JPH01125548U - - Google Patents
Info
- Publication number
- JPH01125548U JPH01125548U JP2139988U JP2139988U JPH01125548U JP H01125548 U JPH01125548 U JP H01125548U JP 2139988 U JP2139988 U JP 2139988U JP 2139988 U JP2139988 U JP 2139988U JP H01125548 U JPH01125548 U JP H01125548U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- block
- swinging
- substrate storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 5
- 230000007797 corrosion Effects 0.000 claims 3
- 238000005260 corrosion Methods 0.000 claims 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Description
第１図及び第２図は第１の考案に係るカセツト
検知装置の実施例を示す要部縦断面図、第３図は
アーム挾持式カセツト搬送装置の要部を示す斜視
図、第４図は第２の考案に係るカセツト検知装置
の実施例を示す要部縦断面図、第５図は従来例に
よるアーム挾持式カセツト搬送装置の斜視図であ
る。
１……アーム挾持式カセツト搬送装置、４……
アーム駆動支軸、５……挾持用アーム、５ａ……
アームの吊持部、６……基板収容カセツト、６ａ
……被吊持部、２１・３１……検知具取付用ブロ
ツク、２４……揺動杆、３４……揺動筒杆、２６
……センサ、３６……圧電センサ、２６ａ・３６
ａ……リード線、２８・３８……付勢ばね、２９
・３９……防蝕カバー。
1 and 2 are longitudinal cross-sectional views of essential parts showing an embodiment of the cassette detection device according to the first invention, FIG. FIG. 5 is a longitudinal cross-sectional view of a main part showing an embodiment of a cassette detection device according to the second invention, and FIG. 5 is a perspective view of a conventional arm-held cassette conveyance device. 1...Arm holding type cassette transfer device, 4...
Arm drive support shaft, 5...Pinching arm, 5a...
Arm hanging part, 6... Board storage cassette, 6a
...Suspended part, 21/31...Detector mounting block, 24...Swinging rod, 34...Swinging cylinder rod, 26
...Sensor, 36...Piezoelectric sensor, 26a/36
a...Lead wire, 28/38...Biasing spring, 29
・39...Corrosion-proof cover.
Claims (1)
支軸と、アーム駆動支軸に固定した検知具取付用
ブロツクと、当該ブロツクにその上部を軸支して
揺動自在に設けた揺動杆と、当該ブロツクに設け
られ、揺動杆上部の接近に基づいて基板収容カセ
ツトの挾持状態を検知するセンサと、当該ブロツ
クに固定され揺動杆の上部及びセンサを覆う防蝕
カバーとを具備して成り、アーム駆動支軸を回転
させて挾持用アームで基板収容カセツトを挾持す
る際に、揺動杆の下部が基板収容カセツトに当接
することにより、センサが作動し、当該カセツト
を挾持したことを検知するように構成したことを
特徴とするカセツト搬送装置のカセツト検知装置
。 ２ カセツト挾持用アームを駆動するアーム駆動
支軸と、アーム駆動支軸に固定した検知具取付用
ブロツクと、当該ブロツクにその上部を軸支して
揺動自在に設けた揺動筒杆と、当該ブロツクと揺
動筒杆の上部とに亘つて付設され、揺動筒杆を挾
持用アームとともに揺動可能に付勢する付勢ばね
と、当該ブロツクに固定され揺動筒杆の上部及び
付勢ばねを覆う防蝕カバーと、揺動筒杆の下部に
防蝕部材で覆つて付設されたセンサとを具備して
成り、アーム駆動支軸を回転させて挾持用アーム
で基板収容カセツトを挾持する際に、揺動筒杆が
挾持用アームとともに揺動して当該カセツトに圧
接することにより基板収容カセツトの存在を検知
するように構成したことを特徴とするカセツト搬
送装置のカセツト検知装置。[Scope of Claim for Utility Model Registration] 1. An arm drive shaft for driving a cassette holding arm, a detection device mounting block fixed to the arm drive shaft, and an upper part of the detector mounted on the block so as to be swingable. A swinging rod provided on the block, a sensor provided on the block to detect the clamping state of the substrate storage cassette based on the approach of the upper part of the swinging rod, and a corrosion-resistant cover fixed to the block and covering the top of the swinging rod and the sensor. When the arm drive shaft is rotated and the clamping arm clamps the substrate storage cassette, the lower part of the swinging rod comes into contact with the substrate storage cassette, so that the sensor is activated and the cassette is 1. A cassette detection device for a cassette conveying device, characterized in that it is configured to detect when a cassette is clamped. 2. An arm driving support shaft for driving a cassette holding arm, a detection tool mounting block fixed to the arm driving support shaft, and a swinging cylinder rod whose upper portion is pivotally supported by the block so as to be swingable; A biasing spring is attached between the block and the upper part of the swinging cylinder rod, and urges the swinging cylinder rod so that it can swing together with the clamping arm; It is equipped with a corrosion-resistant cover that covers the force spring and a sensor that is attached to the lower part of the swing cylinder rod and covered with a corrosion-resistant member, and when the arm drive shaft is rotated and the clamping arm is clamping the substrate storage cassette. A cassette detection device for a cassette transport device, characterized in that the swing cylinder rod swings together with the clamping arm and presses against the cassette, thereby detecting the presence of a substrate storage cassette.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (en) | 1988-02-19 | 1988-02-19 | Cassette detection device for cassette carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (en) | 1988-02-19 | 1988-02-19 | Cassette detection device for cassette carrier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01125548U true JPH01125548U (en) | 1989-08-28 |
| JPH062268Y2 JPH062268Y2 (en) | 1994-01-19 |
Family
ID=31238606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2139988U Expired - Lifetime JPH062268Y2 (en) | 1988-02-19 | 1988-02-19 | Cassette detection device for cassette carrier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062268Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579941U (en) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | Article gripping device |
| WO2011141960A1 (en) * | 2010-05-12 | 2011-11-17 | ムラテックオートメーション株式会社 | Automatic warehouse and transfer method |
-
1988
- 1988-02-19 JP JP2139988U patent/JPH062268Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579941U (en) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | Article gripping device |
| WO2011141960A1 (en) * | 2010-05-12 | 2011-11-17 | ムラテックオートメーション株式会社 | Automatic warehouse and transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062268Y2 (en) | 1994-01-19 |
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