WO2011104859A1 - 電子部品、導電性ペーストおよび電子部品の製造方法 - Google Patents
電子部品、導電性ペーストおよび電子部品の製造方法 Download PDFInfo
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- WO2011104859A1 WO2011104859A1 PCT/JP2010/053077 JP2010053077W WO2011104859A1 WO 2011104859 A1 WO2011104859 A1 WO 2011104859A1 JP 2010053077 W JP2010053077 W JP 2010053077W WO 2011104859 A1 WO2011104859 A1 WO 2011104859A1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10128—Display
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0315—Oxidising metal
Definitions
- the present invention relates to an electronic component having electrode wiring, a conductive paste used for forming the electrode wiring, and a method for manufacturing the electronic component.
- Electrode wiring is formed on electronic parts such as solar cells, plasma display panels (PDP), liquid crystal displays (LCD), and ceramic multilayer wiring boards.
- the electrode wiring is formed using a conductive paste.
- silver (Ag) or aluminum (Al) is used as metal particles.
- the electrode wiring is formed by firing the conductive paste at a high temperature in the atmosphere.
- the conductive paste has glass particles in addition to the metal particles, and when the conductive paste is fired, the glass particles By heating to a temperature equal to or higher than the softening point, the glass particles soften and flow, and the electrode wiring becomes dense and firmly adheres to the substrate.
- Patent Document 1 As a conductive paste using aluminum metal particles, a conductive paste using phosphate glass frit as glass particles has been proposed (see Patent Document 1). In addition, a conductive paste using a mixture of aluminum metal particles and silver metal particles as metal particles has been proposed (see Patent Document 2).
- the firing temperature should be 660.4 ° C. or higher of the melting point of aluminum in order to obtain sufficient electrical characteristics with a conductive paste using aluminum metal particles. If the firing temperature is lowered to 550 ° C. to 600 ° C. as in Patent Document 1, the manufacture of electronic parts becomes easy, but sufficient electrical characteristics cannot be obtained, and the design of electronic parts may be restricted. It is believed that there is.
- the sintering temperature of the metal particles is successfully lowered by mixing aluminum metal particles and silver metal particles in the conductive paste as compared with the case where the metal particles are aluminum.
- Patent Document 2 although the firing temperature is lowered and sufficient electrical characteristics can be obtained, it is considered difficult to reduce the cost because silver is used for the metal particles.
- an object of the present invention is to provide an electronic component including an electrode wiring that can obtain sufficient electrical characteristics even at a low firing temperature, a conductive paste, and a method for manufacturing the electronic component at a low cost.
- the present invention provides an electronic component comprising an electrode wiring having a plurality of particles made of aluminum (Al) and / or an alloy containing aluminum and an oxide for fixing the particles to a substrate.
- the oxide is characterized by containing phosphorus (P) and aluminum.
- the present invention also includes a phosphoric acid solution, A conductive paste having a plurality of particles made of aluminum and / or an alloy containing aluminum dispersed in the phosphoric acid solution.
- the present invention applies a conductive paste having a plurality of particles made of aluminum and / or an alloy containing aluminum dispersed in a phosphoric acid solution to a substrate,
- the method is a method for manufacturing an electronic component in which the applied conductive paste is baked to form an electrode wiring.
- an electronic component including an electrode wiring that can obtain sufficient electrical characteristics even at a low firing temperature, a conductive paste, and a method for manufacturing the electronic component at a low cost.
- FIG. 3A is a cross-sectional view taken along the line AA in FIG.
- FIG. 3A is a cross-sectional view taken along the line AA in FIG.
- the ceramic multilayer wiring board (electronic component) which concerns on the 4th Embodiment of this invention. It is an example of the temperature schedule at the time of baking the ceramic multilayer wiring board (electronic component) which concerns on the 4th Embodiment of this invention.
- the conductive paste is also manufactured by changing the manufacturing conditions for each of Examples 1 to 12 and the comparative example, and the firing conditions of the conductive paste (electrode wiring) are also set in Examples 1 to 12. And different for each comparative example.
- the manufacturing conditions of the conductive paste 3 and the mixing ratio of type consisting of particles of aluminum (Al) particles, phosphorus pentoxide (P 2 O 5) and water (H 2 O) and ethanol (C 2 H 5
- the weight ratio of the phosphoric acid solution consisting of (OH) is varied.
- the weight ratio of the phosphoric acid solution changes, the ratio of the volume of aluminum to the sum of the volumes of aluminum and phosphorus pentoxide also changes. Moreover, as an evaluated characteristic, a peel test, a water resistance test, and a measurement of specific resistance are performed on the electrode wiring. Below, formation of electrode wiring is demonstrated in detail.
- a part of the particles as formed by the water atomization method was treated with a ball mill in an organic solvent to form plate-like particles. Further, in order to improve the thermal stability of the plate-like particles, an annealing treatment at a temperature of 700 ° C. was performed in a reducing atmosphere. From the plate-like particles, particles having a particle size of 8 ⁇ m or more were removed by sieving, and particles having a particle size of less than 1.5 ⁇ m were also removed by sieving. The remaining particles, that is, the particles after removing the large particles and the small particles by sieving, are a plate-like particle group having a volume fraction of about 95% or more in the range of the particle size of 1.5 ⁇ m or more and less than 8 ⁇ m. And set to particle group C.
- Example 12 the particle group A and the particle group B so that the particles of the particle group A are 50% by weight and the particles of the particle group B are 50% by weight.
- the particles were blended and used.
- Example 12 the particles of the particle group A and the particle group C were blended and used so that the particles of the particle group A were 50% by weight and the particles of the particle group C were 50% by weight.
- a phosphoric acid solution was produced for each of Examples 1-12.
- the phosphoric acid solution was produced by mixing phosphorus pentoxide, water, and ethanol in a weight ratio as shown in Table 1. Ethanol is used to accelerate evaporation and drying of the phosphoric acid solution and make it difficult to absorb moisture after drying. From Example 1 to Example 8, the weight ratio of phosphorus pentoxide was increased, the weight ratio of water was decreased, and the weight ratio of the sum of phosphorus pentoxide and water was kept constant. The weight ratio of ethanol was constant.
- the weight ratios of phosphorus pentoxide, water and ethanol in Examples 9 to 12 were 10% by weight, 80% by weight and 10% by weight, respectively, and the same as in Example 3.
- phosphoric acid H 3 PO 4
- the amount of water is adjusted so that the concentration of phosphorus atoms is equal.
- the phosphoric acid solution was not used for the comparative example, but lead (Pb) type
- Example 12 The firing conditions of Examples 1 to 8, Example 12 and Comparative Example were the same at a firing temperature of 700 ° C. and a firing time of 30 minutes.
- the firing temperature was changed to 400 ° C., 500 ° C., and 600 ° C., and the firing time was the same for 30 minutes.
- the weight ratio of phosphorus pentoxide is preferably 1% by weight or more and the weight ratio of water is preferably 89% by weight or less (Examples 2 to 8: At least an evaluation of “ ⁇ ” is obtained), and it is preferable that the weight ratio of phosphorus pentoxide is 10% by weight or more and the weight ratio of water is 80% by weight or less (Examples 3 to 8: “ It was found that an evaluation of “O” is obtained.
- the result of the peel test depends on the weight ratio of phosphorus pentoxide in the phosphoric acid solution.
- the weight ratio of phosphorus pentoxide is the volume ratio of phosphorus pentoxide to aluminum in the electrode wiring.
- Example 9 the firing temperature under the firing conditions was evaluated as “x” at 400 ° C. (Example 9), but 500 ° C. It was found that an evaluation of “ ⁇ ” was obtained at (Example 10), 600 ° C. (Example 11), and 700 ° C. (Example 3). From this, it is considered that the electrode wiring of the present invention does not adhere to the substrate and easily peels off when the firing temperature is 400 ° C. or lower, but exceeds 400 ° C., for example, 500 ° C. or higher, becomes dense and adheres to the substrate. It is done.
- Example 12 the evaluation of “ ⁇ ” can be achieved using either the particle group B (Example 3) or the particle group C (Example 12). It turns out that it is obtained. Further, it was found that the evaluation of “ ⁇ ” was also obtained in the comparative example.
- the weight ratio of phosphorus pentoxide is 0.5% by weight or more and the weight ratio of water is 89.5% by weight or less.
- the weight ratio of phosphorus pentoxide is 1% by weight or more and the weight ratio of water is 89% by weight or less. It turned out to be preferable (Examples 2 to 8: an evaluation of “ ⁇ ” is obtained).
- the comparative example was “x”. It was found that the electrode wirings of Examples 1 to 8 were superior in water resistance compared to the comparative example.
- the result of the water resistance test is evaluated by the ratio of the volume of aluminum to the sum of the volumes of aluminum and phosphorus pentoxide, it is preferably 99.9% by volume or less (Examples 1 to 8: at least “ ⁇ ”). In addition, it was found that the content is preferably 99.7% by volume or less (Examples 2 to 8: an evaluation of “ ⁇ ” is obtained).
- the evaluation was “x” at 400 ° C. (Example 9) at the firing temperature of the firing conditions. It was found that an evaluation of “ ⁇ ” was obtained at 0 ° C. (Example 10), 600 ° C. (Example 11), and 700 ° C. (Example 3). From this, the electrode wiring of the present invention can not obtain high water resistance because the aluminum particles are not covered with a dense oxide at a firing temperature of 400 ° C. or lower, but exceeds 400 ° C., for example, at 500 ° C. or higher, It is considered that the oxide covering the aluminum particles becomes dense and high water resistance is obtained.
- Example 3 the evaluation of “ ⁇ ” is made regardless of whether the particle group B (Example 3) or the particle group C (Example 12) is used. Was found to be obtained.
- the specific resistance decreased and the specific resistance at 10 wt% (Example 3). Became a minimum value (0.68 ⁇ 10 ⁇ 5 ⁇ cm), and the specific resistance increased with an increase from 10 wt% to 70 wt% (from Example 3 to Example 8).
- the specific resistance was 1.0 ⁇ 10 ⁇ 5 ⁇ cm or less in the range of 1 to 15% by weight of phosphorus pentoxide (Examples 2 to 4).
- the specific resistance is smaller than the specific resistance of the comparative example (5.6 ⁇ 10 ⁇ 5 ⁇ cm). 0.0 ⁇ 10 ⁇ 5 ⁇ cm or less.
- the volume ratio decreases from 99.9% to 97.4% by volume (Examples). 1 to Example 3), the specific resistance decreases, and at 97.4% by volume (Example 3), the specific resistance reaches the minimum value (0.68 ⁇ 10 ⁇ 5 ⁇ cm), from 97.4% by volume to 84.%. With a decrease to 2% by volume (from Example 3 to Example 8), the specific resistance increased. The specific resistance was 1.0 ⁇ 10 ⁇ 5 ⁇ cm or less in the range from 99.7% to 96.1% by volume (Examples 2 to 4).
- Example 3 and Examples 9 to 11 By comparing the results of the specific resistance measurement between Example 3 and Examples 9 to 11 and the comparative example, it is 5.0 ⁇ 10 ⁇ smaller than the specific resistance (5.6 ⁇ 10 ⁇ 5 ⁇ cm) of the comparative example. It was found that the specific resistance was lower in Example 3, Example 10 and Example 11 than 5 ⁇ cm. Further, by comparing between Example 3 and Examples 9 to 11, it was found that the specific resistance had the minimum value in Example 3 and was 0.68 ⁇ 10 ⁇ 5 ⁇ cm.
- the specific resistance decreases, and at 700 ° C. (Example 3), the specific resistance is minimum. Value (0.68 ⁇ 10 ⁇ 5 ⁇ cm).
- the specific resistance was 1.0 ⁇ 10 ⁇ 5 ⁇ cm or less.
- the specific resistance is smaller than the specific resistance of the comparative example (5.6 ⁇ 10 ⁇ 5 ⁇ cm) in the range exceeding 400 ° C., for example, 500 ° C. or more (Example 10, Example 11, Example 3). It became less than 5.0 ⁇ 10 ⁇ 5 ⁇ cm.
- Example 12 the particle group C (plate-like particle: Example 12) was used rather than the particle group B (spherical particle: Example 3). It was found that the specific resistance can be reduced.
- the volume ratio is 99.7% by volume or less and 84.2% by volume or more. It was found that good adhesion (peel test result) and good water resistance (water resistance test result) can be obtained when the value is within the range (Examples 2 to 8).
- this volume ratio is rewritten as the volume ratio of phosphorus pentoxide, the value obtained by subtracting the volume ratio of aluminum from 100 volume% becomes the volume ratio of phosphorus pentoxide, so that it is 0.3 volume% or more and 15.8. When it is in the range of not more than volume% (Examples 2 to 8), good adhesion (peel test result) and good water resistance (water resistance test result) can be obtained.
- this volume ratio is in the range of 99.7% by volume or less and 85.1% by volume or more (Examples 2 to 7), good adhesion (peel test result) and good water resistance (water resistance) Test results) and good specific resistance (specific resistance measurement results). Furthermore, when this volume ratio is in the range of 97.4% by volume or less and 96.1% by volume or more (Examples 3 and 4), better adhesion (peel test result) and better water resistance ( It was found that a better specific resistance (specific resistance measurement result) with a specific resistance of 1.0 ⁇ 10 ⁇ 5 ⁇ cm or less was obtained.
- FIG. 1 shows an enlarged view of a part of a cross-sectional view of an electrode wiring 2 provided in the electronic component 1 according to the first embodiment of the present invention.
- the electronic component 1 has an alumina substrate 3 and an electrode wiring 2 bonded and fixed on the alumina substrate 3.
- the electrode wiring 2 includes a plurality of particles 4 made of aluminum (Al) and / or an alloy containing aluminum, and an oxide 5 that fixes the particles 4 to the substrate 3.
- FIG. 1 is based on the result of observing the electrode wiring 2 produced in, for example, Example 11 in Table 1 using a scanning electron microscope-energy dispersive X-ray analyzer (SEM-EDX).
- SEM-EDX scanning electron microscope-energy dispersive X-ray analyzer
- the plurality of particles 4 are bonded (necked) by sintering.
- no native oxide layer of aluminum was observed from the result of analysis by an energy dispersive X-ray analyzer (EDX).
- the oxide 5 has a phosphorus oxide containing phosphorus and oxygen (O) as main components, and the phosphorus content was 50 atomic% or more at a component ratio not considering oxygen.
- O phosphorus and oxygen
- aluminum was also detected in oxide 5.
- the natural oxide film of aluminum covering the surfaces of the particles 4 dispersed in the phosphoric acid solution is dissolved by the phosphoric acid solution, It was inferred that aluminum was eluted and the phosphoric acid solution containing aluminum finally became oxide 5 containing phosphorus and aluminum by firing. Since the native oxide film of aluminum that covered the surfaces of the aluminum and aluminum alloy particles 4 disappeared during firing, the necking joint portion 6 can be easily generated, and the ratio of the electrode wiring 2 can be reduced. The resistance could be reduced.
- the entire surface of the particles 4 is wetted with the phosphoric acid solution and covered with the phosphoric acid solution. For this reason, when baked, the entire surface of the particle 4 excluding the necking bonding portion 6 is covered with the oxide 5.
- the oxide 5 is in direct contact with the particles 4, and the oxide 5 is not formed into two layers but is a single layer. Therefore, the oxide 5 includes phosphorus (P) atoms. And aluminum atoms are suddenly included in the entire film.
- the electrode wiring 2 was found to exhibit excellent conductivity even at a firing temperature of aluminum melting point of 660.4 ° C. or lower.
- the sintering of aluminum does not proceed because of its oxide film (natural oxide film), and the reason why the firing temperature equal to or higher than the melting point is considered is to destroy this oxide film.
- the oxide film on the surface of the aluminum particles 4 is etched away in an acidic phosphoric acid solution. That is, during firing, the aluminum component is eluted in the phosphoric acid solution, and is precipitated in the phosphoric acid solution or in the phosphoric acid oxide 5 as an oxide compound or aluminum oxide of phosphorus and aluminum. The removal of the oxide film promotes the sintering of aluminum, and it is presumed that good conductivity was exhibited even when firing at a temperature lower than the melting point.
- the phosphoric acid solution covers the surfaces of the particles 4, and during firing, phosphoric acid reacts with the eluted aluminum component to generate oxide 5 that becomes a compound (oxidized compound).
- the reason why the water resistance is improved is that the sparse oxide film is removed from the entire surface of the aluminum particles 4, and a uniform and dense phosphorus and aluminum compound is formed on the entire surface of the aluminum particles 4. For this reason, it is considered that the surface of the particles 4 is not exposed and the chemical stability is improved.
- the water resistance exceeded 400 ° C., for example, when it was baked at 500 ° C. or higher, good water resistance was obtained.
- lead (Pb) metal is composed of aluminum particles 4. Precipitation was observed at the interface between them, and segregation of glass components was observed. This is presumably because the lead of the Pb-based glass was reduced and precipitated by the oxidation of the aluminum particles 4 by the Pb-based glass. Therefore, in the conventionally used Pb-based glass, the surface of the aluminum particles is further oxidized while leaving the sparse oxide film on the surface of the aluminum particles. It is a sparse oxide film, and it is presumed that it could not be densely coated.
- the particles 4 not only the aluminum particles 4 but also particles 4 made of an alloy containing aluminum can be used.
- the alloy containing aluminum contains at least one element selected from silver (Ag), copper (Cu), silicon (Si), magnesium (Mg), and calcium (Ca).
- the conductivity of the alloy (Al-Ag) can be increased by adding silver.
- strength of an alloy (Al-Cu) can be raised by adding copper.
- silicon the wear resistance of the alloy (Al-Si) can be increased.
- magnesium or calcium the strength and corrosion resistance of the alloy (Al-Mg, Al-Ca) can be increased.
- the particle 4 includes a particle group A (first particle group) 4A having a volume fraction of about 95% within a range of a particle size of 0.5 ⁇ m or more and less than 1.5 ⁇ m, and a particle size of 1.5 ⁇ m or more and less than 8 ⁇ m. And a particle group B (second particle group) 4B having a volume fraction of about 95% within the range.
- the total weight of the plurality of particles 4 in the particle group A (4A) and the total weight of the plurality of particles 4 in the particle group B (4B) are substantially equal. According to this, since the particles 4 of the particle group A (4B) having a small particle size enter the gap between the particles 4 of the particle group B (4B) having a large particle size, the density of the particles 4 can be increased. Dense electrode wiring 2 can be formed.
- FIG. 2 shows a part of a cross-sectional view of a plasma display panel (PDP: electronic component) 11 (1) according to a second embodiment of the present invention.
- a plasma display panel 11 will be described as an example of the electronic component 1 to which the present invention can be applied.
- the electrode wiring 2 of the electronic component 1 of the present invention is used for the display electrode 20 and the address electrode 21 of the plasma display panel 11 (1).
- the plasma display panel 11 (1) is arranged such that the front plate 12 (3) and the back plate 13 (3) face each other with a gap of 100 to 150 ⁇ m, and the front plate 12 (3) and the back plate 13 (3) The gap is maintained by the partition wall 14.
- a display electrode 20 (2) is formed on the front plate 12 (3).
- the front plate 12 (3) corresponds to the substrate 3 of the first embodiment, and the display electrode 20 (2) corresponds to the electrode wiring 2 of the first embodiment.
- a dielectric layer 23 is formed on the display electrode 20 (2), and a protective layer 25 (for example, a magnesium oxide (MgO) vapor deposition film) is provided on the dielectric layer 23 to protect the display electrode 20 (2) and the like from discharge. ) Is formed.
- a protective layer 25 for example, a magnesium oxide (MgO) vapor deposition film
- An address electrode 21 (2) is formed on the back plate 13 (3).
- the back plate 13 (3) corresponds to the substrate 3 of the first embodiment, and the address electrode 21 (2) corresponds to the electrode wiring 2 of the first embodiment.
- the address electrode 21 (2) is formed so as to be orthogonal to the display electrode 20 (2).
- a dielectric layer 24 is formed on the address electrode 21 (2), and a partition wall 14 for configuring the cell 16 is provided on the dielectric layer 24.
- the partition 14 is a stripe-like or lattice (box) -like structure.
- the minute space partitioned by the partition wall 14 becomes a cell 16.
- the cell 16 is filled with phosphors 17, 18, and 19.
- One pixel is composed of three cells 16 corresponding to the three primary colors of the cell 16 filled with the red phosphor 17, the cell 16 filled with the green phosphor 18, and the cell 16 filled with the blue phosphor 19. Yes.
- Each pixel can emit various colors in accordance with signals applied to the display electrode 20 (2) and the address electrode 21 (2).
- the particle group A described in Table 1 was prepared as particles to be included in the conductive paste.
- the particles were aluminum metal particles.
- the particles of the particle group A have a volume fraction of about 95% or more within a range where the particle size is 0.5 ⁇ m or more and less than 1.5 ⁇ m.
- Particle group B and particle group C were not used, and particle group A was used in an amount of 100% by weight.
- the phosphoric acid solution prepared the phosphoric acid solution of the same weight ratio as Example 3 of Table 1. That is, a phosphoric acid solution having a weight ratio of 10% by weight of phosphorus pentoxide, 80% by weight of water and 10% by weight of ethanol was prepared. 30 parts by weight of this phosphoric acid solution was added to 100 parts by weight of the previously prepared powder. By irradiating these mixtures with ultrasonic waves for 10 minutes, particles were dispersed in the phosphoric acid solution to complete a conductive paste.
- a plasma display panel was produced.
- the conductive paste was applied to the entire surface of the front plate 12 (3) and the back plate 13 (3) by screen printing, and dried at 150 ° C. in the atmosphere. Excess portions of the conductive paste coating film were removed by photolithography and etching, and the display electrode 20 (2) and the address electrode 21 (2) were patterned. Thereafter, the display electrode 20 (2) and the address electrode 21 (2) were completed by firing in the air at the firing temperature of 600 ° C. for the firing time of 30 minutes, which is the same as the firing conditions of Example 11 in Table 1. In this firing, the firing atmosphere becomes an acidic atmosphere. However, due to this firing, the metal particles of the display electrode 20 (2) and the address electrode 21 (2), particularly the aluminum metal particles, may be discolored due to a chemical reaction. There wasn't.
- a dielectric paste to be the dielectric layers 23 and 24 was applied to each of the front plate 12 (3) and the back plate 13 (3), and baked in the atmosphere at a baking temperature of 610 ° C. and a baking time of 30 minutes.
- the firing atmosphere is an acidic atmosphere
- the dielectric layer 23 is in direct contact with the display electrode 20 (2)
- the dielectric layer 24 is in direct contact with the address electrode 21 (2).
- the body layer 23 did not chemically react with the display electrode 20 (2), and the dielectric layer 24 did not chemically react with the address electrode 21 (2).
- a protective layer 25 was deposited from the dielectric layer 23 side of the front plate 12 (3).
- the partition wall 14 was produced by forming a material containing at least a powdery glass composition and a filler into a stripe shape or a lattice shape, and sintering the formed structure at 500 to 600 ° C.
- the partition wall 14 was disposed on the dielectric layer 24 to constitute the cell 16.
- Each cell 16 is filled with phosphor pastes corresponding to the three primary colors and baked at 450 to 500 ° C., so that the red phosphor 17, the green phosphor 18, and the blue phosphor 19 are placed in the cell 16. Formed.
- the sealing material 15 was applied to the peripheral edge of either the front plate 12 (3) or the back plate 13 (3) by a dispenser method, a printing method, or the like. And the front board 12 (3) and the back board 13 (3) were sealed.
- the front plate 12 (3) and the back plate 13 (3) are arranged facing each other while being accurately aligned, and are set to 420 to 500 ° C. Heated. During this heating, the gas in the cell 16 was exhausted and a rare gas was enclosed instead.
- the sealing material 15 may be temporarily fired simultaneously with the firing of the phosphor paste when the phosphors 17 to 19 are formed. By pre-baking the sealing material 15, bubbles contained in the sealing material 15 can be reduced. In FIG.
- the sealing material 15 and the address electrode 21 (2) are in direct contact with each other, but the display electrode 20 (2) is also in direct contact with the sealing material 15 in order to draw the electrode to the outside.
- the sealing material 15 is heated at the time of pre-baking and glass sealing, and the heating atmosphere becomes an acidic atmosphere by this heating. By this heating, the sealing material 15 becomes the display electrode 20 (2) and the address electrode. There was no chemical reaction with 21 (2). Thus, the plasma display panel 11 (1) was completed.
- the specific resistance of the display electrode 20 (2) and the address electrode 21 (2) did not increase before and after the display of the image information. Further, the adjacent display electrodes 20 (2) and the adjacent address electrodes 21 (2) do not deteriorate the electric withstand voltage, and the voltage can be boosted and the cell 16 can be lit. It was. In addition, no migration phenomenon as in the case of silver thick electrode wiring occurred, and no other problems were found. Since expensive silver is not used for the display electrode 20 (2) and the address electrode 21 (2) of the plasma display panel 11 (1) of the second embodiment, it can greatly contribute to cost reduction.
- FIG. 3A shows a bottom view (back side) of a solar battery cell (electronic component) 31 (1) according to the third embodiment of the present invention
- FIG. 3B shows a cross-sectional view taken along line AA in FIG. 3A.
- the figure shows the light receiving surface side (front surface side) as the upper side and the back surface side as the lower side.
- a solar battery cell 31 will be described as an example of the electronic component 1 to which the present invention can be applied.
- 3A and 3B show a back contact type (back electrode type) crystalline silicon solar cell 31 (1) as an example.
- the electrode wiring 2 of the electronic component 1 of the present invention is used for the back surface p-type electrode 37 of the solar battery cell 31 (1).
- a back surface p-type electrode 37 (2) is formed on a cell wafer 38 made of a p-type silicon substrate.
- the cell wafer 38 (3) corresponds to the substrate 3 of the first embodiment, and the back surface p-type electrode 37 (2) corresponds to the electrode wiring 2 of the first embodiment.
- the back contact type (back electrode type) solar battery cell 31 the back surface p-type electrode 37 (2) and the back surface n-type electrode 36 are formed on the back surface side.
- the cell wafer 38 (1) has a through hole 39 penetrating between both front and back surfaces, and an n-type semiconductor layer 33 is formed on the side wall of the through hole 39 and on the light receiving surface side (front surface side) of the cell wafer 38 (1).
- a through-hole electrode 34 made of silver is embedded in the through-hole 39.
- a grid electrode 32 for current collection made of silver and grid is formed on the light receiving surface side (surface side) of the cell wafer 38 (1) so as to be connected to the through-hole electrode 34.
- a heavily doped layer 35 is formed on the back side of the cell wafer 38 (1) apart from the through hole 39 and the through hole electrode 34.
- the heavily doped layer 35 prevents carrier recombination.
- a grid-like back surface p-type electrode 37 (2) made of aluminum is formed on the back surface side of the cell wafer 38 (1) so as to be aligned with the heavily doped layer 35.
- a grid-like back surface n-type electrode 36 made of silver is formed on the back surface side of the cell wafer 38 (1) so as to be aligned with the through-hole electrode 34.
- a p-type silicon substrate was prepared as the cell wafer 38 (3).
- a through hole 39 was formed in the cell wafer 38 (3) by laser drilling or etching.
- a mixed solution of 1% caustic soda (sodium hydroxide: NaOH) and 10% isopropyl alcohol (CH 3 CH (OH) CH 3 ) is used.
- the light receiving surface side (surface side) of 3) was etched to form a texture.
- phosphorus (P) is transferred from phosphorus pentoxide to the cell wafer 38 (1).
- the n-type semiconductor layer 33 was formed on the light receiving surface side by diffusion. Although illustration is omitted, an antireflection film of a silicon nitride film (Si 3 N 4 ) may be formed on the n-type semiconductor layer 33 with a uniform thickness.
- This silicon nitride film can be formed by a plasma CVD method using a mixed gas of silane (SiH 4 ) and ammonia (NH 3 ) as a raw material.
- a commercially available silver paste is filled into the previously formed through hole 39 by a printing method, and further, the silver paste is printed in a grid shape on the light receiving surface side, whereby the through hole electrode 34, And the grid electrode 32 for current collection was formed.
- the formed through-hole electrode 34 and the current collecting grid electrode 32 were dried at 150 ° C. for 30 minutes.
- back side n-type electrode 36 On the back side opposite to the light-receiving surface, silver paste was used and printed in stripes by screen printing to form a back side n-type electrode 36. Further, on the back side opposite to the light receiving surface, the same conductive paste as that used in Example 2 is used, and printing is performed in stripes by screen printing to form the back side p-type electrode 37 (2). did. The formed back surface n-type electrode 36 and back surface p-type electrode 37 (2) were dried at 150 ° C. for 30 minutes.
- the back contact solar cell 31 (1 ) was completed. Note that, by this baking, aluminum is diffused from the back surface p-type electrode 37 (2) into the cell wafer 38 (3) below the back surface p-type electrode 37 (2), and is highly doped to prevent carrier recombination. Layer 35 is formed simultaneously.
- the back contact solar cell 31 (1) according to the third embodiment has higher conversion efficiency than the solar cell produced by comparison. This seems to be because the electrical resistance value of the back surface p-type electrode 37 (2) could be reduced. From the above, it was confirmed that the electrode wiring 2 (see FIG. 1) of the present invention can be applied as the back surface p-type electrode 37 (2) of the back contact solar cell 31 (1). In addition, the manufacturing method of the back surface p-type electrode 37 (2) of the photovoltaic cell demonstrated above can respond to the manufacturing method of not only a back contact type photovoltaic cell but the p-type electrode of various photovoltaic cells. .
- FIG. 4 is a cross-sectional view of a ceramic multilayer wiring board (electronic component) 41 (1) according to the fourth embodiment of the present invention.
- the electronic component 1 according to the present invention see FIG. 1
- FIG. 4 as an example of the multilayer wiring board, a multilayer wiring board 41 (1) composed of five layers of low temperature co-fired ceramics (LTCC) is shown.
- the electrode wiring 2 of the electronic component 1 of the present invention is used for the through-hole electrode 43 (2) and the wiring 44 (2) of the multilayer wiring board 41 (1).
- a wiring 44 (2) is formed on the upper and lower surfaces of each ceramic substrate 42 (3). In FIG. 4, the wiring 44 (2) is formed in six layers.
- the wirings 44 (2) in each layer are connected by a through-hole electrode 43 (2).
- the through-hole electrode 43 (2) penetrates the ceramic substrate 42 (3).
- the wiring 44 (2) and the through-hole electrode 43 (2) are three-dimensionally formed.
- the ceramic substrate 42 (3) corresponds to the substrate 3 of the first embodiment, and the through-hole electrode 43 (2) and the wiring 44 (2) correspond to the electrode wiring 2 of the first embodiment.
- FIG. 5 shows an example of a temperature schedule when firing.
- the temperature rising process from room temperature to 700 ° C. is in the air, and the process in the temperature range of 700 ° C. to 900 ° C. (including the holding time at 900 ° C. for 60 minutes) is in a nitrogen atmosphere.
- the temperature lowering process from 700 ° C. to room temperature was again in the atmosphere.
- the rate of temperature rise and the rate of temperature fall were 5 ° C./min.
- the temperature schedule of baking is not limited to FIG.
- the reason why the nitrogen atmosphere is set in the temperature range of 700 ° C. to 900 ° C. is to suppress oxidation of the particles 4 in the conductive paste.
- the glass powder of the green sheet did not chemically react with the through-hole electrode 43 (2) and the wiring 44 (2), and no gap was generated in the vicinity of the mutual interface. From the above, it was confirmed that the electrode wiring 2 (see FIG. 1) of the present invention can be applied as the wiring 44 (2) and the through-hole electrode 43 (2) of the multilayer wiring board 41 (1). There is no need to use expensive silver thick film wiring as the wiring 44 (2) and the through-hole electrode 43 (2), which can greatly contribute to cost reduction.
- the electronic component 1 is the plasma display panel 11, the solar battery cell 31, and the ceramic mounting substrate 41 has been described.
- the electronic component 1 is not limited to these, and an electronic component to which an aluminum electrode wiring can be applied. The application range can be expanded.
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Abstract
Description
前記酸化物は、リン(P)とアルミニウムを渾然と含んでいることを特徴としている。
前記リン酸溶液中に分散し、アルミニウム及び/又はアルミニウムを含む合金からなる複数の粒子とを有する導電性ペーストであることを特徴としている。
塗布した前記導電性ペーストを焼成して、電極配線を形成する電子部品の製造方法であることを特徴としている。
表1に示すように、第1の実施形態では、実施例1~12と1つの比較例の計13種類の電極配線を形成し、各種特性を評価している。電極配線の形成に当っては、導電性ペーストも、実施例1~12と比較例毎に、製造条件を変えて製造し、導電性ペースト(電極配線)の焼成条件も、実施例1~12と比較例毎に変えている。なお、導電性ペーストの製造条件では、3種類の粒子群からなるアルミニウム(Al)粒子の配合比と、五酸化リン(P2O5)と水(H2O)とエタノール(C2H5OH)からなるリン酸溶液の重量比を変化させている。なお、リン酸溶液の重量比の変化に伴って、アルミニウムと五酸化リンの体積の和に対するアルミニウムの体積の比も変化する。また、評価した特性としては、電極配線に対して、ピール試験と、耐水性試験と、比抵抗の計測を行っている。
以下では、電極配線の形成について詳細に説明する。
(1-1.アルミニウム粒子の配合)
まず、アルミニウムを溶融し、水アトマイズ法にて球状の粒子を形成した。この粒子の一部から、粒径8μm以上の粒子を篩いによって除去し、粒径0.5μm未満の粒子を篩いによって除去した。残った粒子を、つまり、篩いによって大きな粒子と小さな粒子を除去した後の粒子をさらに、篩いによって、粒径が0.5μm以上1.5μm未満の範囲内に約95%以上の体積分率を有する粒子群Aと、粒径が1.5μm以上8μm未満の範囲内に約95%以上の体積分率を有する粒子群Bに分けた。
次に、実施例1~12毎に、リン酸溶液を生成した。リン酸溶液は、表1に示すような重量比で、五酸化リンと水とエタノールを混合して生成した。なお、エタノールは、リン酸溶液の蒸発・乾燥を速め、乾燥後に吸湿しにくくするために用いている。実施例1から順に実施例8まで、五酸化リンの重量比は増加させ、水の重量比は減少させ、五酸化リンと水の和の重量比を一定とした。また、エタノールの重量比は一定とした。実施例9~12の五酸化リンと水とエタノールの重量比は、10重量%と80重量%と10重量%とし、実施例3と同じにした。なお、五酸化リンの代わりに、リン酸(H3PO4)を使用しても良い。その場合には、リン原子の濃度が等しくなるように水の量を調整する。また、比較例には、リン酸溶液は用いず、替わりに鉛(Pb)系ガラスを用いた。
実施例1~12毎に、1-1で配合したアルミニウム粒子の100重量部に対して、1-2で生成した30重量部のリン酸溶液を添加し混合した。この混合物に対して、超音波を10分間照射することで、リン酸溶液中にアルミニウム粒子を分散させ、導電性ペーストを得た。
実施例1~12と比較例毎に、アルミナ(Al2O3)基板上に導電性ペーストをドクターブレードにて塗布した。塗布後、導電性ペーストを大気中において温度150℃で30分間加熱し乾燥させた。その後、電気炉にて大気中で5℃/分の昇温速度で表1の焼成条件に示す、いわゆる焼成温度まで昇温し、その焼成温度で、表1の焼成条件に示す、いわゆる焼成時間保持して焼成し、その後、放冷した。この焼成により電極配線を完成させた。焼成後の塗膜(電極配線)の厚みは、実施例1~12と比較例のどれも約10μmであった。実施例1~8と実施例12と比較例の焼成条件は、焼成温度が700℃で焼成時間が30分間で同じにした。実施例9~11では、焼成温度を400℃、500℃、600℃と変え、焼成時間は30分間で同じにした。
(2-1.ピール試験)
実施例1~12と比較例毎に、完成した電極配線の基板に対する接着の強さを、ピール試験にて評価した。ピール試験では、市販のセロハンテープを、電極配線に貼り付けた後に引き剥がした。そして、剥がした後に電極配線を観察し評価した。評価基準としては、アルミニウム粒子のほとんど全てが剥がれ電極配線が断線状態となったものを「×」とし、アルミニウム粒子の一部が剥がれ電極配線の一部が欠けたが断線状態にならなかったものを「△」とし、アルミニウム粒子が剥がれず(電極配線の表面のアルミニウム粒子がセロハンテープに薄く付着する程度を含む)電極配線が断線状態にならなかったものを「○」とする基準を用いた。表1に示すように、ピール試験の結果は、実施例1と実施例9で「×」であり、実施例2で「△」であり、実施例3~8と実施例10~12と比較例で「○」であった。
実施例1~12と比較例毎に、完成した電極配線の水に対する腐食性を、耐水性試験にて評価した。耐水性試験では、電極配線を70℃の温水に30分間浸漬した。浸漬した後に電極配線を観察し評価した。評価基準としては、試験後に電極配線が黒色化したものは「×」とし、電極配線の色の変化がわずかにあるものは「△」とし、色がほとんど変わらないものを「○」とする基準を用いた。表1に示すように、ピール試験の結果は、実施例1と実施例9で「×」であり、実施例2で「△」であり、実施例3~8と実施例10~12と比較例で「○」であった。表1に示すように、耐水性試験の結果は、実施例9と比較例で「×」であり、実施例1で「△」であり、実施例2~8と実施例10~12で「○」であった。
実施例1~12と比較例毎に、完成した電極配線の比抵抗を測定した。比抵抗測定では、電極配線の電気抵抗と膜厚を測定し、この電気抵抗と膜厚に基づいて比抵抗を算出した。比抵抗測定の結果を、実施例1~8と比較例の間で比較することにより、比較例の比抵抗(5.6×10-5Ωcm)より小さい5.0×10-5Ωcmよりも、実施例1~7において比抵抗が低くなることがわかった。また、実施例1~8の間で比較することにより、比抵抗は、実施例3において最小値をとり、0.68×10-5Ωcmとなることがわかった。
ピール試験と耐水性試験と比抵抗測定の結果から、アルミニウムと五酸化リンの体積の和に対するアルミニウムの体積の比について評価すると、この体積比が、99.7体積%以下84.2体積%以上の範囲内であるとき(実施例2~8)、良好な密着性(ピール試験結果)と、良好な耐水性(耐水性試験結果)が得られることがわかった。なお、この体積比を、五酸化リンの体積比で書き直すと、100体積%からアルミニウムの体積比を引いた値が、五酸化リンの体積比になるので、0.3体積%以上15.8体積%以下の範囲内であるとき(実施例2~8)、良好な密着性(ピール試験結果)と、良好な耐水性(耐水性試験結果)が得られることになる。
図2に、本発明の第2の実施形態に係るプラズマディスプレイパネル(PDP:電子部品)11(1)の断面図の一部を示す。第2の実施形態では、本願発明を適用可能な電子部品1として、プラズマディスプレイパネル11を例に挙げ説明する。プラズマディスプレイパネル11(1)の表示電極20とアドレス電極21に、本願発明の電子部品1の電極配線2を用いている。プラズマディスプレイパネル11(1)は、前面板12(3)と背面板13(3)とが100~150μmの間隙をもって対向させて配置され、前面板12(3)と背面板13(3)の間隙は隔壁14で維持されている。前面板12(3)と背面板13(3)との周縁部は封着材料15で気密に封止され、前面板12(3)と背面板13(3)の間隙のパネル内部には希ガスが充填されている。
前面板12(3)上には表示電極20(2)が形成されている。前面板12(3)が、第1の実施形態の基板3に相当し、表示電極20(2)が、第1の実施形態の電極配線2に相当する。表示電極20(2)上に誘電体層23が形成され、誘電体層23上に放電から表示電極20(2)等を保護するための保護層25(例えば、酸化マグネシウム(MgO)の蒸着膜)が形成されている。
まず、導電性ペーストに含有させる粒子として、表1で説明した粒子群Aを用意した。粒子は、アルミニウムの金属粒子とした。粒子群Aの粒子は、粒径が0.5μm以上1.5μm未満の範囲内に約95%以上の体積分率を有している。粒子群Bと粒子群Cとは用いず、粒子群Aを配合比で100重量%用いた。また、リン酸溶液には表1の実施例3と同じ重量比のリン酸溶液を用意した。すなわち、五酸化リンを10重量%、水を80重量%、エタノールを10重量%とする重量比のリン酸溶液を用意した。このリン酸溶液を、先に用意した粉末の100重量部に対して、30重量部添加した。これらの混合物に、超音波を10分間照射することでリン酸溶液中に粒子を分散させ、導電性ペーストを完成させた。
次に、プラズマディスプレイパネルを作製した。まず、導電性ペーストを、スクリーン印刷法によって、前面板12(3)と背面板13(3)の全面に塗布し、大気中150℃で乾燥させた。フォトリソグラフィ法とエッチング法によって導電性ペーストの塗布膜の余分な箇所を除去して、表示電極20(2)とアドレス電極21(2)のパターニングを行った。その後、表1の実施例11の焼成条件と同じ、大気中、焼成温度600℃、焼成時間30分間で焼成して、表示電極20(2)とアドレス電極21(2)を完成させた。この焼成では、焼成雰囲気は酸性雰囲気になるのであるが、この焼成によって、表示電極20(2)とアドレス電極21(2)との、特にアルミニウムの金属粒子が化学反応して変色等することはなかった。
(外観検査)
表示電極20(2)とアドレス電極21(2)の周りの外観検査を行った。表示電極20(2)と前面板12(3)との界面部や、表示電極20(2)と誘電体層23との界面部には、空隙の発生や変色は認められなかった。また、アドレス電極21(2)と背面板13(3)の界面部や、アドレス電極21(2)と誘電体層24の界面部には、空隙の発生や変色は認められなかった。外観上良好な状態でプラズマディスプレイパネル11(1)を作製することができた。
続いて、作製したプラズマディスプレイパネル11(1)の点灯実験を行った。プラズマディスプレイパネル11(1)のセル16を点灯(発光)させるために、点灯させたいセル16の表示電極20(2)とアドレス電極21(2)との間に電圧を印加してセル16内にアドレス放電を行い、希ガスをプラズマ状態に励起してセル16内に壁電荷を蓄積させた。次に、表示電極20(2)の対に一定の電圧を印加することで、壁電荷が蓄積されたセル16のみに表示放電が起こり紫外線22を発生させた。そして、この紫外線22を利用して蛍光体17~19を発光させ、画像(情報)を表示させた。
図3Aに、本発明の第3の実施形態に係る太陽電池セル(電子部品)31(1)の底面図(裏面側)を示し、図3Bに、図3AのA-A方向の矢視断面図を、受光面側(表面側)を上側にし、裏面側を下側にして示している。第3の実施形態では、本願発明を適用可能な電子部品1として、太陽電池セル31を例に挙げ説明する。図3Aと図3Bには、バックコンタクト型(裏面電極型)結晶シリコン太陽電池セル31(1)を1例として示している。太陽電池セル31(1)の裏面p型電極37に、本願発明の電子部品1の電極配線2を用いている。また、p型のシリコン基板からなるセルウェハ38上に裏面p型電極37(2)が形成されている。セルウェハ38(3)が、第1の実施形態の基板3に相当し、裏面p型電極37(2)が、第1の実施形態の電極配線2に相当する。バックコンタクト型(裏面電極型)の太陽電池セル31では、裏面側に、裏面p型電極37(2)と、裏面n型電極36が形成されている。
第3の実施形態では、導電性ペーストとして、表1の実施例2で使用した導電性ペーストと同じものを作製し使用した。
セルウェハ38(3)として、p型のシリコン基板を用意した。次に、セルウェハ38(3)に、レーザドリルまたはエッチング等によって、スルーホール39を形成した。次に、図示は省略したが、光入射効率を向上させるため1%苛性ソーダ(水酸化ナトリウム:NaOH)と10%イソプロピルアルコール(CH3CH(OH)CH3)の混合液を用い、セルウェハ38(3)の受光面側(表面側)をエッチングしてテクスチャを形成した。
第3の実施形態に係るバックコンタクト型太陽電池セル31(1)は、比較で作製した太陽電池セルよりも変換効率が高効率となることが判明した。これは、裏面p型電極37(2)の電気抵抗値を低下できたためと思われる。以上のことから、本発明の電極配線2(図1参照)は、バックコンタクト型太陽電池31(1)の裏面p型電極37(2)として適用できることが確認された。なお、前記で説明した太陽電池セルの裏面p型電極37(2)の作製方法は、バックコンタクト型太陽電池セルに限らず、各種太陽電池セルのp型電極の作製方法に対応できるものである。
図4に、本発明の第4の実施形態に係るセラミック多層配線基板(電子部品)41(1)の断面図を示す。第4の実施形態では、本発明に係る電子部品1(図1参照)を多層配線基板へ適用した例について説明する。図4では、多層配線基板の1例として、低温焼成セラミック(LTCC:Low Temperature Co-fired Ceramics)の5層からなる多層配線基板41(1)を示している。多層配線基板41(1)のスルーホール電極43(2)と配線44(2)に、本願発明の電子部品1の電極配線2を用いている。セラミック基板42(3)それぞれの上面と下面に配線44(2)が形成されている。図4では、配線44(2)は、6層形成されている。各層の配線44(2)は、スルーホール電極43(2)で接続されている。スルーホール電極43(2)は、セラミック基板42(3)を貫通している。多層配線基板41(1)では、配線44(2)とスルーホール電極43(2)が三次元的に形成されている。セラミック基板42(3)が、第1の実施形態の基板3に相当し、スルーホール電極43(2)と配線44(2)が、第1の実施形態の電極配線2に相当する。
第4の実施形態では、導電性ペーストとして、表1の実施例2で使用した導電性ペーストと同じものを作製し使用した。
まず、ガラス粉末とセラミックス粉末とバインダとが混練された複数枚のグリーンシートを用意した。グリーンシートは、後記する焼成によって各層のセラミック基板42(3)となる。次に、グリーンシートの所望の位置に貫通孔を開ける。貫通孔の開いたグリーンシートに対し、実施例2で使用したものと同じ導電性ペーストを、所望の配線パターンに印刷法で塗布する。このとき、貫通孔にも導電性ペーストが充填される。配線パターンに塗布された導電性ペーストが、後記する焼成によってスルーホール電極43(2)と配線44(2)になる。必要に応じて、例えば、図4に示す最下層のグリーンシートの裏面にも導電性ペーストを印刷法にて塗布し配線パターンを形成する。グリーンシートの裏面に塗布する場合には、表面に塗布した導電性ペーストを乾燥させてから行うことになる。
配線44(2)の周りの外観検査を行った。配線44(2)とセラミック基板42(3)との界面部には、空隙の発生や変色は認められなかった。外観上良好な状態で多層配線基板41(1)を作製することができた。配線44(2)とスルーホール電極43(2)の比抵抗を測定したところ、表1の実施例2と同様の設計通りの値が得られた。次に、作製した多層配線基板41(1)の断面観察を行った。その結果、作製した多層配線基板41(1)は十分緻密に焼成されていた。そのため、比抵抗も良好な設計通りの値となったと思われる。これは、グリーンシートで、700℃までの昇温過程において、略完全に脱バインダが完了していたためと考えられた。また、グリーンシートのガラス粉末が、スルーホール電極43(2)と配線44(2)と化学反応することはなく、互いの界面近傍で空隙も発生していないことが確認された。以上のことから、本発明の電極配線2(図1参照)は、多層配線基板41(1)の配線44(2)とスルーホール電極43(2)として適用できることが確認された。配線44(2)とスルーホール電極43(2)として、高価な銀厚膜の電極配線を使用する必要が無いので、コスト低減にも大きく貢献できる
2 電極配線
3 基板
4 粒子
4A 粒子群A(第1粒子群)
4B 粒子群B(第2粒子群)
5 酸化物
6 ネッキング結合部
Claims (13)
- アルミニウム(Al)及び/又はアルミニウムを含む合金からなる複数の粒子と、前記粒子を基板に固定する酸化物とを有する電極配線を具備する電子部品であって、
前記酸化物は、リン(P)とアルミニウムを渾然と含んでいることを特徴とする電子部品。 - 前記粒子は、銀(Ag)、銅(Cu)、シリコン(Si)、マグネシウム(Mg)、カルシウム(Ca)のうち少なくとも一種の元素を含むことを特徴とする請求の範囲第1項に記載の電子部品。
- 前記電極配線では、
前記粒子が、84.2体積%以上99.7体積%以下であることを特徴とする請求の範囲第1項又は第2項に記載の電子部品。 - 複数の前記粒子は、
粒径が0.5μm以上1.5μm未満の範囲内に約95%の体積分率を有する第1粒子群と、
粒径が1.5μm以上8μm未満の範囲内に約95%の体積分率を有する第2粒子群とから構成され、
前記第1粒子群と前記第2粒子群の重量は略等しいことを特徴とする請求の範囲第1項乃至第3項のいずれか1項に記載の電子部品。 - 前記粒子は、板状粒子を含むことを特徴とする請求の範囲第1項乃至第4項のいずれか1項に記載の電子部品。
- 前記酸化物は、リンと酸素(O)を主成分とし、前記酸素を考慮しない成分比率でリンの含有率が50原子%以上であることを特徴とする請求の範囲第1項乃至第5項のいずれか1項に記載の電子部品。
- 複数の前記粒子同士は、焼結によって結合していることを特徴とする請求の範囲第1項乃至第6項のいずれか1項に記載の電子部品。
- リン酸溶液と、
前記リン酸溶液中に分散し、アルミニウム及び/又はアルミニウムを含む合金からなる複数の粒子とを有することを特徴とする導電性ペースト。 - 請求の範囲第8項に記載の導電性ペーストを基板に塗布し、焼成されてなる電極配線を具備し、
前記電極配線は、
焼結によって互いに結合した複数の前記粒子と、
前記リン酸溶液から形成され、前記粒子を基板に接着させるリンの酸化物とを有することを特徴とする電子部品。 - 前記電極配線の比抵抗が、5×10-5Ωcm未満であることを特徴とする請求の範囲第1項乃至第7項、及び第9項のいずれか1項に記載の電子部品。
- 前記電極配線の比抵抗が、1×10-5Ωcm未満であることを特徴とする請求の範囲第1項乃至第7項、及び第9項乃至第10項のいずれか1項に記載の電子部品。
- 請求の範囲第1項乃至第7項、及び第9項乃至第11項のいずれか1項に記載の電子部品において、電子部品が、プラズマディスプレイパネル、太陽電池セル、セラミック実装基板のいずれかであることを特徴とする電子部品。
- リン酸溶液中に分散しているアルミニウム及び/又はアルミニウムを含む合金からなる複数の粒子を有する導電性ペーストを基板に塗布し、
塗布した前記導電性ペーストを焼成して、電極配線を形成することを特徴とする電子部品の製造方法。
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JP2012501588A JP5480360B2 (ja) | 2010-02-26 | 2010-02-26 | 電子部品、導電性ペーストおよび電子部品の製造方法 |
CN201080063260.3A CN102754534B (zh) | 2010-02-26 | 2010-02-26 | 电子部件、导电性浆料及电子部件的制造方法 |
PCT/JP2010/053077 WO2011104859A1 (ja) | 2010-02-26 | 2010-02-26 | 電子部品、導電性ペーストおよび電子部品の製造方法 |
TW100105071A TWI407457B (zh) | 2010-02-26 | 2011-02-16 | Electronic component |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012072441A (ja) * | 2010-09-29 | 2012-04-12 | Toyo Aluminium Kk | 導電性アルミニウムフィラー、および、それを含む導電性ペースト組成物、ならびに、その導電性ペースト組成物を用いて形成された導電性膜 |
CN103117130A (zh) * | 2012-12-07 | 2013-05-22 | 蚌埠市智峰科技有限公司 | 一种含有聚乙烯醋酸乙烯酯的太阳能电池导电混合浆料的制备方法 |
CN103212763A (zh) * | 2013-04-11 | 2013-07-24 | 中国电子科技集团公司第十四研究所 | 一种ltcc器件装焊方法 |
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JP2011034894A (ja) * | 2009-08-05 | 2011-02-17 | Hitachi Chem Co Ltd | Cu−Al合金粉末、それを用いた合金ペーストおよび電子部品 |
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- 2010-02-26 JP JP2012501588A patent/JP5480360B2/ja not_active Expired - Fee Related
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JP2012072441A (ja) * | 2010-09-29 | 2012-04-12 | Toyo Aluminium Kk | 導電性アルミニウムフィラー、および、それを含む導電性ペースト組成物、ならびに、その導電性ペースト組成物を用いて形成された導電性膜 |
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CN103212763A (zh) * | 2013-04-11 | 2013-07-24 | 中国电子科技集团公司第十四研究所 | 一种ltcc器件装焊方法 |
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CN102754534A (zh) | 2012-10-24 |
JPWO2011104859A1 (ja) | 2013-06-17 |
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CN102754534B (zh) | 2016-04-06 |
TW201212044A (en) | 2012-03-16 |
JP5480360B2 (ja) | 2014-04-23 |
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