WO2011148459A1 - 天井走行車と、天井走行車からの飛び出し防止方法 - Google Patents
天井走行車と、天井走行車からの飛び出し防止方法 Download PDFInfo
- Publication number
- WO2011148459A1 WO2011148459A1 PCT/JP2010/058808 JP2010058808W WO2011148459A1 WO 2011148459 A1 WO2011148459 A1 WO 2011148459A1 JP 2010058808 W JP2010058808 W JP 2010058808W WO 2011148459 A1 WO2011148459 A1 WO 2011148459A1
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- traveling
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C15/00—Safety gear
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
- B66C11/02—Trolleys or crabs, e.g. operating above runways with operating gear or operator's cabin suspended, or laterally offset, from runway or track
- B66C11/04—Underhung trolleys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
Definitions
- This invention relates to preventing the transfer device from inadvertently jumping out of an overhead traveling vehicle.
- an overhead traveling vehicle is provided with a side moving mechanism to move a lifting device that lifts and lowers an article to the side
- Patent Document 1 JP2008-127200A
- the lateral movement mechanism is composed of, for example, a belt-driven slide fork, and if the belt is cut, the slide fork moving part may inadvertently jump out and interfere with an opposing overhead traveling vehicle or surrounding buffer columns. There is.
- An object of the present invention is to prevent the moving part from inadvertently popping out even if a failure occurs in the side moving mechanism.
- the present invention is an overhead traveling vehicle comprising a traveling unit, an elevating device for raising and lowering an article, and a lateral movement mechanism
- the lateral movement mechanism includes a base supported by the traveling unit and a moving unit that supports the lifting device, and the base protrudes to the side of the traveling unit and retracts to a lower part of the traveling unit. Move the moving part between An engagement device that engages the moving unit or the lifting device with the base or the traveling unit in a state where the moving unit is retracted to the lower part of the traveling unit is provided.
- the present invention also includes a lateral movement mechanism including a traveling unit, a lifting device that lifts and lowers an article, a base supported by the traveling unit, and a moving unit that moves sideways while supporting the lifting device,
- a method of preventing jumping out of an overhead traveling vehicle comprising: A step for moving the moving part between a state protruding to the side of the traveling part and a state retracted to the lower part of the traveling part; The step of engaging the moving part or the lifting device and the base or the traveling part with the moving part retracted to the lower part of the traveling part is performed.
- the moving unit or the lifting device and the base or the traveling unit are engaged, the moving unit or the lifting device does not pop out carelessly.
- the moving unit is engaged with the base is shown, but the moving unit may be engaged with the traveling unit, and the elevating unit may be engaged with the base.
- the moving part or the elevating device has a member having a hole for engagement, and the engagement device retreats between a state engaged with the hole and a state released from the engagement.
- At least one pin and a mechanism for retracting the at least one pin are provided. If it does in this way, engagement and cancellation
- the member provided with the hole for engagement is good also as another member provided in the moving part itself, for example.
- the moving portion includes a top portion that supports the lifting device and a middle portion that is intermediate between the base portion and the top portion, and the top portion and the middle portion each include an engagement hole.
- the engagement device engages the at least one pin with the engagement holes of the top portion and the middle portion and releases the engagement. If it does in this way, a top part and a middle part can be engaged and fixed, respectively.
- a member such as a belt that drives the middle portion and a member such as a belt that drives the top portion are separate members
- the other member may pop out even if only the middle portion or only the top portion is engaged. Conceivable.
- both the top part and the middle part are engaged, neither member will accidentally pop out.
- the engaging device engages the at least one pin with the engaging holes of the top portion and the middle portion in one stroke and releases the engagement in one stroke. To leave.
- the engagement is performed with one stroke and the engagement is released with one stroke, control between the engagement and the release thereof is unnecessary, and the reliability of the control is increased. Further, when the engagement and the release thereof are performed in one stroke, the engagement and the release thereof can be performed at a high speed.
- the at least one pin includes two pins having different positions in plan view, and the positions of the engagement holes in plan view are different between the top portion and the middle portion.
- the two holes can be overlapped in a plan view, and the pin can be lifted and lowered reliably with a short stroke as compared with the case where one pin is lifted and lowered with a long stroke.
- the front view which shows the overhead traveling vehicle of an Example, the surrounding traveling rail, and a buffer The principal part top view of the side movement mechanism in the overhead traveling vehicle of an Example Side view which shows a side movement mechanism, a principal part, and an engagement apparatus with the overhead traveling vehicle of an Example.
- III-III horizontal sectional view of Fig. 3 The side view which shows the principal part of the engaging apparatus and side moving mechanism in a modification
- the top view which shows the principal part of the engaging apparatus and side movement mechanism in a modification.
- FIG. 1 to FIG. 9 show examples and their modifications.
- reference numeral 2 denotes a ceiling space, for example, a ceiling space in a clean room, and there is a semiconductor processing apparatus (not shown) below FIG.
- Reference numeral 4 denotes a ceiling of a clean room or the like, which supports the rail 10 of the overhead traveling vehicle 20 via the support 6 and the support member 8.
- the rail 10 includes, for example, a travel rail 11 and a power supply rail 12, and the columns 15 and 16 support a buffer 14 for temporarily placing an article such as a FOUP 35.
- an appropriate automatic warehouse or stocker may be arranged, and the buffer 14a between the left and right traveling rails 10, 10 in FIG. 1 may not be provided.
- FIG. 1 a pair of left and right traveling rails 10 and 10 are provided, but only one of them may be provided.
- the overhead traveling vehicle 20 includes a travel drive unit and a power reception unit (not shown), the travel drive unit is disposed in the travel rail 11, the power reception unit is disposed in the power supply rail 12, and is a non-contact provided in the rail 12. Receiving power from a feeder line.
- the traveling drive unit and the power receiving unit are collectively referred to as a traveling unit.
- the slide fork 21 is supported by the shaft from the traveling unit, and the base portion 22 is supported by the traveling unit.
- a middle portion 24 and a top portion 26 are provided below the base portion 22 and move out of both sides in the left-right direction in FIG. 1 to move the swiveling devices 28 to FOUP 35 to the side.
- the slide fork 21 hits the side moving mechanism, and the middle portion 24 and the top portion 26 hit the moving body. Further, the slide fork 21 may be protruded only to one of the left and right instead of protruding to the left and right sides.
- the swivel device 28 does not need to be provided by swiveling the lifting device 30 about the vertical axis, and in the claims, the swiveling device 28 is regarded as a part of the lifting device.
- the elevating device 30 elevates and lowers the elevating table 32 with a suspension material such as a belt, a rope, and a wire, and the elevating table 32 holds or releases an article such as the FOUP 35 by a pair of claws 33 and 33, for example.
- An engagement device 34 is attached to the base portion 22 or the traveling portion, and engaged so that the middle portion 24 and the top portion 26 do not accidentally jump out to the side. The configuration of the engagement device 34 will be described later with reference to FIGS.
- FIG. 2 shows a configuration example of the slide fork 21 and is not limited thereto.
- 36 to 38 are belts, of which the belt 36 is a driving belt and the belts 37 and 38 are driven belts.
- a drive pulley 40 drives the belt 36 by a drive motor 41, and idler pulleys 42 and 43 are provided for the belts 37 and 38, respectively.
- Reference numerals 44 to 49 denote fixed ends of the belts 36 to 38.
- the drive pulley 40 and the fixed ends 44, 46 and 48 are provided on the base portion 22, and the idler pulleys 42 and 43 and the fixed end 45 are provided on the middle portion 24.
- the fixed ends 47 and 49 are provided on the top portion 26.
- a guide body 50 and a rail 51 are provided, and stoppers 52 and 53 are provided at both ends of the rail 51, for example.
- the rail 51 is provided in the middle portion 24 and the guide body 50 is provided in the base portion 22, but these arrangements may be reversed.
- a guide body, a rail, and a stopper are provided between the middle portion 24 and the top portion 26.
- the middle portion 24 is provided with an L-shaped engagement member 56 in side view
- the top portion 26 is similarly provided with an L-shaped engagement member 57 in side view.
- the distal ends of the L-shaped engagement members 56 and 57 are horizontal, and the two distal ends are arranged so as to overlap in a plan view, for example, by changing the height position.
- a hole 58 is provided at the tip of the engaging member 56
- a hole 59 is provided at the tip of the engaging member 57.
- the engaging device 34 moves the pair of pins 54, 55 in the vertical direction, thereby moving the pins 54, 55 out of the holes 58, 59.
- the pins 54, 55 are attached to the plate 70.
- a pair of shafts 68 and 68 are attached to the plate 70 and connected to the magnetic plate 65 via a guide 66.
- a shaft 63 of a solenoid 62 is connected to the magnetic plate 65, and the shaft 63 is pressed downward by a spring 64.
- the middle portion 24 or the top portion 26 does not jump out to the side unless the solenoid 62 is energized. Therefore, the top portion 26 to the lifting device 30 and the like do not interfere with other overhead traveling vehicles traveling on the opposing rail 10. Similarly, it does not interfere with the buffer 14 provided on the side.
- a pair of pins 54 and 55 are used for the engagement between the middle portion 24 and the top portion 26, and these pins can be driven by a common solenoid 62, are easy to control, and each pin 54, Since 55 is provided, the stroke can be shortened.
- the middle portion 24 and the top portion 26 are engaged, but instead, the turning device 28 or the lifting device 30 may be engaged with the base portion 22. Further, when there are members connected to the traveling unit side other than the base portion 22, the engaging device 34 may be attached to these members.
- 5 and 6 show a modified engagement device, which is the same as the embodiment of FIGS. 1 to 4 in other points. 5 and 6, the heights of the tips of the engaging members 76 and 77 are aligned, and the heights of the holes 78 and 79 are aligned. As a result, the pins 74 and 75 have a common tip height position. In this case as well, the stroke required for the pin is withdrawing into and out of the holes 78 and 79, which is the same as in the embodiment of FIGS.
- FIG. 7 and 8 show a second embodiment, in which 81 and 82 are new engaging members, and the engaging member 81 is attached to, for example, the middle portion, and the engaging member 82 is attached to, for example, the top portion.
- Holes 83 and 84 that overlap in a plan view are provided at the tips of the engaging members 81 and 82, and one pin 85 is withdrawn and retracted. In this way, compared to the embodiment, the stroke is extended by the distance S in FIG. 7, and a stronger solenoid and a stronger spring are required.
- the slide fork 21 is used as the lateral movement mechanism, but a scalar arm or the like may be used.
- Reference numeral 90 denotes a SCARA arm, which is composed of an upper arm 91 and a lower arm 92.
- engagement members 56 and 57 are provided around a shaft connecting the upper arm 91 and the lower arm 92, and the embodiment shown in FIGS.
- the pair of pins 54 and 55 are retracted by the engaging device 34.
- the engaging device 34 and the engaging members 56 and 57 may be provided on the side of the shaft 96 that connects the main body 94 and the upper arm 91.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
- Control And Safety Of Cranes (AREA)
Abstract
Description
前記側方移動機構は、前記走行部に支持されたベースと、前記昇降装置を支持する移動部とを備え、前記ベースは、走行部の側方へ突き出した状態と走行部の下部に後退させた状態との間で、前記移動部を移動させ、
前記移動部が前記走行部の下部に後退した状態で、前記移動部もしくは前記昇降装置と、前記ベースもしくは前記走行部、とを係合する係合装置を備えていることを特徴とする。
前記移動部を、走行部の側方へ突き出した状態と走行部の下部に後退させた状態との間で、移動させるためのステップと、
前記移動部が前記走行部の下部に後退した状態で、前記移動部もしくは前記昇降装置と、前記ベースもしくは前記走行部、とを係合するためのステップ、とを実行することを特徴とする。
11 走行レール 12 給電レール 14 バッファ
15,16 支柱 20 天井走行車 21 スライドフォーク
22 ベース部 24 ミドル部 26 トップ部 28 旋回装置
30 昇降装置 32 昇降台 33 爪 34 係合装置
35 FOUP 36~38 ベルト 40 駆動プーリ
41 駆動モータ 42,43 アイドラープーリ
44~49 固定端 50,60 ガイド体 51,61 レール
52,53 ストッパ 54,55 ピン 56,57 係合部材
58,59 孔 62 ソレノイド 63,68 軸 64 バネ
65 磁性板 66 ガイド 70 プレート 72,73 ボルト
74,75 ピン 76,77 係合部材 78,79 孔
81,82 係合部材 83,84 孔 85 ピン
90 スカラーアーム 91 上部アーム 92 下部アーム
94 本体部 95,96 軸
Claims (6)
- 走行部と、物品を昇降させる昇降装置と、側方移動機構とから成る天井走行車であって、 前記側方移動機構は、前記走行部に支持されたベースと、前記昇降装置を支持する移動部とを備え、前記ベースは、走行部の側方へ突き出した状態と走行部の下部に後退させた状態との間で、前記移動部を移動させ、
前記移動部が前記走行部の下部に後退した状態で、前記移動部もしくは前記昇降装置と、前記ベースもしくは前記走行部、とを係合する係合装置を備えていることを特徴とする、天井走行車。 - 前記移動部もしくは前記昇降装置は係合用の孔を備えた部材を有し、
前記係合装置は、前記孔に係合した状態と係合を解除した状態との間で出退する少なくとも1個のピンと、前記少なくとも1個のピンの出退機構とを備えていることを特徴とする、請求項1に記載の天井走行車。 - 前記移動部は前記昇降装置を支持するトップ部と、前記ベース部と前記トップ部との中間のミドル部とから成り、
前記トップ部と前記ミドル部は各々、係合用の孔を備えた前記部材を有し、
前記係合装置は、前記少なくとも1個のピンを、前記トップ部と前記ミドル部の各々の係合用の孔に係合すると共に係合を解除することを特徴とする、請求項2に記載の天井走行車。 - 前記係合装置は、前記少なくとも1個のピンを、前記トップ部と前記ミドル部の各々の係合用の孔に1ストロークで係合すると共に、1ストロークで係合を解除するように出退させることを特徴とする、請求項3に記載の天井走行車。
- 前記少なくとも1個のピンは平面視での位置が異なる2個のピンから成り、前記トップ部と前記ミドル部とで、前記係合用の孔の平面視での位置が異なることを特徴とする、請求項4に記載の天井走行車。
- 走行部と、物品を昇降させる昇降装置と、前記走行部に支持されたベースと、前記昇降装置を支持しながら側方へ移動する移動部とを備えた側方移動機構、とから成る天井走行車からの飛び出しを防止する方法であって、
前記移動部を、走行部の側方へ突き出した状態と走行部の下部に後退させた状態との間で、移動させるためのステップと、
前記移動部が前記走行部の下部に後退した状態で、前記移動部もしくは前記昇降装置と、前記ベースもしくは前記走行部、とを係合するためのステップ、とを実行することを特徴とする、天井走行車からの飛び出し防止方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10852130.3A EP2578528A4 (en) | 2010-05-25 | 2010-05-25 | CEILING VEHICLE AND METHOD FOR PREVENTING AVOIDANCE OF CEILING VEHICLES |
JP2012517012A JP5454985B2 (ja) | 2010-05-25 | 2010-05-25 | 天井走行車と、天井走行車からの飛び出し防止方法 |
US13/695,786 US8939698B2 (en) | 2010-05-25 | 2010-05-25 | Ceiling traveling vehicle and method for preventing protrusion from ceiling traveling vehicle |
KR1020127030497A KR101503261B1 (ko) | 2010-05-25 | 2010-05-25 | 천장 주행차와 천장 주행차로부터의 이탈 방지 방법 |
SG2012060075A SG185351A1 (en) | 2010-05-25 | 2010-05-25 | Ceiling traveling vehicle and method for preventing protrusion from ceiling traveling vehicle |
CN201080065425.0A CN102939257B (zh) | 2010-05-25 | 2010-05-25 | 桥式行车和防止从桥式行车突出的方法 |
PCT/JP2010/058808 WO2011148459A1 (ja) | 2010-05-25 | 2010-05-25 | 天井走行車と、天井走行車からの飛び出し防止方法 |
TW100116468A TWI532673B (zh) | 2010-05-25 | 2011-05-11 | And a method of preventing the fall off from the overhead traveling vehicle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2010/058808 WO2011148459A1 (ja) | 2010-05-25 | 2010-05-25 | 天井走行車と、天井走行車からの飛び出し防止方法 |
Publications (1)
Publication Number | Publication Date |
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WO2011148459A1 true WO2011148459A1 (ja) | 2011-12-01 |
Family
ID=45003468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2010/058808 WO2011148459A1 (ja) | 2010-05-25 | 2010-05-25 | 天井走行車と、天井走行車からの飛び出し防止方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8939698B2 (ja) |
EP (1) | EP2578528A4 (ja) |
JP (1) | JP5454985B2 (ja) |
KR (1) | KR101503261B1 (ja) |
CN (1) | CN102939257B (ja) |
SG (1) | SG185351A1 (ja) |
TW (1) | TWI532673B (ja) |
WO (1) | WO2011148459A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015104887A1 (ja) | 2014-01-07 | 2015-07-16 | 村田機械株式会社 | 移載装置及び移載装置の制御方法 |
WO2016178347A1 (ja) * | 2015-05-01 | 2016-11-10 | 村田機械株式会社 | 自動倉庫及び懸垂式スタッカクレーン |
WO2023218757A1 (ja) * | 2022-05-10 | 2023-11-16 | 村田機械株式会社 | 天井搬送車 |
WO2023233863A1 (ja) * | 2022-06-01 | 2023-12-07 | 村田機械株式会社 | 天井搬送車 |
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JPH05330789A (ja) * | 1992-06-01 | 1993-12-14 | Takenaka Komuten Co Ltd | 天井クレーンの駆動装置 |
JP2008127200A (ja) | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
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CN100560470C (zh) * | 2006-06-13 | 2009-11-18 | 大福株式会社 | 滑动式叉装置 |
US7637709B2 (en) * | 2006-07-11 | 2009-12-29 | United Technologies Corporation | Safety interlock system for mechanical manipulators |
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2010
- 2010-05-25 JP JP2012517012A patent/JP5454985B2/ja not_active Expired - Fee Related
- 2010-05-25 KR KR1020127030497A patent/KR101503261B1/ko not_active IP Right Cessation
- 2010-05-25 CN CN201080065425.0A patent/CN102939257B/zh not_active Expired - Fee Related
- 2010-05-25 WO PCT/JP2010/058808 patent/WO2011148459A1/ja active Application Filing
- 2010-05-25 US US13/695,786 patent/US8939698B2/en not_active Expired - Fee Related
- 2010-05-25 EP EP10852130.3A patent/EP2578528A4/en not_active Withdrawn
- 2010-05-25 SG SG2012060075A patent/SG185351A1/en unknown
-
2011
- 2011-05-11 TW TW100116468A patent/TWI532673B/zh not_active IP Right Cessation
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JPS61145098A (ja) * | 1984-12-20 | 1986-07-02 | 石川島播磨重工業株式会社 | 艙内荷役装置 |
JPH05330789A (ja) * | 1992-06-01 | 1993-12-14 | Takenaka Komuten Co Ltd | 天井クレーンの駆動装置 |
JP2008127200A (ja) | 2006-11-27 | 2008-06-05 | Murata Mach Ltd | 天井走行車 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015104887A1 (ja) | 2014-01-07 | 2015-07-16 | 村田機械株式会社 | 移載装置及び移載装置の制御方法 |
KR20160095062A (ko) | 2014-01-07 | 2016-08-10 | 무라다기카이가부시끼가이샤 | 이동 재치 장치 및 이동 재치 장치의 제어 방법 |
JPWO2015104887A1 (ja) * | 2014-01-07 | 2017-03-23 | 村田機械株式会社 | 移載装置及び移載装置の制御方法 |
US9881824B2 (en) | 2014-01-07 | 2018-01-30 | Murata Machinery, Ltd. | Transfer apparatus and control method thereof |
KR101829650B1 (ko) | 2014-01-07 | 2018-02-19 | 무라다기카이가부시끼가이샤 | 이동 재치 장치 및 이동 재치 장치의 제어 방법 |
WO2016178347A1 (ja) * | 2015-05-01 | 2016-11-10 | 村田機械株式会社 | 自動倉庫及び懸垂式スタッカクレーン |
JPWO2016178347A1 (ja) * | 2015-05-01 | 2018-02-15 | 村田機械株式会社 | 自動倉庫及び懸垂式スタッカクレーン |
US10683167B2 (en) | 2015-05-01 | 2020-06-16 | Murata Machinery, Ltd. | Automated warehouse and suspension-type stacker crane |
WO2023218757A1 (ja) * | 2022-05-10 | 2023-11-16 | 村田機械株式会社 | 天井搬送車 |
WO2023233863A1 (ja) * | 2022-06-01 | 2023-12-07 | 村田機械株式会社 | 天井搬送車 |
Also Published As
Publication number | Publication date |
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US20130051962A1 (en) | 2013-02-28 |
KR101503261B1 (ko) | 2015-03-17 |
JPWO2011148459A1 (ja) | 2013-07-25 |
SG185351A1 (en) | 2012-12-28 |
EP2578528A1 (en) | 2013-04-10 |
TW201144207A (en) | 2011-12-16 |
CN102939257B (zh) | 2014-12-03 |
KR20130014571A (ko) | 2013-02-07 |
US8939698B2 (en) | 2015-01-27 |
EP2578528A4 (en) | 2013-12-25 |
JP5454985B2 (ja) | 2014-03-26 |
TWI532673B (zh) | 2016-05-11 |
CN102939257A (zh) | 2013-02-20 |
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