JP5268988B2 - ２次元走査装置 - Google Patents

２次元走査装置 Download PDF

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Publication number
JP5268988B2
JP5268988B2 JP2010104676A JP2010104676A JP5268988B2 JP 5268988 B2 JP5268988 B2 JP 5268988B2 JP 2010104676 A JP2010104676 A JP 2010104676A JP 2010104676 A JP2010104676 A JP 2010104676A JP 5268988 B2 JP5268988 B2 JP 5268988B2
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JP
Japan
Prior art keywords
lens
scanning
mirror
dimensional scanning
focal length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010104676A
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English (en)
Japanese (ja)
Other versions
JP2011232661A5 (https=
JP2011232661A (ja
Inventor
雄介 日下
誠司 濱野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2010104676A priority Critical patent/JP5268988B2/ja
Priority to PCT/JP2011/001241 priority patent/WO2011135771A1/ja
Priority to US13/389,403 priority patent/US8582190B2/en
Publication of JP2011232661A publication Critical patent/JP2011232661A/ja
Publication of JP2011232661A5 publication Critical patent/JP2011232661A5/ja
Application granted granted Critical
Publication of JP5268988B2 publication Critical patent/JP5268988B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP2010104676A 2010-04-30 2010-04-30 ２次元走査装置 Expired - Fee Related JP5268988B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010104676A JP5268988B2 (ja) 2010-04-30 2010-04-30 ２次元走査装置
PCT/JP2011/001241 WO2011135771A1 (ja) 2010-04-30 2011-03-03 二次元走査装置
US13/389,403 US8582190B2 (en) 2010-04-30 2011-03-03 Two-dimensional scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010104676A JP5268988B2 (ja) 2010-04-30 2010-04-30 ２次元走査装置

Publications (3)

Publication Number Publication Date
JP2011232661A JP2011232661A (ja) 2011-11-17
JP2011232661A5 JP2011232661A5 (https=) 2012-10-18
JP5268988B2 true JP5268988B2 (ja) 2013-08-21

Family

ID=44861100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010104676A Expired - Fee Related JP5268988B2 (ja) 2010-04-30 2010-04-30 ２次元走査装置

Country Status (3)

Country Link
US (1) US8582190B2 (https=)
JP (1) JP5268988B2 (https=)
WO (1) WO2011135771A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12216398B2 (en) 2019-10-29 2025-02-04 AGC Inc. Reflective mask blank and reflective mask

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016106349A1 (en) * 2014-12-23 2016-06-30 REBIScan, Inc. Apparatus and method for fixation measurement with refraction error measurement using image sensing devices
JP6738417B2 (ja) * 2016-06-14 2020-08-12 オリンパス株式会社 走査光学系および観察装置
US11391822B2 (en) * 2018-11-30 2022-07-19 Seagate Technology Llc Rotating pyramidal mirror
JP7502770B2 (ja) * 2020-06-03 2024-06-19 株式会社nittoh 投射光学系および照明装置
WO2026004972A1 (ja) * 2024-06-27 2026-01-02 パナソニックＩｐマネジメント株式会社 光学系

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2709928B2 (ja) 1987-12-23 1998-02-04 旭光学工業株式会社 二次元走査装置
US6887233B2 (en) * 2001-03-22 2005-05-03 Lumenis, Inc. Scanning laser handpiece with shaped output beam
JP4006313B2 (ja) 2002-10-17 2007-11-14 キヤノン株式会社 走査型表示光学系及び走査型表示装置
JP2007253203A (ja) * 2006-03-24 2007-10-04 Sumitomo Electric Ind Ltd レーザ加工用光学装置
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12216398B2 (en) 2019-10-29 2025-02-04 AGC Inc. Reflective mask blank and reflective mask

Also Published As

Publication number Publication date
WO2011135771A1 (ja) 2011-11-03
US20120134000A1 (en) 2012-05-31
US8582190B2 (en) 2013-11-12
JP2011232661A (ja) 2011-11-17

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