CN103569570A - AMHS and handling method of AMHS - Google Patents
AMHS and handling method of AMHS Download PDFInfo
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- CN103569570A CN103569570A CN201310552589.1A CN201310552589A CN103569570A CN 103569570 A CN103569570 A CN 103569570A CN 201310552589 A CN201310552589 A CN 201310552589A CN 103569570 A CN103569570 A CN 103569570A
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Abstract
The invention discloses an AMHS and a handling method of the AMHS, and belongs to the field of material handling. The AMHS includes a storage device, a horizontal guide rail, a material handling unit, a lifting feed port and a lifting discharge port. Materials are stored in all storage units of the storage device in a layered mode; the horizontal guide rail and a main guide rail in a production area of the materials are integrated, and the horizontal guide rail is arranged between every two adjacent storage units in the storage device; the material handling unit gets in and out and is used for storing the materials in the storage device, and the material handling unit moves along the horizontal guide rail to handle the stored materials; the lifting feed port and the lifting discharge port ascend and descend respectively to adapt to the vertical height of the stored materials in each storage unit so that the stored materials can get in and out of each storage unit. According to the AMHS and the handling method of AMHS, due to the fact that a set of structure, namely, the lifting feed port and the lifting discharge port, is used, the material handling unit can automatically store the materials, also, the height of the feed port and the height of the discharge port can be reduced, and operators can conveniently and manually store the materials. In this way, system complexity is lowered, and system cost is reduced.
Description
Technical field
The invention belongs to mass transport field, specifically, relate to a kind of automated material delivery system and method thereof.
Background technology
Along with the development of semiconductor technology, the silicon chip that the silicon chip of 300mm has replaced 200mm becomes main flow, and each container weight that has loaded silicon chip has become approximately 9 kilograms by original approximately 4 kilograms.Therefore,, if carried between each manufacturing module by means of manpower, can cause efficiency lower, the danger that simultaneously also may cause personnel to be injured.And owing to can effectively improving the production cycle of factory building degree of utilization, shortening product, automated material delivery system (Automated Material Handling Systems, hereinafter to be referred as: AMHS) with respect to the mass transport of manpower, become the main tie of carrying silicon chip in 300mm silicon chip manufacturing process between each manufacturing module.
Fig. 5 is the structural representation of automated material delivery system in prior art.As shown in Figure 5, this automated material delivery system mainly comprises: memory cell STOCKER501 and elevator subsystem 502.Wherein, memory cell STOCKER501 is provided with at least one automatic input port 511, at least one automatic delivery port 521, in memory cell STOCKER501, be placed with box type container 503, at box type container 503, deposited material (Work In Product, hereinafter to be referred as WIP) as silicon chip.Elevator subsystem 502 comprises the overhead track 512 that is arranged on memory cell STOCKER501 periphery, and the waggon 522 that can travel in overhead track 512.Each waggon 522 is also connected with a manipulator 532, by this manipulator 532, picks up or unload box type container 503, then controls waggon 522 and travel along overhead track 512, thereby makes silicon chip automatic transport between each manufacturing module of fabrication region.Such as having picked up the waggon 522 of a box type container 503, in overhead track 512, travel, and be parked in the position that the box type container 503 that it can be picked up is unloaded to its automatic input port 511 in stop position place, or the position that can pick up a box type container 503 from automatic delivery port 521, and finally complete box type container 503 to the unloading of memory cell STOCKER501 or pack into.After this waggon 522 completes unloading or packs into, another rests in overhead track 512 waggons 522 and by the automatic input port 511 in its stop position place or automatic delivery port 521, is unloaded or packed into again other box type container 503.
In general, in order to coordinate the job requirements of waggon 522, above-mentioned automatic input port 511, automatic delivery port 521 are arranged on higher position conventionally, and operating personal cannot touch.But, in actual job, usually need operating personal manually to carry out for compounding practice personnel manually deposit box type container 503, therefore, in above-mentioned delivery system, in lower position, also dispose manual input port 542 and manual delivery port 552.But, due to the existing automatic input port 511 of system, automatic delivery port 521, there are again manual input port 542 and manual delivery port 552, increased complexity and the cost of system.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of its method of automated material delivery system, to simplify system complexity, reduces the cost of system.
In order to solve the problems of the technologies described above, the invention provides a kind of automated material delivery system, it can comprise:
Storage equipment, comprises at least two memory cell, and described in each, in memory cell, layering stores material;
Horizontal guide rail, with the main guide rail one of the Production Regional of described material, and is arranged in described storage equipment between every adjacent two described memory cell;
Mass transport unit, at material described in the turnover of described storage equipment and access, and travels to carry the described material of access along described horizontal guide rail;
Liftable input port and delivery port, for adapting to respectively the described material that is accessed in the vertical dimension of described memory cell, so that the described material being accessed passes in and out described memory cell by self lifting.
Preferably, in one embodiment of this invention, this system can also comprise upright guide rail, is arranged on described storage equipment, is used to the described material that described liftable I/O port adapted to the be accessed vertical dimension in described memory cell to carry out self lifting.
Preferably, in one embodiment of this invention, this system can also comprise gear unit, for driving described liftable input port and delivery port to adapt to the described material being accessed, in the vertical dimension of described memory cell, carries out self lifting.
Preferably, in one embodiment of this invention, this system can also comprise driver element, for driving described liftable input port and delivery port lifting.
Preferably, in one embodiment of this invention, liftable input and output mouth disposes a upright guide rail separately.
Preferably, in one embodiment of this invention, the lifting simultaneously of described liftable input and output mouth or successively lifting.
For solving the problems of the technologies described above, the present invention also provides a kind of automated material transport platform, and it can comprise:
Horizontal guide rail, with the main guide rail one of the Production Regional of material, and is arranged in storage equipment between every adjacent two memory cell;
Mass transport unit, for the material of access storage equipment and travel to carry described material along described horizontal guide rail;
Liftable input port and delivery port, for adapting to respectively the described material that is accessed by self lifting in the vertical dimension of described memory cell, make the described material being accessed pass in and out described memory cell.
For solving the problems of the technologies described above, the present invention also provides a kind of automated material carrying method, and it can comprise:
Material layering is stored in each memory cell of storage equipment;
Liftable input port and delivery port adapt to respectively the described material that the is accessed vertical dimension in described memory cell by self lifting, so that the described material being accessed passes in and out described memory cell;
Mass transport unit in described storage equipment, pass in and out and access described in material, and along described horizontal guide rail, travel to carry the described material of access.
Compare with existing scheme, in the present invention, by liftable input port and delivery port, by self lifting, adapt to respectively the described material that the is accessed vertical dimension in described memory cell, so that the described material being accessed passes in and out described memory cell, use a nested structure to get final product lifting input port and delivery port, both can meet mass transport unit and automatically deposit material, also be applicable to reduce the height of input port and delivery port, operating personal is manually deposited material.Thereby simplified system complexity, reduced the cost of system.
Accompanying drawing explanation
Fig. 1 is the automated material delivery system structural representation of the embodiment of the present invention one;
Fig. 2 is the automated material delivery system structural representation of the embodiment of the present invention two;
Fig. 3 is the automated material carrying method diagram of circuit of the embodiment of the present invention three;
Fig. 4 is the diagram of circuit of automatic material carrying method while depositing material in memory cell;
Fig. 5 is the structural representation of automated material delivery system in prior art.
The specific embodiment
Below will coordinate graphic and embodiment to describe embodiments of the present invention in detail, and by this present invention's implementation procedure how application engineering means solve technical matters and reach technology effect can be fully understood and be implemented according to this.
In following embodiment of the present invention, by liftable input port and delivery port, by self lifting, adapt to respectively the described material that the is accessed vertical dimension in described memory cell, so that the described material being accessed passes in and out described memory cell, use a nested structure to get final product lifting input port and delivery port, both can meet mass transport unit and automatically deposit material, and also be applicable to reduce the height of input port and delivery port, operating personal is manually deposited material.Thereby simplified system complexity, reduced the cost of system.
For the ordinary skill of this area, according to it, understand, also the present invention can be applied in the processing and manufacturing process of other products, thus the conveying of realization material between different making modules.
Fig. 1 is the automated material delivery system structural representation of the embodiment of the present invention one.As shown in Figure 1, in the present embodiment, automated material delivery system comprises: storage equipment (not shown), memory cell STOCKER101, horizontal guide rail 102, mass transport unit 103, liftable input port 104, liftable delivery port 105.
Storage equipment 100 comprises at least two memory cell STOCKER101, and each memory cell STOCKER101 of storage equipment 100 is provided with multilayer, is used for layering storage silicon chip.In the present embodiment, can load silicon chip with an accomodating unit 111, and these accomodating unit 111 layerings are placed in the bank bit of memory cell STOCKER101.Concrete, the accomodating unit 111 in the present embodiment can be front opening film magazine (Front OpeningUnified Pod, hereinafter to be referred as FOUP) or standard mechanical interface box (Stand Mechanical Interface, hereinafter to be referred as SMIF).
In the present embodiment, as shown in Figure 1, this guide rail 102 can adopt unsettled mode to be arranged between every two memory cell 100.Thereby the main orbit (not shown) of this guide rail 102 and Production Regional is positioned at and on same vertical height, has formed an integral body, thereby make accomodating unit 111 complete access from memory cell STOCKER101, by this guide rail 106, deliver to different manufacturing modules, or by sailing main orbit into, enter other Production Regional of material.
When specifically arranging, this guide rail 102 can be located on two sidewalls of storage equipment.One of ordinary skill in the art will appreciate that, in an other embodiment of the present invention, also can give between every two adjacent memory cell 101 two guide rails 102 are set, and two corresponding mass transport unit 103, each guide rail 102 and each mass transport unit 103 are for a memory cell STOCKER101.Such as, in Fig. 1, the memory cell STOCKER101 on the left side has a set of guide rail 102 for its operation and mass transport unit 103, and the memory cell STOCKER101 on the right has a set of guide rail 102 for its operation and mass transport unit 103.Mass transport unit 103 is at the turnover of described storage equipment and access material, and along horizontal guide rail 102, travels to carry the material of access.
In the present embodiment, mass transport unit 103 can comprise waggon 113 and pickup unit 123, and pickup unit 123 is arranged on waggon 113 front ends.Waggon 113 is for driving pickup unit 123 to travel to carry silicon chip along guide rail 102, and this waggon 113 is specifically as follows the overhead lifting waggon OHT advancing at vertical direction; Pickup unit 123 is for by lifting access accomodating unit 111, and this pickup unit is specifically as follows manipulator.
In the present embodiment, described liftable input port 104, liftable delivery port 105 are arranged to lifting simultaneously.
In the present embodiment, for the ease of liftable input port 104, liftable delivery port 105 up-and-down movements, this automatic material delivery system can also comprise upright guide rail 106, be arranged on described storage equipment 100, be used to the described material that described liftable input port 104, liftable delivery port 105 adapted to the be accessed vertical dimension in described memory cell to carry out self lifting.Liftable input port 104, liftable delivery port 105 dispose a upright guide rail 106 separately.
It should be noted that, 106 of upright guide rails are to provide a kind of medium of liftable input port 104,105 oscilaltions of liftable delivery port.Those of ordinary skills are according to enlightenment of the present invention, need not creative works, can expect other equivalents, such as, also can be by the mode of belt conveyor, other detailed alternative do not repeat them here.
In the present embodiment, for the ease of realizing automation, control, this automatic material delivery system can also comprise gear unit (not shown), for driving described liftable input port 104, liftable delivery port 105 to adapt to the described material being accessed, in the vertical dimension of described memory cell, carries out self lifting.Such as, belt conveyor, or the structure of pulley composition.This partial content does not repeat them here, and those of ordinary skills are according to content of the present invention, need not creative work, be easy to expect other equivalents.
In the present embodiment, for power system is provided, in the present embodiment, can also comprise driver element (not shown), for driving described liftable input port 104,105 liftings of liftable delivery port.This driver element can be the modes such as a motor or air pump.This partial content does not repeat them here, and those of ordinary skills are according to content of the present invention, need not creative work, be easy to expect other equivalents.
In the present embodiment, described liftable input port 104, liftable delivery port 105 are arranged to lifting simultaneously, and therefore, described liftable input port 104, liftable delivery port 105 can be shared a gear unit and driver element.
It should be noted that, considering under the prerequisite of system cost, also can to liftable input port 104, liftable delivery port 105, operate by operator is manual, thereby realize the lifting of liftable input port 104, liftable delivery port 105.
Fig. 2 is the automatic material delivery system structural representation of the embodiment of the present invention two, and other parts similar or identical with Fig. 1 do not repeat them here.And from above-mentioned embodiment illustrated in fig. 1 different, described liftable input port 104, the 105 successively liftings of liftable delivery port.For this reason, if automation mechanized operation preferably, is given described liftable input port 104, liftable delivery port 105 configuration gear unit and driver element separately, realize the independent operation to described liftable input port 104, liftable delivery port 105.
In an other embodiment of the present invention, a kind of automated material transport platform is also provided, it can comprise above-mentioned horizontal guide rail, mass transport unit, liftable input port and delivery port.The content of relevant these parts or structure refers to above-mentioned related content, does not repeat them here.
Automated material transport platform can also comprise upright guide rail, is arranged on described storage equipment, and this upright guide rail is used to the described material that described liftable I/O port adapted to the be accessed vertical dimension in described memory cell to carry out self lifting.
Automated material transport platform can also comprise gear unit, and this gear unit carries out self lifting for driving described liftable input port and delivery port to adapt to the described material being accessed in the vertical dimension of described memory cell.
Fig. 3 is the automated material carrying method diagram of circuit of the embodiment of the present invention three, and as shown in Figure 3, it can comprise:
Take below and deposit material as example in memory cell, automated material carrying method in Fig. 3 is done to one and briefly introduce.In embodiment, to need mass transport unit automatically to deposit material at high height place, need again operating personal to deposit material in lower below, describe.
Fig. 4 is the diagram of circuit of automatic material carrying method while depositing material in memory cell; As shown in Figure 4, it can comprise:
Step 401, mass transport unit receive the control command of depositing material, along horizontal guide rail, arrive liftable input port, complete depositing of material;
Step 402, when operating personal need to manually be deposited material, control liftable input port and drop to the manually operated height of operating personal;
Step 403, operating personal are stored in material in storage equipment by liftable input port.
The process of taking out material from memory cell is similar with the process of depositing, and does not repeat them here.
Although having introduced, above-described embodiment how by the lifting of mass transport unit, to carry out the conveying of silicon chip between different manufacturing modules, but, for the person of ordinary skill of the art, it also can be applied to above-described embodiment to be undertaken by the parallel motion of mass transport unit the conveying of material completely.
Above-mentioned explanation illustrates and has described some preferred embodiments of the present invention, but as previously mentioned, be to be understood that the present invention is not limited to disclosed form herein, should not regard the eliminating to other embodiment as, and can be used for various other combinations, modification and environment, and can, in invention contemplated scope described herein, by technology or the knowledge of above-mentioned instruction or association area, change.And the change that those skilled in the art carry out and variation do not depart from the spirit and scope of the present invention, all should be in the protection domain of claims of the present invention.
Claims (10)
1. an automated material delivery system, is characterized in that, comprising:
Storage equipment, comprises at least two memory cell, and described in each, in memory cell, layering stores material;
Horizontal guide rail, with the main guide rail one of the Production Regional of described material, and is arranged in described storage equipment between every adjacent two described memory cell;
Mass transport unit, at material described in the turnover of described storage equipment and access, and travels to carry the described material of access along described horizontal guide rail;
Liftable input port and delivery port, for adapting to respectively the described material that is accessed in the vertical dimension of described memory cell, so that the described material being accessed passes in and out described memory cell by self lifting.
2. system according to claim 1, it is characterized in that, also comprise upright guide rail, be arranged on described storage equipment, be used to the described material that described liftable I/O port adapted to the be accessed vertical dimension in described memory cell to carry out self lifting.
3. system according to claim 1, is characterized in that, also comprises gear unit, for driving described liftable input port and delivery port to adapt to the described material being accessed, in the vertical dimension of described memory cell, carries out self lifting.
4. system according to claim 1, is characterized in that, also comprises driver element, for driving described liftable input port and delivery port lifting.
5. system according to claim 1, is characterized in that, liftable input and output mouth disposes a upright guide rail separately.
6. system according to claim 1, is characterized in that, the lifting simultaneously of described liftable input and output mouth or successively lifting.
7. an automated material transport platform, is characterized in that, comprising:
Horizontal guide rail, with the main guide rail one of the Production Regional of material, and is arranged in storage equipment between every adjacent two memory cell;
Mass transport unit, for the material of access storage equipment and travel to carry described material along described horizontal guide rail;
Liftable input port and delivery port, for adapting to respectively the described material that is accessed by self lifting in the vertical dimension of described memory cell, make the described material being accessed pass in and out described memory cell.
8. transport platform according to claim 7, it is characterized in that, also comprise upright guide rail, be arranged on described storage equipment, be used to the described material that described liftable I/O port adapted to the be accessed vertical dimension in described memory cell to carry out self lifting.
9. transport platform according to claim 7, is characterized in that, also comprises gear unit, for driving described liftable input port and delivery port to adapt to the described material being accessed, in the vertical dimension of described memory cell, carries out self lifting.
10. an automated material carrying method, is characterized in that, comprising:
Material layering is stored in each memory cell of storage equipment;
Liftable input port and delivery port adapt to respectively the described material that the is accessed vertical dimension in described memory cell by self lifting, so that the described material being accessed passes in and out described memory cell;
Mass transport unit in described storage equipment, pass in and out and access described in material, and along described horizontal guide rail, travel to carry the described material of access.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310552589.1A CN103569570A (en) | 2013-11-08 | 2013-11-08 | AMHS and handling method of AMHS |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310552589.1A CN103569570A (en) | 2013-11-08 | 2013-11-08 | AMHS and handling method of AMHS |
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| CN103569570A true CN103569570A (en) | 2014-02-12 |
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| CN201310552589.1A Pending CN103569570A (en) | 2013-11-08 | 2013-11-08 | AMHS and handling method of AMHS |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106185138A (en) * | 2015-07-20 | 2016-12-07 | 亚洲硅业（青海）有限公司 | A kind of closed silicon core automatic access device |
| CN114291465A (en) * | 2021-12-08 | 2022-04-08 | 中国兵器装备集团自动化研究所有限公司 | Safe storage and taking and placing device for dangerous explosive |
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| EP2527274A1 (en) * | 2011-05-25 | 2012-11-28 | SERVUS Intralogistik GmbH | Method and device for controlling a rail-bound transport robot in a materials store |
| CN102849385A (en) * | 2011-06-29 | 2013-01-02 | 鞍钢股份有限公司 | Multilayer sealed magazine type hot-rolled strip steel coil warehouse |
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| CN114291465A (en) * | 2021-12-08 | 2022-04-08 | 中国兵器装备集团自动化研究所有限公司 | Safe storage and taking and placing device for dangerous explosive |
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