pipe 11 is controlled so as to be an appropriate flow rate according to the distance between the ozone water generation means 1 and the ozone water use locations 21, 22 and 23. That is, it is desirable that the flow rate of the ozone water is 30 m / min to 120 m / min so that the ozone water can be used at the ozone water use locations 21, 22, 23 before the dissolved ozone concentration in the ozone water decreases, It is more desirable to set it to / m-90m / min.

  In addition, although the material of piping used for the main pipe 11 and the branch pipes 15, 16, and 17 is not limited, it is preferable to use piping which has ozone resistance. For example, a PFA pipe formed of perfluoroalkoxy fluororesin may be used.

(Bypass piping)
Next, the bypass pipes 31, 32, and 33 will be described.

  The bypass pipes 31, 32, and 33 are pipes that bypass the flow of ozone water to the ozone water use locations 21, 22, and 23, and are provided corresponding to the number of ozone water use locations 21, 22, and 23. Yes. The bypass pipes 31, 32, 33 are connected to the branch pipes 15, 16, 17. When the ozone water is not supplied to the ozone water use places 21, 22, 23, the branch pipes 15, 16, 17 are connected. The flowing ozone water is bypassed to the recovery line 37.

  For example, suppose that the ozone water use location 21 located first among the three ozone water use locations 21, 22, 23 is not used. In this case, the ozone water that has flowed through the branch pipe 15 corresponding to the ozone water use location 21 is not supplied to the ozone water use location 21, but the ozone water is caused to flow to the bypass pipe 31 and to be bypassed to the bypass line 37. In this way, even when there is an unused ozone water use location 21, the flow of ozone water flowing through the main pipe 11 downstream from the branch point 12 of the main pipe 11 is diverted by the bypass pipe 31. Keep constant. As a result, it is possible to prevent a decrease in the flow rate of the ozone water downstream from the branch point 12.

  Similarly, even when the other ozone water use locations 22 and 23 are not used, the ozone water flowing through the branch pipes 16 and 17 corresponding to the respective ozone water use locations 22 and 23 is caused to flow to the bypass pipes 32 and 33. , Detour to the collection line 37. As a result, the flow rate of the ozone water downstream of the branch points 13 and 14 of the main pipe 11 can be maintained constant, and the flow rate of the ozone water can be prevented from decreasing even downstream of the branch points 13 and 14.

  The bypass pipes 31, 32 and 33 have the same diameter as that of the branch pipes 15, 16 and 17. The material of the bypass pipes 31, 32, 33 is not particularly limited, but it is preferable to use ozone-resistant pipes, such as PFA pipes formed of perfluoroalkoxy fluororesin. .

  Switching means for flowing the ozone water is provided in any of the ozone water use locations 21, 22, 23 or the bypass pipes 31, 32, 33. This switching means is configured using, for example, a solenoid valve 40 shown in FIG. 3 or a stop valve 41 shown in FIG.

  For example, the solenoid valve 40 shown in FIG. 3 can be used. The solenoid valve 40 is in a state in which the ozone water flowing through the branch pipes 15, 16, and 17 is caused to flow to the ozone water use locations 21, 22, and 23 or to the bypass pipes 31, 32, and 33 due to movement of a spool in the valve. It is comprised so that it may switch to either. The spool is moved by turning on / off the current to the solenoid provided in the solenoid valve 40.

  Further, the stop valve 41 shown in FIG. 4 has the branch pipes 15, 16, 17 and the bypass pipe 31, downstream of the branch point between the branch pipes 15, 16, 17 and the bypass pipes 31, 32, 33. Stop valves 41 are provided on both 32 and 33. According to this switching means, for example, when supplying ozone water to the ozone water use locations 21, 22, 23 is prevented and ozone water is allowed to flow to the bypass pipes 31, 32, 33, the branch pipes 15, 16 The stop valve 41 on the 17th side is closed and the stop valve 41 on the bypass piping 31, 32, 33 side is opened.

  The switching of the flow path is not limited to switching means using the solenoid valve 40 shown in FIG. 3 or the stop valve 41 shown in FIG. 4, and switching means having other configurations may be used.

(Operation and effect of ozone water supply device)
The above ozone water supply apparatus 10 acts as follows.

  First, ozone water is generated by the ozone water generating means 1. First, the oxygen gas stored in the tank 2 and the carbon dioxide gas stored in the tank 3 are mixed, and this mixed gas is supplied to the ozone generator 4. When the mixed gas is supplied to the ozone generator 4, the ozone generator 4 generates ozone. Next, the generated ozone gas is introduced into the ozone dissolving device 5. Separately, pure water is introduced into the ozone dissolving device 5. The ozone dissolving device 5 introduced with these ozone gas and pure water dissolves ozone gas in pure water to generate ozone water.

  The generated ozone water flows into the main pipe 11. As described above, when ozone water is allowed to flow through the main pipe 11, the ozone water is flowed at a flow rate of at least 30 m / min, preferably at a flow rate of 30 m / min to 120 m / min, more preferably 40 m / min. Deliver at a flow rate of ~ 90 m / min. At this time, the pH value of the ozone water is desirably 7 or less, and more desirably 6 to 2.

  The ozone water sent out to the main pipe 11 flows through the section 11 a of the main pipe 11 and reaches the first branch point 12. Part of the ozone water that has reached the branching point 12 is diverted to the branch pipe 15, and the remainder flows through the section 11 b of the main pipe 11 as it is.

  The ozone water branched from the main pipe 11 to the branch pipe 15 flows through the branch pipe 15 and is supplied to the ozone water use location 21. The supplied ozone water is used for cleaning a substrate such as a silicon substrate for semiconductor, a glass substrate for liquid crystal, or a quartz substrate for photomask and other electronic components at the ozone water use location 21.

  On the other hand, the ozone water flowing through the main pipe 11 passes through the branch point 12 and reaches the next section 11b formed with a small cross-sectional area. The part where the cross-sectional area of the main pipe 11 becomes small is formed so as to taper toward the downstream side, and the cross-sectional area gradually decreases. For this reason, in this part, turbulent flow does not arise in the ozone water which flows inside, and the flow velocity of ozone water does not stall by energy loss. Further, the main pipe 11 is formed so that the cross-sectional area of the section 11b is smaller than the cross-sectional area of the section 11a, and the decrease in the cross-sectional area is formed corresponding to the flow rate of the ozone water branched into the branch pipe 15. ing. Therefore, the ozone water that has flowed into the section 11b is maintained at a constant flow rate or higher without the flow rate of the ozone water being reduced.

  Each time the ozone water that has flowed into the section 11 b reaches the branch points 13 and 14, a part thereof is diverted, and the remaining part flows downstream from the branch points 13 and 14 in the main pipe 11. At this time, ozone water that has flowed through the main pipe 11 at a flow rate of a certain value or higher is branched into the branch pipes 16 and 17 while maintaining the flow rate. The diverted ozone water flows through the branch pipes 15, 16, and 17 and is supplied to the ozone water use locations 21, 22, and 23. The ozone water use locations 21, 22, and 23 are used for cleaning electronic components and the like. The On the other hand, the ozone water that has flowed downstream of the branch points 13 and 14 flows through the main pipe 11 at a constant flow velocity without being reduced in flow velocity.

  As described above, since the flow rate of the ozone water flowing through the main pipe 11 is prevented, the ozone water can quickly reach the respective ozone water use locations 21, 22, and 23. For this reason, ozone water is supplied to each ozone water use location 21,22,23 before dissolved ozone concentration falls, without causing ozone in ozone water to self-decompose.

  The ozone water that has not been supplied to the ozone water use locations 21, 22, and 23 and has continued to flow through the main pipe 11 flows to the ozone water recovery line 37.

  When the ozone water is not supplied to any of the ozone water use locations 21, 22, and 23, the ozone water is caused to flow to the corresponding detour pipes 31, 32, and 33 to make a detour to the recovery line 37. When ozone water is allowed to flow through the bypass pipes 31, 32, and 33 to bypass the recovery line 37, for example, the solenoid valve 40 (see FIG. 3) provided in the corresponding branch pipes 15, 16, and 17 is operated. By the operation of the solenoid valve 40, the flow path of the ozone water is switched from the ozone water use places 21, 22, 23 side to the bypass pipes 31, 32, 33 side, and ozone water is supplied to the bypass pipes 31, 32, 33. Flows in.

  For example, when the ozone water use location 21 is not used and the ozone water is bypassed in the bypass pipe 31, the flow rate of the ozone water flowing in the section 11b downstream from the branch point 12 of the main pipe 11 is the ozone water use This is the same as when ozone water is supplied to the location 21. For this reason, it does not cause a decrease in the flow rate of the ozone water that has flowed downstream of the branch point 12, and the ozone water is supplied at a desired flow rate to the ozone water use locations 22 and 23 that are located further downstream. Can do.

  When the stop valve 41 shown in FIG. 4 is used as the switching means, the stop valve 41 on the side where the ozone water is used 21, 22, 23 is closed, and the stop valve 41 on the bypass pipes 31, 32, 33 side is closed. Is released.

[Second Embodiment]
FIG. 5 shows a process flow diagram of the ozone water supply apparatus 10A in which branch pipes 55, 56, 57 and bypass pipes 61, 62, 63 are connected to the branch points 52, 53, 54 of the main pipe 51, respectively. ing. Since the configuration of the ozone water generating means used in the second embodiment and the configuration of the main pipe 51 are the same as those in the first embodiment, the description thereof is omitted here.

  Three branch points 52, 53, and 54 provided in the main pipe 51 include branch pipes 55, 56, and 57, and bypass pipes 61, 62, and 57 provided separately from the branch pipes 55, 56, and 57, respectively. 63 are connected to each other. These branch pipes 55, 56, 57 and bypass pipes 61, 62, 63 have pipe diameters that are formed in the same dimension, and the cross-sectional areas thereof are designed to have the same value. In addition, the cross-sectional areas of the branch pipes 55, 56, 57 and the bypass pipes 61, 62, 63 are a decrease in the cross-sectional area on the downstream side with respect to the cross-sectional area on the upstream side of the branch points 52, 53, 54 of the main pipe 51. It corresponds to.

  Furthermore, at each branch point 52, 53, 54, a part of the ozone water flowing through the main pipe 51 is divided into one of the branch pipes 55, 56, 57 or the bypass pipes 61, 62, 63. Switching means is provided for flowing the remaining portion downstream of the branch points 52, 53, and 54 of the main pipe 51.

  FIG. 6 shows a solenoid valve 70 which is an example of the switching means. The solenoid valve 70 is configured to move the position of a spool provided in the solenoid valve 70 by turning on and off the current, and to flow the flowing ozone water downstream of the branch pipes 55, 56, 57 and the main pipe 51. And the state of flowing to the downstream side of the bypass pipes 61, 62, 63 and the main pipe 51 are performed.

  FIG. 7 shows an example in which a top valve 41 as switching means is used. This stop valve is provided in any of the branch pipes 55, 56, 57 and the bypass pipes 61, 62, 63 connected to the branch points 52, 53, 54, and turns on / off the flow of ozone water. In the switching means shown in FIG. 7, when part of the ozone water is diverted to the branch pipes 55, 56, 57 and the remaining part is made to flow downstream of the main pipe 51, the detour pipes 61, 62, 63 are provided. The stop valve 41 is closed to prevent ozone water from flowing into the bypass pipes 61, 62, 63. Conversely, when part of the ozone water is diverted to the bypass pipes 61, 62, 63 and the remaining part is made to flow downstream of the main pipe 51, the stop valve 41 provided in the branch pipes 55, 56, 57 is used. It closes and prevents ozone water from flowing into the branch pipes 55, 56, 57.

  The bypass pipes 61, 62, 63 are connected to the recovery line 67. When the ozone water is not used at the ozone water use locations 21, 22, 23, the bypass distribution pipes 61, 62, 63 receive ozone water. Detour to collection line 67.

  Also in the ozone water supply apparatus 10A according to the second embodiment, the main pipe 51 is formed so that the cross-sectional area on the downstream side is smaller than the cross-sectional area on the upstream side of each branch point 52, 53, 54. The decrease in the cross-sectional area is formed corresponding to the flow rate of the ozone water branched into the branch pipes 55, 56, and 57. Therefore, it is possible to flow ozone water at a certain value or more without reducing the flow velocity of the ozone water flowing through the main pipe 51 on the downstream side of the branch points 52, 53, and 54. Even when ozone water is not supplied to the location where ozone water is used, the ozone water is diverted to the bypass pipes 61, 62, 63, so the branch points 52, 53 corresponding to the ozone water supply location in the main pipe 51 where ozone water is not supplied. , 54 on the downstream side, a decrease in the flow rate of the ozone water flowing through the main pipe 51 can be prevented.

  The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to the following examples.

  In Examples and Comparative Examples described below, the ozone generator 4 (Sumitomo Seimitsu Industry Co., Ltd., silent discharge type ozone generator GR-RD) shown in FIG. 1 and the ozone dissolving device 5 (Japan Gore-Tech). Ozone water was produced by using Ozone Co., Ltd., ozone-dissolved film GNK-01K. In addition, the dissolved ozone concentration was measured using a dissolved ozone meter (Sugawara Business Co., Ltd., dissolved ozone meter EL-700A).

[Example]
In this embodiment, the ozone water supply apparatus 10 including the main pipe 11 and the branch pipes 15, 16, and 17 shown in FIG. 1 was used. Moreover, the ozone water use places 21, 22, and 23 are three places as shown in FIG. 1, the water supply distance to the ozone water use place 21 is 30 m, the water supply distance to the ozone water use place 22 is 60 m, and the ozone water use place. The water supply distance up to 23 was set to 90 m. The inner diameter of the main pipe 11 in the section 11a up to the branch point 12 corresponding to the first ozone water use location 21 is 32 mm, and the second ozone water use from the branch point 12 corresponding to the first ozone water use location 21 The inner diameter of the main pipe 11 in the section 11b to the branch point 13 corresponding to the point 22 is 25 mm, and the branch point 14 corresponding to the third ozone water use point 23 from the branch point 13 corresponding to the second ozone water use point 22. Pipes in which the inner diameter of the main pipe 11 in the section 11c was formed to 20 mm were used.

  First, a mixed gas of oxygen gas and carbon dioxide gas is supplied to the ozone generator 4 to generate ozone gas, the generated ozone gas is introduced into an ozone dissolving film which is the ozone dissolving device 5, and ozone is dissolved in pure water. To produce ozone water. The dissolved ozone concentration at the outlet of the ozone dissolving device 5 at this time was 25 mg / L. The pH value of the generated ozone water was 5.

  On the other hand, at each ozone water use location 21, 22, 23, since it is necessary that at least the dissolved ozone concentration is 20 mg / L, the dissolved ozone concentration at the time when each ozone water use location 21, 22, 23 is reached. The target value is 20 mg / L.

  The generated ozone water was sent to the main pipe 11 with a water supply amount set to 35 L / min, and the amount of ozone water used at each ozone water use location 21, 22, 23 was 10 L / min per location.

  The flow rate of the ozone water flowing through the main pipe 11 can be expressed by the following equation (1).

Pipe flow velocity LV (m / min) = Water supply amount (m ³ / min) ÷ Pipe cross-sectional area (m ² ) (1)

Substituting into this equation (1) the amount of water delivered = 0.035 (m ³ / min) and the cross-sectional area of the pipe = 16 ² × 3.14 × 10 ⁻⁶ (m ² ), the pipe flow velocity in the section 11a is obtained. About 43.5 m / min.

Similarly, in equation (1), the amount of water delivered = 0.035−0.010 = 0.025 (m ³ / min), the cross-sectional area of the pipe = 12.5 ² × 3.14 × 10 ⁻⁶ (m ² ) And the pipe flow velocity in the section 11b is calculated to be about 51.0 m / min. In addition, substituting into the formula (1) for water supply amount = 0.025−0.010 = 0.015 (m ³ / min) and pipe cross-sectional area = 10 ² × 3.14 × 10 ⁻⁶ (m ² ) The pipe flow velocity in the section 11c is about 47.8 m / min.

  And the measurement result of the dissolved ozone density | concentration of ozone water in each ozone water use location 21,22,23 is 24 mg / L in the 1st ozone water use location 21, 24 mg / L in the 2nd ozone water use location 22, It was 23 mg / L in the third ozone water use point 23.

  Thus, when the dissolved ion concentration in the ozone water use places 21, 22, and 23 was measured, a decrease in the dissolved ozone concentration of the supplied ozone water was suppressed, and it was confirmed that the dissolved ozone concentration was higher than the target value. It was.

[Comparative example]
In this comparative example, the ozone water supply device 10 similar to the ozone water supply device 10 shown in FIG. 1 is used, except that the inner diameter of the main pipe 11 is 32 mm in all sections, and measurement is performed by the same method. went. As in the example, the ozone water use locations 21, 22, and 23 are 3 locations, the water supply distance to the ozone water use location 21 is 30m, the water supply distance to the ozone water use location 22 is 60m, and the ozone water use location The water supply distance up to 23 was set to 90 m. Moreover, the production | generation of ozone water and the dissolved ozone density | concentration (25 mg / L) of the produced | generated ozone water were also made into the same as that of an Example.

  The generated ozone water was sent to the main pipe 11 with a water supply amount set to 35 L / min, and the amount of ozone water used at each ozone water use location 21, 22, 23 was 10 L / min per location.

The aforementioned equation (1), water supply amount = 0.035 ^{(m 3} / min), by substituting the pipe cross-sectional area ^{= 16 2 × 3.14 × 10 -6} (m 2), the pipe flow velocity in the section 11a Is about 43.5 m / min. This is the same as in the above-described embodiment.

On the other hand, in the formula (1), the water supply amount = 0.035−0.010 = 0.025 (m ³ / min), the pipe cross-sectional area = 16 ² × 3.14 × 10 ⁻⁶ (m ² ) By substituting and calculating the pipe flow velocity in the section 11b, it is about 31.1 m / min. In addition, substituting into the formula (1) for water supply amount = 0.025−0.010 = 0.015 (m ³ / min) and pipe cross-sectional area = 16 ² × 3.14 × 10 ⁻⁶ (m ² ) The pipe flow velocity in the section 11c is about 18.7 m / min.

  When the dissolved ozone concentration in each ozone water use region was measured under such conditions, the first ozone water use location 21 was 24 mg / L, the second ozone water use location 22 was 22 mg / L, and the third ozone The water usage point 23 was 18 mg / L.

  As described above, in the comparative example, when the dissolved ion concentration at the ozone water use locations 21, 22, and 23 is obtained, it can be seen that the dissolved ozone concentration at the downstream ozone water use location sequentially decreases. In the 3rd ozone water use location, the dissolved ozone concentration fell to 18 mg / L dissolved ozone concentration, and could not be 20 mg / L or more which is a target value.

  The pipe flow rates of the examples and comparative examples are shown in Table 1, and the dissolved ozone concentration is shown in Table 2.

  As is apparent from Table 1, in the embodiment using the pipe formed so that the pipe diameter of the main pipe 11 gradually decreases every time it passes through the branch point, the pipe 11 is formed in the same size without reducing the pipe diameter. Compared to the comparative example using the pipe, the decrease in the flow velocity of the ozone water flowing through the main pipe 11 is prevented. And as shown in Table 2, the dissolved ozone concentration in each ozone water use location 21,22,23 is a target value in all the ozone water use locations 21,22,23 in an Example. A certain dissolved ozone concentration could be 20 mg / L or more. On the other hand, in the comparative example, the dissolved ozone concentration at each ozone water use location 21, 22, 23 decreases as the transfer distance of the ozone water increases, and at the third ozone water use location 23, the dissolved ozone concentration decreases. The ozone concentration was lowered to 18 mg / L, which was below the target ozone concentration of 20 mg / L.

  From this, by applying the ozone water supply device according to the embodiment, ozone water can be supplied at a flow rate of a certain value or more without reducing the flow rate of ozone water, and the dissolved ozone concentration of ozone water decreases. It can be effectively prevented.

1 Ozone water generation means (ozone water generator)
2 Oxygen gas tank 3 Carbon dioxide gas tank 4 Ozone generator 5 Ozone dissolving device 10, 10A Ozone water supply device 11 Main pipe 51 Main pipe 12, 13, 14 Branch point 52, 53, 54 Branch point 15, 16, 17 Branch pipe 55, 56, 57 Branch pipe 21, 22, 23 Ozone water use point 31, 32, 33 Detour pipe 63, 64, 65 Detour pipe 37, 67 Recovery line 40 Solenoid valve 70 Solenoid valve 41 Stop valve

Claims (8)

Ozone water generating means for generating ozone water to be supplied to the location where ozone water is used;
A plurality of branch points corresponding to the number of ozone water use locations are provided at different positions in the axial direction from the upstream side to the downstream side while being connected to the ozone water generation means and branching the ozone water flowing inside. and the main was,
A branch pipe connecting the branch point and the ozone water use point;
A flow rate maintaining means for preventing the flow rate of ozone water flowing through the main pipe from lowering than the flow rate of ozone water flowing upstream of the branch point provided on the most upstream side ,
The flow rate maintaining means is formed such that the cross-sectional area of the main pipe is reduced on the downstream side of the upstream side of the branch point,
The reduced amount of the cross-sectional area corresponds to the flow rate of ozone water diverted to the branch pipe connected to the branch point . Switching means for bypassing the flow of ozone water to the ozone water use location is provided corresponding to the number of ozone water use locations, and switching means for flowing ozone water to the ozone water use location or the bypass piping The ozone water supply device according to claim 1 , wherein The ozone water supply apparatus according to claim 1 or 2, wherein a flow rate of the ozone water flowing in the branch pipe immediately before the ozone water use location is controlled to be at least 30 m / min. The ozone water supply apparatus of any one of Claims 1-3 provided with the pH value suppression means which suppresses the pH value of the ozone water supplied to the said ozone water use location to 6 or less. An ozone water supply method for supplying ozone water generated by an ozone water generating means to an ozone water use location where ozone water is used by piping,
The piping is connected to the ozone water generating means, and also branches the ozone water flowing inside, and the branch point corresponding to the number of the ozone water use points is located at different positions in the axial direction from the upstream side to the downstream side. It is composed of a plurality of main pipes, and a branch pipe that connects the branch point and the ozone water use location,
The cross-sectional area of the main pipe is formed so that the downstream side of the branch point is lower than the upstream side of the branch point, and the decrease in the cross-sectional area is divided into ozone water that is diverted to the branch pipe connected to the branch point. By adapting to the flow rate,
Preventing the flow rate of ozone water flowing through the main pipe from dropping below the flow rate of ozone water flowing upstream of the branch point provided on the most upstream side and supplying ozone water to the location where the ozone water is used A method for supplying ozone water. A detour pipe for detouring the flow of ozone water to the ozone water use location is provided corresponding to the number of the ozone water use locations, and a switching means for flowing ozone water to the ozone water use location or the detour piping. Provided,
Ozone water is caused to flow through the bypass pipe by the switching means corresponding to the selected location where the ozone water is used, and flows through the main pipe downstream from the branch point corresponding to the selected location where the ozone water is used. The ozone water supply method according to claim 5 , wherein ozone water is supplied while preventing a decrease in flow rate. The ozone water supply method according to claim 5 or 6 , wherein the ozone water is supplied by controlling a flow rate of the ozone water flowing in the branch pipe immediately before the use location of the ozone water to be at least 30 m / min. The ozone water supply method according to any one of claims 5 to 7 , wherein the ozone water is supplied at a pH value of 6 or less.

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