TWM605542U - Wafer cassette stack device and wafer cassette conveying system - Google Patents

Abstract

A wafer cassette temporary storage device, which can be applied to OHT and other transportation systems, includes a rack, a plurality of supporting parts and a transport mechanism. The supporting parts are arranged in the rack and can be used to temporarily store the wafer cassettes. The load-bearing parts are arranged in multiple layers, and the two load-bearing parts can be used as an inbound port and an outbound port, and can cooperate with the truck (crane) to move in and out of the cassette. The transport mechanism is arranged in the rack and can move between the supporting parts to move the wafer cassette in the horizontal and vertical directions, and move the wafer cassette to a predetermined supporting part for storage. As a result, a fully automated transfer of wafer cassettes can be achieved, and no electronic shelves are required.

Description

Wafer cassette temporary storage device and wafer cassette conveying system

This creation relates to a technology for temporary storage and transportation of wafer cassettes, in particular to a wafer cassette temporary storage device and wafer cassette transportation system.

With the development of the semiconductor industry, integrated circuits need to go through many complicated processing procedures, such as etching, grinding, diffusion, and deposition, before they can be produced. At present, whether it is interbay or intrabay, the overhead hoist transport system is mostly used to transport wafers. The overhead crane conveying system can pick up the Front Opening United Pod (FOUP) filled with wafers, and transfer them between the various machines along the hanging rails, so that the wafers enter the various machines for various semiconductors Process.

The above-mentioned wafer cassettes can be placed on electronic shelves and other devices during the transportation process to achieve the purpose of temporary storage, so as to sequentially enter each process machine. However, the existing electronic shelves and other devices temporarily store the wafer cassettes. The quantity is limited, and it consumes a lot of manpower, and it is difficult for the entire area to be used, and it cannot achieve the effect of fully automated transportation.

The technical problem to be solved by this creation is to provide a wafer cassette temporary storage device and a cassette transport system for the shortcomings of the existing technology, which can temporarily store a large number of wafer cassettes, save manpower, and provide the entire area for use , Can achieve fully automated conveying effect.

In order to solve the above technical problems, the present invention provides a wafer cassette temporary storage device, including: a frame body forming an accommodating space in the frame body, the frame body is provided with at least one entrance and exit, the entrance and exit are connected with the accommodating space Multiple bearing portions, the bearing portions are arranged in the accommodating space of the frame, the bearing portions are arranged in multiple layers, and each layer is provided with multiple bearing portions, each of the bearing portions has a bearing body, the The carrying body is provided with an opening which penetrates two opposite sides of the carrying body; and a transport mechanism which is arranged in the accommodating space of the frame and can move between the carrying parts for carrying out The wafer cassette is moved in the horizontal and vertical directions to move the cassette to a predetermined carrying part for storage. The transport mechanism includes a first track, a first moving seat, a first driving device, and a second track , A second moving seat, a second driving device and a tray, the first rail is horizontally fixedly arranged in the accommodating space of the frame, and the first moving seat is movably arranged on the first rail In the above, the first driving device is connected to the first moving base, and can be used to drive the first moving base to move along the horizontal direction on the first rail, and the second rail is fixed on the first moving base so that The second rail is vertically arranged in the accommodating space of the frame, the second rail can move along the horizontal direction along with the first movable seat on the first rail, and the second driving device is connected to The second movable seat can be used to drive the second movable seat to move along the vertical direction on the second rail, the tray is connected to the second movable seat, and the tray can follow the second movable seat in the first The two rails move along the vertical direction, and the tray can pass through the opening of the carrying part to support and place the wafer cassette on the predetermined carrying part.

In order to solve the above technical problems, this creation also provides a wafer cassette conveying system, which is installed in a place with multiple machines. The wafer cassette conveying system is a day car conveying system and includes: a hanging rail, the hanging rail It includes an inter-regional hanging rail unit and a plurality of in-region hanging rail units. The machines are respectively arranged at positions below the hanging rail units in the regions; at least one transport vehicle can lift the rail units between the regions And moving on the hanging rail units in the regions; and at least one of the wafer cassette temporary storage devices, the wafer cassette temporary storage device is arranged in the inter-regional hanging rail unit and at least one of the hanging rail units in the regions In the lower position of one, the wafer cassette can be picked up by the truck and transported between the various machines along the hanging rail, and the wafer cassette can be temporarily stored in the wafer cassette temporary storage device Inside.

The beneficial effect of this creation is that the wafer cassette temporary storage device provided by this creation includes a frame, a plurality of carrying parts and a conveying mechanism, and the carrying parts and the conveying mechanism are arranged in the accommodating space of the frame. The transport mechanism includes a first track, a first moving seat, a first driving device, a second track, a second moving seat, a second driving device, and a tray. The first track is fixed horizontally In the accommodating space of the frame, the first movable seat is movably arranged on the first rail, the first driving device can be used to drive the first movable seat to move along the horizontal direction on the first rail, and the second rail is fixed On the first moving seat, the second rail is vertically arranged in the accommodating space of the frame. The second rail can move along the horizontal direction with the first moving seat on the first rail, and the second driving device It can be used to drive the second moving base to move along the vertical direction on the second rail. The tray is connected to the second moving base. The tray can move along the vertical direction with the second moving base on the second rail, and the tray can pass The opening of the carrying part is used for supporting and placing the wafer cassette on the predetermined carrying part. This creation has multiple carrying parts, and can use the transport mechanism to move the wafer cassette in the horizontal and vertical directions, so that the wafer cassette can be moved to a predetermined carrying part for storage, and a large number of wafer cassettes can be temporarily stored. It saves manpower and can be used by the entire area to achieve a fully automated conveying effect.

In order to have a better understanding of the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation. However, the provided drawings are only for reference and explanation, not to limit this creation.

The following are specific specific examples to illustrate the related implementations disclosed in this creation, and those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings in this creation are merely schematic illustrations, and are not depicted in actual size, and are stated in advance. The following embodiments will further describe the related technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

[First Embodiment]

Please refer to Figures 1 to 3, this creation provides a wafer cassette temporary storage device, which can be applied to the storage of wafer cassettes such as front opening wafer cassettes (FOUP). The wafer cassette temporary storage device includes a frame 1 , A plurality of carrying parts 2 and a conveying mechanism 3 (as shown in Figures 4 to 6).

The shape and structure of the frame 1 are not limited and can be changed according to needs. In this embodiment, the frame 1 is a square. The frame body 1 is a hollow body, and an accommodating space 11 is formed in the frame body 1 for accommodating the carrying portion 2, the conveying mechanism 3, the wafer cassette 100, and the like. The frame 1 is provided with at least one entrance and exit. In this embodiment, the frame 1 is provided with a first entrance 12 and a second entrance 13, and the first entrance 12 and the second entrance 13 communicate with the accommodating space 11. The first port 12 and the second port 13 can be used for input and output of the wafer cassette 100.

The first port 12 and the second port 13 may be located on the same side or different sides of the frame 1. In this embodiment, the first port 12 and the second port 13 are located on the same side (front side) of the frame 1. In addition, a first safety grating 14 and a second safety grating 15 can also be provided on the first entrance 12 and the second entrance 13 to detect the entry and exit of the wafer cassette 100.

The carrying parts 2 are disposed in the accommodating space 11 of the frame 1 and can be used to temporarily store the wafer cassette 100. The supporting portions 2 are substantially square plates, but not limited to them. Each of the supporting portions 2 has a supporting body 21. The supporting body 21 is provided with an opening 22 that penetrates two opposite sides of the supporting body 21. The tray 37 of the transport mechanism 3 can pass through, so as to support the wafer cassette 100 on the carrying part 2 or place the wafer cassette 100 on the carrying part 2 through the opening 22.

The load-bearing parts 2 are arranged in multiple layers. The load-bearing parts 2 can be arranged in, for example, two, three, four, five, or six layers. The number of layers of the load-bearing parts 2 is not limited, and can be arranged as needed. And change it. Among the carrying parts 2, the carrying parts 2 corresponding to the entrances and exits (the first entrance 12 and the second entrance 13) can be used as an inbound port and an outbound port for moving in and out of the wafer cassette 100 in cooperation with cranes and other devices.

In this embodiment, the bearing portions 2 are arranged in multiple layers, and each layer is provided with two bearing portions 2, but it is not limited. For example, each layer can also be provided with multiple bearing portions 2 such as three, four or five. . The moving spaces 16 and 17 are reserved between one side (rear side) of the carrying parts 2 and the two adjacent carrying parts 2 on each layer, respectively, for the transport mechanism 3 to move, so that the transport mechanism 3 can be installed in the machine body 1. It can move freely inside to facilitate the handling of the wafer cassette 100.

The transport mechanism 3 is arranged in the accommodating space 11 of the frame 1, and can move between the supporting parts 2 to move the wafer cassette 100 in the horizontal and vertical directions, and move the wafer cassette 100 to The predetermined carrying part 2 is stored. The transport mechanism 3 includes a first rail 31, a first moving base 32, a first driving device 33, a second rail 34, a second moving base 35, a second driving device 36 and a tray 37.

The first rail 31 is horizontally fixed and arranged in the accommodating space 11 of the frame 1, the fixed arrangement of the first rail 31 can be relatively stable, and the first rail 31 can be close to the bottom of the frame 1, so that The overall center of gravity is lowered, so that the transport mechanism 3 is stably installed in the accommodating space 11 of the frame 1. The first moving base 32 is movably arranged on the first rail 31, and the first driving device 33 is connected to the first moving base 32 and can be used to drive the first moving base 32 along the horizontal direction on the first rail 31. Move in direction. In this embodiment, the first driving device 33 is a motor screw, which includes a first motor 331 that can be fixed to one end of the first rail 31, and the first motor 331 is connected to a first motor 331. Screw 332, and a first sliding table 333 is screwed on the first screw 332, the first moving seat 32 is arranged on the first sliding table 333, and the first motor 331 can drive the first screw 332 to rotate for pushing the A sliding table 333 drives the first moving seat 32 to move along the horizontal direction on the first rail 31.

The second rail 34 is fixed on the first moving base 32, that is, the portion of the second rail 34 near the lower end can be fixed on the first moving base 32, so that the second rail 34 and the first moving base 32 are connected to each other, In addition, the second rail 34 is vertically arranged in the accommodating space 11 of the frame 1, and the second rail 34 can move along the horizontal direction on the first rail 31 along with the first movable seat 32. The second moving base 35 is movably arranged on the second rail 34, and the second driving device 36 is connected to the second moving base 35 and can be used to drive the second moving base 35 along the vertical direction on the second rail 34 Move in direction. In this embodiment, the second driving device 36 is a motor screw, which includes a second motor 361, the second motor 361 can be fixed to one end (lower end) of the second rail 34, the second motor 361 is connected to A second screw 362, and a second sliding table 363 is screwed on the second screw 362. The second moving seat 35 is arranged on the second sliding table 363. The second motor 361 can drive the second screw 362 to rotate. The second sliding table 363 is pushed to drive the second moving base 35 to move along the vertical direction on the second rail 34.

Preferably, the first movable base 32 has a horizontal portion 321 and a vertical portion 322. One end (rear end) of the horizontal portion 321 and one end (lower end) of the vertical portion 322 are connected to each other, and the horizontal portion 321 and the vertical portion 322 are connected to each other. Perpendicular to each other. The horizontal portion 321 of the first moving seat 32 is arranged on the first sliding table 333. Preferably, the horizontal portion 321 of the first moving seat 32 is arranged on the top side of the first sliding table 333, so that the first moving seat 32 is movably arranged on the first rail 31. The second rail 34 is disposed on the vertical portion 322 of the first moving base 32, so that the second rail 34 is disposed on the first moving base 32, and the first rail 31 and the second rail 34 can pass through the first moving base 32 Stable connection, and can maintain better horizontality and verticality.

The tray 37 is connected to the second moving base 35, the tray 37 can be arranged horizontally, and the tray 37 can move along the vertical direction on the second rail 34 with the second moving base 35. Therefore, the tray 37 of the transport mechanism 3 can be driven to move in the horizontal direction and the vertical direction.

Operators can move in and out of the wafer cassette 100 through the entrance (the first entrance 12 and the second entrance 13). When the wafer cassette 100 needs to be transferred, the tray 37 can be moved below the carrier 2 and then controlled The tray 37 rises so that the tray 37 can pass through the opening 22 to support the wafer cassette 100, and then move the wafer cassette 100 above the predetermined carrying portion 2, and then control the tray 37 to descend to make the wafer cassette 100 The round box 100 is placed on a predetermined carrying part 2, and the tray 37 can be moved below the carrying part 2 through the opening 22 to continue the next transport operation.

[Second Embodiment]

Please refer to FIG. 7, this creation also provides a wafer cassette conveying system, which is set in a place with multiple machines (process equipment) 200. The wafer cassette conveying system is a one-day cart conveying system, including a hanging rail 300, At least one carrier 400 and at least one wafer cassette temporary storage device 500. The hanging rail 300 includes an interbay hanging rail unit 301 and a plurality of intrabay hanging rail units 302. In this embodiment, A plurality of transport vehicles 400 are included, and the transport vehicles 400 can move on the inter-area hanging rail unit 301 and the intra-area hanging rail unit 302. The machines 200 are respectively arranged at positions below the hanging rail unit 302 in the area, so that the wafer cassettes can be picked up by the truck 400 and transported between the various machines 200 along the hanging rail 300 so that the wafers can enter each The machine 200 performs various semiconductor manufacturing processes. The wafer cassette temporary storage device 500 may be provided with one or more, and the wafer cassette temporary storage device 500 may be provided at a position below at least one of the hanging rail unit 301 between the regions and the hanging rail unit 302 in the regions, In order to use the truck 400 to pick up and move the wafer cassette into and out of the wafer cassette temporary storage device 500.

[Beneficial effects of the embodiment]

The beneficial effect of this creation is that the wafer cassette temporary storage device provided by this creation includes a frame, a plurality of carrying parts and a conveying mechanism, and the carrying parts and the conveying mechanism are arranged in the accommodating space of the frame. The transport mechanism includes a first track, a first moving seat, a first driving device, a second track, a second moving seat, a second driving device, and a tray. The first track is fixed horizontally In the accommodating space of the frame, the first movable seat is movably arranged on the first rail, the first driving device can be used to drive the first movable seat to move along the horizontal direction on the first rail, and the second rail is fixed On the first moving seat, the second rail is vertically arranged in the accommodating space of the frame. The second rail can move along the horizontal direction with the first moving seat on the first rail, and the second driving device It can be used to drive the second moving base to move along the vertical direction on the second rail. The tray is connected to the second moving base. The tray can move along the vertical direction with the second moving base on the second rail, and the tray can pass The opening of the carrying part is used for supporting and placing the wafer cassette on the predetermined carrying part. This creation has multiple carrying parts, and can use the transport mechanism to move the wafer cassette in the horizontal and vertical directions, so that the wafer cassette can be moved to a predetermined carrying part for storage, and a large number of wafer cassettes can be temporarily stored. It saves manpower and can be used by the entire area to achieve a fully automated conveying effect.

Furthermore, the first track and the second track of this creation can be firmly connected by the first movable base, and maintain a better level and verticality, which can make the overall structure more stable and the movement of the wafer cassette more stable And accurate.

The content disclosed above is only a preferred and feasible embodiment of the creation, and does not limit the scope of the patent application for this creation. Therefore, all equivalent technical changes made using the creation specification and schematic content are included in the application for this creation. Within the scope of the patent.

1: frame 11: Housing space 12: The first entrance 13: The second entrance 14: The first safety grating 15: The second safety grating 16: mobile space 17: mobile space 2: Bearing part 21: Carrying body 22: opening 3: handling mechanism 31: The first track 32: The first mobile seat 321: Horizontal 322: Vertical 33: The first driving device 331: First Motor 332: first screw 333: First slide 34: second track 35: second mobile seat 36: second drive device 361: second motor 362: second screw 363: second slide 37: Pallet 100: Wafer box 200: machine 300: Hanging rail 301: Inter-regional hanging rail unit 302: Hanging rail unit in the area 400: truck 500: Wafer cassette temporary storage device

Figure 1 is a perspective view of a temporary storage device for a creative wafer cassette.

Figure 2 is a perspective view of the internal structure of the creative wafer cassette temporary storage device.

Figure 3 is a side view of the internal structure of the creative wafer cassette temporary storage device.

Figure 4 is a three-dimensional view of the creative transport mechanism.

Figure 5 is a front view of the creative transport mechanism.

Figure 6 is a side view of the creative transport mechanism.

Figure 7 is a schematic diagram of the creative wafer cassette conveying system.

1: frame

11: Housing space

16: mobile space

17: mobile space

2: Bearing part

21: Carrying body

22: opening

3: handling mechanism

31: The first track

32: The first mobile seat

33: The first driving device

34: second track

35: second mobile seat

36: second drive device

100: Wafer box

Claims (9)

A wafer cassette temporary storage device, including: A frame body, an accommodating space is formed in the frame body, the frame body is provided with at least one entrance and exit, and the entrance and exit are communicated with the accommodating space; A plurality of bearing parts, the bearing parts are arranged in the accommodating space of the frame, the bearing parts are arranged in multiple layers, and each layer is provided with multiple bearing parts, each of the bearing parts has a bearing body, and the bearing body An opening is provided on the upper side, and the opening penetrates two opposite sides of the carrying body; and A conveying mechanism, which is arranged in the accommodating space of the frame and can move between the supporting parts, for moving the wafer cassette in the horizontal and vertical directions, and moving the wafer cassette To be stored in a predetermined carrying part, the transport mechanism includes a first track, a first moving seat, a first driving device, a second track, a second moving seat, a second driving device, and a tray. A track is horizontally fixedly arranged in the accommodating space of the frame, the first moving base is movably arranged on the first track, and the first driving device is connected to the first moving base and can be used Drive the first moving base to move along the horizontal direction on the first rail, and the second rail is fixed on the first moving base, so that the second rail is vertically arranged in the accommodating space of the frame The second track can move along the horizontal direction with the first moving seat on the first track, and the second driving device is connected to the second moving seat and can be used to drive the second moving seat on the first track. The tray moves along the vertical direction on the two rails, the tray is connected to the second moving base, the tray can move in the vertical direction along with the second moving base on the second rail, and the tray can pass through the supporting part The opening is used for supporting and placing the wafer cassette on the predetermined carrying part. The wafer cassette temporary storage device according to claim 1, wherein the first track is close to the bottom of the rack. The wafer cassette temporary storage device according to claim 1, wherein the first moving base has a horizontal portion and a vertical portion, the horizontal portion and the vertical portion are connected to each other, and the horizontal portion and the vertical portion are perpendicular to each other, The horizontal part of the first movable seat is movably arranged on the first rail, and the second rail is arranged on the vertical part of the first movable seat. The wafer cassette temporary storage device according to claim 3, wherein the first driving device includes a first motor, the first motor is connected to a first screw, and a first sliding table is screwed on the first screw, The horizontal portion of the first movable seat is arranged on the first sliding table, and the first motor can drive the first screw to rotate, so as to push the first sliding table to drive the first movable seat along the first track Move in the horizontal direction. The wafer cassette temporary storage device according to claim 4, wherein the horizontal portion of the first movable seat is arranged on the top side of the first sliding table. The wafer cassette temporary storage device according to claim 4, wherein the second driving device includes a second motor, the second motor is connected to a second screw, and a second sliding table is screwed on the second screw, The second moving seat is disposed on the second sliding table, and the second motor can drive the second screw to rotate to push the second sliding table to drive the second moving seat along the vertical direction on the second track mobile. The wafer cassette temporary storage device according to claim 1, wherein the entrance includes a first entrance and a second entrance, and the first entrance and the second entrance are located on the same side or different sides of the rack. The wafer cassette temporary storage device according to claim 1, wherein the first rail is close to the bottom of the frame, the first moving base has a horizontal portion and a vertical portion, and the horizontal portion and the vertical portion are connected to each other, And the horizontal part and the vertical part are perpendicular to each other, the horizontal part of the first movable base is movably arranged on the first track, and the second track is arranged on the vertical part of the first movable base. A wafer cassette conveying system is arranged in a place with multiple machines. The wafer cassette conveying system is a one-day cart conveying system and includes: A hanging rail, the hanging rail includes an inter-regional hanging rail unit and a plurality of in-region hanging rail units, the machines are respectively arranged at positions below the hanging rail units in the regions; At least one truck, which can move on the hanging rail unit between the areas and the hanging rail units in the areas; and At least one wafer cassette temporary storage device according to any one of Claims 1 to 8, the wafer cassette temporary storage device is provided in at least one of the hanging rail unit between the areas and the hanging rail units in the areas In the lower position, the wafer cassette can be picked up by the truck and transported between the various machines along the hanging rail, and the wafer cassette can be temporarily stored in the wafer cassette temporary storage device.

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