WO2012029744A1 - 反射防止膜、レンズ、光学系、対物レンズ、及び光学機器 - Google Patents
反射防止膜、レンズ、光学系、対物レンズ、及び光学機器 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
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- the present invention relates to an antireflective film, a lens using the antireflective film, an optical system, an objective lens, and an optical device using the optical system.
- Patent Document 1 As a conventional antireflective film for ultraviolet light, an antireflective film described in Patent Document 1 has been proposed.
- This antireflective film is formed by alternately forming an intermediate refractive index layer including an Al 2 O 3 film and a low refractive index layer including MgF 2 on a transparent substrate surface to form 4 to 7 layers, and a wavelength of 248 nm ( This film is antireflective at two wavelengths: KrF excimer laser wavelength) and other wavelengths (for example: He—Ne laser wavelength 633 nm).
- Patent Document 2 proposes an anti-reflection film having a broad-band reflectivity of 0.6% or less at a wavelength of 350 nm to a wavelength of 800 nm.
- the conventionally proposed two-wavelength anti-reflection film is designed to prevent the excimer laser light of 248 nm and the light of 600 nm to 700 nm at 1.5% or less.
- the reflectance becomes 3% or more at wavelengths 400 nm to 600 nm, This causes a problem that observation in the visible range becomes difficult.
- the conventional reflection preventing film is formed by using a high refractive index material having a refractive index such as TiO 2 is more than 1.8.
- a high refractive index material such as TiO 2 has a high film absorptivity in the ultraviolet region of a wavelength of 400 nm or less. Therefore, in the case of using a third harmonic (oscillation wavelength 355 nm) of a laser in the ultraviolet region, for example, YAG laser, the absorption of light damages the antireflective film, and the film configuration changes, and predetermined spectral characteristics such as antireflective characteristics There is a problem that you can not get
- the present invention by appropriately setting the refractive index and the film configuration of the material of the antireflective film, the light in two regions, mainly an ultraviolet region of a wavelength of less than 400 nm and a visible region of a wavelength of 400 nm to 700 nm. It is an object of the present invention to provide an antireflective film which is optically stable, capable of reducing light absorption, and effectively realizing predetermined reflection prevention. Another object of the present invention is to provide a two-wavelength antireflective film suitable for various optical lenses that perform, for example, laser processing as such an antireflective film.
- the antireflective film according to the present invention is formed on a transparent substrate in order from the air side to the substrate side, the first layer, the second layer, the third layer, the fourth Layer, the fifth layer, the sixth layer, and the thin film having six or more layers formed, the odd-numbered thin film from the air side is a low refractive index film, and the even-numbered thin film is a low refractive index film or low Assuming that the refractive index of the middle refractive index film and the low refractive index film at the central wavelength ⁇ 0 is N M and N L , respectively, which is an intermediate refractive index film having a refractive index larger than the refractive index film, the following equation (1), (2) and (3) at the same time.
- ⁇ 0 500 nm (1) 1.45 ⁇ N M ⁇ 1.8 (2) N L ⁇ 1.45 (3) Anti-reflection is performed at wavelength ⁇ 1 in the ultraviolet region and wavelength ⁇ 2 in the visible region, It is characterized in that the following expressions (4), (5), (6), (7), (8) and (9) are satisfied at the same time.
- ⁇ 1 355 nm (4) 400 nm ⁇ ⁇ 2 ⁇ 700 nm (5) R1 ⁇ 1.0% (6) R2 ⁇ 1.5% (7) K1 ⁇ 1.0% (8) K2 ⁇ 1.0% (9) here, R1 is the reflectance at wavelength ⁇ 1, R2 is the reflectance at wavelength ⁇ 2, K1 is the film absorptivity at wavelength ⁇ 1, K2 is the film absorptivity at wavelength ⁇ 2, Film absorptivity: 100-(100-(reflectance of substrate + transmittance of substrate))-(reflectance of substrate provided with antireflective film + transmittance of substrate provided with antireflective film), It is.
- the refractive index of the substrate is preferably less than 1.85.
- the refractive index of the substrate is preferably 1.85 or more.
- the antireflective film according to the present invention preferably satisfies the following expressions (10), (11), (12), (13), (14), (15) and (16) simultaneously.
- 0.229 ⁇ ⁇ 0 ⁇ d1 ⁇ 0.234 ⁇ ⁇ 0 (10) 0.260 ⁇ ⁇ 0 ⁇ d2 ⁇ 0.268 ⁇ ⁇ 0 (11) 0.045 ⁇ ⁇ 0 ⁇ d3 ⁇ 0.077 ⁇ ⁇ 0 (12) 0.074 ⁇ ⁇ 0 ⁇ d4 ⁇ 0.118 ⁇ ⁇ 0 (13) 0.211 ⁇ ⁇ 0 ⁇ d5 ⁇ 0.277 ⁇ ⁇ 0 (14) 0.035 ⁇ ⁇ 0 ⁇ d6 ⁇ 0.150 ⁇ ⁇ 0 (15) 0.039 ⁇ ⁇ 0 ⁇ d7 ⁇ 0.207 ⁇ ⁇ 0 (16) here, d1 is the optical thickness of the first layer, d2 is the optical thickness of the second layer, d3 is the optical thickness of the third layer, d
- the antireflective film according to the present invention preferably satisfies the following expressions (17), (18), (19), (20), (21) and (22) simultaneously.
- the antireflective film according to the present invention is such that the material of the middle refractive index layer is Al 2 O 3 , SiO 2 , LaF 3 , NdF 3 , YF 3 , CeF 3 , or a mixture containing these compounds, and has a low refractive index
- the material of the layer is preferably MgF 2 , BaF 2 , LiF, AlF 3 , NaF, CaF 2 or a mixture containing these compounds.
- a lens according to the present invention is characterized in that any one of the above-mentioned antireflection films is provided.
- An optical system according to the present invention includes the above-described lens.
- An objective lens according to the present invention includes the above-described optical system.
- An optical apparatus includes the above-described optical system, and is characterized by using the optical system to observe and collect a laser.
- the antireflective film according to the present invention is optically stable, has less light absorption, and is predetermined for light in two regions mainly in the ultraviolet region of wavelength less than 400 nm and in the visible region of wavelength of 400 nm to 700 nm.
- FIG. 6 is a graph showing the spectral reflectance characteristics of the antireflective films of Examples 1 to 9 shown in Table 1.
- FIG. It is a graph which shows the spectral-reflectance characteristic of Example 5 selected from the Example 1 and 9 of the upper and lower limits of a base material refractive index among the Examples of Table 1, and the example between these. It is the graph which plotted the value which added the reflectance and the transmittance
- 7 is a graph in which film absorptance is plotted against wavelength for Example 1.
- 6 is a graph showing spectral reflectance characteristics of Examples 10 to 12 shown in Table 2.
- 15 is a graph showing spectral reflectance characteristics of Examples 13 and 14 shown in Table 3.
- 5 is a graph showing spectral reflectance characteristics of a comparative example shown in Table 4. It is a figure which shows the structure of the repair apparatus which concerns on 4th Embodiment. It is a figure which shows the structure of the microscope which concerns on 5th Embodiment.
- the antireflective film according to the present invention comprises a transparent substrate, and the first layer, the second layer, the third layer, the fourth layer, the fifth layer, the sixth layer, and the sixth layer in order from the air side to the substrate side.
- An odd-numbered thin film from the air side is a low refractive index film
- an even-numbered thin film is an intermediate refractive index film having a larger refractive index than a low refractive index film or a low refractive index film.
- ⁇ 1 355 nm (4) 400 nm ⁇ ⁇ 2 ⁇ 700 nm (5) R1 ⁇ 1.0% (6) R2 ⁇ 1.5% (7) K1 ⁇ 1.0% (8) K2 ⁇ 1.0% (9) here, R1 is the reflectance at wavelength ⁇ 1, R2 is the reflectance at wavelength ⁇ 2, K1 is the film absorptivity at wavelength ⁇ 1, K2 is the film absorptivity at wavelength ⁇ 2, Film absorptivity: 100-(100-(reflectance of substrate + transmittance of substrate))-(reflectance of substrate provided with antireflective film + transmittance of substrate provided with antireflective film), It is.
- the above equations (6) and (7) apply to the reflectance of the substrate and the reflectance of the substrate provided with the anti-reflection film.
- the antireflective film according to the present invention preferably satisfies the following expressions (10), (11), (12), (13), (14), (15) and (16) simultaneously.
- 0.229 ⁇ ⁇ 0 ⁇ d1 ⁇ 0.234 ⁇ ⁇ 0 (10) 0.260 ⁇ ⁇ 0 ⁇ d2 ⁇ 0.268 ⁇ ⁇ 0 (11) 0.045 ⁇ ⁇ 0 ⁇ d3 ⁇ 0.077 ⁇ ⁇ 0 (12) 0.074 ⁇ ⁇ 0 ⁇ d4 ⁇ 0.118 ⁇ ⁇ 0 (13) 0.211 ⁇ ⁇ 0 ⁇ d5 ⁇ 0.277 ⁇ ⁇ 0 (14) 0.035 ⁇ ⁇ 0 ⁇ d6 ⁇ 0.150 ⁇ ⁇ 0 (15) 0.039 ⁇ ⁇ 0 ⁇ d7 ⁇ 0.207 ⁇ ⁇ 0 (16) here, d1 is the optical thickness of the first layer, d2 is the optical thickness of the second layer, d3 is the optical thickness of the third layer, d
- the antireflective film according to the present invention preferably satisfies the following expressions (17), (18), (19), (20), (21) and (22) simultaneously.
- Table 1 is a table
- Table 2 is a table
- Table 3 is a table
- Table 4 is a table
- materials and optical film thicknesses of the respective layers are shown in the order of lamination on the substrate. The optical film thickness is a value obtained by multiplying the numerical value described in each table by the design wavelength ⁇ 0 of each embodiment.
- the substrate material names in the tables and drawings are all trademarks of OHARA INC., Except for those where specific substance names are described.
- FIG. 1 is a graph showing the spectral reflectance characteristics of the antireflective films of Examples 1 to 9 shown in Table 1.
- FIG. 2 is a graph showing the spectral reflectance characteristics of Examples 1 and 9 of the upper and lower limits of the substrate refractive index and Example 5 selected from the examples between them among the examples of Table 1.
- FIG. 3 is a graph obtained by plotting the value obtained by adding the reflectance and the transmittance of the substrate and the value obtained by adding the reflectance and the transmittance of the substrate provided with the anti-reflection film in Example 1 with respect to the wavelength. is there.
- FIG. 4 is a graph in which the film absorptance is plotted against the wavelength for Example 1.
- FIG. 1 is a graph showing the spectral reflectance characteristics of the antireflective films of Examples 1 to 9 shown in Table 1.
- FIG. 2 is a graph showing the spectral reflectance characteristics of Examples 1 and 9 of the upper and lower limits of the substrate refractive index and Example 5 selected from the examples between them among
- FIG. 5 is a graph showing the spectral reflectance characteristics of Examples 10 to 12 shown in Table 2.
- FIG. 6 is a graph showing the spectral reflectance characteristics of Examples 13 and 14 shown in Table 3.
- FIG. 7 is a graph showing spectral reflectance characteristics of the comparative example shown in Table 4.
- FIG. 1, FIG. 2, and FIG. 5 to FIG. 7 show the spectral reflectance characteristics of the two-wavelength anti-reflection film, with the wavelength (unit nm) on the horizontal axis and the reflectance (unit%) on the vertical axis.
- FIG. The film absorption shown in FIG. 4 is the reflectance of the substrate + the transmittance of the substrate (solid line) shown in FIG. 3, and the reflectance of the substrate provided with the antireflective film + transmission of the substrate provided with the antireflective film.
- the antireflection films of Examples 1 to 9 shown in Table 1 are made of MgF 2 which is a low refractive index material on a substrate having a refractive index of 1.5 to 1.85, with a design wavelength ⁇ 0 of 500 nm. It has a seven-layer structure in which first, third , fifth, and seventh layers and second, fourth, and sixth layers made of Al 2 O 3 which is an intermediate refractive index material are stacked.
- This antireflection film has a seven-layer configuration of LMLMLML from the air side (the side far from the substrate), where M is a layer made of an intermediate refractive index material and L is a layer made of a low refractive index material.
- the refractive index N M of the layer made of Al 2 O 3 which is an intermediate refractive index material is 1.61, which satisfies 1.45 ⁇ N M ⁇ 1.8, and MgF 2 which is a low refractive index material
- the refractive index N L of the layer is 1.38, and N L ⁇ 1.45 is satisfied.
- Each layer of the antireflective film of the first embodiment was formed by vacuum evaporation in a vacuum region of 10 ⁇ 2 to 10 ⁇ 4 Pa.
- the formation method of each layer is not limited to vacuum evaporation,
- the anti-reflective film which has an equivalent characteristic also by sputtering method, the ion plating method, and the ion assist vapor deposition method can be obtained.
- Al 2 O 3 was used as the intermediate refractive index material and MgF 2 was used as the low refractive index material
- Al 2 O 3 and MgF 2 generally have light absorptivity in the visible region and in the ultraviolet region less than 400 nm. Low.
- the material is not limited to this material, and any material having the same refractive index as each material can provide an antireflective film having the same characteristics.
- SiO 2 , LaF 3 , NdF 3 , YF 3 , CeF 3 or compounds of these can be used besides Al 2 O 3 .
- BaF 2 LiF, AlF 3 , NaF, CaF 2 , or a compound of these can be used as a material for the low refractive index layer.
- the reflectance R1 at the oscillation wavelength of 355 nm ( ⁇ 1) of the third harmonic of the YAG laser in the ultraviolet region is 1% or less, and from 400 nm in the visible region
- the reflectance R2 in the wavelength range ( ⁇ 2) of 700 nm is 1.5% or less. Therefore, the antireflective film of the first embodiment achieves sufficiently good antireflective performance with respect to the reflectance of about 4% only with the base material.
- the film absorptivity K1 (FIG. 4) at the oscillation wavelength of 355 nm ( ⁇ 1) of the third harmonic of the YAG laser is 1% or less, and the wavelength range of 400 nm to 700 nm
- the film absorptivity K2 (FIG. 4) at ( ⁇ 2) is 1.0% or less.
- the anti-reflection coatings of Examples 10 to 12 shown in Table 2 are made of MgF 2 as a low refractive index material on a substrate having a refractive index of less than 1.5, with a design wavelength ⁇ 0 of 500 nm.
- the second and fourth layers made of the intermediate refractive index material Al 2 O 3 , and the sixth layer made of SiO 2 which is the intermediate refractive index material have a seven-layer structure.
- This antireflection film has a seven-layer configuration of LMLMLML from the air side (the side far from the substrate), where M is a layer made of an intermediate refractive index material and L is a layer made of a low refractive index material.
- the refractive index N M of the layer made of Al 2 O 3 which is an intermediate refractive index material is 1.61
- the refractive index N M of the layer made of SiO 2 is 1.46
- all of them are 1.45 ⁇ N M ⁇ 1.8
- the refractive index N L of the layer made of MgF 2 which is a low refractive index material is 1.38, and N L ⁇ 1.45 is satisfied.
- Each layer of the antireflective film of the second embodiment is formed by vacuum evaporation in a vacuum region of 10 ⁇ 2 to 10 ⁇ 4 Pa.
- the formation method of each layer is not limited to vacuum evaporation,
- the anti-reflective film which has an equivalent characteristic also by sputtering method, the ion plating method, and the ion assist vapor deposition method can be obtained.
- Al 2 O 3 and SiO 2 are used as intermediate refractive index materials, and MgF 2 is used as low refractive index materials, but the material of each layer is not limited to these, and the refractive index similar to each material is used. An antireflective film having similar characteristics can be obtained as long as the material is possessed.
- LaF 3 , NdF 3 , YF 3 , CeF 3 or compounds of these may be used besides Al 2 O 3 and SiO 2 .
- MgF 2 , BaF 2 , LiF, AlF 3 , NaF, CaF 2 , or a compound of these can be used as a material for the low refractive index layer.
- the reflectance R1 at the oscillation wavelength of 355 nm ( ⁇ 1) of the third harmonic of the YAG laser in the ultraviolet region is 1% or less, and the wavelength of 400 nm to 700 nm in the visible region
- the reflectance R2 in the range ( ⁇ 2) is 1.5% or less. Therefore, the anti-reflection film of the second embodiment has sufficiently good anti-reflection performance with respect to the reflectance of about 4% only with the base material.
- the film absorptivity K1 at the oscillation wavelength of 355 nm ( ⁇ 1) of the third harmonic of the YAG laser is 1% or less as in Example 1 described above, and the wavelength range of 400 nm to 700 nm ( The film absorptivity K2 at ⁇ 2) is 1.0% or less.
- the anti-reflection films of Examples 13 and 14 shown in Table 3 are made of MgF 2, which is a low refractive index material, on a substrate having a refractive index of 1.85 or more, with a design wavelength ⁇ 0 of 500 nm.
- a 5-layer has a first 2,4,6-layer of Al 2 O 3 is an intermediate refractive index material, the six-layer structure obtained by laminating.
- This antireflection film has a six-layer configuration of LMLMLM from the air side (the side far from the substrate), where M is a layer made of an intermediate refractive index material and L is a layer made of a low refractive index material.
- the refractive index N M of the layer made of Al 2 O 3 which is an intermediate refractive index material is 1.61 and satisfies 1.45 ⁇ N M ⁇ 1.8. Furthermore, the refractive index N L of the layer made of MgF 2 which is a low refractive index material is 1.38, and N L ⁇ 1.45 is satisfied.
- Each layer of the antireflective film of the third embodiment was formed by vacuum evaporation in a vacuum region of 10 ⁇ 2 to 10 ⁇ 4 Pa.
- the formation method of each layer is not limited to vacuum evaporation,
- the anti-reflective film which has an equivalent characteristic also by sputtering method, the ion plating method, and the ion assist vapor deposition method can be obtained.
- the materials of the respective layers are not limited to these, and materials having the same refractive index as each material If it is, it is possible to obtain an antireflective film having the same characteristics.
- a material for the intermediate refractive index layer LaF 3 , NdF 3 , YF 3 , CeF 3 , or these compounds can be used in addition to Al 2 O 3 .
- MgF 2 , BaF 2 , LiF, AlF 3 , NaF, CaF 2 , or a compound of these can be used as a material for the low refractive index layer.
- the reflectance at the oscillation wavelength of 355 nm of the third harmonic of the YAG laser in the ultraviolet region is 1% or less, and the reflectance in the visible wavelength region of 400 nm to 700 nm Is 1.5% or less. Therefore, the antireflection film of the third embodiment has sufficiently good antireflection performance with respect to the reflectance of about 4% only with the substrate.
- the film absorptivity K1 at the oscillation wavelength of 355 nm ( ⁇ 1) of the third harmonic of the YAG laser is 1% or less as in Example 1 described above, and the wavelength range of 400 nm to 700 nm ( The film absorptivity K2 at ⁇ 2) is 1.0% or less.
- the optical lens shown in Table 4 on which both sides or one side were coated with the conventional antireflective film was damaged when irradiated with light of 15 mJ / mm 2 100 times with a YAG laser.
- the optical lens having the anti-reflection film of the third embodiment applied on both sides or one side the light of 70 mJ / mm 2 was irradiated 100 times with the YAG laser, but none of the optical elements was damaged.
- FIG. 8 is a view showing the configuration of a repair apparatus (hereinafter, laser repair) according to the fourth embodiment.
- This repair apparatus is an apparatus for irradiating and removing a laser beam to a defect portion generated on a glass substrate, a semiconductor wafer, a printed substrate or the like of a liquid crystal display.
- the laser repair shown in FIG. 8 includes a processing light source 101, a variable stop 102, a lens 103, an objective lens 106 with an anti-reflection film formed thereon, a half mirror 104, a half mirror 105, an observation light source 109, a lens 110, a moving stand 112, and movement.
- a drive control unit 121, a CCD 122 (charge coupled device) as an imaging device, a TV monitor 123, an image processing unit 124, and a drive control unit 125 are provided.
- the processing light source 101 is a processing light source that emits a laser light flux for processing a repair target, and it is preferable that, for example, laser light fluxes of a plurality of wavelengths can be emitted according to the repair target.
- a control unit (not shown) performs control of laser light emitted from the processing light source 101, for example, light intensity, light emission wavelength, oscillation mode such as pulse oscillation, and on / off control.
- the laser beam emitted from the processing light source 101 passes through the variable stop 102, the lens 103, the half mirror 104, the half mirror 105, and the objective lens 106, and the surface (repair surface) of the workpiece 111 on the moving table 112 Irradiated.
- the workpiece 111 is movable in a plane orthogonal to the laser light from the processing light source 101 together with the movable table 112 whose movement is controlled by the movement drive control unit 121.
- the laser light from the processing light source 101 is accurately detected as a defect based on the observation result of the surface of the workpiece 111 in the image processing unit 124 described later.
- the image processing unit 124 outputs control information to the movement drive control unit 121 so as to emit light.
- the light intensity of the laser beam from the processing light source 101, and the like corresponding to the size, depth, and other conditions of the defect portion.
- Information for setting the irradiation conditions is output from the image processing unit 124 to the drive control unit 125.
- the variable stop 102 makes the laser light intensity distribution uniform in the cross section orthogonal to the optical axis of the laser light beam emitted from the processing light source 101.
- the operation of the variable stop 102 is controlled by the drive control unit 125 based on data from the image processing unit 124.
- the light beam that has passed through the variable stop 102 is transmitted through the lens 103, the half mirror 104, and the half mirror 105, and collected on the workpiece 111 by the objective lens 106.
- the luminous flux is applied to a defect on the workpiece 111 and is used to remove the defect.
- illumination light in the visible region is emitted from the observation light source 109.
- the illumination light is condensed by the lens 110 and then reflected by the half mirror 105, and is irradiated to the workpiece 111 through the objective lens 106.
- the illumination light is reflected by the surface of the workpiece 111, passes through the objective lens 106 and the half mirror 105, is reflected by the half mirror 104, is collected by the lens 107, passes through the half mirror 108, and enters the CCD 122.
- the incident light is converted into an electric signal and displayed on the TV monitor 123, and the converted signal is output to the image processing unit 124.
- an anti-reflection film having high transmittance and durability in the visible to ultraviolet region is used for the objective lens 106. Therefore, it is possible to realize an objective lens having good optical performance in the visible to ultraviolet region, and it is thus possible to share the objective lens for observation and for processing, and laser processing without switching the lens after observation. Can be performed almost simultaneously, and no software correction or mechanical control is required, thereby enabling significant time reduction and accuracy improvement of the apparatus.
- FIG. 9 is a view showing the configuration of a microscope (ultraviolet microscope) according to the fifth embodiment.
- a mirror leg 214 of the ultraviolet microscope is installed on the vibration isolation table 260 in order to mechanically prevent the vibration transmitted from the floor 258.
- a lens barrel 212 is supported on the mirror leg 214 via an arm 216.
- the lens barrel 212 includes a light source 218 and an optical lens system having an illumination lens system 220, an objective lens system 222, and an imaging lens system 224 disposed along the light path of the light source 218.
- the illumination lens system 220 includes a collector lens 220a and a condenser lens 220b, and appropriately converges the light of the light source 218.
- the light of the light source 218 converged by the collector lenses 220a and 220b is reflected by the half mirror 226, is focused by the objective lens system 222, and is incident on the object 228.
- the light reflected by the object 228 is enlarged by the objective lens system 222, and transmits through the half mirror 226 and the imaging lens system 224.
- the imaging light path of the imaging lens system 224 is separated into an optical path of ultraviolet light and an optical path of visible light by the dichroic mirror 230a.
- the ultraviolet light is reflected by the dichroic mirror 230a and further reflected by the reflection mirror 231, and is imaged on the imaging surface (not shown) of the ultraviolet television camera 234a.
- the television camera 234a converts the input image (ultraviolet image) formed on the imaging surface thereof into an electrical image signal, and provides the display 238a through the ultraviolet image processing device 236a.
- the display 238a displays a monochrome image corresponding to the ultraviolet region image of the object 228 in real time based on the input signal from the television camera 234a.
- visible light passes through the dichroic mirror 230a, is reflected by the reflection mirrors 240 and 242 in order, and is imaged on the imaging surface (not shown) of the color television camera 234b.
- the television camera 234b converts an input image (visible image) formed on the imaging surface into an electrical color image signal, and provides the display 238b with the visible image through the image processing device 236b.
- the display 238 b displays a color image corresponding to a visible image of the subject 228 in real time based on an input signal from the image processing device 236 b.
- the television cameras 234a and 234b respectively include magnifying lens systems 244a and 244b for zooming the input image.
- the magnification lens systems 244a and 244b can set the magnification independently of each other, so that the ultraviolet image and the color image of the object 228 can be simultaneously observed at different magnifications.
- the image processing devices 236a and 236b are controlled by the controller 246 and have known image processing functions.
- the image processing devices 236a, 236b can cause the video printers 248a, 248b to output images, respectively.
- a shutter 250 capable of blocking the light of the light source 218 is disposed.
- the opening and closing of the light source shutter 250 may be manual, but is preferably controlled by the controller 246.
- the magnifying lens systems 244a and 244b respectively include shutters 252a and 252b for reducing the amount of light entering the imaging surface of the television cameras 234a and 234b. When the shutters 252a and 252b are closed and imaging is performed by the television cameras 234a and 234b in a non-light entering state, an image as a background image is obtained.
- An ultraviolet microscope arm 216 supports a mechanical stage 254 for holding the subject 228.
- the mechanical stage 254 includes a Z stage 254z supported by an arm 216, and a Y stage 254y and an X stage 254x sequentially attached to the Z stage 254z.
- the X stage 254x, the Y stage 254y and the Z stage 254z may be manually driven by the adjusting screws 256x, 256y and 256z, respectively, and may be controlled by the controller 246.
- the revolver 262 supports a plurality of objective lens systems 222, and rotation of the revolver 262 is capable of selectively switching the objective lens systems.
- the turrets 264a and 264b support a plurality of magnifying lens systems 244a and 244b, respectively, and the magnification lens systems can be selectively switched by rotation thereof.
- the variable power of the ultraviolet microscope can be made variable.
- an automatic focusing device 278 for the ultraviolet television camera 234a is provided.
- the microscope of the fifth embodiment by using a light source from visible light to ultraviolet light, a color image by visible light and an image by ultraviolet light can be simultaneously obtained, and image information having high color information and high resolution. It is possible to achieve a microscope system that observes simultaneously. Even in a system that transmits ultraviolet light to visible light, such as a tunable laser, by forming the above-described anti-reflection film on an optical element in a light source device, it has sufficient transmittance at all wavelengths and is sufficient. It becomes possible to give durability.
- the antireflective film according to the present invention is required to be optically stable, to less absorb light, and to have a predetermined antireflective property to light in two regions of the ultraviolet region and the visible region. Useful for optical systems.
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Abstract
Description
また、従来提案されている2波長反射防止膜は、エキシマレーザー波長248nmと波長600nm~700nmを1.5%以下で反射防止するように設計されている。
λ0=500nm ・・・(1)
1.45≦NM≦1.8 ・・・(2)
NL<1.45 ・・・(3)
紫外域の波長λ1と、可視域の波長λ2と、で反射防止を行っており、
次式(4)、(5)、(6)、(7)、(8)、(9)を同時に満足することを特徴とする。
λ1=355nm ・・・(4)
400nm≦λ2≦700nm ・・・(5)
R1≦1.0% ・・・(6)
R2≦1.5% ・・・(7)
K1≦1.0% ・・・(8)
K2≦1.0% ・・・(9)
ここで、
R1は、波長λ1での反射率、
R2は、波長λ2での反射率、
K1は、波長λ1での膜吸収率、
K2は、波長λ2での膜吸収率、
膜吸収率は、100-(100-(基板の反射率+基板の透過率))-(反射防止膜を施した基板の反射率+反射防止膜を施した基板の透過率)、
である。
0.229×λ0≦d1≦0.234×λ0 ・・・(10)
0.260×λ0≦d2≦0.268×λ0 ・・・(11)
0.045×λ0≦d3≦0.077×λ0 ・・・(12)
0.074×λ0≦d4≦0.118×λ0 ・・・(13)
0.211×λ0≦d5≦0.277×λ0 ・・・(14)
0.035×λ0≦d6≦0.150×λ0 ・・・(15)
0.039×λ0≦d7≦0.207×λ0 ・・・(16)
ここで、
d1は第1層の光学膜厚、
d2は第2層の光学膜厚、
d3は第3層の光学膜厚、
d4は第4層の光学膜厚、
d5は第5層の光学膜厚、
d6は第6層の光学膜厚、
d7は第7層の光学膜厚、
光学膜厚は屈折率×幾何学的厚さ、
である。
0.233×λ0≦d1≦0.234×λ0 ・・・(17)
0.269×λ0≦d2≦0.289×λ0 ・・・(18)
0.072×λ0≦d3≦0.073×λ0 ・・・(19)
0.106×λ0≦d4≦0.127×λ0 ・・・(20)
0.146×λ0≦d5≦0.211×λ0 ・・・(21)
0.253×λ0≦d6≦0.278×λ0 ・・・(22)
ここで、
d1は第1層の光学膜厚、
d2は第2層の光学膜厚、
d3は第3層の光学膜厚、
d4は第4層の光学膜厚、
d5は第5層の光学膜厚、
d6は第6層の光学膜厚、
d7は第7層の光学膜厚、
光学膜厚は屈折率×幾何学的厚さ、
である。
まず、実施形態の説明に先立って、本発明による作用・効果について説明する。
本発明に係る反射防止膜は、透明な基板上に、空気側から基板側へ順に第1層、第2層、第3層、第4層、第5層、第6層、と、6層以上の薄膜を形成した構成を備え、空気側から奇数番目の薄膜が低屈折率膜であり、偶数番目の薄膜が低屈折率膜又は低屈折率膜より屈折率の大きな中間屈折率膜であって、中心波長λ0での中間屈折率膜と低屈折率膜の屈折率を各々NM、NLとしたとき、次式(1)、(2)、(3)を同時に満足する反射防止膜であって、
λ0=500nm ・・・(1)
1.45≦NM≦1.8 ・・・(2)
NL<1.45 ・・・(3)
紫外域の波長λ1と、可視域の波長λ2と、で反射防止を行っており、
次式(4)、(5)、(6)、(7)、(8)、(9)を同時に満足することを特徴とする。
λ1=355nm ・・・(4)
400nm≦λ2≦700nm ・・・(5)
R1≦1.0% ・・・(6)
R2≦1.5% ・・・(7)
K1≦1.0% ・・・(8)
K2≦1.0% ・・・(9)
ここで、
R1は、波長λ1での反射率、
R2は、波長λ2での反射率、
K1は、波長λ1での膜吸収率、
K2は、波長λ2での膜吸収率、
膜吸収率は、100-(100-(基板の反射率+基板の透過率))-(反射防止膜を施した基板の反射率+反射防止膜を施した基板の透過率)、
である。
なお、上式(6)、(7)は、基板の反射率、及び、反射防止膜を施した基板の反射率について適用する。
0.229×λ0≦d1≦0.234×λ0 ・・・(10)
0.260×λ0≦d2≦0.268×λ0 ・・・(11)
0.045×λ0≦d3≦0.077×λ0 ・・・(12)
0.074×λ0≦d4≦0.118×λ0 ・・・(13)
0.211×λ0≦d5≦0.277×λ0 ・・・(14)
0.035×λ0≦d6≦0.150×λ0 ・・・(15)
0.039×λ0≦d7≦0.207×λ0 ・・・(16)
ここで、
d1は第1層の光学膜厚、
d2は第2層の光学膜厚、
d3は第3層の光学膜厚、
d4は第4層の光学膜厚、
d5は第5層の光学膜厚、
d6は第6層の光学膜厚、
d7は第7層の光学膜厚、
光学膜厚は屈折率×幾何学的厚さ、
である。
0.233×λ0≦d1≦0.234×λ0 ・・・(17)
0.269×λ0≦d2≦0.289×λ0 ・・・(18)
0.072×λ0≦d3≦0.073×λ0 ・・・(19)
0.106×λ0≦d4≦0.127×λ0 ・・・(20)
0.146×λ0≦d5≦0.211×λ0 ・・・(21)
0.253×λ0≦d6≦0.278×λ0 ・・・(22)
ここで、
d1は第1層の光学膜厚、
d2は第2層の光学膜厚、
d3は第3層の光学膜厚、
d4は第4層の光学膜厚、
d5は第5層の光学膜厚、
d6は第6層の光学膜厚、
d7は第7層の光学膜厚、
光学膜厚は屈折率×幾何学的厚さ、
である。
表1に示す、実施例1~9の反射防止膜は、屈折率1.5~1.85の基材の上に、設計波長λ0を500nmとして、低屈折率材料であるMgF2からなる第1、3、5、7層と、中間屈折率材料であるAl2O3からなる第2、4、6層と、を積層した7層構成になっている。この反射防止膜は、中間屈折率材料からなる層をM、低屈折率材料からなる層をLとすると、空気側(基板から遠い側)からLMLMLMLという7層構成である。また、中間屈折率材料であるAl2O3からなる層の屈折率NMは1.61であって、1.45≦NM≦1.8を満たし、低屈折率材料であるMgF2からなる層の屈折率NLは1.38であって、NL<1.45を満たす。
表2に示す、実施例10~12の反射防止膜は、屈折率1.5未満の基材の上に、設計波長λ0を500nmとして、低屈折率材料であるMgF2からなる第1、3、5、7層と、中間屈折率材料Al2O3からなる第2、4層と、中間屈折率材料であるSiO2からなる第6層と、を積層した7層構成になっている。この反射防止膜は、中間屈折率材料からなる層をM、低屈折率材料からなる層をLとすると、空気側(基板から遠い側)からLMLMLMLという7層構成である。また、中間屈折率材料であるAl2O3からなる層の屈折率NMは1.61であり、SiO2からなる層の屈折率NMは1.46であり、いずれも1.45≦NM≦1.8を満たす。さらに、低屈折率材料であるMgF2からなる層の屈折率NLは1.38であって、NL<1.45を満たす。
表3に示す、実施例13、14の反射防止膜は、屈折率1.85以上の基材の上に、設計波長λ0を500nmとして、低屈折率材料であるMgF2からなる第1、3、5層と、中間屈折率材料であるAl2O3からなる第2、4、6層と、を積層した6層構成になっている。この反射防止膜は、中間屈折率材料からなる層をM、低屈折率材料からなる層をLとすると、空気側(基板から遠い側)からLMLMLMという6層構成である。また、中間屈折率材料であるAl2O3からなる層の屈折率NMは1.61であって、1.45≦NM≦1.8を満たす。さらに、低屈折率材料であるMgF2からなる層の屈折率NLは1.38であって、NL<1.45を満たす。
以下、反射防止膜を施した光学系を有する光学装置としてのリペア装置について、図8を参照しつつ説明する。
図8は、第4実施形態に係るリペア装置(以下、レーザーリペア)の構成を示す図である。このリペア装置は、液晶ディスプレイのガラス基板、半導体ウエハ、プリント基板などに生じる欠陥部にレーザー光を照射して除去する装置である。
しかし、これでは観察用レンズで観察して加工場所を決定し、加工用レンズに切り替えて加工することになり、時間的に2倍の工数がかかってしまう。また、観察用レンズと加工用レンズの位置合わせなども必要となりメカ的にもソフト的にも工程が増えてしまっている。
反射防止膜を施した光学系を有する対物レンズ(対物レンズ系22)を備えた光学機器としての顕微鏡について、図9を参照して説明する。
図9は、第5実施形態に係る顕微鏡(紫外線顕微鏡)の構成を示す図である。この顕微鏡では、被検体の可視域から紫外域に至る観察と、被検体の紫外画像と可視カラー画像とを重畳させた表示と、被検体の紫外像のみの観察と、が可能である。
なお、チューナブルレーザー等の紫外から可視光まで透過するシステムにおいても、光源装置内の光学素子に上述の反射防止膜を形成することにより、全波長において十分な透過率を有し、且つ十分な耐久性を持たせることが可能となる。
102 可変絞り
103、107 レンズ
104、105、108 ハーフミラー
106 対物レンズ
109 観察光源
110 レンズ
111 被加工物
112 移動台
121 移動駆動制御部
122 CCD
123 TVモニター
124 画像処理部
125 駆動制御部
218 光源
220 照明レンズ系
220a、220b コレクタレンズ
222 対物レンズ系
224 結像レンズ系
226 ハーフミラー
228 被検体
230a ダイクロイックミラー
231、240、242 反射ミラー
234a、234b テレビカメラ
236a、236b 画像処理装置
238a、238b ディスプレイ
244a、244b 拡大レンズ系
246 コントローラ
248a、248b ビデオプリンタ
250、252a、252b シャッタ
254 機械的ステージ
Claims (10)
- 透明な基板上に、空気側から前記基板側へ順に第1層、第2層、第3層、第4層、第5層、第6層、と、6層以上の薄膜を形成した構成を備え、前記空気側から奇数番目の薄膜が低屈折率膜であり、偶数番目の薄膜が低屈折率膜又は前記低屈折率膜より屈折率の大きな中間屈折率膜であって、中心波長λ0での前記中間屈折率膜と前記低屈折率膜の屈折率を各々NM、NLとしたとき、次式(1)、(2)、(3)を同時に満足する反射防止膜であって、
λ0=500nm ・・・(1)
1.45≦NM≦1.8 ・・・(2)
NL<1.45 ・・・(3)
紫外域の波長λ1と、可視域の波長λ2と、で反射防止を行っており、
次式(4)、(5)、(6)、(7)、(8)、(9)を同時に満足することを特徴とする反射防止膜。
λ1=355nm ・・・(4)
400nm≦λ2≦700nm ・・・(5)
R1≦1.0% ・・・(6)
R2≦1.5% ・・・(7)
K1≦1.0% ・・・(8)
K2≦1.0% ・・・(9)
ここで、
R1は、波長λ1での反射率、
R2は、波長λ2での反射率、
K1は、波長λ1での膜吸収率、
K2は、波長λ2での膜吸収率、
前記膜吸収率は、100-(100-(前記基板の反射率+前記基板の透過率))-(前記反射防止膜を施した前記基板の反射率+前記反射防止膜を施した前記基板の透過率)、
である。 - 前記基板の屈折率が1.85未満であることを特徴とする請求項1に記載の反射防止膜。
- 前記基板の屈折率が1.85以上であることを特徴とする請求項1に記載の反射防止膜。
- 次式(10)、(11)、(12)、(13)、(14)、(15)、(16)を同時に満足することを特徴とする請求項2に記載の反射防止膜。
0.229×λ0≦d1≦0.234×λ0 ・・・(10)
0.260×λ0≦d2≦0.268×λ0 ・・・(11)
0.045×λ0≦d3≦0.077×λ0 ・・・(12)
0.074×λ0≦d4≦0.118×λ0 ・・・(13)
0.211×λ0≦d5≦0.277×λ0 ・・・(14)
0.035×λ0≦d6≦0.150×λ0 ・・・(15)
0.039×λ0≦d7≦0.207×λ0 ・・・(16)
ここで、
d1は前記第1層の光学膜厚、
d2は前記第2層の光学膜厚、
d3は前記第3層の光学膜厚、
d4は前記第4層の光学膜厚、
d5は前記第5層の光学膜厚、
d6は前記第6層の光学膜厚、
d7は前記第7層の光学膜厚、
前記光学膜厚は屈折率×幾何学的厚さ、
である。 - 次式(17)、(18)、(19)、(20)、(21)、(22)を同時に満足することを特徴とする請求項3に記載の反射防止膜。
0.233×λ0≦d1≦0.234×λ0 ・・・(17)
0.269×λ0≦d2≦0.289×λ0 ・・・(18)
0.072×λ0≦d3≦0.073×λ0 ・・・(19)
0.106×λ0≦d4≦0.127×λ0 ・・・(20)
0.146×λ0≦d5≦0.211×λ0 ・・・(21)
0.253×λ0≦d6≦0.278×λ0 ・・・(22)
ここで、
d1は前記第1層の光学膜厚、
d2は前記第2層の光学膜厚、
d3は前記第3層の光学膜厚、
d4は前記第4層の光学膜厚、
d5は前記第5層の光学膜厚、
d6は前記第6層の光学膜厚、
d7は前記第7層の光学膜厚、
前記光学膜厚は屈折率×幾何学的厚さ、
である。 - 前記中間屈折率層の材料がAl2O3、SiO2、LaF3、NdF3、YF3、CeF3、又は、これらの化合物を含む混合物であり、
前記低屈折率層の材料がMgF2、BaF2、LiF、AlF3、NaF、CaF2、又は、これらの化合物を含む混合物であることを特徴とする請求項1から請求項5のいずれか1項に記載の反射防止膜。 - 請求項1から請求項6のいずれか1項に記載の反射防止膜を施したことを特徴とするレンズ。
- 請求項7に記載のレンズを有することを特徴とする光学系。
- 請求項8に記載の光学系を有することを特徴とする対物レンズ。
- 請求項8に記載の光学系を有し、前記光学系を用いて、観察し、かつ、レーザーを集光することを特徴とする光学機器。
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CN102918428B (zh) | 2015-01-07 |
TWI537582B (zh) | 2016-06-11 |
TW201211578A (en) | 2012-03-16 |
JP2012053329A (ja) | 2012-03-15 |
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