TWI584398B - Temporary platform automatic correction device and method thereof - Google Patents

Description

Temporary platform automatic correction device and method thereof

The invention provides a temporary calibration platform automatic calibration device and a method thereof, in particular to a temporary calibration platform automatic calibration device and method thereof, which are more convenient and fast to use, and improve accuracy and flexibility.

According to the conventional wafer boat transport device, there is a displacement mechanism, a displaceable jaw disposed on the displacement mechanism, and a control device coupled with the displacement mechanism information, and the jaws are interlocked by the displacement mechanism to selectively move the crystal The boat box is on the platform; and when used, the movement order and the moving distance are input according to the position of the platform or the size of the boat box, and the control device is sequentially operated to control the displacement of the jaws, thereby achieving the movement of the crystal. The purpose of the boat box.

However, in actual use, it is found that each time the position of the platform is changed, the moving distance needs to be re-entered, and the moving distance needs the actual measurement by the operator, and after repeated tests, the correct moving distance can be obtained, which is quite troublesome and time consuming. The external accuracy is quite low.

Therefore, how to solve the above problems and deficiencies in the above-mentioned applications, that is, the inventors of the present invention and those involved in the industry are eager to study the direction of improvement.

Therefore, the inventors of the present invention have collected the relevant information in view of the above-mentioned shortcomings, and through multi-party evaluation and consideration, and through years of experience accumulated in the industry, through continuous trial and modification, the automatic correction is designed to be used. An inventor of the automatic correction device and method for the temporary platform for facilitating rapidity and improving accuracy and flexibility.

The main purpose of the present invention is to shorten the correction time and reduce the difficulty through automatic sensing positioning.

Still another main object of the present invention is to improve the accuracy and versatility of transportation.

To achieve the above object, the present invention includes a transport module for transporting a wafer cassette, and the transport module includes at least one transport device for translating or lifting to carry the wafer cassette, and the transport device is selectively provided with at least The sensing device, the sensing device and the transport module information are linked to at least one control computing module, wherein the control computing module is for the user to input a distance value; when the invention is in operation, the sensing device can sense the handling device and the display device The distance between the platforms of the boat box, and the information is transmitted to the control computing module to control the lifting and lowering of the handling device, and the distance between the conveying device and the platform is controlled according to the distance value, or the distance between the conveying device and the boat box is controlled. .

The loading device can also be translated, and the sensing device senses the position of the two sides of the platform, and transmits the sensing result information to the control computing module to calculate the central position of the platform. With the above technology, the boat can be used for the purpose. The problems of the troublesome time-consuming and low-precision of the box transport device are broken, and the automatic correction makes the use more convenient and fast, and the practical progress of improving the accuracy and flexibility.

1‧‧‧Transport module

11‧‧‧Transportation device

12‧‧‧ translation device

13‧‧‧ Lifting device

2‧‧‧Induction device

3‧‧‧Control computing module

4‧‧‧ platform

T1‧‧‧ distance value

T2‧‧‧ range value

The first figure is a schematic structural view of a preferred embodiment of the present invention.

The second drawing is a schematic diagram of the steps of a preferred embodiment of the invention.

The third figure is a schematic diagram of the centering operation of the preferred embodiment of the present invention.

The fourth figure is a schematic diagram of a platform that is a preferred embodiment of the present invention.

The fifth drawing is a schematic view of the platform of the preferred embodiment of the present invention.

Figure 6 is a schematic illustration of a platform that is too far from the preferred embodiment of the present invention.

Figure 7 is a schematic diagram of the alignment of the platform in accordance with a preferred embodiment of the present invention.

The eighth figure is a schematic diagram of platform positioning according to a preferred embodiment of the present invention.

Figure 9 is a schematic view showing the steps of still another preferred embodiment of the present invention.

In order to achieve the above objects and effects, the technical means and the structure of the present invention will be described in detail with reference to the preferred embodiments of the present invention.

Referring to the first embodiment, which is a schematic structural view of a preferred embodiment of the present invention, it is apparent that the present invention includes a transport module for transporting a wafer cassette, at least one sensing device 2, and at least one The control module 3 (in the present embodiment, the control computing module 3 is disposed on the side of the transport module 1 as a commentary), and the transport module 1 includes at least one transport device 11 for translating or lifting to carry the wafer cassette. And moving The shifting device 12 and the lifting device 13 are connected to the transporting device 11 to place the wafer box on the platform 4 (in the embodiment, the platform 4 is disposed at the side of the transport module 1 as an explanation), and the sensing device 2 is selectively disposed. On the transport device 11, for the width of the sensing platform 4 and the distance between the transport device 11 and the platform 4, and the sensing information is generated according to the sensing result, and the control computing module 3 is connected with the transport module 1 to control the information. Actuated, and the control computing module 3 is connected to the sensing device 2 to control the handling device 11 to perform displacement or correction according to the sensing information, and to remove the sensing device 2 and the handling device 11 after the calibration is completed. Separate to avoid contamination or obstruct the handling of the boat box.

Please refer to the first to eighth figures at the same time, which is a schematic diagram of the structure, a schematic diagram of the steps, a schematic diagram of the center action, a schematic diagram of the platform, a schematic diagram of the platform, a schematic diagram of the platform, and a platform pair. The schematic diagram of the bit position and the positioning of the platform can be clearly seen from the figure. When the operation of the present invention is as shown in the second figure, it can be mainly divided into steps of displacement, measuring platform 4 center and measuring platform 4 distance.

Step (a) Displacement: The transport module 1 is first controlled by the control computing module 3 to be displaced to the platform 4.

Step (b) measuring the center of the platform 4: as shown in the third figure, the two sides of the platform 4 are sensed by the sensing device 2 to obtain the relative position (ie width) of the two sides, and the sensing information is generated and transmitted to the control. The arithmetic module 3 performs calculations whereby the central position of the platform 4 is calculated.

Step (c) measuring the platform 4 distance: the user is controlled by the control computing module 3 for inputting a distance value T1 and a range of values T2, and the sensing device 2 senses the distance between the handling device 11 and the platform 4 to generate the sensing The information and the information are transmitted to the control computing module 3 for calculation. The control computing module 3 controls the handling device 11 to perform lifting according to the calculation result to automatically control and correct the distance between the conveying device 11 and the platform 4.

For example, when the distance value T1 is set to 100 mm and the range value T2 is set to +/- 5 mm, as shown in the fourth figure, when the sensing device 2 senses that the distance between the handling device 11 and the platform 4 is less than the distance value T1 (100 mm), the control computing module 3 causes the transporting device 11 to rise; as shown in the fifth figure, when the sensing device 2 senses the distance between the transporting device 11 and the platform 4, it is greater than the distance value T1 (100 mm) and the range value. When T2 (10 mm) is added (110 mm), the control computing module 3 is configured to lower the handling device 11; As shown in the sixth figure, when the sensing device 2 senses the distance between the transport device 11 and the platform 4, it is larger than the distance value T1 (100 mm), but less than the distance value T1 (100 mm) and the range value T2 (10 mm). (110mm), the control computing module 3 still causes the conveying device 11 to descend; until the sensing device 2 senses that the distance between the conveying device 11 and the platform 4 is between the distance value T1 (100 mm) and the range as shown in the seventh figure. Between the values T2 (10 mm), that is, the distance between the two is equal to the distance value T1 (100 mm), and as shown in the eighth figure, the control computing module 3 raises the height of the transport device 11 according to the setting of the range value T2. In the embodiment, since the range value T2 is set to +/- 5 mm, the conveying device 11 is further raised by 5 mm, whereby the distance between the conveying device 11 and the stage 4 is automatically controlled and corrected.

Referring to the ninth embodiment, which is a schematic diagram of the steps of a further preferred embodiment of the present invention, it can be clearly seen from the figure that the embodiment is substantially the same as the foregoing embodiment, and the difference lies only in the steps of the foregoing embodiment (b). Test platform center and step (c) test platform distance, in this embodiment, the sequence is exchanged as step (b) test platform distance and step (c) test platform center to illustrate "measurement platform center" and "measuring platform distance" There is no absolute priority between the steps.

Therefore, the key to the temporary calibration platform automatic calibration apparatus and method thereof for improving the conventional use is:

1. By cooperating with the transport module 1, the sensing device 2 and the control computing module 3, the invention achieves automatic correction and makes the use more convenient and rapid practical progress.

Second, by the cooperation of the transport module 1, the sensing device 2 and the control computing module 3, the present invention achieves automatic correction to improve the accuracy and flexibility of practical progress.

However, the above description is only the preferred embodiment of the present invention, and thus it is not intended to limit the scope of the present invention. Therefore, the simple modification and equivalent structural changes of the present specification and the drawings should be treated similarly. It is included in the scope of the patent of the present invention and is combined with Chen Ming.

In summary, the temporary calibration platform automatic calibration device and the method thereof of the present invention can achieve its efficacy and purpose when used, and therefore the invention is an invention with excellent practicability, and is an application requirement for conforming to the invention patent.提出 Submit an application in accordance with the law, and hope that the trial committee will grant the invention as soon as possible to protect the inventor's hard work. If there is any doubt in the trial committee, please do not hesitate to give instructions, the inventor will try his best to cooperate and feel polite.

1‧‧‧Transport module

11‧‧‧Transportation device

12‧‧‧ translation device

13‧‧‧ Lifting device

2‧‧‧Induction device

3‧‧‧Control computing module

4‧‧‧ platform

Claims (7)

An automatic calibration device for a temporary storage platform, comprising: a transport module for transporting a wafer cassette, the transport module comprising at least one transport device for translating or lifting to carry the wafer cassette; at least one sensing device, the The sensing device is selectively disposed on the carrying device to sense the distance between the carrying device and the platform and sense the width of the platform, and generate sensing information according to the sensing result; and at least one control computing module, the control The computing module is coupled to the transport module to control its operation, and the control computing module is coupled to the sensing device information, and the loading device is controlled to be displaced or corrected according to the sensing information, and the control computing module is controlled. The group is for the user to input a distance value, and the distance between the handling device and the platform for placing the boat box is controlled according to the distance value, or the distance between the handling device and the boat box is controlled. The temporary platform automatic calibration device of claim 1, wherein the transport module further comprises at least one translation device and at least one lifting device coupled to the handling device. The temporary platform automatic correction device according to claim 1, wherein the control computing module calculates the central position of the platform according to the sensing information. The temporary platform automatic correction device according to claim 1, wherein the control computing module is configured to allow a user to input a range of values, and the carrier device is controlled to operate according to the range value and the distance value. A method for automatically correcting a temporary storage platform, wherein the steps are: (a) controlling a transport module for transporting the wafer cassette by the control computing module to perform displacement; (b) the user is required to input a distance value from the control computing module. And the sensing device selectively disposed on the conveying device of the transportation module senses a distance between the conveying device and a platform for placing the wafer cassette to generate sensing information, and the information is transmitted to the control computing module Controlling the carrying device to perform lifting, controlling the distance between the carrying device and the platform according to the distance value, or controlling the distance between the carrying device and the wafer cassette; and (c) translating the carrying device, And the sensing device senses the two sides of the platform to generate sensing information, and the information is transmitted to the control computing module to calculate the central position of the platform. The method for automatically correcting a temporary storage platform according to claim 5, wherein the transport module of the step (a) further comprises at least one translation device and at least one lifting device coupled to the handling device. . The method for automatically correcting a temporary storage platform according to claim 5, wherein the control computing module is configured for the user to input a range value, and the moving device is controlled according to the range value and the distance value.