WO2011162163A1

WO2011162163A1 - Glass substrate and method for manufacturing glass substrate

Info

Publication number: WO2011162163A1
Application number: PCT/JP2011/063824
Authority: WO
Inventors: 宮本　幹大
Original assignee: 旭硝子株式会社
Priority date: 2010-06-21
Filing date: 2011-06-16
Publication date: 2011-12-29
Also published as: JP5817722B2; TW201213044A; CN102947238B; JPWO2011162163A1; KR101755062B1; CN102947238A; TWI515085B; KR20130108514A

Abstract

The amount of adhesion of cullet to the major planar surface of a glass substrate due to the grinding of an end surface is reduced. An end surface (12) of a glass substrate (10) is ground into an elliptical shape. The ellipse is defined by the ratio of a long side (a) and a short side (b) and is formed into a continuous elliptical curved surface by the curvature radius (R1) of an upper curved surface (12a), the curvature radius (R2) of a lower curved surface (12b), and the curvature radius (R3) of an intermediate curved surface (12c). The curvature radiuses (R1-R3) have the relationships of R1 ≤ R2, and R2 ≤ R3 or the relationships of R1 = R2, R3 > R2, and R3 > R1. The distance (c) from the center (O) of the end surface (12) to the boundaries (P) at which tangential lines (S1, S2) depart from the major planar surface of the substrate (10) is less than the distance in conventional cases in which the end surface (12) is chamfered or formed into a semicircular shape. The configuration changes the direction of scatter of cullet, which is produced in the step of end surface grinding, to cause the cullet to scatter further toward the end surface (12) side, and as a result, the amount of adhesion of the cullet to the major planar surface (14) of the glass substrate (10) is reduced.

Description

Glass substrate and method for manufacturing glass substrate

The present invention relates to a glass substrate and a method for manufacturing the glass substrate, and more particularly to a glass substrate whose end face is ground by a grindstone and a method for manufacturing the glass substrate.

For example, for thin display devices such as liquid crystal displays, plasma displays, and organic electroluminescence, development of large screens is in progress. A plurality of glass substrates used in a thin display device are processed on a single mother board, and when each processing step is completed, the glass substrate is cut to the size of each screen. This motherboard has a side length of, for example, 2.2 m to 3 m.

Further, since the end face of the glass substrate is prone to crack if there are edges or minute irregularities, for example, the end face is ground into a chamfered shape or a semicircular shape to smooth the end face surface (for example, patents) Reference 1). Moreover, in the end surface grinding process of a glass substrate, a cooling fluid (coolant) is supplied to the contact part of a grindstone and the end surface of a glass substrate, and the heat_generation | fever of a glass substrate is suppressed. Furthermore, since the cullet from the ground part is scattered as fine particles in the end surface grinding process, the cullet attached to the glass substrate is removed by a cleaning process after grinding.

Japanese Unexamined Patent Publication No. 2009-203141

In the conventional glass substrate, the grinding shape of the end face (cross-sectional shape after grinding) is ground into a chamfered shape or semicircular shape without considering the amount of cullet generation (scattering amount), etc. Depending on the contact area and shape, the amount of cullet generated (scattered amount) may increase, or if the cooling due to the supply of coolant is insufficient during grinding, the glass substrate may be burned and discolored due to heat generation.

Especially when the cullet adheres to the main plane of the glass substrate, the cullet may not be sufficiently removed by the cleaning process. Therefore, in the end surface grinding process of a glass substrate, it is an important subject to suppress the amount of cullet scattering.

Therefore, in view of the above circumstances, an object of the present invention is to provide a glass substrate and a method for manufacturing the glass substrate that have solved the above problems.

In order to solve the above problems, the present invention has the following means.
(1) The present invention provides a glass substrate whose end face is ground by a grindstone.
The end face ground on the grindstone is
An upper curved surface formed on an upper portion of the end surface;
A lower curved surface formed at a lower portion of the end surface;
An intermediate curved surface formed between the upper curved surface and the lower curved surface;
Each of the upper curved surface, the lower curved surface, and the intermediate curved surface has an arbitrary radius of curvature,
At least the upper curved surface and the intermediate curved surface have different radii of curvature.
(2) The upper curved surface, the lower curved surface, and the intermediate curved surface of the present invention are characterized by forming a continuous curved surface by changing the curvature radius of adjacent curved surfaces.
(3) The upper curved surface, the lower curved surface, and the intermediate curved surface of the present invention are characterized by forming a continuous curved surface that approximates an approximately elliptical contour shape.
(4) The upper curved surface, the lower curved surface, and the intermediate curved surface of the present invention each have a radius of curvature smaller than the thickness of the glass substrate.
(5) The present invention is characterized in that a first recess is formed at the boundary between the upper curved surface and the intermediate curved surface, and a second recess is formed at the boundary between the lower curved surface and the intermediate curved surface. And
(6) The first and second recesses of the present invention are characterized by extending in a direction parallel to the main plane of the glass substrate so as to have a predetermined interval in the plate thickness direction.
(7) The glass substrate of the present invention is characterized in that one side is a quadrangle having a length of 2.2 m or more.
(8) The end surface of the glass substrate of the present invention has an average roughness Ra of 0.3 μm or less.
(9) The thickness of the glass substrate of the present invention is 0.05 to 2.8 mm.
(10) The present invention provides a glass substrate manufacturing method in which an end face is ground with a grindstone.
Corresponding to the upper curved surface formed at the upper part of the end surface, the lower curved surface formed at the lower part of the end surface, and the intermediate curved surface formed between the upper curved surface and the lower curved surface on the outer periphery of the grindstone Form a curved surface,
The grindstone is rotated and relatively moved along the end surface of the glass substrate so that the upper curved surface, the lower curved surface, and the intermediate curved surface each have an arbitrary radius of curvature on the end surface of the glass substrate. It is characterized by that.
(11) The present invention is characterized in that the upper curved surface, the lower curved surface, and the intermediate curved surface are processed so as to form a continuous curved surface by changing each radius of curvature.

According to the present invention, the contact area where the end surface of the glass substrate contacts the grindstone is reduced by selecting the curvature radii of the upper curved surface, the lower curved surface, and the intermediate curved surface of the end surface ground by the grindstone to an arbitrary size. As a result, the amount of cullet and heat generated during grinding can be suppressed.

It is a longitudinal cross-sectional view which shows one Example of the glass substrate by this invention. It is a longitudinal cross-sectional view which shows the relative positional relationship of the grindstone and the end surface of a glass substrate in an end surface grinding process. It is a top view which shows typically the grinding device used at an end surface grinding process. It is a longitudinal cross-sectional view for demonstrating the grinding method 1 of the conventional glass substrate. It is a longitudinal cross-sectional view for demonstrating the grinding method 2 of the conventional glass substrate. It is a longitudinal cross-sectional view for demonstrating the modification 1 of the glass substrate by this invention. It is a longitudinal cross-sectional view for demonstrating the modification 2 of the glass substrate by this invention. It is a longitudinal cross-sectional view for demonstrating the modification 3 of the glass substrate by this invention. It is a longitudinal cross-sectional view which shows the relative positional relationship of the grindstone of the modification 3, and the end surface of a glass substrate.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

FIG. 1A is a longitudinal sectional view showing an embodiment of a glass substrate according to the present invention. As shown in FIG. 1A, the glass substrate 10 is a rectangular large glass panel used for a thin display device such as a liquid crystal display, a plasma display, and organic electroluminescence. The thickness t of the glass substrate 10 (the vertical dimension of the glass substrate 10 in FIG. 1A) is preferably 0.05 mm to 2.8 mm. Further, the main plane of the glass substrate 10 is desirably a quadrangle having a side of 2.2 m or more.

The end surface 12 of the glass substrate 10 is ground into a curved surface approximated to an elliptical shape. The end surface 12 includes an upper curved surface 12a formed at the upper portion of the end surface 12, a lower curved surface 12b formed at the lower portion of the end surface 12, and an intermediate curved surface 12c formed between the upper curved surface 12a and the lower curved surface 12b. Have.

Each of the curved surfaces 12a to 12c in the present embodiment is formed into a curved surface that approximates an approximate elliptical shape by the curvature radius R1 of the upper curved surface 12a, the curvature radius R2 of the lower curved surface 12b, and the curvature radius R3 of the intermediate curved surface 12c. Has been. Note that the radius of curvature of the ellipse changes so that the total distance from two points on the long side axis is constant. Here, for convenience of explanation, the radius of curvature R1 to R3 is changed. It becomes possible to draw as a continuous curve.

In the present embodiment, the long side a = 0.7 mm and the short side b = 0.6 mm of the virtual ellipse shape are set. The long side a is the same as the thickness t of the glass substrate 10. Each of the radii of curvature R1 to R3 is smaller than the thickness t of the glass substrate 10, and has a relationship of R1 ≦ R2, R2 ≦ R3, or R1 = R2, R3> R2, and R3> R1.

1A is a grinding region 20 to be removed by grinding. That is, the left side of the curved surfaces 12a to 12c is a grinding region 20 to be ground, and the right side of the curved surfaces 12a to 12c is the ground glass substrate 10.

Moreover, as conditions for grinding the end surface 12 of the glass substrate 10, the grinding amount x = 0.15 mm, the thickness t = 0.7 mm, and the distance c in the X direction from the end surface 12 to the grinding edge c = 0.23 mm. And Moreover, in the end surface grinding process of the end surface 12 of the glass substrate 10, it is desirable that average roughness Ra is 0.3 micrometer or less.

The angle α between the tangent line S1 of the end surface 12 of the glass substrate 10 with respect to the upper curved surface 12a and the tangent line S2 with respect to the lower curved surface 12b is set to 60 °. The angle α is an opening angle of the grindstone 30 and can be set to an arbitrary angle.

Further, in the end surface 12 of the glass substrate 10, since the thickness t is larger than the short side b, the boundary where the tangents S 1 and S 2 are separated from the main plane 14 of the substrate 10 from the center O of the end surface 12 on the center line in the X direction. The distance c to P is 0.23 mm, which is smaller than the conventional case where the end face 12 is chamfered or semicircular. Thereby, the scattering direction of the cullet generated during the end surface grinding process moves to the end surface 12 side, and the amount of cullet adhesion on the main plane 14 of the glass substrate 10 can be reduced.

Further, when the end surface 12 is ground into an elliptical shape, the contact area with the grindstone is reduced as compared with a conventional chamfered shape or a semicircular shape, so that heat generation during grinding is suppressed. Further, when the end face 12 is ground into an elliptical shape, the cullet scattering direction moves from the main plane 14 to the end face side (in the direction away from the main plane 14) and the cullet adheres to the main plane 14 as the distance c decreases. The amount decreases.

Therefore, in this embodiment, it is possible to suppress the amount of cullet scattering to the main plane 14 side during the end surface grinding process, and also to suppress the heat generation of the end surface 12.

FIG. 1B is a longitudinal sectional view showing a relative positional relationship between the grindstone and the end surface of the glass substrate in the end surface grinding step. As shown in FIG. 1B, the end surface 12 of the glass substrate 10 is ground by rotating a grindstone 30. The grindstone 30 has diamond abrasive grains and is rotatably supported by the rotating shaft 40. Further, the grindstone 30 has a processing groove having a concave curved surface that contacts the end surface 12 of the glass substrate 10 like a pulley, and a concave curved surface 32 corresponding to the curved surface shape of the end surface 12 of the glass substrate 10 and a concave curved surface 32. An upper collar portion 34 disposed above and a lower collar portion 36 disposed below the concave curved surface 32.

The concave curved surface 32 is formed into an elliptical concave curved surface corresponding to the ground shape of the end surface 12 of the glass substrate 10. That is, the concave curved surface 32 is formed in an elliptical shape that is continuous by a curvature radius R1 corresponding to the upper curved surface 12a, a curvature radius R2 corresponding to the lower curved surface 12b, and a curvature radius R3 corresponding to the intermediate curved surface 12c. .

In addition, the grinding stone 30 of the diamond abrasive grains is processed into an arbitrary shape by forming the concave curved surface 32 by electric discharge machining. Therefore, the shape of the end surface 12 of the glass substrate 10 can be ground to an arbitrary shape by bringing the concave curved surface 32 into contact with the end surface 12 of the glass substrate 10 while rotating the grindstone 30.

FIG. 2 is a plan view schematically showing a grinding apparatus used in the end face grinding process. As shown in FIG. 2, in the end surface grinding step, the glass substrate 10 is sucked and held in a state of being placed on the upper surface of the suction table 50 of the grinding device. The glass substrate 10 and the grindstone 30 are aligned so that the pair of grindstones 30 are in contact with the left and right end faces 12 of the glass substrate 10.

Moreover, the height position (Y direction position) of each grindstone 30 is adjusted according to the height position (Y direction position) of the end surface 12 of the glass substrate 10. That is, as shown in FIG. 1A, the height position of the center of the concave curved surface 32 of the grindstone 30 and the height position of the center O of the end surface 12 of the glass substrate 10 are set to coincide with each other.

The pair of grindstones 30 are fed in the X1 direction and the X2 direction while being rotationally driven to grind the left and right end faces 12 of the glass substrate 10. Moreover, at the time of end face grinding, a cooling liquid (coolant) is supplied to the contact part of the concave curved surface 32 of the grindstone 30 and the end face 12 of the glass substrate 10, and the heat_generation | fever by grinding is relieve | moderated. And when the said grinding process is complete | finished, the glass substrate 10 is rotated 90 degree | times and the end surface 12 of two other sides is ground.

When the glass substrate 10 is rotated, the glass substrate 10 may be rotated together with the suction table 50 while being adsorbed by air suction, or only the glass substrate 10 is floated by air blowing. May be rotated 90 degrees, aligned and sucked.

Thus, in the end surface grinding step, each end surface 12 in the four directions of the glass substrate 10 is ground into an arbitrary shape by the grindstone 30. Moreover, since the cullet generated in the end surface grinding process is scattered in the rotation direction of the grindstone 30, it is scattered in the direction away from each end surface 12, and the adhesion amount of the main plane 14 is reduced.
[Conventional grinding method]
Here, a conventional grinding method will be described.

FIG. 3 is a longitudinal sectional view for explaining a conventional glass substrate grinding method 1. As shown in FIG. 3, in the conventional glass substrate grinding method 1, the end surface 12 of the glass substrate 10 is ground into a chamfered shape. The grinding conditions of this grinding method 1 are the same as in the case of the above embodiment, and the grinding amount x = 0.15 mm, the thickness t = 0.7 mm, and the chamfer angle α = 52 °. In addition, the angle between the outer surface of the end surface 12 and the chamfer is formed as a curved surface having the curvature radii R4 and R5.

However, since the end surface 12 has a chamfered shape, the distance in the X direction from the end surface 12 to the grinding edge is c = 0.29 mm, which is larger than that in the above embodiment. Thereby, in the end surface grinding process by the grindstone 30, when the amount of cullet scattering to the main plane 14 side increases, there is a possibility that the end surface 12 may be burned due to heat generation when cooling by the coolant is not sufficient.

FIG. 4 is a longitudinal sectional view for explaining a conventional glass substrate grinding method 2. As shown in FIG. 4, in the conventional glass substrate grinding method 2, the end surface 12 of the glass substrate 10 is ground into a semicircular shape. The grinding conditions of this grinding method 2 are the same as in the case of the above embodiment, and the grinding amount x = 0.15 mm, the thickness t = 0.7 mm, and the angle α = 60 °. Further, the radius of curvature R6 of the end face 12 is half of the thickness (t = 0.7 mm) of the glass substrate 10.

However, since the end face 12 has a semicircular shape, the distance in the X direction from the end face 12 to the grinding edge is c = 0.25 mm, which is larger than in the above embodiment. Thereby, in the end surface grinding process by the grindstone 30, when the amount of cullet scattering to the main plane 14 side increases, there is a possibility that the end surface 12 may be burned due to heat generation when cooling by the coolant is not sufficient.

Here, a modified example will be described.
[Modification 1]
FIG. 5 is a longitudinal sectional view for explaining a first modification of the glass substrate according to the present invention. As shown in FIG. 5, in the first modification, the angle α of the tangents S1, S2 of the grindstone 30 with respect to the end surface 12 formed in an elliptical shape is set to α = 52 °. The other conditions in the modified example 2 are the same as those described above.

In the case of the modified example 1 as well, in the case of grinding the end surface 12 into an elliptical shape, the contact area with the grindstone is reduced as compared with the conventional chamfered shape or semicircular shape. Heat generation is suppressed. Further, when the end face 12 is ground into an elliptical shape, the cullet scattering direction moves from the main plane 14 to the end face side as the distance c decreases, and the amount of cullet attached to the main plane 14 decreases.

Therefore, in the first modification, it is possible to suppress the amount of cullet scattering to the main plane 14 side during the end surface grinding process and to suppress the heat generation of the end surface 12.

[Modification 2]
FIG. 6 is a longitudinal sectional view for explaining a second modification of the glass substrate according to the present invention. As shown in FIG. 6, in the second modification, the angle α of the tangents S1 and S2 of the grindstone 30 with respect to the end surface 12 formed in an elliptical shape is set to α = 72 °. In Modification 2, the grinding amount x = 0.15 mm and the thickness t = 0.7 mm are the same as those described above. On the other hand, the distance c and the ratio of the long side a to the short side b are different from those in the above embodiment, but it is preferable that 0.5 ≦ b / a ≦ 2.0.

In the second modification, the short side b is set to be smaller than that in the first embodiment and the first modification. Therefore, when the end surface 12 is ground into an elliptical shape, the contact area with the grindstone is reduced as compared with a conventional chamfered shape or a semicircular shape, so that heat generation during grinding is suppressed. Further, the distance c is smaller than that of the above-described embodiment and the first modification, and accordingly, the cullet scattering direction moves from the main plane 14 to the end face side, and the amount of cullet attached to the main plane 14 decreases. .

[Modification 3]
FIG. 7 is a longitudinal sectional view for explaining a third modification of the glass substrate according to the present invention. FIG. 8 is a longitudinal sectional view showing the relative positional relationship between the grindstone of Modification 3 and the end face of the glass substrate.

As shown in FIG. 7, the glass substrate 10 of Modification 3 has curved surfaces 12a to 12c having three different radii of curvature on the end surface 12, and the first curved surface 12a to 12c has a first A recess 12d and a second recess 12e are formed. The curvature radii R1 to R3 of the curved surfaces 12a to 12c are set to values smaller than the thickness t of the glass substrate 10 and have a relationship of R1 ≦ R2, R2 ≦ R3, or R1 <R2 <R3. .

The first recess 12d is provided at the boundary between the upper curved surface 12a and the intermediate curved surface 12c, and the second recess 12e is provided at the boundary between the intermediate curved surface 12c and the lower curved surface 12b.

As shown in FIG. 8, the angle α of the tangents S1, S2 of the grindstone 30 with respect to the end surface 12 of the modified example 3 is set to α = 90 °. Further, the distance in the X direction from the end face 12 to the grinding edge is c = 0.137 mm, which is smaller than that in the above embodiment. The grinding amount x = 0.15 mm and the thickness t = 0.7 mm are the same as those described above.

Therefore, as the distance c becomes smaller, the direction of cullet scattering moves from the main plane 14 to the end face side, and the amount of cullet attached to the main plane 14 decreases.

Therefore, in the third modification, it is possible to suppress the amount of cullet scattering toward the main plane 14 during the end face grinding process and to suppress the heat generation of the end face 12 as compared with the embodiment and the first and second modifications.

Moreover, since the end surface 12 of the modification 3 has the 1st recessed part 12d and the 2nd recessed part 12e which were recessed inside, the cullet which generate | occur | produces when grinding with the rotating grindstone 30 accumulates in the recessed

parts

12d and 12e, The cullet is prevented from being scattered on the main plane 14 by the upper curved surface 12a and the lower curved surface 12b protruding outward from the

recesses

12d and 12e. The cullet collected in the

recesses

12d and 12e is removed in a subsequent cleaning step.

The curvature radii R1 and R2 of the upper curved surface 12a and the lower curved surface 12b may be different radii as described above, or may be the same radius. When the curvature radii R1 and R2 are the same radius (R1 = R2), the upper curved surface 12a and the lower curved surface 12b are formed symmetrically in the vertical direction. The

recesses

12d and 12e are formed to extend in the X direction parallel to the main plane 14 of the glass substrate 10 so as to have a predetermined interval in the plate thickness direction. Therefore, it is possible to measure (inspect) the height adjustment deviation between the grindstone 30 and the glass substrate 10 during the end face grinding process from the positions of the

recesses

12d and 12e after the grinding.

In the third modification, the angle α of the tangents S1 and S2 of the grindstone 30 with respect to the end surface 12 is set to a large value of α = 90 °, so that the cullet scattering direction is on the end surface side with respect to the main plane 14. For this reason, the amount of cullet scattering on the main plane 14 is also suppressed.

Thus, the end surface 12 of the glass substrate 10 is composed of a combination of three curved surfaces 12a to 12c having different curvature radii, and the

concave portions

12d and 12e are formed at the boundaries of the curved surfaces 12a to 12c. It becomes possible to reduce the amount of cullet adhesion on the main plane 14 in the end surface grinding process.

In the above embodiment, the case where the end surface of the glass substrate used in the thin display device is ground has been described as an example. However, the present invention is not limited thereto, and the thickness t is relatively thin (for example, the thickness t = 0.05 mm). It is a matter of course that the present invention can be applied to any glass substrate up to 2.8 mm.

Although this application has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention.
This application is based on a Japanese patent application filed on June 21, 2010 (Japanese Patent Application No. 2010-140254), the contents of which are incorporated herein by reference.

DESCRIPTION OF SYMBOLS 10 Glass substrate 12 End surface 12a Upper curved surface 12b Lower curved surface 12c Middle curved surface 12d 1st recessed part 12e 2nd recessed part 14 Main plane 20 Grinding area 30 Grinding stone 32 Recessed curved surface 34 Upper collar part 36 Lower collar part 40 Rotating shaft 50 Suction table

Claims

In a glass substrate whose end face is ground by a grindstone,
The end face ground on the grindstone is
An upper curved surface formed on an upper portion of the end surface;
A lower curved surface formed at a lower portion of the end surface;
An intermediate curved surface formed between the upper curved surface and the lower curved surface;
Each of the upper curved surface, the lower curved surface, and the intermediate curved surface has an arbitrary radius of curvature,
A glass substrate, wherein at least the upper curved surface and the intermediate curved surface have different radii of curvature.
The glass substrate according to claim 1, wherein the upper curved surface, the lower curved surface, and the intermediate curved surface form a continuous curved surface by changing a curvature radius of an adjacent curved surface.
The glass substrate according to claim 2, wherein the upper curved surface, the lower curved surface, and the intermediate curved surface form a continuous curved surface that approximates a substantially elliptical contour shape.
The glass substrate according to claim 1, wherein each of the upper curved surface, the lower curved surface, and the intermediate curved surface has a radius of curvature smaller than a thickness of the glass substrate.
The first concave portion is formed at a boundary between the upper curved surface and the intermediate curved surface, and the second concave portion is formed at a boundary between the lower curved surface and the intermediate curved surface. Glass substrate.
6. The glass according to claim 5, wherein the first and second recesses are formed to extend in a direction parallel to the main plane of the glass substrate so as to have a predetermined interval in the plate thickness direction. substrate.
The glass substrate according to any one of claims 1 to 6, wherein the glass substrate is a quadrangle having a side of 2.2 m or more.
The glass substrate according to any one of claims 1 to 7, wherein the end surface of the glass substrate has an average roughness Ra of 0.3 µm or less.
The glass substrate according to any one of claims 1 to 8, wherein the glass substrate has a thickness of 0.05 mm to 2.8 mm.
In the method of manufacturing a glass substrate whose end face is ground with a grindstone,
Corresponding to the upper curved surface formed at the upper part of the end surface, the lower curved surface formed at the lower part of the end surface, and the intermediate curved surface formed between the upper curved surface and the lower curved surface on the outer periphery of the grindstone Form a curved surface,
The grindstone is rotated and relatively moved along the end surface of the glass substrate so that the upper curved surface, the lower curved surface, and the intermediate curved surface each have an arbitrary radius of curvature on the end surface of the glass substrate. A method for producing a glass substrate, comprising:
11. The glass substrate according to claim 10, wherein the upper curved surface, the lower curved surface, and the intermediate curved surface are processed so as to form a continuous curved surface by changing a curvature radius of adjacent curved surfaces. Method.