WO2012124277A1 - 真空ポンプ、真空排気装置及び真空ポンプの運転方法 - Google Patents
真空ポンプ、真空排気装置及び真空ポンプの運転方法 Download PDFInfo
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- WO2012124277A1 WO2012124277A1 PCT/JP2012/001452 JP2012001452W WO2012124277A1 WO 2012124277 A1 WO2012124277 A1 WO 2012124277A1 JP 2012001452 W JP2012001452 W JP 2012001452W WO 2012124277 A1 WO2012124277 A1 WO 2012124277A1
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- drive motor
- threshold value
- vacuum pump
- load torque
- pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/03—Torque
- F04C2270/035—Controlled or regulated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/05—Speed
- F04C2270/051—Controlled or regulated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/86—Detection
Definitions
- the present invention relates to a vacuum pump, a vacuum exhaust device and a vacuum pump operating method in which a magnet coupling is used for transmitting a driving force.
- the mechanical booster pump is a volume transfer type vacuum pump that transfers gas from the intake port to the exhaust port by synchronously rotating two mayu type rotors arranged in the casing in opposite directions.
- Mechanical booster pumps have very little mechanical loss because there is no contact between both rotors and between each rotor and casing, and are driven compared to vacuum pumps with large frictional work such as oil rotary vacuum pumps. Has the advantage of reducing the energy required for.
- step-out occurs in which the magnetic coupling between the motor and the rotor is released.
- an object of the present invention is to provide a vacuum pump, a vacuum exhaust device, and a vacuum pump operating method capable of realizing a stable exhaust operation without causing a step-out.
- a vacuum pump includes a pump unit, a drive unit, a magnet coupling, and a controller.
- the pump unit includes a pump chamber having an intake port and an exhaust port, and a rotor disposed in the pump chamber and configured to transfer gas from the intake port to the exhaust port.
- the drive unit includes a motor chamber adjacent to the pump chamber, and a drive motor disposed in the motor chamber and rotating the rotor.
- the magnet coupling includes a partition member, a first magnet, and a second magnet. The partition member hermetically partitions the pump chamber and the motor chamber. The first magnet is attached to the rotor. The second magnet is attached to the drive motor and is magnetically coupled to the first magnet via the partition member.
- the magnet coupling is configured to transmit the rotational force of the drive motor to the rotor with a rotational torque equal to or less than a first threshold value.
- the controller includes a detection unit and a rotation control unit.
- the detection unit detects a load torque of the drive motor.
- the rotation control unit controls the number of rotations of the drive motor.
- the controller increases the rotation speed of the drive motor when the load torque is equal to or less than a second threshold value that is smaller than the first threshold value, and the load torque exceeds the second threshold value and exceeds the first threshold value. In the following cases, the rotational speed of the drive motor is decreased.
- the controller increases the rotation speed of the drive motor when the load torque is equal to or less than a second threshold value that is smaller than the first threshold value, and the load torque exceeds the second threshold value and exceeds the first threshold value. In the following cases, the rotational speed of the drive motor is decreased.
- a method of operating a vacuum pump includes a rotor, a drive motor, and a magnet coupling configured to transmit the rotational force of the drive motor to the rotor with a rotational torque equal to or less than a first threshold value.
- the operation method of the vacuum pump containing these.
- the operation method includes detecting a load torque of the motor. When the load torque is equal to or smaller than a second threshold value that is smaller than the first threshold value, the rotational speed of the drive motor is increased. When the load torque exceeds the second threshold and is equal to or lower than the first threshold, the rotational speed of the drive motor is decreased.
- a vacuum pump includes a pump unit, a drive unit, a magnet coupling, and a controller.
- the pump unit includes a pump chamber having an intake port and an exhaust port, and a rotor disposed in the pump chamber and configured to transfer gas from the intake port to the exhaust port.
- the drive unit includes a motor chamber adjacent to the pump chamber, and a drive motor disposed in the motor chamber and rotating the rotor.
- the magnet coupling includes a partition member, a first magnet, and a second magnet. The partition member hermetically partitions the pump chamber and the motor chamber. The first magnet is attached to the rotor. The second magnet is attached to the drive motor and is magnetically coupled to the first magnet via the partition member.
- the magnet coupling is configured to transmit the rotational force of the drive motor to the rotor with a rotational torque equal to or less than a first threshold value.
- the controller includes a detection unit and a rotation control unit.
- the detection unit detects a load torque of the drive motor.
- the rotation control unit controls the number of rotations of the drive motor.
- the controller increases the rotation speed of the drive motor when the load torque is equal to or less than a second threshold value that is smaller than the first threshold value, and the load torque exceeds the second threshold value and exceeds the first threshold value. In the following cases, the rotational speed of the drive motor is decreased.
- the drive motor transmits the rotational force to the rotor with a rotational torque equal to or less than the first threshold value.
- the first threshold corresponds to a rotational torque that can rotate the drive motor and the rotor synchronously without stepping out of the magnet coupling.
- the step-out of the magnet coupling occurs when the rotational load of the rotor exceeds the rotational load of the drive motor, and is likely to occur, for example, when the pressure (back pressure) at the exhaust port excessively increases at the initial driving of the pump.
- the vacuum pump sets the first and second threshold values for the load torque of the drive motor, and controls the rotational speed of the drive motor according to the detected magnitude of the load torque, so that the magnet coupling is stepped out.
- a stable exhaust operation is realized without causing any problems. Thereby, for example, a stable exhaust operation from atmospheric pressure to a predetermined reduced pressure atmosphere can be realized.
- the controller may place the drive motor in a free-run state when the load torque exceeds the first threshold value.
- the magnet coupling is likely to step out. Therefore, in the above-described vacuum pump, when the load torque of the drive motor exceeds the first threshold, the excitation of the drive motor is cut off and the free-running state of rotating with inertia is set. Thereby, the step-out state of the magnet coupling can be eliminated at an early stage.
- An evacuation apparatus includes a first vacuum pump, a second vacuum pump, and a controller.
- the first vacuum pump includes a pump chamber, a rotor, a drive motor, and a magnet coupling.
- the pump chamber has an intake port and an exhaust port.
- the rotor is disposed in the pump chamber and transfers gas from the intake port to the exhaust port.
- the magnet coupling is configured to transmit the rotational force of the drive motor to the rotor with a rotational torque equal to or less than a first threshold value.
- the second vacuum pump exhausts the gas transferred to the exhaust port.
- the controller includes a detection unit and a rotation control unit. The detection unit detects a load torque of the drive motor.
- the rotation control unit controls the number of rotations of the drive motor.
- the controller increases the rotation speed of the drive motor when the load torque is equal to or less than a second threshold value that is smaller than the first threshold value, and the load torque exceeds the second threshold value and exceeds the first threshold value. In the following cases, the rotational speed of the drive motor is decreased.
- the second vacuum pump has a function as an auxiliary pump for exhausting the back pressure of the first vacuum pump.
- the displacement of the second vacuum pump is smaller than the displacement of the first vacuum pump. Therefore, the first vacuum pump sets first and second threshold values for the load torque of the drive motor, and controls the rotational speed of the drive motor in accordance with the detected magnitude of the load torque. As a result, a stable exhaust operation can be realized without causing a step-out of the magnet coupling.
- a vacuum pump operating method includes a rotor, a drive motor, and a magnet cup configured to transmit the rotational force of the drive motor to the rotor with a rotational torque equal to or less than a first threshold value.
- the first and second threshold values are set for the load torque of the drive motor, and the rotational speed of the drive motor is controlled according to the detected magnitude of the load torque.
- FIG. 1 is a schematic configuration diagram showing an evacuation apparatus according to an embodiment of the present invention.
- the vacuum exhaust apparatus 10 of the present embodiment includes a first vacuum pump 1 and a second vacuum pump 11.
- the intake port of the first vacuum pump 1 is connected to the chamber C via the vacuum valve V, and the exhaust port of the first vacuum pump 1 is connected to the intake port of the second vacuum pump 11.
- the 1st vacuum pump 1 functions as a main pump which exhausts the internal space of the chamber C, and is comprised by the mechanical booster pump in this embodiment.
- the second vacuum pump 11 functions as an auxiliary pump that exhausts the back pressure of the first vacuum pump 1.
- the type of the second vacuum pump 11 is not particularly limited. For example, a rotary pump is used, but a dry pump such as a diaphragm pump or a scroll pump may be used in addition to this.
- FIG. 2 is a schematic cross-sectional view showing the first vacuum pump 1.
- FIG. 3 is a cross-sectional view showing an internal configuration of the pump unit.
- the X-axis direction and the Y-axis direction indicate horizontal directions orthogonal to each other, and the Z-axis direction indicates a vertical direction (gravity direction) orthogonal to these.
- the first vacuum pump 1 is composed of a single-stage mechanical booster pump.
- the first vacuum pump 1 includes a pump unit 2, a drive unit 3, and a rotation transmission unit 4.
- the pump unit 2 has a first casing 20 that forms a pump chamber 23.
- the first casing 20 has an intake port 201 that communicates with a vacuum chamber (not shown), and an exhaust port 202 that communicates with a pump device at a subsequent stage (for example, a rotary pump).
- the intake port 201 and the exhaust port 202 are each in communication with the pump chamber 23.
- the pump chamber 23 is defined by the first casing 20 and partition walls 24 and 25 that are airtightly attached to both sides of the first casing 20.
- the pump unit 2 has a pair of rotors 21 and 22.
- the rotors 21 and 22 have rotating shafts 210 and 220 that extend in parallel to the Y-axis direction, respectively.
- the rotors 21 and 22 have a trough-shaped cross section, and are disposed close to each other and accommodated in the pump chamber 23 as shown in FIG. There are slight gaps (for example, about 0.02 to 0.04 mm) between the rotors 21 and 22, between the rotors 21 and 22 and the first casing 20, and between the rotors 21 and 22 and the partition walls 24 and 25. Is maintained.
- the rotary shafts 210 and 220 pass through the partition walls 24 and 25, respectively, and one end of the rotary shafts 210 and 220 is located in the motor chamber 33 in the drive unit 3. The other ends of the rotating shafts 210 and 220 are located in the gear chamber 43 in the rotation transmitting unit 4.
- the drive unit 3 includes a second casing 30 that is airtightly attached to the partition wall 24, and the motor chamber 33 is formed inside the second casing 30.
- a bearing 31 and a shaft seal 32 that rotatably support the rotating shafts 210 and 220 are respectively installed on the partition wall 24 on the motor chamber 33 side.
- the motor chamber 33 communicates with the pump chamber 23 via the first deaeration passage P1. Thereby, the motor chamber 33 can be deaerated through the first deaeration passage P ⁇ b> 1, and is equalized with the pressure of the pump chamber 23 when the vacuum pump 1 is operated.
- the first degassing passage P1 is formed by a passage that penetrates the partition wall 24 in the Y-axis direction.
- the magnet coupling mechanism 50 includes an annular inner peripheral magnet 51 fixed around the rotating shaft 210 and an annular outer peripheral magnet 52 fixed around the drive shaft 350, and these magnets 51, 52.
- the rotary shaft 210 and the drive shaft 350 are connected to each other by the magnetic coupling between the two.
- the inner peripheral side magnet 51 is disposed on the outer peripheral portion of the support member 53 fixed to the tip of the rotating shaft 210, and the outer peripheral side magnet 52 is disposed on the inner peripheral portion of the support member 54 fixed to the drive shaft 350. Yes.
- the inner circumference side magnet 51 and the outer circumference side magnet 52 are opposed to each other via the partition member 55.
- the peripheral edge portion of the partition member 55 is airtightly fixed to an annular convex portion 30 a formed on the inner peripheral surface of the second casing 30.
- the motor chamber 33 in which the inner peripheral side magnet 51 is disposed and the atmospheric chamber 34 in which the outer peripheral side magnet 52 is disposed are separated by a partition member 55.
- the rotation transmission unit 4 includes a third casing 40 that is airtightly attached to the partition wall 25, and the gear chamber 43 is formed inside the third casing 40.
- a bearing 45 and a shaft seal 46 that rotatably support the rotating shafts 210 and 220 are respectively installed on the side of the partition wall 25 facing the gear chamber 43.
- the third casing 40 forms a gear chamber 43 that houses a gear mechanism that synchronously rotates the rotors 21 and 22 in opposite directions.
- the gear mechanism has a synchronous gear 41 fixed to the end of the rotating shaft 210 and a synchronous gear 42 fixed to the end of the rotating shaft 220.
- lubricating oil G for lubricating the gear mechanism is stored in the gear chamber 43.
- a plate 47 for scooping up the lubricating oil G is fixed to the tips of the synchronous gears 41 and 42, and the lubricating oil G is supplied to the synchronous gears 41 and 42, the bearing 45 and the like by rotating together with the synchronous gears 41 and 42. .
- the third casing 40 is provided with a window 44 for confirming the amount of lubricating oil G stored in the gear chamber 43.
- the gear chamber 43 is provided with a shield 48 in order to suppress scattering of the lubricating oil G due to rotation of the synchronous gears 41 and 42.
- the shield 48 has a substantially flat plate shape attached to the partition wall 25 so as to cover the upper portions of the synchronous gears 41 and 42.
- the gear chamber 43 communicates with the motor chamber 33 via the second deaeration passage P2. Thereby, the gear chamber 43 can be deaerated through the second deaeration passage P ⁇ b> 2, and is equalized with the pressures of the motor chamber 33 and the pump chamber 23 when the vacuum pump 1 is operated.
- the second deaeration passage P2 connects the gear chamber 43 to the motor chamber 33 via the third casing 40, the partition wall 25, the first casing 20, and the partition wall 24.
- the second degassing passage P2 is mainly formed by the main passage portion P21 penetrating the first casing 20, the partition walls 24 and 25 in the Y-axis direction, and the communication passage portion P22 formed in the third casing 40.
- the first vacuum pump 1 further includes a controller 60.
- the controller 60 includes a detection unit 61 that detects the load torque of the drive motor 35 and a rotation control unit 62 that controls the rotation speed of the drive motor 35.
- the controller 60 is typically configured by a computer including a calculation unit, a memory, and the like.
- the controller 60 may be integrated with the drive unit 3.
- the detecting unit 61 detects the load torque of the drive motor 35 that rotates the rotor 21 via the magnet coupling mechanism 50.
- the detection method of load torque is not specifically limited, A well-known method is employable.
- the load torque of the drive motor 35 can be detected by measuring the voltage across the detection coil connected in series to the excitation coil wound around the stator of the drive motor 35.
- the rotation control unit 62 controls the rotation speed of the drive motor 35.
- the rotational speed control method is not particularly limited, and typically, the rotational speed is controlled by controlling the induced electromotive force of the motor.
- the rotation control unit 62 includes an inverter.
- the type of the inverter is not particularly limited, and, for example, PWM (pulse width modulation method) is adopted.
- the controller 60 controls the rotational speed of the drive motor 35 based on the output of the detection unit 61. That is, the controller 60 increases the rotational speed of the drive motor 35 when the load torque of the drive motor 35 is equal to or less than the second threshold value (Th2) that is smaller than the first threshold value (Th1). The controller 60 reduces the rotational speed of the drive motor 35 when the load torque of the drive motor 35 exceeds the second threshold value (Th2) and is equal to or less than the first threshold value (Th1).
- the first threshold value (Th1) refers to the maximum drive torque of the drive motor 35 that can rotate the rotor 21 without causing the magnet coupling mechanism 50 to step out.
- the step-out of the magnet coupling mechanism 50 means that the magnetic coupling between the inner peripheral side magnet 51 and the outer peripheral side magnet 52 is released, and the drive shaft 350 of the drive motor 35 and the rotary shaft 210 of the rotor 21 are connected. This refers to the state in which synchronous rotation is not possible.
- the first threshold (Th1) includes the magnetic coupling force of the magnet coupling mechanism 50, the displacement [Pa / m 3 / s] of the first vacuum pump 1, and the displacement [Pa / m of the second vacuum pump 11]. 3 / s], and the operating pressure of the first vacuum pump 1 is taken into consideration. That is, the load torque (step-out torque) at which step-out occurs varies depending on the number of rotations of the motor, the back pressure of the pump (pressure on the exhaust port side), and the like. Therefore, the first threshold (Th1 ) Is set. In the present embodiment, the first threshold (Th1) is 0.8 N ⁇ m.
- the second threshold (Th2) is set to an appropriate value smaller than the first threshold (Th1).
- the controller 60 increases the rotation speed of the drive motor 35, and the load torque exceeds the second threshold value (Th2), and the first threshold value.
- the number of rotations of the drive motor 35 is decreased in the following cases. That is, in the present embodiment, the magnetic coupling mechanism 50 is reliably prevented from being stepped out by reducing the rotational speed of the drive motor 35 based on the second threshold value (Th2) smaller than the first threshold value (Th1). In addition, stable exhaust operation is realized.
- the second threshold (Th2) can be set as appropriate. In the present embodiment, the second threshold (Th2) is 0.55 N ⁇ m.
- the second threshold value (Th2) can be the rated torque of the drive motor 35. As a result, the drive motor 35 can be driven efficiently, and power consumption can be reduced.
- the second threshold value (Th2) is not limited to the case where it is set to the same value as the rated torque of the drive motor 35. For example, considering the fluctuation of the load torque at the rated rotational speed, the second threshold value (Th2) is slightly higher than the rated torque. It may be set to a large value.
- the controller 60 also sets the drive motor 35 in a free-run state when the load torque of the drive motor 35 exceeds the first threshold (Th1).
- Th1 the first threshold
- the load torque of the drive motor exceeds the first threshold
- the excitation of the drive motor is cut off and the free-running state of rotating with inertia is set. Thereby, the step-out state of the magnet coupling can be eliminated at an early stage.
- the interior of chamber C is at atmospheric pressure, and vacuum valve V is open. In this state, the first vacuum pump 1 and the second vacuum pump 11 are driven simultaneously.
- the rotation of the rotary shaft 210 together with the drive shaft 350 through the magnet coupling mechanism 50 by the operation of the motor 35 causes the rotor 21 to rotate in the pump chamber 23. Further, the rotational force of the rotating shaft 210 is transmitted to the rotating shaft 220 of the rotor 22 in the rotation transmitting unit 4, whereby the rotor 22 rotates in the direction opposite to the rotor 21 in synchronization with the rotor 21.
- the pump unit 2 performs a predetermined pumping action for discharging the gas sucked from the intake port 201 toward the exhaust port 202.
- the controller 60 rotates the drive motor 35 with a rotational torque equal to or less than the first threshold (Th1), and transmits the rotational force to the rotor 21 via the magnet coupling mechanism 50.
- the first threshold value (Th1) corresponds to a rotational torque that can rotate the drive motor 35 and the rotor 21 synchronously without the magnet coupling mechanism 50 stepping out.
- the motor chamber 33 and the gear chamber 43 are depressurized through the first and second deaeration passages P1 and P2 as the pressure in the pump chamber 23 decreases. As a result, the differential pressure between the pump chamber 23 and the motor chamber 33 and the gear chamber 43 adjacent to the pump chamber 23 is reduced, so that a decrease in pump performance due to leakage of the pump chamber 23 is prevented.
- the second vacuum pump 11 is always driven when the first vacuum pump 1 is driven.
- the second vacuum pump 11 exhausts the back pressure of the first vacuum pump 1, that is, the gas transferred to the exhaust port 202.
- the first vacuum pump 1 exhausts the chamber C under atmospheric pressure. For this reason, the exhaust port 202 of the first vacuum pump 1 can reach a pressure higher than atmospheric pressure. At this time, the gas in the pump chamber 23 flows backward to the motor chamber 33. However, because the partition member 55 of the magnet coupling mechanism 50 hermetically partitions the motor chamber 33 side and the drive motor 35 side. Thus, the lubricating oil does not flow out to the drive motor 35 side, and therefore leakage of the lubricating oil to the outside of the pump is prevented.
- the controller 60 controls the rotation speed of the drive motor 35 as follows.
- FIG. 4 is a control flow of the drive motor 35 by the controller 60.
- FIG. 5 is a timing chart showing an example of the change over time in the load torque and the rotational speed of the drive motor 35.
- Controller 60 measures the load torque of drive motor 35 based on the output of detector 61 (step 1).
- the controller 60 executes acceleration control of the drive motor 35, that is, rotation speed increase control ( Steps 2, 3, 4).
- the third threshold value (Th3) is smaller than the second threshold value (Th2) and corresponds to a value larger than the load torque detected when the magnet coupling mechanism 50 steps out.
- the value of the third threshold (Th3) is not particularly limited, and is, for example, 0.13 N ⁇ m.
- the increase control of the rotational speed is executed, thereby preventing the magnet coupling mechanism 50 from stepping out.
- the displacement of one vacuum pump 1 can be increased.
- the rotational speed of the drive motor 35 is controlled in the range of 0 to 3500 rpm.
- sections D1 and D2 correspond to a period from when the drive motor 35 starts to reach the maximum number of rotations. At this time, since the load torque of the drive motor 35 has not reached the second threshold value (Th2), the drive motor 35 is driven at the maximum rotational speed.
- the second vacuum pump 11 since the second vacuum pump 11 has a smaller displacement than the first vacuum pump 1, the back pressure of the first vacuum pump 1 gradually increases, and the load torque of the drive motor 35 also increases accordingly. To do.
- the load torque of the drive motor 35 exceeds the second threshold value (Th2) and is equal to or less than the first threshold value (Th1), control for reducing the rotational speed of the drive motor 35 is executed (steps 2 and 5). , 6 and section D3).
- the exhaust operation by the rotation of the rotor 21 can be stably continued while preventing the magnet coupling mechanism 50 from stepping out.
- the controller 60 determines that the load is overloaded, notifies an error signal if necessary, and stops the drive motor 35 (step 8). .
- the controller 60 executes the rotational speed increase control again (steps 2 to 4, section D4). Thereafter, the same control as described above is executed, whereby the chamber 1 is evacuated by the first and second vacuum pumps 1 and 11 (sections D5 and D6).
- Section D7 shows a period in which step-out occurs in the magnet coupling mechanism 50 during the rotational speed reduction control of the drive motor 35.
- the controller 60 determines that a step-out has occurred when the load torque of the drive motor 35 is equal to or less than the third threshold (Th3), stops supplying power to the drive motor 35, and sets the drive shaft 350 in a free-running state. (Steps 3 and 7). Thereby, the step-out state of the magnet coupling mechanism 50 is eliminated at an early stage. After that, by executing the rotation speed increase control of the drive motor 35 again, the exhaust operation of the chamber 1 is resumed. After the chamber C reaches the target pressure, the controller 60 continues to drive the drive motor 35 so that the pressure in the chamber C maintains the target pressure. When stopping the operation of the pump, the controller 60 stops the supply of power to the drive motor 35 (section D8).
- the exhaust operation is continued while preventing the step-out of the magnet coupling mechanism 50. Can do.
- the chamber C can reach the target pressure at an early stage. Further, the chamber C can be evacuated from the atmospheric pressure to the target pressure by the first vacuum pump 1.
- FIG. 6 is a measurement result showing the change in the rotational speed of the drive motor 35 from the start of the start of the first vacuum pump 1 until the target pressure is reached.
- the time change of the pressure (P1) of the inlet 201 and the pressure (P2) of the outlet 202 is also shown.
- a vacuum chamber C having an internal volume of 20 L was used.
- a stable exhaust operation can be realized without causing the magnetic coupling mechanism 50 to step out.
- the first to third thresholds are set for the load torque of the drive motor 35 when controlling the rotation speed of the drive motor 35 in the first vacuum pump 1.
- the number of thresholds and the number of threshold values to be set are not limited to the above example, and can be changed as appropriate.
- the mechanical booster pump is used as the first vacuum pump 1, but the present invention is not limited to this, and the present invention can also be applied to other dry vacuum pumps such as a multistage roots pump and a scroll pump. .
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
上記ポンプ部は、吸気口と排気口とを有するポンプ室と、上記ポンプ室に配置され、上記吸気口から上記排気口へ気体を移送するロータとを含む。
上記駆動部は、上記ポンプ室に隣接するモータ室と、上記モータ室に配置され上記ロータを回転させる駆動モータとを含む。
上記マグネットカップリングは、仕切り部材と、第1の磁石と、第2の磁石とを含む。上記仕切り部材は、上記ポンプ室と上記モータ室とを気密に区画する。上記第1の磁石は、上記ロータに取り付けられる。上記第2の磁石は、上記駆動モータに取り付けられ、上記仕切り部材を介して上記第1の磁石と磁気的に結合する。上記マグネットカップリングは、上記駆動モータの回転力を上記ロータへ第1の閾値以下の回転トルクで伝達するように構成される。
上記コントローラは、検出部と、回転制御部とを含む。上記検出部は、上記駆動モータの負荷トルクを検出する。上記回転制御部は、上記駆動モータの回転数を制御する。上記コントローラは、上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは上記駆動モータの回転数を増加させ、上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは上記駆動モータの回転数を減少させる。
上記第1の真空ポンプは、ポンプ室と、ロータと、駆動モータと、マグネットカップリングとを含む。上記ポンプ室は、吸気口及び排気口を有する。上記ロータは、上記ポンプ室内に配置され上記吸気口から上記排気口へ気体を移送する。上記マグネットカップリングは、上記駆動モータの回転力を上記ロータへ第1の閾値以下の回転トルクで伝達するように構成される。
上記第2の真空ポンプは、上記排気口に移送された気体を排気する。
上記コントローラは、検出部と、回転制御部とを含む。上記検出部は、上記駆動モータの負荷トルクを検出する。上記回転制御部は、上記駆動モータの回転数を制御する。上記コントローラは、上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは上記駆動モータの回転数を増加させ、上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは上記駆動モータの回転数を減少させる。
上記運転方法は、上記モータの負荷トルクを検出することを含む。
上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは、上記駆動モータの回転数が増加させられる。
上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは、上記駆動モータの回転数が減少させられる。
上記ポンプ部は、吸気口と排気口とを有するポンプ室と、上記ポンプ室に配置され、上記吸気口から上記排気口へ気体を移送するロータとを含む。
上記駆動部は、上記ポンプ室に隣接するモータ室と、上記モータ室に配置され上記ロータを回転させる駆動モータとを含む。
上記マグネットカップリングは、仕切り部材と、第1の磁石と、第2の磁石とを含む。上記仕切り部材は、上記ポンプ室と上記モータ室とを気密に区画する。上記第1の磁石は、上記ロータに取り付けられる。上記第2の磁石は、上記駆動モータに取り付けられ、上記仕切り部材を介して上記第1の磁石と磁気的に結合する。上記マグネットカップリングは、上記駆動モータの回転力を上記ロータへ第1の閾値以下の回転トルクで伝達するように構成される。
上記コントローラは、検出部と、回転制御部とを含む。上記検出部は、上記駆動モータの負荷トルクを検出する。上記回転制御部は、上記駆動モータの回転数を制御する。上記コントローラは、上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは上記駆動モータの回転数を増加させ、上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは上記駆動モータの回転数を減少させる。
検出された負荷トルクが第1の閾値を超えたとき、マグネットカップリングは脱調する可能性が高い。そこで上記真空ポンプにおいては、駆動モータの負荷トルクが第1の閾値を超えたときは、駆動モータの励磁を遮断し惰性で回転させるフリーランの状態とする。これによりマグネットカップリングの脱調状態を早期に解消することができる。
上記第1の真空ポンプは、ポンプ室と、ロータと、駆動モータと、マグネットカップリングとを含む。上記ポンプ室は、吸気口及び排気口を有する。上記ロータは、上記ポンプ室内に配置され上記吸気口から上記排気口へ気体を移送する。上記マグネットカップリングは、上記駆動モータの回転力を上記ロータへ第1の閾値以下の回転トルクで伝達するように構成される。
上記第2の真空ポンプは、上記排気口に移送された気体を排気する。
上記コントローラは、検出部と、回転制御部とを含む。上記検出部は、上記駆動モータの負荷トルクを検出する。上記回転制御部は、上記駆動モータの回転数を制御する。上記コントローラは、上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは上記駆動モータの回転数を増加させ、上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは上記駆動モータの回転数を減少させる。
上記運転方法は、上記モータの負荷トルクを検出することを含む。
上記負荷トルクが上記第1の閾値よりも小さい第2の閾値以下のときは、上記駆動モータの回転数が増加させられる。
上記負荷トルクが上記第2の閾値を超え上記第1の閾値以下のときは、上記駆動モータの回転数が減少させられる。
2…ポンプ部
3…駆動部
10…真空排気装置
11…第2の真空ポンプ
21,22…ロータ
23…ポンプ室
35…駆動モータ
50…マグネットカップリング機構
51…内周側磁石
52…外周側磁石
55…仕切り部材
60…コントローラ
61…検出部
62…回転制御部
201…吸気口
202…排気口
Claims (5)
- 吸気口と排気口とを有するポンプ室と、前記ポンプ室に配置され前記吸気口から前記排気口へ気体を移送するロータとを含むポンプ部と、
前記ポンプ室に隣接するモータ室と、前記モータ室に配置され前記ロータを回転させる駆動モータとを含む駆動部と、
前記ポンプ室とモータ室とを気密に区画する仕切り部材と、前記ロータに取り付けられた第1の磁石と、前記駆動モータに取り付けられ前記仕切り部材を介して前記第1の磁石と磁気的に結合する第2の磁石とを含み、前記駆動モータの回転力を前記ロータへ第1の閾値以下の回転トルクで伝達するように構成されたマグネットカップリングと、
前記駆動モータの負荷トルクを検出する検出部と、前記駆動モータの回転数を制御する回転制御部とを含み、前記負荷トルクが前記第1の閾値よりも小さい第2の閾値以下のときは前記駆動モータの回転数を増加させ、前記負荷トルクが前記第2の閾値を超え前記第1の閾値以下のときは前記駆動モータの回転数を減少させるコントローラと
を具備する真空ポンプ。 - 請求項1に記載の真空ポンプであって、
前記コントローラは、前記負荷トルクが前記第1の閾値を超えたときは前記駆動モータをフリーランの状態とする
真空ポンプ。 - 請求項1又は請求項2に記載の真空ポンプであって、
前記第2の閾値は、前記駆動モータの定格トルクである
真空ポンプ。 - 吸気口及び排気口を有するポンプ室と、前記ポンプ室内に配置され前記吸気口から前記排気口へ気体を移送するロータと、駆動モータと、前記駆動モータの回転力を前記ロータへ第1の閾値以下の回転トルクで伝達するように構成されたマグネットカップリングとを含む第1の真空ポンプと、
前記排気口に移送された気体を排気する第2の真空ポンプと、
前記駆動モータの負荷トルクを検出する検出部と、前記駆動モータの回転数を制御する回転制御部とを含み、前記負荷トルクが前記第1の閾値よりも小さい第2の閾値以下のときは前記駆動モータの回転数を増加させ、前記負荷トルクが前記第2の閾値を超え前記第1の閾値以下のときは前記駆動モータの回転数を減少させるコントローラと
を具備する真空排気装置。 - ロータと、駆動モータと、前記駆動モータの回転力を前記ロータへ第1の閾値以下の回転トルクで伝達するように構成されたマグネットカップリングとを含む真空ポンプの運転方法であって、
前記モータの負荷トルクを検出し、
前記負荷トルクが前記第1の閾値よりも小さい第2の閾値以下のときは前記駆動モータの回転数を増加させ、前記負荷トルクが前記第2の閾値を超え前記第1の閾値以下のときは前記駆動モータの回転数を減少させる
真空ポンプの運転方法。
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JP2013504543A JP5684894B2 (ja) | 2011-03-11 | 2012-03-02 | 真空ポンプ、真空排気装置及び真空ポンプの運転方法 |
US14/002,308 US20130343912A1 (en) | 2011-03-11 | 2012-03-02 | Vacuum pump, vacuum exhaust device, and method of operating vacuum pump |
KR1020137021527A KR101548842B1 (ko) | 2011-03-11 | 2012-03-02 | 진공 펌프, 진공 배기 장치 및 진공 펌프의 운전 방법 |
DE112012001192.9T DE112012001192B4 (de) | 2011-03-11 | 2012-03-02 | Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe |
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US20130343912A1 (en) | 2013-12-26 |
JPWO2012124277A1 (ja) | 2014-07-17 |
KR101548842B1 (ko) | 2015-08-31 |
DE112012001192T5 (de) | 2013-12-19 |
TWI516677B (zh) | 2016-01-11 |
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