JP5353336B2 - Substrate detection device and substrate transfer device including the same - Google Patents

Substrate detection device and substrate transfer device including the same Download PDF

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JP5353336B2
JP5353336B2 JP2009062799A JP2009062799A JP5353336B2 JP 5353336 B2 JP5353336 B2 JP 5353336B2 JP 2009062799 A JP2009062799 A JP 2009062799A JP 2009062799 A JP2009062799 A JP 2009062799A JP 5353336 B2 JP5353336 B2 JP 5353336B2
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substrate
sensor
optical axis
sensors
apparatus according
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JP2010219209A (en
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正幸 松本
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株式会社安川電機
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate detecting device capable of detecting a jumping out of a substrate stored in a cassette with a minimum number of sensors. <P>SOLUTION: The substrate detecting device that detects substrates W stored horizontally in the cassette in multiple vertical stages includes sensor supports 6a, 6b, first sensors 9a, 9b disposed on the sensor supports so as to have axes horizontally, second sensors 9c, 9d installed on the sensor supports to have optical axes inclined at a certain angle from the horizontal, and a sensor support driving means 5 of moving the sensor supports in front-rear and up-down directions with respect to a peripheral edge of the substrate W. The optical axes of the first and the second sensors are moved up and down to block the optical axes H, S by the substrate W, thereby detecting at least whether the substrate is present, the slanting state of the substrate, and the substrate jumping out on the basis of the interval at which the optical axes of the first and the second sensors are blocked. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an apparatus for detecting a state of a semiconductor wafer or a glass substrate housed in a cassette, and a substrate transfer apparatus provided with the apparatus.

In a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, or these inspection apparatuses, a substrate transfer apparatus is used to accurately and cleanly transfer a substrate such as a semiconductor wafer or a glass substrate to a desired position. The substrate transport device holds and transports a substrate on a hand provided on an arm or a similar mechanism. Since the substrate transport apparatus often transports a substrate from a cassette in which the substrates are stored in multiple stages, it is necessary to grasp information about how the substrate is stored in the cassette. In other words, in addition to the presence / absence of a substrate, it is necessary to start conveyance after grasping whether it is not inserted diagonally, whether a plurality of cassettes are inserted in one stage of the cassette, or protruded from a predetermined position. .
Therefore, as a substrate detection apparatus for performing such substrate detection, for example, a device described in Patent Document 1 is known. In particular, in the apparatus disclosed in Patent Document 1, the vertical movement is performed a plurality of times in order to detect the jumping out of the substrate from the cassette. Alternatively, a plurality of sensors are provided to reduce the number of up and down movements.

JP 2004-214462 A

As described above, the conventional substrate detection apparatus such as Patent Document 1 requires a plurality of vertical movements in order to detect the jumping-out of the substrate from the cassette, and thus has a problem that the substrate detection time cannot be shortened. It was. In addition, when a large number of sensors are provided, there is a problem that the structure of the detection apparatus becomes complicated and the cost increases.
The present invention has been made in view of such problems, and an object of the present invention is to provide a substrate detection apparatus that can quickly detect the jumping out of a substrate stored in a cassette with a minimum number of sensors.

In order to solve the above problem, the present invention is configured as follows.
The invention according to claim 1 is a substrate detection apparatus for detecting a disk-shaped substrate accommodated in a cassette in a multi-stage vertically in a horizontal state, and the sensor support and the sensor support so that the optical axis is horizontal. A first sensor installed on the sensor support, a second sensor installed on the sensor support so that the optical axis is inclined at a certain angle from the horizontal, and the sensor support with respect to the periphery of the substrate. Sensor support driving means for causing the first and second sensors to move to the reference position when the optical axis is at the reference position when the substrate is at a reference position indicating the position where the substrate is accurately stored in the cassette. is installed in a position that is blocked by a certain said substrate, said sensor by the support drive means and the first light axis of the second sensor up and down by shielding the optical axis by the substrate, prior Symbol first at that time 2 Sen By the time the optical axis is shielded from light, to detect Shi Ying before Symbol substrate, it is to the substrate detection apparatus according to claim.
According to a second aspect of the present invention, the presence / absence of the substrate and the oblique state of the substrate are detected based on the time during which the optical axis of the first sensor is shielded. A substrate detection apparatus is provided.
According to a third aspect of the present invention, there is provided the substrate detection apparatus according to the first aspect, wherein the protrusion of the substrate is detected based on a time during which the optical axis of the second sensor is shielded.
According to a fourth aspect of the present invention, there is provided the substrate detecting apparatus according to the first aspect, wherein the first and second sensors are transmissive optical sensors each including a light receiver and a light emitter. is there.
According to a fifth aspect of the present invention, in the substrate detection apparatus according to the first aspect, the first and second sensors are reflective sensors.
According to a sixth aspect of the present invention, in the first and second sensors, the optical axis of the first sensor and the optical axis of the second sensor are shifted in the horizontal direction and aligned in the front-rear direction. The substrate detection device according to claim 1, wherein the substrate detection device is installed on a sensor support.
The invention according to claim 7, the presence of the substrate, an oblique state of the substrate, when detecting, when jumping out of the substrate, the time the first and the second sensor is shielded from light, prestored The substrate detection apparatus according to claim 1, wherein the detection is determined when the threshold value is larger than a threshold value.
According to an eighth aspect of the present invention, when the second sensor detects the protrusion of the substrate, and the first sensor detects the presence or absence of the substrate and the oblique state of the substrate, the first sensor The substrate detection apparatus according to claim 1, wherein detection of the oblique state of the substrate is a detection result.
The invention according to claim 9 is provided with a substrate detection device that detects a disk-shaped substrate accommodated in a cassette in a vertical and multistage manner in a horizontal state, and based on the information on the substrate detected by the substrate detection device, In the substrate transport apparatus for transporting a substrate, the substrate detection device includes a sensor support, a first sensor installed on the sensor support so that the optical axis is horizontal, and the optical axis is inclined at a certain angle from the horizontal. A second sensor installed on the sensor support, and the substrate transport device includes sensor support driving means for moving the sensor support back and forth and up and down with respect to a peripheral edge of the substrate . 1 and the second sensor, when said substrate is in the reference position shown accurately accommodated position in the cassette, is installed in a position where the optical axes is shielded by the substrate which is in the reference position, before The sensor supporting body drive means and the first up and down the optical axis of the second sensor by shielding the optical axis by the substrate, by the time the optical axis is shielded before Symbol second sensor at that time, detects Shi Ying before Symbol substrate, to transport the substrate based on the detection result, it is to the substrate transfer apparatus according to claim.
The invention according to claim 10 is characterized in that the substrate detection device detects the presence / absence of the substrate and the oblique state of the substrate based on the time when the optical axis of the first sensor is shielded. The substrate transfer device according to claim 9 is provided.
The invention according to claim 11 is characterized in that the substrate detection device detects the jumping out of the substrate by the time when the optical axis of the second sensor is shielded. It is what.
The invention according to claim 12 is the substrate transport according to claim 9, wherein the first and second sensors of the substrate detection device are transmissive optical sensors each including a light receiver and a light emitter. It is a device.
The invention described in claim 13 is the substrate detection apparatus according to claim 9, wherein the first and second sensors of the substrate detection apparatus are reflection type sensors.
According to a fourteenth aspect of the present invention, in the first and second sensors of the substrate detection device, the optical axis of the first sensor and the optical axis of the second sensor are shifted in the horizontal direction. The substrate transfer apparatus according to claim 9, wherein the substrate transfer apparatus is installed on the sensor support so as to line up with each other.
According to a fifteenth aspect of the present invention, the first and second sensors are shielded from light when the substrate detection device detects the presence or absence of the substrate, the oblique state of the substrate, and the protrusion of the substrate. that time, it is an substrate transfer apparatus according to claim 9, wherein the determining those detected when greater than a threshold stored in advance.
In the invention described in claim 16, when the substrate detection device detects the jumping out of the substrate, and the first sensor detects the presence or absence of the substrate and the oblique state of the substrate. The substrate transport apparatus according to claim 9, wherein the detection result is detection of the oblique state of the substrate of the first sensor.
The invention according to claim 17 is characterized in that the sensor support of the substrate detection apparatus is a hand that holds the substrate, and the first and second sensors are installed at the tip of the hand. The substrate transfer apparatus according to claim 9.
The invention according to claim 18, wherein the sensor support member driving means, the horizontal articulated arm of substrate transport according to claim 17, wherein Rukoto a device capable of moving the arm in the vertical direction It is a device.
The invention according to claim 19 outputs an alarm and stops when the substrate detection device detects at least the presence / absence of the substrate, the oblique state of the substrate, and the protrusion of the substrate. The substrate transfer device according to claim 9 is characterized.
In the invention according to claim 20, when the substrate detection device detects at least the presence / absence of the substrate, the oblique state of the substrate, and the protrusion of the substrate, the substrate is transferred from the detection result. 10. The substrate transfer apparatus according to claim 9, wherein the substrate transfer is started when it is determined that there is no hindrance to the substrate.
According to a twenty-first aspect of the present invention, there is provided a semiconductor manufacturing apparatus including the substrate transfer apparatus according to the ninth aspect.
According to a twenty-second aspect of the present invention, there is provided a liquid crystal manufacturing apparatus including the substrate transfer apparatus according to the ninth aspect.
According to a twenty-third aspect of the present invention, there is provided an inspection apparatus including the substrate transfer apparatus according to the ninth aspect.
The invention according to claim 24 is the sensor support, the first sensor installed on the sensor support so that the optical axis is horizontal, and the sensor support so that the optical axis is inclined at a certain angle from the horizontal. And a sensor support driving means for moving the sensor support back and forth and up and down with respect to the peripheral edge of the disc-shaped substrate , the first and second sensors being the substrate In the substrate detection device installed at a position where each optical axis is shielded by the substrate at the reference position when the substrate is at the reference position indicating the position accurately stored in the cassette. the method for detecting the substrate accommodated in the cassette, the steps of approximating the optical axis of said first and second sensors by the sensor support body drive means on the periphery of the substrate, drive the sensor support And moving vertically the optical axes of the first and second sensor up or down by means, while performing the step of the mobile, the time the optical axis of said first and second sensors are shielded detecting, by the time the optical axis is shielded before Symbol second sensor, and a substrate detection method characterized by comprising the steps of: detecting a protrusion of the substrate.

The present invention does not require a plurality of vertical movements of the sensor to detect the jumping out of the substrate from the cassette as in the prior art, and simultaneously detects at least the presence or absence of the substrate, the oblique state of the substrate, and the jumping out of the substrate. Thus, the substrate detection time can be shortened.
Further, in order to shorten the time for detecting the jumping out of the substrate, it is necessary to provide a larger number of sensors. However, the present invention reduces the number of sensors to the minimum and accordingly the structure of the detection device. It can be simplified and the cost can be reduced.

Side view of substrate transport apparatus to which substrate detection apparatus of the present invention is applied The top view of the board | substrate conveyance apparatus with which the board | substrate detection apparatus of this invention is applied Front view of substrate detection apparatus of the present invention Explanatory drawing which shows the waveform of the light reception signal SL which a light receiver emits when the light-shielding type optical sensors 9a and 9b rise while irradiating the beam H Explanatory drawing which shows the waveform of the light reception signal SL which a light receiver emits when the light-shielding type optical sensors 9c and 9d rise while irradiating the beam S.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a side view of a substrate transfer apparatus to which the substrate detection apparatus of the present invention is applied, and FIG. 2 is a plan view of the substrate transfer apparatus to which the substrate detection apparatus of the present invention is applied. In the figure, reference numeral 1 denotes a base, and 2 denotes a substrate transfer device, which is installed on the base 1. The substrate transfer device 2 is configured as follows. That is, a fixed base 3 is fixed on the base 1, and a transport device main body 4 that can turn and move up and down is attached to the fixed base 3. A transfer arm 5 is turnably attached to the upper surface of the transfer device body 4. The transfer arm 5 includes a second arm 5a that rotatably supports the substrate detection device 6 and a first arm 5b that rotatably supports the second arm 5a. The substrate detection device 6 is formed in a hand shape so as to be able to hold the substrate W so as to be used for carrying out the substrate from the cassette 8 and carrying the substrate into the cassette 8. In addition, it is also possible to provide the board | substrate detection apparatus 6 and the hand for board | substrate conveyance separately. Reference numeral 7 denotes a cassette table placed on the base 1, and a cassette 8 for accommodating the substrate W therein is placed on the upper surface thereof.

  Next, the board | substrate detection apparatus 6 which is the principal point of this invention is demonstrated in detail. As schematically shown in FIG. 2, the substrate detection device 6 is installed in a pair of left and right sensor supports 6a and 6b and sensor supports 6a and 6b that are spaced apart from each other in the horizontal direction, and has a certain distance in the horizontal direction. Two sets of transmissive optical sensors 9 are installed. Of the two sets of transmissive photosensors 9, one set (first transmissive photosensors 9a and 9b) is attached to the distal end side of the sensor support 6 and is used for detecting the presence / absence of the substrate and the substrate attitude. Another set (second transmission type optical sensors 9c and 9d) is attached to the rear end side of the sensor support 6 and is used for detecting the jumping out of the substrate.

The first transmissive optical sensors 9a and 9b attached to the front end side of the sensor support are a light emitter 9a attached to one of the left and right sensor supports 6a and 6b, and a light receiver attached to the other. It is comprised by the combination of 9b. FIG. 3 is a front view of the substrate detection device 6. As shown in FIG. 3A, the light emitter 9a and the light receiver 9b are horizontally attached to the back surface of the sensor support 6 with their optical axes aligned with each other. The horizontal beam H is emitted from the light emitter 9a toward the light receiver 9b, and the presence and posture of the substrate W in the course of the beam H are detected by the light reception signal of the light receiver 9b at that time.

The second transmissive optical sensors 9c and 9d are configured by a combination of a light emitter 9c attached to one of the left and right sensor supports 6a and 6b and a light receiver 9d attached to the other. As shown in FIG. 3B, the light emitter 9 c is attached to the vicinity of the front surface of the sensor support 6, and the light receiver 9 d is attached to the back surface of the sensor support 6. Further, the light emitter 9c and the light receiver 9d are mounted so as to be inclined at a certain angle from the horizontal with their optical axes aligned. The inclined beam S is irradiated from the light emitter 9c toward the light receiver 9d, and the jumping of the substrate W in the course of the beam S is detected by the light reception signal of the light receiver 9d at that time.
In this embodiment, the transmission type optical sensor is used for substrate detection, but a reflection type optical sensor may be used.

As schematically shown in FIG. 1, a large number of substrates W are vertically arranged in a horizontal posture in the cassette 8 by being inserted into grooves (not shown) formed in the inner wall of the cassette 8. It is stored and held in an aligned state. The substrate transfer device 2 inserts the front ends of the left and right sensor supports 6a and 6b of the substrate detection device 6 into the cassette 8 from the cassette substrate entrance 8a on the front surface of the cassette 8, thereby The light emitters 9a and 9c and the light receivers 9b and 9d are positioned on both the left and right sides of the end of the substrate W. Then, the substrate detection device 6 is moved in the vertical direction by moving the transfer device body 4 in the vertical direction, the positions of the beams H and S are scanned in the vertical direction at regular intervals, and the beams H and S are moved up and down. A light reception signal at each position in the direction is acquired.
In the case of the present embodiment, the control arithmetic unit 10 which is also a controller of the substrate transport apparatus 2 compares the acquired data with the threshold values for determining the presence / absence, posture and pop-out of the substrate W, thereby The presence / absence, posture, and pop-out of the substrate W in the stage are determined.

  Next, the presence / absence of the substrate W and the attitude detection method will be described in detail. FIG. 4 is an explanatory diagram showing the waveform of the light reception signal SL generated by the light receiver when the first light-shielding optical sensors 9a and 9b rise while irradiating the beam H. That is, FIG. 4B schematically shows the structure of the cassette 8, and FIG. 4A shows the waveform of the light reception signal SL corresponding thereto. As shown in FIG. 4B, in this embodiment, it is assumed that 25 substrates W can be stored in the cassette 8, and the substrate W is actually stored in a part thereof. When the light receiver determines that it is in the light receiving state, the light receiving signal SL indicates 0 level (L level), and when it is in the non-light receiving state (light shielding state), the reception signal LS indicates 1 level (H level). As shown in FIG. 4B, for the substrate W accommodated horizontally, the time during which the light reception signal SL is 1 level (H level) substantially corresponds to the thickness of the substrate W. On the other hand, for the substrate W stored in an inclined state, the time during which the light reception signal SL is 1 level (H level) corresponds to the thickness when the substrate W is projected with light in the horizontal direction. It is considerably wider than the thickness. Therefore, in this embodiment, the control arithmetic device 10 compares the time when the light reception signal SL is 1 level (H level) with the threshold value for determining the presence / absence and the posture of the substrate W, and Detect posture (oblique insertion).

Next, a method for detecting the jumping out of the substrate W will be described in detail. FIG. 5 is an explanatory diagram showing the waveform of the light reception signal SL generated by the light receiver when the second light-shielding optical sensors 9c and 9d rise while irradiating the beam S. FIG. That is, FIG. 5 (B) schematically shows the structure of the cassette 8, and FIG. 5 (A) shows the waveform of the light reception signal SL corresponding thereto. FIG. 5C is a plan view of the cassette 8. As shown in FIG. 5B, in this embodiment, it is assumed that 25 substrates W can be stored in the cassette 8, and the substrate W is actually stored in a part thereof without inclination. . The substrate W shown in FIG. 5B is a cross-sectional view taken along the optical axis of the beam S in FIG. That is, as shown in FIG. 5C, it means that the substrate W stored in the first stage of the cassette 8 protrudes forward from the substrate W stored in the 25th stage of the cassette 8. . In this embodiment, it is assumed that the substrate stored in the 25th stage of the cassette 8 is accurately stored without jumping forward. As shown in FIG. 5B, when the light receiver is determined to be in the light receiving state, the light receiving signal SL indicates 0 level (L level), and when it is in the non-light receiving state (light shielding state), the reception signal LS is 1 level. (H level). The light emitter 9c and the light receiver 9d are mounted with their optical axes aligned with each other and inclined at a certain angle from the horizontal, and the optical axis of the beam S is inclined at a certain angle from the horizontal, so that the light reception signal SL is at one level ( (H level) is proportional to the length of the cut surface of the substrate W. For this reason, the time during which the light reception signal SL is 1 level (H level) is longer for the substrate W protruding forward than for the substrate W stored accurately. Therefore, in this embodiment, the control arithmetic unit 10 detects the protrusion of the substrate W by comparing the time during which the light reception signal SL is 1 level (H level) with the threshold value for determining the protrusion of the substrate W. .
In addition, when the substrate W protrudes from the cassette 8 and is stored at an angle, the time during which the light reception signal SL is 1 level (H level) is not proportional to the length of the cut surface of the substrate W. In this case, as described above, the inclination of the substrate W is detected by the presence / absence detection and the posture detection of the substrate W detected by the first transmission optical sensor, and this is used as the detection result.

Next, a series of operations for detecting the presence / absence, posture, and pop-out of the substrate W by the substrate detection apparatus 2 will be described. First, the substrate transfer device 2 is arranged so that the front ends of the left and right sensor supports 6a and 6b of the substrate detection device 6 are further below the lowermost substrate W storage position of the cassette 8 from the cassette substrate entrance 8a on the front surface of the cassette 8. To insert. Next, the front and rear reference positions (substrates) on the left and right sides of the substrates W aligned in multiple stages in the cassette 8 are arranged at the tips of the left and right sensor supports 6a and 6b (strictly speaking, the irradiation positions of the beams H and S). (W presence / absence, posture, and pop-out detection position). At that position, the sensor supports 6a and 6b are moved upward while irradiating the beam H horizontally and at a certain angle with respect to the horizontal beam S, thereby moving the beams H and S upward. While scanning, a light reception signal at each position in the vertical direction of the beams H and S is acquired. Finally, when scanning is completed, the presence / absence, posture, and pop-out of the substrate W at each stage in the cassette 8 are detected based on the acquired data.
In this case, as described above, the detection of jumping out of the substrate W is performed based on the time during which the light reception signal SL by the second transmission type optical sensor is 1 level (H level). In addition, it is not necessary to move the sensor supports 6a and 6b upward a plurality of times, and it is possible to detect quickly. At the same time as the pop-out detection, the presence / absence and posture of the substrate are detected. After performing the detection operation, if there is no abnormality in the storage state of the substrate W in the cassette 8 or if there is no problem in the substrate conveyance of the substrate conveyance device 2 even if there is an abnormality, the substrate conveyance device 2 Start transporting. When there is an abnormality in the storage state of the substrate W and there is a problem with the substrate transfer of the substrate transfer device 2, an alarm is issued to notify the abnormality. In this case, the substrate transport apparatus 2 starts transporting the substrate W after the operator repairs the abnormal state.

DESCRIPTION OF SYMBOLS 1 Base 2 Substrate transfer apparatus 3 Fixed base 4 Transfer apparatus main body 5 Transfer arm 5a Second arm 5b First arm 6 Substrate detection apparatus 6a, 6b Sensor support 7 Cassette stand 8 Cassette 8a Cassette substrate entrance / exit 9 Light-shielding type optical sensor 9a , 9c Light emitter 9b, 9d Light receiver 10 Control arithmetic unit

Claims (24)

  1. In a substrate detection device that detects a disk-shaped substrate accommodated in a cassette in multiple stages in the upper and lower levels in a horizontal state,
    A sensor support;
    A first sensor installed on the sensor support so that the optical axis is horizontal;
    A second sensor installed on the sensor support so that the optical axis is inclined at a certain angle from the horizontal;
    Sensor support driving means for moving the sensor support back and forth and up and down with respect to the peripheral edge of the substrate,
    The first and second sensors are installed at positions where each optical axis is shielded by the substrate at the reference position when the substrate is at a reference position indicating a position where the substrate is accurately stored in the cassette. ,
    By the said by sensor support body drive means first and up and down the optical axis of the second sensor is shielding the optical axis by the substrate, the time in which the optical axis of the front Stories second sensor at that time from light , detecting Shi Ying before Symbol substrate, a substrate detection apparatus according to claim.
  2. The substrate detection apparatus according to claim 1, wherein presence / absence of the substrate and an oblique state of the substrate are detected based on a time during which the optical axis of the first sensor is shielded.
  3. The substrate detection apparatus according to claim 1, wherein the protrusion of the substrate is detected based on a time during which the optical axis of the second sensor is shielded.
  4.   The substrate detection apparatus according to claim 1, wherein the first and second sensors are transmissive optical sensors each including a light receiver and a light emitter.
  5.   The substrate detection apparatus according to claim 1, wherein the first and second sensors are reflective sensors.
  6.   The first and second sensors are installed on the sensor support so that the optical axis of the first sensor and the optical axis of the second sensor are shifted in the horizontal direction and lined up forward and backward. The board | substrate detection apparatus of Claim 1 characterized by the above-mentioned.
  7. And presence or absence of the substrate, an oblique state of the substrate, when detecting, when jumping out of the substrate, when the time the first and the second sensor is blocked is greater than a threshold stored in advance The substrate detection apparatus according to claim 1, wherein the detection is determined.
  8.   When the second sensor detects the jump out of the substrate and the first sensor detects the presence of the substrate and the oblique state of the substrate, the first sensor detects the oblique state of the substrate. The substrate detection apparatus according to claim 1, wherein the detection result is a detection result.
  9. In a substrate transport apparatus that includes a substrate detection device that detects a disk-shaped substrate housed in a cassette in multiple stages in a horizontal state, and that transports the substrate based on information on the substrate detected by the substrate detection device.
    The substrate detection device is
    A sensor support;
    A first sensor installed on the sensor support so that the optical axis is horizontal;
    A second sensor installed on the sensor support so that the optical axis is inclined at a certain angle from the horizontal,
    The substrate transport apparatus includes sensor support driving means for moving the sensor support back and forth and up and down with respect to the periphery of the substrate,
    The first and second sensors are installed at positions where each optical axis is shielded by the substrate at the reference position when the substrate is at a reference position indicating a position where the substrate is accurately stored in the cassette. ,
    By the said by sensor support body drive means first and up and down the optical axis of the second sensor is shielding the optical axis by the substrate, the time in which the optical axis of the front Stories second sensor at that time from light detects Shi Ying before Symbol substrate, to transport the substrate based on the detection result, the substrate transfer apparatus according to claim.
  10. 10. The substrate transfer device according to claim 9, wherein the substrate detection device detects the presence / absence of the substrate and the oblique state of the substrate based on a time when the optical axis of the first sensor is shielded. .
  11. The substrate transfer device according to claim 9, wherein the substrate detection device detects the protrusion of the substrate based on a time during which the optical axis of the second sensor is shielded.
  12.   10. The substrate transfer apparatus according to claim 9, wherein the first and second sensors of the substrate detection device are transmissive optical sensors each including a light receiver and a light emitter.
  13.   The substrate detection apparatus according to claim 9, wherein the first and second sensors of the substrate detection apparatus are reflective sensors.
  14.   The first sensor and the second sensor of the substrate detection device are arranged on the sensor support body so that the optical axis of the first sensor and the optical axis of the second sensor are aligned in the horizontal direction. The substrate transfer apparatus according to claim 9, wherein the substrate transfer apparatus is installed.
  15. The substrate detection device, and the presence or absence of the substrate, an oblique state of the substrate, when detecting, when jumping out of the substrate, the time the first and the second sensor is shielded from light, stored in advance 10. The substrate transfer apparatus according to claim 9, wherein the detection of the detection is judged when the value is larger than the threshold value.
  16.   When the second sensor detects the jumping out of the substrate and the first sensor detects the presence / absence of the substrate and the oblique state of the substrate, the substrate detection device detects the substrate of the first sensor. The substrate transfer apparatus according to claim 9, wherein detection of an oblique state is a detection result.
  17.   10. The substrate transport according to claim 9, wherein the sensor support of the substrate detection device is a hand that holds the substrate, and the first and second sensors are installed at the tip of the hand. apparatus.
  18. The sensor support member driving means, the horizontal articulated arm of the substrate transfer apparatus according to claim 17, wherein Rukoto a movable device the arm in the vertical direction.
  19.   10. The substrate according to claim 9, wherein when the substrate detection device detects at least the presence / absence of the substrate, the slanted state of the substrate, and the protrusion of the substrate, an alarm is output and stopped. Conveying device.
  20.   When the substrate detection device detects at least the presence / absence of the substrate, the oblique state of the substrate, and the protrusion of the substrate, from the detection result, it is determined that there is no hindrance to the conveyance of the substrate, The substrate transfer apparatus according to claim 9, wherein transfer of the substrate is started.
  21.   A semiconductor manufacturing apparatus comprising the substrate transfer apparatus according to claim 9.
  22.   A liquid crystal manufacturing apparatus comprising the substrate transfer apparatus according to claim 9.
  23.   An inspection apparatus comprising the substrate transfer apparatus according to claim 9.
  24. A sensor support, a first sensor installed on the sensor support so that the optical axis is horizontal, and a second sensor installed on the sensor support so that the optical axis is inclined at a certain angle from the horizontal. And a sensor support driving means for moving the sensor support back and forth and up and down with respect to the peripheral edge of the disc-shaped substrate, and the first and second sensors are configured such that the substrate is accurately stored in the cassette. when in position in the reference position shown, the substrate each optical axis in the substrate detection device installed in the position blocked by said substrate in said reference position, which is accommodated in the cassette vertically multiple stages in a horizontal state A method of detecting
    Bringing the optical axes of the first and second sensors closer to the periphery of the substrate by the sensor support driving means;
    Vertically moving the optical axes of the first and second sensors upward or downward by the sensor support driving means;
    Detecting the time during which the optical axes of the first and second sensors are shielded while performing the moving step ;
    And a step of detecting protrusion of the substrate according to a time during which the optical axis of the second sensor is shielded from light.
JP2009062799A 2009-03-16 2009-03-16 Substrate detection device and substrate transfer device including the same Expired - Fee Related JP5353336B2 (en)

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