WO2011141960A1 - Entrepôt automatique et procédé de transfert - Google Patents

Entrepôt automatique et procédé de transfert Download PDF

Info

Publication number
WO2011141960A1
WO2011141960A1 PCT/JP2010/003209 JP2010003209W WO2011141960A1 WO 2011141960 A1 WO2011141960 A1 WO 2011141960A1 JP 2010003209 W JP2010003209 W JP 2010003209W WO 2011141960 A1 WO2011141960 A1 WO 2011141960A1
Authority
WO
WIPO (PCT)
Prior art keywords
holding unit
sensor
light receiving
holding
unit
Prior art date
Application number
PCT/JP2010/003209
Other languages
English (en)
Japanese (ja)
Inventor
伊藤靖久
Original Assignee
ムラテックオートメーション株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ムラテックオートメーション株式会社 filed Critical ムラテックオートメーション株式会社
Priority to PCT/JP2010/003209 priority Critical patent/WO2011141960A1/fr
Priority to TW100115758A priority patent/TW201202111A/zh
Publication of WO2011141960A1 publication Critical patent/WO2011141960A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

La présente invention concerne un entrepôt automatique qui, même si un article monté sur un rayon n'est pas disposé à un emplacement prédéterminé, peut transférer l'article. La présente invention concerne de manière spécifique un entrepôt automatique (10), dans lequel un dispositif de commande (100) est pourvu : d'une section de déplacement initial destinée à déplacer une unité de retenue (210) à un emplacement de déplacement initial de telle sorte que le premier capteur à émission de lumière et un premier capteur à réception de lumière sont disposés sur les deux côtés et au-dessus d'une section de projection (21), et une section de retenue est disposée en avant et au-dessus de la section de projection (21) ; d'une section de déplacement montant et descendant destinée à déplacer l'unité de retenue (210) en haut et en bas à partir de l'emplacement de déplacement initial et à arrêter l'unité de retenue (210) lorsque le capteur à émission de lumière et le capteur à réception de lumière détectent la section de projection (21) ; et d'une section de déplacement horizontal destinée à déplacer l'unité de retenue (210) dans la direction horizontale vers l'arrière de la section de projection (21) de sorte que la section de retenue est insérée sous la section de projection (21).
PCT/JP2010/003209 2010-05-12 2010-05-12 Entrepôt automatique et procédé de transfert WO2011141960A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2010/003209 WO2011141960A1 (fr) 2010-05-12 2010-05-12 Entrepôt automatique et procédé de transfert
TW100115758A TW201202111A (en) 2010-05-12 2011-05-05 Automatic warehouse and transfer method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/003209 WO2011141960A1 (fr) 2010-05-12 2010-05-12 Entrepôt automatique et procédé de transfert

Publications (1)

Publication Number Publication Date
WO2011141960A1 true WO2011141960A1 (fr) 2011-11-17

Family

ID=44914032

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/003209 WO2011141960A1 (fr) 2010-05-12 2010-05-12 Entrepôt automatique et procédé de transfert

Country Status (2)

Country Link
TW (1) TW201202111A (fr)
WO (1) WO2011141960A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI584398B (zh) * 2015-05-29 2017-05-21 Temporary platform automatic correction device and method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125548U (fr) * 1988-02-19 1989-08-28
JP2000012644A (ja) * 1998-06-25 2000-01-14 Kokusai Electric Co Ltd カセット移載システム
JP2001298069A (ja) * 2000-03-16 2001-10-26 Applied Materials Inc カセットの保管および移動装置
JP2004363363A (ja) * 2003-06-05 2004-12-24 Tokyo Electron Ltd 搬送装置及び処理装置並びに搬送方法
JP2005064130A (ja) * 2003-08-08 2005-03-10 Asyst Shinko Inc 搬送装置
JP2005194009A (ja) * 2004-01-05 2005-07-21 Asyst Shinko Inc 懸垂型搬送台車

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125548U (fr) * 1988-02-19 1989-08-28
JP2000012644A (ja) * 1998-06-25 2000-01-14 Kokusai Electric Co Ltd カセット移載システム
JP2001298069A (ja) * 2000-03-16 2001-10-26 Applied Materials Inc カセットの保管および移動装置
JP2004363363A (ja) * 2003-06-05 2004-12-24 Tokyo Electron Ltd 搬送装置及び処理装置並びに搬送方法
JP2005064130A (ja) * 2003-08-08 2005-03-10 Asyst Shinko Inc 搬送装置
JP2005194009A (ja) * 2004-01-05 2005-07-21 Asyst Shinko Inc 懸垂型搬送台車

Also Published As

Publication number Publication date
TW201202111A (en) 2012-01-16

Similar Documents

Publication Publication Date Title
TWI661986B (zh) 物品之支撐裝置及支撐方法
US7845284B2 (en) Overhead traveling vehicle having safety member
US20150066199A1 (en) Robot hand, robot system, and method for depalletizing article
JP4863985B2 (ja) 基板処理装置
US10056282B2 (en) Method and system of robot fork calibration and wafer pick-and-place
US7230702B2 (en) Monitoring of smart pin transition timing
KR102233207B1 (ko) 기판 파지 기구, 기판 반송 장치 및 기판 처리 시스템
KR101770161B1 (ko) 트레이 이송장치
TWI582887B (zh) A supporting device for an article, and a method of placing two articles on the support device
KR102063654B1 (ko) 웨이퍼 티칭 지그
US8444129B2 (en) Methods of verifying effectiveness of a put of a substrate onto a substrate support
WO2011141960A1 (fr) Entrepôt automatique et procédé de transfert
US9978631B2 (en) Wafer pick-and-place method and system
CN215618061U (zh) 夹持装置及晶圆盒搬运机器人
KR102059567B1 (ko) 기판 반송 장치
JP5650380B2 (ja) ワークピックアップ装置及び方法
JP2023146715A (ja) 荷卸し装置
CN214624997U (zh) 晶圆盒承载装置和晶圆盒搬运机器人
JP4487319B2 (ja) 位置決め装置とそれを用いた載置台
KR101940017B1 (ko) 트레이 이송장치
KR20210091943A (ko) 반송 유닛 및 척킹 방법
JP2010278044A (ja) 基板搬送装置
JP2006080345A (ja) ウエハ搬送アームとウエハ搬送装置
KR20130068288A (ko) 기판 이송 로봇
US20240059486A1 (en) Transport Vehicle

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10851348

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10851348

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP