CN102556664A - Traveling vehicle system - Google Patents
Traveling vehicle system Download PDFInfo
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- CN102556664A CN102556664A CN2012100480743A CN201210048074A CN102556664A CN 102556664 A CN102556664 A CN 102556664A CN 2012100480743 A CN2012100480743 A CN 2012100480743A CN 201210048074 A CN201210048074 A CN 201210048074A CN 102556664 A CN102556664 A CN 102556664A
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- substrate box
- chassis
- substrate
- aforesaid substrate
- track
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Abstract
The present invention provides a traveling car system. This traveling car system includes a substrate treatment apparatus which houses the substrate or gives a prescribed processing to the substrate, an unmanned traveling carriage (AG) which has a going up and down portion (10) making a substrate cassette (1) go up and down in a state that the substrate is held in the substrate cassette (1) and a horizontal movement portion (8a, 8b) making the substrate cassette (1) move horizontally for the substrate treatment apparatus, and conveys the substrate cassette (1) along a track (L) which is provided for the substrate treatment apparatus, and a substrate cassette housing portion (BF1) which holds and houses the substrate cassette (1) above the track.
Description
The application is that denomination of invention is " traveling trolley system ", the applying date to be that on March 29th, 2010 and application number are dividing an application of 20101045538.3 application for a patent for invention.
Technical field
The present invention relates to carry the traveling trolley system put the substrate box of accommodating substrate and to advance in the track cocycle of ring-type.The application is willing to 2009-081661 number based on the spy who filed an application in Japan on March 30th, 2009 and the spy that filed an application in Japan on March 30th, 2009 is willing to advocate preceence 2009-081662 number, quotes its content here.
Background technology
In the past, known have to have along track configurations the traveler car of advancing is in orbit carried out the traveling trolley system (for example opening flat 10-273204 communique with reference to the spy) of the transported substance that the picks and places keeping shelf of transported substance and in order the processing equipment transfer transported substance of handling transported substance to be provided with the traveling trolley system (for example opening the 2001-341640 communique with reference to the spy) in the berth that traveler car can get into.
Open in the traveling trolley system of flat 10-273204 communique relevant spy; Inside in the central authorities of annular orbit is provided with supply station; And the side along the track of ring-type disposes the keeping shelf, from both sides with the transported substance transfer on the traveler car of advancing at the track of advancing.
In addition, open in the traveling trolley system of 2001-341640 communique, be used for traveler car is rested in the berth on the processing equipment, between traveler car that enters into the berth and processing equipment, carry out loading, the unloading of transported substance in the arranged outside of track relevant spy.
Open in the traveling trolley system of flat 10-273204 communique relevant spy, keeping shelf (automated storage retrievel system) constitutes high-rise.Therefore, the occupancy load of transported substance is bigger, but when the Storage Department from the keeping shelf picks and places transported substance, uses stack crane.
Thereby relevant spy opens the traveling trolley system of flat 10-273204 communique not only at the middle spended time of picking and placeing of transported substance, and does not possess the pooling feature of interim keeping transported substance, so transport efficiency reduces.In addition, open in the traveling trolley system of flat 10-273204 communique relevant spy, the keeping shelf constitutes multistage, manyly, but constitutes individually owing to taking care of shelf and traveler car, so have the problem of transport efficiency variation.
In addition, open in the traveling trolley system of 2001-341640 communique,, be provided with and be used for traveler car is rested in the loading of processing equipment, the berth of unloading position (space) in the outside of track relevant spy.Therefore, open in the traveling trolley system of 2001-341640 communique,, have the problem of the transport efficiency reduction of traveler car the transfer spended time of traveler car relevant spy.
Summary of the invention
The present invention In view of the foregoing makes, and purpose provides a kind of save spaceization that can improve equipment and nobody the advance traveling trolley system of transport efficiency of chassis.
Relevant the 1st technical scheme of the present invention possesses following mechanism in order to address the above problem.
The 1st technical scheme possesses: substrate board treatment, the keeping or the predetermined process of enforcement substrate; Nobody chassis of advancing; Have the lifting unit that makes under the state of aforesaid substrate in being housed in substrate box to go up and down along the vertical direction and, the aforesaid substrate box is carried along the track that is provided with towards the aforesaid substrate processing equipment the parallel motion portion of aforesaid substrate box towards aforesaid substrate processing equipment parallel motion; The substrate box Storage Department keeps above above-mentioned track and the keeping substrate box.
Relevant the 2nd technical scheme of the present invention is in above-mentioned the 1st technical scheme, and above-mentioned nobody chassis of advancing possesses the chassis upper substrate box Storage Department of keeping aforesaid substrate box above above-mentioned lifting unit and above-mentioned parallel motion portion.
According to the present invention, because the side is provided with the substrate box Storage Department in orbit, so can realize traveling trolley system single-piece save spaceization.And then, can shorten substrate box with respect to transfer time of traveler car, improve nobody and advance the transport efficiency and the setup time of chassis.
In addition,, on the aforesaid substrate box, be provided with and be held parts, on aforesaid substrate box Storage Department, be provided with and be engaged to the above-mentioned holding member that is held on the parts according to the present invention.
Thus, can be easily and substrate box is carried put on the substrate box Storage Department reliably.
In addition, according to the present invention, above-mentioned holding member can be along the vertical direction or horizontal direction move and constitute.
Thus, can easily or expeditiously substrate box be remained on the substrate box Storage Department.
In addition, according to the present invention, above-mentioned nobody chassis of advancing is stopped below aforesaid substrate box Storage Department; Make above-mentioned lifting unit and the concerted action of above-mentioned parallel motion portion, the aforesaid substrate box is remained on the aforesaid substrate box Storage Department.
In addition, according to the present invention, make above-mentioned nobody the advance travel section and above-mentioned lifting unit of chassis, concerted action remains on substrate box on the aforesaid substrate box Storage Department.
In addition, according to the present invention, the aforesaid substrate box can multistagely constitute with piling up.
Thus, according to the present invention, can further realize traveling trolley system single-piece save spaceization.
In addition, according to the present invention, be engaged to the above-mentioned holding member that is held on the parts and be located on the above-mentioned chassis upper substrate box Storage Department.
Thus, can be easily and substrate box is carried put on the chassis upper substrate box Storage Department reliably.
In addition, above-mentioned holding member can be along the vertical direction or horizontal direction move and constitute.
Thus, can easily or expeditiously substrate box be remained on the chassis upper substrate box Storage Department.
In addition, according to the present invention, the substrate box that will not accommodate the sky of aforesaid substrate remains on the above-mentioned chassis upper substrate box Storage Department.Thus, can realize the high efficiency utilization of traveling trolley system single-piece.
Description of drawings
Fig. 1 is the integrally-built skeleton diagram of the traveling trolley system of relevant the 1st embodiment of the present invention of expression.
Fig. 2 A to Fig. 2 C is the figure of the substrate box of relevant this system of expression.
Fig. 3 is expression about the advance front view of relation of chassis and substrate box Storage Department of nobody of this system.
Fig. 4 is expression about the advance lateral plan of relation of chassis and substrate box Storage Department of nobody of this system.
Fig. 5 is expression about the advance birds-eye view of relation of chassis and substrate box Storage Department of nobody of this system.
Fig. 6 A to Fig. 6 D is with the instruction diagram of substrate box transfer to the action of substrate box Storage Department in this system.
Fig. 7 is the front view of expression about the variation of the substrate box Storage Department of this system.
Fig. 8 is the lateral plan of the substrate box Storage Department of relevant Fig. 7.
Fig. 9 is the birds-eye view of the substrate box Storage Department of relevant Fig. 7.
Figure 10 is the advance front view of schematic configuration of chassis of in the relevant traveling trolley system of the 2nd embodiment of the present invention of expression nobody.
Figure 11 is the advance birds-eye view of schematic configuration of chassis of nobody of the relevant Figure 10 of expression.
Figure 12 is the instruction diagram that in this system, substrate box is unloaded to the action on the buffer part (chassis upper substrate box Storage Department).
Figure 13 is an instruction diagram of following the action of Figure 12.
Figure 14 is an instruction diagram of following the action of Figure 13.
Figure 15 is an instruction diagram of following the action of Figure 14.
The specific embodiment
Below, describe with reference to the 1st embodiment of accompanying drawing relevant traveling trolley system A of the present invention.
As shown in Figure 1, be equipped with and be used for guiding nobody the advance track L of ring-type of chassis (below be called chassis AG) of track that advances.This track L is by buffering siding track LA, processing side track LB and a pair of track SL that is connected of bonded assembly between two ends of two track LA, LB is constituted ring-type.And chassis AG advances in the track L of above-mentioned ring-type cocycle.
Both sides (double as is the one-sided of processing side track LB) at buffering siding track LA are equipped with buffer part ST1, ST2 that interim keeping becomes the substrate box 1 of transported substance.Buffer part ST1, ST2 are made up of one or more levels shelf.And, keeping substrate box 1 in buffer part ST1, ST2.
On the other hand, remaining one-sided at processing side track LB, adjacent for example being equipped with carried out the substrate board treatment R1 of clean and for example substrate G carried out the substrate board treatment R2 that coating is handled substrate G such as glass board.
On the end of two track LA, LB, can be equipped with respectively with back and forth advancing and be used for the traverse table T of transfer chassis AG.And, put the track that is provided with on the face with two track LA, LB equal height carrying of traverse table T.
Last at substrate board treatment R1, R2; In the face of the side of processing side track LB, be equipped with two LS of loading depot that admit the substrate box that contains untreated substrate G 1 in the chassis AG and will contain the discharge point ULS that the substrate box 1 of the substrate G that has handled is seen off to chassis AG side.
In addition, last at substrate board treatment R1, R2, connecting respectively be used for and carry to place between the substrate box 1 on LS of loading depot and the discharge point ULS and send into conveyer LC and see conveyer ULC off what substrate G slices were sent into, seen off.
Chassis AG has four wheels 4, by carry substrate box 1 that postpone states and in the chassis main body (travel section) 11 of advancing on the track L, make to carry and put elevator (lifting unit) 10 that the substrate box 1 on chassis main body 11 goes up and down along the vertical direction and in order to make substrate box 1 along a pair of fork (parallel motion portion) 8a, the 8b formation that are orthogonal to the direction parallel motion of track LA, LB and become one and drive.
On the track L of ring-type, dispose many (being 5 in the example of Fig. 1) chassis AG.These chassis AG has identical construction.
Then, to describing by chassis AG substrate conveying box 1.
The following of substrate box 1 looked like shown in Fig. 2 B, for the open configuration that base plate side frame SFL, preceding frame FFL, after-frame BFL and beam parts 3 expose is not set.In the inside of substrate box 1, between opposed two side frame SFL, be provided with metal wool W, and this metal wool W disposes many at certain intervals along fore-and-aft direction along laterally opening.And the every predetermined distance of many wires W keeps multi-disc (5～6) substrate G.
On the biside plate SP of substrate box 1, the narrower calvus N of a pair of width leaves at the position, front and back of upper end at interval each other and level is prominent respectively establishes from 4 positions.
In addition, calvus N also can form the calvus N of wider width.In the case, on even keel is prominent respectively from the central authorities upper end of the biside plate SP of substrate box 1 establishes for calvus N.
Then, the substrate box Storage Department BF 1 to the top that is provided in track LA (LB) describes.
The top of the track LA (LB) that advances in chassis AG circulation is provided with a plurality of substrate box Storage Departments (below be called buffer part BF1) continuously.
Buffer part BF1 is by constituting towards the outstanding retention tab K1 of direct of travel with the upright supporting arm 6 that is located at a plurality of pillars 5 on the F of ground, extends towards the upper horizontal of buffering siding track LA from pillar 5 of predetermined distance with from 4 positions, both sides, front and back of supporting arm 6 along the side of track LA, LB.
Buffer part BF1 forms the font of falling L by pillar 5 and supporting arm 6.And supporting arm 6 is set at and carries puts the substrate box 1 hands-off height on chassis AG.
Then, with reference to Fig. 6, to 1 transfer of the substrate box on the chassis AG is described to the action on the buffer part BF1 of track LA (LB) top.
At first, shown in Fig. 6 A, carry the chassis AG that is equipped with substrate box 1 and on track LA, advance, below buffer part BF1, stop.Say that more correctly on the direct of travel of chassis AG, chassis AG stops on the retention tab K1 consistent location of carrying the calvus N place the substrate box 1 on the chassis AG and buffer part BF1.
Then, shown in Fig. 6 B, start through the elevator 10 that makes chassis AG, the retention tab K1 that fork 8a, the last substrate box 1 of 8b are risen to than buffer part BF1 leans on the top slightly.
Under this state, the retention tab K1 of supporting arm 6 is arranged in one-sided (is the right side at Fig. 6 B) of buffering siding track LA.Therefore, even substrate box 1 is risen to vertical direction, also can avoid interference with the calvus N of substrate box 1.
And then shown in Fig. 6 C, fork 8a, 8b are elongated to the one-sided of buffering siding track LA, and the calvus N of substrate box 1 is located on the retention tab K1 of buffer part BF1.
At last, shown in Fig. 6 D, elevator 10 is descended.Thus, the substrate box 1 on the chassis AG by transfer to the buffer part BF1 of buffering siding track LA top.
Then, make elevator 10 and fork 8a, 8b get back to initial position.
In addition, will carry under substrate box 1 transfer that places on the buffer part BF1 situation to the chassis AG, as long as it is just passable to carry out above-mentioned action with opposite order.
Like this, the traveling trolley system A of relevant this embodiment is owing to possessing buffer part BF1 in the top of track LA (LB), so can realize traveling trolley system A single-piece save spaceization.Thus, substrate box 1 shortened with respect to the transfer time of chassis AG, and the work efficiency of chassis AG and setup time (lead time) improve.
In addition, through the elevator 10 and fork 8a, 8b that uses chassis AG to have, can easily substrate box be put on the buffer part BF1 in 1 year.Therefore, do not need special equipment, can realize the cost degradation of traveling trolley system A.
Then, with reference to Fig. 7～Fig. 9, the variation of substrate box Storage Department is described.
Like Fig. 7～shown in Figure 9, buffer part BF2 has to make with the card stop bit of substrate box 1 with respect to buffer part BF1 and puts the structure that has rotated 90 degree.
That is, buffer part BF2 possesses the not shown pillar on the ground F before and after two outer edge-on being located at of buffering siding track LA and that be located at this pillar abreast with buffering siding track LA is horizontal frame 12a, the 12b on the top of specified altitude position.And in the inboard of these two horizontal frame 12a, 12b, front and back are left at interval and arranged opposite has towards the prominent retention tab K2 that establishes of buffering siding track LA on even keel.
On the other hand, place on the substrate box 1 on the chassis AG carrying, the narrower calvus M of width leaves with same intervals with the retention tab K2 of buffer part on the position, the left and right sides of substrate box 1 upper end that on even keel is prominent at interval and respectively establishes.That is, calvus M is different with above-mentioned calvus N, on the face about being located at respect to throughput direction.
Then, with reference to Fig. 7～Fig. 9, to 1 transfer of the substrate box on the chassis AG is described to the action on the buffer part BF2 of the top of track LA (LB).
At first, chassis AG advance to buffer part BF2 under and stop.Say that more correctly on the direct of travel of chassis AG, in the inconsistent place of retention tab K1 of the calvus M and the buffer part BF2 of substrate box 1, chassis AG stops (with reference to Fig. 8, Fig. 9).
Then, through driving the elevator 10 of chassis AG, substrate box 1 rises and moves.
Then, after calvus N rose to the position higher than retention tab K1, chassis AG moved to calvus M and retention tab K1 position overlapped on above-below direction on buffering siding track LA.That is, chassis AG moves and stops to direct of travel slightly.
At last, elevator 10 is descended.Thus, calvus M is only blocked on retention tab K1 respectively, with substrate box 1 keeping in buffer part BF2.
Like this, under the situation of using buffer part BF2,, can 1 card of the substrate box on the chassis AG be ended on buffer part BF2 and takes care of through elevator 10 and the travel section 11 of using chassis AG.
Then, the 2nd embodiment to relevant traveling trolley system A of the present invention describes.
In this embodiment, in the system of the 1st embodiment, above chassis main body 11, be provided with the buffer part BF of interim keeping substrate box 1.
In addition, in the chassis of relevant this embodiment, owing to substrate box 1, claw N, wheel 4, chassis main body (travel section) 11, elevator (lifting unit) 10, fork (parallel motion portion) 8a, 8b are and the same structure of above-mentioned the 1st embodiment, so omit explanation.
At first, with reference to Figure 10, Figure 11 the chassis AG of relevant this embodiment is described.
Above chassis main body 11, be provided with the buffer part BF of interim keeping substrate box 1.
That is, at the elevator 10 of chassis AG and fork 8a, can carry on above the 8b and put substrate box 1.And then, above leaning on, also can carry and put substrate box 1 through buffer part BF than elevator 10 and fork 8a, 8b.
Buffer part BF constitutes towards the prominent retention tab K that establishes of interior side's on even keel respectively by a pair of abutment wall 14a on the end before and after the upright direct of travel that is located at chassis main body 11,14b with from the opposed faces of abutment wall 14a, 14b.
Retention tab K is located on the two ends of Width separately of abutment wall 14a, 14b.In addition, 4 retention tab K are located on the position of equal height.Particularly, shown in figure 10,4 retention tab K are above the end face that is located at than carries the substrate box 1 on putting at fork 8a, above the 8b under the state that elevator 10 is reduced leans on slightly.
And the calvus N of the substrate box of after only blocking on this retention tab K, stating 1 remains on substrate box 1 between abutment wall 14a, the 14b.
Then, with reference to Figure 12～Figure 15, the action that the buffer part BF with 1 couple of chassis AG of substrate box is unloaded (carry せ and fall ろ) describes.
At first, shown in figure 12, under the state at fork 8a that 1 substrate box was put at chassis AG in 1 year, above the 8b, through driving fork 8a, 8b, substrate box 1 parallel motion.More particularly, if overlook observation, the substrate box 1 calvus N that is moved horizontally to substrate box 1 position of not interfering with the retention tab K of buffer part BF then.
Then, shown in figure 13, through driving elevator 10, substrate box 1 rises.More particularly, substrate box 1 rising is leaned on the top slightly up to the retention tab K that the calvus N of substrate box 1 becomes than buffer part BF.
Then, shown in figure 14, fork 8a, 8b retreat into initial position.That is, if overlook observation, then substrate box 1 is moved horizontally to the retention tab K consistent location of the calvus N and the buffer part BF of substrate box 1.
At last, shown in figure 15, elevator 10 drops to initial position.Thus, the retention tab K of substrate box 1 engages with the calvus N of buffer part BF, and substrate box 1 is maintained on the buffer part BF.That is, substrate box 1 quilt is from pitching 8a, the last transfer of 8b to buffer part BF.
In addition, will carry under substrate box 1 transfer that places on the buffer part BF situation last, as long as it is just passable to carry out above-mentioned action with opposite order to fork 8a, 8b.
Like this, in the traveling trolley system B of relevant this embodiment, chassis AG possesses the buffer part BF of interim keeping substrate box 1.Therefore, can realize traveling trolley system B single-piece save spaceization.Thus, substrate box 1 shortened with respect to the transfer time of chassis AG, and the work efficiency of chassis AG and setup time improve.
In addition, through the elevator 10 and fork 8a, 8b that uses chassis AG to have, can easily substrate box be put on the buffer part BF in 1 year.Therefore, do not need special equipment, can realize the cost degradation of traveling trolley system B.
In addition, on the buffer part BF of chassis AG, also can substrate box 1 be piled up multistagely.
In the case, preferably, pin P is set on substrate box 1, makes the multistage a plurality of substrate boxes 1 that pile up can not collapse by goods.
Under multistage situation of piling up a plurality of substrate boxes 1 on the buffer part BF, before the action of above-mentioned Figure 12～Figure 15, fork 8a, the last substrate box 1 of 8b are risen for the time being earlier through elevator 10.Then, this substrate box 1 is connected to remains on other substrate boxes 1 on the buffer part BF, other substrate boxes 1 are left at interval from the calvus N of buffer part BF.Carry out the action of above-mentioned Figure 12～Figure 15 then.
In addition, under with a plurality of substrate box 1 multistage situation about being stacked on the buffer part BF, preferably with substrate box 1 multistage the piling up of sky.This is because if empty substrate box 1, then need not consider the stacking order of substrate box 1.In other words, this be because, under the substrate box that will contain substrate G 1 multistage situation about being stacked on the buffer part BF, in order only selectively will specific substrate box 1 to unload and the many actions of needs decrease in efficiency from buffer part BF.
On the track L of ring-type, dispose many (for example 5) chassis AG, but preferably will be wherein at least one have the chassis AG (for example chassis AG5) of buffer part BF and pile up empty substrate box 1 multistagely as above-mentioned.Thus, need not prepare many chassis AG5 that carry empty substrate box 1, can the suppression equipment cost.In addition, do not need to carry the many week circulations of chassis AG5 of empty substrate box 1 to carry, transport efficiency improves.
As described above, according to relevant traveling trolley system of the present invention, owing to above track L, be provided with buffer part BF1, the BF2 of keeping substrate box, so can realize traveling trolley system A single-piece save spaceization.In addition, substrate box 1 was shortened with respect to the transfer time of chassis AG, and the transport efficiency of chassis AG and setup time improve.
Each shape of each component parts of being represented by above-mentioned embodiment and combination etc. are examples, in the scope that does not break away from purport of the present invention, can carry out various changes based on designing requirement etc.
For example, substrate G also can be a semiconductor substrate.
In addition, chassis AG is illustrated with the structure of advancing on the ground, but also can be the structure of advancing at the top ceiling skidding.
In addition, calvus N, M are made as the structure of establishing from biside plate SP outward pleurapophysis and are illustrated, but are not limited to this, also can constitute groove or hole.
In addition, put 1 and be illustrated for substrate box 1 is only carried, but also can substrate box 1 be piled up multistagely to buffer part BF1, the last situation of BF2.Thus, can further realize save spaceization.Under with substrate box 1 multistage situation of piling up, also can the retention tab K1 of buffer part BF1, BF2 be provided with many groups along short transverse.In addition, also can one group of retention tab K1 can be constituted up or down.
In addition, retention tab K1, K2 also can constitute free to advance or retreat in the horizontal direction movable.Thus, can be only through the driving of elevator 10 transfer substrate box 1.
In addition; Be not limited in substrate box that the substrate box that will have calvus N put the last situation of retention tab K, the K1 of buffer part BF, BF1 in 1 year and will have a calvus M and put the situation on the retention tab K2 of BF2 in 1 year, the side of maintaining part clamping substrate box 1 that also can be through buffer part BF, BF1 and BF2.
In the above-described embodiment, L constitutes ring-type with track, but also can be rectilinear orbit.That is, chassis AG also can move back and forth on rectilinear orbit.In addition, chassis AG can not all be an identical construction also, also can mix the chassis that has a plurality of kinds.
In addition, in the buffer part BF of chassis AG, for the retention tab K with the supporting substrates box be fixedly installed on abutment wall 14a, the last situation of 14b is illustrated, but is not limited to this.For example retention tab K also can be the movable pawl that can haunt towards interior side.As a result, substrate box 1 transfer to buffer part BF the time, no longer need driven fork 8a, 8b, transfer expeditiously.
In addition, also can be the structure that abutment wall 14a, 14b can be moved to top prolongation, retention tab K along the vertical direction.As a result, can the multistage substrate box that piles up 1 former state pitched transfer between 8a, 8b and the buffer part BF with being integral.
In addition, also can on a plurality of positions of above-below direction, be provided with the movable pawl that can haunt, make that retention tab is outstanding arbitrarily.
Claims (5)
1. traveling trolley system is characterized in that possessing:
Substrate board treatment, the keeping or the predetermined process of enforcement substrate;
Nobody chassis of advancing; Have the lifting unit that makes under the state of aforesaid substrate in being housed in substrate box to go up and down along the vertical direction and, the aforesaid substrate box is carried along the track that is provided with towards the aforesaid substrate processing equipment the parallel motion portion of aforesaid substrate box towards aforesaid substrate processing equipment parallel motion;
The substrate box Storage Department keeps above above-mentioned track and the keeping substrate box.
2. traveling trolley system as claimed in claim 1 is characterized in that,
On the aforesaid substrate box, be provided with and be held parts;
On aforesaid substrate box Storage Department, be provided with and be engaged to the above-mentioned holding member that is held on the parts.
3. traveling trolley system as claimed in claim 1 is characterized in that,
Above-mentioned nobody chassis of advancing is stopped below aforesaid substrate box Storage Department;
Make above-mentioned lifting unit and the concerted action of above-mentioned parallel motion portion, the aforesaid substrate box is remained on the aforesaid substrate box Storage Department.
4. traveling trolley system as claimed in claim 1 is characterized in that, makes above-mentioned nobody the advance travel section and above-mentioned lifting unit concerted action of chassis, and substrate box is remained on the aforesaid substrate box Storage Department.
5. traveling trolley system as claimed in claim 1 is characterized in that, the aforesaid substrate box can multistagely be stacked on the substrate box Storage Department and constitute.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-081662 | 2009-03-30 | ||
| JP2009081661A JP5365302B2 (en) | 2009-03-30 | 2009-03-30 | Traveling vehicle system |
| JP2009-081661 | 2009-03-30 | ||
| JP2009081662A JP5402156B2 (en) | 2009-03-30 | 2009-03-30 | Traveling vehicle system |
| CN 201010145538 CN101850883B (en) | 2009-03-30 | 2010-03-29 | Traveling trolley system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010145538 Division CN101850883B (en) | 2009-03-30 | 2010-03-29 | Traveling trolley system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102556664A true CN102556664A (en) | 2012-07-11 |
| CN102556664B CN102556664B (en) | 2015-09-30 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210048074.3A Active CN102556664B (en) | 2009-03-30 | 2010-03-29 | Traveling trolley system |
| CN 201010145538 Active CN101850883B (en) | 2009-03-30 | 2010-03-29 | Traveling trolley system |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010145538 Active CN101850883B (en) | 2009-03-30 | 2010-03-29 | Traveling trolley system |
Country Status (2)
| Country | Link |
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| CN (2) | CN102556664B (en) |
| TW (1) | TWI461341B (en) |
Cited By (1)
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| CN112158589A (en) * | 2020-10-13 | 2021-01-01 | 苏州象平自动化科技有限公司 | Full-automatic feeding machine |
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| CN104029455B (en) * | 2013-03-07 | 2016-12-28 | 营口金辰机械股份有限公司 | Automatic upper and lower assembly glass machine |
| CN103950716B (en) * | 2014-05-21 | 2016-07-27 | 芜湖万辰电光源科技有限公司 | A kind of conveying mechanism of glass bar plated film microscope carrier |
| CN105892107A (en) * | 2016-04-15 | 2016-08-24 | 京东方科技集团股份有限公司 | Automatic laminating equipment and automatic laminating method |
| JP6870517B2 (en) * | 2017-07-20 | 2021-05-12 | 株式会社ダイフク | Transport vehicle and transport equipment |
| DE102019106033A1 (en) * | 2019-03-08 | 2020-09-10 | Heinz Buse | Storage and retrieval unit for loading stackable goods and a logistics system with such a storage and retrieval unit |
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| CN112158589A (en) * | 2020-10-13 | 2021-01-01 | 苏州象平自动化科技有限公司 | Full-automatic feeding machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201040098A (en) | 2010-11-16 |
| CN102556664B (en) | 2015-09-30 |
| TWI461341B (en) | 2014-11-21 |
| CN101850883B (en) | 2012-12-05 |
| CN101850883A (en) | 2010-10-06 |
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