WO2012091406A3 - 배기 유체 처리 장치 - Google Patents

배기 유체 처리 장치 Download PDF

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Publication number
WO2012091406A3
WO2012091406A3 PCT/KR2011/010150 KR2011010150W WO2012091406A3 WO 2012091406 A3 WO2012091406 A3 WO 2012091406A3 KR 2011010150 W KR2011010150 W KR 2011010150W WO 2012091406 A3 WO2012091406 A3 WO 2012091406A3
Authority
WO
WIPO (PCT)
Prior art keywords
process chamber
fluid
pipe
plasma
processing exhaust
Prior art date
Application number
PCT/KR2011/010150
Other languages
English (en)
French (fr)
Other versions
WO2012091406A2 (ko
Inventor
이상윤
노명근
오흥식
Original Assignee
(주)엘오티베큠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)엘오티베큠 filed Critical (주)엘오티베큠
Priority to EP11852372.9A priority Critical patent/EP2659946B1/en
Priority to US13/976,328 priority patent/US9494065B2/en
Priority to CN201180063273.5A priority patent/CN104220145B/zh
Priority to JP2013547330A priority patent/JP2014508029A/ja
Publication of WO2012091406A2 publication Critical patent/WO2012091406A2/ko
Publication of WO2012091406A3 publication Critical patent/WO2012091406A3/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/202—Single element halogens
    • B01D2257/2025—Chlorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/202—Single element halogens
    • B01D2257/2027—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • General Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

본 발명은 반도체, 디스플레이 패널 및 태양광 전지 제조 장치의 공정 챔버에서 발생한 유체를 외부로 배기하는 배기 유체 처리 장치에 관한 것으로서, 상기 배기 유체 처리 장치는 상기 공정 챔버에 연결되어 상기 공정 챔버의 내부를 진공화하고, 상기 공정 챔버 내에서 발생한 유체를 외부로 배기하는 진공 펌프 및 플라즈마가 형성되어 상기 공정 챔버 내에서 발생한 유체의 분해 반응이 일어나는 플라즈마 반응기를 포함하며, 상기 플라즈마 반응기는 상기 공정 챔버와 상기 진공 펌프 사이에 마련되며, 상기 유체의 분해 반응이 일어나는 공간을 제공하는 절연성의 도관과, 상기 도관의 외주면에 마련되며, 플라즈마가 형성되도록 전압을 인가받는 적어도 하나 이상의 전극부와, 전기 전도성의 탄성체로 형성되고, 상기 도관 및 상기 전극부의 밀착시키도록 상기 내관과 상기 전극부 사이에 개재되는 완충부를 포함하여 구성된다.
PCT/KR2011/010150 2010-12-27 2011-12-27 배기 유체 처리 장치 WO2012091406A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP11852372.9A EP2659946B1 (en) 2010-12-27 2011-12-27 Apparatus for processing exhaust fluid
US13/976,328 US9494065B2 (en) 2010-12-27 2011-12-27 Apparatus for processing exhaust fluid
CN201180063273.5A CN104220145B (zh) 2010-12-27 2011-12-27 用于处理排放流体的装置
JP2013547330A JP2014508029A (ja) 2010-12-27 2011-12-27 排気流体処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100135260A KR101230513B1 (ko) 2010-12-27 2010-12-27 배기 유체 처리 장치
KR10-2010-0135260 2010-12-27

Publications (2)

Publication Number Publication Date
WO2012091406A2 WO2012091406A2 (ko) 2012-07-05
WO2012091406A3 true WO2012091406A3 (ko) 2012-08-23

Family

ID=46383683

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/010150 WO2012091406A2 (ko) 2010-12-27 2011-12-27 배기 유체 처리 장치

Country Status (6)

Country Link
US (1) US9494065B2 (ko)
EP (1) EP2659946B1 (ko)
JP (1) JP2014508029A (ko)
KR (1) KR101230513B1 (ko)
CN (1) CN104220145B (ko)
WO (1) WO2012091406A2 (ko)

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* Cited by examiner, † Cited by third party
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KR101453860B1 (ko) * 2013-05-31 2014-10-22 한국기계연구원 플라즈마 히터
WO2015160057A1 (ko) * 2014-04-16 2015-10-22 주식회사 클린팩터스 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기
CN106165062A (zh) * 2014-04-16 2016-11-23 清洁要素技术有限公司 处理制程设备发生的废气的等离子体反应器
KR101557880B1 (ko) * 2014-07-07 2015-10-13 (주)클린팩터스 배기유체 처리용 저압 플라즈마 반응장치
JP6371738B2 (ja) * 2015-05-28 2018-08-08 株式会社東芝 成膜装置
KR101732048B1 (ko) * 2015-07-07 2017-05-02 (주)클린팩터스 공정설비에서 발생되는 배기가스 처리 플라즈마 반응기
KR101926658B1 (ko) 2017-03-15 2018-12-07 이인철 반도체 챔버용 펌프 시스템
US20190078204A1 (en) * 2017-09-12 2019-03-14 Applied Materials, Inc. Tubular electrostatic device
KR101999646B1 (ko) 2018-11-15 2019-07-12 이인철 반도체 챔버용 펌프 시스템
KR102197144B1 (ko) * 2019-03-29 2021-01-05 유한회사 더프라임솔루션 아킹현상을 방지하는 저온 플라즈마 배출가스 입자상 물질 저감 장치
US11872524B2 (en) 2020-08-27 2024-01-16 Kioxia Corporation Exhaust pipe device
KR102376859B1 (ko) * 2020-09-28 2022-03-22 주식회사 플랜 반도체 제조 설비의 배기 유체 처리 시스템 및 방법

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JPH06178914A (ja) * 1992-12-14 1994-06-28 Mitsubishi Heavy Ind Ltd 排ガス処理装置
KR20060095594A (ko) * 2005-02-28 2006-09-01 엄환섭 반도체 세정 폐가스 제거를 위한 플라즈마 스크러버
KR20100027383A (ko) * 2008-09-02 2010-03-11 (주)트리플코어스코리아 저압 및 대기압 플라즈마를 이용한 폐가스 제거 시스템

Also Published As

Publication number Publication date
JP2014508029A (ja) 2014-04-03
WO2012091406A2 (ko) 2012-07-05
US9494065B2 (en) 2016-11-15
KR101230513B1 (ko) 2013-02-06
CN104220145A (zh) 2014-12-17
CN104220145B (zh) 2016-12-07
EP2659946A2 (en) 2013-11-06
EP2659946B1 (en) 2018-08-15
KR20120073482A (ko) 2012-07-05
US20140004009A1 (en) 2014-01-02
EP2659946A4 (en) 2014-09-17

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