WO2012090881A1 - 銅含有組成物、金属銅膜の製造方法、および金属銅膜 - Google Patents
銅含有組成物、金属銅膜の製造方法、および金属銅膜 Download PDFInfo
- Publication number
- WO2012090881A1 WO2012090881A1 PCT/JP2011/079925 JP2011079925W WO2012090881A1 WO 2012090881 A1 WO2012090881 A1 WO 2012090881A1 JP 2011079925 W JP2011079925 W JP 2011079925W WO 2012090881 A1 WO2012090881 A1 WO 2012090881A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- copper
- containing composition
- binder resin
- film according
- producing
- Prior art date
Links
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 229
- 239000010949 copper Substances 0.000 title claims abstract description 229
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 207
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 124
- 239000002184 metal Substances 0.000 title claims abstract description 122
- 239000000203 mixture Substances 0.000 title claims abstract description 92
- 238000004519 manufacturing process Methods 0.000 title claims description 45
- 238000000034 method Methods 0.000 title abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 69
- 239000011347 resin Substances 0.000 claims abstract description 69
- 239000011230 binding agent Substances 0.000 claims abstract description 61
- -1 copper inorganic compound Chemical class 0.000 claims abstract description 31
- 239000003054 catalyst Substances 0.000 claims abstract description 28
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 26
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 21
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 239000011261 inert gas Substances 0.000 claims abstract description 17
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 16
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims abstract description 10
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 claims description 26
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 26
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 15
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 15
- 239000001257 hydrogen Substances 0.000 claims description 15
- 229910052739 hydrogen Inorganic materials 0.000 claims description 15
- 239000003822 epoxy resin Substances 0.000 claims description 14
- 229920000647 polyepoxide Polymers 0.000 claims description 14
- LOYDTBZMMPQJNI-UHFFFAOYSA-N 3a-methyl-5,6-dihydro-4h-2-benzofuran-1,3-dione Chemical group C1CCC=C2C(=O)OC(=O)C21C LOYDTBZMMPQJNI-UHFFFAOYSA-N 0.000 claims description 12
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(i) oxide Chemical compound [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 11
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 10
- NQZFAUXPNWSLBI-UHFFFAOYSA-N carbon monoxide;ruthenium Chemical group [Ru].[Ru].[Ru].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] NQZFAUXPNWSLBI-UHFFFAOYSA-N 0.000 claims description 10
- 239000006254 rheological additive Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000004677 Nylon Substances 0.000 claims description 8
- 229920001778 nylon Polymers 0.000 claims description 8
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 claims description 7
- WJXDCSSGTLPZDK-UHFFFAOYSA-M butane-1-thiolate;copper(1+) Chemical group [Cu+].CCCC[S-] WJXDCSSGTLPZDK-UHFFFAOYSA-M 0.000 claims description 7
- 150000002431 hydrogen Chemical class 0.000 claims description 7
- 229920000728 polyester Polymers 0.000 claims description 7
- 239000005751 Copper oxide Substances 0.000 claims description 6
- 229910000431 copper oxide Inorganic materials 0.000 claims description 6
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 claims description 5
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 5
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 claims description 5
- 235000011187 glycerol Nutrition 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229920000166 polytrimethylene carbonate Polymers 0.000 claims description 5
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- GTCCGKPBSJZVRZ-UHFFFAOYSA-N pentane-2,4-diol Chemical compound CC(O)CC(C)O GTCCGKPBSJZVRZ-UHFFFAOYSA-N 0.000 claims description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 11
- 238000000576 coating method Methods 0.000 abstract description 11
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 238000000518 rheometry Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 13
- 239000002904 solvent Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 238000007650 screen-printing Methods 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 239000000047 product Substances 0.000 description 5
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 4
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 4
- VLKZOEOYAKHREP-UHFFFAOYSA-N hexane Substances CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000012299 nitrogen atmosphere Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 125000005595 acetylacetonate group Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- 150000004696 coordination complex Chemical class 0.000 description 3
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 description 3
- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 3
- BWHOZHOGCMHOBV-BQYQJAHWSA-N trans-benzylideneacetone Chemical compound CC(=O)\C=C\C1=CC=CC=C1 BWHOZHOGCMHOBV-BQYQJAHWSA-N 0.000 description 3
- RRKODOZNUZCUBN-CCAGOZQPSA-N (1z,3z)-cycloocta-1,3-diene Chemical compound C1CC\C=C/C=C\C1 RRKODOZNUZCUBN-CCAGOZQPSA-N 0.000 description 2
- DWANEFRJKWXRSG-UHFFFAOYSA-N 1,2-tetradecanediol Chemical compound CCCCCCCCCCCCC(O)CO DWANEFRJKWXRSG-UHFFFAOYSA-N 0.000 description 2
- YCFFJTFZRZQCTE-UHFFFAOYSA-N 1,3-bis(2,6-dimethylphenyl)-2h-imidazole Chemical compound CC1=CC=CC(C)=C1N1C=CN(C=2C(=CC=CC=2C)C)C1 YCFFJTFZRZQCTE-UHFFFAOYSA-N 0.000 description 2
- UNVGBIALRHLALK-UHFFFAOYSA-N 1,5-Hexanediol Chemical compound CC(O)CCCCO UNVGBIALRHLALK-UHFFFAOYSA-N 0.000 description 2
- XMVBHZBLHNOQON-UHFFFAOYSA-N 2-butyl-1-octanol Chemical compound CCCCCCC(CO)CCCC XMVBHZBLHNOQON-UHFFFAOYSA-N 0.000 description 2
- CETWDUZRCINIHU-UHFFFAOYSA-N 2-heptanol Chemical compound CCCCCC(C)O CETWDUZRCINIHU-UHFFFAOYSA-N 0.000 description 2
- NGDNVOAEIVQRFH-UHFFFAOYSA-N 2-nonanol Chemical compound CCCCCCCC(C)O NGDNVOAEIVQRFH-UHFFFAOYSA-N 0.000 description 2
- PRNCMAKCNVRZFX-UHFFFAOYSA-N 3,7-dimethyloctan-1-ol Chemical compound CC(C)CCCC(C)CCO PRNCMAKCNVRZFX-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- YVBCULSIZWMTFY-UHFFFAOYSA-N 4-Heptanol Natural products CCCC(O)CCC YVBCULSIZWMTFY-UHFFFAOYSA-N 0.000 description 2
- BWHOZHOGCMHOBV-UHFFFAOYSA-N Benzalacetone Natural products CC(=O)C=CC1=CC=CC=C1 BWHOZHOGCMHOBV-UHFFFAOYSA-N 0.000 description 2
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- RZKSECIXORKHQS-UHFFFAOYSA-N Heptan-3-ol Chemical compound CCCCC(O)CC RZKSECIXORKHQS-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- SESFRYSPDFLNCH-UHFFFAOYSA-N benzyl benzoate Chemical compound C=1C=CC=CC=1C(=O)OCC1=CC=CC=C1 SESFRYSPDFLNCH-UHFFFAOYSA-N 0.000 description 2
- BMRWNKZVCUKKSR-UHFFFAOYSA-N butane-1,2-diol Chemical compound CCC(O)CO BMRWNKZVCUKKSR-UHFFFAOYSA-N 0.000 description 2
- OWBTYPJTUOEWEK-UHFFFAOYSA-N butane-2,3-diol Chemical compound CC(O)C(C)O OWBTYPJTUOEWEK-UHFFFAOYSA-N 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- PMMYEEVYMWASQN-IMJSIDKUSA-N cis-4-Hydroxy-L-proline Chemical compound O[C@@H]1CN[C@H](C(O)=O)C1 PMMYEEVYMWASQN-IMJSIDKUSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PFURGBBHAOXLIO-UHFFFAOYSA-N cyclohexane-1,2-diol Chemical compound OC1CCCCC1O PFURGBBHAOXLIO-UHFFFAOYSA-N 0.000 description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 2
- GHLKSLMMWAKNBM-UHFFFAOYSA-N dodecane-1,12-diol Chemical compound OCCCCCCCCCCCCO GHLKSLMMWAKNBM-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- GOQYKNQRPGWPLP-UHFFFAOYSA-N heptadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 2
- FVDRFBGMOWJEOR-UHFFFAOYSA-N hexadecan-2-ol Chemical compound CCCCCCCCCCCCCCC(C)O FVDRFBGMOWJEOR-UHFFFAOYSA-N 0.000 description 2
- QNVRIHYSUZMSGM-UHFFFAOYSA-N hexan-2-ol Chemical compound CCCCC(C)O QNVRIHYSUZMSGM-UHFFFAOYSA-N 0.000 description 2
- ZOCHHNOQQHDWHG-UHFFFAOYSA-N hexan-3-ol Chemical compound CCCC(O)CC ZOCHHNOQQHDWHG-UHFFFAOYSA-N 0.000 description 2
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 2
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 2
- SJWFXCIHNDVPSH-UHFFFAOYSA-N octan-2-ol Chemical compound CCCCCCC(C)O SJWFXCIHNDVPSH-UHFFFAOYSA-N 0.000 description 2
- NMRPBPVERJPACX-UHFFFAOYSA-N octan-3-ol Chemical compound CCCCCC(O)CC NMRPBPVERJPACX-UHFFFAOYSA-N 0.000 description 2
- REIUXOLGHVXAEO-UHFFFAOYSA-N pentadecan-1-ol Chemical compound CCCCCCCCCCCCCCCO REIUXOLGHVXAEO-UHFFFAOYSA-N 0.000 description 2
- JYVLIDXNZAXMDK-UHFFFAOYSA-N pentan-2-ol Chemical compound CCCC(C)O JYVLIDXNZAXMDK-UHFFFAOYSA-N 0.000 description 2
- AQIXEPGDORPWBJ-UHFFFAOYSA-N pentan-3-ol Chemical compound CCC(O)CC AQIXEPGDORPWBJ-UHFFFAOYSA-N 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- HHVIBTZHLRERCL-UHFFFAOYSA-N sulfonyldimethane Chemical compound CS(C)(=O)=O HHVIBTZHLRERCL-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- HLZKNKRTKFSKGZ-UHFFFAOYSA-N tetradecan-1-ol Chemical compound CCCCCCCCCCCCCCO HLZKNKRTKFSKGZ-UHFFFAOYSA-N 0.000 description 2
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 2
- XFNJVJPLKCPIBV-UHFFFAOYSA-N trimethylenediamine Chemical compound NCCCN XFNJVJPLKCPIBV-UHFFFAOYSA-N 0.000 description 2
- JRTIUDXYIUKIIE-KZUMESAESA-N (1z,5z)-cycloocta-1,5-diene;nickel Chemical compound [Ni].C\1C\C=C/CC\C=C/1.C\1C\C=C/CC\C=C/1 JRTIUDXYIUKIIE-KZUMESAESA-N 0.000 description 1
- CHEANNSDVJOIBS-MHZLTWQESA-N (3s)-3-cyclopropyl-3-[3-[[3-(5,5-dimethylcyclopenten-1-yl)-4-(2-fluoro-5-methoxyphenyl)phenyl]methoxy]phenyl]propanoic acid Chemical compound COC1=CC=C(F)C(C=2C(=CC(COC=3C=C(C=CC=3)[C@@H](CC(O)=O)C3CC3)=CC=2)C=2C(CCC=2)(C)C)=C1 CHEANNSDVJOIBS-MHZLTWQESA-N 0.000 description 1
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical class C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- ZWVMLYRJXORSEP-UHFFFAOYSA-N 1,2,6-Hexanetriol Chemical compound OCCCCC(O)CO ZWVMLYRJXORSEP-UHFFFAOYSA-N 0.000 description 1
- 229940031723 1,2-octanediol Drugs 0.000 description 1
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- PLONOWACPBEYFD-UHFFFAOYSA-N 1,3-bis(1-adamantyl)-2h-imidazole Chemical compound C1C(C2)CC(C3)CC2CC13N1CN(C23CC4CC(CC(C4)C2)C3)C=C1 PLONOWACPBEYFD-UHFFFAOYSA-N 0.000 description 1
- SQOGLDRNSNINTE-UHFFFAOYSA-N 1,3-bis(1-adamantyl)imidazolidine Chemical compound C1C(C2)CC(C3)CC2CC13N1CCN(C23CC4CC(CC(C4)C2)C3)C1 SQOGLDRNSNINTE-UHFFFAOYSA-N 0.000 description 1
- RSTLYZXJMXWXEI-UHFFFAOYSA-N 1,3-bis(2,4,6-trimethylphenyl)-2h-imidazole Chemical compound CC1=CC(C)=CC(C)=C1N1C=CN(C=2C(=CC(C)=CC=2C)C)C1 RSTLYZXJMXWXEI-UHFFFAOYSA-N 0.000 description 1
- RUKVGXGTVPPWDD-UHFFFAOYSA-N 1,3-bis(2,4,6-trimethylphenyl)imidazolidine Chemical compound CC1=CC(C)=CC(C)=C1N1CN(C=2C(=CC(C)=CC=2C)C)CC1 RUKVGXGTVPPWDD-UHFFFAOYSA-N 0.000 description 1
- NJLYZISHBSABMZ-UHFFFAOYSA-N 1,3-bis[2,6-di(propan-2-yl)phenyl]-2h-imidazole Chemical compound CC(C)C1=CC=CC(C(C)C)=C1N1C=CN(C=2C(=CC=CC=2C(C)C)C(C)C)C1 NJLYZISHBSABMZ-UHFFFAOYSA-N 0.000 description 1
- UWINQFQLMRKGBB-UHFFFAOYSA-N 1,3-bis[2,6-di(propan-2-yl)phenyl]imidazolidine Chemical compound CC(C)C1=CC=CC(C(C)C)=C1N1CN(C=2C(=CC=CC=2C(C)C)C(C)C)CC1 UWINQFQLMRKGBB-UHFFFAOYSA-N 0.000 description 1
- QETIGSCIUUTYQY-UHFFFAOYSA-N 1,3-dicyclohexylimidazole Chemical compound [C]1N(C2CCCCC2)C=CN1C1CCCCC1 QETIGSCIUUTYQY-UHFFFAOYSA-N 0.000 description 1
- KVWRWYHVNAAYHJ-UHFFFAOYSA-N 1,3-dicyclohexylimidazolidine Chemical compound C1CN(C2CCCCC2)CN1C1CCCCC1 KVWRWYHVNAAYHJ-UHFFFAOYSA-N 0.000 description 1
- JSTDYZYCAHFIKS-UHFFFAOYSA-N 1,3-diphenylimidazole Chemical compound [CH]1N(C=2C=CC=CC=2)C=CN1C1=CC=CC=C1 JSTDYZYCAHFIKS-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- XFRVVPUIAFSTFO-UHFFFAOYSA-N 1-Tridecanol Chemical compound CCCCCCCCCCCCCO XFRVVPUIAFSTFO-UHFFFAOYSA-N 0.000 description 1
- XZKLXPPYISZJCV-UHFFFAOYSA-N 1-benzyl-2-phenylimidazole Chemical compound C1=CN=C(C=2C=CC=CC=2)N1CC1=CC=CC=C1 XZKLXPPYISZJCV-UHFFFAOYSA-N 0.000 description 1
- WAPNOHKVXSQRPX-UHFFFAOYSA-N 1-phenylethanol Chemical compound CC(O)C1=CC=CC=C1 WAPNOHKVXSQRPX-UHFFFAOYSA-N 0.000 description 1
- SEULWJSKCVACTH-UHFFFAOYSA-N 1-phenylimidazole Chemical compound C1=NC=CN1C1=CC=CC=C1 SEULWJSKCVACTH-UHFFFAOYSA-N 0.000 description 1
- ZEVWQFWTGHFIDH-UHFFFAOYSA-N 1h-imidazole-4,5-dicarboxylic acid Chemical compound OC(=O)C=1N=CNC=1C(O)=O ZEVWQFWTGHFIDH-UHFFFAOYSA-N 0.000 description 1
- JCTXKRPTIMZBJT-UHFFFAOYSA-N 2,2,4-trimethylpentane-1,3-diol Chemical compound CC(C)C(O)C(C)(C)CO JCTXKRPTIMZBJT-UHFFFAOYSA-N 0.000 description 1
- OJMJOSRCBAXSAQ-UHFFFAOYSA-N 2,2-dibutylpropane-1,3-diol Chemical compound CCCCC(CO)(CO)CCCC OJMJOSRCBAXSAQ-UHFFFAOYSA-N 0.000 description 1
- CGCVLTOGUMLHNP-UHFFFAOYSA-N 2,3-dimethylbutane-2,3-diamine Chemical compound CC(C)(N)C(C)(C)N CGCVLTOGUMLHNP-UHFFFAOYSA-N 0.000 description 1
- IIEGQVRKIRPFFP-UHFFFAOYSA-N 2,7-dimethyloctane-3,6-diol Chemical compound CC(C)C(O)CCC(O)C(C)C IIEGQVRKIRPFFP-UHFFFAOYSA-N 0.000 description 1
- KELMAQQLJLWUAY-UHFFFAOYSA-N 2-(2-hydroxyethyl)cyclohexan-1-ol Chemical compound OCCC1CCCCC1O KELMAQQLJLWUAY-UHFFFAOYSA-N 0.000 description 1
- ABFCOJLLBHXNOU-UHFFFAOYSA-N 2-(2-hydroxyphenyl)ethanol Chemical compound OCCC1=CC=CC=C1O ABFCOJLLBHXNOU-UHFFFAOYSA-N 0.000 description 1
- PBZREJKPWKGCSH-UHFFFAOYSA-N 2-(3-hydroxypropyl)cyclohexan-1-ol Chemical compound OCCCC1CCCCC1O PBZREJKPWKGCSH-UHFFFAOYSA-N 0.000 description 1
- ACUZDYFTRHEKOS-SNVBAGLBSA-N 2-Decanol Natural products CCCCCCCC[C@@H](C)O ACUZDYFTRHEKOS-SNVBAGLBSA-N 0.000 description 1
- QNVRIHYSUZMSGM-LURJTMIESA-N 2-Hexanol Natural products CCCC[C@H](C)O QNVRIHYSUZMSGM-LURJTMIESA-N 0.000 description 1
- LXZAAAUGPREPGR-UHFFFAOYSA-N 2-[2-(hydroxymethyl)phenyl]ethanol Chemical compound OCCC1=CC=CC=C1CO LXZAAAUGPREPGR-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 1
- BODRLKRKPXBDBN-UHFFFAOYSA-N 3,5,5-Trimethyl-1-hexanol Chemical compound OCCC(C)CC(C)(C)C BODRLKRKPXBDBN-UHFFFAOYSA-N 0.000 description 1
- DLHQZZUEERVIGQ-UHFFFAOYSA-N 3,7-dimethyl-3-octanol Chemical compound CCC(C)(O)CCCC(C)C DLHQZZUEERVIGQ-UHFFFAOYSA-N 0.000 description 1
- NMRPBPVERJPACX-QMMMGPOBSA-N 3-Octanol Natural products CCCCC[C@@H](O)CC NMRPBPVERJPACX-QMMMGPOBSA-N 0.000 description 1
- VCSQSPVHFDOWER-UHFFFAOYSA-N 3-[2-(hydroxymethyl)phenyl]propan-1-ol Chemical compound OCCCC1=CC=CC=C1CO VCSQSPVHFDOWER-UHFFFAOYSA-N 0.000 description 1
- AHHQDHCTHYTBSV-UHFFFAOYSA-N 3-methylpentane-1,3,5-triol Chemical compound OCCC(O)(C)CCO AHHQDHCTHYTBSV-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910021503 Cobalt(II) hydroxide Inorganic materials 0.000 description 1
- 229910021581 Cobalt(III) chloride Inorganic materials 0.000 description 1
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 description 1
- 239000005750 Copper hydroxide Substances 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- HXQPUEQDBSPXTE-UHFFFAOYSA-N Diisobutylcarbinol Chemical compound CC(C)CC(O)CC(C)C HXQPUEQDBSPXTE-UHFFFAOYSA-N 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000013032 Hydrocarbon resin Substances 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910021638 Iridium(III) chloride Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- 239000007868 Raney catalyst Substances 0.000 description 1
- 229910000564 Raney nickel Inorganic materials 0.000 description 1
- 229910021604 Rhodium(III) chloride Inorganic materials 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical compound C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
- XDODWINGEHBYRT-UHFFFAOYSA-N [2-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCCCC1CO XDODWINGEHBYRT-UHFFFAOYSA-N 0.000 description 1
- LUSFFPXRDZKBMF-UHFFFAOYSA-N [3-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCCC(CO)C1 LUSFFPXRDZKBMF-UHFFFAOYSA-N 0.000 description 1
- GDBWVOLVLPWLOY-UHFFFAOYSA-N [Rh].C1=CC=CCCCC1.C(C)#N Chemical compound [Rh].C1=CC=CCCCC1.C(C)#N GDBWVOLVLPWLOY-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- WFDIJRYMOXRFFG-UHFFFAOYSA-N acetic anhydride Substances CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 1
- WFDIJRYMOXRFFG-XPULMUKRSA-N acetyl acetate Chemical compound [14CH3]C(=O)OC([14CH3])=O WFDIJRYMOXRFFG-XPULMUKRSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229960002903 benzyl benzoate Drugs 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 229930188620 butyrolactone Natural products 0.000 description 1
- LVGLLYVYRZMJIN-UHFFFAOYSA-N carbon monoxide;rhodium Chemical group [Rh].[Rh].[Rh].[Rh].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] LVGLLYVYRZMJIN-UHFFFAOYSA-N 0.000 description 1
- SZQABOJVTZVBHE-UHFFFAOYSA-N carbon monoxide;rhodium Chemical group [Rh].[Rh].[Rh].[Rh].[Rh].[Rh].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] SZQABOJVTZVBHE-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KLDZYURQCUYZBL-KLCVKJMQSA-N chembl593165 Chemical compound OC1=CC=CC=C1\C=N\CCC\N=C\C1=CC=CC=C1O KLDZYURQCUYZBL-KLCVKJMQSA-N 0.000 description 1
- DRBUOMRBZPMETF-UHFFFAOYSA-N chlorobenzene;n,n-dimethylformamide Chemical compound CN(C)C=O.ClC1=CC=CC=C1 DRBUOMRBZPMETF-UHFFFAOYSA-N 0.000 description 1
- 229910021446 cobalt carbonate Inorganic materials 0.000 description 1
- UFMZWBIQTDUYBN-UHFFFAOYSA-N cobalt dinitrate Chemical class [Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O UFMZWBIQTDUYBN-UHFFFAOYSA-N 0.000 description 1
- ZOTKGJBKKKVBJZ-UHFFFAOYSA-L cobalt(2+);carbonate Chemical compound [Co+2].[O-]C([O-])=O ZOTKGJBKKKVBJZ-UHFFFAOYSA-L 0.000 description 1
- ASKVAEGIVYSGNY-UHFFFAOYSA-L cobalt(ii) hydroxide Chemical compound [OH-].[OH-].[Co+2] ASKVAEGIVYSGNY-UHFFFAOYSA-L 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 229940116318 copper carbonate Drugs 0.000 description 1
- 229910001956 copper hydroxide Inorganic materials 0.000 description 1
- RFKZUAOAYVHBOY-UHFFFAOYSA-M copper(1+);acetate Chemical compound [Cu+].CC([O-])=O RFKZUAOAYVHBOY-UHFFFAOYSA-M 0.000 description 1
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
- AYNQPTYHFBBKFC-UHFFFAOYSA-N copper;methanolate Chemical compound [Cu+2].[O-]C.[O-]C AYNQPTYHFBBKFC-UHFFFAOYSA-N 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 150000003950 cyclic amides Chemical class 0.000 description 1
- QCRFMSUKWRQZEM-UHFFFAOYSA-N cycloheptanol Chemical compound OC1CCCCCC1 QCRFMSUKWRQZEM-UHFFFAOYSA-N 0.000 description 1
- GZOYVTSTDWWHPD-UHFFFAOYSA-N cycloocta-1,5-diene;platinum Chemical compound [Pt].C1CC=CCCC=C1.C1CC=CCCC=C1 GZOYVTSTDWWHPD-UHFFFAOYSA-N 0.000 description 1
- FHADSMKORVFYOS-UHFFFAOYSA-N cyclooctanol Chemical compound OC1CCCCCCC1 FHADSMKORVFYOS-UHFFFAOYSA-N 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- XCIXKGXIYUWCLL-UHFFFAOYSA-N cyclopentanol Chemical compound OC1CCCC1 XCIXKGXIYUWCLL-UHFFFAOYSA-N 0.000 description 1
- ACUZDYFTRHEKOS-UHFFFAOYSA-N decan-2-ol Chemical compound CCCCCCCCC(C)O ACUZDYFTRHEKOS-UHFFFAOYSA-N 0.000 description 1
- FOTKYAAJKYLFFN-UHFFFAOYSA-N decane-1,10-diol Chemical compound OCCCCCCCCCCO FOTKYAAJKYLFFN-UHFFFAOYSA-N 0.000 description 1
- YSRSBDQINUMTIF-UHFFFAOYSA-N decane-1,2-diol Chemical compound CCCCCCCCC(O)CO YSRSBDQINUMTIF-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- XSWSEQPWKOWORN-UHFFFAOYSA-N dodecan-2-ol Chemical compound CCCCCCCCCCC(C)O XSWSEQPWKOWORN-UHFFFAOYSA-N 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920006228 ethylene acrylate copolymer Polymers 0.000 description 1
- 229920006242 ethylene acrylic acid copolymer Polymers 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 description 1
- 235000003891 ferrous sulphate Nutrition 0.000 description 1
- 239000011790 ferrous sulphate Substances 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- SXCBDZAEHILGLM-UHFFFAOYSA-N heptane-1,7-diol Chemical compound OCCCCCCCO SXCBDZAEHILGLM-UHFFFAOYSA-N 0.000 description 1
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 1
- GNOIPBMMFNIUFM-UHFFFAOYSA-N hexamethylphosphoric triamide Chemical compound CN(C)P(=O)(N(C)C)N(C)C GNOIPBMMFNIUFM-UHFFFAOYSA-N 0.000 description 1
- OHMBHFSEKCCCBW-UHFFFAOYSA-N hexane-2,5-diol Chemical compound CC(O)CCC(C)O OHMBHFSEKCCCBW-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229920006270 hydrocarbon resin Polymers 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229920002681 hypalon Polymers 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 1
- 229910000359 iron(II) sulfate Inorganic materials 0.000 description 1
- QQZOPKMRPOGIEB-UHFFFAOYSA-N n-butyl methyl ketone Natural products CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- BFDHFSHZJLFAMC-UHFFFAOYSA-L nickel(ii) hydroxide Chemical compound [OH-].[OH-].[Ni+2] BFDHFSHZJLFAMC-UHFFFAOYSA-L 0.000 description 1
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- WOFPPJOZXUTRAU-UHFFFAOYSA-N octan-4-ol Chemical compound CCCCC(O)CCC WOFPPJOZXUTRAU-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- AEIJTFQOBWATKX-UHFFFAOYSA-N octane-1,2-diol Chemical compound CCCCCCC(O)CO AEIJTFQOBWATKX-UHFFFAOYSA-N 0.000 description 1
- OEIJHBUUFURJLI-UHFFFAOYSA-N octane-1,8-diol Chemical compound OCCCCCCCCO OEIJHBUUFURJLI-UHFFFAOYSA-N 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical group [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 1
- 125000002097 pentamethylcyclopentadienyl group Chemical group 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000346 polystyrene-polyisoprene block-polystyrene Polymers 0.000 description 1
- 229920001289 polyvinyl ether Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical class [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- SVOOVMQUISJERI-UHFFFAOYSA-K rhodium(3+);triacetate Chemical compound [Rh+3].CC([O-])=O.CC([O-])=O.CC([O-])=O SVOOVMQUISJERI-UHFFFAOYSA-K 0.000 description 1
- VXNYVYJABGOSBX-UHFFFAOYSA-N rhodium(3+);trinitrate Chemical compound [Rh+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VXNYVYJABGOSBX-UHFFFAOYSA-N 0.000 description 1
- SONJTKJMTWTJCT-UHFFFAOYSA-K rhodium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Rh+3] SONJTKJMTWTJCT-UHFFFAOYSA-K 0.000 description 1
- CEGNMIKKOBHZDN-UHFFFAOYSA-N ruthenium trimethylphosphane Chemical compound [Ru].CP(C)C.CP(C)C.CP(C)C CEGNMIKKOBHZDN-UHFFFAOYSA-N 0.000 description 1
- OJLCQGGSMYKWEK-UHFFFAOYSA-K ruthenium(3+);triacetate Chemical compound [Ru+3].CC([O-])=O.CC([O-])=O.CC([O-])=O OJLCQGGSMYKWEK-UHFFFAOYSA-K 0.000 description 1
- WYRXRHOISWEUST-UHFFFAOYSA-K ruthenium(3+);tribromide Chemical compound [Br-].[Br-].[Br-].[Ru+3] WYRXRHOISWEUST-UHFFFAOYSA-K 0.000 description 1
- GTCKPGDAPXUISX-UHFFFAOYSA-N ruthenium(3+);trinitrate Chemical compound [Ru+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O GTCKPGDAPXUISX-UHFFFAOYSA-N 0.000 description 1
- YBCAZPLXEGKKFM-UHFFFAOYSA-K ruthenium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Ru+3] YBCAZPLXEGKKFM-UHFFFAOYSA-K 0.000 description 1
- FZHCFNGSGGGXEH-UHFFFAOYSA-N ruthenocene Chemical compound [Ru+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 FZHCFNGSGGGXEH-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- BRGJIIMZXMWMCC-UHFFFAOYSA-N tetradecan-2-ol Chemical compound CCCCCCCCCCCCC(C)O BRGJIIMZXMWMCC-UHFFFAOYSA-N 0.000 description 1
- XLKZJJVNBQCVIX-UHFFFAOYSA-N tetradecane-1,14-diol Chemical compound OCCCCCCCCCCCCCCO XLKZJJVNBQCVIX-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 150000007944 thiolates Chemical class 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- IEKWPPTXWFKANS-UHFFFAOYSA-K trichlorocobalt Chemical compound Cl[Co](Cl)Cl IEKWPPTXWFKANS-UHFFFAOYSA-K 0.000 description 1
- DANYXEHCMQHDNX-UHFFFAOYSA-K trichloroiridium Chemical compound Cl[Ir](Cl)Cl DANYXEHCMQHDNX-UHFFFAOYSA-K 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
- KJIOQYGWTQBHNH-UHFFFAOYSA-N undecanol Chemical compound CCCCCCCCCCCO KJIOQYGWTQBHNH-UHFFFAOYSA-N 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
- H01B1/026—Alloys based on copper
Definitions
- the present invention relates to a copper-containing composition, a method for producing a metal copper film, and a metal copper film.
- the coating agent used in the metal film production by the coating method requires a step of taking out conductive metal fine particles prepared in advance using a polymer protective colloid or the like (for example, see Non-Patent Document 1).
- a composition and a production method for producing a metal film from a metal high valence compound using alcohols and a metal catalyst are disclosed (for example, see Patent Document 1). This method is superior to the conventional manufacturing method from the viewpoint of simplifying the manufacturing process.
- the resistivity of the metal copper film formed by the method described in Patent Document 1 is 20 ⁇ cm or more, and a method for forming a metal copper film having a lower resistance value is required for application to an actual device.
- An object of this invention is to provide the copper containing composition which solves the said subject, the manufacturing method of a metallic copper film, and a metallic copper film.
- a copper inorganic compound, a linear, branched or cyclic alcohol having 1 to 18 carbon atoms, a Group VIII metal catalyst, and a binder resin And a binder resin curing agent and a copper organic complex are applied to form a film comprising the copper-containing composition, and the film is further treated with an inert gas, hydrogen.
- a low resistivity metal copper film can be produced by heating in a mixed gas of an inert gas and hydrogen, and the present invention has been completed.
- the present invention contains a copper inorganic compound, a linear, branched or cyclic alcohol having 1 to 18 carbon atoms, a Group VIII metal catalyst, a binder resin, a binder resin curing agent, and a copper organic complex.
- the present invention relates to a copper-containing composition.
- the present invention forms a coating film comprising the copper-containing composition by applying the copper-containing composition, and further, the coating film in an inert gas, hydrogen, or a mixed gas of inert gas and hydrogen.
- the present invention relates to a method for producing a metallic copper film characterized by heating.
- the present invention also relates to a metal copper film comprising copper, a Group VIII metal catalyst, and a cured binder resin.
- the present invention also provides a copper inorganic compound, a linear, branched or cyclic alcohol having 1 to 18 carbon atoms, a Group VIII metal catalyst, a binder resin, a binder resin curing agent, a copper organic complex, and rheology adjustment. And a copper-containing composition characterized by containing an agent.
- the copper-containing composition is applied to form a film comprising the copper-containing composition, and the film is further formed in an inert gas, hydrogen, or a mixed gas of inert gas and hydrogen,
- the present invention relates to a method for producing a metallic copper film characterized by heating.
- a metal copper film having a low resistivity can be manufactured.
- the obtained metal copper film can be used for a conductive film, a conductive pattern film, an electromagnetic wave shielding film, an antifogging film, and the like.
- FIG. 6 is a diagram showing an X-ray diffraction pattern of a film after heating in Example 2.
- FIG. It is a figure which shows the time-dependent change of the insulation resistance of Example 13.
- copper inorganic compounds such as (II) or copper (II) nitrate.
- Copper (I) oxide or copper (II) oxide is preferable because the metal copper film can be easily produced.
- these oxides may coat metal copper particles. Copper (I) oxide or copper (II) oxide coated with metal copper particles is more preferable in terms of easy production of the metal copper film.
- the numbers in parentheses represent the valence of copper, and so on.
- the form of a copper inorganic compound a particulate form is preferable at the point which manufactures a metal copper film
- the average particle diameter is preferably 5 nm to 500 ⁇ m, more preferably 10 nm to 100 ⁇ m.
- the thickness of the copper (I) oxide or copper (II) oxide coating coated with the metal copper particles is not particularly limited, but is preferably 1 nm to 100 ⁇ m in terms of easy production of the metal copper film, and 2 nm. To 20 ⁇ m is more preferable.
- the content of the copper inorganic compound in the copper-containing composition of the present invention is preferably 20% by weight to 95% by weight, more preferably 40% by weight to 90% by weight, from the viewpoint of easy production of the metal copper film.
- the alcohol that can be used in the copper-containing composition of the present invention include linear, branched, or cyclic alcohols having 1 to 18 carbon atoms, and more specifically, methanol, ethanol, propanol, 2-propanol, allyl alcohol, butanol, 2-butanol, pentanol, 2-pentanol, 3-pentanol, cyclopentanol, hexanol, 2-hexanol, 3-hexanol, cyclohexanol, heptanol, 2-heptanol, 3 -Heptanol, 4-heptanol, cycloheptanol, octanol, 2-octanol, 3-octanol, 4-
- the alcohol content in the copper-containing composition of the present invention is preferably 0.5% by weight to 80% by weight, and more preferably 1% by weight to 50% by weight from the viewpoint of easy production of the metal copper film.
- a Group VIII metal catalyst in the periodic table
- a Group VIII metal salt, a Group VIII metal complex, a zero-valent Group VIII metal catalyst, or the like can be used.
- Group VIII metal salt examples include ruthenium trichloride, ruthenium tribromide, rhodium trichloride, iridium trichloride, sodium hexachloroiridate, palladium dichloride, potassium tetrachloroparadate, platinum dichloride, potassium tetrachloro.
- Halates such as platinate, nickel dichloride, iron trichloride and cobalt trichloride; acetates such as ruthenium acetate, rhodium acetate and palladium acetate; sulfates such as ferrous sulfate; ruthenium nitrate, rhodium nitrate and cobalt nitrate Nitrates such as nickel nitrate; carbonates such as cobalt carbonate and nickel carbonate; hydroxides such as cobalt hydroxide and nickel hydroxide; tri (acetylacetonato) ruthenium, di (acetylacetonato) nickel, di (acetylacetate) Nato) Acetylacetonate salt such as palladium It is possible.
- Group VIII metal complex examples include triruthenium dodecacarbonyl, tetrahydridotetraruthenium dodecacarbonyl, tetrarhodium dodecacarbonyl, hexarhodium hexadecacarbonyl, tetriridium dodecacarbonyl, hexairidium dodecacarbonyl, and the like; diethylene ( Olefin complexes such as acetylacetonato) rhodium; Diene complexes such as acetonitrile (cyclooctadiene) rhodium, bis (1,5-cyclooctadiene) platinum, bis (1,5-cyclooctadiene) nickel; Chloro ( ⁇ - Allyl) palladium dimer, ⁇ -allyl complexes such as chloro ( ⁇ -allyl) tris (trimethylphosphine) ruthenium; acetonitrile pentakis (trichloro
- Group VIII metal salts and Group VIII metal complexes can also be used in combination with amines or imidazoles.
- amines include ethylenediamine, 1,1,2,2-tetramethylethylenediamine, 1,3-propanediamine, N, N′-disalicylidenetrimethylenediamine, o-phenylenediamine, 1,10-phenanthroline, Examples include 2,2′-bipyridine, pyridine and the like.
- imidazoles include imidazole, 1-phenylimidazole, 1,3-diphenylimidazole, imidazole-4,5-dicarboxylic acid, 1,3-bis [2- (1-methyl) phenyl] imidazole, 1,3-di Mesitylimidazole, 1,3-bis (2,6-diisopropylphenyl) imidazole, 1,3-diadamantylimidazole, 1,3-dicyclohexylimidazole, 1,3-bis (2,6-dimethylphenyl) imidazole, 4 , 5-dihydro-1,3-dimesitylimidazole, 4,5-dihydro-1,3-bis (2,6-diisopropylphenyl) imidazole, 4,5-dihydro-1,3-diadamantylimidazole, 4 , 5-dihydro-1,3-dicyclohexylimidazole,
- the zero-valent group VIII metal catalyst examples include raneruthenium, palladium sponge, platinum sponge, nickel sponge, Raney nickel and the like.
- An example of the alloy is silver-palladium.
- a group VIII metal complex is preferable, and a carbonyl complex is particularly preferable in that a metal copper film can be produced efficiently. More preferred is triruthenium dodecacarbonyl.
- the content of the Group VIII metal catalyst in the copper-containing composition of the present invention is preferably 0.01% by weight to 50% by weight, and 0.01% by weight to 10% by weight from the viewpoint that the copper metal film can be produced efficiently. % Is more preferable.
- Polymer acrylic ester rubber, polyvinyl butyral, acrylonitrile-butadiene copolymer, styrene-isoprene block copolymer, polybutadiene, ethylcellulose, polyester, polyamide, natural rubber, silicone rubber, polychloroprene, polyvinyl ether, methacrylic acid Resin, vinylpyrrolidone-vinyl acetate copolymer, polyvinylpyrrolidone, urethane resin, cyclized rubber, butyl rubber, hydrocarbon resin, ⁇ -methylstyrene-acrylonitrile copolymer, polyester De, chlorosulfonated polyethylene, polyolefin, melamine resins, urea resins, phenolic resins, unsaturated esters of polycarboxylic acids and the like.
- An epoxy resin is preferable in that the metal copper film can be produced efficiently. It is more preferable to mix an epoxy resin with another binder resin, and a nylon
- the content of the binder resin contained in the copper-containing composition of the present invention is preferably 0.05% by weight to 10% by weight, and preferably 0.1% by weight to 5% by weight, from the viewpoint of efficient production of the metal copper film. Is more preferable.
- Binder resin curing agents that can be used in the copper-containing composition of the present invention include tetrahydromethyl phthalic anhydride, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 1-benzyl-2-phenylimidazole, 2, Examples include 3-dihydro-1H-pyrrolobenzimidazole, adipic acid, cresol novolac resin, and the like. Tetrahydromethyl phthalic anhydride or 2-ethyl-4-methylimidazole is preferred from the viewpoint that the copper metal film can be produced efficiently.
- the content of the binder resin curing agent contained in the copper-containing composition of the present invention is preferably 0.005% by weight to 0.1% by weight, and 0.01% by weight to 0.01% by weight from the viewpoint that the binder resin can be cured efficiently. More preferred is 0.08% by weight.
- the content of the copper organic complex contained in the copper-containing composition of the present invention is preferably 0.01% by weight to 1% by weight, and preferably 0.1% by weight to 0.00% in view of efficient production of the copper metal film. 5% by weight is more preferred.
- Examples of the rheology modifier that can be used in the copper-containing composition of the present invention include various polyesters such as “SOLPERSE-32000” (trade name, manufactured by Nippon Lubrizol), “SOLSPERSE-20000” (Nippon Lubrizol Corporation).
- Various polyethers such as “SOLPERSE-76500” (trade name manufactured by Nippon Lubrizol), “DISPERBYK-180” (trade name manufactured by BYK Japan)
- Various commercially available products such as alkylolamine salts of copolymers containing an acid group such as are particularly representative, and these compounds can be used as they are.
- Further examples include oxidized polyolefin amide, fatty acid amide, urea-modified urethane, and the like.
- Polyester is preferable because the copper metal film can be produced efficiently.
- the content of the rheology modifier contained in the copper-containing composition of the present invention is preferably 0.05% by weight to 10% by weight, and preferably 0.1% by weight to 6% by weight from the viewpoint that the copper metal film can be produced efficiently. % Is more preferable.
- membrane of this invention is demonstrated.
- substrate coated with the copper containing composition of this invention Ceramics, glass, a plastics, etc. can be used.
- the method for coating on the substrate include a screen printing method, a spin coating method, a casting method, a dipping method, an ink jet method, and a spray method.
- the composition of the present invention can be used as it is, but it may be optionally diluted with a solvent.
- a dilution solvent having a volume of 0.01 to 10 times the volume of the composition of the present invention.
- Diluent solvents include methanol, ethanol, propanol, 2-propanol, butanol, pentanol, hexanol, cyclohexanol, heptanol, octanol, ethylene glycol, 1,3-propanediol, 1,2-butanediol, 1,3- Alcohol solvents such as butanediol, 1,4-butanediol, 2,3-butanediol, 1,6-hexanediol, glycerin; diethyl ether, tetrahydrofuran, ethylene glycol dimethyl ether, triethylene glycol dimethyl ether, tetraethylene glycol dimethyl ether, Ether solvents such as dioxane, triglyme, tetraglyme; methyl acetate, butyl acetate, benzyl benzoate, dimethyl carbonate, ethylene carbonate, ⁇ Este
- the method for producing a metal copper film of the present invention be carried out in an inert gas such as nitrogen, argon or helium, or in a hydrogen atmosphere. Moreover, you may carry out in the mixed gas atmosphere of these inert gas and hydrogen. It is preferable to carry out in nitrogen or the mixed gas atmosphere of nitrogen and hydrogen at the point from which a low resistivity metallic copper film
- an inert gas such as nitrogen, argon or helium
- the heating temperature in the method for producing a metal copper film of the present invention is preferably a temperature selected from 100 ° C. to 300 ° C., preferably 150 ° C. to 250 ° C., in that a low resistivity metal copper film is obtained. More preferably.
- the metal copper film of desired resistivity can be manufactured by heating for the time according to conditions, such as a composition of a copper containing composition, heating temperature, and heating atmosphere. For example, the range of 1 minute to 2 hours can be given in terms of high productivity.
- the weight ratio of the copper inorganic compound and the binder resin in the copper-containing composition of the present invention is preferably 1: 0.01 to 1: 0.08, more preferably 1: 0.02 to 1: 0.05.
- the weight ratio of the copper inorganic compound and the binder resin curing agent is preferably 1: 0.0003 to 1: 0.002, more preferably 1: 0.0003 to 1: 0.001.
- the weight ratio of the binder resin curing agent is smaller than 1: 0.0003, the binder resin is not sufficiently cured, and when it is larger than 1: 0.002, the resistivity of the metal copper film is deteriorated.
- the metal copper film according to the present invention comprises copper, a Group VIII metal catalyst, and a cured binder resin.
- a film can be obtained by the method for producing a metal copper film of the present invention.
- the cured binder resin is a product obtained by reacting a binder resin and a binder resin curing agent by heating.
- the metal copper film of the present invention preferably has a copper content of 60 to 99% by weight, more preferably 80 to 99% by weight.
- the content of the group VIII metal catalyst is preferably 0.01 to 50% by weight, and more preferably 0.01 to 20% by weight.
- the content of the cured binder resin is preferably 0.01 to 30% by weight, and more preferably 0.01 to 10% by weight.
- the group VIII metal catalyst is preferably triruthenium dodecacarbonyl.
- the binder resin cured product is preferably a reaction product of an epoxy resin and a binder resin curing agent, or a reaction product of an epoxy resin, a nylon resin, and a binder resin curing agent.
- the binder resin curing agent is preferably tetrahydromethyl phthalic anhydride or 2-ethyl-4-methylimidazole.
- the resistivity of the metal copper film of the present invention is preferably 1.7 ⁇ cm to 20 ⁇ cm, and more preferably 1.7 ⁇ cm to 15 ⁇ cm.
- Example 1 A solution (A) in which 0.09 g of triruthenium dodecacarbonyl was dissolved in 20.0 mL of 1,3-butanediol was prepared. In addition, a solution (B) in which 0.5 g of copper (I) 1-butanethiolate was dissolved in 3.0 mL of 1,3-butanediol was prepared.
- Example 2 The copper-containing composition A obtained in Example 1 was printed in a range of 15 mm ⁇ 15 mm on a polyimide substrate by a screen printing method. Next, the temperature was raised to 200 ° C. at 100 ° C./min in a nitrogen atmosphere, followed by heating at 200 ° C. for 1 hour. The obtained copper metal film had a thickness of 8 ⁇ m and a resistivity of 11 ⁇ cm. When the X-ray diffraction pattern of the obtained film was measured, it is shown in FIG.
- Example 3 The same operation as in Example 2 was performed except that the heating was performed at 250 ° C.
- the obtained copper metal film had a thickness of 15 ⁇ m and a resistivity of 11 ⁇ cm.
- Example 4 Tetrahydromethylphthalic anhydride (Dainippon Ink Co., Ltd. grade: EPLICLON B-570H) was replaced with 0.17 mg, but 2-ethyl-4-methylimidazole (Shikoku Kasei Co., Ltd. grade: 2E4MZ) 0.32 mg was mixed. All performed the same operation as Example 1, and obtained the copper containing composition B.
- Example 5 When the same operation as in Example 2 was performed using the composition B for producing a metal copper film obtained in Example 4, the film thickness of the obtained metal copper film was 16 ⁇ m, and the resistivity was 15 ⁇ cm. there were.
- Example 6 The same operation as in Example 2 was performed except that the copper-containing composition A obtained in Example 1 was used and heated in a mixed gas of hydrogen and argon (hydrogen 4%). The obtained copper metal film had a thickness of 12 ⁇ m and a resistivity of 9 ⁇ cm.
- Example 7 Except that the solution (A) was changed to 0.063 g, the same operation as in Example 1 was performed to obtain a copper-containing composition C.
- Example 8 When the same operation as in Example 2 was performed using the copper-containing composition C obtained in Example 7, the thickness of the obtained metal copper film was 9 ⁇ m and the resistivity was 15 ⁇ cm.
- Example 9 Except that tetrahydromethylphthalic anhydride was changed to 0.26 mg, the same operation as in Example 1 was performed to obtain a copper-containing composition D.
- Example 10 When the same operation as in Example 2 was performed using the copper-containing composition D obtained in Example 9, the thickness of the obtained metal copper film was 12 ⁇ m, and the resistivity was 11 ⁇ cm.
- Example 11 A copper-containing composition E was obtained in the same manner as in Example 1 except that the amount of tetrahydromethylphthalic anhydride was changed to 0.06 mg.
- Example 12 When the same operation as in Example 2 was performed using the copper-containing composition E obtained in Example 11, the film thickness of the obtained metal copper film was 13 ⁇ m, and the resistivity was 12 ⁇ cm.
- Example 13 The copper-containing composition A obtained in Example 1 was printed on a polyimide substrate with a comb-shaped electrode film having a line and space of 300 ⁇ m / 300 ⁇ m by a screen printing method in a range of 70 mm ⁇ 70 mm. Next, the temperature was raised to 200 ° C. at 100 ° C./min in a nitrogen atmosphere, followed by heating at 200 ° C. for 1 hour. A voltage of 100 V was applied to both insulated ends of the obtained comb-shaped electrode copper film, and the insulation resistance value was measured while storing in a constant temperature and humidity chamber for 1000 hours. It was stored at a temperature of 25 ° C.
- Example 14 A solution (A) in which 0.09 g of triruthenium dodecacarbonyl was dissolved in 20.0 mL of 1,3-butanediol was prepared. In addition, a solution (B) in which 0.5 g of copper (I) 1-butanethiolate was dissolved in 3.0 mL of 1,3-butanediol was prepared.
- Example 15 When the same operation as in Example 2 was performed using the copper-containing composition F obtained in Example 14, the film thickness of the obtained metal copper film was 10 ⁇ m, and the resistivity was 13 ⁇ cm.
- Example 17 The composition of the metallic copper film obtained in Example 2 was measured by fluorescent X-ray analysis and combustion-infrared absorption method, and was found to be 97.3% by weight of copper, 0.1% by weight of triruthenium dodecacarbonyl, and binder resin cured. The product was 2.6% by weight.
- the copper-containing composition of the present invention can be used for the production of conductive films, conductive pattern films, electromagnetic wave shielding films, antifogging films and the like.
- the entire contents of the specification, claims, drawings, and abstract of Japanese Patent Application No. 2010-292582 filed on Dec. 28, 2010 are cited here as disclosure of the specification of the present invention. Incorporated.
Landscapes
- Paints Or Removers (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010-292582 | 2010-12-28 | ||
JP2010292582 | 2010-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012090881A1 true WO2012090881A1 (ja) | 2012-07-05 |
Family
ID=46382987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/079925 WO2012090881A1 (ja) | 2010-12-28 | 2011-12-22 | 銅含有組成物、金属銅膜の製造方法、および金属銅膜 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2012151093A (enrdf_load_stackoverflow) |
TW (1) | TW201241840A (enrdf_load_stackoverflow) |
WO (1) | WO2012090881A1 (enrdf_load_stackoverflow) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5972187B2 (ja) * | 2013-02-04 | 2016-08-17 | 富士フイルム株式会社 | 導電膜形成用組成物、導電膜の製造方法 |
JP2014196427A (ja) * | 2013-03-29 | 2014-10-16 | 富士フイルム株式会社 | 導電膜形成用組成物およびこれを用いる導電膜の製造方法 |
JP2014196384A (ja) * | 2013-03-29 | 2014-10-16 | 富士フイルム株式会社 | 導電膜形成用組成物およびこれを用いる導電膜の製造方法 |
JP5993812B2 (ja) * | 2013-07-10 | 2016-09-14 | 富士フイルム株式会社 | 導電膜の製造方法 |
JP2016079439A (ja) * | 2014-10-14 | 2016-05-16 | 四国化成工業株式会社 | 銅被膜形成剤およびその利用 |
WO2016121668A1 (ja) * | 2015-01-29 | 2016-08-04 | ハリマ化成株式会社 | 導電性ペースト |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1087994A (ja) * | 1996-09-10 | 1998-04-07 | Polymertech Kk | 複合導電性高分子および組成物ならびにその製造方法 |
WO2003085052A1 (fr) * | 2002-04-10 | 2003-10-16 | Fujikura Ltd. | Composition conductrice, film conducteur et procede de production de celui-ci |
JP2008130301A (ja) * | 2006-11-20 | 2008-06-05 | Sumitomo Bakelite Co Ltd | 導電性銅ペースト |
JP2010121206A (ja) * | 2008-10-22 | 2010-06-03 | Tosoh Corp | 金属膜製造用組成物、金属膜の製造方法及び金属粉末の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1060319A (ja) * | 1996-08-22 | 1998-03-03 | Asahi Chem Ind Co Ltd | 導電性ペースト組成物及びそれを用いた配線基板 |
-
2011
- 2011-11-29 JP JP2011260254A patent/JP2012151093A/ja active Pending
- 2011-12-22 WO PCT/JP2011/079925 patent/WO2012090881A1/ja active Application Filing
- 2011-12-26 TW TW100148606A patent/TW201241840A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1087994A (ja) * | 1996-09-10 | 1998-04-07 | Polymertech Kk | 複合導電性高分子および組成物ならびにその製造方法 |
WO2003085052A1 (fr) * | 2002-04-10 | 2003-10-16 | Fujikura Ltd. | Composition conductrice, film conducteur et procede de production de celui-ci |
JP2008130301A (ja) * | 2006-11-20 | 2008-06-05 | Sumitomo Bakelite Co Ltd | 導電性銅ペースト |
JP2010121206A (ja) * | 2008-10-22 | 2010-06-03 | Tosoh Corp | 金属膜製造用組成物、金属膜の製造方法及び金属粉末の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2012151093A (ja) | 2012-08-09 |
TW201241840A (en) | 2012-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9624581B2 (en) | Composition for production of metal film, method for producing metal film and method for producing metal powder | |
WO2012090881A1 (ja) | 銅含有組成物、金属銅膜の製造方法、および金属銅膜 | |
Jeong et al. | Controlling the thickness of the surface oxide layer on Cu nanoparticles for the fabrication of conductive structures by ink‐jet printing | |
Kamyshny et al. | Metal-based inkjet inks for printed electronics | |
KR101263003B1 (ko) | 도전선 패턴 형성을 위한 은 오르가노 졸 잉크 | |
JP6354950B2 (ja) | 無電解めっき下地剤 | |
TWI570097B (zh) | A copper film forming composition, and a method for producing a copper film using the same | |
KR20110027487A (ko) | 금속 패턴 형성용 조성물 및 이를 이용한 금속 패턴 형성방법 | |
JP5620795B2 (ja) | 銅膜形成用組成物及び該組成物を用いた銅膜の製造方法 | |
WO2015088008A1 (ja) | インクジェット印刷用触媒インク | |
JP2008041960A (ja) | 電子回路部品の製造方法 | |
TWI548640B (zh) | A zinc oxide film forming composition, and a method for producing a zinc oxide film | |
JPWO2013073349A1 (ja) | 銅パターン形成用組成物及び銅パターンの製造方法 | |
TW201510273A (zh) | 銅膜形成用組成物及使用其之銅膜之製造方法 | |
KR101836803B1 (ko) | 다공성 금속-유기 구조체 박막 및 이의 제조방법 | |
KR20190031418A (ko) | 광개시제를 이용하는 전도성 금속 인쇄를 위한 분자 유기 반응성 잉크 | |
KR20140131944A (ko) | 도전성막의 형성 방법 | |
Salian et al. | Facile in situ formation of high conductive Ag and CuxOy composite films: a role of aqueous spray combustion | |
US20110151117A1 (en) | Organic metal complexes for forming metal thin layer, ink including the same and method for forming metal thin layer using the same | |
KR101583304B1 (ko) | 전도성 금속이온 잉크 조성물 및 이의 제조방법 | |
KR20100033143A (ko) | 유기금속 전구체 및 이를 이용한 금속 필름 또는 패턴 | |
JP5368683B2 (ja) | 金属ナノ粒子分散体および金属被膜 | |
EP2049703A1 (de) | Einstufiges verfahren zur aufbringung einer metallschicht auf ein substrat | |
JP2008038241A (ja) | 薄膜形成方法 | |
TW201619438A (zh) | 銅膜形成用組成物及使用其之銅膜之製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11854497 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11854497 Country of ref document: EP Kind code of ref document: A1 |