JP5515443B2 - Storehouse - Google Patents

Description

  The present invention relates to a technical field of a storage such as a stocker in which goods such as a FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing a semiconductor element are loaded and unloaded, for example.

  As a load suitable for this type of storage, for example, a FOUP capable of accommodating a plurality of semiconductor wafers having a diameter of 300 mm has been proposed (for example, see Patent Document 1). Such FOUP is mainly used to transport or temporarily store a plurality of semiconductor wafers between or within a plurality of processes along the route of a transport vehicle in a facility where a storage is installed. Used for.

  In addition, as this type of storage, a plurality of storage units that can store semiconductor wafers such as workpieces are arranged vertically and horizontally, and a plurality of semiconductor wafers are moved by moving a space facing the storage shelf. A high-rise storage shelf including a transfer robot that can be taken in and out between storage units has been proposed (see, for example, Patent Document 2). Such a high-rise storage shelf is provided with a platform that can be pulled out as a scaffold for each storage unit.

JP 2007-123673 A JP 2002-370807 A

  Here, the diameter of the semiconductor wafer accommodated in the FOUP disclosed in Patent Document 1 described above is regulated to 300 mm, but in recent years, the diameter has been increased to be larger than 300 mm, and the diameter has been promoted to 450 mm, for example. It's getting on. Correspondingly, FOUPs tend to be larger and heavier.

  In response to such a tendency, in the high-rise storage shelf disclosed in Patent Document 2 described above, for example, the transfer robot fails, and it becomes impossible to store the load in the storage unit, the storage surface of the storage unit is deformed, or the storage unit Even if the load is not placed at a predetermined position in the storage unit due to an obstacle such as a component that has dropped onto the storage unit, or when a load that has not been placed at the predetermined position is to be placed again, the load that is not at the predetermined position is transferred. A situation occurs in which the loading robot cannot be gripped. In order to solve such a situation, it is necessary to manually carry the load in the storage unit out of the high-rise storage shelf or to reposition the load at a predetermined position in the storage unit. If the situation described above occurs, one worker, such as an administrator who manages the storage or the load, uses the platform to reach the load to be carried or its vicinity and try to hold the load. . At this time, if the load to be held is large and heavy, it is difficult for one worker to move across the platform while directly holding the load from the viewpoint of safety. It is. That is, there is a technical problem that carrying or repositioning the load in the storage room manually may threaten the safety of the worker.

  Furthermore, if the load itself is damaged or the inside / outside movement mechanism capable of moving the load inside and outside the high-rise storage shelf breaks down, it is necessary to carry the load manually inside and outside the high-rise storage shelf. If the situation described above occurs, a worker who directly holds a load to be carried tries to climb up or down a ladder or stairs fixed to a high-rise storage shelf. Here, if the load being held is larger and heavier, one worker must climb the ladder or the stairs while holding the load directly. It may not be allowed. That is, there is a technical problem that carrying of a load manually inside and outside the storage can also threaten the safety of the worker.

  This invention is made | formed in view of the problem mentioned above, and makes it a subject to provide the storage which can move a load safely in the said storage and the inside and outside of the said storage by hand.

In order to solve the above-mentioned problem, the storage according to the present invention is a storage in which the loading and unloading of the load is performed with a transport vehicle that travels along the first track and transports the load. vertical with being divided in a plurality of stages in the direction of at least one said load in output to put the first doorway and the vault as possible the load can be taken out of the vault between the transport vehicle a housing or frame second entrance is provided in the housing or frame, Te each smell of the plurality of stages, a plurality of rack compartments being respectively constituted receiving or can be placed said load, The 1st conveyance apparatus which conveys load between the shelf part adjacent to the 1st entrance and other shelf parts, and the 2nd conveyance which conveys the load from the shelf part to the outside of the 2nd entrance / exit and a device, wherein the second transport device, graspable gripping the load Stage and the gripping means, said housing or said housing or moving means in and out of the frame is movable through the second doorway is moved between each other of the plurality of shelves content inside the frame And have .

  In the storage according to the present invention, loading and unloading of cargo such as FOUP is performed by a transport vehicle such as OHT (Overhead Hoist Tranport). Here, the “transport vehicle” is a so-called vehicle of a ceiling traveling type, and is laid on or near the ceiling of a semiconductor element manufacturing factory or a semiconductor element manufacturing facility, for example, when loading and unloading goods. Travel along a first track such as a rail. Specifically, when receiving a load, for example, a transport vehicle that holds the load to be stored by a gripper or the like reaches a transfer position corresponding to the storage in the first track and stops. Then, for example, by a hoist or the like, the gripper or the like and the load to be stored held by the gripper are lowered in the vertical direction, and the load is placed on a port for taking in and out the load inside and outside the storage. Then, the load to be received is released from the gripper or the like. Thereby, the receipt of the load by the transport vehicle is completed.

  On the other hand, when unloading the cargo, the unloaded transport vehicle reaches the transfer position described above and stops. Then, the above-described gripper or the like is lowered in the vertical direction by the above-described hoist or the like, and the load to be unloaded placed on the port is held on the transport vehicle side by the gripper or the like. Then, the gripper or the like and the load to be delivered held by the hoist or the like rise in the vertical direction by the hoist or the like. Thus, when the transport vehicle is ready to travel, the delivery of the load by the transport vehicle is completed.

  About the said storage, the external appearance is comprised with the housing | casing or the frame, and the some shelf part is arranged in this housing | casing or frame. Here, the “plurality of shelf portions” refers to a shelf row having a plurality of placement surfaces arranged in one or more rows in the vertical direction. For example, m (where m is a natural number of 2 or more) in the vertical direction, n (where n is a natural number of 1 or more) columns in one horizontal direction, and the remaining horizontal direction (hereinafter simply “ The skeleton of the entire shelf may be configured to be a thin and vertically elongated flat plate shape such as o (where o is a natural number equal to or greater than 1) in “thickness direction”). The load received in the storage by the transport vehicle is horizontally moved from the port to the one shelf part adjacent to the first entrance through the first entrance through, for example, a roller mechanism. . That is, the first entrance may be provided at a height corresponding to one of the plurality of stages. Then, for example, a storage device such as a robot arm, a so-called stacker, moves between a plurality of shelves in, for example, two directions or two axial directions such as a vertical direction and a horizontal direction, and loads on one shelf portion. However, it is moved from one shelf part to another shelf part among a plurality of shelf parts. That is, the load that has been transported and stored in the storage is stored or stored in the storage.

  Here, during the transport in the storage, the stacker and the storage can be stored without using the stacker due to a failure of the stacker, damage to the shelf as a transport destination, or an obstacle on the shelf. It may be necessary to move the load in and out of the warehouse.

  Therefore, according to the storage according to the present invention, when the load is moved in the storage, the moving means is controlled by the direct or indirect operation by hand, and the gripping means moves to the load to be moved. At the same time, the gripping means is controlled, and the gripping means is displaced so as to be able to grip the load to be moved. That is, the load is gripped by the gripping means. Here, the “gripping means” is a gripping mechanism such as a grip capable of gripping at least a part of the load. For example, when the load is a FOUP, the gripping means can grip the flange of the FOUP. The “moving means” is a moving mechanism capable of moving the gripping means to and from each shelf portion. This moving means is driven by, for example, human power, an actuator or a motor. Furthermore, “around the shelf portion” is loaded or shifted from a predetermined position of the shelf portion to which the load is transferred due to the failure of the stacker or the failure of the stacker to transfer in the storage, as described above. In this case, the periphery of the shelf portion assumed as the location of the load is shown. Note that “directly” related to the manual operation means that the gripping means and the moving means are directly pressed by an operator or the like and changed to a desired position or state by human power. "Means that the gripping means and the moving means are changed to a desired position or state by controlling the actuator or the motor by a switch operation or a handle operation without directly pressing the gripping means and the moving means. Note that only the gripping means may be controlled by a direct manual operation.

  After the load is gripped by the gripping means, the moving means is controlled by direct or indirect operation by hand, the gripping means moves to the shelf portion where the load is to be placed, and the gripping means is controlled and gripped. The load held by the means is displaced to a releasable state. That is, the load is released from the gripping means. As described above, the movement of the load in the storage is performed without using the stacker.

  On the other hand, when moving a load inside and outside the storage, after the load is gripped by the gripping means as described above, the moving means is controlled by direct or indirect operation by hand, and the gripping means While moving to a predetermined receiving position set outside the storage, the gripping means is controlled to displace the load held by the gripping means into a releasable state. That is, the load is released from the gripping means. Here, the “moving means” is also a moving mechanism capable of moving the gripping means from the inside of the storage to the outside via the second doorway. The “second entrance / exit” indicates an opening having a size that allows loading and unloading using the gripping means and the moving means. That is, the gripping means, the moving means, and the load can pass through the second doorway at the same time. This 2nd entrance / exit is provided in the side frame corresponding to the side surface different from the side surface in which the 1st entrance / exit was provided, for example in a housing | casing or a frame. Moreover, the 2nd entrance / exit is provided in the same or different step | paragraph as the step corresponding to the 1st entrance / exit among several steps. In this case, the worker who receives the load does not enter the lower part of the first track on which the transport vehicle travels, and the worker can receive the load safely.

  As described above, when the stacker cannot be transported in the storage, and it is necessary to carry the load manually, the gripping means and the moving means are controlled by manual operation so that the plurality of shelf parts and the plurality of shelf parts are controlled. The cargo is moved between each other and inside and outside the storage. As a result, the worker or the like does not hold the load directly, and the safety of the worker or the like can be ensured. Therefore, it is possible to safely move the load in and out of the storage room by manpower.

In one aspect of the storage according to the present invention, the plurality of shelf portions are arranged so as to spread in at least one horizontal direction, and the moving means is laid on the casing or the ceiling of the frame or on the ceiling side. A second track whose one end extends to the outside of the housing or the frame through the second doorway, a slide mechanism capable of reciprocating in one horizontal direction along the second track, and one end It is fixed to the gripping means, and is provided with a suspension member that suspends the gripping means in the vertical direction, and is provided integrally with or separately from the slide mechanism. A hoist mechanism that can reciprocate in the direction and wind up or lower the other end of the suspension member, and the suspension member is centered on the position of the gripping means suspended in the vertical direction. Range, and is freely configured moving the gripping means.

  According to this aspect, when the load is gripped by the gripping means, the slide mechanism is controlled by, for example, direct or indirect operation by human hands, and the slide mechanism moves in one horizontal direction along the second track. Then, the load to be moved is stopped at the latest horizontal one-way position. Here, the “second track” indicates a track such as a rail in the slide mechanism that communicates the inside and outside of the storage. Specifically, the second track is laid in the horizontal direction corresponding to the arrangement of the plurality of shelf portions on the ceiling or in the vicinity of the ceiling in the housing or frame, and in the storage. Outside, the end that has passed through the second doorway is a track that is extended by at least one load. When the slide mechanism moves to the latest horizontal one-way position on the load to be moved, the hoist mechanism is controlled by manual or indirect operation by hand, and the suspension member is wound up to the latest vertical position on the load to be moved. Or it is rolled down. Then, the suspension member is controlled by a direct operation by a human hand, the gripping means connected to one end of the suspension member moves to a load to be moved within a predetermined range, and the gripping means is controlled and gripped. The means is displaced so as to be able to grip the load to be moved. That is, the load is held by the holding means and is suspended by the hanging member via the holding means. Here, the “predetermined range” related to the suspension member is the grip that is suspended in the vertical downward direction of the slide mechanism and the hoist mechanism after being moved in one horizontal direction and two vertical directions by the slide mechanism and the hoist mechanism. The space inside and outside the storage where the means can be moved by the pressing of an operator or the like is shown. That is, this predetermined range covers a plurality of shelf portions and the vicinity of the plurality of shelf portions, which can be assumed as the location of the load to be moved, and the gripping means can reach the load to be moved and grip the load. It is preset as a space. The suspension member is made of a metal, a fiber material, or the like having flexibility that can be wound or lowered by a hoist mechanism and that can be bent manually, and that can withstand a load of a gripping means and a load.

  Further, when the load gripped by the gripping means moves out of the storage, for example, the slide mechanism and the hoist mechanism are controlled by a direct or indirect operation by hand, and the gripping means moves the second doorway. To move to the extended track portion of the second track. Here, the load is located outside the storage. Then, the hoist mechanism is controlled, and the suspension member is lowered to the receiving position described above. Subsequently, the gripping means is controlled by a direct operation by human hands, and the load held by the gripping means is displaced into a releasable state. That is, the load is released from the gripping means and is directly held by a worker or the like and carried to various processing facilities.

  As described above, the gripping means, the slide mechanism, and the hoist mechanism are controlled by manual operation to grip the plurality of shelf portions and the loads near the plurality of shelf portions, and the plurality of shelf portions and the plurality of shelf portions. Move loads between nearby and inside and outside the storage. As a result, workers and the like do not hold the load directly at the high places such as ladders or stairs provided in the storage and outside the storage, and the safety of the workers and the like can be ensured. Is possible.

  In this aspect, the gripping means is configured to be freely displaceable between a gripping state for gripping the load and a release state for releasing the gripped load, and the storage unit stores the load, When moving from the inside to a predetermined delivery shelf provided outside, the gripping means is controlled so as to be displaced to the gripping state to grip the load to be moved, and the gripping state is The hoist mechanism is controlled to move the gripping means to a first vertical position located in the horizontal direction of the second doorway, and the gripping means moved to the first vertical position is moved in the vertical direction of the predetermined delivery shelf. Controlling the slide mechanism to move to a first horizontal position located at the first horizontal position, and moving the gripping means moved to the first horizontal position to a second vertical position corresponding to the predetermined delivery shelf Controls structure may further comprise a control means for controlling the gripping means so as to be displaced from the gripping means to move to said second vertical position to the released state in order to release the load to be the moving.

  With this configuration, when the load moves from inside the storage to a predetermined delivery shelf outside the storage, for example, the gripping means is controlled by manual operation, and the gripping means moves. It shifts to the gripping state with respect to the power load. That is, the load to be moved is gripped by the gripping means. Subsequently, when the displacement of the gripping means to the gripping state is determined by manual operation of the chain block or the like (or by control means such as a stocker controller), the hoist mechanism is controlled, and the gripping means in the gripping state is Move to 1 vertical position. Subsequently, the slide mechanism is controlled, and the gripping means moves to the first horizontal position. Here, the gripping means is located outside the storage and above a predetermined delivery shelf. Subsequently, the hoist mechanism is controlled, and the gripping means moves to the second vertical position. Then, the gripping means is controlled by a direct operation by human hands, and the gripping means is displaced from the gripping state to the released state. That is, the load is released from the gripping means and is supported by a predetermined delivery shelf, so that an operator or the like can directly hold the load to be moved. In this way, control from when the gripping means is displaced to the gripping state until it is displaced to the released state, that is, control of the slide mechanism and the hoist mechanism is performed by manual operation (or control means). Thereby, it is possible to move a load quickly and accurately.

  In addition, about the predetermined delivery shelf, the height, the size of the support surface, and the like are not particularly limited as long as the operator can deliver the load, and as a matter of course, the predetermined delivery shelf is It may be a movable type or a floor following the installation surface where the storage is installed.

In another aspect of the storage according to the present invention, the first transport device includes a placement unit having a first placement surface capable of supporting the load from a bottom side thereof, and the placement unit described above. Drive means that is movable between the shelf portions of the plurality of shelf parts, wherein the drive means is capable of reciprocating the placement part in a horizontal direction including the one horizontal direction, and the placement part. A vertical driving means capable of reciprocating vertically in the vertical direction, and the plurality of shelf portions are configured to be able to transfer the load to and from the first mounting surface. Each has a face.

  According to this aspect, when a load is originally transported in the storage (that is, transported in the storage), for example, a horizontal portion is directed toward one of the plurality of shelf portions that is a transport source. The placement unit is moved in the horizontal direction by horizontal driving means such as an actuator, a horizontal slider, and a robot arm. Before and after the horizontal movement, the mounting portion is moved in the vertical direction toward the one shelf portion by vertical driving means such as a vertical elevator, a vertical actuator, and a robot arm. Then, the load is transferred from the second placement surface in the one shelf portion to the first placement surface in the placement portion. Subsequently, the placement unit is moved in the horizontal direction by the horizontal driving unit toward the second shelf portion as the transfer destination among the plurality of shelf portions. Concurrently with the movement in the horizontal direction, the mounting portion is moved in the vertical direction by the vertical driving means toward the second shelf portion. Then, the load is transferred from the first placement surface in the placement portion to the second placement surface in the second shelf portion. Here, the transfer of the load between the first and second placement surfaces is performed as follows.

  The first and second mounting surfaces can transfer the load to each other. The load on the second placement surface of one shelf portion is transferred to the first placement surface of the placement portion that is movable in the biaxial direction. For example, the first and second mounting surfaces are configured to support different portions (typically, a portion near the center and a portion near the periphery) on the bottom surface of the load, and support the load on either side. Is possible. Specifically, when the placement unit is moved to the vertical position and the horizontal position where the second placement surface of one shelf portion exists, the first placement surface is replaced with the second placement surface. By supporting the load, transfer from the second placement surface to the first placement surface is performed. Typically, the load is supported by the first placement surface by the vertical drive means being moved until the first placement surface becomes higher than the second placement surface. Thereby, conveyance in a storage is started. Here, by a simple two-axis operation by the vertical driving means and the horizontal driving means, it is possible to quickly carry in the storage to any second mounting surface in the shelf portion.

  In addition, the load on the first placement surface of the placement unit is transferred to the second placement surface of the second shelf portion as the transport destination. Specifically, when the placement unit is moved to a vertical position and a horizontal position where the second placement surface of the second shelf portion is present, the second placement surface is replaced with the second placement surface. By supporting the load, transfer from the first placement surface to the second placement surface is performed. Typically, the load is supported by the second placement surface by being moved by the vertical driving means until the first placement surface becomes lower than the second placement surface. Thereby, the transport in the storage is finished, and the load is stored or stored in the second shelf portion.

  As described above, by transferring the load between the first and second mounting surfaces, it is possible to shorten the load transfer time in the transport in the storage.

  In this aspect, the control means moves the gripping means to a retracted position that does not hinder the movement of the mounting portion when the mounting portion moves between the plurality of shelf portions. The slide mechanism and the hoist mechanism may be controlled.

  If comprised in this way, when the conveyance in a storage by the movement of a mounting part is performed, a slide mechanism and a hoist mechanism will be controlled by a control means, and a holding means will move to a retracted position. Here, the “retracted position” indicates a position that does not hinder the movement of the mounting portion inside and outside the storage where the gripping means can move. Specifically, this retracted position indicates, for example, the extended track portion in the second track, or the end of the track opposite to the extended track portion, depending on the movement of the mounting portion. May be changed as appropriate. By setting such a retracted position in advance, it is not necessary to provide a space as two movement paths for the placement unit and the gripping unit to move independently of each other, and the moving unit (specifically, the second unit) Track) and a stacker that is a transport device in the storage including the placement unit and the driving means can be provided close to each other, and a shelf portion can be added to the space that is free. That is, it is possible to increase the number of storage or storage, and to increase the storage or storage power of the storage.

  In an aspect in which the moving unit includes the second track and the slide mechanism, the moving unit may be configured to be able to assemble the slide mechanism with respect to the second track.

  If comprised in this way, a slide mechanism with respect to a 2nd track | truck will be carried out by direct operation by hand only when conveyance in a storage by movement of a mounting part becomes impossible, and carrying of a load by hand will be forced. Is assembled. On the other hand, the slide mechanism is removed from the second track if it can be transported in the storage by moving the mounting portion. Thereby, it is not necessary to perform control to move the gripping means to the above-described retracted position during conveyance in the storage. Further, if each storage has only the second track, a plurality of storages can share the slide mechanism, the hoist mechanism, the fishing member, and the gripping means, and the cost for one storage can be reduced. It is also possible to suppress it.

  In the aspect in which the storage further includes the placement unit and the driving unit, the driving unit is configured to be able to assemble the horizontal driving unit with respect to the second track, and the horizontal driving unit The placement unit may be reciprocally moved along the second track in the horizontal direction, and the vertical driving unit may be capable of reciprocating the placement unit in the vertical direction of the second track.

  If comprised in this way, the 2nd track | orbit functions also as a track | orbit of the horizontal drive means in a drive means other than the slider mechanism in a moving means. The horizontal movement means is assembled to the second track at the same time as the slider mechanism or at a different time by direct or indirect operation by hand. As a result, the placement unit and the gripping means move along the same movement path, and there are more shelf parts than when the placement part and the gripping means move independently through two different movement paths. It is also possible to install. That is, it is possible to increase the number of storage or storage, and to increase the storage or storage power of the storage.

  Such an operation and other advantages of the present invention will be clarified from embodiments to be described below.

It is a perspective view which shows the external appearance of a conveyance system provided with the storage which concerns on embodiment of this invention. FIG. 2 is a one-way sectional view schematically showing an internal structure of the storage of FIG. 1. FIG. 3 is a one-way cross-sectional view for explaining a load transfer operation between the placing portion and the plurality of shelf portions in FIG. 2. FIG. 5 is a cross-sectional view in the other direction for explaining a retracted position of the gripping means in FIG. 1. It is a flowchart which shows the FOUP manual conveyance process in the storage of FIG. It is a one way sectional view showing an example of the 2nd track concerning the present invention. It is a one-way sectional view showing an example of relative positions of the moving means and the driving means according to the present invention. It is another direction sectional drawing which shows an example of the mounting part and drive means which concern on this invention. It is another direction sectional drawing which shows an example of the moving means which concerns on this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Embodiment>
<Configuration of Embodiment>
With reference to FIG. 1 to FIG. 3, the configuration of the storage according to the embodiment of the present invention will be described. FIG. 1 is a perspective view showing the appearance of a transport system including a storage according to the embodiment, and FIG. 2 schematically shows the internal structure of the storage shown in FIG. FIG. 3 is a unidirectional cross-sectional view when cut in a direction (that is, referred to as “one direction”), and FIG. 3 is a diagram for explaining an operation of transferring a load between the placing portion and the plurality of shelf portions in FIG. It is a one-way sectional view of a mounting part and a plurality of shelf parts.

  In FIG. 1, the transport system 1000 includes a transport instruction unit 100, a vehicle controller 101, and a stocker controller 102 as a control system in addition to the rail R <b> 1, the vehicle 10, and the stocker 20. The transport system 1000 transports the FOUP 3 to various manufacturing apparatuses and the stocker 20 according to a transport schedule in semiconductor element manufacturing, and stores or stores the FOUP 3 in the stocker 20.

  The FOUP 3 is transported along the rail R1 by the vehicle 10 as an example of “load” according to the present invention, and is transported in the stocker 20 for entering / exiting or adjusting the storage position (that is, storage warehouse). Inside transport). The FOUP 3 is provided with a flange 4 held on the upper surface thereof by the vehicle 10, an automatic transfer device 30 or a manual transfer device 40 described later. In FIG. 3, the FOUP 3 has a plurality of recesses 5 and 6 at the center and side of the lower surface. The recessed part 5 located in the lower surface side part is formed in the size corresponding to the convex part 22 provided in each shelf part 21 mentioned later. On the other hand, the recessed part 6 located in the lower surface center part is formed in the size corresponding to the convex part 32 provided in the mounting part 31 mentioned later.

  The rail R1 is laid on the ceiling of the semiconductor device manufacturing facility as an example of the “first track” according to the present invention, and serves as a track for the vehicle 10 to travel. Various manufacturing apparatuses, a stocker 20, and the like are installed below and adjacent to the rail R1.

  In FIG. 2, a vehicle 10 is an OHT (overhead traveling vehicle) that uses a linear motor as a power source as an example of the “conveyance vehicle” according to the present invention, and travels along the rail R <b> 1 to convey the FOUP 3. The FOUP 3 stops at a predetermined position on the rail R1, and is configured to be able to transfer the FOUP 3 to / from ports (for example, ports P1 and P2) provided in various manufacturing apparatuses, the stocker 20, and the like. The vehicle 10 includes a hoist 11, a belt 12, and a gripper 13, and these parts are controlled by a vehicle controller 101.

  The hoist 11 is attached to the inside of the vehicle 10 and is driven by an actuator or a motor so that the belt 12 can be wound or unwound. The belt 12 has one end fixed to the hoist 11 and the other end fixed to the gripper 13. The gripper 13 is driven by an actuator or a motor, and is configured to be displaceable between a holding state for holding the FOUP 3 and a releasing state for releasing the FOUP 3.

  The stocker 20 can store or store a plurality of FOUPs 3 transported by the vehicle 10 as an example of the “storage” according to the present invention. The stocker 20 includes a main body 20a, ports P1 and P2, a plurality of shelf portions 21, an automatic conveyance device 30, and a manual conveyance device 40.

  The main body 20a (that is, an example of the “casing or frame” according to the present invention) is provided with openings H1 and H2 on the side surface on the rail R1 side (that is, the front surface in FIG. 1). Each of the openings H1 and H2 is adjacent to the port P1 or P2 as an example of the “first entrance / exit” according to the present invention, and is large enough to allow the FOUP 3 to be taken in and out between the port P1 or P2 and the inside of the main body 20a. Is formed. Further, the main body portion 20a is provided with an opening H3 on a side surface adjacent to the side surface on the rail R1 side (that is, the right side surface in FIG. 1). As an example of the “second doorway” according to the present invention, the opening H3 penetrates a rail R2 (described later) of the manual transport device 40 and is formed to have a size that allows the FOUP 3 to be taken in and out of the main body 20a. A plurality of shelf portions 21, an automatic conveyance device 30, and a manual conveyance device 40 are provided inside the main body 20a.

  In addition, a work platform such as a scaffold for maintenance (not shown), a ladder, or a stepladder is fixed to each shelf portion 21 or is attachable / detachable inside the main body 20a. A worker who performs work related to the transport system 1000 can perform a displacement operation and a pressing operation, which will be described later, by walking to the work table for maintenance and reaching each shelf portion 21 or the periphery thereof.

  Each port P1, P2 is provided on the outer surface of the main body 20a on the rail R1 side, adjacent to the opening H1 or H2. Each port P1, P2 is positioned vertically downward of the rail R1 so that the FOUP 3 can be transferred between the vehicle 10 and the stocker 20. Each of the ports P1 and P2 includes a slide mechanism that can horizontally move the FOUP 3 transferred from the vehicle 10 toward the inside of the main body 20a through the entrance H1 or H2. Specifically, the slide mechanism is configured such that the FOUP 3 on the port P1 or P2 is indicated by one shelf portion adjacent to the opening H1 or H2 among the plurality of shelf portions 21 described later (that is, indicated by a two-dot chain line in FIG. Move up) (located in area A1).

  The plurality of shelves 21 are arranged in seven rows in the vertical direction, four rows in one horizontal direction (ie, the left-right direction in FIG. 1), and two rows in the thickness direction (ie, the front-rear direction in FIG. 1) in each step As a total of 56 shelves. Each shelf portion 21 includes a pair of placement portions 21a and 21b each having a placement surface that can support the lower surface side portion of the FOUP 3 (that is, an example of the “second placement surface” according to the present invention). ing. In FIG. 3, each shelf portion 21 has a convex portion 22 on its mounting surface. The convex portion 22 is formed in a size corresponding to the concave portion 5 formed on the lower surface side portion of the FOUP 3, and is engaged with the concave portion 5 when the FOUP 3 is stored or stored.

  The automatic transfer device 30 is a stacker (or stacker robot) that is a transfer device in the storage that can automatically transfer the FOUP 3 between the plurality of shelf portions 21 under the control of the stocker controller 102. The automatic conveyance device 30 includes a main body portion 30a, a plurality of rollers 33, a vertical guide portion 34, and a horizontal telescopic swivel arm (hereinafter simply referred to as “ A plurality of rollers 33, a vertical guide portion 34, and a horizontal telescopic turning arm 35 are controlled by the stocker controller 102.

  The mounting portion 31 can reciprocate between the plurality of shelf portions 21 by driving in a horizontal direction by a plurality of rollers 33, driving in a vertical direction by a vertical guide portion 34, and driving in a thickness direction by an arm 35. It is configured. The placement unit 31 has a placement surface that can support the center of the lower surface of the FOUP 3 (that is, an example of the “first placement surface” according to the present invention). In FIG. 3, the placement portion 31 has a convex portion 32 on the placement surface. The convex portion 32 is formed in a size corresponding to the concave portion 6 formed at the center of the lower surface of the FOUP 3 and is engaged with the concave portion 6 when the FOUP 3 is transferred.

  A plurality of rollers 33 driven by an actuator or a motor are attached to the bottom surface of the main body 30a so as to be rotatable on a rail R20 laid on the floor surface inside the stocker 20. A vertical guide portion 34 is fixed to the main body portion 30a in the vertical direction. The main body portion 30a functions as a part of the “horizontal driving means” according to the present invention, and the vertical guide portion 34 (in other words, the placement portion 31) can be moved in one horizontal direction by the rotation of the plurality of rollers 33. It is configured.

  An arm 35 is attached to the vertical guide portion 34 so as to be movable only in the vertical direction. The vertical guide portion 34 is an example of the “vertical driving means” according to the present invention, and includes a mechanism 34a that is rotated in the vertical direction by an actuator or a motor, and a rotating portion 34b that is fixed to a rotating portion of the mechanism 34a. It consists of. The vertical guide portion 34 is configured to be able to reciprocate in the vertical direction an arm 35 (in other words, the placement portion 31) pivotably attached to the upper surface of the rotation portion 34 b by the operation of the mechanism 34 a.

  A mounting portion 31 is attached to the arm 35 so as to be movable only in the thickness direction. The arm 35 functions as a part of the “horizontal driving means” according to the present invention together with the main body 30a, and includes two arms connected in the vertical direction. These two arm portions are configured to be extendable in the thickness direction by reciprocally turning with an actuator (for example, a hydraulic cylinder or the like) or a motor. The arm 35 is configured to be able to reciprocate in the thickness direction on the mounting portion 31 fixed to the upper arm portion of the two arm portions by the operation of the two arm portions.

  As described above, the relative relationship between the placement unit 31 that moves by driving the plurality of rollers 33, the vertical guide unit 34, and the arm 35 and each shelf portion 21 that is the destination of the placement unit 31 will be described. The mounting surface of each shelf portion 21 is formed in a U shape like a horseshoe when viewed from the upper surface side of the stocker 20. On the other hand, the mounting surface of the mounting portion 31 is formed in a rectangular shape like an island that fills the center of the U-shape. That is, the placement surface of each shelf portion 21 and the placement surface of the placement portion 31 have mutually complementary planar shapes. The FOUP 3 is transferred between each shelf portion 21 and the placement unit 31.

  The manual transport device 40 is a device that can move the FOUP 3 by an operation of a chain block (not shown) by an operator. The manual conveyance device 40 includes a grip 41 and a rail R2, a slide 43, a hoist 44, and a suspension 45 that constitute an example of the “moving means” according to the present invention.

  The grip portion 41 is configured to be able to grip the FOUP 3 as an example of the “grip means” according to the present invention. Specifically, the gripping portion 41 is configured to be freely displaceable between a gripping state in which the flange 4 of the FOUP 3 is gripped and a releasing state in which the flange 4 is released by an operator's displacement operation.

  As an example of the “second track” according to the present invention, the rail R2 is attached to the ceiling inside the stocker 20 so that its longitudinal direction is parallel to one horizontal direction. One end of the rail R2 extends to the outside of the stocker 20 so as to communicate the inside and outside of the stocker 20 through the opening H3. The length of the extending portion of the rail R <b> 2 is greater than the length of the slide portion 43 in one horizontal direction. The slide part 43 is assembled | attached to this rail R2.

  As an example of the “slide mechanism” according to the present invention, the slide portion 43 is driven by an actuator or a motor, and is configured to reciprocate in one horizontal direction along the rail R2. A hoist unit 44 is integrally attached inside the slide unit 43.

  The hoist part 44 includes a winding shaft to which one end of the suspension belt 45 is fixed as an example of the “hoist mechanism” according to the present invention. The hoist part 44 is configured to be capable of winding or lowering one end of the suspension belt 45 by rotation of a winding shaft driven by an actuator or a motor.

  As an example of the “suspending member” according to the present invention, the suspension belt 45 has one end fixed to the winding shaft of the hoist portion 44 and the other end fixed to the upper surface of the grip portion 41. And the gripping part 41 is connected. At the normal time, the suspension belt 45 is in a state where the grip portion 41 is suspended vertically below the hoist portion 44. The suspension belt 45 is configured such that the grip 41 that is suspended in the vertical direction can move within a certain range by an operation of pressing the grip 41 by an operator. Here, the “certain range” indicates a space that can be reached by the suspended gripping portion 41 by pulling or bending the suspension belt 45 in a direction other than the vertical direction. Instead of the hanging belt 45, a hanging chain or a hanging wire may be used.

  The transport instruction unit 100 is configured to create a transport schedule of the FOUP 3 based on the semiconductor element manufacturing schedule in the manufacturing instruction unit as a main controller, and to control the vehicle controller 101 and the stocker controller 102 based on the transport schedule. It is MCS (Material Control System). The transport instruction unit 100 is configured to instruct the vehicle controller 101 to transport the FOUP 3 by the vehicle 10 and to instruct the stocker controller 102 to transport the FOUP 3 inside the stocker 20.

  The vehicle controller 101 controls each part of the vehicle 10 according to an instruction from the conveyance instruction unit 100, executes conveyance of the FOUP 3 along the rail 1, and executes transfer of the FOUP 3 between various manufacturing apparatuses, the stocker 20, and the like. It is configured to be possible.

  The stocker controller 102 controls each of the ports P1 and P2 and the automatic conveyance device 30 according to the instruction from the conveyance instruction unit 100, and transfers the FOUP 3 to the vehicle 10 via the port P1 or P2 (that is, warehousing or (Unloading) and controlling each part of the automatic transfer device 30 so that the transfer of the FOUP 3 in the stocker 20 (that is, transfer in the storage) can be executed.

<Operation of Embodiment>
<Transport operation in storage>
Next, with reference to FIGS. 2 and 3, the transport operation of the FOUP 3 inside the stocker 20 (that is, the transport operation in the storage) by the automatic transport device 30 will be described.

  In FIG. 2, the automatic conveyance apparatus 30 transfers, for example, the FOUP 3 on the shelf portion 21 located in the area A1 onto the shelf portion 21 located in the area A2. As shown in FIG. 3A, the FOUP 3 on the shelf portion 21 in the area A1 is supported on the placement surface of the shelf portion 21 with the recess 5 engaged with the projection 22 of the shelf portion 21. Yes. In this case, first, the placement unit 31 is moved directly below the shelf portion 21 in the area A1 by driving the plurality of rollers 33, the vertical guide unit 34, and the arm 35. This “below the shelf portion 21” is below the space between the pair of shelf portions 21a and 21b (that is, the space where the placement portion 31 is indicated by a dotted line in FIG. 3A), specifically, , Shows that the convex part 32 in the mounting part 31 is located vertically below the concave part 6 in the FOUP 3.

  Subsequently, the placement unit 31 that has moved directly below the shelf portion 21 in the area A <b> 1 moves vertically upward by driving the vertical guide unit 34. At this time, the placement portion 31 passes through the space between the pair of shelf portions 21a and 21b and ascends from the pair of shelf portions 21a and 21b as shown in FIG. Along with this, the concave portion 5 of the FOUP 3 and the convex portion 22 of the shelf portion 21 are disengaged, and the concave portion 6 is replaced by the convex portion of the placement portion 31 in place of the placement surface of the shelf portion 21 in the area A1. In the state engaged with 32, it is supported by the placement surface of the placement portion 31. That is, the FOUP 3 on the shelf portion 21 in the area A1 is transferred onto the placement unit 31.

  Subsequently, the placement unit 31 supporting the FOUP 3 is moved directly above the shelf portion 21 in the area A <b> 2 by driving the plurality of rollers 33, the vertical guide unit 34, and the arm 35. At this time, the placement unit 11 is moved to a predetermined horizontal position in one horizontal direction by the horizontal drive unit 13. The “directly above the shelf portion 21” is above the space between the pair of shelf portions 21a and 21b. Specifically, the convex portion 22 in the shelf portion 21 is located vertically below the concave portion 5 in the FOUP 3. Indicates to do.

  Subsequently, the placement unit 31 that has moved right above the shelf portion 21 in the area A <b> 2 moves vertically downward by driving the vertical guide unit 34. At this time, the placement portion 31 passes through the space between the pair of shelf portions 21a and 21b and descends below the pair of shelf portions 21a and 21b as shown in FIG. Accordingly, the concave portion 6 of the FOUP 3 and the convex portion 32 of the placement portion 31 are disengaged, and the concave portion 5 is replaced by the convex portion 22 of the shelf portion 21 instead of the placement surface of the placement portion 31. In the engaged state, it is supported on the placement surface of the shelf portion 21. That is, the FOUP 3 on the placement unit 31 is transferred onto the shelf portion 21 in the area A2. Thereby, the transfer operation of the FOUP 3 from the shelf portion 21 in the area A1 to the shelf portion 21 in the area A2 is completed. In addition, if this transfer process is performed in the reverse order, it will be the transfer operation | movement from the shelf part 21 of the area A2 to the shelf part 21 of the area A1.

  In the transfer operation in the storage, the concave portions 5 and 6 as the positioning means of the FOUP 3 are the convex portions 22 as the positioning means of the shelf portions 21 or the convex portions 32 as the positioning means of the placement portion 31 in each transfer process. The FOUP 3 is reliably positioned. This is an indispensable condition for each transfer process to be performed smoothly. On the other hand, if the positioning of the FOUP 3 lacks certainty due to the failure of the automatic transfer device 30, the breakage of the shelf portion 21 that is the transfer destination, the obstacle on the shelf portion 21, and the damage of the FOUP 3 itself, The transfer process may be interrupted. In this case, in order to restart the interrupted transfer process, the movement operation of the FOUP 3 is performed in addition to wiping out various transfer deviation factors. Specifically, as the moving operation, one FOUP 3 that has not been reliably positioned is delivered, or at least one or all of the FOUPs 3 in the stocker 20 other than the one FOUP 3 are delivered. Therefore, in the present embodiment, the automatic transfer device 30 that cannot transfer the FOUP 3 that is not in the predetermined positioning position even if the movement operation of the FOUP 3 as described above in the course of the transfer operation in the storage is out of order or not in failure. Instead, it is executed by the manual conveyance device 40.

<Manual transfer operation>
Next, the movement operation of the FOUP 3 by the manual conveyance device 40 will be described with reference to FIGS. 4 is a cross-sectional view in the other direction when the storage in FIG. 1 is cut in the left-right direction (that is, referred to as “other direction”), showing the retracted position in the storage in FIG. 5 is a flowchart showing a FOUP manual conveyance process as an example of a movement operation by the manual conveyance device 40.

  First, in FIG. 4, before the FOUP manual conveyance process is executed, that is, during the execution of the in-storage conveyance operation by the automatic conveyance device 30, the gripping unit 41 is driven by the rail R <b> 2 by driving the slide unit 43 and hoist unit 44. (Ie, located in the area A5 indicated by the two-dot chain line in FIG. 4). This area A5 does not hinder the transport of the FOUP 3 by the automatic transport device 30 and is recent to the opening H3 so as to reach the FOUP 3 to be transported quickly when the moving operation by the manual transport device 40 is executed. This is a retreat area as an example of the “retreat position”. In the FOUP manual conveyance process, for example, an operation of moving the FOUP 3 in which transfer displacement has occurred during transfer to the shelf portion 21 located in the area A6 to the outside of the stocker 20 is shown.

  In FIG. 5, first, in response to a manual operation of the chain block by an operator, the slide part 43 and the hoist part 44 are driven, and the grip part 41 located in the retreat area A5 moves to the vicinity of the area A6. Then, the grip portion 41 is moved to a position corresponding to the flange 4 of the FOUP 3 by the pressing operation of the worker, and the grip portion 41 is displaced to the grip state by the displacement operation of the worker. As a result, the FOUP 3 is gripped by the grip portion 41 (step S51).

  Subsequently, the hoist unit 44 is driven by the manual operation of the worker, and the gripping unit 41 moves to a predetermined first vertical position (that is, the area A7 indicated by the two-dot chain line in FIG. 4) (step S52). Here, the “first vertical position” indicates a position where the grip portion 41 is raised in the vertical direction until the height becomes the same as the opening H3. That is, the grip part 41 moved to the first vertical position is located in the horizontal direction of the opening H3. Then, the slide part 43 is driven, and the grip part 41 moves to a predetermined first horizontal position (that is, the area A5 indicated by the two-dot chain line in FIG. 4) (step S53). Here, the “first horizontal position” means that the grip portion 41 is moved in one horizontal direction until it is above the delivery shelf P3 set outside the stocker 20 (that is, the port indicated by the dotted line in FIG. 4). Indicates the position. That is, the grip part 41 moved to the first horizontal position is positioned vertically above the delivery shelf P3. Then, the hoist part 44 is driven and the grip part 41 moves to a predetermined second vertical position (that is, the area A8 indicated by the two-dot chain line in FIG. 4) (step S54). Here, the “second vertical position” indicates a position where the gripping portion 41 is lowered in the vertical direction until the gripping FOUP 3 reaches a height that can be transferred to the delivery shelf P3. That is, the grip portion 41 that has moved to the second vertical position is located immediately above the delivery shelf P3.

  Subsequently, the gripper 41 is displaced to the released state by the operator's displacement operation. Thereby, the FOUP 3 is released from the grip portion 41 (step S55). That is, the FOUP 3 in which the transfer shift has occurred is moved from the stocker 20 to the outside, and a series of FOUP manual movement processes is completed.

  According to the FOUP manual movement process of the present embodiment, when the automatic conveyance device 30 cannot be carried in the storage, and the FOUP 3 is forced to be carried manually, the manual conveyance device 40 is controlled by the operator's operation. The FOUP 3 is moved inside and outside the stocker 20. Thereby, the worker does not directly hold the load in the stocker 20, and the safety of the worker can be ensured.

  In addition, according to this embodiment, although the slide part 43 is assembled | attached with respect to the rail R2, the slide part 43 may be comprised detachably from the rail R2 (in other words, can be assembled | attached to rail R2). .

  Next, with reference to FIG. 6, an example of a rail on which a freely slidable slide part is assembled will be described. Here, FIG. 6 is a one-way cross-sectional view of the rail for explaining the structure of the rail to which the freely slidable slide portion is assembled.

  In FIG. 6A, the manual transport device 240 applied to the stocker 220 includes a gripping part 241, a rail R <b> 3, a slide part 243, a hoist part 244, and a hanging part 245. The slide portion 243 includes a main body portion 243a, a pair of rollers 246, and a pair of hook portions 247. The rail R3 is laid on the ceiling of the stocker body 220a and in one horizontal direction. The interior of the rail R3 communicates with the lower portion of the rail 3 through the opening O1. Moreover, the lower part is formed in a pair of hook part 247. As shown in FIG. Such a structure is continuous in one horizontal direction of the rail R3. A pair of rollers 246 connected by an axle is rotatably attached to the upper surface of the main body 243a. The slide portion 243 is assembled to the rail R3 so that the roller surfaces of the pair of rollers 246 and the upper surfaces of the pair of hook portions 247 are in contact with each other. In this assembled state, the pair of rollers 246 rotate on the top surfaces of the pair of hook portions 247 by the actuator or the motor. Thereby, the slide part 243 can reciprocate in one horizontal direction.

  In the present embodiment, the automatic conveyance device 30 causes the plurality of rollers 33 to reciprocate in one horizontal direction by rotating in one horizontal direction on the rail R20 laid on the floor surface inside the stocker 20. Although possible, the rail R3 described above may be set as a track that regulates the movement of the automatic conveyance device 30 in one horizontal direction.

  In FIG. 6B, the stocker 220 includes an automatic conveyance device 230 including a vertical guide part 234. A pair of rollers 235 are attached to the upper surface of the vertical guide portion 234 so that the roller surfaces face each other. In addition to the slide portion 243 in the manual conveyance device 240, the vertical guide portion 234 in the automatic conveyance device 230 can also be assembled to the rail R3. The vertical guide portion 234 is assembled to the rail R3 so that the rail R3 is sandwiched between the roller surfaces of the pair of rollers 235 from both sides. When the vertical guide portion 234 is driven in this assembled state, the pair of rollers 235 rotate on both side surfaces of the rail R3. Thereby, the vertical guide part 234 can be reciprocated in one horizontal direction.

  According to the present embodiment, as shown in FIG. 2, the automatic conveyance device 30 is installed immediately below the rail R2 in the manual conveyance device 40. However, the relative positions of the automatic conveyance device 30 and the manual conveyance device 40 are as follows. However, the present invention is not limited to this.

  With reference to FIG. 7, another example of relative positions that can be taken by the automatic conveyance device 30 and the manual conveyance device 40 will be described. FIG. 7 is a one-way sectional view showing another example of the relative positions of the automatic conveyance device 30 and the manual conveyance device 40 in FIG. In FIG. 7, the same components as those of the stocker 20 of FIG.

  In FIG. 7, the stocker 120 has a rail R <b> 2 in the manual conveyance device 40 and a rail R <b> 20 in the automatic conveyance device 30 arranged side by side in the thickness direction. For this reason, in the stocker 120, the space between the two shelf partial rows in the thickness direction must be made larger than in the case of the stocker 20 in FIG. On the other hand, since the manual transfer device 40 and the automatic transfer device 30 have independent movement paths in one horizontal direction, the gripper 41 is retracted to the retreat position A5 when the automatic transfer device 30 performs the in-storage transfer operation. Therefore, it is possible to minimize the saving operation.

  According to the present embodiment, the automatic conveyance device 30 is applied to a wide stocker in which the number of the shelf portions 21 is particularly large, and the plurality of shelf portions 21 are driven by driving the plurality of rollers 33, the vertical guide portions 34, and the arms 35. However, the configuration of the automatic conveyance device is not limited to this.

  With reference to FIG. 8, an example of an automatic conveyance apparatus different from the automatic conveyance apparatus 30 of FIG. 1 will be described. FIG. 8 is a cross-sectional view in the other direction showing an example of an automatic conveyance device different from the automatic conveyance device 30 of FIG.

  In FIG. 8, the stocker 320 includes an H-type automatic conveyance device 330 that is applied particularly to a high-rise stocker. The automatic transfer device 330 includes a mounting portion 331 that can support the center of the lower surface of the FOUP 3, a horizontal arm 335 that can move the mounting portion 331 in the thickness direction, and a horizontal guide that can move the horizontal arm 335 in one horizontal direction. And a vertical guide portion 333 that enables the horizontal guide portion 334 to move in the vertical direction. The horizontal arm 335, the horizontal guide part 334, and the vertical guide part 333 are each driven by an actuator or a motor. The horizontal arm 335 includes a plurality of arm portions, and is configured such that the placement portion 331 can reach the latest shelf portion 321 by sliding the individual arm portions in stages. The horizontal guide portion 334 is formed to be slightly shorter than the length of the stocker main body portion 320a in one horizontal direction so as to provide a margin for vertical movement. The vertical guide portion 333 is composed of two vertical conveyors, each of which is formed slightly lower than the vertical height of the main body portion 320a so as to provide a margin for preventing contact with the rail R2 of the manual transport device 40. ing. By configuring the moving means in the automatic conveyance device 320 including the horizontal arm 335, the horizontal guide portion 334, and the vertical guide portion 333, the placement portion 331 can be stably moved to the high shelf portion 321 as well. Is possible.

  According to the present embodiment, one FOUP 3 is put in and out through the opening H3 by a single movement operation by the manual conveyance device 40, but the number of FOUPs 3 that are taken in and out by a single movement operation by the manual conveyance device. Is not limited to one.

  With reference to FIG. 9, an example of a manual conveyance device different from the manual conveyance device 40 of FIG. 1 will be described. FIG. 9 is a cross-sectional view in the other direction showing an example of the manual conveyance device different from the manual conveyance device 40 of FIG. Note that, in FIG. 9, the same reference numerals are given to elements that are configured in the same manner as the stocker 120 of FIG.

  In FIG. 9, the stocker 420 includes a main body 420 a and a manual transport device 440. The main body 420a is provided with two openings H4 and H5 on two opposite side surfaces located in one horizontal direction. The manual transport device 440 is configured so that two FOUPs 3 can be taken in and out simultaneously through the two openings H4 and H5. Specifically, a rail R4 is connected to the ceiling of the stocker main body 420a through the two openings H4 and H5 so as to communicate the inside and outside of the stocker 420 and whose both ends are extended to the outside of the main body 420a. . The manual conveyance device 440 includes two sets of moving means including a slide portion 43, a hoist portion 44, and a suspension belt 45 so that the two gripping portions 41A and 41B can be moved independently in one horizontal direction and one vertical direction. For example, when the automatic conveyance device 130 is installed immediately below the rail R4, the FOUP 3 in which the transfer shift occurs on the left side of the automatic conveyance device 130 inside the stocker 420 is grasped by one grasping portion 41A. Then, the automatic conveyance device 420 may be configured such that the FOUP 3 on the right side of the automatic conveyance device 130 in which transfer displacement has occurred is gripped by the second gripping portion 41B. In this way, when performing a plurality of moving operations, it is possible to reach the FOUP 3 where the transfer displacement has occurred and execute the moving operations more quickly than when performing only one gripper 41.

  In addition, according to this embodiment, the slide part 43 is always assembled | attached with respect to the rail R2 in the manual conveyance apparatus 40, However, When the automatic conveyance apparatus 30 can perform the conveyance operation in a storage, it removes. In addition, it may be attached only when the FOUP 3 is forced to be carried by a worker.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. A storage with such a change can also be used. It is included in the technical scope of the present invention.

  DESCRIPTION OF SYMBOLS 3 ... FOUP (load), 10 ... Vehicle (ceiling traveling vehicle), 20 ... Stocker (storage), 21 ... Shelf part, 30 ... Automatic conveyance apparatus, 31 ... Loading part, 33 ... Multiple rollers, 34 ... Vertical Guide unit, 35 ... arm, 40 ... manual transfer device, 41 ... gripping unit, 43 ... slide part, 44 ... hoist unit, 45 ... hanging belt, 100 ... transfer instruction unit, 101 ... vehicle controller, 102 ... stocker controller, 1000 ... Transport system

Claims (7)

A storage for carrying in and out of the load with a transport vehicle that travels along the first track and transports the load,
The interior is divided into a plurality of stages in the vertical direction, and at least one of the first doorway through which the load can be taken in and out of the transport vehicle and the load in the storage can be taken out of the storage A housing or frame provided with a second doorway;
In each of the plurality of stages in the housing or frame, a plurality of shelf portions each configured to receive or place the load; and
A first transport device for transporting a load between a shelf portion adjacent to the first doorway and another shelf portion;
A second transport device for transporting the load from the shelf portion to the outside of the second doorway,
The second transport device is
Gripping means capable of gripping the load;
Moving means that moves the gripping means between the plurality of shelf portions inside the casing or the frame and is movable inside and outside the casing or the frame via the second doorway. A vault characterized by The plurality of shelf portions are arranged to spread at least in one horizontal direction,
The moving means is
A second track that is laid on the ceiling of the casing or the frame or on the ceiling side, and has one end extending to the outside of the casing or the frame through the second doorway;
A slide mechanism capable of reciprocating in the horizontal direction along the second track,
One end is fixed to the gripping means, and a suspension member that suspends the gripping means in the vertical direction;
A hoist mechanism provided integrally or separately with the slide mechanism, capable of reciprocating in the horizontal direction along with the reciprocating movement of the slide mechanism and winding up or down the other end of the suspension member. Have
The storage according to claim 1, wherein the suspension member is configured to be able to move the gripping means within a predetermined range centered on the position of the gripping means suspended in the vertical direction. The first transport device includes:
A mounting portion having a first mounting surface capable of supporting the load from the bottom side;
And a driving means that is movable between the plurality of shelf portions.
The driving means includes
Horizontal driving means capable of reciprocating the mounting portion in the horizontal direction including the one horizontal direction;
Vertical drive means capable of reciprocating the mounting portion in the vertical direction,
The storage according to claim 2, wherein each of the plurality of shelf portions has a second placement surface configured to be able to transfer the load to and from the first placement surface. Warehouse. The gripping means is
It is configured to be freely displaceable between a gripping state for gripping the load and a release state for releasing the gripping load,
The storage is
When moving the load from the inside to a predetermined delivery shelf provided outside,
Controlling the gripping means to displace into the gripping state to grip the load to be moved;
Controlling the hoist mechanism to move the gripping means in the gripping state to a first vertical position located in a horizontal direction of the second doorway;
Controlling the slide mechanism to move the gripping means moved to the first vertical position to a first horizontal position located in a vertical direction of the predetermined delivery shelf;
Controlling the hoist mechanism to move the gripping means moved to the first horizontal position to a second vertical position corresponding to the predetermined delivery shelf;
4. The control device according to claim 3 , further comprising a control unit configured to control the gripping unit so as to displace the load to be moved from the gripping unit that has moved to the second vertical position to the released state. 5. Storehouse. The control means includes
When the placement unit moves between the plurality of shelf portions, the slide mechanism and the hoist mechanism are controlled so that the gripping means is moved to a retracted position that does not hinder the movement of the placement unit. The storage according to claim 4. The storage according to claim 2, wherein the moving unit is configured to be able to assemble the slide mechanism with respect to the second track. The drive means is configured so that the horizontal drive means can be assembled to the second track,
The horizontal driving means is capable of reciprocating the mounting portion in the horizontal direction along the second track.
The said vertical drive means can reciprocate the said mounting part in the perpendicular direction of the said 2nd track | orbit. The storage of Claim 3 characterized by the above-mentioned.

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