TWM643077U - Compact warehouse device for rapid original position returning - Google Patents

Abstract

A small storage device that can quickly return to its original position is set on one side of the process equipment and includes a frame, a horizontal transfer mechanism, a lifting transfer mechanism, a carrier and a mobile positioning mechanism. The frame body includes a plurality of storage positions, which can be used to store object containers. The frame body is provided with a horizontal transport channel and a vertical transport channel, so that the carrier can move in the horizontal transport channel and the vertical transport channel. The carrier can be driven by the horizontal transfer mechanism and the lifting transfer mechanism to move along the horizontal direction and the lifting direction, so as to facilitate the transportation of the object container. The mobile positioning mechanism includes two guides, the two guides are fixed on the ground, and the two guides are located on both sides of the frame body. During maintenance, the mobile positioning mechanism on both sides can guide the frame body, so that the small storage device can be placed on the ground. After maintenance, it can quickly return to the original position to shorten the working time.

Description

Small storage device that can quickly return to its original position

This creation relates to a small storage device, especially a small storage device that is installed between the transfer device (such as a crane) and the process equipment, so that the object container can be exchanged between the transfer device and the process equipment and can quickly return to the original position. device.

With the development of the semiconductor industry, integrated circuits need to go through multiple complicated processing procedures, such as etching, grinding, diffusion and deposition, before they can be produced. At present, no matter in the interbay or intrabay, the overhead hoist transport system is mostly used to transport wafers, and a storage device is usually required between the overhead hoist transport system and the process equipment. Used to temporarily store wafer boxes. However, the existing storage device is installed on one side of the process equipment. When the process equipment needs to be repaired, the storage device must be removed first. After the process equipment is repaired, the storage device will be returned to its original position. However, the storage device cannot be quickly returned to its original position. , It must take time to correct, causing inconvenience to maintenance personnel.

The technical problem to be solved in this creation is to provide a small storage device that can quickly return to its original position in view of the shortcomings of the existing technology, so that the small storage device can quickly return to its original position after maintenance, so as to shorten the working time.

In order to solve the above technical problems, this creation provides a small storage device that can quickly return to its original position, which is installed on one side of the process equipment. The small storage device that can quickly return to its original position includes: a frame, which contains multiple storage positions, which can be used to store object containers, these storage positions are arranged in upper and lower layers, and each layer has a plurality of storage positions, and the plurality of storage positions in each layer are arranged along a horizontal direction to form a The storage positions are arranged in multiple rows along a lifting direction, and the frame body is provided with at least one horizontal transport channel and at least one vertical transport channel, the horizontal transport channel extends along the horizontal direction, and the vertical transport channel extends along the Extending along the lifting direction, the straight conveying channel communicates with the horizontal conveying channel; a horizontal transfer mechanism, which is arranged on one side of the frame body; a lifting and transferring mechanism, the lifting and transferring mechanism Set on the horizontal transfer mechanism, the horizontal transfer mechanism can drive the lifting transfer mechanism to move along the horizontal direction, the lifting transfer mechanism is arranged on one side of the frame body; a carrier, the carrier is set On the lifting and transferring mechanism, the lifting and transferring mechanism can drive the carrier to move along the lifting direction for picking and placing the object container; and a moving positioning mechanism, which includes two guides, the Two guides are fixed on the ground, and the two guides are located on both sides of the frame, and the two guides can be used to guide the frame, so that the small storage device that can quickly return to its original position can move away from and move to the location in the direction close to the process equipment.

The beneficial effect of this creation is that the small storage device that can quickly return to its original position provided by this creation includes a frame, a horizontal transfer mechanism, an elevating transfer mechanism, a carrier and a mobile positioning mechanism. The frame body includes a plurality of storage positions, which can be used to store object containers. The frame body is provided with at least one horizontal transport channel and at least one vertical transport channel. The vertical transport channel communicates with the horizontal transport channel. The lifting and transferring mechanism is set on the horizontal transferring mechanism, which can drive the lifting and transferring mechanism to move along the horizontal direction, and the carrier is arranged on the lifting and transferring mechanism, and the lifting and transferring mechanism can drive the carrier to move along the lifting direction Move to pick and place object containers. The mobile positioning mechanism includes two guides, the two guides are fixed on the ground, and the two guides are located on both sides of the frame. The two guides can be used to guide the frame, so that the small storage device can be moved away from and approached. The direction of the process equipment is moved to the positioning, and the mobile positioning mechanism on both sides can be used to guide the frame during maintenance, so that the small storage device can quickly return to its original position after maintenance to shorten the working time.

In order to further understand the characteristics and technical content of this creation, please refer to the following detailed description and drawings about this creation. However, the provided drawings are only for reference and explanation, and are not used to limit this creation.

The following is a description of the implementation methods disclosed in this creation through specific specific examples, and those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the idea of this creation. In addition, the drawings of this creation are only for simple illustration, not according to the actual size of the depiction, prior statement. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[Example]

Please refer to Figures 1 to 3, this invention provides a small storage device that can quickly return to its original position, which is installed on one side of the process equipment 200, so that the small storage device can be installed on the transfer device (such as a crane) and the process equipment 200 , so that the object container 100 can be exchanged between the transfer device and the process equipment 200 . The small storage device that can quickly return to its original position includes a frame body 1 , a horizontal transfer mechanism 2 , an elevating transfer mechanism 3 , a carrier 4 and a moving positioning mechanism 5 .

The frame body 1 is a long and narrow body. The frame body 1 includes a plurality of storage positions 11 for storing object containers 100. The object containers 100 can be wafer cassettes or photomask cassettes, but are not limited thereto. These storage positions 11 are arranged in upper and lower layers, and each layer has a plurality of storage positions 11, and the plurality of storage positions 11 in each layer are arranged in a row along a horizontal direction A, that is, the plurality of storage positions 11 in each layer at the same level. The storage positions 11 are arranged in multiple rows along a lifting direction B, the lifting direction B is perpendicular to the horizontal direction A, and the lifting direction B is an upright direction perpendicular to the horizontal direction A.

This frame body 1 is provided with at least one horizontal conveying passage 12 and at least one straight conveying passage 13, the horizontal conveying passage 12 can be provided with one, and the straight conveying passage 13 can also be provided with one, but the transverse conveying passage 12 and the straight conveying passage 13 The quantity is not limited. The transverse conveying channel 12 extends along the horizontal direction A, the straight conveying channel 13 extends along the lifting direction B, and the straight conveying channel 13 communicates with the transverse conveying channel 12 . Preferably, the transverse conveying passage 12 is located below the storage positions 11, the lower end of the straight conveying passage 13 communicates with the transverse conveying passage 12, and the transverse conveying passage 12 and the straight conveying passage 13 are one without storage positions. 11, the carrier 4 can move in the horizontal transport channel 12 and the vertical transport channel 13, so that the carrier 4 will not interfere with the storage positions 11. Preferably, the upper end of the straight transport channel 13 is open, and the side of the straight transport channel 13 facing the carrier 4 is open, so that the carrier 4 enters and exits the straight transport channel 13 .

The horizontal transfer mechanism 2 is an elongated body, the horizontal transfer mechanism 2 can extend a predetermined length along the horizontal direction A, the horizontal transfer mechanism 2 is arranged on one side of the frame body 1, and the horizontal transfer mechanism 2 is fixed On frame body 1. The horizontal transfer mechanism 2 can be an electric slide table with high precision and good assembly rigidity, but it is not limited. The horizontal transfer mechanism 2 can also be other existing transmission mechanisms, such as a screw group driven by a motor, a belt group, gear group or chain group and so on. The horizontal transfer mechanism 2 is arranged at intervals on one side of the storage positions 11 , and the storage positions 11 are all located within the transfer stroke of the horizontal transfer mechanism 2 .

The lift transfer mechanism 3 is disposed on the horizontal transfer mechanism 2 so as to drive the lift transfer mechanism 3 and the carrier 4 to move along the horizontal direction A by the horizontal transfer mechanism 2 . The lift transfer mechanism 3 is an elongated body, the lift transfer mechanism 3 is erected, the lift transfer mechanism 3 can extend a predetermined length (height) along the lift direction B, and the lift transfer mechanism 3 is arranged on the frame One side of the body 1, the lifting and transferring mechanism 3 can be used to drive the carrier 4 to move along the lifting direction B. The lifting and transferring mechanism 3 can be an electric slide table with high precision and good assembly rigidity, but it is not limited. The lifting and transferring mechanism 3 can also be other existing transmission mechanisms, such as screw groups and belts driven by motors. group, gear group or chain group and so on. The elevating and transferring mechanism 3 is arranged at intervals on one side of the storage positions 11 , and the storage positions 11 are all located within the transfer stroke of the elevating and transferring mechanism 3 .

The carrier 4 can be a carrier device such as a tooth fork (Fork), and the carrier 4 is arranged on the lifting and transferring mechanism 3, and the lifting and transferring mechanism 3 can drive the carrier 4 to move along the lifting direction B for picking and placing. Item container 100 . The carrier 4 can use the horizontal transfer mechanism 2 and the lifting transfer mechanism 3 to drive the horizontal transfer and the lifting transfer respectively, so that when the carrier 4 carries the object container 100, it can use the horizontal transfer mechanism 2 and the lifting transfer mechanism 3. Respectively drive the object container 100 for horizontal transfer and vertical transfer, so that the object container 100 can be transferred to the appropriate storage position 11, so that the object container 100 can be exchanged between the transfer device (such as a crane) and the process equipment 200.

In this embodiment, the storage locations 11 may further include a plurality of movable storage locations 11a, the movable storage locations 11a are arranged in at least one row along the lifting direction B, and the number of the movable storage locations 11a may be two , three, four or five, etc., these movable storage positions 11a are aligned up and down and arranged in at least one row. Preferably, the movable storage positions 11a are arranged near the middle of the frame body 1 . When the movable storage positions 11a are removed, a straight conveying channel 13 can be formed, which can be used to accommodate the carrier 4 for transporting the object containers 100 in the storage positions 11 on both sides of the straight transporting channel 13 .

These movable storage positions 11a can be connected to a moving mechanism 6, and this moving mechanism 6 can drive the movable storage positions 11a of the whole row to move along the horizontal direction A, in order to change the position of the straight transport channel 13 (as shown in Figure 1 and Figure 4 shown), so that the straight conveying channel 13 can be freely switched in response to the use of the storage positions 11. When it is necessary to pick and place the object container 100 in a certain row of storage positions 11, the moving mechanism 6 can be used to drive the movable storage positions of the entire row The movement of 11 a moves the straight conveying channel 13 to one side of the row of storage positions 11 , so that the carrier 4 picks and places the object container 100 .

The moving mechanism 6 is an elongated body, and the moving mechanism 6 extends along the horizontal direction A for a predetermined length. Moving in the direction A, the movable storage positions 11 a can be removed to allow space to form a straight transport channel 13 . The moving mechanism 6 can be an electric slide table with high precision and good assembling rigidity, but it is not limited. The moving mechanism 6 can also be other existing transmission mechanisms, such as screw sets, belt sets, and gear sets that can be driven by motors. Or chain group and so on. Preferably, these movable storage positions 11a are fixed on a link 61, and these movable storage positions 11a can be set on one side of the link 61, and the link 61 extends along the lifting direction B, and can be used to set appropriate There are a number of movable storage positions 11a, and the movable storage positions 11a are respectively aligned with the storage positions 11 in the horizontal direction A. The link 61 is connected to the moving mechanism 6 , and the moving mechanism 6 can drive the movable storage positions 11 a to move stably through the link 61 to switch the position of the straight transport channel 13 . As a result, there is no need to arrange a plurality of straight conveying passages 13, and the size of the mechanism can be reduced, especially applicable to narrow and long storage devices with limited space.

The mobile positioning mechanism 5 includes two guides 51, and the two guides 51 are fixed on the ground. The two guides 51 can be guide devices such as slide rails (such as linear slide rails), and the two guides 51 are positioned on the frame body. 1, the frame body 1 can be movably fitted on the two guides 51. Specifically, the two sides of the bottom of the frame body 1 can be slid or rolled on the two guide pieces 51, for example, a plurality of movable parts 52 can also be provided at the bottom sides of the frame body 1, and these movable parts 52 can be sliders or rollers, etc. These movable parts 52 are in movable contact with the two guide parts 51 respectively, and are used to guide the frame body 1 and even the entire small storage device to move linearly, so that the small storage device can move away from and approach The orientation of the process equipment 200 is moved to positioning.

The frame body 1 (small storage device) can move between a first position C and a second position D (as shown in FIG. 2 ), the first position C is close to the process equipment 200, and the second position D is away from the process For the equipment 200 , the first position C is located between the second position D and the process equipment 200 , so that the small storage device can move away from and close to the process equipment 200 . In this embodiment, the two sides (left and right) of the frame 1 are parallel to each other, and the two guides 51 are also parallel to each other. The two guides 51 can guide the frame 1 to move back and forth stably, so that the small storage The device can be moved to position in directions away from and close to the process tool 200 . The two guides 51 of the mobile positioning mechanism 5 can also be provided with a limiting element 53 respectively. When the frame body 1 (small storage device) moves to the first position C and the small storage device is close to the process equipment 200, The frame body 1 or the movable part 52 can be limited by contacting the limiting element 53, so that the frame body 1 (small storage device) can be positioned more accurately. The limiting element 53 can also be a cushioning element (buffering material), so as to provide a cushioning effect, so as to prevent the small storage device from colliding with the processing equipment 200 excessively.

When the process equipment 200 needs to be maintained, the small storage device can be guided by the mobile positioning mechanism 5 to move the small storage device in a direction away from the process equipment 200, so that the small storage device can be moved to the second position D for maintenance. For the maintenance of the process equipment 200, after the maintenance of the process equipment 200 is completed, the small storage device is returned to the original position, so that the small storage device is moved to the first position C, and the small storage device that has been returned to the original position can also be properly locked. As for the fixed position, since the locking structure of the small storage device is prior art, it will not be described in detail.

In addition, please refer to FIG. 5. In this embodiment, the mobile positioning mechanism 5 can also be provided in multiple groups, and respectively correspond to a plurality of process equipment 200, so that the small storage device can be selectively connected to different process For the equipment 200, when a certain process equipment 200 needs maintenance, the small storage device of the process equipment 200 can be removed, and the small storage device can be moved to another process equipment 200, so that the production can be continued without interruption and the production capacity can be increased.

[Advantageous Effects of Embodiment]

The beneficial effect of this creation is that the small storage device that can quickly return to its original position provided by this creation includes a frame, a horizontal transfer mechanism, an elevating transfer mechanism, a carrier and a mobile positioning mechanism. The frame body includes a plurality of storage positions, which can be used to store object containers. The frame body is provided with at least one horizontal transport channel and at least one vertical transport channel. The vertical transport channel communicates with the horizontal transport channel. The lifting and transferring mechanism is set on the horizontal transferring mechanism, which can drive the lifting and transferring mechanism to move along the horizontal direction, and the carrier is arranged on the lifting and transferring mechanism, and the lifting and transferring mechanism can drive the carrier to move along the lifting direction Move to pick and place object containers. The mobile positioning mechanism includes two guides, the two guides are fixed on the ground, and the two guides are located on both sides of the frame. The two guides can be used to guide the frame, so that the small storage device can be moved away from and approached. The direction of the process equipment is moved to the positioning, and the mobile positioning mechanism on both sides can be used to guide the frame during maintenance, so that the small storage device can quickly return to its original position after maintenance to shorten the working time.

The content disclosed above is only the preferred feasible embodiment of this creation, and does not limit the scope of patent application for this creation. Therefore, all equivalent technical changes made by using the instructions and drawings of this creation are included in the application of this creation. within the scope of the patent.

1: frame body 11: Storage 11a: Active storage 12: Horizontal transport channel 13: Straight transport channel 2: Horizontal transfer mechanism 3: Lifting and transferring mechanism 4: Carrier 5: Mobile positioning mechanism 51: guide 52: Movable parts 53: Limiting element 6: Mobile mechanism 61: Linkage A: Horizontal direction B: Lifting direction C: first position D: second position 100: object container 200: Process equipment

Fig. 1 is a schematic front view of a small storage device that can quickly return to its original position in the embodiment of the present invention.

Fig. 2 is a schematic side view of a small storage device that can quickly return to its original position according to the embodiment of the present invention.

Fig. 3 is a schematic top view of a small storage device that can quickly return to its original position according to the embodiment of the present invention.

Fig. 4 is a schematic diagram of the use state of the small storage device capable of quickly returning to the original position in the embodiment of the present invention.

FIG. 5 is a schematic top view of a small storage device that can quickly return to its original position according to another embodiment of the present invention.

1: frame body

11: Storage

12: Horizontal transport channel

2: Horizontal transfer mechanism

3: Lifting and transferring mechanism

4: Carrier

5: Mobile positioning mechanism

51: guide

52: Movable parts

53: Limiting element

6: Mobile mechanism

61: Linkage

C: first position

D: second position

100: object container

200: Process equipment

Claims (10)

A small storage device that can quickly return to its original position is installed on one side of the process equipment. The small storage device that can quickly return to its original position includes: A rack body, the rack body includes a plurality of storage positions, which can be used to store object containers, and these storage positions are arranged in upper and lower layers, and each layer has a plurality of said storage positions, and each layer has a plurality of said storage positions The storage positions are arranged in a row along a horizontal direction, and the storage positions are arranged in multiple rows along a lifting direction. The frame body is provided with at least one horizontal transport channel and at least one vertical transport channel. direction, the straight conveying passage extends along the lifting direction, and the straight conveying passage communicates with the transverse conveying passage; a horizontal transfer mechanism, the horizontal transfer mechanism is arranged on one side of the frame; An elevating and transferring mechanism, the elevating and transferring mechanism is arranged on the horizontal transferring mechanism, and the horizontal transferring mechanism can drive the elevating and transferring mechanism to move along the horizontal direction, and the elevating and transferring mechanism is arranged on the frame side; a carrier, the carrier is arranged on the lifting and transferring mechanism, and the lifting and transferring mechanism can drive the carrier to move along the lifting direction for picking and placing the object container; and A mobile positioning mechanism, the mobile positioning mechanism includes two guides, the two guides are fixed on the ground, the two guides are located on both sides of the frame body, and the two guides can be used to guide the frame body, so that the small storage device that can quickly return to its original position can be moved to a position in a direction away from and close to the process equipment. The small storage device that can quickly return to its original position as described in Claim 1, wherein a plurality of movable parts are arranged on both sides of the bottom of the frame body, and the movable parts are respectively in movable contact with the two guide parts. The small storage device that can quickly return to its original position as described in claim 2, wherein each of the two guides is provided with a limit element, and when the small storage device that can quickly return to its original position is close to the process equipment, the frame body Or the movable part can interfere with the limiting element to limit the position. The small storage device that can quickly return to the original position according to claim 1, wherein the rack body can move between a first position and a second position, the first position is close to the process equipment, and the second position is far away from the The process equipment, the first position is located between the second position and the process equipment, the two sides of the frame are parallel to each other, and the two guides are parallel to each other. The small storage device that can quickly return to its original position as described in claim 1, wherein the storage positions include a plurality of movable storage positions, and the movable storage positions are arranged in at least one row along the lifting direction, and the movable storage positions Connected to a moving mechanism, the moving mechanism can drive the movable storage positions to move along the horizontal direction, so as to change the position of the straight conveying channel. The small storage device that can quickly return to its original position as described in claim 5, wherein the movable storage positions are arranged near the middle of the frame. The small storage device that can quickly return to the original position as described in claim 5, wherein the movable storage positions are fixed on a link, and the link is connected to the moving mechanism, and the moving mechanism can drive the moving parts through the link The movable storage positions move, and the movable storage positions are arranged on one side of the linkage, and the linkage extends along the lifting direction. The small storage device that can quickly return to the original position as described in Claim 1, wherein the horizontal transfer mechanism and the lifting transfer mechanism are electric slide tables. The small storage device that can quickly return to its original position as described in claim 1, wherein the upper end of the straight conveying channel is open, the lower end of the straight conveying channel communicates with the transverse conveying channel, and the straight conveying channel faces One side of the bearing member is in the shape of an opening. The small storage device that can quickly return to its original position as described in claim 1, wherein the mobile positioning mechanism is provided with multiple groups, and respectively corresponds to a plurality of said process equipment, so that the small storage device that can quickly return to its original position It can be selectively connected to different process equipments.

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