JP2005203498A - Wafer stocker, semiconductor device transfer system and transfer method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor wafer stocker and a semiconductor device transfer system and transfer method whereby wafer accommodating efficiency is improved and the production line operating ratio is improved. <P>SOLUTION: A cassette storage 21 and a wafer storage 22 are provided in the wafer stocker 10. In the cassette storage 21, a cassette transfer robot 21a transfers a wafer cassette through an automatic cassette transfer unit 20, a gateway 22c of the wafer storage 22, and a cassette shelf 14. At the wafer storage 22, a wafer transfer robot 22a transfers a semiconductor wafer 11 to a wafer shelf 12 from the gateway of the wafer storage 22. In this transfer system which includes a wafer stocker 10 of this design, a lot, for example, to stay long in the system is stored on the wafer shelf 12 provided in the wafer stocker 10. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a wafer stocker, a semiconductor device transfer system, and a transfer method, and more particularly, to a wafer stocker when using FOUP (Front Opening Unified Pod), and a semiconductor device transfer system and transfer method using the wafer stocker. And effective technology.

  For example, in a semiconductor device production line, a semiconductor wafer is housed in a wafer cassette for manufacturing. The wafer cassette is temporarily stored in a wafer cassette storage shelf called a wafer stocker except during processing of semiconductor wafers. Patent Document 1 is an example of a production line using this wafer stocker.

For example, Patent Document 1 discloses a transfer control method in which productivity is improved by providing a retractable wafer stocker in addition to a normal wafer stocker connected to a manufacturing apparatus. In this transfer control method, the number of empty shelves is set in advance with respect to a normal wafer stocker, and when the number of empty shelves is less than that, the overflow wafer cassette is stored in the retreating wafer stocker. . As a result, the normal wafer stocker can be prevented from becoming full, and productivity can be improved.
JP 2001-30146 A

  By the way, as a result of the study of the technique of the semiconductor device manufacturing process as described above, the following has been clarified.

  For example, the wafer stocker as described in the background art, for example, when lot division is frequently performed, causes a reduction in semiconductor wafer storage efficiency and a reduction in operating rate of the manufacturing apparatus.

  That is, in the production line of semiconductor devices, when one lot is composed of, for example, 25 semiconductor wafers, this one lot is usually stored in one wafer cassette. However, when lot division is performed, even if one lot is composed of one semiconductor wafer, only one of them is stored in the wafer cassette. Furthermore, the wafer cassette subjected to such lot division often stagnates on the production line for various reasons. Then, since there are many wafer cassettes containing only a small number of semiconductor wafers, a wafer stocker having a large space and a large number of wafer cassettes are required.

  In addition, when there is not enough space for the wafer stocker, the wafer stocker 10a is frequently filled with the wafer cassette 13 which contains only a few semiconductor wafers 11 and is stagnant as shown in FIG. . Then, since this wafer stocker is connected to the manufacturing apparatus via the cassette conveyance line, the wafer cassette cannot be smoothly put in and out between the wafer stocker and the manufacturing apparatus, and the operating rate of the manufacturing apparatus decreases.

  Furthermore, when performing lot division and integration, an apparatus such as a wafer transfer machine is usually used. If lot division and integration are possible without using this wafer transfer machine, the efficiency of the production line can be further increased.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a wafer stocker, a semiconductor device transfer system, and a transfer method capable of improving the efficiency of housing semiconductor wafers and the operation rate of a production line.

  The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  The wafer stocker according to the present invention has a cassette storage unit and a wafer storage unit. The cassette storage unit includes means for inputting / outputting the wafer cassette to / from the cassette transfer line for transferring the wafer cassette, and means for transferring the wafer cassette input / output to / from the cassette transfer line to the wafer storage unit. And means for storing a wafer cassette for output to the cassette transfer line. Further, the wafer storage unit is a single wafer type means for inputting / outputting semiconductor wafers to / from the wafer cassette transferred by the means for transferring by the cassette storage unit, and semiconductor wafers to be input / output to / from the wafer cassette. And means for storing.

  With this wafer stocker, wafer cassettes stagnating on the cassette conveyance line or the like can be stored not in units of the wafer cassette but in units of semiconductor wafers therein, so that storage efficiency and the like can be improved.

  By the way, the wafer stocker is particularly useful when the wafer cassette is a large FOUP. In this case, the cleanness in the FOUP can be ensured by providing the wafer storage unit with means for cleaning the wafer storage unit to class 1 or lower.

  The semiconductor device transfer system according to the present invention includes the wafer stocker as described above, a cassette transfer line for transferring the wafer cassette, and a computer for controlling the wafer stocker and the cassette transfer line. Then, the computer determines a function for recognizing a lot on the cassette conveyance line, a function for enabling an engineer or the like to set a Hold code for the lot, and whether a Hold code is set for the recognized lot. If set, the function of controlling the lot to be input from the cassette transfer line to the wafer stocker, and the input lot is stored in the wafer stocker as a single wafer in the semiconductor wafer unit. Control function and whether or not the Hold code setting is released for a lot stored in a single wafer type in the wafer stocker, and if it is released, the lot is transferred from the wafer stocker to the cassette. And a function of controlling to output to the transport line.

  That is, for example, by setting a Hold code for a lot that is expected to stay on the production line for a relatively long time, the lot is automatically stored in a wafer stocker in units of semiconductor wafers. Further, by canceling the setting of the Hold code, the stored lot can be put into the wafer cassette and automatically discharged from the wafer stocker.

  In addition, the semiconductor device transfer system according to the present invention can set a batch start code for a lot as in the case of the aforementioned Hold code. In this case, as in the case of the Hold code, the computer determines a function for recognizing a lot and a function for setting a batch start code, and whether a batch start code is set for the recognized lot, If it is set, the batch control is performed so that the lots are sequentially input from the cassette transfer line to the wafer stocker until the number of batch starts is completed. When the batch control process and the number of batch starts are completed, the lots stored in the single wafer type are integrated, and the integrated lot is transferred from the wafer stocker to the cassette. And a function of controlling to output to the line.

  This makes it possible to efficiently perform batch processing on a production line in which single-wafer processing and batch processing devices are mixed.

  Among the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

  (1) By using a wafer stocker capable of storing a semiconductor wafer in a single wafer type, the storage efficiency of the semiconductor wafer can be improved.

  (2) By providing a means for cleaning a semiconductor wafer stored in a single wafer type to maintain the cleanliness of the semiconductor wafer, it is possible to deal with a wafer cassette such as FOUP.

  (3) By constructing a transport system for a semiconductor device including a wafer stocker capable of storing a semiconductor wafer in a single wafer type, and automatically storing a lot set with a Hold code in the wafer stocker, Only a flowable lot exists on the cassette conveyance line, and the operation rate of the production line can be improved.

  (4) By storing the semiconductor wafers in a single wafer type, the wafer cassette can be used for transporting other wafers while the semiconductor wafer is being stored, so it is possible to prevent a situation where there is a shortage of flowable wafer cassettes. become.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof will be omitted.

  FIG. 1 is a schematic diagram showing an example of the functional outline of a wafer stocker according to an embodiment of the present invention. A wafer stocker 10 shown in FIG. 1 includes a wafer shelf 12 in which semiconductor wafers 11 are stored in a single wafer type, a cassette shelf 14 in which a wafer cassette 13 for dispensing is stored. The wafer stocker 10 can receive a wafer cassette 13 stagnating on the production line due to lot division, for example, from the cassette transfer line, take out the semiconductor wafer 11 in the wafer cassette 13 and store it on the wafer shelf 12. Further, when the semiconductor wafer 11 stored in the wafer shelf 12 becomes flowable on the production line, the semiconductor wafer 11 is inserted into the wafer cassette 13 of the cassette shelf 14 and placed on the production line including the cassette transfer line. Can be paid out.

  The semiconductor wafer 11 is received, stored, and dispensed by an automatic transfer robot, and history management of the semiconductor wafer 11 is performed by a computer system that controls the automatic transfer robot. Such a wafer stocker 10 is configured as shown in FIG. 2 in more detail.

  FIG. 2 is a diagram showing an example of the configuration of the wafer stocker according to the embodiment of the present invention. The wafer stocker 10 shown in FIG. 2 includes, for example, an automatic cassette transfer device 20, a cassette storage unit 21, a wafer storage unit 22, and the like. The cassette storage unit 21 includes a cassette shelf 14 and a cassette transfer robot 21a. The wafer storage unit 22 includes a wafer shelf 12, a wafer transfer robot 22a, a clean air conditioner 22b, and the like. Here, the wafer cassette 13 can be a FOUP, for example.

  The automatic cassette transfer device 20 is connected to a cassette transfer line in the production line, and can carry a wafer cassette (FOUP) placed on a carriage to an entrance / exit 21 b provided at the upper part of the cassette storage unit 21. The cassette transport robot 21 a of the cassette storage unit 21 has a function of freely transporting the wafer cassette 13 between the entrance / exit 21 b of the cassette storage unit 21, the entrance 22 c of the wafer storage unit 22, and the cassette shelf 14. Thereby, for example, the wafer cassette 13 carried to the wafer stocker 10 by the automatic cassette transfer device is taken from the entrance / exit 21b of the cassette storage unit 21 and transferred to the entrance / exit 22c of the wafer storage unit 22 or vice versa. The wafer cassette 13 that has been transported or taken in is temporarily stored in the cassette shelf 14 and is transported to the inlet / outlet 22c of the wafer storage unit 22 as necessary, or the wafer cassette that is empty at the inlet / outlet 22c of the wafer storage unit 22 It is possible to transport 13 to the cassette shelf 14.

  The wafer transfer robot 22 a of the wafer storage unit 22 has a function of freely transferring the semiconductor wafer 11 between the entrance / exit 22 c of the wafer storage unit 22 and the wafer shelf 12. That is, for example, the semiconductor wafer 11 is taken out from the wafer cassette 13 carried to the entrance / exit 22c of the wafer storage unit 22 by the cassette carrying robot 21a by using vacuum suction and transferred to the wafer shelf 12 or to the wafer shelf 12. The stored semiconductor wafer 11 can be transferred into the wafer cassette 13 from the entrance 22c of the wafer storage unit 22.

  The clean air conditioner 22b can clean the inside of the wafer storage unit 22 to, for example, a class 1 or lower that is equal to or lower than the cleanness in the FOUP. When the wafer cassette 13 is transported to the entrance / exit 22c of the wafer storage unit 22 by the cassette transfer robot 21a, the opening / closing door 23 of the wafer storage unit 22 is opened after the wafer cassette 13 and the wafer storage unit 22 are brought into close contact with each other. Particles in the cassette storage unit 21 are prevented from flowing into the wafer storage unit 22.

  These various transfer robots (automatic transfer robots) are controlled by a computer system. Further, by controlling the automatic transfer robot by this computer system, for example, lot division and integration can be performed using the wafer stocker 10. An example is shown in FIGS.

  FIG. 3 is an explanatory diagram for explaining the functions of lot division and integration in the wafer stocker according to the embodiment of the present invention. FIG. 4 is an explanatory diagram for explaining a lot division function different from that in FIG. 3 in the wafer stocker according to the embodiment of the present invention. FIG. 5 is an explanatory diagram for explaining a lot integration function different from that in FIG. 3 in the wafer stocker according to the embodiment of the present invention.

  First, FIG. 3 shows an example of lot division and integration that occurs in a production line in which, for example, single wafer type and batch type devices are mixed. That is, for a plurality of wafer cassettes (lots) 13 each including several semiconductor wafers 11, the semiconductor wafers 11 are integrated into one lot by the wafer stocker 10, and batch processing such as a heat treatment apparatus is performed. The device 30 is loaded.

  At this time, the lots to be integrated are selected by the computer system in consideration of the priority order. When the lots are integrated, in FIG. 2, for example, the semiconductor wafer 11 in the wafer cassette 13 that is sequentially transferred to the entrance / exit 21 b of the cassette storage unit 21 is transferred to the wafer of the wafer storage unit 22 by the control of the computer system. When the predetermined number of sheets are stored in the shelf 12 in order, the wafer cassette 13 may be transferred and stored from the wafer shelf 12 to the wafer cassette 13, and the wafer cassette 13 may be discharged from the entrance / exit 21 b of the cassette storage unit 21.

  The lots thus integrated are processed by the batch processing apparatus 30 and transferred to the wafer stocker 10 again. When the lot is divided, for example, the semiconductor wafer 11 in the lot is stored in the wafer shelf 12 and the wafer cassette 13 stored in the cassette shelf 14 is used to control the plurality of original lots. The semiconductor wafers 11 may be sequentially transferred from the wafer shelf 12 to the wafer cassette 13 so that the wafer cassettes 13 are sequentially discharged.

  Next, FIG. 4 shows, for example, that one lot is composed of 12 semiconductor wafers 11, and the wafer cassette (lot) 13 is transferred to the wafer stocker 10, and slots (Slots) 1 to 4 in the lot are transferred. This is an example in which four semiconductor wafers 11 inserted into the wafer are divided and stagnated on the wafer shelf 12. The wafer stocker 10 can pay out the eight semiconductor wafers 11 inserted in the remaining slots 5 to 12 onto the production line.

  5, contrary to FIG. 4, the lot in which the semiconductor wafer 11 is inserted into the slots 5 to 12 is transferred to the wafer stocker, and the lot is stored in the wafer shelf 12 of the wafer stocker 10. This is an example in which four semiconductor wafers 11 are integrated. Then, the wafer stocker 10 can pay out a lot including 12 semiconductor wafers 11 onto a cassette transfer line.

  As described above, for example, the following effects can be obtained by the wafer stocker having the function of storing a semiconductor wafer in a single wafer type and the function of performing lot division and integration.

  (1) In the prior art, what can only be stored in units of wafer cassettes can be stored in units of semiconductor wafers, so that the size of the wafer stocker can be reduced. Further, since the wafer cassette in which the semiconductor wafer is stored can be emptied, the number of wafer cassettes that can be put on the production line can be increased. That is, the wafer cassette can be used efficiently, and a situation in which there are not enough wafer cassettes that can flow on the production line can be prevented. For this reason, the storage efficiency of the semiconductor wafer and the operation rate of the production line can be improved.

  (2) In particular, when the FOUP having a large wafer cassette size is used, the effect of (1) becomes more useful. Even when the FOUP is used, since the clean air conditioner is provided in the wafer stocker, the cleanliness in the FOUP is not impaired.

  (3) When batch processing is performed, a plurality of lots can be efficiently integrated. This improves the operating rate of the production line. Further, since the semiconductor wafer can be divided and integrated by the wafer stocker, a wafer transfer machine is not required, and the apparatus space is made efficient.

  By using such a wafer stocker, for example, a transfer system as shown in FIG. 6 can be constructed. FIG. 6 is a diagram illustrating an example of the configuration of the semiconductor device transfer system according to the embodiment of the present invention.

  The semiconductor device transfer system shown in FIG. 6 includes, for example, wafer processing apparatuses (1) 60a and (2) 60b that perform various processes such as thin film formation and impurity introduction on the semiconductor wafer 11, and the wafer processing apparatus ( 1) A station 61 for supplying the wafer cassette 13 to 60a and (2) 60b, and a wafer stocker 10 as described with reference to FIGS. The wafer processing apparatus (1) 60a, (2) 60b and the station are connected by a cassette transfer line (1) 62a such as RGV (Rail Guided Vehicle), for example, and the station 61 and the wafer stocker 10 are connected by a linear motor line. Are connected by a cassette transport line (2) 62b. The station 61 is the same as a normal wafer stocker, and does not store the semiconductor wafer 11 as shown in FIGS. 1 and 2, but stores the wafer cassette 13 in which it is stored. It is.

  The wafer processing apparatuses (1) 60a and (2) 60b, the station 61, the wafer stocker 10, and the cassette transfer lines (1) 62a and (2) 62b are connected to the host computer and the host computer via a communication network. It is managed by a computer system 63 including a processing terminal. By the management by the computer system 63, the wafer cassette 13 automatically moves on the RGV or linear motor line, and is received by the wafer stocker 10 or the station 61 as necessary. That is, for example, it operates as shown in FIG.

  FIG. 7 is a process flow diagram showing an example of the operation of the transfer system of FIG. 6 in the method of transferring a semiconductor device according to one embodiment of the present invention. The processing flow shown in FIG. 7 is based on program control of the computer system 63, and is executed as follows, for example.

  In S701, the start of the lot (wafer cassette) by the wafer processing apparatuses (1) 60a and (2) 60b is completed, and the lot is delivered from the station 61 to the cassette transfer line (2) 62b. Then, the process proceeds to S702.

  In S702, the computer system 63 recognizes each lot on the cassette transport line (2) 62b by reading an identifier such as a barcode provided for each lot using an automatic reader or the like managed by the computer system 63. To do. Then, the computer system 63 determines whether a Hold code or a batch start code is set in the identifier.

  Here, the Hold code may be set for a lot that is expected to stay on the cassette transport line (2) 62b or the station 61 for a relatively long time. Examples of such lots include waiting for reticles, waiting for engineer work, waiting for customer judgment (waiting for product results, etc.), waiting for scrap, waiting for engineer judgment, and waiting for recovery due to equipment trouble.

  The Hold code and the batch start code are set by the engineer or the like on the computer system 63 with respect to each lot (identifier) using, for example, a check button. Similarly, the hold code setting can be canceled on the computer system 63 so that the lot can be started. If a Hold code or batch start code is set in the recognized lot, the process proceeds to S703, and if not set, the process proceeds to S708.

  In S703, the computer system 63 determines whether the code is a Hold code or a batch start code. In the case of a Hold code, the process proceeds to S704, and in the case of a batch start code, the process proceeds to S706.

  In S704, the lot is input from the cassette transfer line (2) 62b to the wafer stocker 10 under the control of the computer system 63, and the semiconductor wafers 11 in the lot are stored in the wafer shelf 12 in FIG. Then, the process proceeds to S705.

  In S705, the computer system 63 determines whether or not the instruction has been changed to a state where the lot stored in the wafer shelf 12 of FIG. When the instruction is changed, the lot is inserted into the wafer cassette 13 of the cassette shelf 14 and dispensed from the wafer stocker 10 under the control of the computer system 63. If the payout has been made, the process proceeds to S708, and if the instruction has not been changed, the process waits for the instruction to be changed in S705.

  In S <b> 706, the computer system 63 sequentially determines the batches for which the batch start code is set while determining whether or not the lots to be batch-started have been prepared, from the cassette transfer line (2) 62 b to the wafer stocker 10. input. The input lot is stored in the wafer shelf 12 of FIG. 2 in units of semiconductor wafers by the computer system 63 controlling the wafer stocker 10. Then, the process proceeds to S707.

  In step S <b> 707, when the lots for the number of sheets to be batch-processed are prepared, the computer system 63 controls the wafer stocker 10 to integrate the lots and integrate the lots from the wafer stocker 10. Will be paid out. That is, the lot integration process as described in FIG. 3 is performed under the control of the computer system 63. Then, the process proceeds to S708.

  In S708, under the control of the computer system 63, the lot is transferred to the processing apparatuses such as the wafer processing apparatuses (1) 60a and (2) 60b via the station 61 and the cassette transfer line (1) 62a. Then, the process proceeds to S709.

  In S709, a lot is started by the processing apparatus.

  As described above, by using the transfer system as shown in FIG. 6 and carrying out the processing flow as shown in FIG. 7, in addition to the effects of the wafer stocker described above with reference to FIGS. Such effects can be obtained.

  By storing the hold code set in the wafer stocker, only a flowable wafer cassette exists on the cassette transfer line and in the station. Thereby, the conveyance efficiency and the operating rate of the processing apparatus are increased, and the operating rate of the production line is improved. In addition to improving the operating rate of the production line, the number of wafer cassettes required on the production line can be reduced because there are no stagnant wafer cassettes, and the production cost can be reduced.

  As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.

  For example, although FIG. 6 shows an example in which a single wafer type stocker is used as a spare wafer stocker in addition to the station, a single wafer type stocker can be used at a position corresponding to this station. Further, for example, as another example of the processing flow shown in FIG. 7, the hold code is stored in units of semiconductor wafers by giving a kind to the Hold code, and the cassette code is stored in the cassette shelf. For example, the wafer stocker of FIG. 2 can be used as a combination of semiconductor wafer storage and wafer cassette storage.

  The wafer stocker, semiconductor device transfer system and transfer method of the present invention can be widely applied to a semiconductor device production line using a wafer cassette, and particularly using a production line and a FOUP for handling a semiconductor wafer having a large diameter of φ300 mm. It is useful when applied to production lines.

It is the schematic which shows an example of the function outline | summary in the wafer stocker of one embodiment of this invention. It is a figure which shows an example of the structure in the wafer stocker of one embodiment of this invention. It is explanatory drawing for demonstrating the function of lot division | segmentation and integration in the wafer stocker of one embodiment of this invention. FIG. 4 is an explanatory diagram for explaining a function of lot division different from that in FIG. 3 in the wafer stocker according to the embodiment of the present invention. FIG. 4 is an explanatory diagram for explaining a lot integration function different from FIG. 3 in the wafer stocker according to the embodiment of the present invention. It is a figure which shows an example of the structure in the conveyance system of the semiconductor device of one embodiment of this invention. FIG. 7 is a process flow diagram showing an example of the operation of the transfer system of FIG. 6 in the method of transferring a semiconductor device according to one embodiment of the present invention. It is explanatory drawing for demonstrating the problem in the wafer stocker of the prior art used as the premise of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,10a Wafer stocker 11 Semiconductor wafer 12 Wafer shelf 13 Wafer cassette 14 Cassette shelf 20 Automatic cassette conveyance apparatus 21 Cassette storage part 21a Cassette conveyance robot 21b Entrance / exit of cassette storage part 22 Wafer storage part 22a Wafer conveyance robot 22b Clean air conditioner 22c Wafer Entrance / exit of storage unit 23 Open / close door 30 Batch processing device 60a, 60b Wafer processing device 61 Station 62a, 62b Cassette transfer line 63 Computer system

Claims (5)

A wafer stocker having a cassette storage unit and a wafer storage unit,
The cassette storage unit is
Means for receiving / dispensing the wafer cassette to / from a cassette transport line for transporting a wafer cassette storing a semiconductor wafer;
Means for storing the wafer cassette;
Means for transporting the wafer cassette to the wafer storage unit and means for storing the wafer cassette;
The wafer storage unit
Means for storing the semiconductor wafer in a single wafer type;
A wafer stocker comprising: means for receiving the semiconductor wafer from the wafer cassette and storing the semiconductor wafer; and means for transporting the semiconductor wafer from the storing means to the wafer cassette. The wafer stocker according to claim 1.
The wafer cassette is a FOUP,
The wafer storage unit further comprises means for cleaning the wafer storage unit to class 1 or lower. A semiconductor device transfer system comprising: the wafer stocker according to claim 1; a cassette transfer line that transfers a wafer cassette; and a computer that controls the wafer stocker and the cassette transfer line.
The computer
A function for recognizing a lot on the cassette conveying line;
A function that allows an engineer or the like to set a Hold code for the lot;
Determining whether the hold code is set in the recognized lot, and, if set, a function of controlling the lot to be input from the cassette transfer line to the wafer stocker;
A function of controlling the input lot to be stored in the wafer stocker as a single wafer in units of semiconductor wafers;
It is determined whether or not the Hold code setting is released for a lot stored in a single wafer type in the wafer stocker. If the hold code is released, the lot is transferred from the wafer stocker to the cassette transfer line. A semiconductor device transport system having a function of controlling output. A semiconductor device transfer system comprising: the wafer stocker according to claim 1; a cassette transfer line that transfers a wafer cassette; and a computer that controls the wafer stocker and the cassette transfer line.
The computer
A function for recognizing a lot on the cassette conveying line;
A function that allows an engineer or the like to set a batch start code for the lot;
It is determined whether or not the batch start code is set for the recognized lot, and if it is set, the lot is sequentially input from the cassette transfer line to the wafer stocker until the number of batch starts is complete. With the ability to control
A function of controlling the input lot to be stored in the wafer stocker as a single wafer in units of semiconductor wafers;
A function of integrating the batches stored in the single-wafer type when the number of batch starts is completed and controlling the integrated lots to be output from the wafer stocker to the cassette transfer line; A transport system for a semiconductor device, comprising: A semiconductor device transfer method using the wafer stocker according to claim 1, a cassette transfer line for transferring a wafer cassette, and a computer for controlling the wafer stocker and the cassette transfer line,
Recognizing a lot on the cassette conveying line;
An engineer or the like sets a Hold code for the lot;
It is determined whether or not the Hold code is set for the recognized lot, and if it is set, the lot is input to the wafer stocker from the cassette transfer line, and the lot is inputted to the wafer stocker in units of semiconductor wafers. A step of storing in a single wafer type,
It is determined whether or not the hold code setting is released for a lot stored in a single wafer type in the wafer stocker. If the hold code is released, the lot is transferred from the wafer stocker to the cassette transfer line. And a step of outputting the semiconductor device.

Images