WO2012133569A1 - Capteur de courant de foucault - Google Patents

Capteur de courant de foucault Download PDF

Info

Publication number
WO2012133569A1
WO2012133569A1 PCT/JP2012/058208 JP2012058208W WO2012133569A1 WO 2012133569 A1 WO2012133569 A1 WO 2012133569A1 JP 2012058208 W JP2012058208 W JP 2012058208W WO 2012133569 A1 WO2012133569 A1 WO 2012133569A1
Authority
WO
WIPO (PCT)
Prior art keywords
head
cable
capacitive element
amplifier
impedance
Prior art date
Application number
PCT/JP2012/058208
Other languages
English (en)
Japanese (ja)
Inventor
高久　正和
Original Assignee
株式会社東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東京精密 filed Critical 株式会社東京精密
Priority to JP2013507688A priority Critical patent/JP5968305B2/ja
Publication of WO2012133569A1 publication Critical patent/WO2012133569A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Definitions

  • the present invention relates to an eddy current sensor, and more particularly to an eddy current sensor in which a sensor head and an amplifier circuit are connected by a cable.
  • the eddy current sensor is widely used for measuring the distance (gap) between the detected object and the sensor head, and a resonance type eddy current sensor is one having high detection sensitivity.
  • a resonant eddy current sensor has a resonance circuit formed by the impedance of the inductance element (coil) of the sensor head and a capacitive element (capacitor) in the amplifier circuit, greatly increasing the measurement sensitivity near a specific gap, It enables gap measurement with high accuracy.
  • FIG. 1 is a diagram showing a schematic configuration of a resonance type eddy current sensor.
  • the two terminals of the sensor head 10 are connected to the terminals 31 and 32 of the amplifier circuit 30 by the coaxial cable 20.
  • the terminal 31 is connected to the ground via the amplifier capacitive element C 1, and via the auxiliary capacitive element C 2 and the oscillation circuit 33 connected in series.
  • the terminal 32 is connected to the ground.
  • FIG. 2 is a diagram showing a circuit configuration of the resonance type eddy current sensor of FIG.
  • the sensor head 10 has an inductance element (coil) LS inside.
  • the two terminals 11 and 12 of the inductance element LS are connected to the terminals 31 and 32 of the amplifier circuit 30 via the coaxial cable 20.
  • the amplifier capacitive element C1 is connected between the terminal 31 and the terminal 32.
  • the auxiliary capacitive element C2 and the oscillation circuit 33 connected in series are connected between the terminal 31 and the terminal 32 in parallel with the amplifier capacitive element C1.
  • the output voltage generated at the terminal 31 is amplified and output by an amplifier (not shown).
  • This resonant eddy current sensor outputs a voltage waveform in accordance with the entire (total) impedance of the portion indicated by reference numeral 50 including the inductance element LS, the cable 20 and the amplifier capacitance element C1.
  • the capacitance values of the amplifier capacitor element C1 and the auxiliary capacitor element C2 can be adjusted to obtain an optimum resonance state.
  • the capacitance values of the amplifier capacitive element C1 and the auxiliary capacitive element C2 are adjusted.
  • This total impedance Z is expressed as follows.
  • the total impedance Z differs depending on the impedance ZS when the cable 20 is short-circuited.
  • the ratio of the impedance change of the inductance element LS in the signal is increased and the sensitivity is improved as the impedance ZS at the time of short-circuit is reduced. Therefore, it is desirable that the impedance ZS at the time of short circuit is small. If the cable 20 is lengthened, the impedance of the cable increases, so the ratio of the impedance of the inductance element LS of the sensor head 10 in the total impedance Z decreases, and the measurement resolution decreases.
  • the impedance ZS at the time of short-circuit changes due to the cable construction state and the influence of disturbance, and the signal S / N ratio changes accordingly.
  • the S / N ratio decreases as the cable 20 becomes longer. Therefore, the length of the cable 20 has a limit.
  • Patent Document 1 describes an eddy current sensor in which an amplifier circuit is provided in a sensor head, the change in impedance of the inductance element LS is amplified, and the amplified signal is transmitted via a cable. ing. Since the signal transmitted through the cable is an amplified signal, a signal with a high S / N ratio is obtained.
  • the sensor head becomes larger.
  • the sensor head is required to be downsized and the cable extended so that the sensor head can be attached at a desired position, and the sensor head provided with the amplifier circuit cannot cope with downsizing.
  • An object of the present invention is to realize an eddy current sensor capable of performing measurement without degrading detection sensitivity even when a cable is lengthened without increasing the size of a sensor head.
  • the eddy current sensor of the present invention is provided with a head capacitive element connected in parallel to the inductance element in the sensor head.
  • the eddy current sensor of the present invention includes a sensor head having an inductance element, a cable connected to both ends of the inductance element of the sensor head, and an amplifier circuit connected between two terminals of the cable.
  • the amplifier circuit includes an oscillation circuit and an amplifier capacitive element connected between two terminals of the cable
  • the sensor head includes a head capacitive element provided in the inductance element, and the inductance The element, the head capacitive element, the cable, and the amplifier capacitive element form a resonance circuit for an AC signal output from the oscillation circuit.
  • the eddy current sensor of the present invention has a configuration in which a part of the amplifier capacitive element is moved to the head capacitive element in the sensor head.
  • the circuit can be configured so that fine adjustment is possible. Thereby, even if the sensor head maintains a small shape and the length of the cable is increased, the detection sensitivity does not deteriorate.
  • the detection sensitivity does not deteriorate at all even if the impedance varies in the cable portion. Further, since the detection sensitivity is not deteriorated due to the impedance variation in the cable portion, it means that the detection sensitivity is not deteriorated even if the cable is lengthened as much as necessary.
  • the head capacitance element is finely adjusted according to the individual difference of the inductance element.
  • the capacitance value of a commercially available capacitor is not continuously prepared, only the capacitance value of the jump value is sold, and when trying to build a head capacitance element using a commercially available capacitor, the sensor Many capacitative elements must be embedded in the head, which increases the size. With this, the purpose of “maintaining small size and lengthening the cable length” cannot be realized.
  • the capacitive element and the inductance element are connected in parallel, the combined impedance increases.
  • the influence of the impedance of the cable can be relatively reduced. This means that the influence of the cable on the detection sensitivity of the sensor can be reduced.
  • the impedance also increases.
  • the eddy current can be measured with high accuracy even if the length of the cable is increased.
  • one capacitive element having a value as large as possible that can be easily obtained is determined within a range that does not exceed all of the assumed capacitance values constituting the resonance state and the inductance of the sensor head. Regardless of the difference, even if the determined capacitive element is incorporated as a head capacitive element, it can be sufficiently adjusted by the amplifier capacitive element, so that the sensor head is manufactured in an easy process without departing from the spirit of the present invention. You can also.
  • an eddy current sensor having a long cable and good detection sensitivity can be realized with a small sensor head.
  • FIG. 1 is a diagram showing a schematic configuration of a resonance type eddy current sensor.
  • FIG. 2 is a diagram showing a circuit configuration of the resonance type eddy current sensor of FIG.
  • FIG. 3 is a diagram illustrating a circuit configuration of the eddy current sensor according to the embodiment.
  • FIG. 4 shows the result of simulating with the eddy current sensor of the embodiment and the conventional eddy current sensor how much the total impedance fluctuates when the cable impedance fluctuates by 1% at each cable length.
  • FIG. FIG. 5 shows the results of simulating the effects of changes in the inductance value of the inductance element LS on the total impedance at each cable length using the eddy current sensor of the embodiment and the conventional eddy current sensor.
  • FIG. FIG. 6 is a diagram illustrating an example of attachment of the inductance element and the capacitive element in the sensor head.
  • FIG. 3 is a diagram illustrating a circuit configuration of the eddy current sensor according to the embodiment.
  • the eddy current sensor of the embodiment has a schematic configuration as shown in FIG. 1, and the circuit configuration is different from the conventional example shown in FIG.
  • the eddy current sensor of the embodiment includes a sensor head 60, a coaxial cable 20, and an amplifier circuit.
  • the two terminals 61 and 62 of the sensor head 60 are connected to the terminals 71 and 72 of the amplifier circuit by the coaxial cable 20.
  • an amplifier capacitive element C11 is connected between terminals 71 and 72.
  • the auxiliary capacitive element C2 and the oscillation circuit 73 connected in series are connected between the terminals 71 and 72 in parallel with the amplifier capacitive element C11.
  • the output voltage generated at the terminal 71 is amplified and output by an amplifier (not shown).
  • the sensor head 60 includes an inductance element (coil) LS and a head capacitive element CS connected in parallel to the inductance element LS.
  • a connection node between the inductance element LS and the head capacitive element CS is connected to two terminals 61 and 62, respectively, and is connected to the terminals 71 and 72 of the amplifier circuit via the coaxial cable 20.
  • the head capacitive element CS is provided in parallel with the inductance element LS of the sensor head 60, unlike the conventional example of FIG. Are the same.
  • the capacitance values of the amplifier capacitive element C11 and the auxiliary capacitive element C2 can be adjusted in order to obtain an optimal resonance state. Specifically, a capacitive element having a plurality of capacitance values is provided, and the capacitance value can be adjusted by selecting connection with a switch or the like. Further, the total (total) impedance Z of the portion indicated by reference numeral 80 is expressed as follows using the above-described function Para (a, b).
  • the output voltage is affected by the output impedance of the oscillation circuits 33 and 73 and the input impedance of the detection circuit, and is not essential. Therefore, in this simulation, a more essential total impedance is verified.
  • the optimum value of the auxiliary capacitance element C2 fluctuates depending on the output impedance of the oscillation circuits 33 and 73, the input impedance of the detection circuit, the input range of the detection circuit, and the like.
  • the second item is a simulation of how the influence of the change in the inductance value of the inductance element LS appears in the total impedance for each cable length.
  • a larger fluctuation means higher sensitivity and improved S / N.
  • the inductance value of the inductance element LS is assumed to vary from 12 ⁇ H to 13 ⁇ H based on the actual inductance of the sensor head.
  • the capacitance value of the head capacitive element CS was 6800 pF.
  • the impedance Z1 of the amplifier capacitor C1 is selected to be
  • 4/3 ⁇
  • the impedance Z11 of the amplifier capacitor C11 is such that when the inductance value of the inductance element LS is 12 ⁇ H, the conventional example of FIG. 2 and the total impedance Z of the present embodiment of FIG. Selected. Specifically, the capacitance value of the amplifier capacitor C11 is adjusted with 791 pF when the cable length is 1 m and 229 pF when the cable length is 10 m as the center, and the middle value is centered on the value between them. As adjusted.
  • FIG. 4 shows the simulation results for the first item, where reference characters A to C are the case of this embodiment, A is a cable length of 3.5 m, and B is a cable length of 6.0 m. Respectively, when C is a cable length of 10.0 m.
  • Reference numerals D to F in the case of the conventional example of FIG. 2 show a case where D is a cable length of 3.5 m, E is a cable length of 6.0 m, and F is a cable length of 10.0 m.
  • the variation rate of the total impedance is smaller in the present embodiment than in the conventional example of FIG. This means that the present embodiment is more resistant to uncertain elements (variations) in the cable portion than the conventional example.
  • FIG. 5 shows simulation results for the second item described above, where reference characters A to C are the case of this embodiment, A is a cable length of 3.5 m, and B is a cable length of 6.0 m. Respectively, when C is a cable length of 10.0 m.
  • Reference numerals D to F in the case of the conventional example of FIG. 2 show a case where D is a cable length of 3.5 m, E is a cable length of 6.0 m, and F is a cable length of 10.0 m.
  • the variation rate of the total impedance with respect to the change of the inductance value of the inductance element LS is larger in the present embodiment than in the conventional example of FIG. This means that the present embodiment is more sensitive to changes in the inductance element LS than the conventional example, and the S / N is improved.
  • the characteristics are improved at any cable length. That is, the influence of cable impedance can be reduced.
  • the inductance element LS and the head capacitor element CS are connected in parallel in the sensor head 60, the combined impedance increases, and the influence of the impedance of the cable 20 can be relatively reduced.
  • the combination of the capacitance value of the head capacitive element CS and the capacitance value of the amplifier capacitive element C11 is relatively flexible while maintaining the sum of the capacitance value of the amplifier capacitive element C11 and the capacitance value of the head capacitive element CS. Therefore, a general-purpose small capacitive element can be selected as the head capacitive element CS, and a circuit can be configured so that the amplifier capacitive element C11 can be finely adjusted. Thereby, even if the sensor head 60 maintains a small shape and lengthens the cable 20, detection sensitivity does not deteriorate. In addition, the ideal measurement state of the sensor is maintained.
  • the conventional amplifier circuit can be used as it is, or even when the amplifier capacitance element is changed, the change of the amplifier capacitance element is small. It can be handled only by a change in scale.
  • the ratio of the capacitance value of the head capacitive element CS to the capacitive value of the amplifier capacitive element C11 is as follows.
  • the larger the value, the more effective, and the capacity of the head capacitive element CS is preferably greater than or equal to the capacity of the amplifier capacitive element C11, and the capacity of the head capacitive element is desirably 5 times or more that of the amplifier capacitive element.
  • the stray capacitance inside the sensor head is very small (about 2 pF in the sensor head used as an example of the simulation in the present embodiment), and the stray capacitance has a head capacitance element CS in the present embodiment. Even if is replaced, a significant difference from the configuration of the conventional example shown in FIG. 2 cannot be clearly obtained. In addition, the capacitance value of the stray capacitance cannot be stabilized at the same level as that of the circulating capacitors (tolerance 2% or less, temperature characteristic 60 ppm / ° C or less).
  • this embodiment describes the apparatus which detects the distance with to-be-detected body
  • the application range of this invention is not the limitation.
  • the inductance around the sensor head changes due to changes in the posture, internal composition, quenching state, shape, magnetization, etc. of the detection body (that is, when the impedance of the inductance element LS changes)
  • the present invention can also be applied to a measuring device that detects the above.
  • the cable 20 is assumed to be coaxial, but the same effect is naturally obtained with respect to other types of cables as well as the coaxial.
  • the number of elements constituting the head capacitive element may be plural as long as the size of the sensor head is not affected.
  • the head capacitance element is not limited to “the largest capacitance among commercially available capacitors having a capacitance value equal to or less than that of the amplifier capacitance element”. For example, even if an element having a capacitance slightly smaller than the largest one is used to secure a margin for the resonance state, it is obvious that the purpose of this patent can be sufficiently achieved.
  • FIG. 6A and 6B are diagrams for explaining an example of attachment of the inductance element and the capacitive element in the sensor head.
  • FIG. 6A shows a conventional example of attachment
  • FIG. 6B shows an example of attachment of the embodiment.
  • the sensor head 10 has a cylindrical bobbin 91, and a cylindrical groove 92 is formed near the tip of the bobbin 91. As shown in FIG. A coil 93 formed by winding a shield wire around the groove 92 forms an inductance element LS. Both terminals 94 and 95 of the shield wire are connected to the cable 20.
  • a coil in a small sensor head is very small, and it is difficult to fix a wire drawn from the coil. If the wire drawn from the coil cannot be fixed, the coil wound around the bobbin will be broken, resulting in a serious problem in the characteristics of the sensor head.
  • a capacitor which is a general capacitive element CS has two electrodes. As shown in FIG. 3, both terminals of the inductance element LS in the sensor head 60 are connected to respective electrodes of the capacitor CS. Therefore, as shown in FIG. 6B, a through hole 96 is provided in the bobbin 91, and a capacitor 97 is fixed in the through hole 96, and the electrodes 98 and 99 on both sides of the capacitor 97 are near the cylindrical surface of the bobbin 91. To be located. Then, the wires 94 and 95 of both terminals of the inductance element are connected and fixed to the electrodes 98 and 99. Electrodes 98 and 99 are further connected to a line of cable 20 (not shown).
  • the assembly of the sensor head 60 is facilitated, and the wires 94 and 95 of both terminals are fixed, so that the possibility that the coil will collapse can be easily eliminated.
  • the capacitor 97 can be easily fixed and connected to the capacitor 97. Since the lines 94 and 95 to be separated can be separated on the opposite side of the bobbin 91, workability is improved and unwanted contact errors can be prevented.
  • the present invention is applicable to a resonance type eddy current sensor.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

La présente invention concerne un capteur de courant de Foucault présentant une excellente sensibilité de détection, une tête de détection compacte et un long câble. Le capteur est équipé d'une tête de détection (60) comportant un élément inductif (LS) ; d'un câble (20) connecté aux deux extrémités de l'élément inductif (LS) de la tête de détection (60) ; et d'un circuit amplificateur connecté entre les deux bornes du câble (20). Le circuit amplificateur est doté d'un circuit d'oscillation (73) et d'un élément capacitif amplificateur (C11) connecté entre les deux bornes du câble (20). La tête de détection (60) possède un élément capacitif de tête (CS) disposé dans l'élément inductif (LS). L'élément inductif (LS), l'élément capacitif de tête (CS), le câble (20) et l'élément capacitif amplificateur (C11) forment un circuit résonant pour une émission de signaux de courant alternatif en provenance du circuit oscillant.
PCT/JP2012/058208 2011-03-31 2012-03-28 Capteur de courant de foucault WO2012133569A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013507688A JP5968305B2 (ja) 2011-03-31 2012-03-28 渦電流センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-077298 2011-03-31
JP2011077298 2011-03-31

Publications (1)

Publication Number Publication Date
WO2012133569A1 true WO2012133569A1 (fr) 2012-10-04

Family

ID=46931276

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/058208 WO2012133569A1 (fr) 2011-03-31 2012-03-28 Capteur de courant de foucault

Country Status (2)

Country Link
JP (1) JP5968305B2 (fr)
WO (1) WO2012133569A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108917571A (zh) * 2018-05-07 2018-11-30 江苏利核仪控技术有限公司 一种能使涡流传感器的探头和前置放大器进行互换的方法
KR20180131608A (ko) * 2016-04-12 2018-12-10 텍사스 인스트루먼츠 인코포레이티드 차폐된 케이블을 통해 공진기 커패시터에 커플링되는 센서 인덕터를 가지는 센서 공진기를 사용하는 원격 감지
EP3062067B1 (fr) * 2015-02-26 2021-01-06 Tyco Electronics Belgium EC BVBA Capteur sans contact

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144936U (ja) * 1983-03-17 1984-09-27 オムロン株式会社 近接スイツチ
JPS60211720A (ja) * 1984-04-04 1985-10-24 オムロン株式会社 近接スイツチ
JPH05264208A (ja) * 1992-03-23 1993-10-12 Nippon Zeon Co Ltd ジャケット付きタンクおよびその肉厚変化測定方法
JP2007155727A (ja) * 2005-12-02 2007-06-21 Vibro-Meter Sa 渦電流センサおよび同センサのセンサ・コイル

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144936U (ja) * 1983-03-17 1984-09-27 オムロン株式会社 近接スイツチ
JPS60211720A (ja) * 1984-04-04 1985-10-24 オムロン株式会社 近接スイツチ
JPH05264208A (ja) * 1992-03-23 1993-10-12 Nippon Zeon Co Ltd ジャケット付きタンクおよびその肉厚変化測定方法
JP2007155727A (ja) * 2005-12-02 2007-06-21 Vibro-Meter Sa 渦電流センサおよび同センサのセンサ・コイル

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3062067B1 (fr) * 2015-02-26 2021-01-06 Tyco Electronics Belgium EC BVBA Capteur sans contact
KR20180131608A (ko) * 2016-04-12 2018-12-10 텍사스 인스트루먼츠 인코포레이티드 차폐된 케이블을 통해 공진기 커패시터에 커플링되는 센서 인덕터를 가지는 센서 공진기를 사용하는 원격 감지
CN109154631A (zh) * 2016-04-12 2019-01-04 德州仪器公司 使用具有经由屏蔽线缆耦合到谐振器电容器的传感器感应器的传感器谐振器进行远程感测
EP3443367A4 (fr) * 2016-04-12 2019-04-03 Texas Instruments Incorporated Détection à distance par résonateur de capteur à inducteur de capteur couplé à un condensateur de résonateur sur câble blindé
US10274526B2 (en) 2016-04-12 2019-04-30 Texas Instruments Incorporated Remote sensing using sensor resonator with sensor inductor coupled to resonator capacitor over shielded cable
JP2019518361A (ja) * 2016-04-12 2019-06-27 日本テキサス・インスツルメンツ合同会社 シールドされたケーブルを介して共振器コンデンサに結合されるセンサインダクタを備えるセンサ共振器を用いる遠隔検知
KR102365629B1 (ko) * 2016-04-12 2022-02-21 텍사스 인스트루먼츠 인코포레이티드 차폐된 케이블을 통해 공진기 커패시터에 커플링되는 감지 인덕터를 가지는 센서 공진기를 사용하는 원격 감지
JP7029040B2 (ja) 2016-04-12 2022-03-03 テキサス インスツルメンツ インコーポレイテッド シールドされたケーブルを介して共振器コンデンサに結合されるセンサインダクタを備えるセンサ共振器を用いる遠隔検知
CN108917571A (zh) * 2018-05-07 2018-11-30 江苏利核仪控技术有限公司 一种能使涡流传感器的探头和前置放大器进行互换的方法
CN108917571B (zh) * 2018-05-07 2024-06-07 江苏利核仪控技术有限公司 一种能使涡流传感器的探头和前置放大器进行互换的方法

Also Published As

Publication number Publication date
JPWO2012133569A1 (ja) 2014-07-28
JP5968305B2 (ja) 2016-08-10

Similar Documents

Publication Publication Date Title
JP4972098B2 (ja) 可撓性精密電流検出器
JP5126154B2 (ja) 電流センサ装置
CN107003340B (zh) 电流传感器以及测定装置
KR20140040691A (ko) 정전용량형 근접 센서 및 정전용량형 근접 검출 방법
JP5968305B2 (ja) 渦電流センサ
JP6305184B2 (ja) 電流センサおよび測定装置
JP2023024575A (ja) 電流検出装置および電流測定装置
CN105737727A (zh) 一种电涡流传感器的探头及电涡流传感器
JP2005055300A (ja) 電流センサ
WO2016157900A1 (fr) Capteur de position
JP6153416B2 (ja) 電流センサおよび測定装置
JP6079136B2 (ja) 電流検出装置
CN115362374B (zh) 超高带宽电流传感器
JP2019027970A (ja) 電流センサおよび測定装置
EP4009004A1 (fr) Dispositif de capteur à courants de foucault pour mesurer un déplacement linéaire
CN113625038A (zh) 一种电流测量装置及电压电流测量装置
JP6362414B2 (ja) 電流センサおよび測定装置
JP3809635B2 (ja) コイルの銅抵抗補償回路
JP6434456B2 (ja) 絶縁電圧プローブ
JP5758229B2 (ja) 磁界検出装置
CN106706007A (zh) 一种传感器阻尼比调整装置
Mikhal et al. Electromagnetic protection in high precision tri-axial thermometric AC bridge
CN109917469B (zh) 一种非对称高灵敏度线圈磁传感器
JP2017110908A (ja) 測定装置
JP2016125941A (ja) 位置検出装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 12764116

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2013507688

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 12764116

Country of ref document: EP

Kind code of ref document: A1