WO2012086330A1 - Procédé pour produire de la lumière par émission de champ et lumière par émission de champ - Google Patents

Procédé pour produire de la lumière par émission de champ et lumière par émission de champ Download PDF

Info

Publication number
WO2012086330A1
WO2012086330A1 PCT/JP2011/075831 JP2011075831W WO2012086330A1 WO 2012086330 A1 WO2012086330 A1 WO 2012086330A1 JP 2011075831 W JP2011075831 W JP 2011075831W WO 2012086330 A1 WO2012086330 A1 WO 2012086330A1
Authority
WO
WIPO (PCT)
Prior art keywords
field emission
electron
light source
vacuum
container
Prior art date
Application number
PCT/JP2011/075831
Other languages
English (en)
Japanese (ja)
Inventor
一仁 西村
秀紀 笹岡
昌洋 大岡
Original Assignee
高知Ｆｅｌ株式会社
セントラル硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 高知Ｆｅｌ株式会社, セントラル硝子株式会社 filed Critical 高知Ｆｅｌ株式会社
Publication of WO2012086330A1 publication Critical patent/WO2012086330A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/44—Factory adjustment of completed discharge tubes or lamps to comply with desired tolerances
    • H01J9/445—Aging of tubes or lamps, e.g. by "spot knocking"
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J63/00—Cathode-ray or electron-stream lamps
    • H01J63/06—Lamps with luminescent screen excited by the ray or stream

Definitions

  • the present invention relates to a method for manufacturing a field emission light source (Field Emission Light: hereinafter also referred to as FEL), and a field emission light source.
  • FEL Field Emission Light
  • FEL uses light emission of a phosphor excited by electron beam irradiation, that is, cathodoluminescence, like a vacuum fluorescent display (Vacuum Fluorescent Display) and a cathode ray tube (Cathode Ray Tube). Instead, it is characterized by the use of a field electron-emitting device that emits electrons with a quantum effect.
  • FEL field emission cathode
  • a fluorescent material layer that emits light by collision of electrons emitted from the field emission cathode is formed on the inner surface of the vacuum container. Etc. are known.
  • a process called baking in which the whole container is heated while exhausting the inside of the container, or electron emission and fluorescence are applied by applying a voltage.
  • a process called aging that generates body light emission and promotes degassing from the electron-emitting device and the phosphor layer is performed.
  • the aging process an electron beam having a kinetic energy of several KeV is irradiated.
  • the heating temperature in the baking process is usually 800 K or less (that is, the kinetic energy is 0.09 eV or less). Therefore, the aging process is more effective than the baking process in promoting degassing.
  • a carbon-based electron-emitting device When a carbon-based electron-emitting device is used as the electron-emitting device, hydrogen and hydrocarbon molecule gas are released from the electron-emitting device in the aging process. Further, for example, oxygen, carbon dioxide, carbon monoxide, methane, and the like are released from the phosphor and the binder that fixes the phosphor to the substrate.
  • the gas to be emitted varies depending on the type of electron-emitting device, phosphor, and binder used, but the gas emission rate is greatest from the phosphor layer containing the binder.
  • the solvent molecules are taken into the binder, so in order to suppress the increase in the internal pressure of the container due to the outgassing from the phosphor layer, simply use fluorescence. It is not sufficient to remove the gas adsorbed on the surface of the body and the binder, and it is also necessary to remove the gas taken into the phosphor and the binder. Therefore, the significance of performing the aging treatment in the FEL manufacturing process is great.
  • a part of the gas released from each member in the aging process is ionized by an electron beam.
  • the ions are accelerated by the electric field in the same manner as the electrons and are irradiated to the electron-emitting device. It is known that the ion current density is substantially proportional to the electron beam density I, the cathode-anode distance L, and the pressure P in the container. There is a risk of damaging the electron-emitting device.
  • FIG. 1 is a schematic diagram illustrating a state in which an aging process is performed after a vacuum sealed container is assembled.
  • the funnel type FEL container 300, the face glass 301, and the stem 320 are joined.
  • an aging process is performed by introducing a current through a current introduction terminal provided in the stem 320 while exhausting the inside of the container through the exhaust pipe 310 provided in the stem 320. That is, the aging process is performed with the vacuum sealed container assembled.
  • the exhaust conductance is small because the diameter of the exhaust pipe is smaller than the volume in the container. Therefore, the pressure in the container tends to be high, and there is a high risk of damaging the electron-emitting device.
  • the present invention has been made in view of the above points, and a method of manufacturing a field emission light source capable of reducing the time for aging while suppressing damage to the electron-emitting device, and the An object of the present invention is to provide a field emission light source manufactured by the manufacturing method.
  • the present invention provides a method of manufacturing a field emission light source having the following configuration.
  • a method of manufacturing a field emission type light source The field emission light source is A vacuum sealed container comprising a plurality of members; An anode electrode disposed in the vacuum-sealed container; A phosphor layer formed on the anode electrode or between the inner wall surface of the vacuum-sealed container and the anode electrode; A cathode electrode disposed in the vacuum-sealed container and having a surface on which an electron emission film is formed;
  • the method of manufacturing a field emission light source comprising the following steps (A) to (B): (A) Before assembling the vacuum sealing container, the cathode electrode and the anode electrode are placed in a vacuum chamber, and aging is performed by applying a voltage between the cathode electrode and the anode electrode. Process and (B) The process of assembling the said vacuum sealing container after the said process (A).
  • the vacuum sealed container is composed of a plurality of members (for example, funnel type FEL container, face glass, etc.). And an aging process is performed before assembling a vacuum sealing container by the said some member. Therefore, the aging process can be performed in a vacuum chamber that is continuously in an exhausted state with a high exhaust conductance before attaching a face glass, a stem, or the like. As a result, even in the initial stage of the aging process, it is possible to suppress the increase in the internal pressure of the container without suppressing the amount of electron emission, and there is a risk of damaging the electron-emitting device. Can be reduced.
  • members for example, funnel type FEL container, face glass, etc.
  • the time for aging can be reduced while suppressing damage to the electron-emitting device. Further, even when baking or aging is performed after the vacuum sealed container is assembled, the time required for them can be shortened. Furthermore, since the degassing from the electron-emitting device and the phosphor layer can be sufficiently performed, the life of the FEL can be extended.
  • the present invention preferably has the following configuration.
  • the numerical value of the vacuum gauge attached to the vacuum exhaust device is greatly different from the pressure in the container. For this reason, it has not been possible to determine whether or not the pressure in the container is equal to or lower than the pressure allowed for the electron-emitting device.
  • the field emission type light source manufacturing method of (2) above in the initial stage of the aging process in which the gas release rate is large and the pressure in the vacuum chamber is high while monitoring the pressure in the vacuum chamber, If the emission amount is reduced and the gas emission rate decreases as the aging process proceeds, control can be performed such that the electron emission amount is increased.
  • aging can be performed in a state where the pressure in the container is always kept below the pressure allowed for the electron-emitting device.
  • the aging time can be shortened while suppressing the ion bombardment with respect to the electron-emitting device to a certain level or less and suppressing the occurrence of spark discharge that greatly deteriorates the characteristics of the electron-emitting device.
  • the present invention preferably has the following configuration.
  • a pulse voltage is applied in the aging process. Even if there is some unevenness in the electron emission of the electron-emitting device, by pulsing the electron emission, the average electron beam irradiation amount to the phosphor layer is suppressed and the electron beam is spread over the entire region where the phosphor layer is formed. Can be irradiated. Moreover, by changing the duty ratio, the average electron beam irradiation amount to the phosphor layer can be adjusted without changing the electron beam irradiation region.
  • the present invention preferably has the following configuration.
  • (4) A method of manufacturing a field emission light source according to any one of (1) to (3) above, The step (A) Of the region where the phosphor layer is formed, a region including a region that emits light when using the field emission light source, and a region that is larger than a region that emits light when using the field emission light source
  • it is a step of performing aging by irradiating an electron beam.
  • the electron beam is irradiated not only to the region that emits light when using the field emission light source, but also to other regions. Therefore, degassing from the phosphor layer can be efficiently performed by causing gas emission by the electron beam in all the regions where the electron beam is irradiated in the subsequent steps in the region where the phosphor layer is formed. It is possible to further suppress an increase in pressure in the container when the FEL is driven after sealing or when aging is performed after the vacuum sealed container is assembled. On the other hand, since degassing is performed from a wide range of phosphor layers, the gas emission rate is further increased in the initial stage of the aging process. However, the configuration of (1) described above suppresses the amount of electron emission. At least, it is possible to suppress the increase in the internal pressure of the container.
  • the present invention also provides a field emission light source having the following configuration. (5) A field emission light source manufactured by the manufacturing method according to any one of (1) to (4) above.
  • the present invention it is possible to reduce the time for performing aging while suppressing damage to the electron-emitting device.
  • FIG. 1 is a schematic diagram illustrating a state in which an aging process is performed after a vacuum sealed container is assembled.
  • FIG. 2 is a cross-sectional view schematically showing a field emission type light source according to an embodiment of the present invention.
  • FIG. 3 is a view schematically showing a part of the manufacturing process of the field emission light source according to the embodiment shown in FIG.
  • FIG. 4 is a cross-sectional view schematically showing a field emission light source according to another embodiment of the present invention.
  • FIG. 5 is a view schematically showing a part of the manufacturing process of the field emission light source according to the embodiment shown in FIG. FIG.
  • FIG. 6 is a diagram showing the change over time in the pressure in the vacuum chamber and the electron emission amount when aging is performed by applying a DC voltage before assembling the vacuum sealed container.
  • FIG. 7 is a diagram showing the change over time in the pressure in the vacuum chamber and the electron emission amount when aging is performed by applying a pulse voltage before assembling the vacuum sealed container.
  • Fig.8 (a) is a figure which shows the mode of fluorescent substance light emission when a DC voltage is applied.
  • FIG. 8B is a diagram showing a state of phosphor emission when a pulse voltage is applied.
  • FIG. 9 is a diagram showing temporal changes in the pressure in the vacuum chamber and the electron emission amount when a DC voltage is applied after the aging shown in FIG.
  • FIG. 10A is a diagram showing a light emission state of the FEL subjected to the pre-assembly aging process.
  • FIG.10 (b) is a figure which shows the light emission state of FEL which did not perform the aging process before an assembly.
  • FEL field emission light source
  • FIG. 2 is a cross-sectional view schematically showing a field emission type light source according to an embodiment of the present invention.
  • the field emission type light source 1 includes a funnel type FEL container 10, an anode electrode 11, a phosphor layer 12, a cathode electrode 13, a power feeding unit 14, a stem 16, and a cap unit 17. And face glass 18.
  • the funnel type FEL container 10, the stem 16, and the face glass 18 constitute a vacuum sealed container. That is, the funnel type FEL container 10, the stem 16, and the face glass 18 correspond to a plurality of members in the present invention.
  • the anode electrode 11 is formed on the inner wall surface of the funnel type FEL container 10 in the vacuum sealed container.
  • the anode electrode 11 is made of a metal film or a metal oxide film.
  • the metal film constituting the anode electrode include an aluminum film and a carbon film.
  • the metal oxide film include tin oxide / indium, zinc oxide, tin oxide, and indium oxide.
  • the phosphor layer 12 is formed on the anode electrode 11.
  • the phosphor layer 12 include P15 phosphor (ZnO: Zn), P22 phosphor (blue: ZnS: Ag, Cl, ZnS: Ag, Al, green: ZnS: Cu, Al, ZnS: Cu, Au, Al, red: Y 2 O 2 S: Eu 3+ ), P53 phosphor (Y 3 Al 5 O 12 : Tb 3+ ), P56 phosphor (Y 2 O 3 : Eu 3+ ), and the like can be used.
  • the type is not particularly limited as long as the phosphor emits light by electron beam irradiation.
  • the phosphor layer 12 includes a binder for fixing the phosphor to the anode electrode 11.
  • a transparent protective film may be formed on the surface of the phosphor layer 12.
  • the transparent protective film suppresses the deterioration of the phosphor layer 12 due to electron beam irradiation, and is made of a material of either silicon oxide or titanium oxide that is transparent and has a higher resistance to electron beam irradiation than the phosphor. Has been.
  • By depositing these materials on the phosphor layer 12 with a thickness of 100 to 200 nm electrons emitted from the cathode electrode 13 reach the phosphor layer 12 and do not block the light emitted from the phosphor layer 12. It becomes possible to take out.
  • the deterioration rate of the phosphor in the phosphor layer 12 can be greatly reduced.
  • the cathode electrode 13 includes a plurality of linear wire emitters 13a.
  • the wire emitter 13a includes a substrate and an electron emission film formed on the surface of the substrate.
  • a substrate made of a conductive material containing at least one of a semiconductor, a metal, and a metalloid, for example, Si, Mo, Ni, and a stainless alloy can be used.
  • the substrate it is particularly desirable to use an electrode made of a conductive ceramic or a ceramic containing graphite. When an electrode made of such a material is used as the substrate, when a carbon film is formed on the substrate, the coefficient of thermal expansion between the substrate and the carbon film is close. This is because peeling of the film is prevented.
  • the electron emission film is a site for emitting electrons, and is formed by forming carbon nanotubes, petal-like graphene sheet layers, nanodiamond particle layers, and the like on the surface of the wire emitter 13a.
  • the electron emission film is preferably formed by forming an ND / CNW layer having a laminated structure of a nanodiamond layer (ND layer) and a carbon nanowall layer (CNW layer). Note that the electron emission film is formed only at a portion facing the phosphor layer 12.
  • the cathode electrode 13 is supported by the power supply unit 14.
  • the electric power feeding part 14 is comprised from the metal which has electroconductivity. In FIG. 2, one end of the power source 15 is connected to the power supply unit 14, and the other end of the power source 15 is connected to the anode electrode 11.
  • the lower end portion of the funnel type FEL container 10 is fixed to the stem 16.
  • the stem 16 includes an exhaust pipe and a current introduction terminal.
  • the current introduction terminal may be directly introduced into the vacuum sealed container, or the current introduction terminal may be sealed via an alumina insulator.
  • the distal end portion that is not supported by the power feeding portion 14 is fixed by a cap portion 17.
  • the cap portion 17 has a function of suppressing electric field concentration occurring at the end portion of the wire emitter 13 a and making the electric field intensity near the cap portion 17 uniform.
  • the upper end portion of the funnel type FEL container 10 is fixed to the face glass 18.
  • the face glass 18 is made of glass having a high transmittance for visible light.
  • the field emission light source 1 having the above configuration, when a voltage is applied between the cathode electrode 13 and the anode electrode 11, an electron beam is emitted from the electron emission film formed on the surface of the cathode electrode 13.
  • the emitted electron beam is directed to the phosphor layer 12, collides with the phosphor layer 12, and the phosphor emits light. Most of the light emitted from the phosphor is taken out through the face glass 18.
  • photons directed toward the anode electrode 11 are reflected by the anode electrode 11 and directed upward when the anode electrode 11 is formed of a film having a high visible light reflectance such as an aluminum film. Accordingly, such photons are also taken out through the face glass 18.
  • the field emission light source (FEL) according to one embodiment of the present invention has been described above. Then, the manufacturing method of the field emission type light source (FEL) which concerns on one Embodiment of this invention is demonstrated.
  • An electron-emitting device is fabricated by forming an electron-emitting film on a substrate.
  • the method for forming the electron emission film is not particularly limited, and a DC plasma CVD method, a thermal CVD method, a sputtering method, or the like can be appropriately employed.
  • a DC plasma CVD method, a thermal CVD method, a sputtering method, or the like can be appropriately employed.
  • an ND / CNW layer having a laminated structure of a nanodiamond layer (ND layer) and a carbon nanowall layer (CNW layer) can be formed.
  • a metal film or a metal oxide film is formed on the inner wall surface of the funnel type FEL container 10.
  • These metal films and metal oxide films can be suitably formed by selecting a method such as vapor deposition or sputtering according to the material. Then, a fluorescent substance layer is formed by apply
  • FIG. 3 is a diagram schematically showing a part of the manufacturing process of the field emission light source according to the embodiment shown in FIG.
  • the electron-emitting device manufactured in the step (1) and the funnel type FEL container in which the metal film (metal oxide film) and the phosphor layer are formed in the step (2) is introduced into the vacuum chamber 20.
  • the funnel type FEL container 10 is not joined to the face glass 18 and the stem 16. In this state, evacuation is performed via the vacuum pump 21. Further, the conductive wire is connected through the current introduction terminal so that the electron-emitting device becomes the cathode electrode 13 and the metal film or metal oxide film formed on the inner wall surface of the funnel type FEL container 10 becomes the anode electrode 11.
  • a voltage is applied between the cathode electrode 13 and the anode electrode 11.
  • the applied voltage is preferably a pulse voltage, but may be a DC voltage.
  • a vacuum gauge 22 is attached to the vacuum chamber 20, and the pressure in the vacuum chamber can be monitored by the vacuum gauge 22. Then, by adjusting the voltage to be applied based on the pressure in the vacuum chamber, the amount of electron emission is reduced at the initial stage of the aging process where the gas emission rate is large, and the gas emission rate becomes smaller as the aging process proceeds. Then, control is performed to increase the amount of electron emission.
  • the applied voltage is a pulse voltage
  • the pressure in the vacuum chamber becomes 4 ⁇ 10 ⁇ 6 Pa or less
  • the average electron emission amount increases by 0.1 mA per 100 cm 2 of the irradiation region. It is sufficient to increase the peak voltage.
  • the repetition frequency is desirably 500 Hz to 2 kHz
  • the duty ratio is desirably 0.5 to 5%.
  • the electron-emitting device and the funnel-type FEL container are taken out from the vacuum chamber 20. Then, in the atmosphere, the upper end portion of the funnel type FEL container 10 and the face glass 18 are bonded and fixed with a low melting point frit glass or the like, and the lower end portion of the funnel type FEL container 10 and the stem are fixed with a low melting point frit glass or the like.
  • the vacuum sealed container is assembled by bonding and fixing.
  • the stem includes a current introduction terminal and an exhaust pipe (see FIG. 1).
  • the assembly of the vacuum sealed container may be performed in the atmosphere or in a vacuum. When assembling a vacuum sealed container in a vacuum, a stem without an exhaust pipe can be employed.
  • the FEL is manufactured by performing vacuum sealing.
  • the FEL after assembling the vacuum-sealed container in the step (4), the FEL may be produced without going through the aging step in the above (5). It is desirable to go through the process. This is because the gas once in the atmosphere is adsorbed to the member once exposed to the atmosphere, and the gas can be removed through the step (5). The gas thus adsorbed can be released relatively easily, unlike the gas originally contained in the electron-emitting device and the phosphor layer. In addition, it is good also as passing through the baking process which heats a vacuum sealing container with the process of said (5), or it replaces with the process of said (5).
  • the field emission light source (FEL) and the manufacturing method thereof according to an embodiment of the present invention have been described above.
  • the case where a funnel type FEL container is used as the FEL container has been described.
  • the funnel type FEL container has a funnel shape.
  • the shape of the FEL container is not particularly limited.
  • a field emission light source (FEL) and a method for manufacturing the same according to another embodiment of the present invention will be described.
  • FIG. 4 is a cross-sectional view schematically showing a field emission light source according to another embodiment of the present invention.
  • the field emission light source 100 includes a tube type FEL container 110, an anode electrode 111, a phosphor layer 112, a cathode electrode 113, a power feeding unit 114, and a stem 116.
  • the tube type FEL container 110 and the stem 116 constitute a vacuum sealed container. That is, the tube type FEL container 110 and the stem 116 correspond to a plurality of members in the present invention.
  • the anode electrode 11 is formed on the inner wall surface of the funnel type FEL container 10, and the phosphor layer 12 is formed on the anode electrode 11.
  • the phosphor layer 112 is formed on the inner wall surface of the tube type FEL container 110, and the anode electrode 111 is formed on the phosphor layer 112.
  • the field emission light source 1 shown in FIG. 2 is an electron irradiation surface light emission utilizing FEL
  • the field emission light source 100 shown in FIG. 4 is a transmitted light utilization FEL.
  • the transmitted light utilizing type FEL electrons emitted from the electron emission film are accelerated by a voltage applied between the electrodes and then enter the anode electrode.
  • the transmitted light utilizing FEL has a structure in which illumination light is obtained by exciting and emitting phosphors by electrons incident on the phosphor layer, and radiating the light to the outside through a vacuum sealed container to which the phosphors are applied. It has become.
  • the field emission type light source in the present invention may be an electron irradiation surface light emission type FEL or a transmitted light type FEL.
  • the field emission light source 100 is a transmitted light utilization type FEL.
  • the field emission light source is used as an electron irradiation surface. It is good also as light emission utilization type FEL.
  • FIG. 5 is a view schematically showing a part of the manufacturing process of the field emission light source according to the embodiment shown in FIG.
  • the electron-emitting device is manufactured in the same manner as the embodiment shown in FIG.
  • a phosphor layer is formed by applying a phosphor on the inner wall surface of a tube-type FEL container, and a metal film or a phosphor layer is formed on the phosphor layer. A metal oxide film is formed.
  • a metal film or a metal oxide film is formed on the inner wall surface of a tube type FEL container, and a phosphor layer is formed thereon. Thereafter, these are introduced into the vacuum chamber 120. Then, evacuation is performed via the vacuum pump 121. Further, the conductive wire is connected through the current introduction terminal so that the electron-emitting device becomes the cathode electrode 113 and the metal film or metal oxide film formed on the phosphor layer 112 becomes the anode electrode 111. A voltage is applied between the cathode electrode 113 and the anode electrode 111.
  • the applied voltage is preferably a pulse voltage, but may be a DC voltage.
  • a vacuum gauge 122 is attached to the vacuum chamber 120, and the pressure in the vacuum chamber can be monitored by the vacuum gauge 122. Then, by adjusting the voltage to be applied based on the pressure in the vacuum chamber, the amount of electron emission is reduced at the initial stage of the aging process where the gas emission rate is large, and the gas emission rate becomes smaller as the aging process proceeds. Then, control is performed to increase the amount of electron emission. Thereafter, the vacuum sealed container is assembled by adhering and fixing the end portion of the tube-type FEL container 110 and the stem including the current introduction terminal and the exhaust pipe with a low melting point frit glass or the like.
  • FEL field emission type light source
  • a cathode electrode An electrode made of a ceramic containing graphite is used as a substrate, and a nanodiamond layer (ND layer) and a carbon nanowall layer (CNW layer) are formed on the substrate using a DC plasma CVD apparatus. An ND / CNW layer having a laminated structure was formed. Thereby, a wire-type electron-emitting device was produced.
  • ND layer nanodiamond layer
  • CNW layer carbon nanowall layer
  • an aluminum layer having a thickness of about 1 ⁇ m was formed in a funnel type FEL container by sputtering. Thereafter, a white phosphor for black-and-white television mixed with ZnS: Cu, Au, Al, ZnS: Ag, Cl and Y 2 O 2 S: Eu on the aluminum layer (NPA 1305, manufactured by Nichia Corporation). Was applied.
  • an aqueous potassium water glass solution (Okaseal B, manufactured by Tokyo Ohka Kogyo Co., Ltd.) is diluted 25 times with a 1% by weight ammonium acetate aqueous solution, and 3 g of phosphor is mixed with 100 ml of this aqueous solution. Slurried. Next, this slurry was applied by a spray method until there was no gap on the aluminum thin film in the funnel type FEL container. This was naturally dried for 24 hours, and then baked by heating at 480 ° C. for 10 minutes.
  • FIG. 6 is a diagram showing the change over time in the pressure in the vacuum chamber and the electron emission amount when aging is performed by applying a DC voltage before assembling the vacuum sealed container.
  • the pressure in the vacuum chamber before driving reached 1.5 ⁇ 10 ⁇ 5 Pa, as shown in FIG. 6, the pressure increased greatly immediately after increasing the amount of emitted electrons, and the current increased to 1.5 mA.
  • the pressure reached a maximum of 9 ⁇ 10 ⁇ 4 Pa. This is considered to be because gas species including water remained even in the phosphor layer that was fired. Due to such pressure increase, gas molecules ionized between the electrodes increase, and the ion amount between the electrodes increases due to the ionized gas molecules.
  • the gas molecules enter the cathode electrode to generate secondary electrons, and the amount of ions between the electrodes is further increased by the generated secondary electrons. If the amount of charged particles generated by these two actions is greater than the amount lost to both electrodes or the surrounding space, the amount of charged particles flowing between the electrodes increases abruptly and spark discharge occurs. It is thought to do.
  • the portion where the amount of electron emission decreases instantaneously is considered to indicate that the electron emission film is damaged due to the occurrence of such a spark discharge (the current due to the spark discharge). The increase does not appear in the graph because it only maintains a time much shorter than the time resolution of the data recorded in FIG.
  • the ND / CNW film has a feature of gradually recovering to a certain degree even with respect to the deterioration of electron emission due to the occurrence of spark discharge, but does not recover completely. Therefore, also in FIG. 6, the amount of electron emission shows a decreasing tendency every time a spark discharge occurs.
  • Example 2 A pulse voltage was applied by a pulse high voltage power source between the cathode electrode and the anode electrode arranged in the vacuum chamber in the step (3). While measuring the pressure of the current amount and the vacuum chamber, by gradually increasing the peak voltage V p, I went to increase the average electron emission amount by 0.1 mA. The pulse power supply was driven at a repetition frequency of 500 Hz and a duty ratio of 0.5%. The results are shown in FIG.
  • FIG. 7 is a diagram showing the change over time in the pressure in the vacuum chamber and the electron emission amount when aging is performed by applying a pulse voltage before assembling the vacuum sealed container.
  • the peak current I p of the pulse current immediately after the voltage is changed is shown in the figure.
  • I p is not proportional to the average electron emission amount.
  • FIG. 7 as the voltage increases, a larger amount of electrons can be emitted instantaneously when a pulse voltage is applied than when a DC voltage is applied. Further, even when such electron emission was performed, an instantaneous decrease in the amount of electron emission due to the occurrence of spark discharge as shown in FIG. 6 was not observed.
  • FIG. 8 (a) is a figure which shows the mode of fluorescent substance light emission when a DC voltage is applied.
  • FIG. 8B is a diagram showing a state of phosphor emission when a pulse voltage is applied.
  • FIG. 8 (a) there are few sites that are emitting, whereas in FIG. 8 (b), there are many sites that are emitting.
  • FIG. 8A an electron-emitting device that emits planar electrons has variations in electron-emitting characteristics within the electron-emitting surface. Therefore, when the amount of electron emission is small with respect to the area of the electron-emitting device, fluorescence A part where electron irradiation is not performed on the body is generated.
  • pulse driving is suitable for aging for the purpose of releasing gas from the phosphor layer in the widest possible area.
  • Example 4 In Experiment 2, the funnel type FEL container which had been subjected to the aging treatment for 6 hours (see FIG. 7) was taken out from the vacuum chamber. After 24 hours, the funnel type FEL container was placed in the vacuum chamber again, evacuated, and a voltage was applied between the cathode electrode and the anode electrode with a direct current. The results are shown in FIG.
  • FIG. 9 is a diagram showing temporal changes in the pressure in the vacuum chamber and the electron emission amount when a DC voltage is applied after the aging shown in FIG.
  • the pressure in the vacuum chamber 6 ⁇ 10 ⁇ 5 Pa immediately after the start of electron emission is the highest value, and in the process of increasing the current to 1.5 mA by 0.2 mA in about 30 minutes thereafter, The pressure did not exceed 5 ⁇ 10 ⁇ 6 Pa.
  • This is a pressure about one tenth of the pressure shown in FIG. 6 in Experiment 1, and after aging for 6 hours performed by applying a pulse voltage, even after being exposed to the atmosphere once, from the phosphor layer. It was confirmed that the gas release rate was greatly reduced.
  • aging treatment (after-assembly aging treatment) was performed by applying a DC voltage while evacuating the vacuum sealed container through the exhaust pipe.
  • FEL was manufactured by performing vacuum sealing. The light emission state of the FEL was observed for each of (i) the case where the pre-assembly aging process was performed and (ii) the case where the pre-assembly aging process was not performed. The results are shown in FIGS. 10 (a) and 10 (b).
  • FIG. 10A is a diagram showing a light emission state of the FEL subjected to the pre-assembly aging process.
  • FIG.10 (b) is a figure which shows the light emission state of FEL which did not perform the aging process before an assembly. The light emission state of the FEL shown in FIG. 10A is better than that of the FEL shown in FIG.
  • the reason is considered as follows. That is, in the FEL in which the pre-assembly aging process was not performed, the gas release rate from the phosphor layer by the post-assembly aging process was high, while the exhaust conductance was small in the vacuum exhaust by the exhaust pipe, so that the pressure in the container was reduced by electron emission. It is considered that the pressure exceeded the allowable pressure for the device and the occurrence of spark discharge frequently caused damage to the electron-emitting device, and only a part of the phosphor layer could emit light. It is done.
  • the amount of gas emitted from the phosphor layer during the post-assembly aging process is small, so that the electron-emitting device was not damaged in the post-assembly aging process. it is conceivable that.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

Afin de réduire la durée de vieillissement toute en éliminant le risque d'endommagement d'un élément émetteur d'électrons, on effectue le vieillissement avant l'assemblage d'un récipient hermétique scellé à partir d'une pluralité d'éléments.
PCT/JP2011/075831 2010-12-21 2011-11-09 Procédé pour produire de la lumière par émission de champ et lumière par émission de champ WO2012086330A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010284813A JP2012133993A (ja) 2010-12-21 2010-12-21 電界放出型光源の製造方法及び電界放出型光源
JP2010-284813 2010-12-21

Publications (1)

Publication Number Publication Date
WO2012086330A1 true WO2012086330A1 (fr) 2012-06-28

Family

ID=46313612

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/075831 WO2012086330A1 (fr) 2010-12-21 2011-11-09 Procédé pour produire de la lumière par émission de champ et lumière par émission de champ

Country Status (3)

Country Link
JP (1) JP2012133993A (fr)
TW (1) TW201230140A (fr)
WO (1) WO2012086330A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000195428A (ja) * 1998-02-24 2000-07-14 Canon Inc 画像形成装置の製造方法及び製造装置
JP2001229828A (ja) * 2000-02-16 2001-08-24 Canon Inc 画像表示装置の製造法及び製造装置
JP2009087775A (ja) * 2007-09-28 2009-04-23 Kochi Prefecture Sangyo Shinko Center 電界放出型電極、その製造方法及びその製造装置
JP2010282956A (ja) * 2009-05-01 2010-12-16 Kochi Fel Kk 電界放出型光源

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000195428A (ja) * 1998-02-24 2000-07-14 Canon Inc 画像形成装置の製造方法及び製造装置
JP2001229828A (ja) * 2000-02-16 2001-08-24 Canon Inc 画像表示装置の製造法及び製造装置
JP2009087775A (ja) * 2007-09-28 2009-04-23 Kochi Prefecture Sangyo Shinko Center 電界放出型電極、その製造方法及びその製造装置
JP2010282956A (ja) * 2009-05-01 2010-12-16 Kochi Fel Kk 電界放出型光源

Also Published As

Publication number Publication date
JP2012133993A (ja) 2012-07-12
TW201230140A (en) 2012-07-16

Similar Documents

Publication Publication Date Title
JP3833489B2 (ja) 冷陰極放電装置
US9242019B2 (en) UV pipe
JP4849576B2 (ja) 陰極体及びそれを用いた蛍光管
JP4927046B2 (ja) 電子放出促進物質を有するＭｇＯ保護膜、その製造方法及び該保護膜を備えたプラズマディスプレイパネル
JP2987140B2 (ja) 電界放射型電子源およびその製造方法および平面発光装置およびディスプレイ装置および固体真空デバイス
JP2006127794A (ja) 画像表示装置
WO2012049975A1 (fr) Source de lumière à émission de champ
KR100858811B1 (ko) 전자 방출 표시 소자의 제조 방법
EP2620974B1 (fr) Dispositif d'éclairage à émission de champ et son procédé de fabrication
JP2012142109A (ja) 電界放出型光源
WO2012086330A1 (fr) Procédé pour produire de la lumière par émission de champ et lumière par émission de champ
JP2009238415A (ja) 深紫外蛍光薄膜および深紫外蛍光薄膜を用いたランプ
JP2008243727A (ja) 画像表示装置およびその製造方法
JPH10283930A (ja) 陰極線管の製造方法
JP4365277B2 (ja) 蛍光ランプ及びその製造方法
JP2007234592A (ja) 電気プラズマ放電デバイスのための金属電極
JP3106014B2 (ja) 電子線源を備える光源
EP3649669A1 (fr) Structure de cathode à émission de champ pour un agencement d'émission de champ
JP2004066225A (ja) ゲッタの組成物及び該ゲッタの組成物を利用した電界放出表示装置
US20060006789A1 (en) Electron-beam excited light-emitting devices
JP2005149779A (ja) 発光管、平面発光パネル、およびこの平面発光パネルを用いた画像表示素子
JP2005108564A (ja) 放電灯
JP2012138210A (ja) 電界放出型光源の製造方法及び電界放出型光源
JP2004146074A (ja) 電子線励起発光デバイス
JP3174456B2 (ja) 画像表示装置の製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11851228

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11851228

Country of ref document: EP

Kind code of ref document: A1