WO2012070648A1 - 発光素子実装用基体および発光装置 - Google Patents
発光素子実装用基体および発光装置 Download PDFInfo
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- WO2012070648A1 WO2012070648A1 PCT/JP2011/077212 JP2011077212W WO2012070648A1 WO 2012070648 A1 WO2012070648 A1 WO 2012070648A1 JP 2011077212 W JP2011077212 W JP 2011077212W WO 2012070648 A1 WO2012070648 A1 WO 2012070648A1
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- emitting element
- light
- region
- light emitting
- base body
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10106—Light emitting diode [LED]
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2054—Light-reflecting surface, e.g. conductors, substrates, coatings, dielectrics
Definitions
- the present invention relates to a light emitting element mounting substrate and a light emitting device for mounting a light emitting element such as an LED.
- LEDs light-emitting diodes
- Light emitting devices such as LEDs are widely used as light sources for general illumination or light sources for electric display panels, and also as backlights for image display devices using liquid crystals such as mobile phones, personal computers and televisions. .
- a metal part formed of Ag, an AgBi alloy, or an AgNd alloy on the surface side of a base body on which the light emitting element is mounted As a substrate for mounting such a light emitting element, for example, in Patent Document 1, a metal part formed of Ag, an AgBi alloy, or an AgNd alloy on the surface side of a base body on which the light emitting element is mounted. An example in which is provided is disclosed.
- the substrate for mounting a light emitting element disclosed in Patent Document 1 has a problem that the bonding strength between the substrate body and the metal part is low, and the metal part is easily peeled off.
- the present invention has been devised to solve the above-described problems, and provides a light-emitting element mounting substrate having a high bonding strength of a reflective layer and a light-emitting device using the same.
- the substrate for mounting a light-emitting element of the present invention is a substrate for mounting a light-emitting element for mounting a light-emitting element, and includes a substrate body made of a ceramic sintered body and a metal part containing silver, A region containing silver is present in a portion facing the metal portion via a joint portion.
- the light-emitting device of the present invention is characterized in that a light-emitting element is mounted on the light-emitting element mounting substrate.
- the substrate for mounting a light-emitting element of the present invention is a substrate for mounting a light-emitting element for mounting a light-emitting element, and includes a substrate body made of a ceramic sintered body and a metal part containing silver, Since a region containing silver is present at a portion facing the metal part via the joint part, the joint strength between the base body and the metal part is increased.
- the light-emitting device of the present invention has a light-emitting element mounted on the light-emitting element mounting substrate, a highly reliable light-emitting device can be provided.
- FIG. 5 is a cross-sectional view of an example in which a configuration of a light emitting element mounting substrate of the present embodiment is shown, and a metal part (reflective layer) that is not electrically connected to the light emitting element is provided on the first main surface of the substrate body. .
- the structure of the light emitting element mounting substrate of the present embodiment is shown, and the ceramic sintered body disposed on the first main surface of the substrate body so as to surround the mounting portion is not electrically connected to the light emitting element.
- the substrate for mounting a light emitting element of the present embodiment is a substrate for mounting a light emitting element for mounting a light emitting element, and includes a substrate body made of a ceramic sintered body and a metal part containing silver. It is important that a region containing silver exists in a portion facing the metal portion of the main body via the joint portion.
- the base body is made of a ceramic sintered body, it is excellent in mechanical strength and electrical insulation.
- FIG. 1 is a cross-sectional view showing a light emitting element mounting substrate according to the first embodiment.
- the light emitting element mounting substrate 1 of the first embodiment includes a base body 20 made of a ceramic sintered body and a mounting portion 5 for mounting the light emitting element on the first main surface 1a. Yes.
- the mounting part 5 includes first electrodes 2a and 2b containing silver, and electrode pads 8a and 8b (hereinafter sometimes simply referred to as electrode pads 8) provided on the first electrodes 2a and 2b.
- the light emitting element is mounted on the electrode pad 8a.
- the first electrodes 2 a and 2 b correspond to the metal part 2.
- the first electrodes 2a and 2b are connected to the second main surface 1b facing the first main surface 1a via through-hole electrodes 7a and 7b provided in through holes penetrating the inside of the base body 20. Is electrically connected to the second electrodes 6a and 6b deposited on the substrate.
- the first electrodes 2a and 2b are opposed to the first main surface 1a through the through-hole electrodes 7a and 7b provided in the through holes penetrating the inside of the base body 20.
- the second electrodes 6a and 6b attached to the second main surface 1b to be electrically connected are configured to be electrically connected. However, even if it is configured to be electrically connected using the end surface of the base body 20, no matter what. I do not care.
- silver is contained in a portion facing the first electrode of the substrate body 20 via a joint (an interface between the substrate body 20 and the first electrodes 2a and 2b). There is a region 4 to perform.
- the region 4 containing silver is present at a portion facing the first electrodes 2 a and 2 b of the base body 20 via the joint portion 3, the first electrodes 2 a and 2 b and the base body 20 are joined to each other.
- the strength can be improved, and the first electrodes 2a and 2b can be prevented from peeling from the base body 20.
- the region 4 containing silver is present at a portion facing the first electrodes 2a and 2b of the base body 20 via the joint portion 3, the first electrodes 2a and 2b are oxidized or sulfided. It can be suppressed, and the reflectance can be kept high.
- the first electrodes 2a and 2b are directly formed on the first main surface 1a.
- the region 4 can be easily formed.
- the manufacturing process can be reduced and the manufacturing cost can be reduced.
- the part of the base body 20 facing the first electrodes 2a and 2b which are the metal part 2 is cut with a laser or the like, the cross section is mirror-finished, and the surface is After vapor deposition, observation may be performed at a magnification of about 1000 to 2000 using a SEM (scanning electron microscope). Further, in order to confirm the components in this region, WDS analysis may be performed using an EPMA (electronic microanalyzer) equipped with a WDS (wavelength dispersive X-ray spectrometer).
- EPMA electromicroanalyzer
- WDS wavelength dispersive X-ray spectrometer
- FIG. 2 shows a structure of a light emitting element mounting substrate according to the second embodiment, and a reflective layer not electrically connected to the light emitting element is provided on the first main surface of the substrate body made of a ceramic sintered body.
- FIG. 2 shows a structure of a light emitting element mounting substrate according to the second embodiment, and a reflective layer not electrically connected to the light emitting element is provided on the first main surface of the substrate body made of a ceramic sintered body.
- the light emitting element mounting substrate 100 of the second embodiment is mounted to mount a substrate body 20 made of a ceramic sintered body and a light emitting element provided on the first main surface 1a. And a reflective layer 2c that is not electrically connected to the light emitting element.
- the reflective layer 2 c corresponds to the metal part 2.
- the reflective layer 2c and the mounting portion 5 are disposed with a gap 10 in order to maintain insulation, and the other configurations are the same as those in the first embodiment, and thus the description thereof is omitted.
- part which opposes through the junction part (interface of the base body main body 20 and the reflection layer 2c) with respect to the reflection layer 2c of the base body main body 20 contains silver. Region 4 exists.
- the presence of the silver-containing region 4 at a portion facing the reflective layer 2c of the base body 20 via the joint portion 3 can improve the bonding strength between the reflective layer 2c and the base body 20;
- the reflective layer 2c can be prevented from peeling from the base body 20.
- the presence or absence of the silver-containing region 4 at the portion facing the reflective layer 2c of the base body 20 via the joint portion 3 can suppress oxidation and sulfurization of the reflective layer 2c. Can be kept high.
- FIG. 3 shows a configuration of a light emitting element mounting substrate according to the third embodiment.
- silver is placed on the inner peripheral surface of the ceramic sintered body arranged so as to surround the mounting portion. It is sectional drawing of the example in which the reflection layer containing is provided.
- the light emitting element mounting substrate 200 is a mounting body in which the substrate body 20 is made of a ceramic sintered body and the mounting portion 5 for mounting the light emitting element is provided on the surface. It has a base member 20 ′ and a reflecting member 11 made of a ceramic sintered body arranged so as to surround the mounting portion 5, and a reflecting layer 2 d is provided on the inner peripheral surface of the reflecting member 11.
- the reflective layer 2 d corresponds to the metal part 2. Since other configurations are the same as those in the first embodiment or the second embodiment, description thereof will be omitted.
- the light emitting element mounting substrate 200 of the third embodiment the light emitting element is mounted and the light is emitted by including the reflecting member 11 that is disposed so as to surround the mounting portion 5 and has the reflection layer 2d on the inner peripheral surface.
- the reflection layer 2d contains silver, whereby a high reflectance is obtained.
- the reflecting member 11 has a shape having an inclined surface that becomes wider in the opening direction, but is a surface that is substantially perpendicular to the surface of the mounting portion 5 of the light emitting element mounting substrate 200.
- the shape which has this may be sufficient.
- the outer shape of the reflecting member 11 when viewed in plan from the opening direction side may be a circular shape, a quadrangular shape, a quadrangular shape with chamfered corners, or a polygonal shape.
- the reflecting member 11 may be either one integrally formed with the mounting base 20 'or one obtained by bonding the reflecting member 11 to the mounting base 20'.
- the bonding portion 3 is connected to the reflecting layer 2d provided on the inner peripheral surface. There is a region 4 containing silver at a portion opposed to each other.
- the presence of the silver-containing region 4 at the portion facing the reflective layer 2d of the reflective member 11 with the joint 3 interposed therebetween can improve the bonding strength between the reflective layer 2d and the reflective member 11 and reflect the reflection. It can suppress that layer 2d peels from the reflecting member 11.
- the region 4 containing silver is present at the portion facing the reflective layer 2d of the reflective member 11 with the joint 3 interposed therebetween, whereby the oxidation and sulfurization of the reflective layer 2d can be suppressed, and the reflectance Can be kept high.
- a region 4 containing silver is present at a portion of the base body 20 (mounting base body 20 ′) facing the first electrodes 2a and 2b via the joint portion 3. May be.
- the reflective layer 2c shown in FIG. 2 may be provided on the surface of the mounting substrate 20 '.
- the metal part 2 includes the first electrodes 2a and 2b, the reflective layer 2c, and the reflective layer 2d.
- the region containing silver is sufficient if the base body 20 has a region containing silver.
- a region containing silver is formed by diffusing silver from the metal part 2.
- the base body 20 may be manufactured using a material containing silver.
- the base body 20 in the first to third embodiments contains magnesium, the metal part 2 contains silver as a main component and magnesium and bismuth as subcomponents, and the region 4 contains silver, It is preferable to contain magnesium and bismuth.
- the metal part 2 of the light emitting element mounting substrate 1, 100, 200 of this embodiment contains silver as a main component, when the light emitting element is mounted and light is emitted, a part of the light is the metal part 2. The surface is irradiated and reflected.
- the metal part 2 is mainly composed of silver, a higher reflectance can be obtained.
- the main component of the metal part 2 of the light emitting element mounting bases 1, 100 and 200 of the present embodiment refers to a component that occupies 90% by mass or more with respect to 100% by mass of the total component of the metal part 2.
- region 4 contain silver, magnesium, and bismuth which are the same components, they are firmly joined.
- the base body 20 and the metal part 2 contain magnesium, so that in the region 4, the magnesium of the base body 20 and the magnesium of the metal part 2 tend to aggregate near the joint 3, and the joint strength tends to be higher. .
- the region in the first to third embodiments includes a first region on the metal part 2 side and a second region adjacent to the first region, and the first region contains magnesium from the second region.
- the second region preferably contains more bismuth than the first region.
- FIG. 4 is a cross-sectional view showing an example in which a part of the joint portion between the light emitting element mounting substrate and the metal portion of the present embodiment is partially enlarged.
- a region 4 of the light-emitting element mounting substrate 1, 100, 200 according to the present embodiment shown in FIG. 4 includes a first region on the metal part 2 side and a second region adjacent to the first region. This region contains more magnesium than the second region, and the second region consists of the first region 4a and the second region 4b containing more bismuth. Incidentally, pores such as pinholes existing on the surface 1a of the base body 1, 100, 200 are shown as recesses 1d.
- the region 4 of the light emitting element mounting substrate 1, 100, 200 of the present embodiment has the first region 4a containing more magnesium than the second region on the metal part 2 side, whereby the substrate body 20 and the magnesium are separated.
- the metal part 2 including it is firmly joined.
- the region 4 since the region 4 has the second region 4b containing more bismuth than the first region, bismuth easily enters the inside 1c of the base body 20 which is a ceramic sintered body together with silver, and the base body 20 and the metal The joint strength with the part 2 tends to be higher.
- the first electrodes 2a and 2b are plated in the manufacturing process of the light-emitting element mounting bases 1, 100 and 200, the first electrodes 2a and 2b are formed as a pretreatment. Acid cleaning of the substrate body 20 is performed.
- the recesses 1 d are filled with silver, in the acid cleaning process of the base body 1 including the base body 20, the acid by the acid cleaning is recessed. It can suppress that it remains in 1d, and can suppress that the recessed part 1d becomes a starting point of corrosion and corrosion of the metal part 2 advances. As a result, the reflectance of the metal part 2 tends to be maintained high.
- the region 4 contains a large amount of magnesium or bismuth means that in the image obtained by WDS analysis of the region 4 using EPMA, the target portion is compared with the other portions from the setting condition of the color intensity of element mapping. When the color intensity is high, it is judged that the element is large. For example, what is necessary is just to judge that the presence location of the element of interest contains many things whose element detection level is 1.3 times or more compared with other locations.
- the region 4 is made of EPMA (electronic microanalyzer) equipped with a WDS (wavelength dispersive X-ray spectrometer). WDS analysis may be performed using EPMA (electronic microanalyzer) equipped with a WDS (wavelength dispersive X-ray spectrometer). WDS analysis may be performed using EPMA (electronic microanalyzer) equipped with a WDS (wavelength dispersive X-ray spectrometer). WDS analysis may be performed using EPMA (electronic microanalyzer)
- the thickness t is preferably 5 ⁇ m or more and 15 ⁇ m or less.
- the thickness t of the region 4 of the substrate body 20 is 5 ⁇ m or more, sufficient bonding strength can be secured by bonding the substrate body 20 and the metal part 2 via the region 4. Further, if the thickness t of the region 4 is 15 ⁇ m or less, the firing temperature for forming the metal part 2 is high, so that the bleeding of the end of the metal part 2 due to the melting of the metal part 2 can be suppressed.
- the first portion is formed by the gap 10 between the reflective layer 2c that is the metal portion 2 and the first electrodes 2a and 2b, as shown in FIGS.
- the electrical insulation of the electrodes 2a and 2b can be easily ensured.
- the region 4 is, for example, a photograph of an element mapping image prepared by cutting a portion of the base body 20 where the metal part 2 is present in the thickness direction and performing a WDS analysis of the cross section using EPMA.
- the portion detected when the interstitial level is 5 or more and 20 or less may be the region 4.
- the thickness of the first region 4a may be measured at a portion where the magnesium interspersed level is 5 or more and 20 or less and the magnesium is aggregated.
- regions 4a and 4b to measure the thickness of arbitrary several places, for example, five places, and let it be the average value of those values.
- the thickness of the second region 4b can be calculated by subtracting the thickness of the first region 4a from the thickness of the region 4.
- the metal part 2 is mainly composed of silver, and preferably contains at least magnesium and bismuth as subcomponents.
- palladium, copper, nickel, strontium, calcium, zirconium You may contain at least 1 metal among titanium, molybdenum, tin, zinc, and aluminum.
- the silver content is preferably 97% by mass or more and 99.5% by mass or less.
- the metal part in the first to third embodiments preferably has a total content of magnesium and bismuth of 0.5 to 3.0% by mass.
- the thickness t of the region 4 tends to be 5 ⁇ m or more and 15 ⁇ m or less, which is the above range.
- the metal part 2 is bonded to the metal part 2 via the region 4 to ensure sufficient bonding strength, and the firing temperature for forming the metal part 2 is high, so that the metal part 2 is melted. It is possible to suppress bleeding at the end of the.
- the ceramic sintered body used for the substrate body 20 in the first to third embodiments may be a ceramic sintered body such as an aluminum oxide sintered body, a zirconium oxide sintered body, or a mullite sintered body. These ceramic sintered bodies preferably contain silicon oxide (SiO 2 ) and magnesium oxide (MgO) as subcomponents.
- an aluminum oxide sintered body is particularly preferable.
- the main component is aluminum oxide (Al 2 O 3 ), and silicon oxide and magnesium oxide are preferably contained as subcomponents. Further, calcium, zirconium and barium oxides may be contained as accessory components.
- the base body in the first to third embodiments contains aluminum oxide (Al 2 O 3 ) as a main component in an amount of 94% by mass to 97% by mass, and silicon oxide (SiO 2 as a subcomponent). ) And magnesium oxide (MgO).
- Al 2 O 3 aluminum oxide
- SiO 2 silicon oxide
- MgO magnesium oxide
- the base body 20 contains aluminum oxide as a main component in an amount of 94% by mass or more and 97% by mass or less, and when it contains silicon oxide and magnesium oxide as subcomponents, barium, zirconium, etc., which have high material costs, etc.
- silicon oxide has the function of enhancing sinterability
- magnesium oxide can suppress the growth of aluminum oxide particles and suppress the generation of abnormally large particles. Even when firing at a temperature of 1420 to 1540 ° C., which is lower than the temperature, the sinterability is sufficiently enhanced, the mechanical strength is high, and the cost of the base body 20 can be easily reduced.
- the metal portion 2 is formed on the base body 20.
- a glass phase (grain boundary phase) 13 made of silicon oxide or the like is formed between the aluminum oxide particles 12, the metal portion 2 is formed on the base body 20.
- the metal component contained in the paste travels through the glass phase 13 from the main surface and diffuses into the interior 1c of the base body 20; It becomes easy to increase the bonding strength with the base body 20.
- the average crystal grain size of the aluminum oxide particles on the surface side on which the light emitting element of the base body 20 in the first to third embodiments is mounted is 2.0 ⁇ m or less.
- the surface layer side means a part on the mounting portion 5 side when the base body 20 is equally divided into three in the thickness direction.
- the crystal grain size is measured by mirror-finishing the surface of the substrate 1, performing fire etching at a temperature lower by 50 to 100 ° C. than the firing temperature of the substrate body 20, and using a scanning electron microscope (for example, JSM manufactured by JEOL Ltd.). -7001F), taking images at a magnification of 1000 to 3000 times, creating image data, using an image analyzer (for example, WinOFROOF manufactured by Mitani Corporation) to determine the particle size of each ceramic particle, and averaging the particle size What is necessary is just to calculate and obtain a value. Whether or not the ceramic particles are aluminum oxide particles may be confirmed by elemental analysis using an EDS (energy dispersive X-ray spectroscopy) method.
- EDS energy dispersive X-ray spectroscopy
- the light emitting element mounting substrate of the present embodiment has the first electrodes 2a and 2b formed on the first main surface and the through holes on the second main surface facing the first main surface of the substrate body. It is preferable to include second electrodes 6a and 6b containing silver which are conducted by electrodes, and a region (not shown) formed between the base body and the second electrodes 6a and 6b is preferably less than 1 ⁇ m. .
- FIG. 5 is a conceptual diagram showing a state in which incident light to the first main surface side of the light emitting element mounting substrate of the present embodiment is scattered.
- the first main surface is formed on the second main surface 1b facing the first main surface 1a of the substrate body 20 or the mounting member 20 ′.
- the second electrodes 6a and 6b containing silver which are electrically connected by the through-hole electrode 7 and the first electrodes 2a and 2b formed on the first electrode 2a and 2b, and a joint portion between the base body 20 and the second electrodes 6a and 6b 3, if a silver-containing region (not shown) is present with a thickness of less than 1 ⁇ m, the transmitted light 16 is likely to be reflected by the silver particles in this region toward the first main surface 1 a side.
- the diffused reflected light 18a emerging from the surface of the main surface 1a is increased, and the reflectance of the light emitting element mounting base 1, 100, 200 tends to be higher.
- the region (not shown) formed between the base body 20 and the second electrodes 6a and 6b is 1 ⁇ m. It is preferable to make it less than. It is more preferable that no region is formed between the base body 20 and the second electrodes 6a and 6b.
- the composition of the second electrodes 6a and 6b is preferably such that the main component is silver and at least one of palladium, platinum, zirconium, aluminum or zinc is a subcomponent.
- the thickness of the region containing silver existing on the bonding portion side of the base body 20 and the second electrodes 6a and 6b can be less than 1 ⁇ m.
- FIG. 6 is a conceptual diagram showing a state in which light of the light emitting element mounting substrate of the present embodiment is scattered.
- the base body 20 constituting the light-emitting element mounting bases 1, 100, 200 of this embodiment has aluminum oxide particles 12, silicon oxide, etc. when the cross section is viewed at the crystal size level. And a glass phase (grain boundary phase) 13 and pores 14.
- the interface 12a is formed between the aluminum oxide particles 12 and the glass phase 13
- the interface 14a is formed between the pores 14 and the glass phase 13.
- the irradiation light 15 irradiated to the first main surface 1a of the light emitting element mounting base 1, 100, 200 of the present embodiment includes the regular reflection light 17a reflected by the base main body 1, 100, 200, and the base main body 20. Travels as incident light 16, passes through the second main surface 1 b opposite to the first main surface 1 a, and emerges as transmitted light 21.
- a part of the irradiating light 15 is reflected by the first main surface 1a in the opposite direction at the same angle with respect to the incident angle and reflected by the first main surface 1a in an unspecified direction.
- the remaining diffused reflected light 18 enters the interior 1c of the base body 20 and becomes incident light 16 that passes through at least one of the aluminum oxide particles 12, the pores 14, and the glass phase 13.
- the incident light 16 is partially diffused reflected light 18d at the interface 12a between the aluminum oxide particles 12 and the glass phase 13 in the substrate, and between the pores 14 and the glass phase 13.
- Diffuse reflected light 18e is generated at the interface 14a, and the remaining light further travels in the interior 1c of the substrate body 20, and the interface 13a between the aluminum oxide particles 12 and the glass phase 13, the pores 14 and the glass phase 13 Diffuse reflected light 18e is produced at the interface 14a and becomes reflected light from the first main surface 1a. A part of the light becomes transmitted light 21 that passes through the second main surface 1b.
- the irradiation light 15 applied to the first main surface 1a of the base body 20 becomes the regular reflection light 17a and the diffuse reflection light 18a on the first main surface 1a.
- the number of pores 14 existing on the first main surface 1a side is greatly increased as compared with the conventional light emitting element mounting substrate 1, and the presence of the pores 14 increases toward the center in the thickness direction. Increasing the number increases the chance that the incident light 16 becomes diffusely reflected light 18e at the interface 14a between the pores 14 and the glass phase 13, and the diffused reflected light 18 from the first main surface 1a can be increased and reflected. The rate is likely to improve.
- the base body 20 made of these ceramic sintered bodies has an equivalent circle diameter of 0.8 ⁇ m or more in a portion of the surface area of 9.074 ⁇ 10 5 ⁇ m 2 in a portion where the region 4 of the first main surface 1a does not exist.
- the porosity is 2.5% or more and 4.5% or less
- the number of pores is 9000 or more and 11000 or less
- the cumulative relative frequency of the equivalent circle diameter of 1.6 ⁇ m or less in the pore distribution is 75% or more.
- the base body 20 made of such a ceramic sintered body since the pores 14 exist under the above-described conditions, the irradiation light irradiated to the ceramic sintered body is efficiently reflected by the pores 14, and the ceramic sintered body Reflectivity tends to be high. Further, the presence of the pores 14 under the above-mentioned conditions tends to maintain a high mechanical strength of the ceramic sintered body.
- the porosity, the number of pores, and the circle equivalent diameter of the surface area of 9.074 ⁇ 10 5 ⁇ m 2 in the region where the region 4 of the first main surface 1a of the base body 20 of the present embodiment does not exist is 0.8.
- Cumulative relative power of 1.6 ⁇ m or less equivalent circle diameter in pore distribution of ⁇ m or more is obtained by mirror-polishing the surface of the substrate body 20 to a depth of 10 ⁇ m from the surface, and capturing a metal microscope image with a magnification of 100 times with a CCD camera. What is necessary is just to digitize using an image analyzer.
- a microscope made by Keyence Corporation (model name: VHX-500) is used for the metal microscope
- a digital sight made by Nikon Corporation (model name: DS-2Mv) is used for the CCD camera
- software for image analysis is used. May be calculated by using Mitani Shoji Co., Ltd. (model name: Win ROOF) with a circle equivalent diameter of 0.8 ⁇ m as a threshold for a surface area of 9.074 ⁇ 10 5 ⁇ m 2 .
- the base body in the first to third embodiments has a grain boundary phase formed between the crystal grains of the aluminum oxide particles on the surface side on the mounting portion 5 side, and the average width of the grain boundary phase is It is preferable that it is 2 nm or less.
- the base body 20 in the first to third embodiments has a grain boundary phase 13a formed between crystal grains of the aluminum oxide particles 12 on the surface side on the mounting portion 5 side, and the average of the grain boundary phases 13a Since the width is 2 nm or less, when the incident light 16 enters the grain boundary phase 13a of the inside 1c of the base body 20, the diffuse reflection light 18e is repeatedly reflected between the interface 12b and the interface 12c, The reflectance tends to increase.
- FIG. 7 is a conceptual diagram showing a state in which diffusely reflected light is scattered between grain boundary phases on the surface side on the mounting portion 5 side of the base body 20 in the light emitting element mounting substrate of the present embodiment. It should be noted that portions common to FIG. 6 and portions related to the pores 14 will be omitted.
- incident light 16 traveling from the surface of the base body 20 on the mounting portion 5 side is an interface between the aluminum oxide particles 12 and the grain boundary phase 13a in the interior 1c on the surface side of the base body 20.
- a part of the light is specularly reflected light 17b and diffusely reflected light 18d
- the remaining incident light 16 further travels in the interior 1c on the surface side of the substrate body 20, and is adjacent to the next crystal grain and grain boundary.
- a specularly reflected light 17c and a diffusely reflected light 18e are produced which are reflected in the opposite direction at the same angle with respect to the incident angle of the remaining incident light 16 traveling at the interface 12c with the phase 13a.
- the diffusely reflected light 18e is repeatedly reflected at the grain boundary phase 13a between the interface 12b and the interface 12c and is emitted as diffusely reflected light 18e from one surface of the substrate.
- the light emitting element mounting substrate 1 of this embodiment has a grain boundary phase 13a between crystal grains of aluminum oxide, and the average width of the grain boundary phase 13a is preferably 2 nm or less.
- the substrate body 20 has a grain boundary phase 13a between crystal grains of aluminum oxide, and the average width of the grain boundary phase 13a is 2 nm or less (not including 0 nm). 7), for example, in the case of FIG. 7, since the grain boundary phase 13a exists between the interfaces of the adjacent aluminum oxide particles 12d and 12e, the incident light 16 enters the grain boundary phase 13a. In this case, the reflection of light is repeated between the interface 12b and the interface 12c, and the diffuse reflection light 18 increases, and the reflectivity tends to increase.
- the method for obtaining the average width of the grain boundary phase 13a formed between the crystal grains of aluminum oxide is as follows.
- FIG. 8 is a conceptual diagram showing the grain boundary phase 13a formed between the aluminum oxide particles 12d and 12e and the aluminum oxide particles 12 of the light emitting element mounting substrate 1 of the present embodiment.
- the base body is cut with a laser or the like, the cross section is mirror-finished, and the surface is magnified from 40,000 times to 60,000 times as the magnification at which the aluminum oxide particles 12 can be observed by TEM observation, between the crystal particles 12d and 12e.
- an arbitrary average portion is measured in the longitudinal width 19 ′ of the grain boundary phase 13a.
- the same measurement may be performed at 10 places, and the average thereof may be set as the average width of the grain boundary phase 13a.
- the ceramic sintered body to be the base body 20 will be described.
- the ceramic sintered body contains aluminum oxide as a main component, aluminum oxide (Al 2 O 3 ), silicon oxide (SiO 2 ), and magnesium oxide (MgO) having an average particle size of 1.4 to 1.8 ⁇ m.
- Al 2 O 3 aluminum oxide
- SiO 2 silicon oxide
- MgO magnesium oxide
- the mixed powder weighed so that the total content of each powder becomes 100% by mass is put into a rotary mill together with water and mixed using high-purity alumina balls.
- the average width of the grain boundary phase 13 formed between the aluminum oxide crystal particles can be adjusted by adjusting the weighing of the sintering aid.
- the ceramic sintered body is mainly composed of zirconium oxide
- magnesium oxide and aluminum oxide are used as sintering aids. It is only necessary to select at least one of magnesium, silicon oxide, calcium oxide, and yttrium oxide, and weigh it so that the main component is 90% by mass or more and the sintering aid is the balance.
- the alumina balls are mixed with a rotary mill to obtain a slurry. If the amount of the binder added is in the range of 4 to 8% by mass, the molded body has good strength and flexibility, and the binder can be sufficiently degreased during firing.
- a sheet is formed by a known doctor blade method, or a ceramic sheet is formed by a roll compaction method using a granulated material produced using a spray dryer.
- an unfired molded body is produced by processing with a mold for forming a product shape or laser processing.
- the molded body may be a single body of the base body on which the light emitting element is finally mounted, but it is more preferable to form a multi-piece molded body in consideration of mass productivity.
- the base body 20 includes the reflective member 11
- a powder press A method of integrally molding the reflecting member 11 and the base body 20 by molding can be employed.
- the ceramic sheets are produced by molding a green or molded body by laser or laser processing, and the same slurry as that described above is adhered.
- a molded body that becomes the light emitting element mounting substrate 200 having the reflecting member 11 can be manufactured by pasting sheets together as a liquid.
- a sintered body can be produced by firing at 1420 to 1540 ° C., firing at 1350 to 1550 ° C. when the main component is zirconium oxide, and 1450 to 1650 ° C. when the main component is mullite. Further, the maximum firing temperature may be appropriately adjusted depending on the mass% of the main component.
- the crystal grain size and the average width of the grain boundary phase 13a can be adjusted by further adjusting the firing time.
- a paste-like material (hereinafter referred to as a thick film paste) for forming the metal part 2 uses a metal powder containing silver as a main component and containing magnesium and bismuth, and has a silver content of 97-99.5.
- the total content of magnesium and bismuth is preferably 0.5 to 3.0% by mass.
- the average particle size of these metal powders may be about 0.3 to 0.8 ⁇ m.
- the binder for example, ethyl cellulose can be used, and as the solvent, for example, ester alcohol can be used.
- the ester alcohol may be added in an amount of about 15 to 25% by mass when the total content of the metal powder is 100% by mass.
- the magnesium and bismuth contents of the thick film paste are preferably 0.05 to 0.2 mass% and 0.45 to 2.8 mass%, respectively. If the contents of magnesium and bismuth in the thick film paste are 0.05 to 0.2% by mass and 0.45 to 2.8% by mass, respectively, the thickness of the region 4 can be set to 5 ⁇ m or more and 15 ⁇ m or less.
- the deposition of the thick film paste on the base body 20 for forming the metal part 2 can be performed by a known screen printing method or a dispenser method.
- a nylon screen may be used in the base body 200.
- the thickness of the thick film paste is preferably applied so that the thickness after the thick film baking is about 10 to 50 ⁇ m.
- drying is performed at a temperature of 80 to 100 ° C. for about 1 hour, and then the maximum temperature is 800 to 900 ° C. and the baking time is 0.3 to 1.3 hours. Can be formed by firing.
- the thickness t of the region can also be controlled by the contents of magnesium and bismuth, but if these contents are too large, the reflectance and strength will be affected, so this total content and each content remain within the aforementioned range, It is desirable to set the thickness t of the region 4 to a desired value by a combination of adjustment of the firing temperature.
- the maximum firing temperature is less than 800 ° C.
- the thickness t of the region 4 is less than 5 ⁇ m, and the effect exerted by the region 4 is reduced.
- the maximum temperature exceeds 900 ° C., silver that is the main component of the metal part 2 may be melted. Therefore, the maximum temperature for firing is preferably 800 to 900 ° C.
- acid cleaning is performed as a pretreatment for forming plating on electrode pads 8a and 8b described later. This is performed for degreasing or removing the oxide film so that the plating is firmly attached to the base body 1.
- alkali cleaning with a caustic soda diluent or the like can be performed before the acid cleaning. The reason why the acid cleaning is performed before plating is that the plating solution is acidic.
- hydrochloric acid For acid cleaning, use hydrochloric acid, nitric acid, sulfuric acid or the like, and immerse in a 1-20% solution at room temperature for about 1 minute.
- the acid concentration is 1 to 20%, it is easy to degrease and remove oxides on the surface, and silver is not easily corroded.
- the substrate is washed with pure water or tap water or ultrasonically washed and dried. If there is residual acid on the surfaces of the electrode, the reflective layer, the reflective member, and the substrate, it will be attacked by the acid. Therefore, it is desirable to perform immersion cleaning in water several times by changing the cleaning tank, and then rinse with water.
- the light emitting element mounting substrate 1,100, 200 of this embodiment can be manufactured.
- a region containing silver is formed by diffusing silver from the metal portion 2
- a region facing the portion to be the metal portion 2 contains silver.
- the base body 20 may be manufactured by using a material that does not contain silver, and by using a material that does not contain silver.
- FIG. 9 is a cross-sectional view showing an example of the configuration of the light emitting device 30 in which the light emitting element 31 is mounted on the mounting portion 5 of the light emitting element mounting substrate 1 of the present embodiment.
- the light emitting device 30 of the example shown in FIG. 9 is provided in a mounting portion 5 that includes electrode pads 8a and 8b and first electrodes 2a and 2b formed on a base body 20 that is the light emitting element mounting base 1 of the present embodiment.
- a light emitting element 31 is mounted. Furthermore, it has the area
- An electrode (not shown) of the light emitting element 31 and the electrode pad 8b are electrically connected by a bonding wire 32.
- the electrode pad 8a and the light emitting element 31 are directly electrically connected, but may be joined by bonding wires 32 or by solder bumps (not shown).
- the light emitting element 31, the electrode pads 8a and 8b, and the first electrodes 2a and 2b are covered with a sealing member 33 made of resin or the like.
- the sealing member 33 has both the protection of the light emitting element 31 and the function of a lens.
- the light emitting device 30 is obtained by mounting the light emitting element 31 on the mounting portion 5 of the light emitting element mounting substrate 1 of the present embodiment.
- FIG. 10 is a cross-sectional view showing an example of the configuration of another light emitting device in which the light emitting element 31 is mounted on the light emitting element mounting substrate 100 of the present embodiment.
- the base body 20 is provided with a reflective layer 2 c that is not electrically connected to the light emitting element 31 b, and a portion that faces the reflective layer 2 c through the joint 3. And has a region 4 containing silver.
- the light emitting device 40 is obtained by mounting the light emitting element 31 on the mounting portion 5 of the light emitting element mounting substrate 100 of the present embodiment. Furthermore, if the mounting portion 5 has the same configuration as that of FIG. 9, the light emitting device 40 having high reflectance and high bonding strength of the metal portion 2 can be obtained.
- FIG. 11 is a cross-sectional view showing an example of the configuration of still another light emitting device in which the light emitting element 31 is mounted on the light emitting element mounting substrate 200 of the present embodiment.
- the light emitting device 50 of the example shown in FIG. 11 has a mounting base 20 ′ provided with a mounting portion 5 for mounting a light emitting element on the surface, and a reflecting member 11 arranged so as to surround the mounting portion 5.
- a reflective layer 2d containing silver is bonded to the inner peripheral surface of the reflective member 11, and a region 4 containing silver is provided at a portion facing the reflective layer 2d via the bonded portion. ing.
- the light emitting device 50 is obtained by mounting the light emitting element 31 on the mounting portion 5 of the light emitting element mounting substrate 200 of the present embodiment.
- the mounting portion 5 has the same configuration as that of FIG. 9, the light emitting device 50 having high reflectance and high bonding strength of the metal portion 2 can be obtained.
- the effect of the substrate body 20 as a light-emitting element mounting substrate in which the region 4 is present at a portion facing the metal portion 2 via a joint portion was confirmed.
- a sintered body to be the base body 20 was produced by the following method.
- Al 2 O 3 aluminum oxide
- SiO 2 silicon oxide
- MgO magnesium oxide
- CaO calcium oxide
- an acrylic resin binder was added thereto, and a high-purity alumina ball was further mixed with a rotary mill to obtain a slurry.
- the additive amount of the binder was 6% by mass with respect to 100% by mass of the mixed powder.
- the obtained slurry was formed into a sheet shape by a known doctor blade method, and this sheet was subjected to laser processing to produce a molded body having dimensions after firing of 10 mm in length, 10 mm in width, and 0.635 mm in thickness. .
- a molded body having dimensions after firing of 30 mm in length, 10 mm in width, and 0.8 mm in thickness was also produced.
- a pusher-type tunnel furnace was used and fired in an oxidizing atmosphere in the atmosphere with a maximum temperature of 1530 ° C. and a firing time of 9 hours.
- a zirconia powder containing 3 mol% of yttria as a stabilizer is prepared, water is added to the raw material of this ceramic, pulverized and mixed with a ball mill, and a slurry is prepared. Polyethylene glycol was added, and powder was prepared by a spray dryer. And the compact
- the obtained sintered body has an average particle diameter of zirconium oxide (ZrO 2 ) of 0.4 ⁇ m, and the composition is 91.3% by mass of zirconium oxide (ZrO 2 ), 5.5% by mass of yttrium oxide (Y 2 O 3 ), and Aluminum oxide (Al 2 O 3 ) was 1.0% by mass, and as other inevitable impurities, hafnium oxide (HfO 2 ) was 2.0% by mass, and iron oxide (Fe 2 O 3 ) was 0.2%.
- the metal part 2 was formed on the first main surface 1a of the base body 20.
- a thick film paste for forming the metal part 2 a thick film paste (product name: NP-4301L) manufactured by Noritake Co., Ltd. was used as the thick film paste for forming the metal part 2.
- the main components of this paste component are 99% by weight of silver, 0.1% by weight of magnesium, 0.5% by weight of bismuth and 0.3% by weight of copper, and 0.1% by weight as other components.
- the average particle size of the metal powder is 0.4 ⁇ m.
- the binder 17.6% by mass of ethyl cellulose and a mixed solvent was added when the total content of the metal powder was 100% by mass.
- this paste A this paste is referred to as paste A.
- the base body 20 is a sample No.
- a pressure film paste product name: MH-1063
- This thick film paste has a silver content of 98 mass% and contains boron, zirconium, aluminum and zinc metals as other components.
- the average particle size of the metal powder is 0.4 ⁇ m.
- the binder is obtained by adding about 15% by mass of a solvent such as ethyl cellulose and ester alcohol when the total content of the metal powder is 100% by mass.
- this paste B this paste is referred to as paste B.
- a stainless steel screen is mounted on the first main surface 1a of the base body 20, and the thick film paste is printed by moving the squeegee so that the size after baking is 10 mm square and the average thickness is 10.5 ⁇ m. A metal film was formed.
- the substrate on which the metal film was formed was dried at a temperature of 80 ° C. for 1 hour.
- the sample was acid-washed by the same method as the acid treatment before the plating treatment of the light emitting element mounting substrate. Note that the number of samples is 25.
- nitric acid concentration solution a 1% nitric acid concentration solution was prepared using Takasugi Pharmaceutical Co., Ltd. product name: dilute nitric acid (67.5%) and ion-exchanged water.
- the nitric acid concentration is set to 1% in order to minimize the attack of the metal part 2 by acid cleaning.
- the sample was immersed in the prepared nitric acid solution at room temperature for about 1 minute.
- the sample is immersed in the order of the primary washing tank and the secondary washing tank, and finally the shower water washing is performed.
- the sample is washed at a temperature of about 80 ° C. The drying process was performed for about 30 minutes.
- ion-exchange water was used for each washing
- the reflectance of light in the base body 20 is measured using a spectrophotometer (model name: UV-315) manufactured by Shimadzu Corporation and an integrating sphere unit (model name: ISR-) as a measuring instrument (not shown). 3100), a 50W halogen lamp and deuterium lamp as the light source, a wavelength range of 200 to 1000 nm, a measurement range of diffuse reflectance (7 ⁇ 9 mm at 20 nm slit), and no filters or masks Measured using barium sulfate powder as a reference for reflectance.
- the number of measurement samples was measured for one portion of the first main surface 1a for each 10 base body 20 having a thickness of 0.635 mm, and the average value at a wavelength of 500 nm was used as data.
- the state of the region 4 was analyzed on the cross section on the first main surface 1a side of the sample on which the metal part 2 was formed.
- An arbitrary portion of the base body 20 on which the metal part 2 is formed is cut by a laser, the cross section is mirror-finished, and the polished surface is observed with a metal microscope 1000 times to obtain a region 4, a first region 4a and a second region.
- the presence or absence of 4b and the thickness t were measured.
- the presence / absence of the region 4 is defined as having a thickness t of 0.1 ⁇ m or more and not having a thickness of less than 0.1 ⁇ m because the region 4 does not substantially exist.
- regions 4a and 4b were prepared in advance by carbon vapor deposition, and a component analysis of a 66 ⁇ m square area was performed. It was confirmed that the first region 4a contained a large amount of magnesium, and the second region 4b contained a large amount of bismuth. The number of samples was 10 each, and the average value was used as data.
- the measuring method is the same as the measuring method of the reflectance of the base body 20 described above.
- the number of samples was 10, and the average value was used as data.
- FIG. 12 is a cross-sectional view showing a method for measuring the bonding strength with respect to the conductor 34 deposited on the surface of the base body 20 of the present embodiment.
- a solder 34 having a Sn-Pb (6: 4 solder) system with 2% by mass Ag is used on the surface of the conductor 34 (metal part 2).
- Flux is a mixture of a rosin-based synthetic resin and a ketone and an alcohol-based solvent.
- Tamura Kaken Co., Ltd. (trade name: XA-100), plating with a diameter of 0.6 mm at a temperature of 225 ⁇ 5 ° C.
- Conductive wire (Sn plating on copper wire) 35 was soldered to conductor 34.
- the plated conducting wire 35 was pulled at a speed of 7.62 mm / min, and the strength when the conductor 34 peeled from the base body 20 was measured to obtain the joint strength of the conductor to the base body 20.
- This test apparatus used a die sharing tester (model number: 520D) manufactured by ANZA-TECH. The number of measurements was measured for 10 samples, and the average value was obtained. It should be noted that the case where the plating conductor 36 peeled off from the conductor 34 was excluded from the data, and the data obtained when the conductor 34 peeled off from the base body 20 was taken as the bonding strength of the conductor 34.
- the measurement of the bonding strength of these conductors 34 was performed before the constant temperature and high humidity storage test and for the constant temperature and high humidity storage test 150, 500 and 1000 hours.
- the sample used was the same base body 20 as the sample for bonding strength measurement, the length and width were 10 mm square, and the same thick film as that at the time of bonding strength measurement was formed on the entire surface.
- the test conditions were a no-load test in which the temperature was 85 ° C., the humidity was 85%, the atmosphere was atmospheric, and the electrodes were not energized.
- the samples having the same reflectivity were repeatedly used as the measurement samples after each standing time, but the bonding strength was determined by using the same group of samples for destructive inspection. In all cases, the average value of 10 samples was used as data.
- the sample No. 102A has no silver-containing region 4. 101B and sample no. It was found that the reflectance can be maintained higher when compared between samples having the same main component as 102B.
- Sample No. 101A and sample no. 102A is Sample No. 101B and sample no. Compared with samples of the same main component as 102B, it was found that the bonding strength was higher and the bonding strength could be maintained for a long time.
- the light reflectance in a state where the metal part 2 is not formed on the main surface of the base body 1 is a sample No. in which the base body 20 is made of aluminum oxide.
- 101A has a reflectance of 92% or more at a wavelength of 500 nm and sample No. 1 made of zirconium oxide. Compared to 102A, relatively good results were obtained.
- a sintered body is produced by changing the composition of the base body 20 and the firing temperature, the metal part 2 is formed on the obtained sintered body, and the metal part 2 of the base body 20 is joined to the base part 20 via a joint.
- the effect of the bonding strength and the reflectance of the substrate for mounting a light emitting element in which the region 4 is present at the facing portion was investigated.
- the sintered body to be the base body 20 of the present embodiment is manufactured by the same method as in Example 1, except that the content of aluminum oxide (Al 2 O 3 ) is in the range of 93.5 to 97.5% by mass, and silicon oxide (SiO 2 2 ) The amounts of magnesium oxide (MgO) and calcium oxide (CaO) were each changed. The maximum temperature was 1400-1550 ° C., the firing time was 6-9 hours. 1 to 10 were produced. The dimensions of the sintered body are the same as in Example 1.
- the metal part 2 was formed by the same method as in Example 1.
- Paste A was used as the paste for thick film printing, but the metal part 2 (conductor 34) was formed by setting the maximum temperature for thick film firing at 840 ° C. and the IN-OUT time as 1 hour.
- the mechanical strength is measured according to JIS R 1601, using a sintered body with a length of 30 mm, a width of 10 mm, and a thickness of 0.8 mm prepared in advance. Then, a load of 0.5 mm / min was applied, the maximum load until the sintered body was broken was measured, and the three-point bending strength was calculated. The number of measurements was measured for 10 samples, and the average value was obtained.
- a metal part 2 is formed by forming a 10 mm square conductor 34 on the base body 20 described above.
- 1A to Sample No. 10A is a sample No. in which the region 4 containing silver does not exist. 1B-No. It was found that the reflectance of the substrate 1 can be kept higher as compared with 10B.
- Sample No. 1A to Sample No. 10A is Sample No. 1B to Sample No. It was found that the bonding strength was higher and the reflectance of the substrate 1 could be maintained higher than the 10B samples.
- sample No. having the same firing temperature and firing time.
- the sample No. in which the main component of aluminum oxide (Al 2 O 3 ) is 94 mass% or more and 97 mass% or less is used.
- Samples Nos. 4, 8, and 10 are those in which aluminum oxide (Al 2 O 3 ) as a main component is not 94 mass% or more and 97 mass% or less. Since the bending strength was higher than those of 1 and 9, it was found that the mechanical strength was sufficiently high even when fired at a temperature lower than the normal firing temperature.
- Example 2 Sample No. of Example 2 Using the same base body 20 and thick film paste as 4A, the thick film firing temperature was changed from 780 to 920 ° C., and the metal part 2 was formed on the main surface 1a of the base body 20.
- the thick film firing time was 1 hour, and the thickness of the metal part 2 after firing was 10.5 ⁇ m.
- the method for measuring the thickness of the region 4 and the bonding strength of the metal part is the same as in Examples 1 and 2.
- the number of samples was 10 each, and the average value was used as data.
- the linearity of the pattern (not shown) was also measured.
- the linearity of the arbitrary linear part 8mm of a pattern was measured 200 times using the tool microscope, and the average value of each 10 samples was made into data.
- Table 4 shows the survey results.
- the bonding strength of the metal part 2 was 10 MPa or more, indicating higher values.
- the linearity of the pattern of the metal part 2 is 10 ⁇ m or less, it was found that the insulating property can be maintained high.
- the sintered body has a sample number of 0.635 mm. 4 was used, and the second electrodes 6a and 6b were formed only on the second main surface 1b without forming the first electrodes 2a and 2b on the first main surface 1a.
- the second electrodes 6a and 6b are printed using thick film pastes A and B so that the thickness after firing the thick film is 10 mm square and the thickness is 10.5 ⁇ m, and the IN-OUT at the maximum temperature of 840 ° C. Thick film baking was performed for 1 hour.
- the reflectance is measured by applying light to the first main surface 1a side opposite to the second main surface 1b on which the second electrodes 6a and 6b are formed, and the reflected light (regular reflection light 17, Diffuse reflected light 18) was measured.
- the method for measuring the reflected light is the same as that of the first embodiment.
- the number of samples measured was 10 for each, and the average value was used as data.
- sample no. 11B had a relatively high reflectance of 93.7%.
- the sintered body was the sample No. used in Example 2. 4 and the reflectance when the electrode is not formed is 92.4%. Therefore, the reflectance to the main surface 1a side by the electrode on the opposite surface (second main surface 1b) on the light irradiation side is It can be seen that the reflectivity increases by about 0.4% or more, and when the region 4 does not substantially exist, the reflectivity of about 1.3% increases.
- the thickness of the region 4 was changed by changing the contents of magnesium and bismuth contained in the metal part 2.
- Example 2 Using the same base body 20 as 4A and using a thick film paste adjusted to have the magnesium and bismuth contents shown in Table 6, the thick film firing temperature was set to 840 ° C. A metal part 2 was formed on the main surface 1a. The thick film firing time was 1 hour, and the thickness of the metal part 2 after firing was 10.5 ⁇ m.
- the mass% of each component was determined on the surface of the metal part 2 by fluorescent X-ray analysis (XRF).
- XRF fluorescent X-ray analysis
- the number of samples was 10 each, and the average value was used as data.
- the linearity measurement is the same as in Example 3.
- Table 6 shows the obtained survey results.
- a pusher-type tunnel furnace was used, adjusted to 1420 to 1540 ° C. in an oxidizing atmosphere in the atmosphere, and the firing time was adjusted to 3.6 to 15 hours. Calcination was carried out so that the width of the sample was the value shown in Table 2. A substrate body 20 having 18 to 24 was obtained.
- the metal part 2 was formed by the same method as in Example 1.
- the paste for thick film printing was Paste A, and the metal part 2 (conductor 34) was formed with the maximum temperature for thick film firing being 840 ° C. and the IN-OUT time being 1 hour.
- the average width of the grain boundary phase formed between the aluminum oxide crystal grains of the base body 20 is measured by magnifying an arbitrary cross section of the base body 20 up to 50,000 times at an arbitrary point by TEM observation.
- the work of measuring the width of the grain boundary phase was performed in a total of 10 visual fields, and the width of the measured grain boundary phase was averaged.
- the average crystal grain size of the aluminum oxide crystal is obtained by mirror-finishing the substrate surface, performing fire etching at a temperature lower by 80 ° C. than the firing temperature of each sample, and EDS (energy dispersive X-ray spectroscopy).
- EDS energy dispersive X-ray spectroscopy
- the image was taken with a scanning electron microscope (JSM-7001F manufactured by JEOL Ltd.) at a magnification of 2500 to create image data.
- the area of each crystal grain was obtained using Win ROOF manufactured by Shoji Co., Ltd., and the average crystal grain diameter was obtained by calculating the equivalent circle diameter of each crystal from the area.
- the method for measuring the bonding strength of the metal part is the same as in Examples 1 to 3, and the method for measuring the reflectance of the substrate is the same as in Examples 1, 2, and 4.
- the number of samples was 10 each, and the average value was used as data.
- Light-emitting element mounting substrate (substrate) 2 metal parts 2a, 2b: first electrode, 2c, 2d: reflection layer 4: region 4a: first region, 4b: second region, 4c: interface, 5: mounting portions 6a, 6b: second electrode 11: Reflective member 20: Base body 30: Light emitting device 31: Light emitting element t: Thickness
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Abstract
Description
(第1の実施形態)
図1は、第1の実施形態の発光素子実装用基体を示す断面図である。
(第2の実施形態)
図2は第2の実施形態の発光素子実装用基体の構成を示し、セラミック焼結体からなる基体本体の第1の主面上に、発光素子と電気的に接続されていない反射層が設けられている例の断面図である。
(第3の実施形態)
図3は第3の実施形態の発光素子実装用基体の構成を示し、基体本体の第1の主面上に、実装部を取り囲むように配置されたセラミック焼結体の内周面に、銀を含有する反射層が設けられている例の断面図である。
2:金属部
2a,2b:第1の電極,2c,2d:反射層
4:領域
4a:第1の領域,4b:第2の領域,4c:界面、
5:実装部
6a,6b:第2の電極
11:反射部材
20:基体本体
30:発光装置
31:発光素子
t:厚み
Claims (10)
- 発光素子を実装するための発光素子実装用基体であって、
セラミック焼結体からなる基体本体と、銀を含有する金属部とを有し、前記基体本体の前記金属部に対し接合部を介して対向する部位に、銀を含有する領域が存在することを特徴とする発光素子実装用基体。 - 前記金属部が、前記発光素子と電気的に接続される第1の電極および前記第1の電極と電気的に接続されていない反射層の少なくとも一方を含むことを特徴とする請求項1に記載の発光素子実装用基体。
- 前記基体本体が、表面に発光素子を実装するための実装部が設けられる実装用部材と、前記実装部を取り囲むように配置された反射部材とを有し、該反射部材は、内周面に銀を含有する前記金属部が前記接合部を介して接合されており、前記金属部に対し前記接合部を介して対向する部位に、銀を含有する領域を有することを特徴とする請求項1または請求項2に記載の発光素子実装用基体。
- 前記基体本体がマグネシウムを含有しており、前記金属部が主成分としての銀と、副成分としてのマグネシウムおよびビスマスとを含有し、前記領域は、銀,マグネシウムおよびビスマスを含有することを特徴とする請求項1乃至請求項3のいずれかに記載の発光素子実装用基体。
- 前記領域は、前記金属部側の第1の領域と、該第1の領域に隣接する第2の領域とを有し、前記第1の領域は前記第2の領域よりマグネシウムを多く含むとともに、前記第2の領域は前記第1の領域よりビスマスを多く含むことを特徴とする請求項1乃至請求項4のいずれかに記載の発光素子実装用基体。
- 前記金属部は、マグネシウムおよびビスマスの合計の含有量が0.5質量%以上、3.0質量%以下であることを特徴とする請求項4または5に記載の発光素子実装用基体。
- 前記基体本体は、主成分として酸化アルミニウム(Al2O3)を94質量%以上、97質量%以下の量で含有するとともに、副成分として酸化珪素(SiO2)および酸化マグネシウム(MgO)を含有することを特徴とする請求項1乃至請求項6のいずれかに記載の発光素子実装用基体。
- 前記基体本体の発光素子が実装される表面側における酸化アルミニウム粒子の平均結晶粒径が2.0μm以下であることを特徴とする請求項7に記載の発光素子実装用基体。
- 前記基体本体が、前記実装部側の表面側において、前記酸化アルミニウムの結晶粒子間に形成される粒界相を有しており、該粒界相の平均幅が2nm以下であることを特徴とする請求項7または請求項8に記載の発光素子実装用基体。
- 請求項1乃至9のいずれかに記載の発光素子実装用基体に発光素子が実装されてなることを特徴とする発光装置。
Priority Applications (3)
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EP11843426.5A EP2645435B1 (en) | 2010-11-25 | 2011-11-25 | Substrate for mounting light-emitting element, and light-emitting device |
US13/989,570 US9170003B2 (en) | 2010-11-25 | 2011-11-25 | Light-emitting element mounting substrate and light-emitting device |
JP2012521411A JP5159985B2 (ja) | 2010-11-25 | 2011-11-25 | 発光素子実装用基体および発光装置 |
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EP (1) | EP2645435B1 (ja) |
JP (2) | JP5159985B2 (ja) |
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JP2013051449A (ja) * | 2010-11-25 | 2013-03-14 | Kyocera Corp | 発光素子実装用基体および発光装置 |
WO2014034131A1 (ja) * | 2012-08-31 | 2014-03-06 | パナソニック株式会社 | 発光装置 |
WO2015170773A1 (ja) * | 2014-05-09 | 2015-11-12 | 京セラ株式会社 | 発光素子搭載用基板および発光装置 |
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JP2013239540A (ja) * | 2012-05-14 | 2013-11-28 | Shin Etsu Chem Co Ltd | 光半導体装置用基板とその製造方法、及び光半導体装置とその製造方法 |
CN104205372B (zh) * | 2012-05-31 | 2018-03-02 | 松下知识产权经营株式会社 | Led模块、照明装置和灯 |
DE102015112967A1 (de) * | 2015-08-06 | 2017-02-09 | Osram Opto Semiconductors Gmbh | Verfahren zum Herstellen eines optoelektronischen Bauelements und optoelektronisches Bauelement |
JP6509066B2 (ja) * | 2015-08-07 | 2019-05-08 | 共立エレックス株式会社 | セラミックス反射板製造方法 |
EP3913591A1 (en) | 2016-01-29 | 2021-11-24 | KiwiSecurity Software GmbH | Methods and apparatus for using video analytics to detect regions for privacy protection within images from moving cameras |
EP3869638B1 (en) | 2017-03-03 | 2024-06-19 | Nichia Corporation | Optical component |
KR20210157935A (ko) * | 2020-06-22 | 2021-12-30 | 삼성디스플레이 주식회사 | 광학 검사 장치 |
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Also Published As
Publication number | Publication date |
---|---|
TW201240167A (en) | 2012-10-01 |
EP2645435A1 (en) | 2013-10-02 |
JP2013051449A (ja) | 2013-03-14 |
TWI495170B (zh) | 2015-08-01 |
EP2645435B1 (en) | 2017-08-09 |
JP5159985B2 (ja) | 2013-03-13 |
JP5518168B2 (ja) | 2014-06-11 |
JPWO2012070648A1 (ja) | 2014-05-19 |
US20130242565A1 (en) | 2013-09-19 |
EP2645435A4 (en) | 2015-11-25 |
US9170003B2 (en) | 2015-10-27 |
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