CN101386368A

CN101386368A - Storage, transporting system and storage set

Info

Publication number: CN101386368A
Application number: CNA2008102134768A
Authority: CN
Inventors: 村田正直; 山路孝
Original assignee: Asyst Technnologies Japan Inc
Current assignee: Murata Machinery Ltd
Priority date: 2007-09-06
Filing date: 2008-09-08
Publication date: 2009-03-18
Anticipated expiration: 2028-09-08
Also published as: CN101386368B; JP2009062153A

Abstract

A storage accepts FOUP of a plurality of baseplates for manufacturing semiconductor components, e.g. the storage of a stocker for temporarily keeping goods of FOUP and the like, for performing in and out of the storage on the goods effectively in a simple structure, or effectively performing transportation in the storage. The storage (10) comprises a supporting part (11) capable of supporting the goods (3); a horizontal driving part (13) capable of moving the supporting part back and forth in a horizontal direction; a vertical driving portion (14) capable of moving the supporting part back and forth in a vertical direction; and a plurality of racks (15) with putting surfaces, during a plurality of phases causing the supporting part to reach the vertical direction through the vertical driving, one or more than two rack(s) is/are arranged on the horizontal reached through the horizontal driving part, to respectively transport the goods between the racks and the supporting part. At least one of the putting surfaces functions as a port for unloading and loading the goods.

Description

Safe-deposit vault, handling system and safe-deposit vault group

Technical field

The present invention relates to a kind of technical field of safe-deposit vault, this safe-deposit vault, it is carried in orbit and for example accommodates FOUP (the Front Opening UnifiedPod that makes the various substrates that semiconductor element uses, wafer cassette) in the handling system of etc. kinds of goods, with the position of the temporary transient keeping of kinds of goods in contiguous track.

Background technology

This safe-deposit vault is laid on by the track that transport trolley moved that is adjacent to means of delivery etc., is provided with a plurality of shelf parts in safe-deposit vault, with a plurality of kinds of goods via the transport trolley carrying of keeping.And, be provided with and be used for putting into (promptly making kinds of goods pay or take out in this safe-deposit vault and between the transport trolley, go out warehouse-in) the shelf part of " storehouse mouth " and regulation between carry out the interior Handling device of kinds of goods carrying safe-deposit vault (that is carrying in the safe-deposit vault), that be known as windrow robot or windrow crane etc.Particularly pass through windrow robot etc., can in the safe-deposit vault of a plurality of shelf parts that comprise the incalculability restriction, carry (with reference to patent documentation 1 and 2).

On the other hand, in this safe-deposit vault, more small-sized safe-deposit vault is arranged also, it can be with kinds of goods from the transport trolley of top suspension type, directly is delivered on the bay-lift of side lifting of the shelf part that can arrange along the vertical direction multistage.In this safe-deposit vault, when carrying out outbound, kinds of goods are directly carried toward transport trolley (with reference to patent documentation 3) from bay-lift.

Patent documentation 1: TOHKEMY 2006-049454 communique

Patent documentation 2: TOHKEMY 2003-182815 communique

Patent documentation 3: TOHKEMY 2004-238191 communique

Summary of the invention

Yet according to above-mentioned

patent documentation

1 and 2, the first, have following technical matters: Handling device in the safe-deposit vault of windrow robot etc., control and structure are increasingly sophisticated basically, expensive, and also need spend man-hour and cost when safeguarding.

In addition, according to above-mentioned

patent documentation

1 and 2, the second, in order to carry out the maintenance of safe-deposit vault, the space that around safe-deposit vault, must guarantee about 1m.Therefore, along between each safe-deposit vault of track configurations and between safe-deposit vault and the manufacturing installation, vacated the redundant space that just can use when keeping in repair.Moreover safe-deposit vault is as the wherein a kind of main equipment in the factory, and it must move into various parts, assemble, install in inside plants.In addition, Handling device in the safe-deposit vault of windrow robot etc. exists its control and structure increasingly sophisticated basically, expensive and also need spend the problem of man-hour and cost when safeguarding.

On the other hand, according to above-mentioned patent documentation 3, bay-lift itself is as in order to going out the storehouse mouth of warehouse-in, no matter kinds of goods are unloaded kinds of goods the location time from the transport trolley suspention and till on the bay-lift that arrives when being warehouse-in or sling from bay-lift by transport trolley when outbound, all needs spended time.Special when bay-lift be not the delivery position that is positioned at the top, then expend the time that bay-lift is moved to this position, and the bay-lift below being positioned at is paid also and is had any problem.In addition, special because when costing like this, in the operation of warehouse-in to monopolize the use bay-lift, thereby can not use bay-lift that other kinds of goods are carried in the safe-deposit vault.In addition, make combinations such as roller, load-transfer device, guides, in the mechanism in the storehouse of on bay-lift, coming in and going out, exist to go out fast when bay-lift alignd with kinds of goods and carry in warehouse-in and the safe-deposit vault in difficult technologies problem fundamentally this.

The present invention for example makes in view of the above problems, and its 1st problem just can be carried out to efficient the warehouse-in that of kinds of goods by simple structure, or carry in safe-deposit vault effectively for a kind of safe-deposit vault is provided.

In addition, the present invention for example makes in view of the above problems, the safe-deposit vault handling system of its 2nd problem for a kind of safe-deposit vault being provided and having this safe-deposit vault, this safe-deposit vault, can be in crawl space configuration along track, and safeguard also more or less freely, also can be by simple structure, carry out going out warehouse-in or in safe-deposit vault, carrying effectively of kinds of goods effectively.

In order to solve above-mentioned problem, the 1st safe-deposit vault of the present invention comprises: the support portion, can support kinds of goods; Horizontal drive portion can make above-mentioned support portion move back and forth along level one side direction; Vertical drive division can make above-mentioned support portion move back and forth along vertical direction; And a plurality of shelf, it has mounting surface, a plurality of stages on the above-mentioned vertical direction that above-mentioned support portion is arrived, on the level attitude that can arrive, one or more shelf are set respectively, and constitute respectively and can between above-mentioned shelf and above-mentioned support portion, carry kinds of goods mutually by above-mentioned horizontal drive portion; At least one warehouse-in that goes out as above-mentioned kinds of goods plays a role with the storehouse mouth in above-mentioned a plurality of mounting surface.

In this mode, above-mentioned support portion is that have can be from the mounting portion of the 1st mounting surface of the above-mentioned kinds of goods of bottom support; Above-mentioned a plurality of mounting surface is respectively the 2nd mounting surface, its constitute make above-mentioned kinds of goods can be mutually above-mentioned the 1st mounting surface and the 2nd mounting surface and between carry.

According to the 1st safe-deposit vault of the present invention, shelf have on vertical direction, dispose one row or a plurality of mounting surfaces of multi-row (i.e. the 2nd mounting surface).For example, arranged (wherein the m stage on vertical direction, m is the natural number more than 2), have n row (wherein at level one side direction, n is the natural number more than 1), and under the situation that 1 row are only arranged on perpendicular remaining level one side direction (being designated hereinafter simply as " thickness direction "), shelf single-piece skeleton constitutes thin and is vertically elongated writing board shape.Support portion (being mounting portion) constitutes, for example placing on the 1st mounting surface under the state of kinds of goods, can be in this safe-deposit vault, by vertical drive division and horizontal drive portion, move kinds of goods along vertical direction and this two direction of level one side direction or biaxially oriented.

During warehouse-in, kinds of goods are carried to the 2nd mounting surface that plays a role as the storehouse mouth from transport trolley.Then, be delivered to the kinds of goods on the 2nd mounting surface that plays a role as the storehouse mouth, being positioned in can be along on the 1st mounting surface of the mounting portion that biaxially oriented moves.For example, the 1st and the 2nd mounting surface constitutes the different part (being part and close peripheral part near central authorities under the representative type situation) that is supporting the kinds of goods bottom surface, and available any one party supports kinds of goods.When mounting portion moved to vertical position that the 2nd mounting surface that plays a role as the storehouse mouth exists and level attitude, the 2nd mounting surface that plays a role as the storehouse mouth was supported by the 1st mounting surface by replacement, can carry out from the conveying of the 2nd mounting surface to the 1st mounting surface.Under the representative type situation, by vertical drive division the 1st mounting surface is moved to the place higher than the 2nd mounting surface, kinds of goods are supported by the 1st mounting surface.Carrying in the safe-deposit vault when thus, beginning to put in storage., carry out simple twin shaft action here, can both promptly carry out carrying in the safe-deposit vault in any one the 2nd mounting surface of shelf by vertical drive division and horizontal drive portion.

Then, when mounting portion moves to vertical position that the 2nd mounting surface that will use exists and level attitude in keeping, replace the 1st mounting surface and support, carry out from of the conveying of the 1st mounting surface to the 2nd mounting surface by the 2nd mounting surface.Under the representative type situation, by vertical drive division the 1st mounting surface is moved to the place lower than the 2nd mounting surface, kinds of goods are supported by the 2nd mounting surface.Thus, carrying finishes in the safe-deposit vault during warehouse-in, the keeping in the beginning shelf.

On the other hand, when outbound, mounting portion moves to vertical position and the level attitude that mounting has the 2nd mounting surface existence of the kinds of goods that are about to outbound.Then, replace the 2nd mounting surface and pass through the support of the 1st mounting surface, carry out from the 2nd mounting surface moving to the 1st mounting surface.Under the representative type situation, by vertical drive division the 1st mounting surface is moved to the place higher than the 2nd mounting surface, kinds of goods are supported by the 1st mounting surface.Carrying in the safe-deposit vault when thus, beginning outbound.Then, mounting portion is moved into the vertical position and the level attitude of the 2nd mounting surface existence that plays a role as the storehouse mouth., carry out simple twin shaft action here, can both promptly carry out carrying in the safe-deposit vault in any one the 2nd mounting surface by vertical drive division and horizontal drive portion.

Then, replace the 1st mounting surface and support, carry out from of the conveying of the 1st mounting surface to the 2nd mounting surface that plays a role as the storehouse mouth by the 2nd mounting surface that plays a role as the storehouse mouth.Under the representative type situation, by vertical drive division the 1st mounting surface is moved to than the 2nd mounting surface and to come low place, kinds of goods are supported by the 2nd mounting surface.Carrying finishes in safe-deposit vault during outbound thus, becomes the state that can carry to transport trolley from the storehouse mouth.

By standby in the face of the track of storehouse mouth on position or then will arrive the transport trolley of this position, carry out from conveying from storehouse mouth to transport trolley thereafter.

Comprehensive above-mentioned result, because the storehouse mouth is in the 2nd mounting surface at least one, even in the process of therefore in mounting portion carries out safe-deposit vault, carrying,, promptly may carry out from the conveying of transport trolley to the storehouse mouth as long as do not have the mounting kinds of goods on this 2nd mounting surface that plays a role as the storehouse mouth.On the contrary, even in the process of in mounting portion carries out safe-deposit vault, carrying, also can carry out from of the conveying of storehouse mouth to transport trolley.And, by by drive division to comparatively simply the constituting and simply control of mounting portion that biaxially oriented moves, carrying can not hinder the conveying operation between storehouse mouth and the transport trolley and carry out this conveying in the safe-deposit vault.In addition, this safe-deposit vault has range in vertical direction and level one side direction, and the thickness direction structure also can be as thin as a wafer (for example, its thin thickness must add that the width that some mechanisms use is identical with the width of kinds of goods).Therefore, even,, promptly the form that this safe-deposit vault inserts can be configured as long as suitably meet this thickness direction along the less gap of the track of transport trolley.In addition, according to the width in gap, also be fine at a plurality of slim safe-deposit vaults arranged side by side of thickness direction configuration.In addition, can mobile safe-deposit vault all by realizing miniaturization, thereby also be easier to safeguard.

Thus,, and be easy to safeguard, can carry out going out warehouse-in or carrying out effectively transporting in the safe-deposit vault of kinds of goods effectively by simple structure even also configurable along the less gap of track.

In addition, the support portion is not limited to support the structure of kinds of goods bottom when carrying, and also can constitute the flange etc. that supports or keep being installed on the kinds of goods top.

In a mode of the 1st safe-deposit vault of the present invention, shelf have two mounting surfaces respectively in each stage, can support above-mentioned kinds of goods when two side shiftings of level one side direction respectively can make the support portion.

According to this mode, for example, the m stage is being arranged on the vertical direction, having on 2 row and the thickness direction at level one side direction and only have under the situation of row, shelf single-piece skeleton constitutes thin and is vertically elongated writing board shape.Particularly, can come by the parallel motion of horizontal drive portion simply and promptly to carry out for carrying in the safe-deposit vault that has in the same stage between 2 the mounting surface (the 2nd mounting surface).And, compare with the situation that the 2nd mounting surface was set one by one in the same stage, also can more effectively utilize the effect of horizontal drive portion and vertical drive division, thereby can improve handling efficiency when can improve the keeping capacity.

Wherein, shelf constituted in each stage has the 2nd mounting surface one by one, distolateral can support kinds of goods when mobile in mounting portion to one of level one side direction, also can obtain the effect corresponding to the invention described above.

In the alternate manner of the 1st safe-deposit vault of the present invention, at least one that is positioned at the top layer of above-mentioned shelf in the above-mentioned mounting surface of above-mentioned shelf plays a role as above-mentioned storehouse mouth.

According to this mode, when transport trolley is being laid on the track of safe-deposit vault upside when mobile, the operation that kinds of goods are carried to the storehouse mouth from transport trolley just becomes simple.Similarly, the operation that kinds of goods are carried to transport trolley from the storehouse mouth also becomes simple.In addition, exist when top layer under the situation of 2 mounting surfaces (the 2nd mounting surface), can make these two to play a role as the storehouse mouth respectively, also can only have one to play a role as the storehouse mouth.

In the alternate manner of the 1st safe-deposit vault of the present invention, the 1st mounting surface also can be used as the storehouse mouth and plays a role.

According to this mode, be not only the 2nd mounting surface, the 1st mounting surface also plays a role as the storehouse mouth, thereby can increase the chance that warehouse-in, just can carry more rapidly according to the situation of transport trolley.

In the alternate manner of the 1st safe-deposit vault of the present invention, above-mentioned mounting portion is to above-mentioned one distolateral when mobile, and above-mentioned the 1st mounting surface and the 2nd mounting surface it seems to have complementary aspect mutually from above-mentioned vertical direction.

According to this mode, during for example by viewed in plan, if the 1st mounting surface is that the shape of a hoof, the 2nd mounting surface are then for filling up the island shape etc. of these shape of a hoof central authorities; Perhaps, when the 2nd mounting surface is the shape of a hoof on the contrary, the 1st mounting surface is then for filling up the island shape etc. of these shape of a hoof central authorities, when mounting portion to one distolateral when mobile, when promptly between the 1st mounting surface and the 2nd mounting surface, carrying, have complementary aspect during by viewed in plan.In addition, complementary aspect can be the zig-zag that is not in contact with one another, and also can be near the part of central authorities and the part of close periphery.No matter be which kind of situation, kinds of goods can be supported by one of them mounting surface.Its result moves to the place higher than the 2nd mounting surface by vertical drive division with the 1st mounting surface, and kinds of goods are supported by the 1st mounting surface; Or, moving the 1st mounting surface so that the 2nd mounting surface when being higher than the 1st mounting surface by vertical drive division, kinds of goods are supported by the 2nd mounting surface.Therefore, the conveying between the mounting surface can be reached by very simple twin shaft action.

In addition, even the 1st mounting surface and the 2nd mounting surface do not have the aspect of such complementation,, can between the 1st and the 2nd mounting surface, carry by importing other supplementary maintaining body or conveying mechanism.

In the alternate manner of the 1st safe-deposit vault of the present invention, have the concavo-convex of regulation in the bottom surface of above-mentioned kinds of goods; Above-mentioned the 1st mounting surface and the 2nd mounting surface have separately can be with above-mentioned concavo-convex fastening concavo-convex.

According to this mode, because of utilizing the concavo-convex of regulation that the kinds of goods bottom surface has, can be in the conveying of carrying out under the high state of positional precision between the 1st and the 2nd mounting surface.In addition, as so concavo-convex, can enumerate being arranged on the concavo-convex of the FOUP bottom surface of accommodating the various substrates when making quartz conductor.

In the alternate manner of the 1st safe-deposit vault of the present invention, above-mentioned safe-deposit vault is configured with respect to above-mentioned track, so that the track orientation that above-mentioned kinds of goods are carried with respect to transport trolley in the orientation of above-mentioned level one side direction is parallel.

According to this mode, in factory, lay track along wall and near wall, wall causes obstruction can't be provided with under the situation of general safe-deposit vault, is configured to make the orientation of level one side direction parallel with respect to the orientation of track safe-deposit vault of the present invention.At this moment, track separates the amount of thickness of thickness direction of the safe-deposit vault of easy attenuation apart from wall, just can dispose safe-deposit vault without a doubt.In other words, the amount of track laying one-tenth apart from the thickness of the thickness direction of wall safe-deposit vault got final product.

In this mode, above-mentioned safe-deposit vault is configured to make above-mentioned shelf to be positioned at the below of above-mentioned track; Above-mentioned shelf, be arranged in the top layer of above-mentioned shelf and as two of above-mentioned the 2nd mounting surface, a side who is positioned at the upstream side of above-mentioned track plays a role as the storehouse mouth of above-mentioned warehouse-in usefulness, and is positioned at the storehouse mouth that the opposing party in the downstream of above-mentioned track uses as above-mentioned outbound and plays a role.

According to this structure, can carry out following operation: with kinds of goods just from transport trolley after the storehouse of the warehouse-in usefulness that is positioned at upstream side mouth is carried, become unloaded transport trolley by this conveying, move to the storehouse mouth that the outbound that is positioned at the downstream is used, with kinds of goods from then on the storehouse mouth carry to transport trolley.That is, the efficient that goes out warehouse-in can significantly improve.

As described above, according to safe-deposit vault of the present invention, just can carry out going out warehouse-in or carrying out effectively transporting in the safe-deposit vault of kinds of goods effectively by simple structure.

In order to solve above-mentioned problem, the 2nd safe-deposit vault of the present invention, its and carry the warehouse-in that goes out that carries out above-mentioned kinds of goods between the transport trolley of kinds of goods in orbit, it is characterized in that, comprise: driver element can move back and forth above-mentioned kinds of goods, and move back and forth along vertical direction along level one side direction; And shelf, on above-mentioned vertical direction, cross over corresponding each stage in a plurality of stages, on above-mentioned level one side direction, have a plurality of can accommodating or the shelf part of the kinds of goods that mounting is moved by above-mentioned driver element; Above-mentioned safe-deposit vault is configured with respect to above-mentioned track, so that the orientation of above-mentioned level one side direction is with respect to the orientation quadrature of above-mentioned track.

In a mode of the 2nd safe-deposit vault of the present invention, above-mentioned transport trolley is the top Trolley, and it moves along the above-mentioned track that is layed in the top; Above-mentioned shelf are configured with respect to above-mentioned track, to be located at the below of above-mentioned track.

According to the 2nd safe-deposit vault of the present invention, when warehouse-in, when kinds of goods for example from as the transport trolley of top Trolley when the discrepancy Kuku of safe-deposit vault mouth is carried, these kinds of goods then for example move to desired shelf part by the driver element with vertical drive division and horizontal drive portion.Promptly carry out carrying in the safe-deposit vault.When outbound, kinds of goods partly carry out carrying in the safe-deposit vault from desired shelf by driver element.Afterwards, when kinds of goods move to the discrepancy Kuku mouth of safe-deposit vault, just carry out conveying to transport trolley.

In the present invention particularly, shelf, on above-mentioned vertical direction, cross over corresponding each stage in a plurality of stages, on above-mentioned level one side direction, have a plurality of shelf parts, driver element, can with such shelf accordingly, kinds of goods are moved back and forth along vertical direction when moving back and forth along level one side direction.Therefore, by the biaxial movement of vertical direction and level one side direction, kinds of goods partly can be carried out carrying in the safe-deposit vault from storehouse mouth (or other shelf part) the desired shelf to having a plurality of shelf parts that go out to put in storage usefulness.Or by the biaxial movement of vertical direction and level one side direction, desired shelf part from have a plurality of shelf parts can be carried out carrying in the safe-deposit vault to the storehouse mouth that goes out to put in storage usefulness (or other shelf part) with kinds of goods.

For example, constituting of shelf single-piece skeleton: arranged (wherein the m stage on vertical direction, m is the natural number more than 2), have n row (wherein at level one side direction, n is the natural number more than 2) and perpendicular remaining level one side direction (being designated hereinafter simply as " thickness direction ") on only have under the situation of row, form thin writing board shape.

Here, in the factory of semiconductor fabrication factory that generally is equipped with track etc., in order in limited space, to carry out various operations and to attempt to shorten track to improve the primary demands such as speed that inter process moves, may occur carrying out the device of various operations and therewith the different stocker of safe-deposit vault etc. along the situation of track laying in stenosis.In other words, need along the device of track laying etc., need design as far as possible sometimes no gap.On the other hand, be called as the safe-deposit vault of stocker etc., belong to main equipment basically and be assembled in inside plants, be not easy after assembling, to change, if design originally is very close to each other then just more difficult with a part as equipment.In other words, for traditional large-scale safe-deposit vault, for example need leave around it and use the space along the maintenance of the following about 1m of track sky.In other words, comprise that this is safeguarded use the space that the device grade seamlessly disposes along track.The useless space of can saying so when safeguarding, this space.

Yet according to the present invention, shelf become to be located at the below of track with respect to track configurations, and make the orientation of level one side direction crossing with respect to the orientation of track, preferred quadrature.Therefore, safe-deposit vault of the present invention can be by the mode of inserting, and is configured in the gap between the various devices on the direction of the track of laying in the factory etc., thereby very convenient.In other words, even its design is to stay the minority gap between device of track laying etc., as long as utilize the 2nd safe-deposit vault of the present invention, can obtain sufficient spatial accommodation.And carrying in the safe-deposit vault as stretch along thickness direction is thin above-mentionedly, promptly with respect to a plurality of stages and have in each stage for the shelf of a plurality of shelf parts, by the motion of biaxially oriented, can be carried out very effectively.Particularly,, stopping under the state that vertical direction moves moving and to be undertaken by moving of level one side direction between a plurality of shelf parts in each stage even thickness direction is thinner.In addition, the situation that a shelf part was set respectively with the same stage is compared, and it can improve the keeping capacity, and can move more by twin shaft and effectively utilize, and can improve handling efficiency.

Simultaneously, even thickness direction is thinner, can followingly carry out about moving between the shelf part of crossing over a plurality of stages: kinds of goods are moved to can be after the level one side direction position that vertical direction moves, moving of level one side direction that stops to be correlated with, under this state, carry out vertical direction and move, undertaken by moving of level one side direction afterwards.

On the other hand, when carrying out the safeguarding of safe-deposit vault,, make it to leave near the track that has closely disposed various devices etc., can construct out the space of maintenance usefulness easily if the safe-deposit vault that this class is slim is pulled out to the direction that intersects with track.The space is used in the maintenance that need not as traditional safe-deposit vault to be provided with about 1m around safe-deposit vault.Particularly constitute it movably slim safe-deposit vault integral body this moment, to have sufficient practice significance on its weight.

As mentioned above, even in the less gap along the transport trolley track, this safe-deposit vault also can be configured by the mode of inserting.At this moment, even shelf are thinner at thickness direction, it is also high to accommodate efficient, and handling efficiency is also high.In addition, this slim safe-deposit vault can dispose a plurality of at thickness direction according to the wide cut in gap side by side.And, in order to reach miniaturization, both safe-deposit vault integral body can be moved, make maintenance be easy to carry out especially.For example, this safe-deposit vault is configured as thin as a wafer (for example, its thin thickness must add that the width that some mechanisms use is identical with the width of kinds of goods), the therefore gap that can insert this thickness about thickness direction when vertical direction and level one side direction have range.

In the alternate manner of the 2nd safe-deposit vault of the present invention, above-mentioned driver element comprises: the support portion, can support above-mentioned kinds of goods; Horizontal drive portion can make above-mentioned support portion move back and forth along level one side direction; And vertical drive division, above-mentioned support portion is moved back and forth along vertical direction; Above-mentioned shelf, partly has mounting surface as above-mentioned shelf, corresponding each stage of above-mentioned mounting surface is provided with a plurality of on the level attitude that can arrive by above-mentioned horizontal drive portion, and constitutes respectively can carry above-mentioned kinds of goods mutually between above-mentioned shelf and above-mentioned support portion.

In this mode, above-mentioned support portion is that have can be from the mounting portion of the 1st mounting surface of the above-mentioned kinds of goods of bottom support; Above-mentioned mounting surface is the 2nd mounting surface, its constitute make above-mentioned kinds of goods can be mutually above-mentioned the 1st mounting surface and the 2nd mounting surface and between carry.

According to this mode, when warehouse-in, for example kinds of goods are carried to the 2nd mounting surface that plays a role as the Kuku mouth of coming in and going out from transport trolley.Then, be transported to the kinds of goods on the 2nd mounting surface that plays a role as the storehouse mouth, mounting is in can be along the 1st mounting surface of the mounting portion that biaxially oriented moves.For example, the 1st and the 2nd mounting surface constitutes the different part (under the representative type situation, near the part of central authorities and the part of close periphery) that is supporting the kinds of goods bottom surface, also can support kinds of goods by the either party.When mounting portion moved to vertical position that the 2nd mounting surface that plays a role as the storehouse mouth exists and level attitude, the 2nd mounting surface that replaces playing a role as the storehouse mouth supported by the 1st mounting surface, carries out from the conveying of the 2nd mounting surface to the 1st mounting surface.Under the representative type situation, by vertical drive division the 1st mounting surface is moved to the place higher than the 2nd mounting surface, kinds of goods support by the 1st mounting surface.Carrying in the safe-deposit vault when thus, beginning to put in storage., carry out simple twin shaft action here, can both promptly carry out carrying in the safe-deposit vault in any the 2nd mounting surface of shelf by vertical drive division and horizontal drive portion.

Comprehensive above-mentioned result, can by by driver element to comparatively simply the constituting and simply control of mounting portion that biaxially oriented moves, just can carry out in the safe-deposit vault and carry.And, owing to when carrying out in the process of the conveying between transport trolley and the storehouse mouth, can also be undertaken carrying in the safe-deposit vault by driver element, thereby the handling efficiency in the safe-deposit vault also significantly improves.

In the alternate manner of the 2nd safe-deposit vault of the present invention, above-mentioned shelf make that at least one plays a role as the above-mentioned storehouse mouth that goes out to put in storage usefulness in the above-mentioned shelf part.

In the alternate manner of the 2nd safe-deposit vault of the present invention, above-mentioned shelf make at least one that be positioned at the top layer of above-mentioned shelf in the above-mentioned shelf part play a role as the above-mentioned storehouse mouth that goes out to put in storage usefulness.

According to this mode, when transport trolley is being laid on the track of safe-deposit vault upside when mobile, the operation that kinds of goods are carried to the storehouse mouth from transport trolley just becomes simple.Similarly, the operation that kinds of goods are carried to transport trolley from the storehouse mouth also becomes simple.In addition, exist when top layer under the situation of 2 mounting surfaces, can make these two to play a role as the storehouse mouth respectively, also can only have one to play a role as the storehouse mouth.

In this mode, above-mentioned track is in the upstream side branch of above-mentioned safe-deposit vault; Above-mentioned shelf are disposed at the below of above-mentioned track, are positioned at two of the above-mentioned shelf the superiors in the above-mentioned shelf part, with respect to the above-mentioned track after the branch, play a role as above-mentioned storehouse mouth respectively.

According to this structure, have 2 because go out to put in storage the storehouse mouth of usefulness at the top layer of safe-deposit vault, thereby can carry out input work (promptly simultaneously at this two place, from the conveying of transport trolley to the storehouse mouth), also can carry out the outbound operation (promptly simultaneously two, from of the conveying of storehouse mouth to transport trolley), also can walk abreast simultaneously input work and outbound operation, significantly improve transport efficiency.And can by mobile carry out of biaxially oriented safe-deposit vault in carry when thickness direction is thin this moment, can not sacrifice the characteristic of safe-deposit vault of the present invention.

In order to solve above-mentioned problem, the handling system of the 1st band safe-deposit vault of the present invention has above-mentioned safe-deposit vault of the present invention (wherein, comprising its variety of way), above-mentioned track and above-mentioned transport trolley.

The handling system of the 1st band safe-deposit vault according to the present invention owing to have above-mentioned safe-deposit vault of the present invention, thereby in safe-deposit vault to accommodate efficient high, and handling efficiency is also high.In addition, safe-deposit vault integral body also can move, and makes maintenance be more prone to especially.

In order to solve above-mentioned problem, safe-deposit vault group of the present invention, by respectively a plurality of and carry the safe-deposit vault that goes out warehouse-in that carries out above-mentioned kinds of goods between the transport trolley of kinds of goods in orbit and form, it is characterized in that, above-mentioned a plurality of safe-deposit vault comprises respectively: driver element, above-mentioned kinds of goods can be moved back and forth along level one side direction, and move back and forth along vertical direction; And shelf, on above-mentioned vertical direction, cross over corresponding each stage in a plurality of stages, on above-mentioned level one side direction, have one or more can accommodating or the shelf part of the kinds of goods that mounting is moved by above-mentioned driver element; Above-mentioned a plurality of safe-deposit vault is arranged in consistent with above-mentioned level one side direction, and to make the above-mentioned storehouse mouth that goes out to put in storage usefulness of above-mentioned kinds of goods be row side by side.

According to safe-deposit vault group of the present invention, when kinds of goods in when warehouse-in, when the going out warehouse-in and carry with the storehouse mouth of each safe-deposit vault that constitutes this safe-deposit vault group, these kinds of goods are partly carried to desired shelf by the driver element that for example has vertical drive division and horizontal drive portion from transport trolley.That is, carry out carrying in the safe-deposit vault.When outbound, kinds of goods partly carry out carrying in the safe-deposit vault from desired shelf by driver element.Afterwards, when kinds of goods move to the storehouse mouth of this safe-deposit vault group, promptly carry out conveying to transport trolley.

In the present invention particularly, shelf, on above-mentioned vertical direction, cross over corresponding each stage in a plurality of stages, on above-mentioned level one side direction, have one or more shelf parts, driver element, can with such shelf accordingly, kinds of goods are moved back and forth along vertical direction when moving back and forth along level one side direction.Therefore, by the biaxial movement of vertical direction and level one side direction, kinds of goods partly can be carried out carrying in the safe-deposit vault from storehouse mouth (or other shelf part) the desired shelf to having a plurality of shelf parts that go out to put in storage usefulness.Or by the biaxial movement of vertical direction and level one side direction, desired shelf part from have a plurality of shelf parts can be carried out carrying in the safe-deposit vault to the storehouse mouth that goes out to put in storage usefulness (or other shelf part) with kinds of goods.

As for each safe-deposit vault, for example, constituting of shelf single-piece skeleton: arranged (wherein the m stage on vertical direction, m is the natural number more than 2), have n row (wherein at level one side direction, n is the natural number more than 2) and perpendicular remaining level one side direction (being designated hereinafter simply as " thickness direction ") on only have under the situation of row, form thin writing board shape.

Yet according to the present invention, a plurality of safe-deposit vaults are arranged in the level one side direction unanimity that makes parallel motion, and the storehouse mouth that cuts out warehouse-in usefulness is row side by side.Therefore, the transport trolley by moving on a track makes the input work that goes out that is undertaken by the storehouse mouth between arbitrary safe-deposit vault become simple.By a plurality of transport trolleys on same track, also can between a plurality of safe-deposit vaults, go out input work.Or, just unloaded the transport trolley of kinds of goods at a safe-deposit vault, can load kinds of goods at another safe-deposit vault by it.

And the safe-deposit vault combination of the cooresponding quantity in gap between the various devices on the direction of the track that only makes and lay in the factory etc. can be configured safe-deposit vault group of the present invention by the mode of inserting, and is very convenient in practicality.In other words, big or stay little gap no matter it is designed to along the gap between the device of track laying etc., as long as utilize safe-deposit vault group of the present invention, can obtain sufficient spatial accommodation.And, carry in the safe-deposit vault that in each safe-deposit vault, carries out, as stretch than unfertile land to thickness direction above-mentionedly, promptly green phase has efficient ground and carries out for crossing over a plurality of stages and having the motion of biaxially oriented of the shelf of a plurality of shelf parts in each stage.Particularly,, stopping under the state that vertical direction moves moving and to be undertaken by moving of level one side direction between a plurality of shelf parts in each stage even thickness direction is thinner.

On the other hand, when carrying out the safeguarding of safe-deposit vault,, can construct out the space of maintenance usefulness easily if will, pull out independently slim safe-deposit vault as each safe-deposit vault from only making up the safe-deposit vault group of desired quantity as described above with other safe-deposit vaults.The space is used in the maintenance that need not as traditional safe-deposit vault to be provided with about 1m around safe-deposit vault.Particularly constitute it each movably slim safe-deposit vault integral body this moment, to have sufficient practice significance on its weight.

As mentioned above, no matter be less clearance along the track of transport trolley, still bigger gap, this safe-deposit vault group can be configured by the mode of inserting.At this moment, about each safe-deposit vault, even shelf are thinner at thickness direction, it is also high to accommodate efficient, and handling efficiency is also high.In addition, because that this slim safe-deposit vault can dispose at thickness direction side by side according to the wide cut in gap is a plurality of, thereby extremely convenient in the practicality.And, it is constituted can to pull out each safe-deposit vault from the safe-deposit vault group also very easy, make that the maintenance for each safe-deposit vault also becomes easy.For example, this safe-deposit vault (for example is configured as thin as a wafer about thickness direction when vertical direction and level one side direction have range, its thin thickness must add that the width that some mechanisms use is identical with the width of kinds of goods), as long as the integer multiple according to this thickness just can suitably insert this safe-deposit vault group the gap along track.

In a mode of safe-deposit vault group of the present invention, above-mentioned driver element comprises: the support portion, can support above-mentioned kinds of goods; Horizontal drive portion can make above-mentioned support portion move back and forth along level one side direction; And vertical drive division, above-mentioned support portion is moved back and forth along vertical direction; Above-mentioned shelf, partly has mounting surface as above-mentioned shelf, corresponding each stage of above-mentioned mounting surface is provided with a plurality of on the level attitude that can arrive by above-mentioned horizontal drive portion, and constitutes respectively can carry above-mentioned kinds of goods mutually between above-mentioned shelf and above-mentioned support portion.

In the alternate manner of safe-deposit vault group of the present invention, above-mentioned safe-deposit vault group is configured with respect to above-mentioned track, so that above-mentioned row along above-mentioned track side by side.

In this mode, above-mentioned transport trolley is the top Trolley, and it moves along the above-mentioned track that is layed in the top; Above-mentioned shelf are configured with respect to above-mentioned track, to be located at the below of above-mentioned track.

According to this mode, because going out to put in storage the storehouse mouth of usefulness is row along track side by side, thereby (promptly by transport trolley mobile on a track, the top Trolley), can carry out input work (promptly with respect to the storehouse mouth of any safe-deposit vault, from the conveying of transport trolley to the storehouse mouth), significantly improve transport efficiency.And this moment, each safe-deposit vault can be carried in the safe-deposit vault by mobile the carrying out of biaxially oriented when thickness direction is thin, can not damage the above-mentioned interests that can access side by side along track by with this safe-deposit vault.

In the alternate manner of safe-deposit vault group of the present invention, above-mentioned safe-deposit vault group is configured with respect to above-mentioned track, so that the orientation of above-mentioned level one side direction is with respect to the orientation quadrature of above-mentioned track.

According to this structure, can utilize the space that exists along track most effectively.Wherein, alleged here " quadrature " is under perfect condition as literal above-mentioned quadrature, as long as but can effectively utilize the space, it is for also comprising the degree that is considered as orthogonal, i.e. the implication of orthogonal in fact.And, under track and non-directional situation, also comprise the place on each track and the situation of tangential direction quadrature.

In the alternate manner of safe-deposit vault group of the present invention, above-mentioned shelf, at least one that makes the top layer of above-mentioned shelf in the above-mentioned shelf part plays a role as above-mentioned storehouse mouth.

According to this mode, when transport trolley is being laid on the track of safe-deposit vault upside when mobile, the operation that kinds of goods are carried to the storehouse mouth from this transport trolley becomes simple.Similarly, the operation that kinds of goods are carried to transport trolley from the storehouse mouth also becomes simple.In addition, exist when top layer under the situation of 2 shelf parts, can these two play a role as the storehouse mouth respectively, also can only have one to play a role as the storehouse mouth.

In order to solve above-mentioned problem, the handling system of the 2nd band safe-deposit vault of the present invention has above-mentioned safe-deposit vault group of the present invention (wherein, comprising its variety of way), above-mentioned track and above-mentioned transport trolley.

The 2nd handling system that has safe-deposit vault according to the present invention, owing to have an above-mentioned safe-deposit vault group of the present invention, thereby can be along not waste or dispose safe-deposit vault effectively of track, simultaneously in each safe-deposit vault, it be high to accommodate efficient, and handling efficiency is also high.Can separate with other safe-deposit vaults of safe-deposit vault group and each safe-deposit vault is moved, make especially and safeguard and be more prone to.

Effect of the present invention and other advantage can be from understanding the embodiment of following explanation.

Description of drawings

Fig. 1 is the transparent view of outward appearance of the handling system of the safe-deposit vault of expression with the 1st embodiment.

Fig. 2 is the in-built cutaway view of the safe-deposit vault of expression the 1st embodiment.

Fig. 3 is the cutaway view of the buckling state of expression the 1st mounting surface of the 1st embodiment and the 2nd mounting surface.

Fig. 4 is the birds-eye view of the mounting portion of expression the 1st embodiment to the operating state of level one side direction.

Fig. 5 is the transparent view of outward appearance of the handling system of the safe-deposit vault of expression with the 2nd embodiment.

Fig. 6 is the birds-eye view of the configuration status of safe-deposit vault in practicality of expression the 1st embodiment.

Fig. 7 is the birds-eye view of track of the handling system of expression the 3rd embodiment.

Fig. 8 is the transparent view of outward appearance of the handling system of the safe-deposit vault of expression with the 4th embodiment.

The specific embodiment

Followingly embodiments of the present invention are described with reference to accompanying drawing.

(the 1st embodiment)

The safe-deposit vault structure of the 1st embodiment at first, is described referring to figs. 1 through Fig. 3.Here, Fig. 1 is that transparent view, Fig. 2 of outward appearance of the handling system of the safe-deposit vault of expression with the 1st embodiment is that the in-built cutaway view of safe-deposit vault, Fig. 3 of schematically showing Fig. 1 is the cutaway view with respect to the buckling state of kinds of goods of the 1st mounting surface of expression the 1st embodiment and the 2nd mounting surface.

Particularly the 1st embodiment is the embodiment of " the 1st safe-deposit vault " of the present invention.

In Fig. 1, handling system 100 has track 1, transport trolley 2, stocker (safe-deposit vault) 10 and controller 20.Handling system 100 drives transport trolley 2, carries FOUP3 on track 1.Track 1 is as an example of " track " of the present invention, is used from the effect of the track that transport trolley 2 moves.

The OHT (Overhead HoistTransport, suspension type conveyor system) of transport trolley 2 for for example driving by linear motor is carried to stocker 10 or not graphic manufacturing installation, OHT buffer zone and large-scale stocker etc. with FOUP3.Has the hoisting crane 2a that moves along vertical direction in the inside of transport trolley 2.

Hoisting crane 2a is in when carrying, for example by the flange 4 of holding structure with the FOUP3 that keeps being handled upside down.Hoisting crane 2a constitutes batching belt and rolling out lifting mechanisms such as belt of being provided with on the main body by transport trolley 2, can carry out lifting along vertical direction below track 1.Hoisting crane 2a and stocker 10 between carry out outbound or when warehouse-in of FOUP3, what move to stocker 10 goes out the top position of warehouse-in with the storehouse mouth, and then on the position that drops to the storehouse mouth, keeps or decontrols flange 4.On this lowering position, the bottom surface of FOUP3 is contacted with the 2nd mounting surface described later (that is the bottom surface of storehouse mouth).

As shown in Figures 1 and 2, FOUP3 in stocker 10, is handled upside down (that is carrying in the safe-deposit vault) in order to carry out carrying out purpose with respect to transport trolley 2 for going out warehouse-in and adjustment storage position etc. as an example of " kinds of goods " of the present invention.

As shown in Figure 3, FOUP3 has

recess

5,6 in the bottom surface.Recess 5 forms and is arranged on the protuberance 16 corresponding sizes on the shelf 15 described later.On the other hand, recess 6 forms and is arranged on the protuberance 12 corresponding sizes on the supporting part 11 described later.

Be back to Fig. 1, the operationpiston that controller 20 is for example made according to semiconductor element with respect to transport trolley 2 and stocker 10, carries out the carrying of FOUP3 and goes out the warehouse-in indication of (comprising carrying in the safe-deposit vault).Respond this indication, transport trolley 2 and stocker 10 are activated, and by the FOUP3 that is carried by transport trolley is implemented various processing, carry out the semiconductor element manufacturing.

(safe-deposit vault monomer)

Stocker 10 as an example of " safe-deposit vault " of the present invention, is laid a plurality of FOUP3 of keeping with track 1 adjacency.

In Fig. 2, stocker is the interior Handling device of safe-deposit vault that is made of mounting portion (support portion) 11, horizontal drive portion 13 and vertical drive division 14, has a plurality of shelf 15 simultaneously.Handling device is carried FOUP3 in the safe-deposit vault between a plurality of shelf 15.Carry by this, FOUP3 is positioned in the particular pallet (that is, the keeping shelf) in a plurality of shelf 15, and the FOUP3 keeping is in stocker 10.Perhaps, as describing in detail later, be delivered to as going out the shelf 15 that warehouse-in plays a role with the storehouse mouth.

Mounting portion 11 is moved to level one side direction by horizontal drive portion 13 in order to carry FOUP3 between a plurality of shelf 15, and is moved to vertical direction by vertical drive division 14.Upper surface in mounting portion 11 has the 1st mounting surface 11a.The 1st mounting surface 11a contacts with the bottom surface of FOUP3 when carrying, and from its bottom support FOUP3.On the 1st mounting surface 11a, be formed with protuberance with as support portion material 12.Shown in Fig. 3 (b), protuberance 12 forms the recess 6 corresponding sizes with FOUP3, when carrying and this recess 6 be interlocked.

In Fig. 2, horizontal drive portion 13 is driven on the horizontally-guided device 17 that extends along level one side direction for example by not shown electrical motor once more.Horizontal drive portion 13 and mounting portion 11 are connected, and mounting portion 11 is moved back and forth to level one side direction D1 along horizontally-guided device 17.

Vertical drive division 14 is driven at the vertical guides 18 that extends along vertical direction for example by not graphic electrical motor.On vertical drive division 14, be fixed with the central portion of horizontally-guided device 17.Along vertical guides 18, D2 moves back and forth vertical drive division 14 to vertical direction with horizontally-guided device 17.When moving back and forth thus, mounting portion 11 is positioned at the central portion of horizontally-guided device 17.So, mounting portion 11 is by horizontal drive portion 13 and vertical drive division 14, moves to the biaxially oriented of vertical direction and level one side direction.

A plurality of shelf 15 as in 7 stages of vertical direction, at level one side direction 2 row and at thickness direction one row and by adding up to 14 shelf to constitute, by mounting portion 11 moving between described 14 shelf 15, carry out the conveying of FOUP3.Each shelf 15 have the 2nd mounting surface 15a at upper surface, and FOUP3 is positioned on the 2nd mounting surface 15a.On the 2nd mounting surface 15a, be formed with protuberance 16 as the support portion material.Shown in Fig. 3 (a), protuberance 16 forms the recess 5 corresponding sizes with FOUP3, when carrying (keeping) and this recess 5 be interlocked.

Once more at Fig. 2,1 shelf (in other words, the 2nd mounting surface 15a that it has) in 14 shelf 15, performance and transport trolley 2 between pay FOUP3 go out the effect of warehouse-in with the storehouse mouth.The shelf 15 that are set at the storehouse mouth are wherein 1 shelf of 2 shelf being arranged in top layer (Fig. 2 is positioned at the shelf of the regional P1 that represents with long and two-short dash line), are positioned at the stocker main body 10a of its top and side, and are then open so that FOUP3 can go out warehouse-in.

And, be not only the shelf 15 that are set at the storehouse mouth, except these shelf 15, can be with the mounting portion 11 that moves to regional P1 as the storehouse mouth, also can be only with this mounting portion 11 as the storehouse mouth.In this case, if shelf 15 are not arranged on regional P1, and the mounting portion 11 of mounting FOUP3 is not configured in regional P1, and then FOUP3 directly puts in storage from transport trolley 2.Perhaps, when the mounting portion 11 of mounting FOUP3 was configured in regional P1, the direct outbound of FOUP3 was to transport trolley 2.

About the configuration of stocker 10, be set at the shelf 15 of storehouse mouth, be configured in the below of track 1.Particularly, the orientation of level one side direction that mounting portion 11 moves, with respect to the orientation of track 1 with right angle intersection.

Then, with reference to Fig. 4 (a) shape of the 1st and the 2nd mounting surface of present embodiment is described.Here, Fig. 4 (a) is the birds-eye view of the mounting portion of expression present embodiment to the operating state of level one side direction.Particularly, Fig. 4 (a) is equivalent to the A1-A1 section among Fig. 2, and expression is arranged at the 2 row shelf 15 (the 2nd mounting surface 15a) of the top layer of stocker 10.

Shown in Fig. 4 (a), when the upper surface side of stocker 10 was observed, the 2nd mounting surface 15a formed the U font as the water chestnut, and the 1st mounting surface 11a forms the island quadrangle that fills up these U font central authorities.Thus, the 1st and the 2nd mounting

surface

11a, 15a have complementary aspect.FOUP3 carries between the 1st and the 2nd such mounting

surface

11a and 15a.

And in the example shown in Fig. 3 and Fig. 4 (a), when birds-eye view was observed, the 1st mounting surface 11a was positioned at the inboard of the 2nd mounting surface 15a, and its external diameter is less.Yet, also can on the contrary both be constituted the outside and the external diameter that make the 1st mounting surface 11a be positioned at the 2nd mounting surface 15a and become bigger.At this moment, as the variation of the shape of the 1st and the 2nd mounting surface shown in Fig. 4 (a), shown in Fig. 4 (b), for example when the upper side of stocker 30 is observed, the 1st mounting surface 3a forms the U font as horse-hof shape, and the 2nd mounting surface 35a forms the island quadrangle that fills up these U font central authorities.So, if will be up and down the 1st mounting surface 31a of sway become big, then can increase the stability when the FOUP3 mounting carried in the safe-deposit vault of mounting portion 31, help preventing that FOUP3 from falling or depart from.

(carrying action in the safe-deposit vault)

Then, with reference to Fig. 2 to Fig. 4 to the conveying of the kinds of goods in the safe-deposit vault of present embodiment, be that the action of carrying in the safe-deposit vault describes.

In Fig. 2 and Fig. 4, will put and be positioned in the FOUP3 of the 2nd mounting surface 15a of regional P1 by transport trolley 2 in storage, carry to another the 2nd mounting surface 15a (, representing) that is arranged in the stage with regional P2 at Fig. 2 and Fig. 4.At this moment, at first, finished the mounting portion 11 (being represented by dotted lines among Fig. 2) to the conveying of the 2nd mounting surface 15a of regional P3 with FOUP3, move to regional P1 the 2nd mounting surface 15a under.At this moment, after mounting portion 11 moves to about central authorities of horizontally-guided device 17 by horizontal drive portion 13, move to the vertical position of regulation along vertical guides 18 by vertical drive division 14.The vertical position of this regulation is positioned at the below of the 2nd mounting surface 15a of regional P1.Afterwards, the mounting portion 11 that is arranged in the vertical position of regulation moves to the level attitude (representing with solid line at Fig. 2) of regulation along horizontally-guided device 17 by horizontal drive portion 13.Shown in Fig. 3 (a), the level attitude of this regulation is the position that has the protuberance 12 of mounting portion 11 below the recess 6 of FOUP3 vertical.

Be moved into the vertical position of regulation and the mounting portion 11 of level attitude, rise by vertical drive division 12.Rise by this, the 1st mounting surface 11a shown in Fig. 3 (b), is higher than the 2nd mounting surface 15a by the central authorities of the 2nd 15a of mounting portion.At this moment, separate at the recess 5 of regional P1 and the fastening of protuberance 16, replace the 2nd mounting surface 15a to support FOUP3 with the 1st mounting surface 11a, and the mutual fastening of the recess 6 of protuberance 12 by mounting portion 11 and FOUP3, FOUP3 is carried to the 1st mounting surface 11a from the 2nd mounting surface 15a.

Carry the mounting portion 11 of FOUP3, move to regional P2 the 2nd mounting surface 15a directly over.At this moment, mounting portion 11 moves to the level attitude of stipulating on level one side direction by horizontal drive portion 13.This prescribed level position is for upwards existing the position of the recess 5 of FOUP3 above the protuberance 16 of the 2nd mounting surface 15a of regional P2 is vertical.Move to the mounting portion 11 of prescribed level position, descend by vertical drive division 14.Descend by this, the 1st mounting surface 11a shown in Fig. 3 (a), is low than the 2nd mounting surface 15a by the central authorities of the 2nd mounting surface 15a of regional P2.At this moment, separate at the protuberance 12 of regional P2 and the fastening of recess 6, replace the 1st mounting surface 11a to support FOUP3 with the 2nd mounting surface 15a, and fasten mutually by the recess 5 of FOUP3 and the protuberance 16 of the 2nd mounting surface 15a, FOUP3 from the 1st mounting surface 11a, is carried to the 2nd mounting surface 15a of regional P2.Thus, with FOUP3 from the regional P1 that is set at the storehouse mouth conveying release to regional P2.In addition, if should carry operation to carry out, promptly become the conveying action to regional P1 from regional P2 with reverse order.Thus, move, or the go out warehouse-in of FOUP3 between transport trolley 2 and stocker 10 moves by the conveying that above-mentioned storehouse mouth carries out.

So, according to the stocker 10 of present embodiment, have range in vertical direction and level one side direction, and at thickness direction, the thickness that includes 1 FOUP3 adds the space that horizontal drive portion 13 and vertical drive division 14 are required, and its structure as thin as a wafer.Therefore, even, also can be configured in less gap along track 1.And, when carrying out going out to put in storage between storehouse mouth and the transport trolley 2, do not need the mounting portion 11 that moves along biaxially oriented, so it can not hinder this to go out input work, can carry out going out warehouse-in or carrying out effectively carrying in the safe-deposit vault of FOUP3 effectively by simple structure.

And in the present embodiment, stocker 10 is configured to, and with right angle intersection, the orientation that also can be configured to level one side direction is parallel with the orientation of track 1 with respect to the orientation of track 1 in the orientation of level one side direction that mounting portion 11 moves.

(the 2nd embodiment)

Then, with reference to Fig. 5 the variation as the safe-deposit vault of the 1st embodiment of the 2nd embodiment of the present invention is described.Here, Fig. 5 represents to have the outward appearance of handling system of the safe-deposit vault of the 2nd embodiment, it is the transparent view with the same purpose of Fig. 1, particularly, in safe-deposit vault shown in Figure 5, set outbound respectively and used the storehouse mouth, and be configured to level one side direction and parallel track that mounting portion is moved with storehouse mouth and warehouse-in.And, in handling system shown in Figure 5, about with the identical key element of handling system 100 structures shown in Figure 1, indicate with same label, omit its explanation.

Particularly the 2nd embodiment is the embodiment of " the 1st safe-deposit vault " of the present invention.

In Fig. 5, handling system 200 has track 1, transport trolley 2 and stocker 40.Handling system 200 is identical with handling system 100 shown in Figure 1, drives transport trolley 2, carries out the carrying of FOUP3 on track 1.When transport trolley 2 was carried in orbit, D3 moved to moving direction.

Stocker 40 has Handling device (with reference to Fig. 2 to Fig. 5) in the safe-deposit vault identical with the 1st embodiment, and a plurality of shelf 15.In a plurality of shelf 15, be positioned at 2 shelf 15 (the 2nd mounting surface 15a) of top layer, as outbound with and the storehouse mouth of warehouse-in usefulness.In 2 shelf 15a of top layer, be set at the 2nd mounting surface 15a of warehouse-in with the storehouse mouth, be positioned at the upstream side of moving direction D3, and be set at the 2nd mounting surface 15a of outbound with the storehouse mouth, be positioned at the downstream of moving direction D3.Above described the 2nd mounting surface 15a, reach the relative stocker main body 40 in side, open so that FOUP3 goes out warehouse-in.

In the stocker 40, be set at outbound and warehouse-in 2 the 2nd mounting surface 15a, be configured in track 1 below and along track 1 with the storehouse mouth.And the orientation that these 2 the 2nd mounting surface 15a are arranged (in other words, 2 the 2nd mounting surface 15a are set to the orientation of level one side direction that mounting portion moves) is configured to be parallel to the orientation of track 1.

(using outbound to use and put in storage the warehouse-in that goes out that carries out with the storehouse mouth moves)

Then, the safe-deposit vault of present embodiment and the warehouse-in action that goes out between the transport trolley are described.

In Fig. 5, in safe-deposit vault 40, the outbound of the warehouse-in of 1FOUP3a and the 2FOUP3B different with this 1FOUP3a is carried out between 1 transport trolley 2 continuously.At this moment, at first, keep the transport trolley 2 of 1FOUP3a, from the upstream side arrival stocker 40 of moving direction D3.Thus, transport trolley 2 stops at and is set at warehouse-in with directly over the 2nd mounting surface 15a of storehouse mouth, and when the hoisting crane 2a that is keeping 1FOUP3a moves to the vertical position of regulation, 1FOUP3a puts down from this hoisting crane 2a, is positioned in warehouse-in with on the storehouse mouth (being set at the 2nd mounting surface 15a of warehouse-in with the shelf 15 of storehouse mouth).By this mounting, 1FOUP3a is to stocker 40 warehouse-ins.After just carrying out this warehouse-in or after 2FOUP3b outbound described later, identical with the stocker 10 of the 1st embodiment, carrying in the safe-deposit vault of the 1FOUP3a that begins to have put in storage.

Then, as shown in Figure 5, put down the transport trolley 2 of 1FOUP3a, D3 moves to moving direction.Transport trolley 2 stops at and is set at outbound with directly over the 2nd mounting surface 15a of storehouse mouth, and when hoisting crane 2a moved to the vertical position of regulation, 2FOUP3b hoisting crane 2a thus kept.By this maintenance, 2FOUP3b carries out outbound.Before just carrying out outbound or before the mouth of transport trolley arrival outbound usefulness storehouse, identical with the stocker 10 of the 1st embodiment, be scheduled to the interior carrying of safe-deposit vault of the 2FOUP3b of outbound.After the outbound, keep the transport trolley 2 of 2FOUPEb to move to moving direction D3.Thus, a series of discrepancy release.

So, stocker 40 according to the 2nd embodiment, because the storehouse mouth of outbound and warehouse-in usefulness is provided with respectively, just from transport trolley 2 with 1FOUP3a after warehouse-in is put in storage with the storehouse mouth, 2FOUP3b from outbound with the storehouse mouth to transport trolley 2 outbounds that become light condition, thereby the efficient that goes out warehouse-in significantly improves.In addition, wall in factory causes obstruction, when general stocker can't be set, stocker 40 is configured to make the orientation of level one side direction that mounting portion moves parallel with the orientation of track 1, therefore as long as it is the thickness that is configured the thickness direction of thin stocker that track leaves the distance of wall, promptly can dispose stocker no problemly.

Then, with reference to Fig. 6 the configuration of safe-deposit vault is described.Here, Fig. 6 is the birds-eye view of configuration status in the practicality of safe-deposit vault of expression the 1st embodiment.

As shown in Figure 6, safe-deposit vault is for example in the factory such as semiconductor fabrication factory, is configured in the gap between the device of the manufacturing installation that is provided with along track etc.The thickness direction size of stocker 10 is designed to corresponding to the gap between the manufacturing installation 9.Between manufacturing installation 9, be provided with the space S 1 of maintenance usefulness.By stocker 10 being inserted in this space S 1, being known as when keeping in repair with effective utilization is the space S 1 of redundant space.A plurality of manufacturing installations 9 and be configured in stocker 10 between these manufacturing installations 9, be configured to level one side direction that mounting portion moves with respect to track 1 with right angle intersection.

And at the 2nd embodiment, 2 storehouse mouths of outbound usefulness and warehouse-in usefulness are configured in the below of 1 track 1, but these 2 storehouse mouths also can be configured in the below of 2 tracks.

(the 3rd embodiment)

Then, with reference to Fig. 7 the variation as the safe-deposit vault of the 2nd embodiment of the 3rd embodiment of the present invention is described.Here, Fig. 7 is the birds-eye view of track of the handling system of expression the 3rd embodiment, and particularly, the track of 2 storehouse mouths that the safe-deposit vault of the 2nd embodiment has is led in expression.And, in handling system shown in Figure 7, about with the identical key element of handling system 200 structures shown in Figure 5, indicate with same label, omit its explanation.

Particularly the 3rd embodiment is the embodiment of " the 2nd safe-deposit vault " of the present invention.

In Fig. 7, handling system 300 has track 1, transport trolley 2 and stocker 40.Handling system 300 is by not shown controller, and control transport trolley 2 and stocker 40 carry out the carrying of FOUP3 on track 1.

Track 1, is made of the 1st and the 2nd track 1a of branch, 1b in the downstream of branch point P1 in upstream side (being branch point P1 in Fig. 7) branch of stocker 40.The 1st track 1a of branch is used for the track to stocker 40 warehouse-ins with 1FOUP3a, and the 2nd track 1b of branch is used for the track from stocker 40 outbounds with 2FOUP3b.

Transport trolley 2 is made of the transport trolley 2a of warehouse-in usefulness and the transport trolley 2b that outbound is used.Warehouse-in use transport trolley 2a, after branch point P1, moves along the 1st track 1a of branch, from the upstream side of stocker 40 1FOUP3a is carried to it and puts in storage and use the storehouse mouth.Warehouse-in is used transport trolley 2b, after branch point P1, moves along the 2nd track 1b of branch, with the storehouse mouth 2FOUP3b is carried to its downstream from the outbound of stocker 40.

About stocker 40, be positioned at 2 the 2nd mounting surface 15a of top layer, as the storehouse mouth of outbound and warehouse-in usefulness.Be set at the 2nd mounting surface 15a of warehouse-in, be positioned at the below of the 1st track 1a of branch, be set to the 2nd mounting surface 15a of outbound, be positioned at the below of the 2nd track 1b of branch with the storehouse mouth with the storehouse mouth.In addition, 2 the 2nd mounting surfaces 15 can be brought into play identical effect but conduct goes out warehouse-in with the storehouse mouth not respectively as outbound storehouse mouth and warehouse-in storehouse mouth.

(with the handling system of corresponding 2 the storehouse mouths of 2 tracks go out the warehouse-in action)

Then, the warehouse-in action that goes out to the handling system of the 3rd embodiment describes.

In Fig. 7, in handling system 300, use 2 track 1a, 1b of corresponding 2 storehouse mouths, go out warehouse-in simultaneously.At this moment, at first, when transport trolley 2 arrived branch point P1, the mobile route after the branch point P1 of transport trolley 2 was controlled.When transport trolley 2 was used transport trolley 2a for warehouse-in, warehouse-in moved along the 1st track 1a of branch with transport trolley 2a, arrives stocker 40.Thus, warehouse-in stops at transport trolley 2a and is set at warehouse-in with directly over the 2nd mounting surface 15a of storehouse mouth, and by the 1FOUP3a that warehouse-in transport trolley 2a keeps, is positioned in warehouse-in and uses on the mouth of storehouse.By this mounting, 1FOUP3a is to stocker 40 warehouse-ins.Thereafter, warehouse-in moves to the downstream of the 1st track 1a of branch with transport trolley 2a.

On the other hand, when transport trolley 2 was used transport trolley 2b for warehouse-in, outbound was moved along the 2nd track 1b of branch with transport trolley 2b, arrives stocker 40.Thus, outbound stops at transport trolley 2b and is set at outbound with directly over the 2nd mounting surface 15a of storehouse mouth, and keeps being positioned in outbound with the 2FOUP3b on the mouth of storehouse.By this maintenance, 2FOUP3b is to outbound transport trolley 2b outbound.Thereafter, outbound is moved to the downstream of the 2nd track 1b of branch with transport trolley 2b.

So, according to the handling system of the 3rd embodiment, the top layer of stocker 40 has 2 storehouse mouths, and a plurality of transport trolleys 2 move along 2 track 1a, 1b of corresponding these 2 storehouse mouths simultaneously, thereby input work and outbound operation can carry out simultaneously, and transport efficiency is significantly improved.

In addition, stocker 10 shown in Figure 6, though with the monomer configuration, also can be according to the gap between the manufacturing installation, the windrow unit that configuration is made up of a plurality of stockers.

(the 4th embodiment)

Then, with reference to Fig. 8 the safe-deposit vault group that the safe-deposit vault by a plurality of the 1st embodiments as the 4th embodiment of the present invention makes up is described.Here, Fig. 8 represents to have the outward appearance of handling system of the safe-deposit vault group of present embodiment, and it is the transparent view with the same purpose of Fig. 1.And, in handling system shown in Figure 8, about with the identical key element of handling system 100 structures shown in Figure 1, indicate with same label, omit its explanation.

Particularly the 4th embodiment is the embodiment of " safe-deposit vault group " of the present invention.

In Fig. 8, handling system 500 has track 1, transport trolley 2 and a plurality of windrow unit 10x.Handling system 500 is identical with handling system 100 shown in Figure 1, by not shown controller, drives transport trolley 2, carries out the carrying of FOUP3 on track 1.

Windrow unit 10x is made of 6 stockers 10.Each stocker 10 is identical with stocker 10 shown in Figure 1, has Handling device 19 and a plurality of shelf 15 in the safe-deposit vault that comprises not shown mounting portion.Handling device 19 in the safe-deposit vault moves mounting portion by driver element to the biaxially oriented of level one side direction and vertical direction, carry FOUP3 between a plurality of shelf 15.Be arranged in the shelf 15 (at the shelf of Fig. 8) of the top layer of a plurality of shelf 15, play a role with the storehouse mouth as going out warehouse-in for mounting FOUP3.

Constitute 6 stockers 10 of windrow unit 10x, it goes out the shelf 15 of warehouse-in with the storehouse mouth, and below track 1, being arranged in along track 1 is row side by side.And, each stocker 10, the orientation of level one side direction that its mounting portion 11 moves with respect to the orientation of track 1 with right angle intersection.

(warehouse-in that goes out of safe-deposit vault group moves)

Simply the windrow unit 10x of the 4th embodiment and the warehouse-in action that goes out between the transport trolley 2 are described at this.

In Fig. 8, when 6 stockers 10 of windrow unit 10x are taken care of different FOUP3 separately, move back and forth by transport trolley 2, can between the carrying ground of the small space of the track 1 of corresponding windrow unit 10x and each FOUP3, carry out the warehouse-in that goes out of 6 kinds of different FOUP3.And this moment is by finishing the transport trolley 2 of warehouse-in at the stocker 10 that is configured in track 1 upstream side, the FOUP3 that is configured in the 2nd stocker 10 in downstream of the 1st stocker 10 can be carried out outbound.And, when a plurality of transport trolleys 2 move with respect to this windrow unit 10x, can carry out the input work that goes out of 6 kinds of FOUP3 simultaneously to 6 stockers 10.

So, according to the 2nd embodiment, no matter, can suitably dispose the windrow unit 10x of the quantity of having adjusted stocker 10 along the less gap of track 1 or big gap, and a plurality of stockers that will constitute windrow unit 10x to be arranged in along track 1 be row side by side.Therefore, the transport trolley 2 by moving on track 1 can both go out input work to arbitrary storehouse mouth, makes transport efficiency significantly improve.

The present invention is not only limited to above-mentioned embodiment, also can be under the situation of the inventive concept of not violating whole content record or thought by patent claim and specification sheets, carry out the change of appropriateness, and along with the safe-deposit vault of these changes, particularly make the safe-deposit vault group of a plurality of this safe-deposit vault combinations and handling system, be also included within the technical scope of the present invention with band safe-deposit vault of this safe-deposit vault group.For example in the above-described embodiment, be that example is illustrated with the structure that when carrying, FOUP is supported from the bottom side, but also can adopt, support or maintain the structure of the flange that is arranged on the FOUP top with respect to this safe-deposit vault.

Claims

1. a safe-deposit vault is characterized in that, comprising:

Kinds of goods can be supported in the support portion;

Horizontal drive portion can make described support portion move back and forth along level one side direction;

Vertical drive division can make described support portion move back and forth along vertical direction; And

A plurality of shelf, it has mounting surface, a plurality of stages on the described vertical direction that described support portion is arrived, on the level attitude that can arrive, one or more shelf are set respectively, and constitute respectively and can between described shelf and described support portion, carry kinds of goods mutually by described horizontal drive portion;

At least one warehouse-in that goes out as described kinds of goods plays a role with the storehouse mouth in described a plurality of mounting surface.

2. safe-deposit vault as claimed in claim 1 is characterized in that, described support portion is that have can be from the mounting portion of the 1st mounting surface of the described kinds of goods of bottom support;

Described a plurality of mounting surface is respectively the 2nd mounting surface, its constitute make described kinds of goods can be mutually described the 1st mounting surface and the 2nd mounting surface and between carry.

3. safe-deposit vault as claimed in claim 1 or 2 is characterized in that, described shelf have two described mounting surfaces respectively in each stage, so that described kinds of goods can be supported respectively in described support portion when two side shiftings of described level one side direction.

4. as each described safe-deposit vault in the claim 1 to 3, it is characterized in that at least one that is positioned at the top layer of described shelf in the described mounting surface of described shelf plays a role as described storehouse mouth.

5. as each described safe-deposit vault in the claim 2 to 4, it is characterized in that described the 1st mounting surface also plays a role as described storehouse mouth.

6. as each described safe-deposit vault in the claim 2 to 5, it is characterized in that, when described mounting portion to described one distolateral when mobile, described the 1st mounting surface and the 2nd mounting surface it seems to have complementary aspect mutually from described vertical direction.

7. as each described safe-deposit vault in the claim 2 to 6, it is characterized in that,

Have the concavo-convex of regulation in the bottom surface of described kinds of goods;

Described the 1st mounting surface and the 2nd mounting surface have separately can be with described concavo-convex fastening concavo-convex.

8. as each described safe-deposit vault in the claim 1 to 7, it is characterized in that,

Described safe-deposit vault is configured with respect to described track, so that the track orientation that described kinds of goods are carried with respect to transport trolley in the orientation of described level one side direction is parallel.

9. safe-deposit vault as claimed in claim 8 is characterized in that,

Described safe-deposit vault is configured to make described shelf to be positioned at the below of described track;

Described shelf, be arranged in the top layer of described shelf and as two of described the 2nd mounting surface, a side who is positioned at the upstream side of described track plays a role as the storehouse mouth of described warehouse-in usefulness, and is positioned at the storehouse mouth that the opposing party in the downstream of described track uses as described outbound and plays a role.

10. safe-deposit vault, its and carry the warehouse-in that goes out that carries out described kinds of goods between the transport trolley of kinds of goods in orbit, it is characterized in that, comprising:

Driver element can move back and forth described kinds of goods, and move back and forth along vertical direction along level one side direction; And

Shelf are crossed over corresponding each stage in a plurality of stages on described vertical direction, have a plurality of can accommodating or the shelf part of the kinds of goods that mounting is moved by described driver element on described level one side direction;

Described safe-deposit vault is configured with respect to described track, so that the orientation of described level one side direction is with respect to the orientation quadrature of described track.

11. safe-deposit vault as claimed in claim 10 is characterized in that,

Described transport trolley is the top Trolley, and it moves along the described track that is layed in the top;

Described shelf are configured with respect to described track, to be located at the below of described track.

12. as claim 10 or 11 described safe-deposit vaults, it is characterized in that,

Described driver element comprises:

Described kinds of goods can be supported in the support portion;

Horizontal drive portion can make described support portion move back and forth along level one side direction; And

Vertical drive division can make described support portion move back and forth along vertical direction;

Described shelf, partly has mounting surface as described shelf, corresponding each stage of described mounting surface is provided with a plurality of on the level attitude that can arrive by described horizontal drive portion, and constitutes respectively can carry described kinds of goods mutually between described shelf and described support portion.

13., it is characterized in that described shelf make that at least one plays a role as the described storehouse mouth that goes out to put in storage usefulness in the described shelf part as each described safe-deposit vault in the claim 10 to 12.

14. as each described safe-deposit vault in the claim 10 to 12, it is characterized in that,

Described track is in the upstream side branch of described safe-deposit vault;

Described shelf are disposed at the below of described track, are positioned at two of the described shelf the superiors in the described shelf part, with respect to the described track after the branch, play a role as the described storehouse mouth that goes out to put in storage usefulness respectively.

15. the handling system with safe-deposit vault is characterized in that, comprising:

As each described safe-deposit vault in the claim 10 to 14;

Described track; And

Described transport trolley.

16. a safe-deposit vault group by respectively a plurality of and carry the safe-deposit vault that goes out warehouse-in that carries out described kinds of goods between the transport trolley of kinds of goods in orbit and form, is characterized in that described a plurality of safe-deposit vaults comprise respectively:

Shelf are crossed over corresponding each stage in a plurality of stages on described vertical direction, have one or more can accommodating or the shelf part of the kinds of goods that mounting is moved by described driver element on described level one side direction;

Described a plurality of safe-deposit vault is arranged in consistent with described level one side direction, and to make the described storehouse mouth that goes out to put in storage usefulness of described kinds of goods be row side by side.

17. safe-deposit vault group as claimed in claim 16 is characterized in that, described safe-deposit vault group is configured with respect to described track, so that described row along described track side by side.

18. as claim 16 or 17 described safe-deposit vault groups, it is characterized in that described safe-deposit vault group is configured with respect to described track, so that the orientation of described level one side direction is with respect to the orientation quadrature of described track.

19. the handling system with safe-deposit vault is characterized in that, comprising:

As each described safe-deposit vault group in the claim 16 to 18;

Described track; And

Described transport trolley.