WO2011135771A1 - 二次元走査装置 - Google Patents

二次元走査装置 Download PDF

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Publication number
WO2011135771A1
WO2011135771A1 PCT/JP2011/001241 JP2011001241W WO2011135771A1 WO 2011135771 A1 WO2011135771 A1 WO 2011135771A1 JP 2011001241 W JP2011001241 W JP 2011001241W WO 2011135771 A1 WO2011135771 A1 WO 2011135771A1
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WO
WIPO (PCT)
Prior art keywords
lens
scanning
mirror
scanning device
focal length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/001241
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English (en)
French (fr)
Japanese (ja)
Inventor
雄介 日下
誠司 濱野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to US13/389,403 priority Critical patent/US8582190B2/en
Publication of WO2011135771A1 publication Critical patent/WO2011135771A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • FIG. 15A is a lateral aberration diagram of the coordinates [ ⁇ 10, ⁇ 10] of the test surface when scanning is performed in the Y direction by the two-dimensional scanning device in the second embodiment.
  • FIG. 15B is a lateral aberration diagram of the coordinates [ ⁇ 10, ⁇ 10] of the test surface when scanning is performed in the X direction by the two-dimensional scanning device in the second embodiment.
  • FIG. 16 is a bird's-eye view of the two-dimensional scanning device in the third embodiment of the present invention.
  • FIG. 17 is a view of the two-dimensional scanning device in the third embodiment as viewed from the X direction.
  • FIG. 18 is a view of the two-dimensional scanning device in the third embodiment as viewed from the Y direction.
  • the first optical path represented by a dotted line is a light beam from the point light source at infinity through the toroidal lenses L1 and L2 and imaged on the image plane IP on the scanning plane side.
  • the second optical path represented by a solid line is an optical path passing through the toroidal lenses L1 and L2 when the scanning mirror M1 or the scanning mirror M2 has an object point.
  • the scanning mirror is the entrance pupil, and the position of the exit pupil is infinite.
  • the lens unit including the toroidal lenses L1 and L2 constitutes an image side telecentric.
  • Formula (5) is a numerical range that satisfies the conditions for solving these problems.
  • optical elements constituting the two-dimensional scanning device 400 are shown in FIG.
  • the respective values of the above formulas (1) to (8) calculated using the data of this specification table are shown in FIG.
  • the mirror interval Dm affecting the difference between the focal length fx and the focal length fy is 50 mm.
  • the working distance WD which affects the retro ratio and the telephoto ratio, is 60 mm. From the values shown in FIG. 27, it is found that the two-dimensional scanning device 400 satisfies the telecentric condition, the image point matching condition, and the beam spot condition regardless of the scanning direction.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
PCT/JP2011/001241 2010-04-30 2011-03-03 二次元走査装置 Ceased WO2011135771A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/389,403 US8582190B2 (en) 2010-04-30 2011-03-03 Two-dimensional scanning device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010104676A JP5268988B2 (ja) 2010-04-30 2010-04-30 ２次元走査装置
JP2010-104676 2010-04-30

Publications (1)

Publication Number Publication Date
WO2011135771A1 true WO2011135771A1 (ja) 2011-11-03

Family

ID=44861100

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/001241 Ceased WO2011135771A1 (ja) 2010-04-30 2011-03-03 二次元走査装置

Country Status (3)

Country Link
US (1) US8582190B2 (https=)
JP (1) JP5268988B2 (https=)
WO (1) WO2011135771A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016106349A1 (en) * 2014-12-23 2016-06-30 REBIScan, Inc. Apparatus and method for fixation measurement with refraction error measurement using image sensing devices
JP6738417B2 (ja) * 2016-06-14 2020-08-12 オリンパス株式会社 走査光学系および観察装置
US11391822B2 (en) * 2018-11-30 2022-07-19 Seagate Technology Llc Rotating pyramidal mirror
KR102946015B1 (ko) 2019-10-29 2026-03-31 에이지씨 가부시키가이샤 반사형 마스크 블랭크 및 반사형 마스크
JP7502770B2 (ja) * 2020-06-03 2024-06-19 株式会社nittoh 投射光学系および照明装置
WO2026004972A1 (ja) * 2024-06-27 2026-01-02 パナソニックＩｐマネジメント株式会社 光学系

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2709928B2 (ja) 1987-12-23 1998-02-04 旭光学工業株式会社 二次元走査装置
JP2004138822A (ja) * 2002-10-17 2004-05-13 Canon Inc 網膜走査型表示装置
JP2007253203A (ja) * 2006-03-24 2007-10-04 Sumitomo Electric Ind Ltd レーザ加工用光学装置
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6887233B2 (en) * 2001-03-22 2005-05-03 Lumenis, Inc. Scanning laser handpiece with shaped output beam

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2709928B2 (ja) 1987-12-23 1998-02-04 旭光学工業株式会社 二次元走査装置
JP2004138822A (ja) * 2002-10-17 2004-05-13 Canon Inc 網膜走査型表示装置
JP2007253203A (ja) * 2006-03-24 2007-10-04 Sumitomo Electric Ind Ltd レーザ加工用光学装置
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機

Also Published As

Publication number Publication date
JP5268988B2 (ja) 2013-08-21
US20120134000A1 (en) 2012-05-31
US8582190B2 (en) 2013-11-12
JP2011232661A (ja) 2011-11-17

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