TW201202111A - Automatic warehouse and transfer method - Google Patents

Automatic warehouse and transfer method Download PDF

Info

Publication number
TW201202111A
TW201202111A TW100115758A TW100115758A TW201202111A TW 201202111 A TW201202111 A TW 201202111A TW 100115758 A TW100115758 A TW 100115758A TW 100115758 A TW100115758 A TW 100115758A TW 201202111 A TW201202111 A TW 201202111A
Authority
TW
Taiwan
Prior art keywords
light
holding
protruding portion
sensor
receiving sensor
Prior art date
Application number
TW100115758A
Other languages
Chinese (zh)
Inventor
Yasuhisa Ito
Original Assignee
Muratec Automation Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Muratec Automation Co Ltd filed Critical Muratec Automation Co Ltd
Publication of TW201202111A publication Critical patent/TW201202111A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

Disclosed is an automatic warehouse which, even if an article mounted on a shelf is not arranged at a predetermined position, is capable of transferring the article. Specifically disclosed is an automatic warehouse (10), wherein a controller (100) is provided with: an initial movement section for moving a holding unit (210) to an initial movement position in such a manner that a first light-emitting sensor and a first light-receiving sensor are arranged on both sides of and above a projection section (21), and a holding section is arranged ahead of and above the projection section (21); an up-and-down movement section for moving the holding unit (210) up or down from the initial movement position, and stopping the holding unit (210) when the light-emitting sensor and the light-receiving sensor detect the projection section (21); and a horizontal movement section for moving the holding unit (210) in the horizontal direction toward the rear of the projection section (21) in such a manner that the holding section is inserted under the projection section (21).

Description

201202111 六、發明說明: 【發明所屬之技術領域】 本發明,是有關於具備移載物品的移載裝置之自動倉 庫、及由該自動倉庫進行物品移載的移載方法。 【先前技術】 近年來,具備物品被載置的棚、及在與該棚之間將移 載該物品的移載裝置之自動倉庫,已廣泛被實用化。這種 自動倉庫,其移載裝置,是在被載置於棚的物品之前停止 ’將該物品保持,在與該棚之間移載該物品(例如專利文 獻1參照)。例如,在這種自動倉庫中,半導體設備用的 基板是在被收納基板卡匣之前停止移載裝置,在移載裝置 及棚之間移載該基板卡匣。 在此,在習知的自動倉庫中,藉著由伺服馬達等將移 載裝置的停止位置定位,將移載裝置停止於物品之前,並 在與棚之間移載該物品。 [先行技術文獻] [專利文獻] [專利文獻1]日本特開2001-298069號公報 【發明內容】 (本發明所欲解決的課題) 但是在習知的自動倉庫中,若被載置在棚的物品未被 配置於預先決定的位置的情況時,具有無法移載物品的情 -5- 201202111 況的問題。 即,在習知的自動倉庫中,藉由伺服馬達等,將移載 裝置停止在預先決定的位置。但是,例如,被載置在棚的 物品若在棚上崩潰的情況時,移載裝置無法正確地停止於 物品之前。因此,在習知的自動倉庫中,由移載裝置將物 品保持時,有可能使該物品倒下或落下而破損。 由此,在習知的自動倉庫中,被載置在棚的物品未被 配置於預先決定的位置的情況時,移載裝置無法將物品正 確地保持,而具有無法移載該物品的情況》 在此,本發明,是有鑑於這種問題,目的是提供一種 自動倉庫及該自動倉庫進行物品移載的移載方法,即使被 載置在棚的物品未被配置於預先決定的位置的情況,也可 以移載該物品。 (用以解決課題的手段) 在爲了達成上述目的,本發明的自動倉庫,具備:供 載置具有朝水平方向突出的突出部的物品用的棚、及設有 將前述突出部保持的保持組件並移載前述物品的移載裝置 、及將前述保持組件的移動位置控制用的控制器,前述保 持組件,具備:保持部,是將前述突出部保持;及投光感 測器及受光感測器,是在從前述保持部突出的位置被相面 對地配置,前述控制器,具備:初期移動部,是爲了使前 述投光感測器及前述受光感測器被配置於前述突出部的兩 側方且上方,並且使前述保持部被配置於前述突出部的前 -6- 201202111 方且上方,或是,爲了使前述投光感測器及前述受光感測 器被配置於前述突出部的兩側方且下方,並且使前述保持 部被配置於前述突出部的前方且下方,而將前述保持組件 朝初期移動位置移動;及昇降移動部,是使前述保持組件 從前述初期移動位置上昇或下降,若前述投光感測器及前 述受光感測器檢出前述突出部的情況時,停止前述保持組 件;及水平移動部,是爲了使前述保持部插入前述突出部 的下方,而將被停止的前述保持組件朝向前述突出部的後 方朝水平方向移動。 由此,若投光感測器及受光感測器檢出突出部的情況 時,爲了使保持組件的從初期移動位置的昇降動作停止, 並使保持部插入突出部的下方,而將保持組件朝向突出部 的後方朝水平方向移動。即,即使物品未被配置於預先決 定的位置的情況,投光感測器及受光感測器,也可以藉由 檢出突出部來檢出物品的位置。因此,可以把握保持組件 停止的正確位置,藉由從該正確的位置,使保持組件朝水 平方向移動,就可以將保持部正確地插入突出部的下方。 由此,即使被載置在棚的物品未被配置於預先決定的位置 的情況,也可以移載該物品。 且,較佳是,前述昇降移動部,是比進行與將前述保 持組件從前述初期移動位置上昇或下降的動作不同的動作 的情況,更降低爲了檢出過負荷而作用於前述保持組件的 力的閎値,使前述保持組件從前述初期移動位置上昇或下 降,進一步,判斷爲降低後的前述閩値以上的力是作用在 201202111 前述保持組件的情況時,停止前述保持組件。 由此,使檢出過負荷用的閩値比通常的値更降低,使 保持組件從初期移動位置上昇或下降,當判斷爲降低後的 閾値以上的力是作用在保持組件的情況時,停止保持組件 。由此,當保持組件的上昇或下降時,保持組件會被突出 部干涉而使該閾値以上的小的力作用於保持組件的話,保 持組件會停止,就可以防止突出部的破損。 且,較佳是,前述保持部,是被配置於前述投光感測 器及前述受光感測器的下方,前述水平移動部,是在前述 投光感測器及前述受光感測器檢出前述突出部的狀態下, 使前述保持組件朝前述水平方向移動。 由此,保持部,是被配置於投光感測器及受光感測器 的下方,在投光感測器及受光感測器檢出突出部的狀態下 ,使保持組件朝水平方向移動。即,因爲在檢出突出部的 狀態下將保持組件朝水平方向移動,所以突出部的檢出後 ,意外的動作不會發生,可以確實地將保持部正確地插入 突出部的下方。由此,即使被載置在棚的物品未被配置於 預先決定的位置的情況,也可以移載該物品。 且,較佳是,前述水平移動部,是使前述保持組件朝 前述水平方向移動時,反覆判斷前述投光感測器及前述受 光感測器是否檢出前述突出部。 由此,使保持組件朝水平方向移動時,反覆判斷投光 感測器及受光感測器是否檢出突出部。因此’藉由持續確 認突出部的檢出,就可以檢出意外的動作,可以確實地將 -8 - 201202111 保持部正確地插入突出部的下方。由此,即使被載置在棚 的物品未被配置於預先決定的位置的情況,也可以移載該 物品。 且,較佳是,前述水平移動部,是進一步判斷爲前述 投光感測器及前述受光感測器未檢出前述突出部的情況時 ,停止前述保持組件的朝前述水平方向的移動。 由此,判斷爲投光感測器及受光感測器未檢出突出部 的情況時,停止保持組件的朝水平方向的移動。因此,藉 由突出部的檢出的有無,保持組件的朝水平方向的移動距 離也可以正確地把握,進一步可以確實地將保持部正確地 插入突出部的下方。由此,即使被載置在棚的物品未被配 置於預先決定的位置的情況,也可以移載該物品。 且,較佳是,前述保持組件,是進一步從前述保持部 突出的位置,在與前述投光感測器也就是第一投光感測器 及前述受光感測器也就是第一受光感測器相面對的位置, 具備第二投光感測器及第二受光感測器。 由此,保持組件,是在相面對的位置,具備2對的投 光感測器及受光感測器。即,保持組件,因爲是在前後兩 側各具備1對投光感測器及受光感測器,所以被配置於保 持組件的前後兩側的物品,皆可以移載。 又,本發明,不是只有這種自動倉庫可以實現,對於 將自動倉庫所具備的控制器所進行的處理作爲步驟的自動 倉庫作中的物品的移載方法也可以實現,將如此的特徵的 步驟作成在電腦實行的程式和集成電路來實現等也可以。 -9- 201202111 且’如此的程式,不用說當然也可以透過CD-ROM等的記 錄媒體及網際網路等的傳送媒體流通。 [發明的效果] 依據本發明的自動倉庫,即使被載置在棚的物品未被 配置於預先決定的位置的情況,也可以移載該物品。 【實施方式】 以下,對於本發明的實施例,使用圖面詳細說明。 第1圖,是顯示本發明的實施例中的自動倉庫10的 一例的立體圖。 自動倉庫10,是在棚及移載裝置之間進行物品的收授 的裝置。如同圖所示,自動倉庫10,具備:棚300、移載 裝置200及控制器10(^ 棚3 00,是保管複數的物品20的保管庫,在載置台 3 1 0上被載置複數物品20 »在此,物品20,是例如具有朝 凸緣等的水平方向突出的突出部21,收納半導體設備用的 晶圓的 FOUP(前開口式通用容器、Front Opening Unified Pod)。又,物品20所具有的突出部21,不限定於凸緣, 只要是朝水平方向突出的突出部的話任何的形狀也可以。 移載裝置200,是從棚300收取被載置於載置台310 上的物品20之後,朝其他的載置台310上移載該物品20 。此移載裝置200,具備··保持組件210、昇降驅動部220 、水平驅動部230、水平支撐體240及垂直支撐體250。 -10- 201202111 保持組件2 1 0,是將物品2 0所具有的突出部: 的金屬製的構件。在此,突出部21,是例如被設 20上部的凸緣。對於此保持組件210的構成的詳細 後述。 昇降驅動部220,是將保持組件210朝上下方丨 所示的Ζ軸方向)上昇或下降的金屬製的棒狀構件 藉由控制器1 〇〇的控制,藉著由伺服馬達等使昇降 220朝上下方向昇降,使保持組件210昇降。 水平驅動部23 0,是將保持組件210朝水平方丨 所示的X軸方向)移動的金屬製的棒狀構件。即, 制器1 00的控制,藉著由伺服馬達等使水平驅動部 水平方向移動,使昇降驅動部220及保持組件2 1 0 方向移動。 水平支撐體240,是將水平驅動部23 0支撐的 的棒狀構件。 垂直支撐體250,是將水平支撐體240支撐的 的棒狀構件。 又,保持組件210、昇降驅動部220 '水平驅動 、水平支撐體240及垂直支撐體250的材質,不限 屬,只要可以精度佳地進行物品20的移動的話, 任何的材質也可以,形狀也被未限定。 控制器1 〇〇,是將保持組件2 1 0的移動位置控 制裝置。在此,控制器100,是藉由專用的電腦系 人電腦等的泛用的電腦系統實行程式而實現。對於 Π保持 在物品 ,是如 旬(同圖 。即, 驅動部 句(同圖 藉由控 23 0朝 朝水平 金屬製 金屬製 部230 定於金 樹脂等 制的控 統或個 此控制 -11 - 201202111 器1 00的功能構成的詳細,是如後述。 接著,詳細說明保持組件210的構成。 第2圖,是顯示本實施例中的保持組件210的構成的 立體圖。具體而言,同圖,是將如第1圖所示的保持組件 2 1 〇及昇降驅動部220,從後側(如第1圖所示的Y軸方向 的正側)所見時的圖。 如同圖所示,保持組件2 1 0,是在昇降驅動部220的 下面部被連接配置的箱型的構件,具備:保持部211、第 —投光感測器2 1 2、第一受光感測器2 1 3、第二投光感測 器2 1 4及第二受光感測器2 1 5。 保持部211,是被配置於保持組件210的下部,朝保 持組件210的前後方向(同圖所示的X軸方向)延伸的一對 的平板狀的構件。即,保持部2 1 1,是由並列在保持組件 210的左右方向(同圖所示的Y軸方向)的二枚的平板狀的 構件所構成。此保持部211,是藉由被插入物品20的突出 部21的下方並上昇,將突出部21保持,移載物品20。 第一投光感測器2 1 2,是被配置於保持組件2 1 0的右 側前方(同圖所示的X軸方向的正側且Y軸方向的正側)的 先端部,朝向第一受光感測器213將光投光的裝置。且, 第一受光感測器2 1 3,是被配置於保持組件2 1 0的左側前 方(同圖所示的X軸方向的正側且Y軸方向的負側)的先端 部,將來自第一投光感測器212的光受光的光電感測器。 即,第一投光感測器2 1 2及第一受光感測器2 1 3,是 相面對地被配置在從保持部211朝水平方向(同圖所示的 •12- 201202111 χ軸方向的正側)突出的位置。且,使光從第一投光感測 器212被投光,藉由在第一受光感測器213使該光被受光 ,可以檢出在第一投光感測器2 1 2及第一受光感測器2 1 3 之間是否具有物品。 第二投光感測器214,是被配置於保持組件210的右 側後方(同圖所示的X軸方向的負側且Y軸方向的正側)的 先端部,朝向第二受光感測器2 1 5將光投光的裝置。且, 第二受光感測器2 1 5,是被配置於保持組件2 1 0的左側後 方(同圖所示的X軸方向的負側且Y軸方向的負側)的先端 部,將來自第二投光感測器2 1 4的光受光的光電感測器。 即,第二投光感測器2 1 4及第二受光感測器2 1 5,是 相面對地被配置在從保持部211朝水平方向(同圖所示的 X軸方向的負側)及上方(同圖所示的Z軸方向的正側)突出 的位置。且,使光從第二投光感測器214被投光,藉由再 第二受光感測器215使該光被受光,就可以檢出在第二投 光感測器2 1 4及第二受光感測器2 1 5之間是否具有物品。 如此,一對的第一投光感測器2 1 2及第一受光感測器 2 1 3、及一對的第二投光感測器2 1 4及第二受光感測器2 1 5 ,是被配置於隔著昇降驅動部220彼此在前後方向(同圖 所示的X軸方向)相面對的位置。且,保持部211’是被 配置於第一投光感測器2 1 2、第一受光感測器2 1 3、第二 投光感測器2 1 4及第二受光感測器2 1 5的下方。 接著,詳細說明控制器1 〇〇的功能構成。 第3圖,是顯示本實施例中的控制器1 〇〇的功能構成 -13- 201202111 的方塊圖。 控制器100,是藉由控制移載裝置200的昇降驅動部 2 2 0及水平驅動部2 3 0的移動位置,來控制保持組件2 1 0 的移動位置。如同圖所示,控制器100,具備:初期移動 部110、昇降移動部120及水平移動部130。 初期移動部110,是將保持組件210朝初期移動位置 移動的處理部。具體而言,初期移動部110,是爲了使第 一投光感測器212及第一受光感測器213 (或是第二投光感 測器214及第二受光感測器215)被配置於突出部21的兩 側方且上方,並且使保持部211被配置於突出部21的前 方且上方,而將保持組件210朝初期移動位置移動。 又,初期移動部1 1 〇,是爲了使第一投光感測器2 1 2 及第一受光感測器213(或是第二投光感測器214及第二受 光感測器215)被配置於突出部21的兩側方且下方,並且 使保持部211被配置於突出部21的前方且下方,而將保 持組件2 1 0朝初期移動位置移動也可以。 昇降移動部120,是使保持組件210從初期移動位置 上昇或下降,若第一投光感測器212及第一受光感測器 213(或是第二投光感測器214及第二受光感測器21 5)是檢 出突出部21的情況時,停止保持組件2 1 0。 具體而言,昇降移動部120,是比進行與將保持組件 210從初期移動位置上昇或下降的動作不同的動作的情況 ,更降低爲了檢出過負荷用而作用於保持組件210的力的 閾値,使保持組件210從初期移動位置上昇或下降。且’ -14- 201202111 昇降移動部120,若判斷爲降低後的閾値以上的力 保持組件2 1 0的情況時,停止保持組件2 1 0。 水平移動部130,是爲了使保持部211插入突 的下方,而將被停止的保持組件2 1 0朝向突出部2 方朝水平方向移動。具體而言,水平移動部130, 一投光感測器212及第一受光感測器213 (或是第二 測器214及第二受光感測器21 5)檢出突出部21的 ,使保持組件210朝水平方向移動。 在此,水平移動部130,當使保持組件210朝 向移動時,反覆判斷第一投光感測器212及第一受 器213(或是第二投光感測器214及第二受光感測器 否檢出突出部21。且,水平移動部130,是判斷爲 光感測器2 1 2及第一受光感測器2 1 3(或是第二投光 214及第二受光感測器21 5)未檢出突出部21的情 停止朝保持組件210的水平方向的移動。 接著,詳細說明控制器1 00所進行的動作。 第4圖,是顯示本實施例中的控制器100的動 例的流程圖。 且,第5圖A〜第8圖B,是說明本實施例中 器100的動作用的圖。 如第4圖所示,首先,初期移動部110,是將 件210朝初期移動位置移動(S 102)。具體而言,如 A及第5圖B所示,初期移動部110,是藉由控制 動部230,將保持組件210,從第5圖A所示位置 作用於 ϋ部21 1的後 是在第 投光感 狀態下 水平方 光感測 215)是 第一投 感測器 況時, 作的一 的控制 保持組 襄5圖 水平驅 ,朝物 -15- 201202111 品2 0的方向(同圖所示的X軸方向的正側)水平移動,而 將保持組件210,朝第5圖Β所示的初期移動位置移動。 在此說明初期移動位置。 第6圖Α及第6圖Β,是說明初期移動位置用的圖。 具體而言,第6圖A,是將第5圖B所示的保持組件210 及物品20,從側方(第5圖B所示的Y軸方向的正側)所 見的圖,第6圖B,是將第5圖B所示的保持組件210及 物品20,從上方(第5圖B所示的Z軸方向的正側)所見的 圖。 如這些的圖所示,初期移動位置,是使第一投光感測 器212及第一受光感測器213,被配置於突出部21的兩側 方(同圖所示的Y軸方向兩側)且上方(同圖所示的Z軸方 向的正側)的位置。即,初期移動位置,是使第一投光感 測器2 1 2被配置於突出部2 1的側面部2 1 b的側方且上方 的位置,使第一受光感測器213被配置於突出部21的側 面部21c的側方且上方的位置。 且,進一步,初期移動位置,是保持部211被配置於 突出部21的前方(同圖所示的X軸方向的負側)且上方(同 圖所示的Z軸方向的正側)的位置。即,初期移動位置, 是保持部211被配置於突出部21的前面部21a的前方且 上方的位置。 如此,初期移動部11〇,是藉由控制水平驅動部230 ,使第一投光感測器2 1 2及第一受光感測器2 1 3被配置於 突出部21的兩側方且上方,並且爲了使保持部211被配 -16- 201202111 置於突出部21的前方且上方,而將保持組件210,朝初期 移動位置移動。 又,初期移動位置,是第一投光感測器2 1 2及第一受201202111 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to an automatic warehouse having a transfer device for transferring articles and a transfer method for transferring articles by the automatic warehouse. [Prior Art] In recent years, an automatic warehouse having a shed on which articles are placed and a transfer device for transporting the articles between the sheds has been widely put into practical use. In such an automatic warehouse, the transfer device stops before the article placed in the shed, the article is held, and the article is transferred between the shed and the shed (for example, refer to Patent Document 1). For example, in such an automatic warehouse, the substrate for a semiconductor device stops the transfer device before the substrate is jammed, and the substrate cassette is transferred between the transfer device and the shed. Here, in the conventional automatic warehouse, the transfer device is stopped before the article by the servo motor or the like to position the stop position of the transfer device, and the article is transferred between the shed and the shed. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] JP-A-2001-298069 (Summary of the Invention) (The problem to be solved by the present invention) However, in a conventional automatic warehouse, if it is placed in a shed When the item is not placed in a predetermined position, there is a problem that the item cannot be transferred -5 - 201202111. That is, in the conventional automatic warehouse, the transfer device is stopped at a predetermined position by a servo motor or the like. However, for example, if the article placed on the shed collapses on the shed, the transfer device cannot be stopped correctly before the article. Therefore, in the conventional automatic warehouse, when the article is held by the transfer device, the article may be dropped or dropped and broken. Therefore, in the conventional automatic warehouse, when the article placed on the shed is not placed at a predetermined position, the transfer device cannot hold the article correctly, and the article cannot be transferred. Here, the present invention has been made in view of such a problem, and an object thereof is to provide an automatic warehouse and a transfer method for transferring an article in the automatic warehouse, even if an article placed on the shed is not disposed at a predetermined position. You can also transfer the item. (Means for Solving the Problem) In order to achieve the above object, an automatic warehouse according to the present invention includes: a shed for placing an article having a protruding portion that protrudes in a horizontal direction; and a holding member that holds the protruding portion And a transfer device for transferring the article and a controller for controlling a movement position of the holding unit, wherein the holding unit includes: a holding portion that holds the protruding portion; and a light projection sensor and a light receiving sensor The controller is disposed to face each other at a position protruding from the holding portion, and the controller includes an initial moving portion for arranging the light projecting sensor and the light receiving sensor on the protruding portion. The two sides are positioned above and above, and the holding portion is disposed on the front side of the protruding portion -6 - 201202111 or above, or the projection sensor and the light receiving sensor are disposed on the protruding portion The two sides of the two sides and the lower side, and the holding portion is disposed in front of and below the protruding portion, and moves the holding member toward the initial moving position; and the lifting and moving portion When the holding unit is raised or lowered from the initial movement position, when the projection sensor and the light receiving sensor detect the protruding portion, the holding unit is stopped; and the horizontal moving unit is for The holding portion is inserted below the protruding portion, and the stopped holding unit is moved in the horizontal direction toward the rear of the protruding portion. Therefore, when the projection sensor and the light-receiving sensor detect the protruding portion, the holding unit is inserted in order to stop the lifting operation of the holding unit from the initial movement position, and the holding portion is inserted below the protruding portion. Moves toward the rear of the protruding portion in the horizontal direction. That is, even if the article is not placed at a predetermined position, the light projection sensor and the light receiving sensor can detect the position of the article by detecting the protruding portion. Therefore, it is possible to grasp the correct position at which the holding member is stopped, and by moving the holding member in the horizontal direction from the correct position, the holding portion can be correctly inserted below the protruding portion. Thereby, even if the article placed on the shed is not placed at a predetermined position, the article can be transferred. Further, it is preferable that the lifting and lowering moving portion is different from the operation of raising or lowering the holding unit from the initial movement position, and further reducing the force acting on the holding unit for detecting an overload. In the meantime, the holding member is raised or lowered from the initial movement position, and further, it is determined that the force equal to or higher than the lower limit is the case where the holding member is applied to 201202111, and the holding unit is stopped. As a result, the enthalpy for detecting the overload is lowered more than the normal enthalpy, and the holding unit is raised or lowered from the initial movement position, and when the force equal to or higher than the threshold 判断 is determined to act on the holding unit, the cessation is stopped. Keep the components. Thereby, when the holding member is lifted or lowered, the holding member is interfered by the protruding portion and a small force above the threshold 作用 is applied to the holding member, and the holding member is stopped, and the breakage of the protruding portion can be prevented. Preferably, the holding portion is disposed below the light projection sensor and the light receiving sensor, and the horizontal moving portion is detected by the light projection sensor and the light receiving sensor. In the state of the protruding portion, the holding member is moved in the horizontal direction. Thereby, the holding portion is disposed below the light projection sensor and the light receiving sensor, and the holding unit is moved in the horizontal direction while the projection sensor and the light receiving sensor detect the protruding portion. In other words, since the holding unit is moved in the horizontal direction in a state where the protruding portion is detected, an unexpected operation does not occur after the detection of the protruding portion, and the holding portion can be surely inserted under the protruding portion. Thereby, even if the article placed on the shed is not placed at a predetermined position, the article can be transferred. Further, preferably, the horizontal moving unit repeatedly determines whether the projection sensor and the light receiving sensor detect the protruding portion when the holding unit is moved in the horizontal direction. Thereby, when the holding unit is moved in the horizontal direction, it is repeatedly determined whether or not the projection sensor and the light receiving sensor detect the protruding portion. Therefore, by continuously confirming the detection of the protruding portion, it is possible to detect an unexpected movement, and it is possible to surely insert the holding portion of the -8 - 201202111 correctly below the protruding portion. Thereby, even if the article placed on the shed is not placed at a predetermined position, the article can be transferred. Further, preferably, the horizontal moving unit stops the movement of the holding unit in the horizontal direction when it is determined that the projection sensor and the light receiving sensor have not detected the protruding portion. Therefore, when it is determined that the projection sensor and the light receiving sensor have not detected the protruding portion, the movement of the holding unit in the horizontal direction is stopped. Therefore, by the presence or absence of the detection of the protruding portion, the moving distance of the holding unit in the horizontal direction can be accurately grasped, and the holding portion can be surely inserted into the lower portion of the protruding portion. Thereby, even if the article placed on the shed is not placed at a predetermined position, the article can be transferred. Preferably, the holding unit is further protruded from the holding portion, and the first light-receiving sensor, that is, the first light-emitting sensor and the light-receiving sensor, that is, the first light-receiving sensor The position facing the device has a second light-emitting sensor and a second light-receiving sensor. Thus, the holding unit is provided with two pairs of projection sensors and light receiving sensors at facing positions. In other words, since the holding unit has one pair of the light-emitting sensor and the light-receiving sensor on each of the front and rear sides, the articles placed on the front and rear sides of the holding unit can be transferred. Moreover, the present invention can be realized not only in such an automatic warehouse, but also in the method of transferring the articles in the automatic warehouse in which the processing performed by the controller provided in the automatic warehouse is performed as a step. It is also possible to implement a program and an integrated circuit implemented in a computer. -9- 201202111 And such a program can be distributed through a recording medium such as a CD-ROM or a transmission medium such as the Internet. [Effect of the Invention] According to the automatic warehouse of the present invention, even if the article placed on the shed is not placed at a predetermined position, the article can be transferred. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail using the drawings. Fig. 1 is a perspective view showing an example of an automatic warehouse 10 in an embodiment of the present invention. The automatic warehouse 10 is a device for collecting articles between the shed and the transfer device. As shown in the figure, the automatic warehouse 10 includes a shed 300, a transfer device 200, and a controller 10 (a shed 300), which is a storage for storing a plurality of articles 20, and is loaded with a plurality of articles on the mounting table 310. In this case, the article 20 is, for example, a FOP (Front Opening Unified Pod) that has a protruding portion 21 that protrudes in a horizontal direction such as a flange and that accommodates a wafer for a semiconductor device. The protruding portion 21 is not limited to the flange, and any shape may be used as long as it is a protruding portion that protrudes in the horizontal direction. The transfer device 200 collects the article 20 placed on the mounting table 310 from the shed 300. Thereafter, the article 20 is transferred to the other mounting table 310. The transfer device 200 includes the holding unit 210, the elevation driving unit 220, the horizontal driving unit 230, the horizontal support 240, and the vertical support 250. - 201202111 The holding unit 203 is a metal member that protrudes from the article 20. Here, the protruding portion 21 is, for example, a flange provided with an upper portion of 20. The holding member 210 is configured. The details will be described later. 220 is a metal rod-shaped member that raises or lowers the holding member 210 in the direction of the x-axis shown by the upper and lower sides, by the controller 1 ,, and the lift 220 is moved up and down by a servo motor or the like. Lifting and lowering causes the holding assembly 210 to move up and down. The horizontal drive unit 230 is a metal rod-shaped member that moves the holding unit 210 in the X-axis direction shown in the horizontal direction. In other words, the control of the controller 100 is moved in the horizontal direction by the servo motor or the like, and the elevation drive unit 220 and the holding unit 2 10 are moved. The horizontal support body 240 is a rod-shaped member that supports the horizontal drive portion 230. The vertical support 250 is a rod-shaped member that supports the horizontal support 240. Further, the material of the holding unit 210 and the elevation driving unit 220' horizontally driven, the horizontal supporting body 240, and the vertical supporting body 250 are not limited, and any material may be used as long as the movement of the article 20 can be performed with high precision. Unrestricted. The controller 1 is a moving position control device that will hold the assembly 2 10 . Here, the controller 100 is realized by executing a program by a general-purpose computer system such as a dedicated computer-based computer. For the Π Π 物品 物品 物品 物品 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( - 201202111 The details of the functional configuration of the device 100 will be described later. Next, the configuration of the holding unit 210 will be described in detail. Fig. 2 is a perspective view showing the configuration of the holding unit 210 in the present embodiment. This is a view when the holding unit 2 1 〇 and the elevation driving unit 220 shown in Fig. 1 are seen from the rear side (the positive side in the Y-axis direction shown in Fig. 1). The module 203 is a box-shaped member that is connected to the lower surface of the elevation drive unit 220, and includes a holding unit 211, a first light-emitting sensor 2 1 2, and a first light-receiving sensor 2 1 3, The second light-emitting sensor 2 14 and the second light-receiving sensor 2 1 5 . The holding portion 211 is disposed at a lower portion of the holding assembly 210 toward the front-rear direction of the holding assembly 210 (the X-axis shown in the same figure) a pair of flat members extending in the direction), that is, the holding portion 2 1 1 is juxtaposed in Two flat members in the left-right direction of the assembly 210 (the Y-axis direction shown in the figure) are held. The holding portion 211 is raised by being inserted below the protruding portion 21 of the article 20 to protrude. The portion 21 holds and transfers the article 20. The first light projecting sensor 2 1 2 is disposed on the right side of the holding unit 2 10 (the positive side in the X-axis direction and the positive side in the Y-axis direction) The front end portion of the side is a device for directing light toward the first light receiving sensor 213. Further, the first light receiving sensor 2 1 3 is disposed in front of the left side of the holding unit 2 1 0 (shown in the same figure) The tip end portion of the positive side in the X-axis direction and the negative side in the Y-axis direction receives the light from the first light-emitting sensor 212. That is, the first light-emitting sensor 2 1 2 And the first light-receiving sensor 213 is disposed facing away from the holding portion 211 in the horizontal direction (the positive side in the χ-axis direction of the 12-201202111 shown in the figure). The light is projected from the first light-emitting sensor 212, and the light is received by the first light-receiving sensor 213, so that the first light-emitting sensation can be detected. Whether there is an item between the device 2 1 2 and the first light-receiving sensor 2 1 3 . The second light-emitting sensor 214 is disposed at the right rear side of the holding assembly 210 (negative in the X-axis direction shown in the figure) The front end portion of the side and the positive side in the Y-axis direction projects toward the second light-receiving sensor 2 15 to project light, and the second light-receiving sensor 2 15 is disposed on the holding assembly 2 1 The tip end portion of the left rear side of 0 (the negative side in the X-axis direction and the negative side in the Y-axis direction shown in the figure) receives the light from the second projection sensor 2 14 and receives the light. In other words, the second light-emitting sensor 2 14 and the second light-receiving sensor 2 15 are disposed facing each other in the horizontal direction from the holding portion 211 (the negative side in the X-axis direction shown in the same figure). ) and the position above (the positive side in the Z-axis direction shown in the figure). And, the light is emitted from the second light-emitting sensor 214, and the light is received by the second light-receiving sensor 215, and the second light-emitting sensor 2 1 4 and the Whether there is an item between the two light-receiving sensors 2 1 5 . Thus, a pair of first light-emitting sensor 2 1 2 and first light-receiving sensor 2 1 3, and a pair of second light-emitting sensor 2 1 4 and second light-receiving sensor 2 1 5 It is disposed at a position facing each other in the front-rear direction (the X-axis direction shown in the figure) across the elevation drive unit 220. The holding portion 211 ′ is disposed on the first light projecting sensor 2 1 2 , the first light receiving sensor 2 1 3 , the second light emitting sensor 2 1 4 , and the second light receiving sensor 2 1 . Below 5. Next, the functional configuration of the controller 1A will be described in detail. Fig. 3 is a block diagram showing the functional configuration -13 - 201202111 of the controller 1 in the present embodiment. The controller 100 controls the movement position of the holding unit 2 10 by controlling the movement positions of the elevation drive unit 220 and the horizontal drive unit 203 of the transfer device 200. As shown in the figure, the controller 100 includes an initial movement unit 110, a lifting and lowering unit 120, and a horizontal movement unit 130. The initial moving unit 110 is a processing unit that moves the holding unit 210 toward the initial moving position. Specifically, the initial moving unit 110 is configured to configure the first light-emitting sensor 212 and the first light-receiving sensor 213 (or the second light-emitting sensor 214 and the second light-receiving sensor 215) On the both sides of the protruding portion 21 and above, the holding portion 211 is disposed in front of and above the protruding portion 21 to move the holding unit 210 toward the initial moving position. Moreover, the initial moving unit 1 1 是 is for the first light-emitting sensor 2 1 2 and the first light-receiving sensor 213 (or the second light-emitting sensor 214 and the second light-receiving sensor 215) It is disposed on both sides of the protruding portion 21 and below, and the holding portion 211 is disposed in front of and below the protruding portion 21, and the holding member 210 may be moved toward the initial moving position. The lifting and moving unit 120 raises or lowers the holding unit 210 from the initial moving position, and the first light-emitting sensor 212 and the first light-receiving sensor 213 (or the second light-emitting sensor 214 and the second light-receiving unit) When the sensor 21 5) is the case where the protruding portion 21 is detected, the holding unit 2 10 is stopped. Specifically, the elevation moving unit 120 is different from the operation of raising or lowering the holding unit 210 from the initial movement position, and further reduces the threshold of the force acting on the holding unit 210 for detecting the overload. The holding assembly 210 is raised or lowered from the initial moving position. Further, when the lift moving unit 120 determines that the force of the lower threshold 値 is higher than the lower threshold 保持, the holding unit 2 1 0 is stopped. The horizontal moving portion 130 is configured to move the stopped holding unit 2 1 0 toward the protruding portion 2 in the horizontal direction so that the holding portion 211 is inserted below the protrusion. Specifically, the horizontal moving unit 130, the light-emitting sensor 212 and the first light-receiving sensor 213 (or the second detector 214 and the second light-receiving sensor 215) detect the protruding portion 21, so that The holding assembly 210 is moved in the horizontal direction. Here, the horizontal moving unit 130 repeatedly determines the first light-emitting sensor 212 and the first receiver 213 (or the second light-emitting sensor 214 and the second light-receiving sensor) when the holding unit 210 is moved toward the movement. Whether the protrusion 21 is detected, and the horizontal moving unit 130 determines that the photo sensor 2 1 2 and the first light receiving sensor 2 1 3 (or the second light projecting 214 and the second light receiving sensor) 21) The movement of the horizontal movement of the holding unit 210 is stopped when the protruding portion 21 is not detected. Next, the operation performed by the controller 100 will be described in detail. Fig. 4 is a view showing the controller 100 in the present embodiment. Fig. 5A to Fig. 8B are diagrams for explaining the operation of the apparatus 100 in the present embodiment. As shown in Fig. 4, first, the initial moving unit 110 is a member 210. Moving to the initial moving position (S102). Specifically, as shown in A and FIG. 5B, the initial moving unit 110 controls the moving unit 230 to move the holding unit 210 from the position shown in FIG. Acting on the crotch portion 21 1 is the control of the first one when the horizontal square light sensing 215) is the first throwing sensor condition in the first light-sensing state. Keep the group 襄5 horizontal drive, the direction of the object -15- 201202111 product 20 (the positive side in the X-axis direction shown in the figure) moves horizontally, and the component 210 will be held, towards the initial stage shown in Figure 5 Move the position to move. The initial movement position will be described here. Fig. 6 and Fig. 6 are diagrams for explaining the initial movement position. Specifically, FIG. 6A is a view of the holding unit 210 and the article 20 shown in FIG. 5B from the side (the positive side in the Y-axis direction shown in FIG. 5B). FIG. B is a view of the holding unit 210 and the article 20 shown in FIG. 5B from the upper side (the positive side in the Z-axis direction shown in FIG. 5B). As shown in these figures, the initial movement position is such that the first light-emitting sensor 212 and the first light-receiving sensor 213 are disposed on both sides of the protruding portion 21 (two in the Y-axis direction shown in the same figure). The position of the side) and the upper side (the positive side in the Z-axis direction shown in the figure). In other words, the initial light-receiving position is such that the first light-receiving sensor 2 1 2 is disposed on the side of the side surface portion 2 1 b of the protruding portion 21 and is positioned above the first light-receiving sensor 213. A position on the side and the upper side of the side surface portion 21c of the protruding portion 21. Further, the initial movement position is a position where the holding portion 211 is disposed in front of the protruding portion 21 (the negative side in the X-axis direction shown in the drawing) and above (the positive side in the Z-axis direction shown in the same figure). . In other words, the initial movement position is a position at which the holding portion 211 is disposed in front of and above the front surface portion 21a of the protruding portion 21. In this manner, the initial moving unit 11 is configured such that the first light-emitting sensor 2 1 2 and the first light-receiving sensor 2 1 3 are disposed on both sides of the protruding portion 21 and above by controlling the horizontal driving unit 230. In order to place the holding portion 211 in front of and above the protruding portion 21, the holding portion 211 is moved to the initial moving position. Moreover, the initial moving position is the first projection sensor 2 1 2 and the first subject

光感測器2 1 3被配置於突出部2 1的兩側方(同圖所示的Y 軸方向兩側)且下方(同圖所示的Z軸方向的負側),並且保 持部211被配置於突出部21的前方(同圖所示的X軸方向 的負側)且下方(同圖所示的Z軸方向的負側)的位置也可以 〇 此情況,初期移動部π 〇,是爲了藉由控制昇降驅動 部220及水平驅動部230,使第一投光感測器212及第一 受光感測器2 1 3被配置於突出部21的兩側方且下方,並 且使保持部211被配置於突出部21的前方且下方,而將 保持組件2 1 0,朝初期移動位置移動》 返回至第4圖,接著,昇降移動部120,是降低作用 於檢出過負荷用的保持組件210的力的閩値(S 104)。即, 昇降移動部120,是與比進行與將保持組件210從初期移 動位置上昇或下降的動作不同的動作的情況相比,爲了使 保持組件210從初期移動位置上昇或下降的動作的情況的 該閩値更小,而降低該閩値。 且,昇降移動部120,是藉由昇降驅動部220將保持 組件210從初期移動位置上昇或下降(S106)。 在此,初期移動位置,當保持部211、第一投光感測 器212及第一受光感測器213被配置於突出部21的上方 的位置情況時,昇降移動部1 20就將保持組件2 1 0從初期 -17- 201202111 移動位置下降。且,初期移動位置,當保持部211、第一 投光感測器212及第一受光感測器213被配置於突出部21 的下方的位置情況時,昇降移動部1 2 0就將保持組件2 1 0 從初期移動位置上昇。 且,昇降移動部120,是在保持組件210的上昇或下 降中,判斷在保持組件210是否有過負荷異常發生(S108) 。即,昇降移動部120,是藉由突出部21接觸保持組件 2 1 0等,來判斷降低後的閾値以上的力是否作用在保持組 件 2 1 0。 且,昇降移動部1 20,當判斷爲該閾値以上的力作用 在保持組件2 1 0的情況時(在S 1 0 8爲Y E S ),停止保持組 件 2 1 0 (S 1 1 0)。 且,昇降移動部1 20,當判斷爲該閾値以上的力未作 用在保持組件2 1 0的情況時(在S 1 08爲NO),就判斷第一 投光感測器212及第一受光感測器213是否檢出突出部 21(S112)。 昇降移動部120,也判斷爲第一投光感測器212及第 —受光感測器213未檢出突出部21的情況時(在S112爲 NO),進一步將保持組件210昇降(S 106)。 且,昇降移動部120,當判斷爲第一投光感測器212 及第一受光感測器213檢出突出部21的情況時(在SU2 爲YES),停止保持組件210(S114)。 即,如第7圖A及第7圖B所示,昇降移動部120, 直到判斷爲第一投光感測器2 1 2及第一受光感測器2 1 3檢 -18- 201202111 出突出部21爲止,將保持組件210,從初期移動位置昇降 〇 又,昇降移動部120,當判斷爲第一投光感測器212 及第一受光感測器213檢出突出部21的情況時,馬上將 保持組件210停止也可以,使用正時器等在預定時間後停 止也可以,使用編碼器等在預定距離移動後停止也可以。 返回至第4圖,接著,水平移動部130,是控制水平 驅動部230,使保持組件210朝水平方向移動(S116)» 具體而言,如第8圖A及第8圖B所示,水平移動部 130,是爲了使保持部211插入突出部21下方而將保持組 件210,從如第7圖A及第7圖B所示的位置,朝向突出 部2 1後方(同圖所示的X軸方向的正側)朝水平方向移動 。又,水平移動部130,是在第一投光感測器212及第一 受光感測器2 1 3檢出突出部21的狀態下,控制水平驅動 部230,使保持組件210朝水平方向移動。 返回至第4圖,接著,水平移動部130,是判斷第一 投光感測器212及第一受光感測器213是否檢出突出部 21(S118)。 水平移動部130,當判斷爲第一投光感測器212及第 —受光感測器213檢出突出部21的情況時(在S118爲 YES),進一步使保持組件210朝水平方向移動(S1 16)。如 此’水平移動部1 3 0,是反覆判斷第一投光感測器2 1 2及 第一受光感測器213是否檢出突出部21。 且’水平移動部130,當判斷爲第一投光感測器212 -19- 201202111 及第一受光感測器213未檢出突出部21的情況時(在S118 爲NO),停止朝保持組件210的水平方向的移動(S120)。 即,如第8圖A及第8圖B所示,水平移動部130,是直 到第一投光感測器212及第一受光感測器213檢出突出部 2 1爲止,將保持組件2 1 0朝水平方向移動。 且,昇降移動部120,是控制昇降驅動部220,將保 持組件210上昇,藉由將物品20的突出部21保持在保持 部211,移載該物品2 0(S122)。 最後,控制器1 〇〇所進行的動作終了。 依據以上的本發明的自動倉庫10,當第一投光感測器 212及第一受光感測器213檢出突出部21的情況時,將來 自保持組件210的初期移動位置的昇降動作停止,並爲了 使保持部211插入突出部21的下方,而將保持組件210 朝向突出部21後方朝水平方向移動。即,物品20即使被 配置於預先決定的位置的情況,第一投光感測器2 1 2及第 一受光感測器213,也可以藉由檢出突出部21,來檢出物 品20的位置。因此,可以把握保持組件210停止的正確 位置,從該正確位置,藉由使保持組件2 1 0朝水平方向移 動,就可以將保持部2 11正確地插入突出部2 1的下方。 由此,即使被載置在棚3 00的物品20未被配置於預先決 定的位置的情況,也可以移載該物品20。 且,使檢出過負荷用的閾値比通常的値更降低,使保 持組件2 1 0從初期移動位置上昇或下降,當判斷爲降低後 的閩値以上的力作用於保持組件2 1 0的情況時,停止保持 -20- 201202111 組件210。由此,在保持組件210的上昇或下降時,保持 組件2 1 0干涉突出部2 1而使該閾値以上的小的力作用於 保持組件210的話,保持組件210會停止,就可以防止突 出部2 1的破損。 且,保持部211,是被配置於第一投光感測器212及 第一受光感測器2 1 3的下方,在第一投光感測器2 1 2及第 —受光感測器2 1 3檢出突出部2 1的狀態下,使保持組件 210朝水平方向移動。即,因爲在檢出突出部21的狀態下 使保持組件2 1 0朝水平方向移動,所以在突出部2 1的檢 出後意外的動作不會發生,可以確實地將保持部211正確 地插入突出部21的下方。 且,使保持組件2 1 0朝水平方向移動時,反覆判斷第 一投光感測器2 1 2及第一受光感測器2 1 3是否檢出突出部 21。因此,藉由持續確認突出部21的檢出,可以檢出意 外的動作,可以確實地將保持部211正確地插入突出部21 的下方。 且’當判斷爲第一投光感測器212及第一受光感測器 213未檢出突出部21的情況時,停止保持組件210的朝水 平方向的移動。因此,藉由突出部21的檢出的有無,也 可以正確地把握保持組件210的朝水平方向的移動距離, 進一步可以確實地將保持部211正確地插入突出部21的 下方。 如以上’依據本發明,即使被載置在棚3 00的物品20 未被配置於預先決定的位置的情況,也可以移載該物品2 0 -21 - 201202111 以上,雖依據實施例說明本發明的自動倉庫 本發明不限定於此實施例。 即,這次所揭示實施例只是例示,並不是限 明的範圍不是上述的說明而是如申請專利範圍所 含:申請專利範圍、及其均等的部分、及其範圍 的變更。 例如,在本實施例中,物品20,是被配置於 21〇的前方,第一投光感測器212及第一受光感 ,是檢出物品20的突出部21的有無,移載物品 ,物品20,是被配置於保持組件210的後方,第 測器2 1 4及第二受光感測器2 1 5,是檢出物品20 21的有無,移載物品20也可以。由此,被配置 t 件2 1 0的前後兩側的物品2 0,皆可以移載。 且,在本實施例中,昇降移動部120,雖是 出過負荷的閾値的方式,來檢出過負荷異常。但 移動部120,是不降低該閾値其中檢出過負荷異 ,不檢出過負荷異常也可以。The photo sensor 2 1 3 is disposed on both sides of the protruding portion 21 (both sides in the Y-axis direction shown in the same drawing) and below (the negative side in the Z-axis direction shown in the same figure), and the holding portion 211 The position of the front side of the protruding portion 21 (the negative side in the X-axis direction shown in the figure) and the lower side (the negative side in the Z-axis direction shown in the figure) may be arranged in this case, and the initial moving portion is π 〇. In order to control the elevation drive unit 220 and the horizontal drive unit 230, the first light-emitting sensor 212 and the first light-receiving sensor 21 are disposed on both sides of the protruding portion 21 and below, and are held The portion 211 is disposed in front of and below the protruding portion 21, and moves the holding unit 2 10 to the initial moving position" to return to the fourth drawing. Then, the moving and lowering unit 120 is lowered to act on the detection overload. The enthalpy of the force of the assembly 210 is maintained (S 104). In other words, the elevation moving unit 120 is a case in which the holding unit 210 is moved up or down from the initial movement position as compared with the case where the operation of raising or lowering the holding unit 210 from the initial movement position is performed. The cockroach is smaller and lowers the cockroach. Further, the elevation moving unit 120 raises or lowers the holding unit 210 from the initial movement position by the elevation driving unit 220 (S106). Here, in the initial movement position, when the holding portion 211, the first light-emitting sensor 212, and the first light-receiving sensor 213 are disposed above the protruding portion 21, the lifting and lowering moving portion 120 will hold the assembly. 2 1 0 from the initial -17- 201202111 moved position down. In the initial movement position, when the holding portion 211, the first light-emitting sensor 212, and the first light-receiving sensor 213 are disposed below the protruding portion 21, the lifting and lowering moving portion 120 will hold the assembly. 2 1 0 Increases from the initial movement position. Further, the elevation moving portion 120 determines whether or not an overload abnormality has occurred in the holding unit 210 during the ascending or descending of the holding unit 210 (S108). In other words, the raising/lowering moving portion 120 determines whether or not the force above the lowered threshold 作用 acts on the holding member 2 1 0 by the contact portion 21 contacting the holding unit 210 or the like. Further, when the lift moving portion 1 20 determines that the force above the threshold 作用 acts on the holding unit 2 1 0 (Y E S in S 1 0 8), the holding member 2 1 0 (S 1 1 0) is stopped. Further, when it is determined that the force above the threshold 未 does not act on the holding unit 2 1 0 (NO at S 1 08), the lifting/lowering movement unit 20 determines the first light-emitting sensor 212 and the first light-receiving unit. Whether the sensor 213 detects the protrusion 21 (S112). When the elevation moving unit 120 determines that the first projection sensor 212 and the first light receiving sensor 213 have not detected the protruding portion 21 (NO in S112), the holding unit 210 is further raised and lowered (S 106). . When the first moving light detector 212 and the first light receiving sensor 213 determine that the protruding portion 21 is detected (YES in SU2), the lifting and lowering movement unit 120 stops the holding unit 210 (S114). That is, as shown in FIG. 7A and FIG. 7B, the moving portion 120 is raised and lowered until it is determined that the first light-emitting sensor 2 1 2 and the first light-receiving sensor 2 1 3 are detected -18-201202111 When the unit 21 is lifted and lowered from the initial movement position, the moving unit 120 is lifted and lowered, and when the first light-emitting sensor 212 and the first light-receiving sensor 213 are determined to detect the protruding portion 21, The holding unit 210 may be stopped immediately, or may be stopped after a predetermined time using a timer or the like, and may be stopped after moving at a predetermined distance using an encoder or the like. Returning to Fig. 4, next, the horizontal moving portion 130 controls the horizontal driving portion 230 to move the holding unit 210 in the horizontal direction (S116). Specifically, as shown in Figs. 8A and 8B, the level is horizontal. The moving portion 130 is for moving the holding unit 210 into the rear of the protruding portion 21 from the position shown in FIGS. 7A and 7B in order to insert the holding portion 211 under the protruding portion 21 (X shown in the same figure) The positive side of the axis direction moves in the horizontal direction. Further, in the horizontal movement unit 130, the horizontal driving unit 230 is controlled to move the holding unit 210 in the horizontal direction in a state where the first light-emitting sensor 212 and the first light-receiving sensor 213 detect the protruding portion 21. . Returning to Fig. 4, next, the horizontal moving unit 130 determines whether or not the first light-emitting sensor 212 and the first light-receiving sensor 213 have detected the protruding portion 21 (S118). When it is determined that the first light-emitting sensor 212 and the first light-receiving sensor 213 detect the protruding portion 21 (YES at S118), the horizontal moving unit 130 further moves the holding unit 210 in the horizontal direction (S1). 16). Thus, the 'horizontal moving unit 1 300' repeatedly judges whether or not the first light-emitting sensor 2 1 2 and the first light-receiving sensor 213 detect the protruding portion 21. And the 'horizontal moving portion 130, when it is determined that the first light-emitting sensor 212 -19-201202111 and the first light-receiving sensor 213 have not detected the protruding portion 21 (NO at S118), stopping toward the holding assembly The horizontal movement of 210 (S120). That is, as shown in FIGS. 8A and 8B, the horizontal moving unit 130 will hold the assembly 2 until the first light-emitting sensor 212 and the first light-receiving sensor 213 detect the protruding portion 2 1 . 1 0 moves in the horizontal direction. Further, the elevation moving unit 120 controls the elevation driving unit 220 to raise the holding unit 210, and holds the protruding portion 21 of the article 20 in the holding portion 211 to transfer the article 20 (S122). Finally, the action performed by controller 1 is finished. According to the automatic warehouse 10 of the present invention described above, when the first light-emitting sensor 212 and the first light-receiving sensor 213 detect the protruding portion 21, the lifting operation from the initial moving position of the holding unit 210 is stopped. In order to insert the holding portion 211 below the protruding portion 21, the holding unit 210 is moved in the horizontal direction toward the rear of the protruding portion 21. In other words, even when the article 20 is placed at a predetermined position, the first light-emitting sensor 2 1 2 and the first light-receiving sensor 213 can detect the object 20 by detecting the protruding portion 21. position. Therefore, it is possible to grasp the correct position at which the holding unit 210 is stopped, and by moving the holding unit 2 10 0 in the horizontal direction from the correct position, the holding portion 2 11 can be correctly inserted below the protruding portion 2 1 . Thereby, even if the article 20 placed on the shed 300 is not placed at a predetermined position, the article 20 can be transferred. Further, the threshold 检 for detecting the overload is lowered more than the normal 値, and the holding unit 2 10 0 is raised or lowered from the initial movement position, and when the pressure is determined to be lower than the 闽値, the force is applied to the holding unit 2 10 . In case of situation, stop holding component -20-201202111 component 210. Thus, when the holding member 210 interferes with the protruding portion 21 and the small force above the threshold 作用 acts on the holding assembly 210 when the holding assembly 210 is raised or lowered, the holding member 210 is stopped, and the protruding portion can be prevented. 2 1 damage. The holding unit 211 is disposed below the first light-emitting sensor 212 and the first light-receiving sensor 2 1 3 , and the first light-emitting sensor 2 1 2 and the first light-receiving sensor 2 When the protruding portion 21 is detected, the holding unit 210 is moved in the horizontal direction. In other words, since the holding unit 2 10 0 is moved in the horizontal direction in a state where the protruding portion 21 is detected, an unexpected operation does not occur after the detection of the protruding portion 21, and the holding portion 211 can be surely inserted correctly. Below the protrusion 21. Further, when the holding unit 210 is moved in the horizontal direction, it is repeatedly determined whether or not the first light-emitting sensor 2 1 2 and the first light-receiving sensor 2 1 3 have detected the protruding portion 21. Therefore, by continuously checking the detection of the protruding portion 21, an unexpected operation can be detected, and the holding portion 211 can be surely inserted under the protruding portion 21 with certainty. And when it is determined that the first light-emitting sensor 212 and the first light-receiving sensor 213 have not detected the protruding portion 21, the movement of the holding member 210 in the horizontal direction is stopped. Therefore, the movement distance of the holding unit 210 in the horizontal direction can be accurately grasped by the presence or absence of the detection of the protruding portion 21, and the holding portion 211 can be surely inserted under the protruding portion 21 with certainty. As described above, according to the present invention, even if the article 20 placed on the shed 300 is not placed at a predetermined position, the article 2 0 - 21 - 201202111 or more can be transferred, and the present invention will be described based on the embodiment. Automatic warehouse The invention is not limited to this embodiment. That is, the presently disclosed embodiments are merely illustrative, and the scope of the invention is not limited to the scope of the invention, but the scope of the patent application, the equivalent parts thereof, and the scope thereof. For example, in the present embodiment, the article 20 is placed in front of 21 ,, the first light-emitting sensor 212 and the first light-receiving sensation, and the presence or absence of the protruding portion 21 of the detected article 20, and the transfer of the article. The article 20 is disposed behind the holding unit 210, and the detector 2 1 4 and the second light receiving sensor 2 15 are used to detect the presence or absence of the article 20 21 and the article 20 may be transferred. Thereby, the articles 20 on the front and rear sides of the t-piece 2 1 0 are all transportable. Further, in the present embodiment, the elevation moving unit 120 detects the overload abnormality even though the threshold of the overload is applied. However, the moving unit 120 does not reduce the threshold, and the detected overload is not detected, and the overload abnormality may not be detected.

且,在本實施例中,水平移動部130,雖是 感測器及受光感測器檢出突出部2 1的狀態下, 件2 1 0朝水平方向移動。但是,水平移動部1 3 0 持部211插入突出部21下方的話,不是在檢出多 的狀態下,使保持組件2 1 0朝水平方向移動也可J 且,在本實施例中,水平移動部130,當使 1 〇,但是 制。本發 示,即包 內的全部 保持組件 測器2 1 3 20。但是 二投光感 的突出部 於保持組 以降低檢 是,昇降 常也可以 在以投光 使保持組 ,只要保 妄出部21 2。 保持組件 -22- 201202111 21〇朝水平方向移動時,反覆判斷投光感測器及受光感測 器是否檢出突出部21。但是,水平移動部130,不限定於 反覆判斷,例如,確認投光感測器及受光感測器有1次檢 出突出部21的話,就使保持組件210朝水平方向移動也 可以。 且,在本實施例中,水平移動部1 3 0,當判斷爲投光 感測器及受光感測器未檢出突出部2 1的情況時,停止朝 保持組件210的水平方向的移動。但是,水平移動部130 ,不判斷突出部2 1的檢出,而是例如將保持組件2 1 0朝 預定的距離水平移動後,停止保持組件210的移動也可以 〇 且,在本實施例中,保持組件2 1 0,是在前後兩側具 備二對投光感測器及受光感測器。但是,保持組件2 1 0,是 只有在片側具備一對的投光感測器及受光感測器也可以。 [產業上的利用可能性] 本發明,可以利用於自動倉庫,特別是,即使被載置 在棚的物品未被配置於預先決定的位置的情況,也可以移 載該物品的自動倉庫。 【圖式簡單說明】 [第1圖]第1圖,是顯示本發明的實施例中的自動倉 庫的一例的立體圖。 [第2圖]第2圖,是顯示本實施例中的保持組件的構 -23- 201202111 成的立體圖。 [第3圖]第3圖,是顯示本實施例中的控制器的功能 構成的方塊圖。 [第4圖]第._ 4圖,是顯示本實施例中的控制器的動作 的一例的流程圖。 [第5圖A]第5圖A,是說明本實施例中的控制器的 動作用的圖。 [第5圖B]第5圖B,是說明本實施例中的控制器的 動作用的圖。 [第6圖A]第6圖A,是說明本實施例中的控制器的 動作用的圖。 [第6圖B]第6圖B,是說明本實施例中的控制器的 動作用的圖。 [第7圖A]第7圖A,是說明本實施例中的控制器的 動作用的圖。 [第7圖B]第7圖B,是說明本實施例中的控制器的 動作用的圖。 [第8圖A]第8圖A,是說明本實施例中的控制器的 動作用的圖。 [第8圖B]第8圖B,是說明本實施例中的控制器的 動作用的圖。 【主要元件符號說明】 1 Q :自動倉庫 -24- 201202111 2 0 :物品 21 :突出部 2 1 a :前面部 2 1 b :側面部 2 1 c :側面部 1〇〇 :控制器 1 1 〇 :初期移動部 120 :昇降移動部 1 3 0 :水平移動部 200 :移載裝置 2 1 0 :保持組件 21 1 :保持部 2 1 2 :第一投光感測器 2 1 3 :第一受光感測器 2 1 4 :第二投光感測器 2 1 5 :第二受光感測器 220 :昇降驅動部 2 3 0 :水平驅動部 240 :水平支撐體 25 0 :垂直支撐體 3 00 :棚 310 :載置台Further, in the present embodiment, the horizontal moving unit 130 moves in the horizontal direction in a state where the sensor and the light-receiving sensor detect the protruding portion 2 1 . However, when the horizontal moving portion 1130 holding portion 211 is inserted below the protruding portion 21, the holding unit 2100 is moved in the horizontal direction in a state where the number of the moving portions 211 is not detected. In the present embodiment, horizontal movement is performed. Part 130, when making 1 〇, but made. The present invention, i.e., all of the components in the package, is 2 1 3 20 . However, the highlight of the second projection is to maintain the group to reduce the detection, and the lifting can also be used to keep the group in the light, as long as the portion 21 2 is kept. Holding unit -22- 201202111 21 When moving in the horizontal direction, it is repeatedly judged whether or not the projection sensor 21 is detected by the light-emitting sensor and the light-receiving sensor. However, the horizontal movement unit 130 is not limited to the repeated determination. For example, if it is confirmed that the projection sensor and the light-receiving sensor have detected the protruding portion 21 once, the holding unit 210 may be moved in the horizontal direction. Further, in the present embodiment, when it is determined that the projection sensor and the light-receiving sensor have not detected the projection 2, the horizontal movement portion 130 stops the movement in the horizontal direction of the holding unit 210. However, the horizontal moving portion 130 does not judge the detection of the protruding portion 21, but for example, after the holding member 210 is horizontally moved by a predetermined distance, the movement of the holding member 210 is stopped, and in this embodiment, The holding unit 2 10 0 is provided with two pairs of light-emitting sensors and light-receiving sensors on the front and rear sides. However, the holding unit 203 may be provided with only a pair of light-emitting sensors and light-receiving sensors on the sheet side. [Industrial Applicability] The present invention can be utilized in an automatic warehouse. In particular, even if an article placed on a shed is not placed at a predetermined position, the automatic warehouse of the article can be transferred. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] Fig. 1 is a perspective view showing an example of an automatic warehouse in an embodiment of the present invention. [Fig. 2] Fig. 2 is a perspective view showing the structure of the holding assembly of the present embodiment -23 - 201202111. [Fig. 3] Fig. 3 is a block diagram showing the functional configuration of the controller in the present embodiment. [Fig. 4] Fig. 4 is a flowchart showing an example of the operation of the controller in the present embodiment. [Fig. 5A] Fig. 5A is a view for explaining the action of the controller in the present embodiment. [Fig. 5B] Fig. 5B is a view for explaining the action of the controller in the present embodiment. [Fig. 6A] Fig. 6A is a view for explaining the action of the controller in the embodiment. [Fig. 6B] Fig. 6B is a view for explaining the action of the controller in the present embodiment. [Fig. 7A] Fig. 7A is a view for explaining the action of the controller in the present embodiment. [Fig. 7B] Fig. 7B is a view for explaining the action of the controller in the present embodiment. [Fig. 8] A] Fig. 8A is a view for explaining the action of the controller in the present embodiment. [Fig. 8B] Fig. 8B is a view for explaining the action of the controller in the present embodiment. [Description of main component symbols] 1 Q : Automatic warehouse-24- 201202111 2 0 : Item 21: Projection 2 1 a : Front part 2 1 b : Side part 2 1 c : Side part 1〇〇: Controller 1 1 〇 : initial movement unit 120 : elevation moving unit 1 3 0 : horizontal movement unit 200 : transfer device 2 1 0 : holding unit 21 1 : holding unit 2 1 2 : first light-emitting sensor 2 1 3 : first light-receiving unit Sensor 2 1 4 : second light-emitting sensor 2 1 5 : second light-receiving sensor 220 : lifting drive unit 2 3 0 : horizontal driving portion 240 : horizontal support body 25 0 : vertical support body 3 00 : Shed 310: mounting table

Claims (1)

201202111 七、申請專利範圍: 1. —種自動倉庫,具備:供載置具有朝水平方向突出 的突出部的物品用的棚、及設有將前述突出部保持的保持 組件並移載前述物品的移載裝置、及將前述保持組件的移 動位置控制用的控制器, 前述保持組件,具備: 保持部,是將前述突出部保持:及 投光感測器及受光感測器,是在從前述保持部突出的 位置被相面對地配置, 前述控制器,具備: 初期移動部,是爲了使前述投光感測器及前述受光感 測器被配置於前述突出部的兩側方且上方,並且使前述保 持部被配置於前述突出部的前方且上方,或是,爲了使前 述投光感測器及前述受光感測器被配置於前述突出部的兩 側方且下方,並且使前述保持部被配置於前述突出部的前 方且下方,而將前述保持組件朝初期移動位置移動;及 昇降移動部,是使前述保持組件從前述初期移動位置 上昇或下降,若前述投光感測器及前述受光感測器檢出前 述突出部的情況時,停止前述保持組件;及 水平移動部,是爲了使前述保持部插入前述突出部的 下方,而將被停止的前述保持組件朝向前述突出部的後方 朝水平方向移動。 2. 如申請專利範圍第1項的自動倉庫,其中,前述昇 降移動部,是比進行與將前述保持組件從前述初期移動位 -26- 201202111 置上昇或下降的動作不同的動作的情況,更降低爲了檢出 過負荷而作用於前述保持組件的力的閩値,使前述保持組 件從前述初期移動位置上昇或下降, 進一步,判斷爲降低後的前述閾値以上的力是作用在 前述保持組件的情況時,停止前述保持組件。 3. 如申請專利範圍第1項的自動倉庫,其中,前述保 持部,是被配置於前述投光感測器及前述受光感測器的下 方, 前述水平移動部,是在前述投光感測器及前述受光感 測器檢出前述突出部的狀態下,使前述保持組件朝前述水 平方向移動。 4. 如申請專利範圍第3項的自動倉庫,其中,前述水 平移動部,是使前述保持組件朝前述水平方向移動時,反 覆判斷前述投光感測器及前述受光感測器是否檢出前述突 出部。 5. 如申請專利範圍第4項的自動倉庫,其中,前述水 平移動部,是進一步當判斷爲前述投光感測器及前述受光 感測器未檢出前述突出部的情況時’停止前述保持組件的 朝前述水平方向的移動。 6. 如申請專利範圍第1項的自動倉庫’其中,前述保 持組件’是進一步在從前述保持部突出的位置’且在與前 述投光感測器也就是第一投光感測器及前述受光感測器也 就是第一受光感測器相面對的位置’具備第二投光感測器 及第二受光感測器。 -27- 201202111 7. —種移載方法,是由自動倉庫進行物品移載的方法 ,該自動倉庫,具備:供載置具有朝水平方向突出的突出 部的物品用的棚、及設有將前述突出部保持的保持組件並 移載前述物品的移載裝置、及將前述保持組件的移動位置 控制的控制器, 前述保持組件,具備: 保持部,是將前述突出部保持;及 投光感測器及受光感測器,是在從前述保持部突出的 位置被相面對地配置: 前述移載方法,包含: 初期移動步驟,是爲了使前述投光感測器及前述受光 感測器被配置於前述突出部的兩側方且上方,並且使前述 保持部被配置於前述突出部的前方且上方,或是,爲了使 前述投光感測器及前述受光感測器被配置於前述突出部的 兩側方且下方,並且使前述保持部被配置於前述突出部的 前方且下方,而將前述保持組件朝初期移動位置移動;及 昇降移動步驟,是使前述保持組件從前述初期移動位 置上昇或下降,若前述投光感測器及前述受光感測器檢出 前述突出部的情況時,停止前述保持組件:及 水平移動步驟,是爲了使前述保持部插入前述突出部 的下方,而將被停止的前述保持組件朝向前述突出部的後 方朝水平方向移動。 8. 如申請專利範圍第7項的移載方法,其中,在前述 昇降移動步驟中,比進行與將前述保持組件從前述初期移 -28- 201202111 動位置上昇或下降的動作不同的動作的情況,更降低爲了 檢出過負荷而作用於前述保持組件的力的閩値,使前述保 持組件從前述初期移動位置上昇或下降。 9. 如申請專利範圍第7項的移載方法,其中,前述保 持部,是被配置於前述投光感測器及前述受光感測器的下 方, 在前述水平移動步驟中,在前述投光感測器及前述受 光感測器檢出前述突出部的狀態下,使前述保持組件朝前 述水平方向移動。 10. 如申請專利範圍第9項的移載方法,其中,在前 述水平移動步驟中,使前述保持組件朝前述水平方向移動 時,反覆判斷前述投光感測器及前述受光感測器是否檢出 前述突出部。 11·如申請專利範圍第10項的移載方法,其中,在前 述水平移動步驟中,進一步判斷爲前述投光感測器及前述 受光感測器未檢出前述突出部的情況時,停止前述保持組 件的朝前述水平方向的移動。 -29-201202111 VII. Patent application scope: 1. An automatic warehouse having: a shed for placing an article having a protruding portion protruding in a horizontal direction; and a holding member for holding the protruding portion and transferring the aforementioned article a transfer device and a controller for controlling a movement position of the holding unit, wherein the holding unit includes: a holding unit that holds the protruding portion: a light projection sensor and a light receiving sensor, The position at which the holding portion protrudes is disposed to face each other, and the controller includes an initial movement unit for arranging the light projection sensor and the light receiving sensor on both sides of the protruding portion and above. Further, the holding portion is disposed in front of and above the protruding portion, or the light-emitting sensor and the light-receiving sensor are disposed on both sides of the protruding portion and below, and the holding is performed a portion disposed in front of and below the protruding portion to move the holding member toward an initial moving position; and a lifting and lowering portion to move the holding member from When the initial movement position is raised or lowered, when the projection sensor and the light receiving sensor detect the protruding portion, the holding unit is stopped; and the horizontal moving unit is for inserting the holding portion into the protruding portion. Below, the aforementioned holding member to be stopped is moved in the horizontal direction toward the rear of the protruding portion. 2. The automatic warehouse according to claim 1, wherein the lifting and lowering movement is different from an operation of raising or lowering the holding unit from the initial movement position -26-201202111, and The enthalpy of the force acting on the holding unit for detecting the overload is increased, and the holding unit is raised or lowered from the initial movement position. Further, it is determined that the force equal to or higher than the threshold 降低 after the reduction is acting on the holding unit. In the case, the aforementioned holding assembly is stopped. 3. The automatic warehouse according to claim 1, wherein the holding portion is disposed below the light projection sensor and the light receiving sensor, and the horizontal moving portion is in the light projection sensing The holder and the light-receiving sensor detect the protruding portion, and move the holding unit toward the horizontal direction. 4. The automatic warehouse according to claim 3, wherein the horizontal moving unit repeatedly determines whether the light-emitting sensor and the light-receiving sensor detect the aforementioned when the holding unit is moved in the horizontal direction. Highlights. 5. The automatic warehouse according to claim 4, wherein the horizontal moving unit further stops the maintaining when it is determined that the projection sensor and the light receiving sensor do not detect the protruding portion. The movement of the assembly in the aforementioned horizontal direction. 6. The automatic warehouse of claim 1, wherein the holding member is further at a position protruding from the holding portion and is in front of the light projection sensor, that is, the first light projection sensor and the aforementioned The light-receiving sensor, that is, the position facing the first light-receiving sensor, has a second light-emitting sensor and a second light-receiving sensor. -27- 201202111 7. A method for transferring a product, which is a method for transferring an item by an automatic warehouse, the automatic warehouse having a shed for placing an item having a protruding portion that protrudes in a horizontal direction, and a transfer unit that holds the holding unit and a transfer device that transfers the article, and a controller that controls a movement position of the holding unit. The holding unit includes: a holding portion that holds the protruding portion; and a light-sensing feeling The detector and the light-receiving sensor are disposed to face each other at a position protruding from the holding portion: the transfer method includes: an initial moving step for causing the light-emitting sensor and the light-receiving sensor Arranged on both sides of the protruding portion and above, and the holding portion is disposed in front of and above the protruding portion, or in order to arrange the light projection sensor and the light receiving sensor in the foregoing Two sides of the protruding portion and the lower side, and the holding portion is disposed in front of and below the protruding portion, and moves the holding assembly toward the initial moving position; In the step of moving up and down, the holding unit is raised or lowered from the initial movement position, and when the projection sensor and the light receiving sensor detect the protruding portion, the holding unit and the horizontal movement step are stopped. In order to insert the holding portion below the protruding portion, the stopped holding unit is moved in the horizontal direction toward the rear of the protruding portion. 8. The transfer method of claim 7, wherein in the step of moving up and down, an operation different from an operation of raising or lowering the holding member from the initial position to the initial position -28 - 201202111 is performed. Further, the enthalpy of the force acting on the holding member for detecting the overload is further lowered, and the holding member is raised or lowered from the initial movement position. 9. The transfer method of claim 7, wherein the holding portion is disposed below the light projection sensor and the light receiving sensor, and in the horizontal moving step, the light is projected The sensor and the light-receiving sensor move the holder in the horizontal direction while detecting the protruding portion. 10. The transfer method of claim 9, wherein in the horizontal movement step, when the holding unit is moved in the horizontal direction, it is repeatedly determined whether the light-emitting sensor and the light-receiving sensor are inspected. The aforementioned protrusions are obtained. The transfer method of claim 10, wherein, in the horizontal movement step, when it is determined that the projection sensor and the light-receiving sensor do not detect the protruding portion, stopping the foregoing The movement of the assembly in the aforementioned horizontal direction is maintained. -29-
TW100115758A 2010-05-12 2011-05-05 Automatic warehouse and transfer method TW201202111A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2010/003209 WO2011141960A1 (en) 2010-05-12 2010-05-12 Automatic warehouse and transfer method

Publications (1)

Publication Number Publication Date
TW201202111A true TW201202111A (en) 2012-01-16

Family

ID=44914032

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100115758A TW201202111A (en) 2010-05-12 2011-05-05 Automatic warehouse and transfer method

Country Status (2)

Country Link
TW (1) TW201202111A (en)
WO (1) WO2011141960A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI584398B (en) * 2015-05-29 2017-05-21 Temporary platform automatic correction device and method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062268Y2 (en) * 1988-02-19 1994-01-19 大日本スクリーン製造株式会社 Cassette detection device for cassette carrier
JP2000012644A (en) * 1998-06-25 2000-01-14 Kokusai Electric Co Ltd Cassette transfer system
US6506009B1 (en) * 2000-03-16 2003-01-14 Applied Materials, Inc. Apparatus for storing and moving a cassette
JP3962705B2 (en) * 2003-06-05 2007-08-22 東京エレクトロン株式会社 Processing equipment
JP4239748B2 (en) * 2003-08-08 2009-03-18 アシスト テクノロジーズ ジャパン株式会社 Transport device
JP2005194009A (en) * 2004-01-05 2005-07-21 Asyst Shinko Inc Suspension type conveying carriage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI584398B (en) * 2015-05-29 2017-05-21 Temporary platform automatic correction device and method thereof

Also Published As

Publication number Publication date
WO2011141960A1 (en) 2011-11-17

Similar Documents

Publication Publication Date Title
JP6710622B2 (en) Transfer device and transfer method
TWI527149B (en) Inertial wafer centering end effector and transport apparatus
JP5353336B2 (en) Substrate detection device and substrate transfer device including the same
JP2012523682A (en) Method for automatically measuring and teaching the position of an object in a substrate processing system by means of a sensor carrier and associated sensor carrier
US10056282B2 (en) Method and system of robot fork calibration and wafer pick-and-place
CN110729225B (en) Wafer handling apparatus and method thereof
CN105632997B (en) The safe pick-up method and system of silicon chip in silicon wafer carrying device
JP5422345B2 (en) Processing equipment
JP2014036175A (en) Substrate transfer device and substrate transfer method and storage medium for substrate transfer
US8444129B2 (en) Methods of verifying effectiveness of a put of a substrate onto a substrate support
JP2013125811A (en) Inclination correction device of stacked wafer and stacking device of wafer
CN109841547B (en) Wafer cassette, wafer cassette alignment system, and wafer cassette alignment method
TW201202111A (en) Automatic warehouse and transfer method
US9978631B2 (en) Wafer pick-and-place method and system
TWI721860B (en) Substrate mapping device, its mapping method and mapping teaching method
TWI464391B (en) Optical detection system
JP5119744B2 (en) Component detection method, component detection device, IC handler component detection method, and IC handler
US7720558B2 (en) Methods and apparatus for mapping carrier contents
TWI273083B (en) Apparatus for transporting for polishing wafers
JP2006080345A (en) Wafer carrying arm, and wafer carrying apparatus
CN111668131A (en) System and method for detecting position deviation of mechanical arm and wafer
JP2011009345A (en) End effector, wafer transfer robot, and wafer transfer device
US11062935B2 (en) Low profile wafer manipulator
KR100342397B1 (en) Wafer counting apparatus and method of SMIF
CN115799118A (en) Wafer bonding machine and wafer bonding method