WO2011096132A1 - 流体制御器 - Google Patents
流体制御器 Download PDFInfo
- Publication number
- WO2011096132A1 WO2011096132A1 PCT/JP2010/072105 JP2010072105W WO2011096132A1 WO 2011096132 A1 WO2011096132 A1 WO 2011096132A1 JP 2010072105 W JP2010072105 W JP 2010072105W WO 2011096132 A1 WO2011096132 A1 WO 2011096132A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piston
- casing
- valve stem
- gas introduction
- fluid
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
Definitions
- the present invention relates to a fluid controller, and more particularly to a fluid controller in which the open / close state of a fluid passage is visible.
- Patent Document 1 proposes a fluid controller having an open / close display function.
- Patent Document 1 requires a large number of parts for the opening / closing display function, which complicates the fluid controller and increases the cost.
- An object of the present invention is to provide a fluid controller that can visually recognize its open / closed state with a simple configuration.
- the fluid controller includes a body provided with a fluid passage, a casing provided above the body, a valve body that opens and closes the fluid passage, and opens or closes the valve body in the opening or closing direction.
- a fluid controller including a valve stem to be moved, a piston provided on the valve stem, and a piston driving means for driving the piston
- the casing is formed to open upward
- the piston is a valve It is characterized by being provided at the upper end of the valve rod so that the upper end of the piston is exposed from the opening of the casing when the rod is in the upper position.
- the fluid controller is, for example, an on-off valve called an air operated valve, but is not limited thereto.
- the valve rod, piston, etc. are usually covered with a casing provided with a top wall so that the open / close state is not visible from the outside.
- the upper end portion of the piston that moves up and down is exposed from the opening of the casing, and its open / closed state can be known by visually recognizing the state of the piston. For example, when the valve stem is in the upper position, it is exposed from the opening of the casing, but when the valve stem is in the lower position, an indication such as a mark line is put on the part of the piston accommodated in the casing. If this display is visible, it can be determined as “open”, and if it is not visible, it can be determined as “closed”, and the open / close state of the fluid controller can be easily confirmed from the outside without using any other open / close display member. it can.
- the number of pistons may be one, or may be plural.
- the uppermost piston exposes the upper end of the piston from the opening of the casing, and the other piston is accommodated in the casing.
- the piston driving means moves the valve rod by applying a driving gas (for example, compressed air) to the piston, and may move the valve rod upward and downward, or may be a compression coil spring or the like.
- a driving gas for example, compressed air
- the elastic member urges the valve rod so that it is always in the open position or the closed position, and the piston drive means moves the valve rod against the urging force of the elastic member. It may be allowed.
- the fluid controller of the present invention is suitable for applications in which it is preferable to confirm the open / closed state by a limit switch. That is, since the upper end portion of the piston is exposed from the opening of the casing, it is easy to attach a limit switch that can detect the position of the piston when the fluid controller is used. The control accuracy of various control devices using the can be improved.
- the upper end surface of the piston In the closed state of the fluid passage with the valve stem in the lower position, the upper end surface of the piston may protrude above the upper end surface of the casing, and in the closed state of the fluid passage with the valve stem in the lower position, The upper end surface of the piston and the upper end surface of the casing may be flush with each other. The latter is more preferable in terms of ease of visual recognition.
- the fluid controller is a so-called double piston type, and a piston is also provided in the middle part of the valve stem.
- a through hole is provided in the piston provided at the upper end of the valve stem, and a valve is provided at the lower part of the through hole.
- the upper end of the rod is inserted, the upper part of the through-hole is used as a drive gas introduction part, a drive gas introduction chamber is formed below each piston, and the axial direction extends downward from the drive gas introduction part inside the valve stem
- a radial passage may be formed from the passage and the axial passage to each drive gas introduction chamber. If it does in this way, the structure of a piston drive means can be simplified and the movement of a valve stem can be performed accurately.
- the fluid controller is a so-called single piston type, and the piston is only one provided at the upper end portion of the valve stem, and the valve stem is provided with an upper half portion provided integrally with the piston, and the upper half portion.
- a driving gas introduction chamber formed below the piston, a driving gas introduction portion opening upward is provided at the upper portion of the piston, and an axial passage connected to the driving gas introduction portion and A radial passage that leads from the axial passage to the drive gas introduction chamber may be formed in the lower part of the piston and the upper end of the valve stem. Even in this case, the structure of the piston driving means can be simplified and the valve stem can be moved with high accuracy.
- the driving gas introduction portion provided in the piston is formed by threading, and thus, the casing is threaded to form the driving gas introduction portion. This eliminates the need for manufacturing the casing.
- top and bottom are referred to as the top and bottom of the figure (the body side is the bottom and the casing side is the top), but this top and bottom is for convenience, and the top and bottom are reversed. Sometimes it is used from side to side.
- the casing is formed to open upward, and the piston has a valve stem so that the upper end of the piston is exposed from the opening of the casing when the valve stem is in the upper position. Since it is provided at the upper end, the open / closed state can be visually confirmed by checking the state of the piston.
- the fluid controller (1) includes a body (2) provided with a fluid inflow passage (2a) and a fluid outflow passage (2b). 2), the casing (3) provided above the body (2), the annular valve seat (4) provided at the periphery of the fluid inflow passage (2a), and the annular valve seat (4) being pressed or separated.
- the casing (3) includes a lower casing (21) fixed to the body (2) and an upper casing (22) coupled to the lower casing (21) by a connector (23).
- the valve stem (7) is formed of two parts (stem (24) and stem piston (25)).
- the stem (24) is composed of a shaft portion (24a) provided with a female screw portion at the upper portion and a flange portion (24b) provided at the lower end portion of the shaft portion (24a), and the lower surface of the flange portion (24b). Is in contact with the diaphragm retainer (6).
- the stem piston (25) has a shaft portion (25a) whose lower end is screwed to the shaft portion (24a) of the stem (24), and a flange portion (25b) formed integrally with an intermediate portion of the shaft portion (25a). It consists of.
- the flange portion (25b) forms the second piston (9), and the valve rod (7) is formed by combining the stem (24) and the shaft portion (25a) of the stem piston (25). .
- the piston drive means (11) causes the drive gas to act on each piston (8), (9) in order to move the valve rod (7) upward, and the upper first drive gas introduction chamber (26) ) And a lower second driving gas introduction chamber (27) are formed below the pistons (8) and (9).
- the connector (23) that connects the lower casing (21) and the upper casing (22) has a ring shape with a through-hole through which the valve stem (7) can be vertically moved and fluid-tightly inserted.
- a male screw is formed.
- a female screw portion that is screwed to the male screw of the connector (23) is formed, and the lower casing (21) is
- the upper casing (22) is screwed into the connector (23) from above, so that the lower casing (21) and the upper casing (22) are abutted with each other and coupled. Thereby, the movement space of the 1st piston (8) and the 2nd piston (9) is formed above and below the connector (23), respectively.
- the first piston (8) is disposed in the upper casing (22) so as to be movable up and down so that the lower surface thereof faces the upper surface of the connector (23), and the second piston (9) It is arranged in the lower casing (21) so as to be movable up and down so that the upper surface faces the lower surface of the connector (23).
- An O-ring (31) is provided between the outer periphery of the first piston (8) and the upper casing (22), and between the outer periphery of the second piston (9) and the lower casing (21).
- an O-ring (32) is provided.
- An O-ring (33) is also provided between the inner periphery of the connector (23) and the outer periphery of the valve stem (7).
- the upper end of the connector (23) is not provided with a male screw, and an O-ring (34) is provided between the upper end of the connector (23) and the upper casing (22).
- the driving gas is introduced into (26) so as to receive an upward force
- the second piston (9) is disposed in the lower casing (21) so as to be vertically movable, and the second piston (9 ) And the inward flange portion (28) of the lower casing (21), the driving gas is introduced into the second driving gas introduction chamber (27) so as to receive an upward force.
- an inward flange portion (28) is formed through which the valve rod (7) can be moved up and down and fluid-tightly inserted through an O-ring (35).
- the second drive gas introduction chamber (27) is formed by making the upper surface of the inward flange portion (28) face the lower surface of the second piston (9).
- the compression coil spring (10) is received by the inward flange portion (28) and the flange portion (24b) of the stem (24).
- the upper end of the valve stem (7) (the shaft (25a) of the stem piston (25)) is provided with a male thread
- the first piston (8) is provided with a through hole (8a).
- the lower part of (8a) is provided with a female thread part screwed onto the upper end of the valve stem (7), and the valve stem (7) and the first piston (8) pass through the first piston (8).
- the upper end of the valve stem (7) is inserted into the lower portion of the hole (8a) and screwed together so as to be coupled.
- the upper casing (22) is formed so as to open upward, and the first piston (8) moves the piston upper end from the opening of the upper casing (22) when the valve rod (7) is in the upper position.
- the valve rod (7) is provided at the upper end so as to be exposed.
- the upper part of the through hole (8a) of the first piston (8) is a drive gas introduction part (41) to which a pipe for introducing drive gas can be connected.
- the axial passage (42) extending downward from the driving gas introduction portion (41), and the radial direction from the middle portion of the axial passage (42) to the first driving gas introduction chamber (26).
- a radial passage (44) is formed from the lower end of the passage (43) and the axial passage (42) to the second drive gas introduction chamber (27).
- the position of the first piston (8) can be detected on the user side of the fluid controller (1).
- a limit switch can be attached.
- the top wall is provided in the casing and the drive gas introduction part is provided here, whereas in the fluid controller (1), the drive gas introduction part (41) is provided in the first piston (8). ) Is provided, it is easy to form the casing (3).
- the upper end of the first piston (8) is not only when the valve stem (7) is in the upper position but also when it is in the lower position (that is, when the fluid inflow passage (2a) is open or closed). Since it is exposed from the opening of the casing (3), it is necessary to provide a mark line in order to know the open / closed state of the fluid controller (1). With the fluid passage closed with (57) in the lower position, the upper end surface of the first piston (58) and the upper end surface of the casing (53) are flush with each other, so that the fluid controller (1) It becomes easier to check the open / closed state.
- the fluid controller (51) includes a body (52) provided with a fluid inflow passage (52a) and a fluid outflow passage (52b). 52), a casing (53) provided above the body (52), an annular valve seat (54) provided at the periphery of the fluid inflow passage (52a), and the annular valve seat (54).
- the casing (53) includes a lower casing (71) fixed to the body (52) and an upper casing (72) coupled to the lower casing (71) by a connector (73).
- the valve stem (57) is formed of two parts (stem (74) and stem piston (75)).
- the stem (74) is composed of a shaft portion (74a) having a female screw portion at the upper portion and a flange portion (74b) provided at the lower end portion of the shaft portion (74a), and the lower surface of the flange portion (74b). Is in contact with the diaphragm retainer (56).
- the stem piston (75) has a shaft portion (75a) whose lower end is screwed to the shaft portion (74a) of the stem (74), and a flange portion (75b) integrally formed at an intermediate portion of the shaft portion (75a). It consists of.
- the flange portion (75b) forms a second piston (59), and the stem (74) and the shaft portion (75a) of the stem piston (75) are combined into a valve rod (57). .
- the piston drive means (61) causes the drive gas to act on the pistons (58) and (59) in order to move the valve rod (57) upward, and an upper first drive gas introduction chamber (76) for that purpose. ) And a lower second driving gas introduction chamber (77) are formed below the pistons (58) and (59).
- the connector (73) that couples the lower casing (71) and the upper casing (72) has a ring shape with a through-hole through which the valve rod (57) is vertically movable and fluid-tightly inserted.
- a male screw is formed.
- a female screw portion that is screwed to the male screw of the connector (73) is formed, and the lower casing (71) is The upper casing (72) is screwed into the connector (73) from above, so that the lower casing (71) and the upper casing (72) are abutted with each other and coupled.
- the first piston (58) is disposed in the upper casing (72) so as to be movable up and down so that its lower surface faces the upper surface of the connector (73), and the second piston (59) It is arranged in the lower casing (71) so as to be movable up and down so that the upper surface faces the lower surface of the connector (73).
- An O-ring (31) is provided between the outer periphery of the first piston (58) and the upper casing (72), and between the outer periphery of the second piston (59) and the lower casing (71).
- an O-ring (32) is provided.
- An O-ring (33) is also provided between the inner periphery of the connector (73) and the outer periphery of the valve stem (57).
- the upper end of the connector (73) is not provided with a male screw, and an O-ring (34) is provided between the upper end of the connector (73) and the upper casing (72).
- the first piston (58) is disposed in the upper casing (72) so as to be movable up and down, and is formed between the first piston (58) and the connector (73).
- the driving gas is introduced into (76) so as to receive an upward force
- the second piston (59) is disposed in the lower casing (71) so as to be vertically movable, and the second piston (59 ) And the inward flange portion (78) of the lower casing (71), the driving gas is introduced into the second driving gas introduction chamber (77) so as to receive an upward force. Yes.
- an inward flange portion (78) is formed through which the valve rod (57) can move up and down and is fluid-tightly inserted through the O-ring (35).
- the second drive gas introduction chamber (77) is formed by making the upper surface of the inward flange portion (78) face the lower surface of the second piston (59).
- the compression coil spring (60) is received by the inward flange portion (78) and the flange portion (74b) of the stem (74).
- a male thread is provided at the upper end of the valve stem (57) (the shaft (75a) of the stem piston (75)), and a through hole (58a) is provided in the first piston (58).
- a female thread portion screwed into the upper end of the valve stem (57) is provided at the lower portion of (58a), and the valve stem (57) and the first piston (58) penetrate the first piston (58).
- the upper end portion of the valve stem (57) is inserted into the lower portion of the hole (58a) and screwed together to be coupled.
- the upper casing (72) is formed so as to open upward, and in the position below the valve rod (57) (the fluid inflow passage (52a) is closed) shown in FIG.
- the upper end surface is flush with the upper end surface of the upper casing (72), and at the upper position of the valve rod (57) shown in FIG. 4 (the fluid inflow passage (52a) is open), the first piston (58 ) Is provided at the upper end of the valve rod (57) so that the upper end of the piston is exposed from the opening of the upper casing (72).
- the upper part of the through hole (58a) of the first piston (58) is a drive gas introduction part (81) to which a pipe for introducing drive gas can be connected. And, in the valve stem (57), an axial passage (82) extending downward from the driving gas introduction portion (81), and a radial direction from the middle portion of the axial passage (82) to the first driving gas introduction chamber (76). A radial passage (84) is formed from the lower end of the passage (83) and the axial passage (82) to the second drive gas introduction chamber (77). As a result, the number of driving gas introduction sections (81) is one, and the driving gas flows from the driving gas introduction section (81) into the respective driving gas introduction chambers (76) (77).
- the valve stem (57) In a state where the driving gas is not introduced into each driving gas introduction chamber (76) (77), the valve stem (57) is in the closed position (downward position) by the biasing force of the compression coil spring (60). Accordingly, the first piston (58) is also in the lower position.
- the valve rod (57) When the driving gas is introduced into each driving gas introduction chamber (76) (77), the valve rod (57) is moved upward against the urging force of the compression coil spring (60).
- the first piston (58) also moves to the upper position.
- the upper end of the first piston (58) moving up and down in this way is exposed from the opening of the casing (53) except that it is flush with the upper end surface of the casing (53) in the closed position.
- the upper end surface of the first piston (58) and the casing (53) ( The upper casing (72)) is flush with the upper end surface of the upper casing (72) so that the difference from the valve rod (57) upper position (the fluid inflow passage (52a) opened) shown in FIG.
- the position of the first piston (58) can be detected on the user side of the fluid controller (51).
- a limit switch can be attached.
- the top wall is provided in the casing and the drive gas introduction part is provided here, whereas in the fluid controller (51), the drive gas introduction part (81) is provided in the first piston (58). ) Is provided, it is easy to form the casing (53).
- the fluid controller (91) includes a body (92) provided with a fluid inflow passage (92a) and a fluid outflow passage (92b). 92), a casing (93) provided above the body (92), an annular valve seat (94) provided at the periphery of the fluid inflow passageway (92a), and the annular valve seat (94) being pressed or separated.
- the valve stem (97) that moves the diaphragm (95) in the opening or closing direction by means of a piston (98) provided at the upper end of the valve stem (97), and a compression coil that biases the valve stem (97) downward
- a spring (elastic member) (99) and piston driving means (100) for driving the piston (98) are provided.
- the casing (93) includes a lower casing (101) fixed to the body (92) and an upper casing (102) coupled to the lower casing (101).
- the body (92) is provided with a cylindrical upward projecting portion (92a) having a threaded portion formed on the outer periphery, and a flange portion (101a) is provided at an intermediate portion of the lower casing (101). Yes.
- the upper casing (102) has an inward flange portion (102a) fitted in the vicinity of the upper end portion of the lower casing (101).
- a step portion (101b) is provided at a position higher than the flange portion (101a), and provided on the inner periphery of the inward flange portion (102a) of the upper casing (102).
- the step (102b) is received by the step (101b) of the lower casing (101).
- the upper end portion of the upper casing (102) protrudes upward from the inward flange portion (102a) of the lower casing (101), and the retaining ring (107) is fitted to this protruding portion,
- the upper casing (102) is coupled to the lower casing (101).
- the valve stem (97) is formed of two parts (stem (104) and stem piston (105)).
- the stem (104) is composed of a shaft portion (104a) provided with a female screw portion at the upper portion and a flange portion (104b) provided at the lower end portion of the shaft portion (104a), and the lower surface of the flange portion (104b). Is in contact with the diaphragm retainer (96).
- the stem piston (105) includes a shaft portion (105a) having a lower end screwed to the shaft portion (104a) of the stem (104), and a flange portion (105b) formed integrally with the upper end portion of the shaft portion (105a). It consists of.
- the flange part (105b) forms a piston (98), and the stem part (the upper half of the valve stem integrated with the piston) (105a) and the stem (the upper half of the valve stem) of the stem piston (105)
- the valve rod (97) is a combination of the valve rod lower half (104a) screwed to (105a).
- the piston driving means (100) is for operating the driving gas on the piston (98) in order to move the valve stem (97) upward, and the driving gas introduction chamber (106) for that purpose is located below the piston (98). Is formed. A portion above the inward flange portion (102a) of the upper casing (102) serves as a moving space for the piston (98).
- the piston (98) is disposed in the upper casing (102) so as to be vertically movable so that the lower surface thereof faces the upper surface of the inward flange portion (102a) of the upper casing (102).
- An O-ring (31) is provided between the outer periphery of the piston (98) and the upper casing (102).
- An O-ring (33) is also provided between the lower casing (101) and the outer periphery of the valve stem (97).
- An O-ring (36) is also provided between the lower casing (101) and the upper casing (102).
- the compression coil spring (99) is received by the flange portion (104b) of the stem (104) and the step portion provided in the lower casing (101).
- the upper casing (102) is formed so as to open upward, and the upper end surface of the piston (98) at the position below the valve rod (97) (the fluid inflow passage (92a) is closed) shown in FIG. Is flush with the upper end surface of the upper casing (102), and in the upper position of the valve stem (97) shown in FIG. 6 (the fluid inflow passage (92a) is open), the piston (98)
- the upper end of the valve stem (97) is provided so that the upper end of the piston is exposed from the opening of the casing (102).
- the piston (98) is provided with a through hole (98a), and the upper part of the through hole (98a) is a drive gas introduction part (111) to which a pipe for introducing the drive gas can be connected.
- a short axial passage (112) extending downward from the drive gas introduction part (111) is formed inside the piston (98) from the lower end to the upper end of the valve stem (97), and the upper end of the valve stem (97)
- a radial passage (113) that communicates from the lower end of the axial passage (112) to the drive gas introduction chamber (106) is formed inside.
- valve stem (97) In a state where the driving gas is not introduced into the driving gas introduction chamber (106), the valve stem (97) is in the closed position (downward position) by the urging force of the compression coil spring (99). The piston (98) is also in the down position.
- the valve stem (97) When the driving gas is introduced into the driving gas introduction chamber (106), the valve stem (97) is moved upward against the urging force of the compression coil spring (99). 98) also moves to the upper position.
- the upper end of the piston (98) moving up and down in this way is exposed from the opening of the casing (93) except that it is just flush with the upper end surface of the casing (93) in the closed position.
- a limit switch that can detect the position of the piston (98) is attached on the user side of the fluid controller (91) because the upper end of the piston (98) is exposed from the opening of the casing (93). It becomes possible. Furthermore, conventionally, a top wall is provided in the casing, and a driving gas introduction part is provided here, whereas in the fluid controller (91), the driving gas introduction part (111) is provided in the piston (98). Since it is provided, the casing (93) can be easily formed.
- the cost can be reduced, and the open / close state can be easily confirmed from the outside.
- the range of use of the fluid controller can be expanded.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Chairs Characterized By Structure (AREA)
Abstract
Description
(2) ボディ
(2a)(2b) 流体通路
(3) ケーシング
(5) ダイヤフラム(弁体)
(7) 弁棒
(8) 第1ピストン
(8a) 貫通孔
(9) 第2ピストン
(11) ピストン駆動手段
(26) 第1駆動ガス導入室
(27) 第2駆動ガス導入室
(41) 駆動ガス導入部
(42) 軸方向通路
(43)(44) 径方向通路
(51) 流体制御器
(52) ボディ
(52a)(52b)流体通路
(53) ケーシング
(55) ダイヤフラム(弁体)
(57) 弁棒
(58) 第1ピストン
(58a) 貫通孔
(59) 第2ピストン
(61) ピストン駆動手段
(76) 第1駆動ガス導入室
(77) 第2駆動ガス導入室
(81) 駆動ガス導入部
(82) 軸方向通路
(83)(84) 径方向通路
(91) 流体制御器
(92) ボディ
(92a)(92b)流体通路
(93) ケーシング
(95) ダイヤフラム(弁体)
(97) 弁棒
(98) 第1ピストン
(98a) 貫通孔
(100) ピストン駆動手段
(106) 駆動ガス導入室
(111) 駆動ガス導入部
(112) 軸方向通路
(113) 径方向通路
(104) ステム(弁棒の下半部)
(105a) ステムピストン軸部(弁棒の上半部)
Claims (4)
- 流体通路が設けられたボディと、ボディの上方に設けられたケーシングと、流体通路を開閉する弁体と、上昇または下降することにより弁体を開または閉方向に移動させる弁棒と、弁棒に設けられたピストンと、ピストンを駆動するピストン駆動手段とを備えている流体制御器において、
ケーシングは、上方に開口するように形成されており、ピストンは、弁棒が上方位置にあるときにケーシングの開口からピストン上端部を露出させるように、弁棒上端部に設けられていることを特徴とする流体制御器。 - 弁棒が下方位置にある流体通路閉の状態において、ピストンの上端面とケーシングの上端面とが面一となされていることを特徴とする請求項1の流体制御器。
- 弁棒の中間部にもピストンが設けられており、弁棒上端部に設けられたピストンに貫通孔が設けられて、この貫通孔下部に弁棒上端部が挿入されており、貫通孔上部が駆動ガス導入部とされるとともに、各ピストンの下方に駆動ガス導入室が形成され、弁棒内部に、駆動ガス導入部から下方にのびる軸方向通路および軸方向通路から各駆動ガス導入室に通じる径方向通路が形成されていることを特徴とする請求項1または2の流体制御器。
- ピストンは、弁棒上端部に設けられた1つだけとされ、弁棒は、ピストンに一体に設けられた上半部と、この上半部にねじ合わされた下半部とからなり、ピストンの下方に駆動ガス導入室が形成されるとともに、ピストン上部に上方に開口する駆動ガス導入部が設けられ、駆動ガス導入部に連なる軸方向通路および軸方向通路から駆動ガス導入室に通じる径方向通路がピストン下部および弁棒上端部に形成されていることを特徴とする請求項1または2の流体制御器。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/575,951 US9115813B2 (en) | 2010-02-05 | 2010-12-09 | Fluid control device |
CN201080065200.5A CN102812275B (zh) | 2010-02-05 | 2010-12-09 | 流体控制器 |
KR1020127022696A KR101474624B1 (ko) | 2010-02-05 | 2010-12-09 | 유체 제어기 |
DE201011005232 DE112010005232B4 (de) | 2010-02-05 | 2010-12-09 | Fluidsteuervorrichtung |
Applications Claiming Priority (2)
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JP2010023676A JP5613420B2 (ja) | 2010-02-05 | 2010-02-05 | 流体制御器 |
JP2010-023676 | 2010-02-05 |
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WO2011096132A1 true WO2011096132A1 (ja) | 2011-08-11 |
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PCT/JP2010/072105 WO2011096132A1 (ja) | 2010-02-05 | 2010-12-09 | 流体制御器 |
Country Status (7)
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US (1) | US9115813B2 (ja) |
JP (1) | JP5613420B2 (ja) |
KR (1) | KR101474624B1 (ja) |
CN (1) | CN102812275B (ja) |
DE (1) | DE112010005232B4 (ja) |
TW (1) | TWI475168B (ja) |
WO (1) | WO2011096132A1 (ja) |
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SG11201509861PA (en) * | 2013-10-30 | 2015-12-30 | Fujikin Kk | Vacuum valve |
JP6527684B2 (ja) * | 2014-10-31 | 2019-06-05 | 株式会社フジキン | バルブ、流体制御装置、半導体制御装置、および半導体製造方法 |
US10352470B2 (en) * | 2015-11-17 | 2019-07-16 | Ge Aviation Systems Llc | Control valve and air starting system |
CN107532732B (zh) * | 2016-01-26 | 2020-08-04 | 株式会社富士金 | 流体控制器 |
JP7015111B2 (ja) * | 2017-01-31 | 2022-02-08 | 株式会社キッツエスシーティー | バルブ用アクチュエータとこれを備えたダイヤフラムバルブ |
JP7262559B2 (ja) * | 2017-01-31 | 2023-04-21 | 株式会社キッツエスシーティー | バルブ用アクチュエータとこれを備えたダイヤフラムバルブ |
US11162606B2 (en) * | 2017-03-17 | 2021-11-02 | Fujikin Irc. | Fluid control device |
CN111742170B (zh) * | 2018-02-22 | 2022-07-15 | 斯瓦戈洛克公司 | 具有流动调整机构的流动控制装置 |
IL268254B1 (en) * | 2019-07-24 | 2024-06-01 | Ham Let Israel Canada Ltd | Flow control accessory |
CN114688318B (zh) * | 2022-03-03 | 2024-05-31 | 沈阳航天新光集团有限公司 | 一种双路电爆活门 |
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TWI475168B (zh) | 2015-03-01 |
DE112010005232B4 (de) | 2015-01-08 |
CN102812275B (zh) | 2015-05-20 |
TW201139900A (en) | 2011-11-16 |
KR101474624B1 (ko) | 2014-12-18 |
US9115813B2 (en) | 2015-08-25 |
CN102812275A (zh) | 2012-12-05 |
JP5613420B2 (ja) | 2014-10-22 |
JP2011163372A (ja) | 2011-08-25 |
DE112010005232T5 (de) | 2012-11-15 |
US20120319024A1 (en) | 2012-12-20 |
KR20120118491A (ko) | 2012-10-26 |
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