TW499555B - Pinch valve - Google Patents
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- TW499555B TW499555B TW90123614A TW90123614A TW499555B TW 499555 B TW499555 B TW 499555B TW 90123614 A TW90123614 A TW 90123614A TW 90123614 A TW90123614 A TW 90123614A TW 499555 B TW499555 B TW 499555B
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Abstract
Description
499555 A7 _B7___ 五、發明説明（1 ) <技術領域> 本發明係在化學工廠、半導體製造、食品、生物等 之各種產業領域中，關於使用於流體輸送配管之夾緊闊， 更詳細的是關於一種小型化、對於闊的開關使管體的耐久 性提升之夾緊閥。 〈背景技術〉 習知，夾緊闊被提出種種案，但是其中之一例被開 示於實公昭45-3264號公報。若依據此等，如第11圖、第12 圖所示，在被嵌裝於腳台47與腳杆48所構成之腳構件49上 之筒50之上側下側之2個活塞51、52中，上側之活塞51被 固定於軸杆53的上端部，下側的活塞52被固定於遊嵌在軸 杆53之管軸54的上端部。在管轴54下邊設置翼片55，翼片 55介由連結棒被固定於下側夾壓子57。在一方轴杆53的下 端部固定上側夾壓子58。另外*在上側夾壓子58、下侧夾 壓子57間夾壓藉橫架於嵌入兩端部之凸緣59間之2個橫杆 60與腳構件49所支撐之闊管體61的中央部，藉將適當壓榨 空氣壓入穿設於筒50之孔62、63、64，使連結於活塞51、 52之上侧夾壓子58、下侧夾壓子57對稱的上下動，使閥管 體61開放、閉塞。 然而，現在配置多種多樣之配管與控制機器，進行 複雜之配管設計之半導體等之製造裝置，裝置本身逐漸小 型化。伴隨此等，對於使用於該裝置内配管之夾緊閥，也 被殷切盼望為了省能源之小型化，該裝置内之夾緊閥的小 型化為重大之問題。另外，也正要求可以作微小流量的調 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） -4 - (請先閲讀背面之注意事項再填寫本頁) 訂丨 -曝· 499555 A7 ____ B7_ 五、發明説明（2 ) 整之闊。 但是，在前述構造之夾緊閥，驅動部與闊本體形成 別體之構造，在筒50與流路部之閥管體61之間，由於設置 有腳構件49與腳台47及翼片55，所以闊全體的高度變高無 法小型化。為此，在半導體製造等之裝置内配管中，就完 全無法作為夾緊閥使用。另外，在如此之構造，由於很難 任意的調整闊管體61的開度，所以也無法進行微小量的調 整。 〈發明的開示〉 本發明鑒於如以上之習知技術的問題點，係以提供 一種夾緊閥為目的，與習知之夾緊闊相比夾緊闊的全體高 度較低，具有小型化，另外，在闊開關運轉中，格外的使 管體的耐久性提升，延長闊的耐用期間，另外，可以作微 小流量的調整。 為了達成上述目的，本發明的構造，係包含有：本 體，係用以收納構成流體流路之彈性的管體；筒本體，其 下端接合於在本體的上部，且於内部下方具有直徑較於内 部上方之第1筒部擴大之.第2筒；第1活塞，係可上下移動 上下移動地滑動接觸於第1筒部的内周面；及，第2活塞， 係可上下移動上下移動地滑動接觸於第2筒部的内周面； 又，在第1活塞安裝由下面中央下垂貫通第2活塞且在下端 具有第1夾壓子之第1連動棒，在第2活塞安裝由下面兩端 下垂貫通第1夾壓子且在下端具有第2夾壓子之第2連動 棒’而第1及第2夾壓子係配置成由上下挾持前述彈性的管 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） (請先閲讀背面之注意事項再填窝本頁) -訂· :線丨499555 A7 _B7___ V. Description of the Invention (1) < Technical Field > The present invention relates to a variety of industrial fields, such as chemical plants, semiconductor manufacturing, food, and biology, regarding the clamping of fluid conveying pipes in more detail. The invention relates to a clamp valve which is miniaturized and has improved durability for a wide switch. <Background Art> It is known that clamps have been proposed in various cases, but one of them is disclosed in Sho Sho 45-3264. According to this, as shown in FIG. 11 and FIG. 12, the two pistons 51 and 52 on the upper side and the lower side of the cylinder 50 which is fitted on the foot member 49 formed by the foot 47 and the foot lever 48 The upper piston 51 is fixed to the upper end portion of the shaft 53, and the lower piston 52 is fixed to the upper end portion of the pipe shaft 54 which is fitted to the shaft 53. A fin 55 is provided below the tube shaft 54, and the fin 55 is fixed to the lower clamp 57 via a connecting rod. An upper clamp 58 is fixed to a lower end portion of the one shaft 53. In addition * the upper clamp 58 and the lower clamp 57 are sandwiched between the middle of the wide tube 61 supported by the crossbar 60 and the leg member 49 by a horizontal frame inserted between the flanges 59 inserted at both ends. By pressing the appropriate compressed air into the holes 62, 63, and 64 provided in the cylinder 50, the upper clamp 58 connected to the pistons 51 and 52 and the lower clamp 57 are moved up and down symmetrically to make the valve The tube body 61 is open and closed. However, a variety of piping and control devices are now in place, and semiconductors and other manufacturing equipment for complex piping design are being manufactured, and the equipment itself is gradually miniaturized. Along with this, the pinch valve used in the piping of the device is also eagerly expected to reduce the size of the pinch valve in the device in order to save energy. In addition, we are also requesting that the paper size that can be adjusted for small flows is in accordance with the Chinese National Standard (CNS) A4 specification (210X297 mm) -4-(Please read the precautions on the back before filling in this page) Order 丨 -Exposure · 499555 A7 ____ B7_ V. Description of the Invention (2) Wide. However, in the clamp valve having the aforementioned structure, the driving portion and the wide body are formed as separate structures. Between the cylinder 50 and the valve pipe body 61 of the flow path portion, a foot member 49, a foot stand 47, and a flap 55 are provided. , So the height of the entire body becomes high, and it cannot be miniaturized. For this reason, piping in devices such as semiconductor manufacturing cannot be used as a pinch valve at all. In addition, with such a structure, it is difficult to arbitrarily adjust the opening degree of the wide tube body 61, so that it is not possible to perform a small amount of adjustment. <Invention of the Invention> In view of the problems of the conventional technology as described above, the present invention aims to provide a clamping valve, which has a lower overall height than the conventional clamping wide, and has a small size. In the wide switch operation, the durability of the pipe body is particularly improved, and the wide durability period is extended. In addition, a small flow rate adjustment can be made. In order to achieve the above object, the structure of the present invention includes: a body for receiving an elastic pipe body constituting a fluid flow path; a cylinder body whose lower end is joined to the upper part of the body and has a diameter lower than the inside. The first cylinder above the inner part is enlarged. The second cylinder; the first piston is in sliding contact with the inner peripheral surface of the first cylinder in an up-and-down direction; and the second piston is in an up-and-down direction. The first cylinder is slidably in contact with the inner peripheral surface of the second cylinder. The first piston is attached to the first piston through the center of the lower surface, penetrating through the second piston and having the first clamping element at the lower end. The second pendant rod penetrating through the first clamper and having the second clamper at the lower end is arranged at the lower end, and the first and second clampers are arranged to hold the elastic tube up and down. The paper dimensions are applicable to Chinese national standards ( CNS) A4 size (210X297mm) (Please read the precautions on the back before filling in this page) -Order ·: Line 丨
499555 A7 ______B7 ^五、發明説明（3 ) 體，在第2活塞與第1夾壓子之間配設賦予第1夾壓子勢能 之彈簧彈性體，在連通於由第1活塞的下端面與第2活塞的 上細面與清本體的内周面所圍成的空間部之開口部係設置 於筒本體之夾緊闊中，又，該開口部設置在筒本體的上面， 且在第1活塞的上部一體地突設貫通前述開口部，開度調 整用雄螺栓部，.而下端面壓接•離間於筒本體的上端面之 制動器與壓接於前述制動器上端面之鎖緊螺母則可自由旋 動地螺合於前述開度調整用雄螺栓部。 本發明之最好實施型態，係在前述管體的兩端結合 一對之接頭部’在筒本體的下端部之流路方向，設置用以 容納前述一對接頭部之一對切口部〇 另外，本鱧在流路轴線上設置有用以容納管體及接 埽部之溝，且在與流路軸線垂直之位置設置有可供該第2 失壓子可上下移動地嵌裝於其中之導引溝。進一步，第1 失壓子於關於流路軸線之對稱位置設置有供第2連動棒貫 通之第1貫通孔，且第2活塞設置有供第1連動棒在密封狀 態滑動接觸於中央部之第2貫通孔。 - 更進一步，若依據其他之實施型態，在管體的外周 面設置保護部。 另外，與第1夾壓子的流路轴線垂直之方向的尺寸， 係形成比前述導引溝的尺寸更大者。 另外，管體的材質為EPDM、氟素橡膠、矽氧橡膠、 或此等之複合體。 更進一步’最好的是管體係由四氟化聚乙烯與橡膠 本紙張岐_中s國規格⑵0謂公釐) (請先閲讀背面之注意事項再填寫本頁) *、可| :線丨499555 A7 ______B7 ^ V. Description of the invention (3) The spring elastic body which gives the potential energy of the first pressure element is arranged between the second piston and the first pressure element, and communicates with the lower end surface of the first piston and the The opening portion of the space portion surrounded by the upper thin surface of the second piston and the inner peripheral surface of the clear body is provided in the clamping space of the barrel body. The opening portion is provided on the upper surface of the barrel body, and is located in the first piston. The upper part of the upper part is integrally provided with a male bolt part for penetrating through the opening, and the lower end can be crimped to the upper end face of the cylinder body and the lock nut crimped to the upper end face of the cylinder can be free It is screwed to the male bolt portion for opening adjustment. The best embodiment of the present invention is a combination of a pair of joint portions at both ends of the pipe body. In the flow path direction of the lower end portion of the barrel body, a pair of cutout portions is provided to accommodate one of the pair of joint portions. In addition, the present channel is provided with a groove on the axis of the flow path to accommodate the pipe body and the joint portion, and a position perpendicular to the axis of the flow path is provided in which the second pressure-losing element can be vertically inserted and inserted therein. Guide groove. Further, the first pressure-loss element is provided with a first through-hole for the second link rod to pass through in a symmetrical position with respect to the axis of the flow path, and the second piston is provided with a first link for the first link rod to slide in contact with the central portion in a sealed state. 2through holes. -Furthermore, according to other implementation forms, a protective portion is provided on the outer peripheral surface of the pipe body. The dimension in the direction perpendicular to the axis of the flow path of the first pinch is formed to be larger than the size of the guide groove. In addition, the material of the pipe body is EPDM, fluorine rubber, silicone rubber, or a composite thereof. Furthermore, the best thing is that the pipe system consists of tetrafluoride polyethylene and rubber. This paper is _Chinese national standard ⑵0 mm) (Please read the precautions on the back before filling this page) * 、 可 |: 线 丨
五、發明説明（4) ^ 90123614號專利申請案說明書修正頁 彈性體之複合體所形成。 91年6月27曰 (請先閲讀背面之注意事項再填窝本頁) 另外，筒本體、開度調整用雄螺栓部、制動器、鎖緊 螺母及本體，只要是金屬、塑膠等之剛性者即可，並沒有 其他特別的限制，在此係以PVC、pVDF之塑膠作為特別適 當者為例。 另外，接頭部只要是具有塑膠等之耐藥品性者即可， 沒有特別的限制，在此係以PVC、PVDF、PFA作為特別適 當者為例。 <圖面的簡單說明〉 第1圖為由側面（流路方向）來看本發明之基本構造之 關閉狀態之縱截面圖。 、^1丨 第2圖為表示第1圖之打開狀態之縱截面圖。 第3圖為由正面來看第1圖之縱截面圖。 第4圖為在第1圖中之本體的平面圖。 第5圖為第1圖之一部切口透視圖。 :線丨 第6圖為由側面（流路方向）來看本發明之夾緊閥的實 施態樣之關閉狀態之縱截面圖。 苐7圖為表示苐6圖之打開狀態之縱截面圖。 第8圖為由正面來看第6圖之縱截面圖。 第9圖為表示第6圖之肀間打開之狀態之縱截面圖。 第10圖為由正面來看第9圖之縱戴面圖。 第11圖為由側面（流路方向）來看習知之夾緊閥之關閉 狀態之縱截面圖。 第12圖為由正面來看第π圖之部分縱截面圖。 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公爱） 7 499555 ηΐ，ί y k \ A7 4 ^ 1 B7 L一.，一一， 五、發明説明（5 ) 〈適當的實施型態〉 參照圖面加以說明本發明之基本構造。 第1圖乃至第5圖為表示本發明之基本構造，1係由流 體流到内部之PTFE與矽氧橡膠所形成之管體。該管體1， 係藉黏著積層多層之例如含浸矽氧橡膠之PTFE薄板形成 厚度作為其目的另外，21係以EPDM製之保護部，安裝 成包圍管體1之中央部外周全體。 在本基本構造，管體1的材質係形成PTFE與矽氧橡膠 的複合體，但即使為EPDM、矽氧橡膠、氟素及此等之複· 合體等之彈性體亦可，並沒有特別的限制。另外，同樣的 保護部21的材質係形成EPDM，但即使為CR等之其他之橡 膠彈性體亦可。針對朝管體1之安裝，係安裝成包圍中央 部外周全體，但是若設置成接觸管體1之第1夾壓子10與第 2夾壓子14之部位亦可。 2為PFA製之接頭部，該接頭部2係由PFA製冕形螺母24 與PFA製之接口 22所形成。該PFA製冕形螺母24，係形成 截面矩形狀，在與被插入管體1的兩端部的外周之插又侧 的相反側螺著接口 22，並在内周設置雌螺栓部26 ;該PFA 製之接口 22,係被插入管體1之兩端部内部，藉設置於插 入側的外周之雄螺栓部25螺著於冕形螺母24之雌螺栓部 26，與冕形螺母24同時挾持固定管體1端部，在插入侧與 相反側為了配管該t夾緊闊之雌螺栓部23，在設置於内周 之内部具有流路。尚且，在本基本構造，管體1與接頭部2 之接合，係藉接口 22與冕形螺母24形成挾持固定構造，但 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） J.....................裝..................、可.............線· (請先閲讀背面之注意事項再填寫本頁) 499555V. Description of the invention (4) ^ No. 90123614 Patent Application Specification Amendment Page Elastomer complex. June 27, 91 (please read the precautions on the back before filling this page) In addition, the cylinder body, the male bolt for adjusting the opening degree, the brake, the lock nut and the body are all rigid as long as they are metal or plastic. That is, there are no other special restrictions. Here, the PVC and pVDF plastics are taken as examples. In addition, the joint portion is not particularly limited as long as it has chemical resistance such as plastic, and PVC, PVDF, and PFA are particularly suitable as examples here. < Brief description of the drawings> Fig. 1 is a longitudinal sectional view of the closed state of the basic structure of the present invention as viewed from the side (direction of the flow path). ^ 1 丨 Figure 2 is a longitudinal sectional view showing the opened state of Figure 1. Fig. 3 is a longitudinal sectional view of Fig. 1 when viewed from the front. Fig. 4 is a plan view of the main body in Fig. 1. Figure 5 is a cutaway perspective view of a portion of Figure 1. : Line 丨 FIG. 6 is a longitudinal sectional view of the closed state of the embodiment of the clamp valve according to the present invention when viewed from the side (direction of the flow path). Figure 7 is a longitudinal sectional view showing the opened state of Figure 6 Fig. 8 is a longitudinal sectional view of Fig. 6 when viewed from the front. Fig. 9 is a longitudinal sectional view showing a state in which the cymbal is opened in Fig. 6; Fig. 10 is a longitudinal sectional view of Fig. 9 when viewed from the front. Fig. 11 is a longitudinal sectional view of a conventional clamp valve in a closed state as viewed from the side (direction of the flow path). Fig. 12 is a partial longitudinal sectional view of Fig. Π viewed from the front. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 public love) 7 499555 ηΐ, ί yk \ A7 4 ^ 1 B7 L. One, one, one, five, Description of invention (5) <Appropriate implementation type> The basic structure of the present invention will be described with reference to the drawings. Figures 1 to 5 show the basic structure of the present invention, and 1 is a pipe body formed by PTFE and silicone rubber flowing into the inside of the fluid. The pipe body 1 is formed by forming a thickness by laminating a plurality of layers of, for example, a PTFE sheet impregnated with silicone rubber. The pipe body 1 has a protective portion made of EPDM and is mounted so as to surround the entire periphery of the central portion of the pipe body 1. In this basic structure, the material of the pipe body 1 is formed of a composite of PTFE and silicone rubber, but even if it is an elastomer such as EPDM, silicone rubber, fluorine, or a composite of these, it is not special. limit. The material of the same protective portion 21 is EPDM, but it may be made of other rubber elastomers such as CR. For mounting toward the pipe body 1, it is mounted so as to surround the entire periphery of the central portion, but it may be provided if it is in contact with the first pinch 10 and the second pinch 14 of the pipe body 1. Reference numeral 2 is a joint portion made of PFA, and the joint portion 2 is formed by a PFA crown nut 24 and a joint 22 made of PFA. The PFA-made crown nut 24 is formed in a rectangular cross-section, and the joint 22 is screwed on the side opposite to the outer periphery of the two ends inserted into the pipe body 1, and a female bolt portion 26 is provided on the inner periphery; The PFA interface 22 is inserted into both ends of the pipe body 1. The male bolt portion 25 provided on the outer side of the insertion side is screwed to the female bolt portion 26 of the crown nut 24, and is held and fixed at the same time as the crown nut 24 An end portion of the pipe body 1 has a female bolt portion 23 which is clamped at t at the insertion side and the opposite side for piping, and has a flow path provided inside the inner periphery. In addition, in this basic structure, the joint between the pipe body 1 and the joint portion 2 is formed by the joint 22 and the crown nut 24 to form a holding and fixed structure, but this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) J ........... install ........, possible ........ ..... Line · (Please read the notes on the back before filling out this page) 499555
五、發明説明（6) (請先·閲讀背面之注意事項再填寫本頁) 以軟管皮帶將«味接純σ22亦可，其結匈造並沒有 特別的限制。另外，在本基本構造中，為了配管該當夾緊 闕之構造，係設置在接σ22之雌螺栓部23，但即使在接口 :2的外周設置雄螺栓部亦可，若可以與該當夹緊闊配管的 話’則其構造沒有特別的限定。 •、^τ— 6為PVC製之筒本體，設置有第i之筒部3、第2之筒部 4、與切口部5。該第工之筒部3,係、由内部上方具有圓筒狀 空間；該第2之筒部4,係持有由第！筒部3連續擴徑設置之 圓筒狀空間；該切口部5,係位於下端部之流路方向之接頭 部2之收容用之1對矩形狀。另外，在筒本體6側面，使在第 1活塞下端面與第2活塞12上端面及筒本體6側面所形成之 第1空間部丨9,與外部空氣給氣機器之壓縮機（未圖示）等相 連通，並穿孔空氣口27。進一步，在筒本體6上面，穿孔與 外氣連通之空氣口 20。 :線丨 第1活塞7係在側周面安裝〇_環29之圓盤狀之pvc製， 並在上下可動且密封狀態滑動接觸於第丨筒部3内周面。第i 夾壓子10為SUS製，以截面半圓錐形狀形成全體棒狀，形 成比本體18之導引溝17的長手方向的尺寸還大。另外，在 第1夾壓子10,在流路軸線之線對稱之各個的位置上，設置 ;月動貝通第2連動棒13之各個之第1貫通孔9，第1夹壓子 1 〇 ’係被固定於由第1活塞7的下端面中央下垂所設置之 SUS製之第1連動棒8的下端，使曲面接近於管體1側。 12為在側周面安裝0-環28之圓盤狀之pVc製之第2活 塞，形成比第1活塞7的外徑還大，在中心部具有在内周面 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 499555 A7 B7 五、發明説明（ 安裝0-環30之第2貫通孔u，使安裝於第1活塞7之第1連 動棒8在密封狀態貫通，在上下可動且密封狀態滑動接觸 於第2筒部4内周面。 第2夾壓子14係被嵌裝於本體18之導引溝17，另外為 SUS製’以半圓錐形狀形成全體棒狀，由第2活塞12的下 端面的兩端分別下垂，且在第1夾壓子1〇的流路軸線之線 對稱位置之2個第1貫通孔9 ,在各個貫通之suS製之第2連 動棒13的下端，以螺母32螺著成曲面接近管體1，由管體1 的下方與第1夾壓子同時挾持管體1。 尚且，在本基本構造，第i活塞7及第2活塞12的材質， 係形成PVC製，但即使為其他之樹脂、或金屬亦可，並沒 有特別的限定。另外，第1夾壓子〖〇及第2夾壓子14的材質 係形成SUS製，但即使為其他之金屬亦可❶進一步，第1 連動棒8及第2連動棒13的材質係形成SUS製，但即使為其 他之金屬或具有充分的強度之樹脂亦可。 15為大小2個之SUS製之彈簧彈性體，在挾持第2活塞 12下端面與第1夾壓子1〇的上端面之狀態，被安裝於筒本 體6内。在本基本構造，安裝2個彈簧彈性體15，但是因應 其所希望之賦予勢能即使改變安裝之數目亦可。另外，即 使在彈簧彈性體15下端面與第1夾壓子10的上端之間設置 金屬製之緣盤狀板（未圖示）’使彈簧彈性體15的付勢力可 以各個更均等的傳達至第1夾壓子10及第2活塞12亦可。尚 且，在本基本構造，彈簧彈性體的材質係形成SUS製，但 因應需要即使使用實施PTFE等之塗層之物亦可。 10 t (請先閲讀背面之注意事項再填寫本頁) 、可丨 本紙張尺度適用中國國家標準（CNS) A4規格（210X 297公釐) 499555 A7 _:_B7_ 五、發明説明（8 ) 本體18為PVC製，在流路軸線上設置截面矩形狀之溝 16，在溝16的中心且垂直於流路轴線之位置，設置長手方 向的尺寸形成比第1夾壓子10的長手方向還短之導引溝 17,另外，在導引溝17的兩端底部設置圓筒溝31。在溝16， 安裝固定接頭部2之管體1，在兩端部中，構成接頭部2之 冕形螺母24，在本體18與筒本體6之切口部被挾持固定。 另外，在導引溝17，各個之第2速動棒13被插入，第2夾壓 子14被嵌裝成可上下移動。另外，在圓筒溝31，螺著於第 2連動棒13的下端部之螺母32，在闊打開狀態時被内包。 如以上之說明，本基本構造之夾緊闊，由於係如習 知之夾緊閥，在驅動部與闊本體之間，腳構件與腳台及翼 片形成不要之構造，所以閥的全高變得較低，與習知之夾 f閥相比變成小型。在此，若比較本基本構造與習知品之 夾緊闊的高度後，口徑25mm的時候，比較於習知品的高 度之371 mm，本基本構造僅為140mm，本基本構造的高度 尺寸比較於習知品的高度尺寸約變成1/2.5，形成格外的 小型〇 另外，關於管體1的保護，本基本構造係如習知之夾 緊閥，並不是以夾壓子挾持直接流路部之構造，由於藉保 護部21保護管體1，所以管體1不容易劣化夾緊闊的使用壽 命變長。在此，以保護部21保護管體1之本基本構造，與 以夾壓子挾持直接流路之構造之習知品之耐久性的比較， 若以各個之夾緊閥之長期開關試驗之次數作比較的話.，口 徑25mm時，比較於習知品的開關次數在流路部 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 11 (請先閲讀背面之注意事項再填寫本頁)V. Description of the invention (6) (Please read the notes on the back before filling in this page) It is also possible to connect «taste pure σ22 with a hose belt, and there are no special restrictions on its construction. In addition, in this basic structure, the female bolt portion 23 connected to σ22 is provided for piping the structure that should be clamped. However, even if a male bolt portion is provided on the outer periphery of the interface: 2, if it can be used with the clamp In the case of piping, the structure is not particularly limited. •, ^ τ-6 is a tube body made of PVC, and is provided with an i-th tube portion 3, a second tube portion 4, and a cutout portion 5. The second tube portion 3 is provided with a cylindrical space from above; the second tube portion 4 is provided by the first! A cylindrical space in which the cylindrical portion 3 is continuously expanded in diameter; the cutout portion 5 is a pair of rectangular shapes for accommodating the joint portion 2 located in the flow path direction of the lower end portion. In addition, on the side of the cylinder body 6, a first space portion 9 formed on the lower end surface of the first piston, the upper end surface of the second piston 12, and the side surface of the cylinder body 6 and a compressor (not shown) of an external air supply device ) And so on, and perforated the air port 27. Further, an air port 20 communicating with the outside air is perforated on the cylinder body 6. : Line 丨 The first piston 7 is a disc-shaped PVC made of a ring 29 on the side peripheral surface, and is in sliding contact with the inner peripheral surface of the tube portion 3 in a vertically movable and sealed state. The i-th clamp 10 is made of SUS, and is formed into an overall rod shape in a semi-conical shape in cross section, which is larger than the dimension in the long-hand direction of the guide groove 17 of the main body 18. In addition, the first pinch 10 is provided at each position of line symmetry of the flow path axis; each of the first through-holes 9 and the first pinch 1 of the moon-moving Beton second linking rod 13 is provided. 'It is fixed to the lower end of the first interlocking rod 8 made of SUS, which is set down from the center of the lower end surface of the first piston 7, so that the curved surface approaches the pipe body 1 side. 12 is a second piston made of pVc with a disc shape of 0-ring 28 mounted on the side peripheral surface, which has a larger outer diameter than the first piston 7. It has an inner peripheral surface at the center. (CNS) A4 specification (210X297 mm) 499555 A7 B7 V. Description of the invention (Install the second through hole u of the 0-ring 30, so that the first linkage rod 8 mounted on the first piston 7 penetrates in a sealed state, and up and down Movable and sealed in sliding contact with the inner peripheral surface of the second tube portion 4. The second clamping element 14 is fitted into the guide groove 17 of the main body 18, and is made of SUS. Both ends of the lower end face of the second piston 12 hang down respectively, and the two first through holes 9 are located at line-symmetrical positions of the flow path axis of the first pincer 10, and the second interlocking rods made of suS are passed through each of them. The lower end of 13 approaches the pipe body 1 with a nut 32 screwed into a curved surface, and the pipe body 1 is simultaneously held by the lower part of the pipe body 1 and the first clamping element. Moreover, in this basic structure, the i-th piston 7 and the second piston 12 The material is made of PVC, but it is not particularly limited even if it is other resin or metal. In addition, the first pinch [0 and the material of the second pinch 14 are made of SUS, but they can be further made even if they are other metals. The materials of the first link rod 8 and the second link rod 13 are made of SUS, but even if they are made of other materials, Metal or resin with sufficient strength may also be used. 15 is a spring elastomer made of SUS made of two sizes. It is mounted on the barrel while holding the lower end face of the second piston 12 and the upper end face of the first pinch 10. Inside the main body 6. In this basic structure, two spring elastic bodies 15 are installed, but it is possible to change the number of installations according to the desired potential energy. In addition, the lower end surface of the spring elastic body 15 and the first clamp 10 A metal-made disc plate (not shown) is provided between the upper ends of the plate so that the supporting forces of the spring elastic body 15 can be transmitted to the first pinch 10 and the second piston 12 more evenly. In this basic structure, the material of the spring elastomer is made of SUS, but if necessary, even a coating with PTFE or the like can be used. 10 t (Please read the precautions on the back before filling this page) Standards apply to China National Standard (CNS) A4 specifications (210X 297 mm) 499555 A7 _: _ B7_ V. Description of the invention (8) The body 18 is made of PVC, and a groove 16 with a rectangular cross section is arranged on the axis of the flow path. The center of the groove 16 is perpendicular to the axis of the flow path. Position, the length of the long-hand direction is set to form a guide groove 17 shorter than the long-hand direction of the first clamp 10, and cylindrical grooves 31 are provided at both ends of the guide groove 17, and fixed joints are installed in the groove 16. The pipe body 1 of the part 2 has the crown nut 24 constituting the joint part 2 at both ends, and is held and fixed at the cutout part of the body 18 and the barrel body 6. In addition, in the guide groove 17, each second speed The moving rod 13 is inserted, and the second clamper 14 is fitted to be movable up and down. In addition, in the cylindrical groove 31, a nut 32 screwed to the lower end portion of the second link rod 13 is enclosed in the wide open state. As explained above, the clamping structure of this basic structure is a conventional clamping valve. Since the driving member and the wide body have an unnecessary structure between the foot member and the foot platform and the wing, the full height of the valve becomes Lower and smaller than the conventional clip-f valve. Here, when comparing the clamping height of the basic structure and the conventional product, when the caliber is 25mm, the basic structure is only 140mm compared to the height of the conventional product, which is 371mm. The height dimension of the basic structure is compared with the height of the conventional product. The size becomes about 1 / 2.5, forming an extra small size. In addition, regarding the protection of the pipe body 1, the basic structure is a conventional clamping valve, not a structure that holds the direct flow path portion with a clamp. 21 protects the pipe body 1, so the pipe body 1 is not easily deteriorated, and the clamping life is long. Here, the durability of the basic structure of the tube body 1 protected by the protection portion 21 is compared with the durability of a conventional product having a structure in which a direct flow path is held by a clamp, and the number of long-term switching tests of each clamping valve is compared. If the caliber is 25mm, the number of switching times compared to the conventional product is applicable to the Chinese paper standard (CNS) A4 (210X297 mm) in the paper size of the flow path section 11 (Please read the precautions on the back before filling this page)
訂I 線丨 499555Order I line 499555
>A B7 五、發明説明（9) 破損’本基本構造即使在140萬次亦無異常，本基本構造的 管體1之耐久性與習知品相比飛躍的提升，本基本構造之夾 緊閥的耐用期間形成格外的較長。 更進一步，以PTFE與矽氧橡膠之複合體型成管體1 後’因管體1的開關由内周面發生之粒子比其他之橡膠彈性 體還小，從而，特別是使用於粒子對製品良率之不良影響 波及到半導體產業領域之流體配管，可以得到較大之效果。 由上述的構造所形成之本基本構造之夾緊閥的作 動，係如其次所述。 如第1圖所示，在夾緊閥全關之狀態，將壓縮空氣由 空氣口 27供給壓入第}空間部19之後，藉該空氣壓，首先， 比第1 /舌塞直徑還大接受面積較大之第2活塞丨2，使側周面 滑動接觸到第2筒部4内周，且一面壓縮彈簧彈性體15一面 開始下降，伴隨此等介由由第2活塞12下垂設置之第2連動 棒13，螺母32螺著於第2連動棒13的下端之第2夾壓子14 , 下料引溝17内。其次第2夾壓子14到達溝16的底部，第2 活塞12的下降停止。同時藉第1空間部19内之該空氣壓，第 1活塞7—面使側周面滑動接觸於第i筒部3内周一面上升， 且滯留於^活塞7上端面與筒本體6内周面所包圍之空間 之二氣藉二氣口被放出。伴隨此介由由第丨活塞7下垂設 置之第1連動棒8,被螺著於第1連動棒8下端之第^壓子⑺ 上升第2筒4内。其次，第1活塞7到達筒本體18之第ί筒部3 的内部上端面，第！活塞7的上升停止，該央緊闕變 本紙張尺度適财關_準（⑽ (請先閲讀背面之注意事項再填寫本頁) 訂 :線丨 12> A B7 V. Description of the invention (9) Damage 'The basic structure is not abnormal even after 1.4 million times. The durability of the pipe body 1 of the basic structure is greatly improved compared with conventional products. The clamping valve of the basic structure The durability period is exceptionally long. Furthermore, after the composite body of PTFE and silicone rubber is used to form the tube body 1, particles generated from the inner peripheral surface of the tube body 1 due to the opening and closing of the tube body 1 are smaller than other rubber elastomers. The adverse effect of the rate spreads to the fluid piping in the semiconductor industry field, and can achieve greater effects. The operation of the pinch valve of the basic structure formed by the above structure is as follows. As shown in Fig. 1, after the clamp valve is fully closed, compressed air is supplied from the air port 27 into the} space portion 19, and then the air pressure is first accepted larger than the diameter of the first / tongue plug. The second piston 2 with a larger area slides the side peripheral surface into contact with the inner periphery of the second tube portion 4 and starts to fall while compressing the spring elastic body 15. With this, the second piston 12 is suspended by the second piston 12 The two interlocking rods 13 and the nut 32 are screwed into the second clamping element 14 and the feed channel 17 in the lower end of the second interlocking rod 13. Next, the second pinch 14 reaches the bottom of the groove 16, and the lowering of the second piston 12 stops. At the same time, by the air pressure in the first space portion 19, the first piston 7-side makes the side peripheral surface slidingly contact the inner surface of the i-th cylinder portion 3, and stays on the upper end surface of the piston 7 and the inner periphery of the cylinder body 6. The two breaths in the space surrounded by the face are released through the two breath ports. Along with this, the first linking rod 8 set down from the first piston 7 is screwed into the second cylinder 4 and screwed to the first pressure rod 下 at the lower end of the first linking rod 8. Next, the first piston 7 reaches the inner upper end surface of the first cylinder portion 3 of the cylinder body 18, the first! The rising of the piston 7 stops, and the central tightness changes. The paper size is suitable for financial and financial standards. (⑽ (Please read the precautions on the back before filling this page). Order: Line 丨 12
499555 •/五、發明説明（i〇 ) 成全開狀態。（第2圖之狀態）❶ 其次，第2圖所示在前述夾緊閥之全開狀態中，停止 空氣由空氣口 27供給至第1空間部19，大氣開放後，接觸 於彈簧彈性體15之第1夾壓子1〇，藉彈簧彈性體15的反彈 力下降，由上方推壓管體1，第1夾壓子1〇的兩端下端部33 接觸於本體18的上端面停止下降。同時藉彈簧彈性體的反 彈力，接觸於彈簧彈性體15上端之第2活塞12，其側周面 滑動接觸於第2筒部4内周，第2活塞12的上端面周緣部35 上升到接觸於第2筒部4内部上端面周緣部36為止。伴隨 此，藉以螺母32螺著於由第2活塞下垂設置之第2連動棒π 的下端部之第2夾壓子14上升，與第1夾壓子同時夾壓管體 1，該夾緊闊變成全關之狀態（第1圖之狀態）。 其次，根據第6圖乃至第10圖說明本發明之夾緊閥之 實施型態。 46為PVC製之筒本體，在上部設置圓形之開口部38。 筒本體46之其他部分的構造，由於與基本構造之筒本體6 相同所以省略說明。 - 37為PVC製之第1活塞，在上部一體地突設由筒本體46 的上部開口部38貫通突出之開度調整用雄螺栓部41。開度 調整用螺栓部41，係一體地突設於第1活塞37的上部，但 即使設置成與第1活塞37—體成形亦可，另外，即使將開 度調整用雄螺检部41作為別構件黏著、螺合於第1活塞37 之固定方法亦可，其設置的方式並沒有限制。第1活塞37 的其他部分之構造，由於與基本構造相同所以省略說明。 本紙張尺度適用中國國家標準（咖）A4規格(210X297公釐)~" --—— (請先聞讀背面之注意事項再填寫本頁) .訂丨 :線丨 499555 A7 _____B7_ 五、發明説明（11 ) 39為PVC製之制動器，全體具有略環形狀，在下部設 置嵌合於筒本體46上部之凹部47，在中央孔42的内周設置 雌螺栓部43，下端面壓接於筒本體46的上端面，被貫通螺 合於開度調整用雄螺栓41成離間。 40為PVC製之鎖緊螺母，在内周面設置具有雄螺栓部 44之凹部45，在被壓接於制動器39上端面之狀態，被螺著 於開度調整用雄螺栓部41上部。 針對本實施型態之夾緊闊的上述以外之構件的構 造，由於與基本構造相同所以省略說明。 其次’針對中間開度的調整方法加以說明。在第6圖、 第8圖的狀態中，也就是在全閉狀態中，首先，僅使鎖緊 螺母緩慢旋動，使其由制動器39上端面離間。其次，使制 動器39旋動提升第1活塞37，同時挺升連結於第1活塞37之 第1夾壓子10，管體1由閉塞狀態形成中間開的狀態。（第9 圖、第10圖之狀態）。進一步，使制動器39旋動微調整管 鱧1的開度。開度決定後，使鎖緊螺母40朝與前述相反方 向旋動鎖入壓接於制動器39上端面。以此等完成夾緊閥的 中間開度的調整。 在第9圖、第10圖中，也就是由中間開度之狀態，與 基本構造的作動同樣，將壓榨空氣由空氣口 27供給壓入 後，夾緊闊形成全開狀態。 其次，在夾緊閥之全開狀態中，停止由空氣口 27供 給空氣至第1空間部19，大氣開放後，形成中間開的狀態（第 9圖圖、10之狀態）。其後，首先，僅使鎖緊螺母40緩和旋 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公澄） -14 - (請先閲讀背面之注意事項再填寫本頁) -訂· .¾. 499555 A7 B7 五、發明説明（n ) 動’使其由制動器39上端面離間。其次，使制動器39朝與 中間開度之調整時反方向旋動後，下降第1活塞37，同時 下降連結於第1活塞37之第1夾壓子1〇,管體i由上方推壓， 管體1形成全閉的狀態。（第6圖、第8圖之狀態）。其後， 使鎖緊螺母40朝與前述相反方向旋動鎖入壓接於制動器39 上端面。· 由前述中間開的狀態（第9圖圖、1〇之狀態），與基本 構造的作動同樣，將壓榨空氣由空氣口 27供給壓入後，失 緊閥形成全開狀態。 本實施型態之夾緊閥，由於具有前述構造，可以以 中間開度流動流體。從而，例如在半導體製造等之裝置内 閉迴線配管中，可以作為背壓閥使用，使用點之壓力不會 下降，可以保持最低壓力。 本發明係作了如以上之構造，藉使用此等可以得到 以下優良之效果。 1·比較於習知夾緊闊全體的高度較低，由於小型化， 極小的配管空間就可完成。為此，變成可以在複雜的鼢管 設計之半導體等的製造裝置内配管，進而謀求製造裝置的 小型化。 2·在管體安裝保護部後，與習知品相比較，管體的 耐久性提升，進而可以飛躍地延長夾緊闊的耐用期間。 3.由於可以調整夾緊閥的開度，所以可以流動微小之 流量。 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 15 (請先閲讀背面之注意事項再填寫本頁) •訂丨 :線 499555 A7 B7 五、發明説明（i3 ) 卜··管體 3···第1筒部 5…切口部 7···第1活塞 9···第1貫通孔 11…第2貫通孔 13…第2連動棒 15…彈簧 17…導引溝 19…第1空間部 21…保護部 23…雖螺检部 25…雄螺栓部 27…開口部 31…圓筒溝 35、36···周緣部 37…第1活塞 39…制動器 41…雄螺栓部 43…雌螺栓部 45…凹部 47…腳台 元件標號對照 2…接頭部 4…第2筒部 6…筒本體 8…第1連動棒 10…第1夾壓子 12···第2活塞 14…第2夾壓子 16…溝 18…本體 20···空氣口 22…接口 24…冕形螺母 26…雌螺栓部 32…螺母 38…開口部 40…鎖緊螺母 42…中央孔 46…筒本體 48…腳杆 50…筒 54…管軸 58…上側夾壓子 (請先閲讀背面之注意事項再填窝本頁) 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 16 499555 Α7 Β7499555 • / V. The invention description (i〇) is fully open. (The state in FIG. 2) ❶ Next, in the fully opened state of the clamp valve shown in FIG. 2, the supply of air from the air port 27 to the first space portion 19 is stopped, and after the atmosphere is opened, it contacts the spring elastic body 15. The first clamper 10 is lowered by the rebound force of the spring elastic body 15 and pushes the tube body 1 from above. The lower end portions 33 of both ends of the first clamper 10 contact the upper end surface of the main body 18 and stop falling. At the same time, by the rebound force of the spring elastic body, the second piston 12 in contact with the upper end of the spring elastic body 15 is in sliding contact with the inner periphery of the second cylindrical portion 4 and the upper end peripheral edge portion 35 of the second piston 12 rises to contact To the upper end peripheral edge portion 36 inside the second tube portion 4. With this, the nut 32 is screwed to the second pinch 14 of the lower end portion of the second link rod π provided by the second piston to rise, and the pipe body 1 is pinched at the same time as the first pinch. It is in the fully closed state (the state in Figure 1). Next, an embodiment of the pinch valve of the present invention will be described with reference to Figs. 6 to 10. 46 is a cylinder body made of PVC, and a circular opening portion 38 is provided on the upper portion. Since the structure of the other parts of the barrel body 46 is the same as that of the barrel body 6 having a basic structure, description thereof is omitted. -37 is a first piston made of PVC, and an opening adjustment male bolt portion 41 protruding through the upper opening portion 38 of the cylinder body 46 is integrally provided on the upper portion. The opening adjustment bolt portion 41 is integrally protruded from the upper portion of the first piston 37, but it may be formed integrally with the first piston 37, and even if the opening adjustment male snail inspection portion 41 is used as A fixing method in which other members are adhered and screwed to the first piston 37 is also possible, and there is no limitation on the installation method. The structure of the other parts of the first piston 37 is the same as that of the basic structure, so the description is omitted. This paper size applies to the Chinese national standard (coffee) A4 specification (210X297 mm) ~ " ------ (Please read the precautions on the back before filling this page). Order 丨: Line 丨 499555 A7 _____B7_ V. Invention Explanation (11) 39 is a brake made of PVC, which has a slightly ring shape as a whole. A concave portion 47 fitted to the upper portion of the barrel body 46 is provided at the lower portion. A female bolt portion 43 is provided on the inner periphery of the central hole 42. The lower end face is crimped to the barrel. The upper end surface of the body 46 is penetrated and screwed into the opening adjustment male bolt 41 to be separated. Reference numeral 40 is a lock nut made of PVC. A recessed portion 45 having a male bolt portion 44 is provided on the inner peripheral surface. The concave portion 45 is crimped to the upper end face of the brake 39 and is screwed onto the upper portion of the male bolt portion 41 for adjusting the opening degree. The structure of members other than those described above for the clamped structure of this embodiment is the same as the basic structure, so the description is omitted. Next, the method of adjusting the intermediate opening degree will be described. In the states of FIGS. 6 and 8, that is, in the fully closed state, first, only the lock nut is slowly rotated to be separated by the upper end face of the brake 39. Next, the brake 39 is rotated to raise the first piston 37, and at the same time, the first pinch 10 connected to the first piston 37 is lifted, and the tube body 1 is opened from the closed state to the middle state. (Figures 9 and 10). Further, the opening of the fine adjustment tube 鳢 1 is rotated by the stopper 39. After the opening degree is determined, the lock nut 40 is rotated and locked in a direction opposite to that described above, and is crimped to the upper end surface of the brake 39. This completes the adjustment of the intermediate opening of the pinch valve. In Figs. 9 and 10, the state of the intermediate opening is the same as the operation of the basic structure. After the compressed air is supplied from the air port 27 to be pressed in, it is fully opened. Next, in the fully opened state of the pinch valve, the supply of air from the air port 27 to the first space portion 19 is stopped, and after the atmosphere is opened, the state is opened in the middle (the state of Fig. 9 and Fig. 10). After that, first, only the lock nut 40 was used to ease the paper size of the spinner. The Chinese national standard (CNS) A4 specification (210X297 Gongcheng) was applied. -14-(Please read the precautions on the back before filling this page)-Order ·. ¾. 499555 A7 B7 V. Description of the invention (n) The movement 'makes it separated by the upper end face of the brake 39. Next, after the brake 39 is rotated in the opposite direction from the adjustment of the intermediate opening degree, the first piston 37 is lowered, and at the same time, the first clamper 10 connected to the first piston 37 is lowered, and the pipe body i is pushed from above. The tube body 1 is in a fully closed state. (Figures 6 and 8). After that, the lock nut 40 is rotated and locked in the opposite direction to the upper end surface of the brake 39 in the opposite direction. · From the state of the middle opening (state of Fig. 9 and Fig. 10), the operation of the basic structure is the same as that of the basic structure. After the pressurized air is supplied from the air port 27, the decompression valve is fully opened. The clamp valve of this embodiment has the aforementioned structure, and can flow fluid at an intermediate opening degree. Therefore, for example, it can be used as a back pressure valve in closed loop piping in devices such as semiconductor manufacturing, and the pressure at the point of use does not decrease, and the minimum pressure can be maintained. The present invention is structured as described above, and the following excellent effects can be obtained by using them. 1. Compared with the conventional clamp, the height of the entire clamp is relatively low. Due to the miniaturization, a small piping space can be completed. For this reason, piping can be performed in a manufacturing device such as a semiconductor having a complicated tube design, and the size of the manufacturing device can be reduced. 2. After installing the protection part on the pipe body, the durability of the pipe body is improved compared with conventional products, and the durability period of the clamp can be extended significantly. 3. Since the opening degree of the clamp valve can be adjusted, a minute flow rate can be flowed. This paper size applies to Chinese National Standard (CNS) A4 specifications (210X297 mm) 15 (Please read the precautions on the back before filling out this page) • Order 丨: Line 499555 A7 B7 V. Description of Invention (i3) bu ·· tube Body 3 ... First tube portion 5 ... Notch portion 7 ... First piston 9 ... First through hole 11 ... Second through hole 13 ... Second linkage rod 15 ... Spring 17 ... Guide groove 19 ... The first space portion 21 ... the protection portion 23 ... although the screw inspection portion 25 ... the male bolt portion 27 ... the opening portion 31 ... the cylindrical groove 35, 36 ... the peripheral portion 37 ... the first piston 39 ... the brake 41 ... the male bolt portion 43 ... female bolt portion 45 ... recessed portion 47 ... reference of footrest element number 2 ... joint portion 4 ... second cylinder portion 6 ... tube body 8 ... first interlocking rod 10 ... first clamp 12 ... second piston 14 ... 2nd clamp 16 ... Groove 18 ... Body 20 ... Air port 22 ... Interface 24 ... Crown nut 26 ... Female bolt portion 32 ... Nut 38 ... Opening portion 40 ... Lock nut 42 ... Center hole 46 ... Cylinder body 48… foot rod 50… tube 54… tube shaft 58… clamp on the upper side (please read the precautions on the back before filling this page) The paper size is applicable to China National Standard (CNS) A4 Specifications (210X297 mm) 16 499555 Α7 Β7
五、發明説明（Η ) 49…腳構件 53…軸杆 5 7…下側夾壓子 62、63 、64···孑L 51、52···活塞 55…翼片 61…閥管體 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐） 17V. Description of the invention (Η) 49 ... foot member 53 ... shaft 5 7 ... lower clamps 62, 63, 64 ... · L 51, 52 ... piston 55 ... fin 61 ... valve body ( Please read the precautions on the back before filling out this page.) This paper size applies to China National Standard (CNS) Α4 (210X297 mm) 17
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000302980A JP4573010B2 (en) | 2000-07-07 | 2000-10-02 | Pinch valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW499555B true TW499555B (en) | 2002-08-21 |
Family
ID=18784240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW90123614A TW499555B (en) | 2000-10-02 | 2001-09-25 | Pinch valve |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW499555B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI475168B (en) * | 2010-02-05 | 2015-03-01 | Fujikin Kk | Fluid controller |
-
2001
- 2001-09-25 TW TW90123614A patent/TW499555B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI475168B (en) * | 2010-02-05 | 2015-03-01 | Fujikin Kk | Fluid controller |
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