WO2012093777A3 - 퀵-릴리즈 진공펌프 - Google Patents

퀵-릴리즈 진공펌프 Download PDF

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Publication number
WO2012093777A3
WO2012093777A3 PCT/KR2011/009410 KR2011009410W WO2012093777A3 WO 2012093777 A3 WO2012093777 A3 WO 2012093777A3 KR 2011009410 W KR2011009410 W KR 2011009410W WO 2012093777 A3 WO2012093777 A3 WO 2012093777A3
Authority
WO
WIPO (PCT)
Prior art keywords
release
filter material
vacuum pump
supporting pipe
upper side
Prior art date
Application number
PCT/KR2011/009410
Other languages
English (en)
French (fr)
Other versions
WO2012093777A2 (ko
Inventor
조호영
Original Assignee
한국뉴매틱 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국뉴매틱 주식회사 filed Critical 한국뉴매틱 주식회사
Priority to JP2013547298A priority Critical patent/JP5716982B2/ja
Priority to BR112013017075-1A priority patent/BR112013017075A2/pt
Priority to CN201180063768.8A priority patent/CN103270314B/zh
Priority to EP11854868.4A priority patent/EP2662574B1/en
Priority to US13/978,068 priority patent/US20130291966A1/en
Publication of WO2012093777A2 publication Critical patent/WO2012093777A2/ko
Publication of WO2012093777A3 publication Critical patent/WO2012093777A3/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/794—With means for separating solid material from the fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

본 발명은 장치에 의하여 형성된 진공 및 부압이 신속하게 해제될 수 있도록 설계된 퀵 릴리즈 진공펌프에 관한 것이다. 본 발명의 진공펌프는 펌프부 이외에 릴리즈부와 필터재료를 포함하여 구성된다. 상기 릴리즈부는 케이싱 흡입구의 상측에 형성된 지지관, 공기압으로 상하 유동하여 상기 지지관의 상측을 개폐하는 스커트형 첵 밸브, 상기 유입구에 연통하여 밸브 스커트를 지나는 통로 말단에 형성되는 압력챔버를 포함한다. 그리고, 상기 필터재료는 상기 흡입구와 지지관의 사이에 배치된다. 상기 필터재료는 펌프동작시 흡입되는 배기공기를 상측으로 통과시켜 여과하고, 펌프정지시 지지관을 경유하여 하측으로 통과하는 압력공기에 의해 청소된다. 본 발명에 따르면, 진공펌프가 전자적 메카니즘에 의존하는 종래의 설계에 비하여 단순하게 설계 및 구현될 수 있으며, 특히 진공의 해제가 신속하게 이루어지는 효과가 있다. 또한 따라서 별도로 청소하지 않아도 필터재료의 청소가 적적하게 이루어지는 효과가 있다.
PCT/KR2011/009410 2011-01-03 2011-12-07 퀵-릴리즈 진공펌프 WO2012093777A2 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013547298A JP5716982B2 (ja) 2011-01-03 2011-12-07 クィックリリース真空ポンプ
BR112013017075-1A BR112013017075A2 (pt) 2011-01-03 2011-12-07 bomba a vácuo de rápida liberação
CN201180063768.8A CN103270314B (zh) 2011-01-03 2011-12-07 快速释放真空泵
EP11854868.4A EP2662574B1 (en) 2011-01-03 2011-12-07 Quick-release vacuum pump
US13/978,068 US20130291966A1 (en) 2011-01-03 2011-12-07 Quick-release vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0000081 2011-01-03
KR1020110000081A KR101029967B1 (ko) 2011-01-03 2011-01-03 퀵-릴리즈 진공펌프

Publications (2)

Publication Number Publication Date
WO2012093777A2 WO2012093777A2 (ko) 2012-07-12
WO2012093777A3 true WO2012093777A3 (ko) 2012-09-07

Family

ID=44050288

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009410 WO2012093777A2 (ko) 2011-01-03 2011-12-07 퀵-릴리즈 진공펌프

Country Status (7)

Country Link
US (1) US20130291966A1 (ko)
EP (1) EP2662574B1 (ko)
JP (1) JP5716982B2 (ko)
KR (1) KR101029967B1 (ko)
CN (1) CN103270314B (ko)
BR (1) BR112013017075A2 (ko)
WO (1) WO2012093777A2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101424959B1 (ko) 2014-04-08 2014-08-01 한국뉴매틱(주) 진공펌프
CN108273805B (zh) * 2018-04-09 2023-05-26 上汽大众汽车有限公司 涵道式真空发生器及其真空管体
CN113217346B (zh) * 2021-05-08 2023-04-25 武安市永盛机械泵业有限公司 一种用于化工生产的真空泵
CN114623378A (zh) * 2022-01-21 2022-06-14 北京国科环宇科技股份有限公司 真空容器抽真空的方法

Citations (4)

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Publication number Priority date Publication date Assignee Title
KR950005444Y1 (ko) * 1987-05-30 1995-07-10 가부시끼가이샤 묘오도꾸 진공발생장치
KR20030037280A (ko) * 2001-11-01 2003-05-14 한국뉴매틱(주) 진공이송 시스템용 부압 발생/해제 장치
JP2006342765A (ja) * 2005-06-10 2006-12-21 Smc Corp 真空ユニット及び真空ユニットに用いられるフィルタの製造方法
JP2009097403A (ja) * 2007-10-16 2009-05-07 Juki Corp 真空発生装置

Family Cites Families (15)

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US1606803A (en) * 1925-02-18 1926-11-16 Lalor Fuel Oil System Company Pressure-regulating device
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950005444Y1 (ko) * 1987-05-30 1995-07-10 가부시끼가이샤 묘오도꾸 진공발생장치
KR20030037280A (ko) * 2001-11-01 2003-05-14 한국뉴매틱(주) 진공이송 시스템용 부압 발생/해제 장치
JP2006342765A (ja) * 2005-06-10 2006-12-21 Smc Corp 真空ユニット及び真空ユニットに用いられるフィルタの製造方法
JP2009097403A (ja) * 2007-10-16 2009-05-07 Juki Corp 真空発生装置

Also Published As

Publication number Publication date
EP2662574B1 (en) 2017-11-22
EP2662574A2 (en) 2013-11-13
CN103270314A (zh) 2013-08-28
WO2012093777A2 (ko) 2012-07-12
JP5716982B2 (ja) 2015-05-13
KR101029967B1 (ko) 2011-04-19
EP2662574A4 (en) 2016-12-28
BR112013017075A2 (pt) 2020-11-03
CN103270314B (zh) 2015-10-14
US20130291966A1 (en) 2013-11-07
JP2014504693A (ja) 2014-02-24

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