WO2011114428A1 - 半導体装置およびそのテスト方法 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
- G01R31/318533—Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
- G01R31/318536—Scan chain arrangements, e.g. connections, test bus, analog signals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3185—Reconfiguring for testing, e.g. LSSD, partitioning
- G01R31/318505—Test of Modular systems, e.g. Wafers, MCM's
- G01R31/318513—Test of Multi-Chip-Moduls
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
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- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
- H01L2225/06544—Design considerations for via connections, e.g. geometry or layout
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- H—ELECTRICITY
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- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
Definitions
- the present invention relates to a semiconductor device, and more particularly to a test method for a stacked group of LSIs.
- a method of electrically connecting stacked LSIs is important.
- the through silicon via (Through Silicon Via) method in which a hole is formed in a silicon chip and the front and back surfaces of the chip are electrically connected by filling the hole with a conductor, is an LSI chip.
- the electrode in the stacking direction three-dimensional electrode
- a logic circuit connected to each other by a three-dimensional electrode is formed across a plurality of LSI chips.
- FIG. 1 is a diagram showing a configuration example of a three-dimensional logic circuit configured by a plurality of LSIs in such a stacked LSI.
- the three-dimensional logic circuit is composed of two LSI chips, LSI_A and LSI_B, and the combination circuits A, B, and D are mounted on the LSI_A, and the combination circuits C and E are mounted on the LSI_B, respectively. Further, three-dimensional electrodes 20a and 20b are formed between LSI_A and LSI_B, and signals are propagated between the combinational circuits B and C and the combinational circuits D and E, respectively.
- Reference numerals 30a to 30h are flip-flops with a scan function for storing input and output data of the combinational circuit.
- the combinational circuit A receives data from the flip-flop 30a and the flip-flop 30b on the LSI_A, and outputs the result of the internal operation to the combinational circuit D.
- the combinational circuit B receives data from the combinational circuit C on the LSI_B via the flip-flop 30c on the LSI_A and the three-dimensional electrode 20a, and outputs the result of the internal calculation to the combinational circuit D.
- the combination circuit C receives data from the flip-flop 30d and the flip-flop 30e on the LSI_B and outputs the result of the internal calculation to the combination circuit B on the LSI_A and the combination circuit E on the LSI_B.
- the combinational circuit D receives data from the combinational circuit A and the combinational circuit B, and outputs the result of the internal calculation to the flip-flop 30f and the flip-flop 30g and the combinational circuit E on LSI_B.
- the combinational circuit E receives data from the combinational circuit C and the combinational circuit D on the LSI_A via the three-dimensional electrode 20b, and outputs the result of the internal calculation to the flip-flop 30h.
- scan test methods such as an internal scan test and a boundary scan test are known as test methods for inspecting whether a semiconductor device is normally configured.
- a configuration example of the flip-flop 30 with a scan function used in such a scan test technique is shown in FIG.
- the flip-flop 30 with a scan function includes a signal storage memory element 100 and a selector 200 inside.
- the selector 200 has a function of selecting data to be input to the storage element 100 from the data input terminal PI and the scan input terminal SI in accordance with the mode designation signal md.
- the mode designation signal md is “0”
- the normal operation mode is set, and a signal input from the data input terminal PI is temporarily stored in the storage element 100 and then output to the data output terminal PO.
- the mode designation signal md is “1”
- the scan mode is set, and a signal input from the scan input terminal SI is stored in the storage element 100 and then output to the data output terminal PO and the scan output terminal SO.
- a shift register can be configured by connecting the scan output terminal SO to the scan input terminal SI of another flip-flop with a scan function in a daisy chain. Then, by controlling the mode designation signal md according to a predetermined procedure, it is possible to set desired test data and observe the output result for the combinational circuit to which the flip-flop with scan function is connected.
- a path for setting and observing the test data is called a scan chain. For example, a path indicated by a one-dot chain line in the logic circuit of FIG. 1 is a scan chain. In FIG. 1, for simplicity, wiring for distributing the mode designation signal md is omitted.
- the flip-flops 30a, 30b, 30c with scan function are operated in the scan mode, and at the same time, a predetermined test pattern is input from the outside of the circuit from the test data input terminal TDI_A prepared as an external terminal.
- the normal operation mode is set, and the combinational circuits A, B, and D are operated. Then, the output of the combinational circuit D is taken into the flip-flop.
- the scan mode is set again, and the values taken into the flip-flops 30f and g with scan function are observed from the outside of the circuit at the test data output terminal TDO_A prepared as an external terminal.
- test data input terminals and test data output terminals of a plurality of chips are connected in a daisy chain as in Patent Document 1, or a test data input as in Patent Document 2.
- branch wiring is provided before and after the terminal and the test data output terminal.
- the combinational circuit B receives data input not only from the flip-flop 30c on the LSI_A but also from the combinational circuit C on the LSI_B, all of the scan chains configured on the LSI_A from TDI_A to TDO_A I can't test the feature.
- the combinational circuit E receives not only the combinational circuit C on the LSI_B but also the combinational circuit D on the LSI_A, all the scan chains from the TDI_B to the TDO_B configured on the LSI_B are all. I can't test the function of.
- the surface from which the external terminal is drawn is not exposed in the LSI chip laminated in the middle, so the external terminal is arranged only on the lowermost or uppermost LSI chip. I can't. Therefore, in order to be able to access the four terminals TDI_A, TDO_A, TDI_B, and TDO_B at the same time after stacking, it is necessary to independently pull out the terminals as external terminals. In that case, since the external terminals dedicated to the test increase, there is a problem that an extra chip area is occupied and the manufacturing cost of the stacked LSI increases.
- flip-flops 30 with a scan function are inserted at both ends of the three-dimensional electrodes 20a and 20b, and signals from the combination circuit C to the combination circuit B are transmitted via the scan chain on the LSI_A.
- the flip-flops 30 with a scanning function are inserted into all three-dimensional electrodes, there is a problem that the occupied area of the circuit, circuit delay, power consumption, etc. are increased.
- test data input terminals and the test data output terminals of a plurality of chips are configured in a daisy chain as in Patent Document 1, for example, when the test data output terminal TDO_A of LSI_A is connected to the test data input terminal TDI_B of LSI_B In order to input test data to the flip-flops d and e on the LSI_B, it is necessary to set all the flip-flops with scan functions on the LSI_A via a scan chain, which is an extra shift operation. Therefore, there are problems that the test time increases and the number of test patterns for shift operation control increases.
- the present invention has been made in view of the above-described problems, and with respect to a combinational circuit mounted across a plurality of chips, the increase in the number of external terminals and circuits and the increase in the number of test patterns are not caused. It is an object of the present invention to provide a semiconductor device that can be easily tested and analyzed.
- a first combination circuit in a semiconductor device that is a single semiconductor chip, a first combination circuit, a first storage element that stores an input signal to the first combination circuit, and an output signal from the first combination circuit are stored.
- a second memory element a first selector for selecting a signal to be stored in the first memory element from a signal from a first terminal or a signal from a second terminal, the first memory element, and the second memory element And a first electrode to which a predetermined potential is supplied from the other semiconductor chip when the semiconductor chip is stacked with another semiconductor chip.
- a test signal supplied to the semiconductor chip is input to the first terminal, and a test signal supplied to the other semiconductor chip is input to the second terminal.
- the first selector selects the first terminal, and when the predetermined potential is supplied to the first electrode, the first selector Selects the second terminal.
- the first semiconductor chip stores a first combination circuit and first storage for storing input information to the first combination circuit.
- a first selector that selects a signal to be stored in the first storage element from a signal from the first terminal or a signal from the second terminal; and a second storage element that stores output information from the first combinational circuit.
- a first scan chain provided without the first combinational circuit between the first memory element and the second memory element; a first electrode and a second electrode connected to the second semiconductor chip;
- the second semiconductor chip has a second combinational circuit, a third storage element that stores input information to the second combinational circuit, and a second storage that stores output information from the third combinational circuit.
- the second electrode includes the second electrode A second potential is applied to the fourth electrode through a three-dimensional electrode, and the second selector selects information from the fourth terminal by applying the second potential to the fourth electrode.
- a method for testing a semiconductor device a first semiconductor chip having a first electrode and a second electrode, a second combination circuit, and a third storage element for storing input information to the second combination circuit
- a fourth storage element that stores output information from the second combinational circuit
- a second selector that selects a signal to be stored in the third storage element from a signal from the third terminal or a signal from the fourth terminal
- a second semiconductor chip having a second scan chain provided between the third memory element and the fourth memory element without the second combinational circuit, and laminating the first electrode and the third memory element.
- An electrode is connected via a first three-dimensional electrode
- the second electrode and the fourth electrode are connected via a second three-dimensional electrode
- the second selector is connected to the second electrode from the second electrode.
- the second combinational circuit is tested for a semiconductor device that is set to select and output information from the fourth terminal to the third memory element by applying a second potential to the fourth electrode.
- the LSI chip can be easily tested and analyzed.
- FIG. 1 illustrates a configuration of a flip-flop with a three-dimensional scan function according to a first embodiment of the present invention.
- 3 shows another configuration of the flip-flop with a three-dimensional scan function according to the first embodiment of the present invention.
- 1 shows an embodiment of a test circuit according to a first embodiment of the present invention.
- 1 is a diagram illustrating a specific configuration of a scan chain according to a first embodiment of the present invention.
- 1 is a diagram illustrating a specific configuration of a scan chain according to a first embodiment of the present invention.
- FIG. 10 is a schematic diagram showing a connection structure between LSI_A and LSI_B in a cross-sectional configuration taken along a dotted line AA ′ in FIG. 9.
- An example of a specific configuration of the upward stack detection unit 400a is shown. It shows another example of a specific configuration of the downward stack detection unit 300b. 2 shows an example of the configuration of a test circuit when three semiconductor chips are stacked in the first embodiment of the present invention. 4 shows another example of the configuration of the test circuit when three semiconductor chips are stacked in the first embodiment of the present invention.
- FIG. 3 shows a configuration of a flip-flop with a three-dimensional scan function according to a second embodiment of the present invention.
- 6 shows an embodiment of a test circuit using a flip-flop with a three-dimensional scan function according to a second embodiment of the present invention.
- FIG. 3 shows a configuration of a flip-flop with a three-dimensional scan function according to the first embodiment of the present invention.
- the flip-flop 31 with a three-dimensional scan function receives signals from chips stacked in a downward direction.
- a scan chain stores at least a circuit (selector or the like) for selecting either one of normal operation data and test data, and the selected data.
- a circuit having a plurality of circuits (memory elements and the like) for supplying the output and the output of the memory elements and the like is supplied to one of the inputs of the next selector (data side at the time of test).
- the selector 200 and the storage element 100 correspond to the above-described selection circuit and storage circuit, respectively, and become part of the scan chain.
- the flip-flop 31 with a three-dimensional scanning function includes a storage element 100, a selector 200, a downward stack detector 300, an upward stack detector 400, an output control AND gate 500, and data input from the same chip.
- Output terminals 2DI, 2DO, three electrodes LI, 3DI, LO for inputting / outputting signals in the chip lower surface direction, and electrodes UO, 3DO, UI for inputting / outputting signals in the chip upper surface direction Have
- 2DI is a two-dimensional data input terminal from a circuit block on the same chip
- 2DO is a two-dimensional data output terminal to a circuit block on the same chip
- 3DI is a three-dimensional scan input terminal from the lower layer chip
- 3DO is a three-dimensional scan output terminal to the upper layer chip.
- LI is a signal input from the lower layer chip
- LO is a signal output to the lower layer chip
- UI is a signal input from the upper layer chip
- UO is a signal output to the upper layer chip.
- the ground potential is directly applied to the lower layer chip signal output LO and the upper layer chip signal output UO.
- the configuration is not limited to this configuration, and any configuration that outputs a predetermined fixed value may be used.
- the storage element 100 has a function of storing 1-bit digital information, and is an element composed of a general flip-flop or the like.
- the selector 200 has a function of selecting data to be input to the storage element 100 from the two-dimensional data input 2DI and the three-dimensional scan input 3DI in accordance with a control signal from the downward stack detection unit 300.
- the downward stack detection unit 300 is a circuit block that detects that a chip is stacked in the lower layer in accordance with an input signal from the lower layer chip signal input LI and outputs a control signal to the selector 200. Specifically, if there is no chip in the lower layer and the lower layer chip signal input LI is in an open state, the control signal “0” is given.
- the upward stack detection unit 400 is a circuit block that detects that a chip is stacked on the upper layer according to an input signal from the upper layer chip signal input UI and outputs a control signal to the output control AND gate 500. Specifically, when the upper layer has no chip and the upper layer chip signal input UI is in an open state, the signal “0” is indicated.
- the output control AND gate 500 has a function of calculating the logical product of the inverted value of the control signal output from the upward direction detection unit 400 and the output of the storage element 100, and thereby the flip-flop 31 with a three-dimensional scan function. Outputs the output of the memory element 100 when there is no chip in the upper layer, and always outputs “0” when the chip is in the upper layer.
- the semiconductor chip (31) is provided in the first combinational circuit (the output destination of 2DO. Not shown in FIG. 3; combinational circuit C in FIG. 5 described later).
- a first storage element (100) for storing input information to the first combinational circuit, and a signal to be stored in the first storage element as a signal from the first input terminal (2DI) or a second input terminal (3DI) Connected to the first selector (200) selected from the signals from the first storage element, the scan chain (route 30e to 30h) provided without passing through the first combinational circuit, and to the other semiconductor chip
- a test signal supplied to the semiconductor chip (a signal supplied via 2DI) is input to the first terminal, and another signal is supplied to the second terminal.
- the first selector selects the first terminal and the first electrode has a predetermined potential.
- potential is supplied, the first selector selects the second terminal.
- the scan chain can be switched according to the potential of the first electrode.
- the scan chain can be switched depending on the connection to the other semiconductor chip, that is, the presence / absence of stacking. .
- a plurality of scan chains can be compatible with a simple circuit configuration.
- a second electrode (3DI) for connecting the first semiconductor chip to another semiconductor chip (second semiconductor chip) is further provided, and a first input terminal is provided from a circuit provided in the first semiconductor chip. And the second input terminal as a terminal for inputting a signal from a circuit provided in the second semiconductor chip via the second electrode, so that two-dimensional scanning and 3 Dimensional scanning can be compatible.
- a third electrode (UI) for connecting the first semiconductor chip to another semiconductor chip (third semiconductor chip), and a first output control circuit (400) connected to the first memory element are further provided.
- the first output control circuit has a first mode in which information stored in the first memory element is output to the first combination circuit according to the potential of the third electrode, and is stored in the first memory element.
- FIG. 4 shows another configuration of the flip-flop with a three-dimensional scan function according to the first embodiment of the present invention, which is compared with FIG.
- the flip-flop 32 with the three-dimensional scan function in FIG. 4 has a function of taking in the data output from the chips stacked in the upward direction as the data input of the scan chain. 4, parts corresponding to those in FIG. 3 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
- the difference from the flip-flop 31 with the three-dimensional scan function in FIG. 3 is that 3DI is an electrode for inputting a signal from the top surface direction of the chip and from the bottom surface direction of the 3DO chip.
- the selector 200 selects data to be output to the storage element 100 from the two-dimensional data input 2DI and the three-dimensional scan input 3DI in accordance with the control signal output from the upward direction detection unit 400 and the point that is an electrode for inputting a signal.
- the output control AND gate 500 has a function of calculating the logical product of the inverted value of the control signal output from the downward direction detection unit 300 and the storage element 100.
- the two-dimensional data input 2DI is input to the storage element 100
- the three-dimensional scan input 3DI is input to the storage element 100.
- the flip-flop 32 with the three-dimensional scan function outputs the output of the storage element 100 when there is no chip in the lower layer, and always outputs “0” when there is a chip in the lower layer.
- FIG. 5 shows an embodiment of a test circuit using the flip-flops 31 and 32 with a three-dimensional scan function according to the first embodiment of the present invention, and is a drawing to be compared with FIG.
- parts corresponding to those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
- the difference from the test circuit of FIG. 1 is that in LSI_A, flip-flops 31a and 32a with a three-dimensional scan function are inserted in the scan chain from flip-flop 30c to flip-flop 30g.
- the flip-flop 30d is replaced with the flip-flop 31b with the three-dimensional scan function, and the flip-flop 32b with the three-dimensional function is inserted in the subsequent stage of the flip-flop 30h, and the LSI_A and LSI_B
- the communication between the flip-flops 31a and 31b with the three-dimensional scan function and the communication between the flip-flops 32a and 32b with the three-dimensional scan function are performed via the three-dimensional electrodes 21 and 22 It is.
- FIG. 6 is a diagram showing a specific configuration of the connection between the flip-flop 30c and the flip-flops 31a and 31b having a three-dimensional scan function and the flip-flop 30e in FIG.
- FIG. 6 the case where LSI_A and LSI_B are three-dimensionally connected by three-dimensional electrodes 21a to 21c is illustrated, but the scan chain in the case of each chip alone is three-dimensionally connected. Each of the scan chains will be described.
- the scan output from the flip-flop 30b is input to the scan input SI of the flip-flop 30c, and the scan output SO of the flip-flop 30c has a three-dimensional scan function. It is input to the two-dimensional data input 2DI_a of the flip-flop 31a. Since no chips are stacked below the LSI_A, the two-dimensional data input 2DI_a is input to the storage element 100a. In addition, since the upper layer chip input UI_a is opened because the chip is not stacked on the upper layer, the content of the storage element 100a is set as the two-dimensional data output 2DO_a from the output control AND gate 500a. It is output to the flip-flop 32a with a three-dimensional function.
- the data input from the test data input TDI_b is input from the two-dimensional input terminal 2DI_b of the flip-flop b with the three-dimensional scan function.
- data input from 2DI_b is input to the storage element 100a. Since no chip is stacked on the LSI_B, the contents of the storage element 100b are output from the output control AND gate 500b and connected to the scan input SI of the flip-flop 30e.
- LSI_A and LSI_B when LSI_A and LSI_B are not connected three-dimensionally, in LSI_A, flip-flop 30b, flip-flop 30c, flip-flop 31a with three-dimensional scan function, and three-dimensional function
- the flip-flops 32a are provided with a scan chain in this order, and the LSI_B is provided with a three-dimensional function-added flip-flop 31b, a flip-flop 30e, and a flip-flop 30h in this order.
- the upper layer chip signal output UO_a of the flip-flop 31a with the three-dimensional scan function of LSI_A is connected to the lower layer chip signal input LI_b of the flip-flop 31b with the three-dimensional scan function of LSI_B through the three-dimensional electrode 21a. Therefore, since the predetermined signal output from the upper layer signal output UO_a of the LSI_A, that is, the ground potential, is given to the lower stack detection unit 300b of the flip-flop 31b with the three-dimensional scan function, “1” is given to the selector 200b.
- a signal from the three-dimensional scan input 3DI_b is input to the storage element 100b of the flip-flop 31b with the three-dimensional scan function.
- the three-dimensional scan input 3DI_b is connected to the three-dimensional scan output 3DO_a of the flip-flop 31a with the three-dimensional scan function of LSI_A via the three-dimensional electrode 21b, and the 3DO_a has the three-dimensional scan function.
- the same signal as the two-dimensional data input 2DI_a of the flip-flop 31a is output. That is, the scan output SO from the flip-flop 30c becomes the two-dimensional input 2DI_a, the 3DO_a, the three-dimensional electrode 21b, and the three-dimensional scan input 3DI_b of the flip-flop 31b with the three-dimensional scan function. And stored in the storage element 100b of the flip-flop 31b with a three-dimensional scan function via the selector 200b.
- the lower layer chip signal output LO_b of the flip-flop 31b with the three-dimensional scan function of LSI_B is connected to the upper layer chip signal input UO_a of the flip-flop 31a with the three-dimensional scan function of LSI_A through the three-dimensional electrode 21c. That is, since the predetermined signal output from the lower layer signal output LO_b of the LSI_B, that is, the ground potential in this embodiment, is supplied to the upward stacking detection unit 400a of the flip-flop 31a with the three-dimensional scan function. "0" is always output from the output control AND gate 500a of the flip-flop 31a.
- flip-flop 30b when LSI_A and LSI_B are three-dimensionally connected, flip-flop 30b, flip-flop 30c, flip-flop 31b with three-dimensional scan function, flip-flop 30e, flip-flop A scan chain is configured across 30_h and LSI_A and LSI_B in this order.
- the flip-flop 31a with the three-dimensional scan function is skipped, and the output of the flip-flop 31a with the three-dimensional function is always “0”.
- FIG. 7 is a diagram showing a specific configuration of a scan chain between the flip-flop 30h and the flip-flops 32b and 32a with a three-dimensional scan function and the flip-flop 30g in FIG.
- the scan output from the flip-flop 31a with the three-dimensional scan function is input to the two-dimensional data input terminal 2DI_a of the flip-flop 32a with the three-dimensional scan function.
- the two-dimensional data input 2DI_a is input to the storage element 100a. Since no chip is stacked below LSI_A, the output control AND gate 500a outputs the contents of the storage element 100a as the two-dimensional data output 2DO_a and is connected to the scan input SI of the flip-flop 30g.
- the scan output from the flip-flop 30e is connected to the scan input SI of the flip-flop 30h, and the scan output SO of the flip-flop 30h is the flip-flop with a three-dimensional function.
- the two-dimensional data input 2DI_b of the group 32b Since no chip is stacked on the LSI_B, the two-dimensional data input 2DI_b is input to the storage element 100b.
- the output control AND gate 500b outputs the contents of the storage element 100b to TDO_b. .
- the flip-flop 31a with the three-dimensional scan function the flip-flop 32a with the three-dimensional scan function
- the flip-flop The scan chain is configured in this order with the group 30g.
- the scan chain is configured in this order with the flip-flop 30e, the flip-flop 30h, and the flip-flop 32b with the three-dimensional function.
- the lower layer chip signal output LO_b of the flip-flop 32b with the three-dimensional scan function of LSI_B is connected to the upper layer chip input UI_a of the flip-flop 32a with the three-dimensional scan function of LSI_A through the three-dimensional electrode 22a. Therefore, since the predetermined signal output from the lower layer signal output LO_b of LSI_B, that is, the ground potential, is given to the upward stack detection unit 400a with the flip-flop 32a with the three-dimensional scan function, “1” is set in the selector 200a. A signal from the three-dimensional scan input 3DI_a is input to the storage element 100a of the three-dimensional scan flip-flop 32a.
- the 3D scan input 3DI_a is connected to the 3D scan output 3DO_b of the LSI_B flip-flop with 3D scan function via the 3D electrode 22b, and the 3DO_b has a flip-flop with the 3D scan function.
- the same signal as the two-dimensional data input 2DI_b of the group 32b is output. That is, the scan output SO from the flip-flop 30h is the three-dimensional scan input of the two-dimensional data input 2DI_b, 3DO_b, the three-dimensional electrode 22b, and the flip-flop 32a with the three-dimensional scan function.
- 3DI_a and the data are stored in the storage element 100a of the flip-flop 32a with a three-dimensional scan function via the selector 200b.
- the upper layer chip signal output UO_a of the flip-flop 32a with the three-dimensional scan function of LSI_A is connected to the lower layer chip signal input LI_b of the flip-flop 32b with the three-dimensional scan function of LSI_B through the three-dimensional electrode 22c. That is, a predetermined signal output from the upper chip signal output UO_b of LSI_A, that is, the ground potential in this embodiment, is applied to the downward stack detection unit 400b of the flip-flop 32b with a three-dimensional scan function.
- the output control AND gate 500b of the function-equipped flip-flop 32b always outputs “0”.
- flip-flop 30e flip-flop 30h
- flip-flop 32a with three-dimensional function flip-flop 30g
- a scan chain is formed across LSI_A and LSI_B.
- the flip-flop 32b with the three-dimensional scan function is skipped, and the output of the flip-flop 32b with the three-dimensional scan function is always “0”.
- the scan chain is switched without special control from the outside depending on whether the LSI_A and the chip are three-dimensionally connected or not. It is characterized by being able to.
- the LSI_A independent scan test does not require a function test for all the combinational circuits A and a part of the combinational circuits B and D, that is, communication with the LSI_B.
- the first functional test of the part is performed, and in the scan test of LSI_B alone, all the functional tests of the combinational circuit C and the second functional test of the part of the combinational circuit E, that is, the part that does not require communication with the LSI_A are performed. Do. Then, after the lamination, the third function test can be performed on the combinational circuits B, D, and E.
- the purpose of performing the function test by switching the path before and after stacking as described above is, for example, to perform the first function test and the second function test before stacking at the wafer stage when manufacturing the LSI chip, This is because the yield of the entire stacked LSI can be improved by selecting the defective LSI chips at the time and then performing the stacking process between the LSI chips.
- LSI_B may be configured as an LSI chip having a function of adding a special additional function to LSI_A, and may be configured as an LSI having independent functions by LSI_A alone.
- the time required for the test is longer in the third function test than in the first function test or the second function test.
- the first functional test is performed, and when the LSI_A and LSI_B are stacked to form a product, the third functional test is performed. It is possible to perform the test circuit configuration.
- the scan chain is configured in this order from LSI_A to LSI_B and from LSI_B to LSI_A.
- the order relationship between LSI_A and LSI_B is an essential issue. Must not. That is, the main effect of the present invention is that the setting and observation of test data via the scan chain can be performed simultaneously on LSI_A and LSI_B.
- FIG. 8 shows an example of a specific configuration of the downward stack detection unit 300b in the flip-flop 31b with a three-dimensional scan function of LSI_B in FIG.
- reference numeral 300b denotes a downward stacking detection unit
- reference numeral 301 denotes a logic inversion (inverter) gate
- reference numeral 302 denotes a pull-up resistor element constituted by a PMOS transistor of a predetermined size.
- LI_b is an electrode for inputting a signal from the lower surface direction of LSI_B, and is an input terminal from the lower layer chip in the flip-flop 31b with a three-dimensional scan function
- UO_b is an electrode for outputting a signal in the upper surface direction of LSI_B.
- UO_a is an electrode that outputs a signal in the upper surface direction of the LSI_A, and is an output terminal to the upper layer chip in the flip-flop 31a with a three-dimensional scan function
- 21a is LO_b and UO_a Is a three-dimensional electrode for electrically connecting the two.
- the resistance value Rmos of the pull-up resistor 302b is Rtsv
- the resistance value of the three-dimensional electrode 21a is Rtsv
- Vin Vcc * Rtsv / (Rtsv + Rmos).
- the downward stacking detection unit 300b in the present embodiment is connected to the electrode LI_b and is connected to the selector 200 via the wiring 304. Without any external control, a signal “0” is output when nothing is stacked below the LSI_B, and a signal “1” is output when LSI_A is stacked below the LSI_B. It is characterized by. With such a configuration, it is possible to realize selector switching based on the presence or absence of the above-described stacking.
- a circuit for controlling the selector (inverter gate 301 and the like) is provided, and the input of the control circuit is connected to the first through a resistor.
- a potential of 1 is supplied and connected to the electrode LI_b.
- the electrode LI_b is connected to another semiconductor chip by such a circuit, the second potential is input from the other semiconductor chip to the control circuit, and the signal “0” and An output of “1” can be realized.
- FIG. 9 shows an example of a specific configuration of the layout pattern of the downward stack detection unit 300b in FIG.
- an LSI layout pattern has a large number of diffusion layers and wiring layers.
- the layout pattern of the main diffusion layer and the lowermost metal wiring layer (hereinafter referred to as the first metal layer) are used. Only the layout pattern is shown.
- PACT is a P-type active region
- NACT is an N-type active region
- VDD is a wiring structure in the first metal layer that supplies a power supply potential
- VDDCNT is a contact hole that supplies a power supply potential to PACT
- VSS is a wiring structure in the first metal layer that supplies the ground potential
- VSSCNT is a contact hole that provides the ground potential to NACT.
- Reference numeral 301G denotes a gate terminal of the inverter gate 301 in FIG. 8. A portion where 301G and PACT overlap is a PMOS transistor 301P for constituting an inverter gate, and a region where 301G and NACT overlap constitutes an inverter gate 301. This is an NMOS transistor 301N.
- 302G is the gate terminal of the pull-up resistor element 302 in FIG. 8, and the portion where 302G and PACT overlap is the PMOS transistor 302P.
- a ground potential is applied to the contact hole 302GCNT for the gate terminal 302G by a different wiring layer.
- 304PCNT is a contact hole connected to the drain terminal of 301P
- 304NCNT is a contact hole connected to the drain terminal of 301N
- 304PCNT and 304NCNT are electrically connected by different wiring layers (not shown), It is configured as an output terminal of the inverter gate 301 together with 304M.
- the lower layer chip input terminal LI_b in FIG. 8 is a wiring structure formed on the first metal layer in a shape combining a square and an L shape, and is electrically connected to the contact holes 302G and 301G by 303PCNT and 303GCNT, respectively. It is connected.
- the upper-layer chip output terminal UO_b in FIG. 8 has a square shape shown by a one-dot chain line in FIG. 9 and has a wiring structure configured in the uppermost metal layer. Although not shown, ground using another metal wiring layer A potential is applied.
- the three-dimensional electrode 21a in FIG. 8 is an octagon illustrated by the dotted line in FIG. 9, is configured in a direction penetrating the silicon substrate from the lower layer chip input terminal LI_b toward the lower layer, and the lower layer chip input terminal It is electrically connected to LI_b.
- FIG. 10 is a schematic diagram showing the connection structure of LSI_A and LSI_B in the cross-sectional configuration taken along the dotted line AA ′ in FIG.
- the same circuit configuration that is, the downward stack detection unit 300 is laid out at the same position when viewed from the stack direction in LSI_A and LSI_B in FIG.
- the position cannot be completely the same due to a process problem, but at least a part of the electrode UO_a is disposed at the same position as the electrode LI_b1, that is, vertically above or below.
- the above-described stack detection unit (the lower stack detection unit and the upper stack detection unit) can be normally operated.
- reference numeral 21a denotes the three-dimensional electrode in FIGS. 8 and 9, which is electrically connected to the lower layer chip input terminal LI_b and forms a hole in a direction penetrating the silicon substrate downward from the LI_b. Constructed by filling a substance.
- Reference numeral 211 denotes an electrode pad that is electrically connected to the three-dimensional electrode 21a and exposed on the lower surface of the LSI_B.
- Reference numeral 212 denotes an electrode pad that is electrically connected to the upper layer chip output terminal UO_b in the LSI_A and is exposed on the upper surface of the LSI_A.
- Reference numeral 213 denotes a micro-bump structure that electrically connects the electrode pads 211 and 212 when the stacked LSI is configured.
- the output terminal electrode UO to the upper chip in the LSI_A and the input terminal LI from the lower chip in the LSI_B are the same when viewed from the stacking direction. It is in position and is electrically connected only by stacking.
- the relationship between the three-dimensional scan input / output 3DI and 3DO, and the relationship between the output terminal LO to the lower layer chip and the input terminal UI from the upper layer chip are at the same position as seen from the stacking direction, It is electrically connected only by stacking.
- the test circuit can be configured by arranging the three-dimensional scan flip-flops 31 having the same layout pattern in the LSI_A and the LSI_B at the same position as viewed from the stacking direction. That is, it is not necessary to design a circuit for a three-dimensional scan test in accordance with each chip at the time of designing an LSI, and it may be mechanically arranged at the same position. As a result, the test circuit design cost in the three-dimensional LSI can be reduced.
- FIG. 11 shows an example of a specific configuration of the upward stacking detection unit 400a of the flip-flop 31a with a three-dimensional scan function of LSI_B in FIG. 6, and contrasts with the configuration of the downward stacking detection unit 300b of FIG. It is what is done.
- the same components as those in the lower direction stacking detection unit 300b in FIG. 8 are denoted by the same reference numerals, and detailed description thereof will not be repeated.
- FIG. 12 shows another example of a specific configuration of the downward stacking detection unit 300b in the flip-flop 31b with a three-dimensional scan function of LSI_B in FIG. In contrast to FIG.
- the inverter gate 301 in FIG. 8 does not exist in FIG. 12, and the node 303 is directly output from the downward stack detection unit 300b. Further, the pull-up resistor element 302 in FIG. 8 is replaced with the pull-down resistor element 3021 formed of an NMOS transistor in FIG.
- a ground potential is applied as a predetermined signal to the signal outputs UO_a and UO_b to the upper layer chip.
- a power supply potential is applied as a predetermined signal to the UO_a and UO_b. .
- the operation of the downward stacking detection unit 300b in the present embodiment is the same as the downward detection unit 300b of FIG. 8, when nothing is stacked on the lower layer of the LSI_B without performing control from the outside.
- the signal “0” is output, and when the LSI_A is stacked below the LSI_B, the signal “1” is output.
- the circuit can be configured as a very small scale, but the parasitic capacitance associated with the node 303 is large. Since the node 303 is driven only by the driving power of the NMOS transistor 3021, there are disadvantages that the response speed is slow and that it is vulnerable to noise.
- FIG. 13 shows an example of the configuration of a test circuit when three semiconductor chips of LSI_A, LSI_B, and LSI_C are stacked, and is compared with FIG.
- a combination circuit F on LSI_C is added.
- the combinational circuit C receives not only the inputs from the flip-flop 30e and the flip-flop 31b with a three-dimensional scan function, but also the result output from the combinational circuit C on the LSI_C.
- the configuration of LSI_A is the same as that of the test circuit of FIG. 5, and a detailed description thereof will be omitted.
- the configuration of LSI_B is different from the test circuit of FIG. 5 in that a flip-flop 31d with a three-dimensional function is inserted in the scan chain output from the flip-flop 30e.
- the LSI_C includes a flip-flop 31d with a three-dimensional function, a flip-flop 30i, and a combinational circuit F, and a path indicated by a one-dot chain line passing through the flip-flop 31d with a three-dimensional function and the flip-flop 30i is scanned. It is a chain.
- LSI_A is the same as FIG. 5 and will not be described in detail.
- the test data input from TDI_B passes through the flip-flop 31b with the three-dimensional scan function, the flip-flop 30e, and the flip-flop 31c with the three-dimensional scan function in this order. It becomes the route to head.
- the test data input from TDI_C passes through the flip-flop 31d with a three-dimensional scan function and the flip-flop 30i in this order to the next flip-flop.
- the data input from TDI_A is the flip-flop 30a, flip-flop 30b, flip-flop 30c, and flip-flop with a three-dimensional scan function.
- the flip-flop 31b, the flip-flop 30e, the flip-flop 31d with a three-dimensional scan function, and the flip-flop 30i pass in this order to the next flip-flop, and the flip-flop 31a with a three-dimensional scan function 31c is skipped.
- the signal “0” is always output to the scan chains going to the flip-flops 30g and 30h.
- the set of flip-flops 31a and 31b with a three-dimensional scan function and the set of 31c and 31d are arranged at the same position in each chip as viewed from the stacking direction.
- the plates 31b and 31c cannot be arranged at the same position when viewed from the stacking direction.
- FIG. 14 for example, when the combinational circuit C on the LSI_B receives an input only from the combinational circuit F on the LSI_C and does not receive an input from the circuit on the LSI_B, as shown in FIG. Only the flip-flop 31b with function can be arranged, and 31a, 31b, and 31d can be arranged at the same position of each chip as viewed from the stacking direction.
- FIG. 15 shows a configuration of a flip-flop with a three-dimensional scan function according to a second embodiment of the present invention, and is a drawing to be compared with the flip-flop 31 with a three-dimensional scan function in FIG.
- the input of the selector 200 has the input 2DSI from the scan chain on the same chip, in addition to the 3DSI input from the scan chain of the lower layer chip.
- a selector 2001 is provided between the output of the selector 200 and the storage element 100.
- the other input of the selector 2001 is PI which is a data input from a circuit of the same chip.
- a mode designation signal md is input as a control signal for the selector 200.
- the output from the storage element 100 branches to 3DSO, which is an output to the scan chain of the upper layer chip, and PO, which is a data output to the circuit to the same chip.
- the output of the selector 200 is selected from 3DSI and 2DSI according to the control signal from the downward stack detection unit 300. That is, 2DSI is output to the selector 2001 when the control signal of the downward stack detection unit 300 is “0”, and 3DSI is output when the control signal of the downward stack detection unit 300 is “1”.
- the selector 2001 selects data input to the storage element 100 from the data input terminal PI and the scan input terminal SI according to the mode designation signal md. That is, when the mode designation signal md is “0”, the normal operation mode is set, and a signal input from the data input terminal PI is input to the storage element 100. On the other hand, when the mode designation signal md is “1”, the scan mode is set, and the signal output from the selector 200 is input to the storage element 100.
- the flip-flop 311 with the three-dimensional scan function shown in FIG. 15 is on the same chip depending on whether the scan input of the flip-flop 30 with the scan function shown in FIG. 2DSI from the scan chain and the input 3DSI from the scan chain of the chips stacked in the downward direction. That is, the flip-flop 311 with a three-dimensional scan function according to this embodiment includes both a scan input / output for a scan chain on the same chip and an input / output for a scan chain in the stacking direction.
- the flip-flop 32 with a three-dimensional scan function shown in FIG. 4 can also be changed to a configuration in which a scan input on the same chip and an input from a scan chain from chips stacked in the upward direction can be selected. Needless to say.
- FIG. 16 shows an embodiment of a test circuit using a flip-flop with a three-dimensional scan function in the second embodiment of the present invention, and is a drawing to be compared with FIG. 1 and FIG.
- the difference from the test circuit of FIG. 1 is that the flip-flop 30c is in the flip-flop 311a with a three-dimensional scan function and the flip-flop 30d is in the flip-flop 311b with a three-dimensional scan function.
- 30 g is replaced with a flip-flop 321 a with a three-dimensional scan function
- flip-flop 30 h is replaced with a flip-flop 321 b with a three-dimensional scan function
- between the flip-flops 311 a and 311 b with a three-dimensional scan function, 321 a And 321b, three-dimensional communication paths 21 and 22 are provided.
- LSI_A and LSI_B are not stacked, in LSI_A, from TDI_A, flip-flop 30a, flip-flop 30b, flip-flop 311a with three-dimensional scan function, flip-flop 321a with three-dimensional scan function, and flip-flop 30f A scan chain that reaches TDO_A in this order is configured.
- LSI_B forms a scan chain from TDI_B to TDO_B through the flip-flop 311b with a three-dimensional scan function, the flip-flop 30e, and the flip-flop 321b with a three-dimensional scan function in this order.
- the second embodiment of the present invention is characterized in that there is no skipped flip-flop with a three-dimensional scan function.
- each flip-flop with a three-dimensional scan function becomes complicated, and there is a disadvantage that the circuit area and power consumption in each flip-flop increase, but in the design of the scan chain, communication between LSI_A and LSI_B
- the design can be simplified by simply replacing the flip-flop at the location to be replaced with a flip-flop with a three-dimensional scan function, and there is no useless flip-flop with a three-dimensional scan function, so the entire circuit area can be reduced.
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Abstract
Description
図3は、本発明の第1の実施形態に係る3次元スキャン機能付きフリップフロップの構成示したものであり、3次元スキャン機能付きフリップフロップ31は、下方向に積層されたチップからの信号を、スキャンチェーンのデータ入力として取り込む機能を有する。
(1)下方向積層検知部の別の構成
図12は、図6におけるLSI_Bの3次元スキャン機能付きフリップフロップ31bにおける下方向積層検知部300bの具体的構成の別の一例を示したものであり、図8と対比されるものである。
図5において、半導体チップを2枚積層した例を説明したが、本実施の形態はこれに限るものではなく、半導体チップを3枚以上積層した場合に対しても拡張可能である。
図15は、本発明の第2の実施形態である3次元スキャン機能付きフリップフロップの構成示したものであり、図3の3次元スキャン機能付きフリップフロップ31と対比される図面である。
20、21、22・・・3次元電極
200、2001・・・セレクタ
211、212・・・電極パッド
213・・・マイクロバンプ構造
30・・・スキャン機能付きフリップフロップ
31、311、32、321・・・3次元スキャン機能付きフリップフロップ
300・・・下方向積層検知部
301・・・インバータゲート
302・・・プルアップ抵抗素子
3021・・・プルダウン抵抗素子
303、304・・・ノード
400・・・上方向積層検知部
500・・・出力制御用ANDゲート
Claims (17)
- 単一の半導体チップである半導体装置において、
第1組み合せ回路と、
前記第1組み合わせ回路への入力信号を記憶する第1記憶素子と、
前記第1記憶素子に記憶させる信号を、第1端子からの信号又は第2端子からの信号から選択するための第1セレクタと、
前記第1記憶素子が接続され、前記第1組み合わせ回路を介さずに設けられるスキャンチェーンと、
前記半導体チップが他の半導体チップと積層されている場合に、前記他の半導体チップから所定の電位が供給される第1電極とを有し、
前記第1端子には、前記半導体チップに供給されたテスト信号が入力され、
前記第2端子には、前記他の半導体チップに供給されたテスト信号が入力され、
前記第1電極に前記所定の電位が供給されていない場合は、前記第1セレクタが前記第1端子を選択し、
前記第1電極に前記所定の電位が供給されている場合は、前記第1セレクタが前記第2端子を選択することを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記第1電極及び前記第1セレクタと接続される第1積層検知回路をさらに有し、
前記第1電極に前記所定の電位が供給されていない場合は、前記第1積層検知回路は、前記第1セレクタに前記第1端子を選択させる第1の信号を前記第1セレクタに出力し、
前記第1電極に前記所定の電位が供給されている場合は、前記第1積層検知回路は、前記第1セレクタを前記第2端子を選択させる第2の信号を前記第1セレクタに出力することを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記第1積層検知回路は、第1セレクタ制御部と、第1抵抗素子とを有し、
前記第1電極及び前記第1抵抗素子の第1端子は、前記第1セレクタ制御部の入力端子に接続され、
前記第1抵抗素子の第2端子には、第1電位が供給され、
前記第1セレクタ制御部の出力端子は、前記第1セレクタに接続され、
前記半導体チップが前記他の半導体チップと積層されていない場合は、前記第1セレクタ制御部の入力端子には、前記第1抵抗素子を介して前記第1電位が供給され、
前記半導体チップが前記他の半導体チップと積層されている場合は、前記第1セレクタ制御部の入力端子には、前記第1電極を介して第2電位が供給され、
前記所定の電位は、前記第2電位であることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記半導体チップが第3の半導体チップと積層されている場合に、前記第3の半導体チップから所定の電位が供給される第2電極と、
前記第1記憶素子及び前記第1組み合わせ回路と接続される第1出力制御回路とをさらに有し、
前記第2電極に前記所定の電位が供給されていない場合は、前記第1出力制御回路は、前記第1記憶素子に記憶された情報を前記第1組み合わせ回路に入力し、
前記第2電極に前記所定の電位が供給されている場合は、前記第1出力制御回路は、前記第1記憶素子に記憶された情報に依らず一定の値を前記第1組み合わせ回路に入力することを特徴とする半導体装置。 - 請求項4記載の半導体装置において、
前記第2電極及び前記第1出力制御装置と接続される第2積層検知回路をさらに有し、
前記半導体チップが前記第3の半導体チップと積層されていない場合は、前記第2積層検知回路は、前記第1出力制御回路に、前記第1記憶素子に記憶された情報を前記第1組み合わせ回路に入力させる第3の信号を入力し、
前記半導体チップが前記第3の半導体チップと積層されている場合は、前記第2積層検知回路は、前記第1出力制御回路に、前記第1記憶素子に記憶された情報に依らず一定の値を前記第1組み合わせ回路に入力させる第4の信号を入力することを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記半導体チップを、第3の半導体チップと接続する電極であって、前記第3の半導体チップに設けられた電極に第2の電位を供給する第4電極をさらに有することを特徴とする半導体装置。 - 請求項6記載の半導体装置において、
前記第4電極の少なくとも一部は、前記半導体チップの基板を基準として前記第1電極の鉛直上方又は鉛直下方に設けられていることを特徴とする半導体装置。 - 第1半導体チップと、第2半導体チップが積層された半導体装置において、
前記第1半導体チップは、
第1組み合せ回路と、
前記第1組み合せ回路への入力情報を記憶する第1記憶素子と、
前記第1組み合わせ回路からの出力情報を記憶する第2記憶素子と、
前記第1記憶素子に記憶させる信号を、第1端子からの信号又は第2端子からの信号から選択する第1セレクタと、
前記第1記憶素子と前記第2記憶素子の間に前記第1組み合わせ回路を介さずに設けられる第1スキャンチェーンと、
前記第2半導体チップと接続される第1電極及び第2電極とを有し、
前記第2半導体チップは、
第2組み合わせ回路と、
前記第2組み合わせ回路への入力情報を記憶する第3記憶素子と、
前記第3組み合わせ回路からの出力情報を記憶する第4記憶素子と、
第3記憶素子に記憶させる信号を、第3端子からの信号又は第4端子からの信号から選択する第2セレクタと、
前記第3記憶素子と前記第4記憶素子の間に前記第2組み合わせ回路を介さずに設けられる第2スキャンチェーンとを有し、
前記第1半導体チップと接続される第3電極及び第4電極とを有し、
前記半導体装置は、
前記第1電極と前記第3電極とを接続する第1の3次元電極と、
前記第2電極と前記第4電極とを接続する第2の3次元電極とを有し、
前記第2電極は、前記第2の3次元電極を介して前記第4電極に第2電位を与え、
前記第2セレクタは、前記第4電極に前記第2電位が与えられることにより、前記第4端子からの情報を選択することを特徴とする半導体装置。 - 請求項8記載の半導体装置において、
前記第2組み合せ回路と前記第1組み合せ回路とを接続する第3の3次元電極をさらに有し、
前記第1組み合わせ回路と前記第2組み合わせ回路とは、所定の期間内に前記第3の3次元電極を介して情報の授受を行い、前記情報を用いて所定の処理を行うことを特徴とする半導体装置。 - 請求項8記載の半導体装置において、
前記第2半導体チップは、
前記第4電極及び前記第2セレクタと接続される第3積層検知回路をさらに有し、
前記第3積層検知回路は、前記第4電極に供給された前記第2電位に基づいて、前記第4入力端子からの入力信号を前記第2記憶素子に出力させる第5の信号を、前記第2セレクタに入力することを特徴とする半導体装置。 - 請求項10記載の半導体装置において、
前記第3積層検知回路は、第2セレクタ制御部と、第2抵抗素子とを有し、
前記第4電極及び前記第2抵抗素子の一端は、前記第2セレクタ制御部の入力端子に接続され、
前記第2抵抗素子の第2端子には、第1電位が供給され、
前記第2セレクタ制御部の入力端子には、前記第4電極を介して前記第2電位が供給されることを特徴とする半導体装置。 - 請求項11記載の半導体装置において、
前記第2抵抗素子の抵抗値は、前記第2の3次元電極の抵抗値よりも大きいことを特徴とする半導体装置。 - 請求項8記載の半導体装置において、
前記第1半導体チップは、
前記第2半導体チップと接続される第5電極と、
前記第5電極及び前記第1記憶素子と接続される第2出力制御回路とをさらに有し、
前記第2半導体チップは、
前記第1半導体チップと接続され、前記第5電極に前記第2電位を供給する第6電極をさらに有し、
前記半導体装置は、
前記第5電極と前記第6電極とを接続する第4の3次元電極をさらに有し、
前記第2出力制御回路は、前記第5電極に供給された前記第2電位に基づいて、前記第1記憶素子に規則された情報に依らず一定の値を前記第1組み合せ回路に出力することを特徴とする半導体装置。 - 請求項13記載の半導体装置において、
前記第5電極及び前記第2出力制御回路と接続される第4積層検知回路をさらに有し、
前記第4積層検知回路は、前記第5電極に供給された前記第2電位に基づいて、前記第1組み合せ回路に前記一定の値を出力させるための第6の信号を出力することを特徴とする半導体装置。 - 第1電極及び第2電極を有する第1半導体チップと、第2組み合わせ回路と、前記第2組み合わせ回路への入力情報を記憶する第3記憶素子と、前記第2組み合わせ回路からの出力情報を記憶する第4記憶素子と、前記第3記憶素子に記憶させる信号を、第3端子からの信号又は第4端子からの信号から選択する第2セレクタと、前記第3記憶素子と前記第4記憶素子の間に前記第2組み合わせ回路を介さずに設けられる第2スキャンチェーンとを有する第2半導体チップとが積層され、前記第1電極と前記第3電極が第1の3次元電極を介して接続され、前記第2電極と前記第4電極が第2の3次元電極を介して接続され、前記第2セレクタが、前記第2電極から前記第2の3次元電極を介して前記第4電極に第2電位が与えられることにより、前記第4端子からの情報を選択して前記第3記憶素子へ出力するように設定される半導体装置に対し、
前記第2組み合せ回路をテストするための第1信号を、前記第1配線を介して前記第2組み合せ回路に供給することを特徴とする半導体装置のテスト方法。 - 請求項15記載の半導体装置のテスト方法において、
前記第1信号は、前記第1半導体チップが有する第1組み合せ回路又は前記第2組み合せ回路をテストするための信号であることを特徴とする半導体装置のテスト方法。 - 請求項15記載の半導体装置のテスト方法において、
前記半導体装置は、前記第1組み合わせ回路と前記第2組み合わせ回路とを接続するための第3の3次元電極をさらに有し、
前記第1組み合わせ回路と前記第2組み合わせ回路とは、所定の期間内に前記第3の3次元電極を介して情報の授受を行い、前記情報を用いて所定の処理を行い、
前記第1信号は、前記所定の処理のテストを行うための信号であることを特徴とする半導体装置のテスト方法。
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