WO2011141960A1 - Automatic warehouse and transfer method - Google Patents

Automatic warehouse and transfer method Download PDF

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Publication number
WO2011141960A1
WO2011141960A1 PCT/JP2010/003209 JP2010003209W WO2011141960A1 WO 2011141960 A1 WO2011141960 A1 WO 2011141960A1 JP 2010003209 W JP2010003209 W JP 2010003209W WO 2011141960 A1 WO2011141960 A1 WO 2011141960A1
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WO
WIPO (PCT)
Prior art keywords
holding unit
sensor
light receiving
holding
unit
Prior art date
Application number
PCT/JP2010/003209
Other languages
French (fr)
Japanese (ja)
Inventor
伊藤靖久
Original Assignee
ムラテックオートメーション株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ムラテックオートメーション株式会社 filed Critical ムラテックオートメーション株式会社
Priority to PCT/JP2010/003209 priority Critical patent/WO2011141960A1/en
Priority to TW100115758A priority patent/TW201202111A/en
Publication of WO2011141960A1 publication Critical patent/WO2011141960A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Definitions

  • the present invention relates to an automatic warehouse including a transfer device for transferring an article, and an article transfer method using the automatic warehouse.
  • the transfer device is stopped in front of the article by positioning the stop position of the transfer apparatus with a servo motor or the like, and the article is transferred between the shelf.
  • the transfer device is stopped at a predetermined position by a servo motor or the like.
  • the transfer device cannot be stopped accurately in front of the article.
  • the article may be overturned, dropped, or damaged.
  • An object of the present invention is to provide an automatic warehouse and a method for transferring articles by the automatic warehouse.
  • an automatic warehouse includes a shelf on which an article having a protruding portion that protrudes in a horizontal direction is placed, and a holding unit that holds the protruding portion, and transfers the article.
  • An automatic warehouse comprising a transfer device and a controller for controlling the movement position of the holding unit, wherein the holding unit is opposed to a holding portion that holds the protruding portion and a position that protrudes from the holding portion.
  • the light projecting sensor and the light receiving sensor are arranged, and the controller is configured such that the light projecting sensor and the light receiving sensor are disposed on both sides and above the projecting portion, and the holding portion is located in front of the projecting portion And the light projecting sensor and the light receiving sensor are disposed on both sides and below the projecting portion, and the holding portion is disposed on the front and lower side of the projecting portion.
  • An initial moving unit that moves the holding unit to an initial moving position, and the holding unit is raised or lowered from the initial moving position, and the light projecting sensor and the light receiving sensor detect the protrusion.
  • the raising / lowering moving part for stopping the holding unit and the stopped holding unit are moved in the horizontal direction toward the rear of the protruding part so that the holding part is inserted below the protruding part.
  • a horizontal movement unit is configured such that the light projecting sensor and the light receiving sensor are disposed on both sides and above the projecting portion, and the holding portion is located in front of the projecting portion And the light projecting sensor and
  • the holding unit is stopped so that the lifting operation from the initial movement position of the holding unit is stopped and the holding portion is inserted below the protruding portion. Is moved in the horizontal direction toward the rear of the protrusion. That is, even when the article is not arranged at a predetermined position, the light projecting sensor and the light receiving sensor can detect the protruding portion to detect the position of the article. For this reason, the exact position where the holding unit stops can be grasped, and the holding unit can be accurately inserted below the protruding portion by moving the holding unit in the horizontal direction from the accurate position. . Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
  • the elevating / lowering unit has a force acting on the holding unit for detecting an overload, rather than performing an operation different from an operation of raising or lowering the holding unit from the initial movement position.
  • the threshold value is reduced, the holding unit is raised or lowered from the initial movement position, and the holding unit is stopped when it is determined that a force greater than the reduced threshold value is acting on the holding unit.
  • the threshold for detecting the overload is reduced from the normal value, the holding unit is raised or lowered from the initial movement position, and a force greater than the reduced threshold is applied to the holding unit. If it is determined, the holding unit is stopped.
  • the holding unit is raised or lowered, if the holding unit interferes with the protrusion and acts on the holding unit even with a small force equal to or greater than the threshold value, the holding unit stops and damage to the protrusion can be prevented. .
  • the holding unit is disposed below the light projecting sensor and the light receiving sensor, and the horizontal moving unit is in a state where the light projecting sensor and the light receiving sensor detect the protruding portion, The holding unit is moved in the horizontal direction.
  • the holding unit is arranged below the light projecting sensor and the light receiving sensor, and moves the holding unit in the horizontal direction in a state where the light projecting sensor and the light receiving sensor detect the protruding portion. That is, since the holding unit is moved in the horizontal direction in a state in which the protruding portion is detected, the holding portion can be reliably inserted below the protruding portion without any unexpected operation after the protruding portion is detected. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
  • the horizontal moving unit repeatedly determines whether the light projecting sensor and the light receiving sensor detect the protruding portion when the holding unit is moved in the horizontal direction.
  • the holding unit when the holding unit is moved in the horizontal direction, it is repeatedly determined whether or not the light projecting sensor and the light receiving sensor detect the protruding portion. For this reason, by continuously confirming the detection of the protruding portion, an unexpected operation can be detected, and the holding portion can be reliably inserted accurately below the protruding portion. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
  • the horizontal movement unit further stops the movement of the holding unit in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor have not detected the protrusion.
  • the movement of the holding unit in the horizontal direction is stopped. For this reason, the movement distance in the horizontal direction of the holding unit can be accurately grasped by the presence or absence of the detection of the protruding portion, and the holding portion can be accurately inserted below the protruding portion with certainty. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
  • the holding unit is further at a position protruding from the holding portion, at a position facing the first light projecting sensor that is the light projecting sensor and the first light receiving sensor that is the light receiving sensor.
  • a second light projecting sensor and a second light receiving sensor are provided.
  • the holding unit includes two pairs of light projecting sensors and light receiving sensors at opposing positions. That is, since the holding unit is provided with a pair of light projecting sensors and light receiving sensors on both the front and rear sides, articles placed on the front and rear sides of the holding unit can be transferred together.
  • the present invention can be realized not only as such an automatic warehouse, but also as a method for transferring articles by an automatic warehouse in which a process performed by a controller provided in the automatic warehouse is a step. It can also be realized as a program or an integrated circuit for causing a computer to execute characteristic steps. Needless to say, such a program can be distributed via a recording medium such as a CD-ROM and a transmission medium such as the Internet.
  • the article can be transferred.
  • FIG. 1 is a perspective view showing an example of an automatic warehouse in the embodiment of the present invention.
  • FIG. 2 is a perspective view showing the configuration of the holding unit in the present embodiment.
  • FIG. 3 is a block diagram showing a functional configuration of the controller in the present embodiment.
  • FIG. 4 is a flowchart showing an example of the operation of the controller in the present embodiment.
  • FIG. 5A is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 5B is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 6A is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 6B is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 7A is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 7B is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 8A is a diagram for explaining the operation of the controller in the present embodiment.
  • FIG. 8B is
  • FIG. 1 is a perspective view showing an example of an automatic warehouse 10 according to an embodiment of the present invention.
  • the automatic warehouse 10 is a device that delivers articles between a shelf and a transfer device. As shown in the figure, the automatic warehouse 10 includes a shelf 300, a transfer device 200, and a controller 100.
  • the shelf 300 is a storage for storing a plurality of articles 20, and the plurality of articles 20 are mounted on the mounting table 310.
  • the article 20 is, for example, a FOUP (Front Opening Unified Pod) having a protruding portion 21 protruding in the horizontal direction such as a flange and containing a wafer for a semiconductor device.
  • FOUP Front Opening Unified Pod
  • item 20 has is not limited to a flange, What kind of shape may be sufficient if it is a protrusion part protruded in the horizontal direction.
  • the transfer device 200 receives the article 20 placed on the placement table 310 from the shelf 300 and transfers the article 20 onto the other placement table 310.
  • the transfer device 200 includes a holding unit 210, an elevating drive unit 220, a horizontal drive unit 230, a horizontal support 240 and a vertical support 250.
  • the holding unit 210 is a metal member that holds the protruding portion 21 of the article 20.
  • the protrusion 21 is, for example, a flange provided on the top of the article 20. Details of the configuration of the holding unit 210 will be described later.
  • the elevating drive unit 220 is a metal bar-like member that raises or lowers the holding unit 210 in the vertical direction (Z-axis direction shown in the figure). That is, under the control of the controller 100, the lifting unit 220 is moved up and down by the servo motor or the like, so that the holding unit 210 is moved up and down.
  • the horizontal drive unit 230 is a metal rod-like member that moves the holding unit 210 in the horizontal direction (X-axis direction shown in the figure). That is, under the control of the controller 100, the horizontal drive unit 230 is moved in the horizontal direction by a servo motor or the like, so that the elevating drive unit 220 and the holding unit 210 are moved in the horizontal direction.
  • the horizontal support 240 is a metal rod-like member that supports the horizontal drive unit 230.
  • the vertical support body 250 is a metal rod-like member that supports the horizontal support body 240.
  • the material of the holding unit 210, the raising / lowering drive part 220, the horizontal drive part 230, the horizontal support body 240, and the vertical support body 250 is not limited to a metal, as long as the goods 20 can be accurately moved. Any material such as resin may be used, and the shape is not limited.
  • the controller 100 is a control device that controls the movement position of the holding unit 210.
  • the controller 100 is realized when a general-purpose computer system such as a dedicated computer system or a personal computer executes the program. Details of the functional configuration of the controller 100 will be described later.
  • FIG. 2 is a perspective view showing the configuration of the holding unit 210 in the present embodiment.
  • FIG. 3 is a view of the holding unit 210 and the lifting drive unit 220 shown in FIG. 1 when viewed from the back side (the Y axis direction plus side shown in FIG. 1).
  • the holding unit 210 is a box-shaped member that is connected to the lower surface portion of the elevating drive unit 220, and includes a holding unit 211, a first light projecting sensor 212, a first light receiving sensor 213, A second light projecting sensor 214 and a second light receiving sensor 215 are provided.
  • the holding part 211 is a pair of flat plate-like members that are arranged below the holding unit 210 and extend in the front-rear direction of the holding unit 210 (X-axis direction shown in the figure). That is, the holding part 211 is composed of two flat members arranged in the left-right direction of the holding unit 210 (Y-axis direction shown in the figure).
  • the holding portion 211 is inserted below the protruding portion 21 of the article 20 and is lifted to hold the protruding portion 21 and transfer the article 20.
  • the first light projecting sensor 212 is disposed at the front end of the right side of the holding unit 210 (X-axis direction plus side and Y-axis direction plus side shown in the figure), and projects light toward the first light receiving sensor 213. It is a device to do.
  • the first light receiving sensor 213 is disposed at the front end of the left side of the holding unit 210 (the X axis direction plus side and the Y axis direction minus side shown in the figure), and receives the light from the first light projecting sensor 212. It is a photoelectric sensor.
  • the first light projecting sensor 212 and the first light receiving sensor 213 are arranged to face each other at a position protruding in the horizontal direction (X-axis direction plus side shown in the figure) from the holding portion 211. Then, light is projected from the first light projecting sensor 212, and the first light receiving sensor 213 receives the light, so that there is an article between the first light projecting sensor 212 and the first light receiving sensor 213. Can be detected.
  • the second light projecting sensor 214 is disposed at the front end of the holding unit 210 on the right rear side (X-axis direction minus side and Y-axis direction plus side shown in the figure), and projects light toward the second light receiving sensor 215. It is a device to do.
  • the second light receiving sensor 215 is disposed at the front end of the holding unit 210 on the left rear side (X-axis direction minus side and Y-axis direction minus side shown in the figure) and receives light from the second light projecting sensor 214. It is a photoelectric sensor.
  • the second light projecting sensor 214 and the second light receiving sensor 215 protrude from the holding portion 211 in the horizontal direction (X-axis direction minus side shown in the figure) and upward (the Z-axis direction plus side shown in the figure). Are arranged opposite to each other. Then, light is projected from the second light projecting sensor 214 and the second light receiving sensor 215 receives the light, so that there is an article between the second light projecting sensor 214 and the second light receiving sensor 215. Can be detected.
  • the pair of first light projection sensor 212 and first light reception sensor 213 and the pair of second light projection sensor 214 and second light reception sensor 215 are in the front-rear direction (X-axis direction shown in the figure). It arrange
  • FIG. The holding unit 211 is disposed below the first light projecting sensor 212, the first light receiving sensor 213, the second light projecting sensor 214, and the second light receiving sensor 215.
  • FIG. 3 is a block diagram showing a functional configuration of the controller 100 in the present embodiment.
  • the controller 100 controls the moving position of the holding unit 210 by controlling the moving position of the lifting / lowering driving unit 220 and the horizontal driving unit 230 of the transfer device 200. As shown in the figure, the controller 100 includes an initial moving unit 110, an up / down moving unit 120, and a horizontal moving unit 130.
  • the initial moving unit 110 is a processing unit that moves the holding unit 210 to the initial moving position. Specifically, in the initial moving unit 110, the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) are arranged on both sides and above the protruding portion 21. At the same time, the holding unit 210 is moved to the initial movement position so that the holding portion 211 is disposed in front of and above the protruding portion 21.
  • the initial moving unit 110 includes the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) disposed on both sides and below the protruding portion 21.
  • the holding unit 210 may be moved to the initial movement position so that the holding portion 211 is disposed in front of and below the protruding portion 21.
  • the up-and-down moving unit 120 raises or lowers the holding unit 210 from the initial movement position, and the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) are protruding portions. When 21 is detected, the holding unit 210 is stopped.
  • the lifting / lowering moving unit 120 has a threshold value of the force acting on the holding unit 210 for detecting overload, rather than performing an operation different from the operation of raising or lowering the holding unit 210 from the initial movement position. And the holding unit 210 is raised or lowered from the initial movement position. And when the raising / lowering moving part 120 judges that the force more than the threshold value after reduction acts on the holding
  • the horizontal moving unit 130 moves the stopped holding unit 210 in the horizontal direction toward the rear of the protruding portion 21 so that the holding portion 211 is inserted below the protruding portion 21. Specifically, the horizontal moving unit 130 is held in a state where the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) detect the protruding portion 21. The unit 210 is moved in the horizontal direction.
  • the first light projecting sensor 212 and the first light receiving sensor 213 are used. It is repeatedly determined whether or not the protruding portion 21 is detected. And when the horizontal movement part 130 judges that the 1st light projection sensor 212 and the 1st light reception sensor 213 (or the 2nd light projection sensor 214 and the 2nd light reception sensor 215) have not detected the protrusion part 21, Then, the movement of the holding unit 210 in the horizontal direction is stopped.
  • FIG. 4 is a flowchart showing an example of the operation of the controller 100 in the present embodiment.
  • 5A to 8B are diagrams for explaining the operation of the controller 100 according to the present embodiment.
  • the initial movement unit 110 moves the holding unit 210 to the initial movement position (S102). Specifically, as shown in FIGS. 5A and 5B, the initial moving unit 110 moves the holding unit 210 to the horizontal driving unit 230 from the position shown in FIG. By horizontally moving the X-axis direction plus side), the holding unit 210 is moved to the initial movement position shown in FIG. 5B.
  • FIG. 6A and 6B are diagrams for explaining the initial movement position. Specifically, FIG. 6A is a view of the holding unit 210 and the article 20 shown in FIG. 5B as viewed from the side (the Y axis direction plus side shown in FIG. 5B), and FIG. 6B is a view of FIG. It is the figure which looked at the holding
  • the initial movement position is such that the first light projecting sensor 212 and the first light receiving sensor 213 are located on both sides (both sides in the Y-axis direction shown in the figure) and above (shown in the figure). It is a position arranged on the positive side in the Z-axis direction). That is, the initial movement position is a position at which the first light projecting sensor 212 is disposed on the side and above the side surface 21b of the protruding portion 21, and the first light receiving sensor 213 is on the side of the side surface 21c of the protruding portion 21. And it is a position arrange
  • the initial movement position is a position where the holding portion 211 is disposed in front of the protruding portion 21 (X-axis direction minus side shown in the figure) and above (Z-axis direction plus side shown in the figure). That is, the initial movement position is a position where the holding portion 211 is disposed in front of and above the front surface portion 21 a of the protruding portion 21.
  • the initial moving unit 110 controls the horizontal driving unit 230 so that the first light projecting sensor 212 and the first light receiving sensor 213 are disposed on both sides and above the projecting unit 21, and the holding unit 211.
  • the holding unit 210 is moved to the initial movement position so that is disposed in front of and above the protrusion 21.
  • the initial movement position is such that the first light projecting sensor 212 and the first light receiving sensor 213 are on both sides of the protrusion 21 (both sides in the Y-axis direction shown in the figure) and below (minus side in the Z-axis direction shown in the figure).
  • the holding portion 211 may be positioned in front of the protruding portion 21 (X-axis direction minus side shown in the figure) and below (Z-axis direction minus side shown in the figure).
  • the initial moving unit 110 controls the elevation driving unit 220 and the horizontal driving unit 230 so that the first light projecting sensor 212 and the first light receiving sensor 213 are disposed on both sides and below the protruding portion 21.
  • the holding unit 210 is moved to the initial movement position so that the holding part 211 is disposed in front of and below the protruding part 21.
  • the lifting and lowering moving unit 120 reduces the threshold value of the force acting on the holding unit 210 for detecting overload (S 104). That is, the lifting / lowering moving unit 120 is more likely to perform an operation of raising or lowering the holding unit 210 from the initial movement position than to perform an operation different from an operation of raising or lowering the holding unit 210 from the initial movement position.
  • the threshold value is reduced so that the threshold value becomes smaller.
  • the lifting / lowering movement unit 120 causes the lifting / lowering driving unit 220 to raise or lower the holding unit 210 from the initial movement position (S106).
  • the up-and-down moving unit 120 includes the holding unit 210. Is lowered from the initial movement position. Further, when the initial movement position is a position where the holding unit 211, the first light projecting sensor 212, and the first light receiving sensor 213 are disposed below the protruding portion 21, the lifting / lowering moving unit 120 moves the holding unit 210. Raise from the initial movement position.
  • the lifting / lowering moving unit 120 determines whether or not an overload abnormality has occurred in the holding unit 210 while the holding unit 210 is moving up or down (S108). That is, the up-and-down moving unit 120 determines whether or not a force equal to or greater than the reduced threshold value is acting on the holding unit 210 due to the protrusion 21 coming into contact with the holding unit 210.
  • the lifting / lowering moving unit 120 stops the holding unit 210 (S110).
  • the lifting / lowering moving unit 120 determines that a force equal to or greater than the threshold is not applied to the holding unit 210 (NO in S108), the first light projecting sensor 212 and the first light receiving sensor 213 move the protruding portion 21 away. It is determined whether or not it has been detected (S112).
  • the elevating / lowering moving unit 120 When it is determined that the first light projecting sensor 212 and the first light receiving sensor 213 have not detected the protruding portion 21 (NO in S112), the elevating / lowering moving unit 120 further raises and lowers the holding unit 210 (S106).
  • the lifting / lowering moving unit 120 stops the holding unit 210 (S114).
  • the up-and-down moving unit 120 moves the holding unit 210 to the initial moving position until it determines that the first light projecting sensor 212 and the first light receiving sensor 213 have detected the protruding portion 21. Lift up and down.
  • the elevating / lowering moving unit 120 may immediately stop the holding unit 210 or use a timer or the like. It may be stopped after a predetermined time, or may be stopped after moving a predetermined distance using an encoder or the like.
  • the horizontal moving unit 130 causes the horizontal driving unit 230 to move the holding unit 210 in the horizontal direction (S116).
  • the horizontal moving unit 130 is configured so that the holding unit 210 is inserted from the position shown in FIGS. 7A and 7B below the protrusion 21. In this manner, the projection 21 is moved in the horizontal direction toward the rear (the X-axis direction plus side shown in the figure).
  • the horizontal moving unit 130 causes the horizontal driving unit 230 to move the holding unit 210 in the horizontal direction in a state where the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21.
  • the horizontal movement unit 130 determines whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21 (S118).
  • the horizontal movement unit 130 determines that the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21 (YES in S118).
  • the horizontal movement unit 130 further moves the holding unit 210 in the horizontal direction (S116).
  • the horizontal moving unit 130 repeatedly determines whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21.
  • the horizontal movement unit 130 determines that the first light projecting sensor 212 and the first light receiving sensor 213 have not detected the protrusion 21 (NO in S118)
  • the horizontal movement unit 130 moves the holding unit 210 in the horizontal direction. Stop (S120). That is, as shown in FIGS. 8A and 8B, the horizontal moving unit 130 moves the holding unit 210 in the horizontal direction until the first light projecting sensor 212 and the first light receiving sensor 213 do not detect the protruding portion 21.
  • the raising / lowering moving part 120 transfers the said article
  • the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21, the lifting operation from the initial movement position of the holding unit 210 is stopped, The holding unit 210 is moved in the horizontal direction toward the rear of the protruding portion 21 so that the holding portion 211 is inserted below the protruding portion 21. That is, even when the article 20 is not arranged at a predetermined position, the first light projecting sensor 212 and the first light receiving sensor 213 can detect the protrusion 21 to detect the position of the article 20. it can.
  • the exact position where the holding unit 210 stops can be grasped, and the holding unit 211 is accurately inserted below the protruding portion 21 by moving the holding unit 210 in the horizontal direction from the accurate position. Can be made. Thereby, even when the article 20 placed on the shelf 300 is not arranged at a predetermined position, the article 20 can be transferred.
  • the holding unit 210 when the threshold for detecting overload is reduced below the normal value, the holding unit 210 is raised or lowered from the initial movement position, and a force equal to or greater than the reduced threshold is applied to the holding unit 210. When it is determined, the holding unit 210 is stopped. Accordingly, when the holding unit 210 is raised or lowered, if the holding unit 210 interferes with the protruding portion 21 and acts on the holding unit 210 even with a small force equal to or greater than the threshold value, the holding unit 210 stops and the protruding portion 21 is damaged. Can be prevented.
  • the holding unit 211 is disposed below the first light projecting sensor 212 and the first light receiving sensor 213, and the holding unit 210 is in a state where the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21. Is moved horizontally. In other words, since the holding unit 210 is moved in the horizontal direction in a state where the protruding portion 21 is detected, the holding portion 211 is surely accurately inserted below the protruding portion 21 without any unexpected operation after the protruding portion 21 is detected. Can be made.
  • the holding unit 210 when the holding unit 210 is moved in the horizontal direction, it is repeatedly determined whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21. For this reason, by continuing to check the detection of the protruding portion 21, an unexpected operation can be detected, and the holding portion 211 can be accurately inserted below the protruding portion 21.
  • the movement of the holding unit 210 in the horizontal direction is stopped. For this reason, the movement distance in the horizontal direction of the holding unit 210 can be accurately grasped depending on whether or not the protruding portion 21 is detected, and the holding portion 211 can be accurately inserted below the protruding portion 21 more accurately. it can.
  • the article 20 placed on the shelf 300 is not arranged at a predetermined position, the article 20 can be transferred.
  • the article 20 is disposed in front of the holding unit 210, and the first light projecting sensor 212 and the first light receiving sensor 213 detect the presence or absence of the protruding portion 21 of the article 20, and the article 20 It was decided to transfer.
  • the article 20 is arranged behind the holding unit 210, and the second light projecting sensor 214 and the second light receiving sensor 215 detect the presence or absence of the protruding portion 21 of the article 20, and transfer the article 20. May be. Thereby, the articles 20 arranged on both front and rear sides of the holding unit 210 can be transferred together.
  • the elevating / lowering unit 120 detects the overload abnormality by reducing the threshold value for detecting the overload.
  • the up-and-down moving unit 120 may detect an overload abnormality without reducing the threshold value, or may not detect an overload abnormality.
  • the horizontal moving unit 130 moves the holding unit 210 in the horizontal direction in a state where the projection 21 is detected by the light projecting sensor and the light receiving sensor.
  • the horizontal moving unit 130 may move the holding unit 210 in the horizontal direction even if the protruding unit 21 is not detected as long as the holding unit 211 is inserted below the protruding unit 21. .
  • the horizontal moving unit 130 repeatedly determines whether or not the light projecting sensor and the light receiving sensor detect the protruding portion 21 when moving the holding unit 210 in the horizontal direction.
  • the horizontal movement unit 130 is not limited to repeated determination. For example, if the light projecting sensor and the light receiving sensor confirm that the protrusion 21 has been detected once, the horizontal movement unit 130 moves the holding unit 210 in the horizontal direction. It may be.
  • the horizontal movement unit 130 stops the movement of the holding unit 210 in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor do not detect the protruding portion 21.
  • the horizontal moving unit 130 may stop the movement of the holding unit 210 after moving the holding unit 210 horizontally for a predetermined distance without determining the detection of the protruding portion 21, for example.
  • the holding unit 210 includes two pairs of light projecting sensors and light receiving sensors on both the front and rear sides.
  • the holding unit 210 may include a pair of light projecting sensor and light receiving sensor only on one side.
  • the present invention can be used as an automatic warehouse, in particular, as an automatic warehouse capable of transferring the article even when the article placed on the shelf is not arranged at a predetermined position. .

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Disclosed is an automatic warehouse which, even if an article mounted on a shelf is not arranged at a predetermined position, is capable of transferring the article. Specifically disclosed is an automatic warehouse (10), wherein a controller (100) is provided with: an initial movement section for moving a holding unit (210) to an initial movement position in such a manner that a first light-emitting sensor and a first light-receiving sensor are arranged on both sides of and above a projection section (21), and a holding section is arranged ahead of and above the projection section (21); an up-and-down movement section for moving the holding unit (210) up or down from the initial movement position, and stopping the holding unit (210) when the light-emitting sensor and the light-receiving sensor detect the projection section (21); and a horizontal movement section for moving the holding unit (210) in the horizontal direction toward the rear of the projection section (21) in such a manner that the holding section is inserted under the projection section (21).

Description

自動倉庫及び移載方法Automatic warehouse and transfer method
　本発明は、物品を移載する移載装置を備える自動倉庫、及び当該自動倉庫による物品の移載方法に関する。 The present invention relates to an automatic warehouse including a transfer device for transferring an article, and an article transfer method using the automatic warehouse.
　近年、物品が載置される棚と、当該棚との間で当該物品を移載する移載装置とを備えた自動倉庫が、広く実用化されている。このような自動倉庫によれば、移載装置が、棚に載置された物品の前で停止して、当該物品を保持し、当該棚との間で当該物品を移載する（例えば、特許文献１参照）。例えば、このような自動倉庫では、半導体デバイス用の基板が収納された基板カセットの前で移載装置を停止させ、移載装置と棚との間で当該基板カセットを移載する。 In recent years, automatic warehouses equipped with a shelf on which articles are placed and a transfer device for transferring the articles between the shelves have been widely put into practical use. According to such an automatic warehouse, the transfer device stops in front of the article placed on the shelf, holds the article, and transfers the article to and from the shelf (for example, a patent) Reference 1). For example, in such an automatic warehouse, the transfer device is stopped in front of a substrate cassette in which substrates for semiconductor devices are stored, and the substrate cassette is transferred between the transfer device and a shelf.
　ここで、従来の自動倉庫では、サーボモータなどで移載装置の停止位置を位置決めすることで、移載装置を物品の前で停止させ、棚との間で当該物品を移載させている。 Here, in the conventional automatic warehouse, the transfer device is stopped in front of the article by positioning the stop position of the transfer apparatus with a servo motor or the like, and the article is transferred between the shelf.
特開２００１－２９８０６９号公報JP 2001-298069 A
　しかしながら、従来の自動倉庫では、棚に載置されている物品が予め定められた位置に配置されていない場合は、物品を移載できない場合があるという問題がある。 However, in the conventional automatic warehouse, there is a problem that the article may not be transferred when the article placed on the shelf is not arranged at a predetermined position.
　つまり、従来の自動倉庫では、サーボモータなどにより、移載装置を予め定められた位置に停止させる。しかし、例えば、棚に載置されている物品が棚上で荷崩れしている場合には、移載装置を物品の前で正確に停止させることができない。このため、従来の自動倉庫では、移載装置で物品を保持する際に、当該物品を転倒又は落下させたり、破損させたりしてしまう恐れがある。 That is, in a conventional automatic warehouse, the transfer device is stopped at a predetermined position by a servo motor or the like. However, for example, when the article placed on the shelf collapses on the shelf, the transfer device cannot be stopped accurately in front of the article. For this reason, in a conventional automatic warehouse, when an article is held by a transfer device, the article may be overturned, dropped, or damaged.
　これにより、従来の自動倉庫では、棚に載置されている物品が予め定められた位置に配置されていない場合は、移載装置が物品を正確に保持することができず、当該物品を移載できない場合がある。 As a result, in the conventional automatic warehouse, when the article placed on the shelf is not arranged at a predetermined position, the transfer device cannot accurately hold the article, and the article is transferred. There are cases where it cannot be listed.
　そこで、本発明は、このような問題に鑑みてなされたものであり、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる自動倉庫及び当該自動倉庫による物品の移載方法を提供することを目的とする。 Therefore, the present invention has been made in view of such a problem, and even when an article placed on a shelf is not arranged at a predetermined position, the article can be transferred. An object of the present invention is to provide an automatic warehouse and a method for transferring articles by the automatic warehouse.
　上記目的を達成するために、本発明に係る自動倉庫は、水平方向に突出した突出部を有する物品が載置される棚と、前記突出部を保持する保持ユニットを備え前記物品を移載する移載装置と、前記保持ユニットの移動位置を制御するコントローラとを備える自動倉庫であって、前記保持ユニットは、前記突出部を保持する保持部と、前記保持部から突出した位置に、対向して配置される投光センサ及び受光センサとを備え、前記コントローラは、前記投光センサ及び前記受光センサが前記突出部の両側方かつ上方に配置されるとともに、前記保持部が前記突出部の前方かつ上方に配置されるように、又は、前記投光センサ及び前記受光センサが前記突出部の両側方かつ下方に配置されるとともに、前記保持部が前記突出部の前方かつ下方に配置されるように、前記保持ユニットを初期移動位置に移動させる初期移動部と、前記保持ユニットを前記初期移動位置から上昇又は下降させ、前記投光センサ及び前記受光センサが前記突出部を検出した場合に、前記保持ユニットを停止させる昇降移動部と、停止された前記保持ユニットを、前記保持部が前記突出部の下方に挿入されるように、前記突出部の後方に向けて水平方向に移動させる水平移動部とを備える。 In order to achieve the above object, an automatic warehouse according to the present invention includes a shelf on which an article having a protruding portion that protrudes in a horizontal direction is placed, and a holding unit that holds the protruding portion, and transfers the article. An automatic warehouse comprising a transfer device and a controller for controlling the movement position of the holding unit, wherein the holding unit is opposed to a holding portion that holds the protruding portion and a position that protrudes from the holding portion. The light projecting sensor and the light receiving sensor are arranged, and the controller is configured such that the light projecting sensor and the light receiving sensor are disposed on both sides and above the projecting portion, and the holding portion is located in front of the projecting portion And the light projecting sensor and the light receiving sensor are disposed on both sides and below the projecting portion, and the holding portion is disposed on the front and lower side of the projecting portion. An initial moving unit that moves the holding unit to an initial moving position, and the holding unit is raised or lowered from the initial moving position, and the light projecting sensor and the light receiving sensor detect the protrusion. In this case, the raising / lowering moving part for stopping the holding unit and the stopped holding unit are moved in the horizontal direction toward the rear of the protruding part so that the holding part is inserted below the protruding part. A horizontal movement unit.
　これによれば、投光センサ及び受光センサが突出部を検出した場合に、保持ユニットの初期移動位置からの昇降動作を停止させ、保持部が突出部の下方に挿入されるように、保持ユニットを突出部の後方に向けて水平方向に移動させる。つまり、物品が予め定められた位置に配置されていない場合でも、投光センサ及び受光センサが、突出部を検出することで、物品の位置を検出することができる。このため、保持ユニットが停止する正確な位置を把握することができ、当該正確な位置から、保持ユニットを水平方向に移動させることで、保持部を突出部の下方に正確に挿入させることができる。これにより、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる。 According to this, when the light projecting sensor and the light receiving sensor detect the protruding portion, the holding unit is stopped so that the lifting operation from the initial movement position of the holding unit is stopped and the holding portion is inserted below the protruding portion. Is moved in the horizontal direction toward the rear of the protrusion. That is, even when the article is not arranged at a predetermined position, the light projecting sensor and the light receiving sensor can detect the protruding portion to detect the position of the article. For this reason, the exact position where the holding unit stops can be grasped, and the holding unit can be accurately inserted below the protruding portion by moving the holding unit in the horizontal direction from the accurate position. . Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
　また、好ましくは、前記昇降移動部は、前記保持ユニットを前記初期移動位置から上昇又は下降させる動作とは異なる動作を行う場合よりも、過負荷を検出するための前記保持ユニットに作用する力の閾値を低減させて、前記保持ユニットを前記初期移動位置から上昇又は下降させ、さらに、前記保持ユニットに低減後の前記閾値以上の力が作用していると判断した場合に、前記保持ユニットを停止させる。 Preferably, the elevating / lowering unit has a force acting on the holding unit for detecting an overload, rather than performing an operation different from an operation of raising or lowering the holding unit from the initial movement position. The threshold value is reduced, the holding unit is raised or lowered from the initial movement position, and the holding unit is stopped when it is determined that a force greater than the reduced threshold value is acting on the holding unit. Let
　これによれば、過負荷を検出するための閾値を通常の値よりも低減させて、保持ユニットを初期移動位置から上昇又は下降させ、保持ユニットに低減後の閾値以上の力が作用していると判断した場合に、保持ユニットを停止させる。これにより、保持ユニットの上昇又は下降時に、保持ユニットが突出部に干渉して当該閾値以上の小さな力でも保持ユニットに作用すれば、保持ユニットが停止し、突出部の破損を防止することができる。 According to this, the threshold for detecting the overload is reduced from the normal value, the holding unit is raised or lowered from the initial movement position, and a force greater than the reduced threshold is applied to the holding unit. If it is determined, the holding unit is stopped. As a result, when the holding unit is raised or lowered, if the holding unit interferes with the protrusion and acts on the holding unit even with a small force equal to or greater than the threshold value, the holding unit stops and damage to the protrusion can be prevented. .
　また、好ましくは、前記保持部は、前記投光センサ及び前記受光センサの下方に配置されており、前記水平移動部は、前記投光センサ及び前記受光センサが前記突出部を検出した状態で、前記保持ユニットを前記水平方向に移動させる。 Preferably, the holding unit is disposed below the light projecting sensor and the light receiving sensor, and the horizontal moving unit is in a state where the light projecting sensor and the light receiving sensor detect the protruding portion, The holding unit is moved in the horizontal direction.
　これによれば、保持部は、投光センサ及び受光センサの下方に配置され、投光センサ及び受光センサが突出部を検出した状態で、保持ユニットを水平方向に移動させる。つまり、突出部を検出した状態で保持ユニットを水平方向に移動させるため、突出部の検出後に不意の動作が起こることなく、確実に保持部を突出部の下方に正確に挿入させることができる。これにより、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる。 According to this, the holding unit is arranged below the light projecting sensor and the light receiving sensor, and moves the holding unit in the horizontal direction in a state where the light projecting sensor and the light receiving sensor detect the protruding portion. That is, since the holding unit is moved in the horizontal direction in a state in which the protruding portion is detected, the holding portion can be reliably inserted below the protruding portion without any unexpected operation after the protruding portion is detected. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
　また、好ましくは、前記水平移動部は、前記保持ユニットを前記水平方向に移動させる際に、前記投光センサ及び前記受光センサが前記突出部を検出しているか否かを繰り返し判断する。 Preferably, the horizontal moving unit repeatedly determines whether the light projecting sensor and the light receiving sensor detect the protruding portion when the holding unit is moved in the horizontal direction.
　これによれば、保持ユニットを水平方向に移動させる際に、投光センサ及び受光センサが突出部を検出しているか否かを繰り返し判断する。このため、突出部の検出を確認し続けることで、不意の動作を検出することができ、確実に保持部を突出部の下方に正確に挿入させることができる。これにより、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる。 According to this, when the holding unit is moved in the horizontal direction, it is repeatedly determined whether or not the light projecting sensor and the light receiving sensor detect the protruding portion. For this reason, by continuously confirming the detection of the protruding portion, an unexpected operation can be detected, and the holding portion can be reliably inserted accurately below the protruding portion. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
　また、好ましくは、前記水平移動部は、さらに、前記投光センサ及び前記受光センサが前記突出部を検出していないと判断した場合に、前記保持ユニットの前記水平方向への移動を停止させる。 Also preferably, the horizontal movement unit further stops the movement of the holding unit in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor have not detected the protrusion.
　これによれば、投光センサ及び受光センサが突出部を検出していないと判断した場合に、保持ユニットの水平方向への移動を停止させる。このため、突出部の検出の有無により、保持ユニットの水平方向への移動距離も正確に把握することができ、さらに確実に保持部を突出部の下方に正確に挿入させることができる。これにより、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる。 According to this, when it is determined that the light projecting sensor and the light receiving sensor have not detected the protruding portion, the movement of the holding unit in the horizontal direction is stopped. For this reason, the movement distance in the horizontal direction of the holding unit can be accurately grasped by the presence or absence of the detection of the protruding portion, and the holding portion can be accurately inserted below the protruding portion with certainty. Thereby, even when the article placed on the shelf is not arranged at a predetermined position, the article can be transferred.
　また、好ましくは、前記保持ユニットは、さらに、前記保持部から突出した位置であって、前記投光センサである第一投光センサ及び前記受光センサである第一受光センサと対向する位置に、第二投光センサ及び第二受光センサを備える。 Preferably, the holding unit is further at a position protruding from the holding portion, at a position facing the first light projecting sensor that is the light projecting sensor and the first light receiving sensor that is the light receiving sensor. A second light projecting sensor and a second light receiving sensor are provided.
　これによれば、保持ユニットは、対向する位置に、２対の投光センサ及び受光センサを備える。つまり、保持ユニットは、前後両側に投光センサ及び受光センサを１対ずつ備えているため、保持ユニットの前後両側に配置されている物品を、共に移載することができる。 According to this, the holding unit includes two pairs of light projecting sensors and light receiving sensors at opposing positions. That is, since the holding unit is provided with a pair of light projecting sensors and light receiving sensors on both the front and rear sides, articles placed on the front and rear sides of the holding unit can be transferred together.
　なお、本発明は、このような自動倉庫として実現することができるだけでなく、自動倉庫が備えるコントローラが行う処理をステップとする自動倉庫による物品の移載方法として実現することもでき、そのような特徴的なステップをコンピュータに実行させるプログラムや集積回路として実現したりすることもできる。そして、そのようなプログラムは、ＣＤ－ＲＯＭ等の記録媒体及びインターネット等の伝送媒体を介して流通させることができるのは言うまでもない。 Note that the present invention can be realized not only as such an automatic warehouse, but also as a method for transferring articles by an automatic warehouse in which a process performed by a controller provided in the automatic warehouse is a step. It can also be realized as a program or an integrated circuit for causing a computer to execute characteristic steps. Needless to say, such a program can be distributed via a recording medium such as a CD-ROM and a transmission medium such as the Internet.
　本発明に係る自動倉庫によれば、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる。 According to the automatic warehouse according to the present invention, even when an article placed on a shelf is not arranged at a predetermined position, the article can be transferred.
図１は、本発明の実施の形態における自動倉庫の一例を示す斜視図である。FIG. 1 is a perspective view showing an example of an automatic warehouse in the embodiment of the present invention. 図２は、本実施の形態における保持ユニットの構成を示す斜視図である。FIG. 2 is a perspective view showing the configuration of the holding unit in the present embodiment. 図３は、本実施の形態におけるコントローラの機能構成を示すブロック図である。FIG. 3 is a block diagram showing a functional configuration of the controller in the present embodiment. 図４は、本実施の形態におけるコントローラの動作の一例を示すフローチャートである。FIG. 4 is a flowchart showing an example of the operation of the controller in the present embodiment. 図５Ａは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 5A is a diagram for explaining the operation of the controller in the present embodiment. 図５Ｂは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 5B is a diagram for explaining the operation of the controller in the present embodiment. 図６Ａは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 6A is a diagram for explaining the operation of the controller in the present embodiment. 図６Ｂは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 6B is a diagram for explaining the operation of the controller in the present embodiment. 図７Ａは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 7A is a diagram for explaining the operation of the controller in the present embodiment. 図７Ｂは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 7B is a diagram for explaining the operation of the controller in the present embodiment. 図８Ａは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 8A is a diagram for explaining the operation of the controller in the present embodiment. 図８Ｂは、本実施の形態におけるコントローラの動作を説明するための図である。FIG. 8B is a diagram for explaining the operation of the controller in the present embodiment.
　以下、本発明の実施の形態について、図面を用いて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　図１は、本発明の実施の形態における自動倉庫１０の一例を示す斜視図である。 FIG. 1 is a perspective view showing an example of an automatic warehouse 10 according to an embodiment of the present invention.
　自動倉庫１０は、棚と移載装置との間で物品の受け渡しを行う装置である。同図に示すように、自動倉庫１０は、棚３００、移載装置２００及びコントローラ１００を備えている。 The automatic warehouse 10 is a device that delivers articles between a shelf and a transfer device. As shown in the figure, the automatic warehouse 10 includes a shelf 300, a transfer device 200, and a controller 100.
　棚３００は、複数の物品２０を保管する保管庫であり、載置台３１０上に複数の物品２０が載置されている。ここで、物品２０は、例えば、フランジなどの水平方向に突出した突出部２１を有し、半導体デバイス用のウエハを収納したＦＯＵＰ（Ｆｒｏｎｔ　Ｏｐｅｎｉｎｇ　Ｕｎｉｆｉｅｄ　Ｐｏｄ）である。なお、物品２０が有する突出部２１は、フランジであることに限定されず、水平方向に突出した突出部であればどのような形状であってもよい。 The shelf 300 is a storage for storing a plurality of articles 20, and the plurality of articles 20 are mounted on the mounting table 310. Here, the article 20 is, for example, a FOUP (Front Opening Unified Pod) having a protruding portion 21 protruding in the horizontal direction such as a flange and containing a wafer for a semiconductor device. In addition, the protrusion part 21 which the article | item 20 has is not limited to a flange, What kind of shape may be sufficient if it is a protrusion part protruded in the horizontal direction.
　移載装置２００は、棚３００から載置台３１０上に載置された物品２０を受け取り、他の載置台３１０上に当該物品２０を移載する。この移載装置２００は、保持ユニット２１０、昇降駆動部２２０、水平駆動部２３０、水平支持体２４０及び垂直支持体２５０を備えている。 The transfer device 200 receives the article 20 placed on the placement table 310 from the shelf 300 and transfers the article 20 onto the other placement table 310. The transfer device 200 includes a holding unit 210, an elevating drive unit 220, a horizontal drive unit 230, a horizontal support 240 and a vertical support 250.
　保持ユニット２１０は、物品２０が有する突出部２１を保持する金属製の部材である。ここで、突出部２１は、例えば、物品２０の上部に備えられたフランジである。この保持ユニット２１０の構成の詳細については、後述する。 The holding unit 210 is a metal member that holds the protruding portion 21 of the article 20. Here, the protrusion 21 is, for example, a flange provided on the top of the article 20. Details of the configuration of the holding unit 210 will be described later.
　昇降駆動部２２０は、保持ユニット２１０を上下方向（同図に示すＺ軸方向）に上昇又は下降させる金属製の棒状部材である。つまり、コントローラ１００の制御により、サーボモータなどによって昇降駆動部２２０が上下方向に昇降することで、保持ユニット２１０が昇降する。 The elevating drive unit 220 is a metal bar-like member that raises or lowers the holding unit 210 in the vertical direction (Z-axis direction shown in the figure). That is, under the control of the controller 100, the lifting unit 220 is moved up and down by the servo motor or the like, so that the holding unit 210 is moved up and down.
　水平駆動部２３０は、保持ユニット２１０を水平方向（同図に示すＸ軸方向）に移動させる金属製の棒状部材である。つまり、コントローラ１００の制御により、サーボモータなどによって水平駆動部２３０が水平方向に移動することで、昇降駆動部２２０及び保持ユニット２１０が水平方向に移動する。 The horizontal drive unit 230 is a metal rod-like member that moves the holding unit 210 in the horizontal direction (X-axis direction shown in the figure). That is, under the control of the controller 100, the horizontal drive unit 230 is moved in the horizontal direction by a servo motor or the like, so that the elevating drive unit 220 and the holding unit 210 are moved in the horizontal direction.
　水平支持体２４０は、水平駆動部２３０を支持する金属製の棒状部材である。 The horizontal support 240 is a metal rod-like member that supports the horizontal drive unit 230.
　垂直支持体２５０は、水平支持体２４０を支持する金属製の棒状部材である。 The vertical support body 250 is a metal rod-like member that supports the horizontal support body 240.
　なお、保持ユニット２１０、昇降駆動部２２０、水平駆動部２３０、水平支持体２４０及び垂直支持体２５０の材質は、金属には限定されず、物品２０の移動を精度良く行うことができるのであれば、樹脂等どのような材質であってもよく、形状も限定されない。 In addition, the material of the holding unit 210, the raising / lowering drive part 220, the horizontal drive part 230, the horizontal support body 240, and the vertical support body 250 is not limited to a metal, as long as the goods 20 can be accurately moved. Any material such as resin may be used, and the shape is not limited.
　コントローラ１００は、保持ユニット２１０の移動位置を制御する制御装置である。ここで、コントローラ１００は、専用のコンピュータシステム、又はパーソナルコンピュータ等の汎用のコンピュータシステムがプログラムを実行することによって実現される。このコントローラ１００の機能構成の詳細については、後述する。 The controller 100 is a control device that controls the movement position of the holding unit 210. Here, the controller 100 is realized when a general-purpose computer system such as a dedicated computer system or a personal computer executes the program. Details of the functional configuration of the controller 100 will be described later.
　次に、保持ユニット２１０の構成の詳細について、説明する。 Next, details of the configuration of the holding unit 210 will be described.
　図２は、本実施の形態における保持ユニット２１０の構成を示す斜視図である。具体的には、同図は、図１に示された保持ユニット２１０及び昇降駆動部２２０を、奥側（図１に示されたＹ軸方向プラス側）から見たときの図である。 FIG. 2 is a perspective view showing the configuration of the holding unit 210 in the present embodiment. Specifically, FIG. 3 is a view of the holding unit 210 and the lifting drive unit 220 shown in FIG. 1 when viewed from the back side (the Y axis direction plus side shown in FIG. 1).
　同図に示すように、保持ユニット２１０は、昇降駆動部２２０の下面部に接続されて配置された箱型の部材であり、保持部２１１、第一投光センサ２１２、第一受光センサ２１３、第二投光センサ２１４及び第二受光センサ２１５を備えている。 As shown in the figure, the holding unit 210 is a box-shaped member that is connected to the lower surface portion of the elevating drive unit 220, and includes a holding unit 211, a first light projecting sensor 212, a first light receiving sensor 213, A second light projecting sensor 214 and a second light receiving sensor 215 are provided.
　保持部２１１は、保持ユニット２１０の下部に配置され、保持ユニット２１０の前後方向（同図に示すＸ軸方向）に延びる一対の平板状の部材である。つまり、保持部２１１は、保持ユニット２１０の左右方向（同図に示すＹ軸方向）に並んだ二枚の平板状の部材から構成されている。この保持部２１１は、物品２０の突出部２１の下方に挿入され、上昇することで、突出部２１を保持し、物品２０を移載する。 The holding part 211 is a pair of flat plate-like members that are arranged below the holding unit 210 and extend in the front-rear direction of the holding unit 210 (X-axis direction shown in the figure). That is, the holding part 211 is composed of two flat members arranged in the left-right direction of the holding unit 210 (Y-axis direction shown in the figure). The holding portion 211 is inserted below the protruding portion 21 of the article 20 and is lifted to hold the protruding portion 21 and transfer the article 20.
　第一投光センサ２１２は、保持ユニット２１０の右側前方（同図に示すＸ軸方向プラス側かつＹ軸方向プラス側）の先端部に配置され、第一受光センサ２１３に向けて光を投光する装置である。また、第一受光センサ２１３は、保持ユニット２１０の左側前方（同図に示すＸ軸方向プラス側かつＹ軸方向マイナス側）の先端部に配置され、第一投光センサ２１２からの光を受光する光電センサである。 The first light projecting sensor 212 is disposed at the front end of the right side of the holding unit 210 (X-axis direction plus side and Y-axis direction plus side shown in the figure), and projects light toward the first light receiving sensor 213. It is a device to do. The first light receiving sensor 213 is disposed at the front end of the left side of the holding unit 210 (the X axis direction plus side and the Y axis direction minus side shown in the figure), and receives the light from the first light projecting sensor 212. It is a photoelectric sensor.
　つまり、第一投光センサ２１２及び第一受光センサ２１３は、保持部２１１から水平方向（同図に示すＸ軸方向プラス側）に突出した位置に、対向して配置されている。そして、第一投光センサ２１２から光が投光され、第一受光センサ２１３で当該光が受光されることで、第一投光センサ２１２及び第一受光センサ２１３の間に物品があるか否かを検出することができる。 That is, the first light projecting sensor 212 and the first light receiving sensor 213 are arranged to face each other at a position protruding in the horizontal direction (X-axis direction plus side shown in the figure) from the holding portion 211. Then, light is projected from the first light projecting sensor 212, and the first light receiving sensor 213 receives the light, so that there is an article between the first light projecting sensor 212 and the first light receiving sensor 213. Can be detected.
　第二投光センサ２１４は、保持ユニット２１０の右側後方（同図に示すＸ軸方向マイナス側かつＹ軸方向プラス側）の先端部に配置され、第二受光センサ２１５に向けて光を投光する装置である。また、第二受光センサ２１５は、保持ユニット２１０の左側後方（同図に示すＸ軸方向マイナス側かつＹ軸方向マイナス側）の先端部に配置され、第二投光センサ２１４からの光を受光する光電センサである。 The second light projecting sensor 214 is disposed at the front end of the holding unit 210 on the right rear side (X-axis direction minus side and Y-axis direction plus side shown in the figure), and projects light toward the second light receiving sensor 215. It is a device to do. The second light receiving sensor 215 is disposed at the front end of the holding unit 210 on the left rear side (X-axis direction minus side and Y-axis direction minus side shown in the figure) and receives light from the second light projecting sensor 214. It is a photoelectric sensor.
　つまり、第二投光センサ２１４及び第二受光センサ２１５は、保持部２１１から水平方向（同図に示すＸ軸方向マイナス側）及び上方（同図に示すＺ軸方向プラス側）に突出した位置に、対向して配置されている。そして、第二投光センサ２１４から光が投光され、第二受光センサ２１５で当該光が受光されることで、第二投光センサ２１４及び第二受光センサ２１５の間に物品があるか否かを検出することができる。 That is, the second light projecting sensor 214 and the second light receiving sensor 215 protrude from the holding portion 211 in the horizontal direction (X-axis direction minus side shown in the figure) and upward (the Z-axis direction plus side shown in the figure). Are arranged opposite to each other. Then, light is projected from the second light projecting sensor 214 and the second light receiving sensor 215 receives the light, so that there is an article between the second light projecting sensor 214 and the second light receiving sensor 215. Can be detected.
　このように、一対の第一投光センサ２１２及び第一受光センサ２１３と、一対の第二投光センサ２１４及び第二受光センサ２１５とは、前後方向（同図に示すＸ軸方向）に、昇降駆動部２２０を挟んで、互いに対向する位置に配置されている。また、保持部２１１は、第一投光センサ２１２、第一受光センサ２１３、第二投光センサ２１４及び第二受光センサ２１５の下方に配置されている。 Thus, the pair of first light projection sensor 212 and first light reception sensor 213 and the pair of second light projection sensor 214 and second light reception sensor 215 are in the front-rear direction (X-axis direction shown in the figure). It arrange | positions in the position which mutually opposes on both sides of the raising / lowering drive part 220. FIG. The holding unit 211 is disposed below the first light projecting sensor 212, the first light receiving sensor 213, the second light projecting sensor 214, and the second light receiving sensor 215.
　次に、コントローラ１００の機能構成の詳細について、説明する。 Next, details of the functional configuration of the controller 100 will be described.
　図３は、本実施の形態におけるコントローラ１００の機能構成を示すブロック図である。 FIG. 3 is a block diagram showing a functional configuration of the controller 100 in the present embodiment.
　コントローラ１００は、移載装置２００の昇降駆動部２２０及び水平駆動部２３０の移動位置を制御することで、保持ユニット２１０の移動位置を制御する。同図に示すように、コントローラ１００は、初期移動部１１０、昇降移動部１２０及び水平移動部１３０を備えている。 The controller 100 controls the moving position of the holding unit 210 by controlling the moving position of the lifting / lowering driving unit 220 and the horizontal driving unit 230 of the transfer device 200. As shown in the figure, the controller 100 includes an initial moving unit 110, an up / down moving unit 120, and a horizontal moving unit 130.
　初期移動部１１０は、保持ユニット２１０を初期移動位置に移動させる処理部である。具体的には、初期移動部１１０は、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１の両側方かつ上方に配置されるとともに、保持部２１１が突出部２１の前方かつ上方に配置されるように、保持ユニット２１０を初期移動位置に移動させる。 The initial moving unit 110 is a processing unit that moves the holding unit 210 to the initial moving position. Specifically, in the initial moving unit 110, the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) are arranged on both sides and above the protruding portion 21. At the same time, the holding unit 210 is moved to the initial movement position so that the holding portion 211 is disposed in front of and above the protruding portion 21.
　なお、初期移動部１１０は、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１の両側方かつ下方に配置されるとともに、保持部２１１が突出部２１の前方かつ下方に配置されるように、保持ユニット２１０を初期移動位置に移動させてもよい。 The initial moving unit 110 includes the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) disposed on both sides and below the protruding portion 21. The holding unit 210 may be moved to the initial movement position so that the holding portion 211 is disposed in front of and below the protruding portion 21.
　昇降移動部１２０は、保持ユニット２１０を初期移動位置から上昇又は下降させ、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１を検出した場合に、保持ユニット２１０を停止させる。 The up-and-down moving unit 120 raises or lowers the holding unit 210 from the initial movement position, and the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) are protruding portions. When 21 is detected, the holding unit 210 is stopped.
　具体的には、昇降移動部１２０は、保持ユニット２１０を初期移動位置から上昇又は下降させる動作とは異なる動作を行う場合よりも、過負荷を検出するための保持ユニット２１０に作用する力の閾値を低減させて、保持ユニット２１０を初期移動位置から上昇又は下降させる。そして、昇降移動部１２０は、保持ユニット２１０に低減後の閾値以上の力が作用していると判断した場合に、保持ユニット２１０を停止させる。 More specifically, the lifting / lowering moving unit 120 has a threshold value of the force acting on the holding unit 210 for detecting overload, rather than performing an operation different from the operation of raising or lowering the holding unit 210 from the initial movement position. And the holding unit 210 is raised or lowered from the initial movement position. And when the raising / lowering moving part 120 judges that the force more than the threshold value after reduction acts on the holding | maintenance unit 210, the holding | maintenance unit 210 is stopped.
　水平移動部１３０は、停止された保持ユニット２１０を、保持部２１１が突出部２１の下方に挿入されるように、突出部２１の後方に向けて水平方向に移動させる。具体的には、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１を検出した状態で、保持ユニット２１０を水平方向に移動させる。 The horizontal moving unit 130 moves the stopped holding unit 210 in the horizontal direction toward the rear of the protruding portion 21 so that the holding portion 211 is inserted below the protruding portion 21. Specifically, the horizontal moving unit 130 is held in a state where the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) detect the protruding portion 21. The unit 210 is moved in the horizontal direction.
　ここで、水平移動部１３０は、保持ユニット２１０を水平方向に移動させる際に、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１を検出しているか否かを繰り返し判断する。そして、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３（又は、第二投光センサ２１４及び第二受光センサ２１５）が突出部２１を検出していないと判断した場合に、保持ユニット２１０の水平方向への移動を停止させる。 Here, when the horizontal moving unit 130 moves the holding unit 210 in the horizontal direction, the first light projecting sensor 212 and the first light receiving sensor 213 (or the second light projecting sensor 214 and the second light receiving sensor 215) are used. It is repeatedly determined whether or not the protruding portion 21 is detected. And when the horizontal movement part 130 judges that the 1st light projection sensor 212 and the 1st light reception sensor 213 (or the 2nd light projection sensor 214 and the 2nd light reception sensor 215) have not detected the protrusion part 21, Then, the movement of the holding unit 210 in the horizontal direction is stopped.
　次に、コントローラ１００が行う動作について、詳細に説明する。 Next, the operation performed by the controller 100 will be described in detail.
　図４は、本実施の形態におけるコントローラ１００の動作の一例を示すフローチャートである。 FIG. 4 is a flowchart showing an example of the operation of the controller 100 in the present embodiment.
　また、図５Ａ～図８Ｂは、本実施の形態におけるコントローラ１００の動作を説明するための図である。 5A to 8B are diagrams for explaining the operation of the controller 100 according to the present embodiment.
　図４に示すように、まず、初期移動部１１０は、保持ユニット２１０を初期移動位置に移動させる（Ｓ１０２）。具体的には、図５Ａ及び図５Ｂに示すように、初期移動部１１０は、水平駆動部２３０に、保持ユニット２１０を、図５Ａで示された位置から、物品２０の方向（同図に示すＸ軸方向プラス側）に水平移動させることで、保持ユニット２１０を、図５Ｂで示された初期移動位置に移動させる。 As shown in FIG. 4, first, the initial movement unit 110 moves the holding unit 210 to the initial movement position (S102). Specifically, as shown in FIGS. 5A and 5B, the initial moving unit 110 moves the holding unit 210 to the horizontal driving unit 230 from the position shown in FIG. By horizontally moving the X-axis direction plus side), the holding unit 210 is moved to the initial movement position shown in FIG. 5B.
　ここで、初期移動位置について、説明する。 Here, the initial movement position will be described.
　図６Ａ及び図６Ｂは、初期移動位置を説明するための図である。具体的には、図６Ａは、図５Ｂで示された保持ユニット２１０及び物品２０を、側方（図５Ｂに示すＹ軸方向プラス側）から見た図であり、図６Ｂは、図５Ｂで示された保持ユニット２１０及び物品２０を、上方（図５Ｂに示すＺ軸方向プラス側）から見た図である。 6A and 6B are diagrams for explaining the initial movement position. Specifically, FIG. 6A is a view of the holding unit 210 and the article 20 shown in FIG. 5B as viewed from the side (the Y axis direction plus side shown in FIG. 5B), and FIG. 6B is a view of FIG. It is the figure which looked at the holding | maintenance unit 210 and the articles | goods 20 which were shown from upper direction (Z-axis direction plus side shown to FIG. 5B).
　これらの図に示すように、初期移動位置は、第一投光センサ２１２及び第一受光センサ２１３が、突出部２１の両側方（同図に示すＹ軸方向両側）かつ上方（同図に示すＺ軸方向プラス側）に配置される位置である。つまり、初期移動位置は、第一投光センサ２１２が突出部２１の側面部２１ｂの側方かつ上方に配置される位置であり、第一受光センサ２１３が突出部２１の側面部２１ｃの側方かつ上方に配置される位置である。 As shown in these figures, the initial movement position is such that the first light projecting sensor 212 and the first light receiving sensor 213 are located on both sides (both sides in the Y-axis direction shown in the figure) and above (shown in the figure). It is a position arranged on the positive side in the Z-axis direction). That is, the initial movement position is a position at which the first light projecting sensor 212 is disposed on the side and above the side surface 21b of the protruding portion 21, and the first light receiving sensor 213 is on the side of the side surface 21c of the protruding portion 21. And it is a position arrange | positioned upwards.
　また、さらに、初期移動位置は、保持部２１１が突出部２１の前方（同図に示すＸ軸方向マイナス側）かつ上方（同図に示すＺ軸方向プラス側）に配置される位置である。つまり、初期移動位置は、保持部２１１が突出部２１の前面部２１ａの前方かつ上方に配置される位置である。 Further, the initial movement position is a position where the holding portion 211 is disposed in front of the protruding portion 21 (X-axis direction minus side shown in the figure) and above (Z-axis direction plus side shown in the figure). That is, the initial movement position is a position where the holding portion 211 is disposed in front of and above the front surface portion 21 a of the protruding portion 21.
　このように、初期移動部１１０は、水平駆動部２３０を制御することで、第一投光センサ２１２及び第一受光センサ２１３が突出部２１の両側方かつ上方に配置されるとともに、保持部２１１が突出部２１の前方かつ上方に配置されるように、保持ユニット２１０を、初期移動位置に移動させる。 As described above, the initial moving unit 110 controls the horizontal driving unit 230 so that the first light projecting sensor 212 and the first light receiving sensor 213 are disposed on both sides and above the projecting unit 21, and the holding unit 211. The holding unit 210 is moved to the initial movement position so that is disposed in front of and above the protrusion 21.
　なお、初期移動位置は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１の両側方（同図に示すＹ軸方向両側）かつ下方（同図に示すＺ軸方向マイナス側）に配置されるとともに、保持部２１１が突出部２１の前方（同図に示すＸ軸方向マイナス側）かつ下方（同図に示すＺ軸方向マイナス側）に配置される位置であってもよい。 The initial movement position is such that the first light projecting sensor 212 and the first light receiving sensor 213 are on both sides of the protrusion 21 (both sides in the Y-axis direction shown in the figure) and below (minus side in the Z-axis direction shown in the figure). In addition to being arranged, the holding portion 211 may be positioned in front of the protruding portion 21 (X-axis direction minus side shown in the figure) and below (Z-axis direction minus side shown in the figure).
　この場合、初期移動部１１０は、昇降駆動部２２０及び水平駆動部２３０を制御することで、第一投光センサ２１２及び第一受光センサ２１３が突出部２１の両側方かつ下方に配置されるとともに、保持部２１１が突出部２１の前方かつ下方に配置されるように、保持ユニット２１０を、初期移動位置に移動させる。 In this case, the initial moving unit 110 controls the elevation driving unit 220 and the horizontal driving unit 230 so that the first light projecting sensor 212 and the first light receiving sensor 213 are disposed on both sides and below the protruding portion 21. The holding unit 210 is moved to the initial movement position so that the holding part 211 is disposed in front of and below the protruding part 21.
　図４に戻り、次に、昇降移動部１２０は、過負荷を検出するための保持ユニット２１０に作用する力の閾値を低減させる（Ｓ１０４）。つまり、昇降移動部１２０は、保持ユニット２１０を初期移動位置から上昇又は下降させる動作とは異なる動作を行う場合よりも、保持ユニット２１０を初期移動位置から上昇又は下降させる動作を行う場合の方が当該閾値が小さくなるように、当該閾値を低減させる。 Returning to FIG. 4, next, the lifting and lowering moving unit 120 reduces the threshold value of the force acting on the holding unit 210 for detecting overload (S 104). That is, the lifting / lowering moving unit 120 is more likely to perform an operation of raising or lowering the holding unit 210 from the initial movement position than to perform an operation different from an operation of raising or lowering the holding unit 210 from the initial movement position. The threshold value is reduced so that the threshold value becomes smaller.
　そして、昇降移動部１２０は、昇降駆動部２２０に、保持ユニット２１０を初期移動位置から上昇又は下降させる（Ｓ１０６）。 Then, the lifting / lowering movement unit 120 causes the lifting / lowering driving unit 220 to raise or lower the holding unit 210 from the initial movement position (S106).
　ここで、初期移動位置が、保持部２１１、第一投光センサ２１２及び第一受光センサ２１３が突出部２１の上方に配置される位置であった場合は、昇降移動部１２０は、保持ユニット２１０を初期移動位置から下降させる。また、初期移動位置が、保持部２１１、第一投光センサ２１２及び第一受光センサ２１３が突出部２１の下方に配置される位置であった場合は、昇降移動部１２０は、保持ユニット２１０を初期移動位置から上昇させる。 Here, when the initial movement position is a position where the holding unit 211, the first light projecting sensor 212, and the first light receiving sensor 213 are disposed above the projecting unit 21, the up-and-down moving unit 120 includes the holding unit 210. Is lowered from the initial movement position. Further, when the initial movement position is a position where the holding unit 211, the first light projecting sensor 212, and the first light receiving sensor 213 are disposed below the protruding portion 21, the lifting / lowering moving unit 120 moves the holding unit 210. Raise from the initial movement position.
　また、昇降移動部１２０は、保持ユニット２１０の上昇又は下降中に、保持ユニット２１０に過負荷異常が生じたか否かを判断する（Ｓ１０８）。つまり、昇降移動部１２０は、保持ユニット２１０に突出部２１が接触するなどにより、保持ユニット２１０に低減後の閾値以上の力が作用しているか否かを判断する。 Also, the lifting / lowering moving unit 120 determines whether or not an overload abnormality has occurred in the holding unit 210 while the holding unit 210 is moving up or down (S108). That is, the up-and-down moving unit 120 determines whether or not a force equal to or greater than the reduced threshold value is acting on the holding unit 210 due to the protrusion 21 coming into contact with the holding unit 210.
　そして、昇降移動部１２０は、保持ユニット２１０に当該閾値以上の力が作用していると判断した場合は（Ｓ１０８でＹＥＳ）、保持ユニット２１０を停止させる（Ｓ１１０）。 Then, when it is determined that the force greater than the threshold is applied to the holding unit 210 (YES in S108), the lifting / lowering moving unit 120 stops the holding unit 210 (S110).
　また、昇降移動部１２０は、保持ユニット２１０に当該閾値以上の力が作用していないと判断した場合は（Ｓ１０８でＮＯ）、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出したか否かを判断する（Ｓ１１２）。 Further, when the lifting / lowering moving unit 120 determines that a force equal to or greater than the threshold is not applied to the holding unit 210 (NO in S108), the first light projecting sensor 212 and the first light receiving sensor 213 move the protruding portion 21 away. It is determined whether or not it has been detected (S112).
　昇降移動部１２０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出していないと判断した場合は（Ｓ１１２でＮＯ）、さらに保持ユニット２１０を昇降させる（Ｓ１０６）。 When it is determined that the first light projecting sensor 212 and the first light receiving sensor 213 have not detected the protruding portion 21 (NO in S112), the elevating / lowering moving unit 120 further raises and lowers the holding unit 210 (S106).
　また、昇降移動部１２０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出したと判断した場合は（Ｓ１１２でＹＥＳ）、保持ユニット２１０を停止させる（Ｓ１１４）。 Further, when the first light projecting sensor 212 and the first light receiving sensor 213 determine that the first light projecting sensor 212 and the first light receiving sensor 213 have detected the protruding portion 21 (YES in S112), the lifting / lowering moving unit 120 stops the holding unit 210 (S114).
　つまり、図７Ａ及び図７Ｂに示すように、昇降移動部１２０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出したと判断するまで、保持ユニット２１０を、初期移動位置から昇降させる。 That is, as shown in FIGS. 7A and 7B, the up-and-down moving unit 120 moves the holding unit 210 to the initial moving position until it determines that the first light projecting sensor 212 and the first light receiving sensor 213 have detected the protruding portion 21. Lift up and down.
　なお、昇降移動部１２０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出したと判断した場合、すぐに保持ユニット２１０を停止させてもよいし、タイマー等を用いて所定時間後に停止させてもよいし、エンコーダ等を用いて所定距離移動後に停止させてもよい。 Note that when the first light projecting sensor 212 and the first light receiving sensor 213 determine that the first light projecting sensor 212 and the first light receiving sensor 213 have detected the protruding portion 21, the elevating / lowering moving unit 120 may immediately stop the holding unit 210 or use a timer or the like. It may be stopped after a predetermined time, or may be stopped after moving a predetermined distance using an encoder or the like.
　図４に戻り、次に、水平移動部１３０は、水平駆動部２３０に、保持ユニット２１０を水平方向に移動させる（Ｓ１１６）。 4, next, the horizontal moving unit 130 causes the horizontal driving unit 230 to move the holding unit 210 in the horizontal direction (S116).
　具体的には、図８Ａ及び図８Ｂに示すように、水平移動部１３０は、保持ユニット２１０を、図７Ａ及び図７Ｂに示された位置から、保持部２１１が突出部２１の下方に挿入されるように、突出部２１の後方（同図に示すＸ軸方向プラス側）に向けて水平方向に移動させる。なお、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出した状態で、水平駆動部２３０に、保持ユニット２１０を水平方向に移動させる。 Specifically, as shown in FIGS. 8A and 8B, the horizontal moving unit 130 is configured so that the holding unit 210 is inserted from the position shown in FIGS. 7A and 7B below the protrusion 21. In this manner, the projection 21 is moved in the horizontal direction toward the rear (the X-axis direction plus side shown in the figure). The horizontal moving unit 130 causes the horizontal driving unit 230 to move the holding unit 210 in the horizontal direction in a state where the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21.
　図４に戻り、次に、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出しているか否かを判断する（Ｓ１１８）。 Returning to FIG. 4, next, the horizontal movement unit 130 determines whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21 (S118).
　水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出していると判断した場合は（Ｓ１１８でＹＥＳ）、さらに保持ユニット２１０を水平方向に移動させる（Ｓ１１６）。このように、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出しているか否かを繰り返し判断する。 When the horizontal movement unit 130 determines that the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21 (YES in S118), the horizontal movement unit 130 further moves the holding unit 210 in the horizontal direction (S116). ). As described above, the horizontal moving unit 130 repeatedly determines whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21.
　また、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出していないと判断した場合は（Ｓ１１８でＮＯ）、保持ユニット２１０の水平方向への移動を停止させる（Ｓ１２０）。つまり、図８Ａ及び図８Ｂに示すように、水平移動部１３０は、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出しなくなるまで、保持ユニット２１０を水平方向へ移動させる。 Further, when the horizontal movement unit 130 determines that the first light projecting sensor 212 and the first light receiving sensor 213 have not detected the protrusion 21 (NO in S118), the horizontal movement unit 130 moves the holding unit 210 in the horizontal direction. Stop (S120). That is, as shown in FIGS. 8A and 8B, the horizontal moving unit 130 moves the holding unit 210 in the horizontal direction until the first light projecting sensor 212 and the first light receiving sensor 213 do not detect the protruding portion 21.
　そして、昇降移動部１２０は、昇降駆動部２２０に、保持ユニット２１０を上昇させ、保持部２１１に物品２０の突出部２１を保持させることで、当該物品２０を移載する（Ｓ１２２）。 And the raising / lowering moving part 120 transfers the said article | item 20 by making the raising / lowering drive part 220 raise the holding | maintenance unit 210 and making the holding | maintenance part 211 hold | maintain the protrusion part 21 of the article | item 20 (S122).
　以上により、コントローラ１００が行う動作は終了する。 Thus, the operation performed by the controller 100 is completed.
　以上の本発明に係る自動倉庫１０によれば、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出した場合に、保持ユニット２１０の初期移動位置からの昇降動作を停止させ、保持部２１１が突出部２１の下方に挿入されるように、保持ユニット２１０を突出部２１の後方に向けて水平方向に移動させる。つまり、物品２０が予め定められた位置に配置されていない場合でも、第一投光センサ２１２及び第一受光センサ２１３が、突出部２１を検出することで、物品２０の位置を検出することができる。このため、保持ユニット２１０が停止する正確な位置を把握することができ、当該正確な位置から、保持ユニット２１０を水平方向に移動させることで、保持部２１１を突出部２１の下方に正確に挿入させることができる。これにより、棚３００に載置されている物品２０が予め定められた位置に配置されていない場合でも、当該物品２０を移載することができる。 According to the automatic warehouse 10 according to the present invention described above, when the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21, the lifting operation from the initial movement position of the holding unit 210 is stopped, The holding unit 210 is moved in the horizontal direction toward the rear of the protruding portion 21 so that the holding portion 211 is inserted below the protruding portion 21. That is, even when the article 20 is not arranged at a predetermined position, the first light projecting sensor 212 and the first light receiving sensor 213 can detect the protrusion 21 to detect the position of the article 20. it can. For this reason, the exact position where the holding unit 210 stops can be grasped, and the holding unit 211 is accurately inserted below the protruding portion 21 by moving the holding unit 210 in the horizontal direction from the accurate position. Can be made. Thereby, even when the article 20 placed on the shelf 300 is not arranged at a predetermined position, the article 20 can be transferred.
　また、過負荷を検出するための閾値を通常の値よりも低減させて、保持ユニット２１０を初期移動位置から上昇又は下降させ、保持ユニット２１０に低減後の閾値以上の力が作用していると判断した場合に、保持ユニット２１０を停止させる。これにより、保持ユニット２１０の上昇又は下降時に、保持ユニット２１０が突出部２１に干渉して当該閾値以上の小さな力でも保持ユニット２１０に作用すれば、保持ユニット２１０が停止し、突出部２１の破損を防止することができる。 Further, when the threshold for detecting overload is reduced below the normal value, the holding unit 210 is raised or lowered from the initial movement position, and a force equal to or greater than the reduced threshold is applied to the holding unit 210. When it is determined, the holding unit 210 is stopped. Accordingly, when the holding unit 210 is raised or lowered, if the holding unit 210 interferes with the protruding portion 21 and acts on the holding unit 210 even with a small force equal to or greater than the threshold value, the holding unit 210 stops and the protruding portion 21 is damaged. Can be prevented.
　また、保持部２１１は、第一投光センサ２１２及び第一受光センサ２１３の下方に配置され、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出した状態で、保持ユニット２１０を水平方向に移動させる。つまり、突出部２１を検出した状態で保持ユニット２１０を水平方向に移動させるため、突出部２１の検出後に不意の動作が起こることなく、確実に保持部２１１を突出部２１の下方に正確に挿入させることができる。 The holding unit 211 is disposed below the first light projecting sensor 212 and the first light receiving sensor 213, and the holding unit 210 is in a state where the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21. Is moved horizontally. In other words, since the holding unit 210 is moved in the horizontal direction in a state where the protruding portion 21 is detected, the holding portion 211 is surely accurately inserted below the protruding portion 21 without any unexpected operation after the protruding portion 21 is detected. Can be made.
　また、保持ユニット２１０を水平方向に移動させる際に、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出しているか否かを繰り返し判断する。このため、突出部２１の検出を確認し続けることで、不意の動作を検出することができ、確実に保持部２１１を突出部２１の下方に正確に挿入させることができる。 Further, when the holding unit 210 is moved in the horizontal direction, it is repeatedly determined whether or not the first light projecting sensor 212 and the first light receiving sensor 213 detect the protruding portion 21. For this reason, by continuing to check the detection of the protruding portion 21, an unexpected operation can be detected, and the holding portion 211 can be accurately inserted below the protruding portion 21.
　また、第一投光センサ２１２及び第一受光センサ２１３が突出部２１を検出していないと判断した場合に、保持ユニット２１０の水平方向への移動を停止させる。このため、突出部２１の検出の有無により、保持ユニット２１０の水平方向への移動距離も正確に把握することができ、さらに確実に保持部２１１を突出部２１の下方に正確に挿入させることができる。 Further, when it is determined that the first light projecting sensor 212 and the first light receiving sensor 213 have not detected the protruding portion 21, the movement of the holding unit 210 in the horizontal direction is stopped. For this reason, the movement distance in the horizontal direction of the holding unit 210 can be accurately grasped depending on whether or not the protruding portion 21 is detected, and the holding portion 211 can be accurately inserted below the protruding portion 21 more accurately. it can.
　以上のように、本発明によれば、棚３００に載置されている物品２０が予め定められた位置に配置されていない場合でも、当該物品２０を移載することができる。 As described above, according to the present invention, even when the article 20 placed on the shelf 300 is not arranged at a predetermined position, the article 20 can be transferred.
　以上、本発明に係る自動倉庫１０について、実施の形態に基づいて説明したが、本発明は、この実施の形態に限定されるものではない。 As mentioned above, although the automatic warehouse 10 which concerns on this invention was demonstrated based on embodiment, this invention is not limited to this embodiment.
　つまり、今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。 That is, the embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
　たとえば、本実施の形態では、物品２０は、保持ユニット２１０の前方に配置され、第一投光センサ２１２及び第一受光センサ２１３が、物品２０の突出部２１の有無を検出して、物品２０を移載することとした。しかし、物品２０は、保持ユニット２１０の後方に配置され、第二投光センサ２１４及び第二受光センサ２１５が、物品２０の突出部２１の有無を検出して、物品２０を移載することにしてもよい。これにより、保持ユニット２１０の前後両側に配置されている物品２０を、共に移載することができる。 For example, in the present embodiment, the article 20 is disposed in front of the holding unit 210, and the first light projecting sensor 212 and the first light receiving sensor 213 detect the presence or absence of the protruding portion 21 of the article 20, and the article 20 It was decided to transfer. However, the article 20 is arranged behind the holding unit 210, and the second light projecting sensor 214 and the second light receiving sensor 215 detect the presence or absence of the protruding portion 21 of the article 20, and transfer the article 20. May be. Thereby, the articles 20 arranged on both front and rear sides of the holding unit 210 can be transferred together.
　また、本実施の形態では、昇降移動部１２０が、過負荷を検出する閾値を低減させて、過負荷異常を検出することとした。しかし、昇降移動部１２０は、当該閾値を低減させることなく過負荷異常を検出することにしてもよいし、過負荷異常は検出しないことにしてもよい。 In the present embodiment, the elevating / lowering unit 120 detects the overload abnormality by reducing the threshold value for detecting the overload. However, the up-and-down moving unit 120 may detect an overload abnormality without reducing the threshold value, or may not detect an overload abnormality.
　また、本実施の形態では、水平移動部１３０は、投光センサ及び受光センサにて突出部２１を検出した状態で、保持ユニット２１０を水平方向に移動させることとした。しかし、水平移動部１３０は、保持部２１１が突出部２１の下方に挿入されるのであれば、突出部２１を検出した状態でなくとも、保持ユニット２１０を水平方向に移動させることにしてもよい。 In the present embodiment, the horizontal moving unit 130 moves the holding unit 210 in the horizontal direction in a state where the projection 21 is detected by the light projecting sensor and the light receiving sensor. However, the horizontal moving unit 130 may move the holding unit 210 in the horizontal direction even if the protruding unit 21 is not detected as long as the holding unit 211 is inserted below the protruding unit 21. .
　また、本実施の形態では、水平移動部１３０は、保持ユニット２１０を水平方向に移動させる際に、投光センサ及び受光センサが突出部２１を検出しているか否かを繰り返し判断することとした。しかし、水平移動部１３０は、繰り返し判断することに限定されず、例えば、投光センサ及び受光センサが突出部２１を検出したことを１回確認すれば、保持ユニット２１０を水平方向に移動させることにしてもよい。 In the present embodiment, the horizontal moving unit 130 repeatedly determines whether or not the light projecting sensor and the light receiving sensor detect the protruding portion 21 when moving the holding unit 210 in the horizontal direction. . However, the horizontal movement unit 130 is not limited to repeated determination. For example, if the light projecting sensor and the light receiving sensor confirm that the protrusion 21 has been detected once, the horizontal movement unit 130 moves the holding unit 210 in the horizontal direction. It may be.
　また、本実施の形態では、水平移動部１３０は、投光センサ及び受光センサが突出部２１を検出していないと判断した場合に、保持ユニット２１０の水平方向への移動を停止させることとした。しかし、水平移動部１３０は、突出部２１の検出を判断することなく、例えば、保持ユニット２１０を所定の距離水平移動させた後に、保持ユニット２１０の移動を停止させることにしてもよい。 In the present embodiment, the horizontal movement unit 130 stops the movement of the holding unit 210 in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor do not detect the protruding portion 21. . However, the horizontal moving unit 130 may stop the movement of the holding unit 210 after moving the holding unit 210 horizontally for a predetermined distance without determining the detection of the protruding portion 21, for example.
　また、本実施の形態では、保持ユニット２１０は、前後両側に二対の投光センサ及び受光センサを備えていることとした。しかし、保持ユニット２１０は、片側のみに一対の投光センサ及び受光センサを備えていることにしてもよい。 In the present embodiment, the holding unit 210 includes two pairs of light projecting sensors and light receiving sensors on both the front and rear sides. However, the holding unit 210 may include a pair of light projecting sensor and light receiving sensor only on one side.
　本発明は、自動倉庫として、特に、棚に載置されている物品が予め定められた位置に配置されていない場合でも、当該物品を移載することができる自動倉庫として、利用することができる。 INDUSTRIAL APPLICABILITY The present invention can be used as an automatic warehouse, in particular, as an automatic warehouse capable of transferring the article even when the article placed on the shelf is not arranged at a predetermined position. .
　　１０　　自動倉庫
　　２０　　物品
　　２１　　突出部
　　２１ａ　前面部
　　２１ｂ、２１ｃ　側面部
　　１００　コントローラ
　　１１０　初期移動部
　　１２０　昇降移動部
　　１３０　水平移動部
　　２００　移載装置
　　２１０　保持ユニット
　　２１１　保持部
　　２１２　第一投光センサ
　　２１３　第一受光センサ
　　２１４　第二投光センサ
　　２１５　第二受光センサ
　　２２０　昇降駆動部
　　２３０　水平駆動部
　　２４０　水平支持体
　　２５０　垂直支持体
　　３００　棚
　　３１０　載置台 DESCRIPTION OF SYMBOLS 10 Automatic warehouse 20 Article 21 Protrusion part 21a Front part 21b, 21c Side part 100 Controller 110 Initial movement part 120 Elevation movement part 130 Horizontal movement part 200 Transfer device 210 Holding unit 211 Holding part 212 First light projection sensor 213 First light reception Sensor 214 Second light projecting sensor 215 Second light receiving sensor 220 Elevating drive unit 230 Horizontal drive unit 240 Horizontal support 250 Vertical support 300 Shelf 310 Mounting table

Claims (11)

  1. 　水平方向に突出した突出部を有する物品が載置される棚と、前記突出部を保持する保持ユニットを備え前記物品を移載する移載装置と、前記保持ユニットの移動位置を制御するコントローラとを備える自動倉庫であって、
    　前記保持ユニットは、
    　前記突出部を保持する保持部と、
    　前記保持部から突出した位置に、対向して配置される投光センサ及び受光センサとを備え、
    　前記コントローラは、
    　前記投光センサ及び前記受光センサが前記突出部の両側方かつ上方に配置されるとともに、前記保持部が前記突出部の前方かつ上方に配置されるように、又は、前記投光センサ及び前記受光センサが前記突出部の両側方かつ下方に配置されるとともに、前記保持部が前記突出部の前方かつ下方に配置されるように、前記保持ユニットを初期移動位置に移動させる初期移動部と、
    　前記保持ユニットを前記初期移動位置から上昇又は下降させ、前記投光センサ及び前記受光センサが前記突出部を検出した場合に、前記保持ユニットを停止させる昇降移動部と、
    　停止された前記保持ユニットを、前記保持部が前記突出部の下方に挿入されるように、前記突出部の後方に向けて水平方向に移動させる水平移動部とを備える
    　自動倉庫。     A shelf on which an article having a protruding portion that protrudes in the horizontal direction is placed; a transfer device that includes a holding unit that holds the protruding portion; and a controller that controls the movement position of the holding unit; An automatic warehouse comprising:
    The holding unit is
    A holding portion for holding the protruding portion;
    A light projecting sensor and a light receiving sensor arranged to face each other at a position protruding from the holding portion,
    The controller is
    The light projecting sensor and the light receiving sensor are disposed on both sides and above the projecting portion, and the holding unit is disposed on the front and above the projecting portion, or the light projecting sensor and the light receiving device. An initial moving unit that moves the holding unit to an initial moving position so that a sensor is disposed on both sides and below the projecting portion, and the holding unit is disposed on the front and lower side of the projecting portion;
    An elevating and lowering moving unit that raises or lowers the holding unit from the initial movement position and stops the holding unit when the light projecting sensor and the light receiving sensor detect the protrusion; and
    An automatic warehouse comprising: a horizontal moving unit that moves the stopped holding unit in a horizontal direction toward the rear of the protruding portion so that the holding portion is inserted below the protruding portion.
  2. 　前記昇降移動部は、
    　前記保持ユニットを前記初期移動位置から上昇又は下降させる動作とは異なる動作を行う場合よりも、過負荷を検出するための前記保持ユニットに作用する力の閾値を低減させて、前記保持ユニットを前記初期移動位置から上昇又は下降させ、
    　さらに、前記保持ユニットに低減後の前記閾値以上の力が作用していると判断した場合に、前記保持ユニットを停止させる
    　請求項１に記載の自動倉庫。     The up-and-down moving part is
    The threshold value of the force acting on the holding unit for detecting an overload is reduced, compared with the case where the operation different from the operation of raising or lowering the holding unit from the initial movement position is performed. Raise or lower from the initial movement position,
    2. The automatic warehouse according to claim 1, wherein the holding unit is stopped when it is determined that a force equal to or greater than the reduced threshold is applied to the holding unit.
  3. 　前記保持部は、前記投光センサ及び前記受光センサの下方に配置されており、
    　前記水平移動部は、前記投光センサ及び前記受光センサが前記突出部を検出した状態で、前記保持ユニットを前記水平方向に移動させる
    　請求項１に記載の自動倉庫。     The holding portion is disposed below the light projecting sensor and the light receiving sensor,
    The automatic warehouse according to claim 1, wherein the horizontal moving unit moves the holding unit in the horizontal direction in a state where the light projecting sensor and the light receiving sensor detect the protruding portion.
  4. 　前記水平移動部は、前記保持ユニットを前記水平方向に移動させる際に、前記投光センサ及び前記受光センサが前記突出部を検出しているか否かを繰り返し判断する
    　請求項３に記載の自動倉庫。     4. The automatic warehouse according to claim 3, wherein the horizontal movement unit repeatedly determines whether or not the light projecting sensor and the light receiving sensor detect the protrusion when moving the holding unit in the horizontal direction. 5. .
  5. 　前記水平移動部は、さらに、前記投光センサ及び前記受光センサが前記突出部を検出していないと判断した場合に、前記保持ユニットの前記水平方向への移動を停止させる
    　請求項４に記載の自動倉庫。     The horizontal movement unit further stops the movement of the holding unit in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor do not detect the protrusion. Automatic warehouse.
  6. 　前記保持ユニットは、さらに、前記保持部から突出した位置であって、前記投光センサである第一投光センサ及び前記受光センサである第一受光センサと対向する位置に、第二投光センサ及び第二受光センサを備える
    　請求項１に記載の自動倉庫。     The holding unit further includes a second light projecting sensor at a position protruding from the holding unit and facing the first light projecting sensor as the light projecting sensor and the first light receiving sensor as the light receiving sensor. The automatic warehouse according to claim 1, further comprising: a second light receiving sensor.
  7. 　水平方向に突出した突出部を有する物品が載置される棚と、前記突出部を保持する保持ユニットを備え前記物品を移載する移載装置と、前記保持ユニットの移動位置を制御するコントローラとを備える自動倉庫による物品の移載方法であって、
    　前記保持ユニットは、
    　前記突出部を保持する保持部と、
    　前記保持部から突出した位置に、対向して配置される投光センサ及び受光センサとを備え、
    　前記移載方法は、
    　前記投光センサ及び前記受光センサが前記突出部の両側方かつ上方に配置されるとともに、前記保持部が前記突出部の前方かつ上方に配置されるように、又は、前記投光センサ及び前記受光センサが前記突出部の両側方かつ下方に配置されるとともに、前記保持部が前記突出部の前方かつ下方に配置されるように、前記保持ユニットを初期移動位置に移動させる初期移動ステップと、
    　前記保持ユニットを前記初期移動位置から上昇又は下降させ、前記投光センサ及び前記受光センサが前記突出部を検出した場合に、前記保持ユニットを停止させる昇降移動ステップと、
    　停止された前記保持ユニットを、前記保持部が前記突出部の下方に挿入されるように、前記突出部の後方に向けて水平方向に移動させる水平移動ステップとを含む
    　移載方法。     A shelf on which an article having a protruding portion that protrudes in the horizontal direction is placed; a transfer device that includes a holding unit that holds the protruding portion; and a controller that controls the movement position of the holding unit; A method for transferring articles by an automatic warehouse comprising:
    The holding unit is
    A holding portion for holding the protruding portion;
    A light projecting sensor and a light receiving sensor arranged to face each other at a position protruding from the holding portion,
    The transfer method is:
    The light projecting sensor and the light receiving sensor are disposed on both sides and above the projecting portion, and the holding unit is disposed on the front and above the projecting portion, or the light projecting sensor and the light receiving device. An initial moving step of moving the holding unit to an initial moving position so that a sensor is disposed on both sides and below the protruding portion, and the holding portion is positioned in front of and below the protruding portion;
    A raising / lowering moving step of raising or lowering the holding unit from the initial movement position and stopping the holding unit when the light projecting sensor and the light receiving sensor detect the projecting portion;
    A horizontal movement step of moving the stopped holding unit in a horizontal direction toward the rear of the protruding portion so that the holding portion is inserted below the protruding portion.
  8. 　前記昇降移動ステップでは、前記保持ユニットを前記初期移動位置から上昇又は下降させる動作とは異なる動作を行う場合よりも、過負荷を検出するための前記保持ユニットに作用する力の閾値を低減させて、前記保持ユニットを前記初期移動位置から上昇又は下降させる
    　請求項７に記載の移載方法。     In the up-and-down movement step, the threshold value of the force acting on the holding unit for detecting an overload is reduced compared to the case where an operation different from the operation of raising or lowering the holding unit from the initial movement position is performed. The transfer method according to claim 7, wherein the holding unit is raised or lowered from the initial movement position.
  9. 　前記保持部は、前記投光センサ及び前記受光センサの下方に配置されており、
    　前記水平移動ステップでは、前記投光センサ及び前記受光センサが前記突出部を検出した状態で、前記保持ユニットを前記水平方向に移動させる
    　請求項７に記載の移載方法。     The holding portion is disposed below the light projecting sensor and the light receiving sensor,
    The transfer method according to claim 7, wherein in the horizontal movement step, the holding unit is moved in the horizontal direction in a state where the light projecting sensor and the light receiving sensor detect the protrusion.
  10. 　前記水平移動ステップでは、前記保持ユニットを前記水平方向に移動させる際に、前記投光センサ及び前記受光センサが前記突出部を検出しているか否かを繰り返し判断する
    　請求項９に記載の移載方法。     The transfer according to claim 9, wherein in the horizontal movement step, when the holding unit is moved in the horizontal direction, it is repeatedly determined whether or not the light projecting sensor and the light receiving sensor detect the protrusion. Method.
  11. 　前記水平移動ステップでは、さらに、前記投光センサ及び前記受光センサが前記突出部を検出していないと判断した場合に、前記保持ユニットの前記水平方向への移動を停止させる
    　請求項１０に記載の移載方法。     The horizontal movement step further stops the movement of the holding unit in the horizontal direction when it is determined that the light projecting sensor and the light receiving sensor do not detect the protruding portion. Transfer method.
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JPH01125548U (en) * 1988-02-19 1989-08-28
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JP2001298069A (en) * 2000-03-16 2001-10-26 Applied Materials Inc Device for storing and carrying cassette
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