WO2011086810A1 - Atomiseur - Google Patents

Atomiseur Download PDF

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Publication number
WO2011086810A1
WO2011086810A1 PCT/JP2010/072681 JP2010072681W WO2011086810A1 WO 2011086810 A1 WO2011086810 A1 WO 2011086810A1 JP 2010072681 W JP2010072681 W JP 2010072681W WO 2011086810 A1 WO2011086810 A1 WO 2011086810A1
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WO
WIPO (PCT)
Prior art keywords
atomizer
hole forming
vibrating
pressurizing chamber
piezoelectric
Prior art date
Application number
PCT/JP2010/072681
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English (en)
Japanese (ja)
Inventor
克己 藤本
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2011549888A priority Critical patent/JP5423813B2/ja
Publication of WO2011086810A1 publication Critical patent/WO2011086810A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10Apparatus features
    • A61L2209/13Dispensing or storing means for active compounds
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00Disinfection, sterilisation or deodorisation of air
    • A61L9/14Disinfection, sterilisation or deodorisation of air using sprayed or atomised substances including air-liquid contact processes

Definitions

  • the present invention relates to an atomizer.
  • the present invention relates to an ink jet atomizer provided with a piezoelectric vibrator.
  • the atomizer mainly includes a cavitation atomizer that performs cavitation spray and an ink jet atomizer that performs inkjet spray.
  • the cavitation atomizer is equipped with an ultrasonic transducer.
  • mist is generated from the surface of the liquid due to a large pressure fluctuation caused by the ultrasonic waves generated by the ultrasonic vibrator.
  • the diameter of the generated fog correlates with the ultrasonic wave generated by the ultrasonic transducer. Specifically, the diameter of the mist becomes smaller as the ultrasonic frequency becomes higher. Therefore, in order to generate a so-called dry fog having a small diameter of about 5 ⁇ m, it is necessary to vibrate the ultrasonic vibrator at a high frequency, and a large amount of electric power is required to drive the ultrasonic vibrator. Therefore, it is not suitable for applications requiring power saving drive.
  • the diameter of the mist is determined by the nozzle diameter, and the frequency of vibration does not significantly affect the mist diameter. For this reason, by reducing the diameter of the nozzle, it is possible to generate a dry fog having a small diameter even when the frequency of vibration is low. Therefore, the ink jet atomizer that generates dry fog can be driven with relatively small electric power.
  • Patent Documents 1 and 2 various ink jet atomizers have been proposed.
  • FIG. 10 is a schematic cross-sectional view of the atomizer described in Patent Document 1.
  • the atomizer 100 includes a base body 101 having a pressurizing chamber 101a.
  • a nozzle portion 102 in which a nozzle 102 a facing the pressurizing chamber 101 a is formed and a vibrator 103 that also faces the pressurizing chamber 101 a are attached to the base 101.
  • the vibrator 103 includes a diaphragm 103a and a piezoelectric element 103b.
  • the diaphragm 103a is also flexibly vibrated together with the piezoelectric element 103b.
  • the pressure in the pressurizing chamber 101a varies.
  • fog is discharged from the nozzle 102a.
  • FIG. 11 is a schematic cross-sectional view of the atomizer described in Patent Document 2.
  • the atomizer 200 includes a nozzle plate 202 having a nozzle 202 a facing the pressurizing chamber 201.
  • a piezoelectric element 203 that flexures (bends) is attached.
  • the piezoelectric element 203 is formed in a ring shape so as not to cover the central portion where the nozzle 202a of the nozzle plate 202 is provided.
  • the piezoelectric vibration of the piezoelectric element 203 causes the nozzle plate 202 to bend and vibrate. Thereby, the pressure in the pressurizing chamber 201 varies. As a result, fog is discharged from the nozzle 202a.
  • the vibrating plate 103a and the nozzle plate 202 When the vibrating plate 103a and the nozzle plate 202 are vibrated by the piezoelectric elements 103b and 203 like the atomizers 100 and 200, the vibrating plate 103a and the nozzle plate 202 may be changed depending on the shape of the vibrating plate 103a and the nozzle plate 202. There was a case where it did not vibrate properly. For example, only a part of the diaphragm 103a and the nozzle plate 202 may vibrate and other parts may not vibrate. For this reason, the shape of the diaphragm 103a and the nozzle plate 202 may not be a shape that can give a suitable pressure fluctuation to the pressurizing chambers 101a and 201. Therefore, the atomizers 100 and 200 have a problem that it is difficult to sufficiently realize the atomization performance.
  • the present invention has been made in view of such a point, and an object thereof is to provide an atomizer capable of realizing high atomization performance.
  • the atomizer according to the present invention includes an atomizer body and a piezoelectric vibrator.
  • the atomizer main body is formed with a pressurizing chamber to which a liquid is supplied.
  • the atomizer body includes a through hole forming part and a vibrating part.
  • a through hole facing the pressurizing chamber is formed in the through hole forming portion.
  • the vibration part faces the pressurizing chamber.
  • the piezoelectric vibrator vibrates the vibration part.
  • the piezoelectric vibrator has a cylindrical piezoelectric body, a first electrode, and a second electrode. One end of the piezoelectric body is joined to the outer edge of the vibration part.
  • the first and second electrodes apply a voltage to the piezoelectric body.
  • the through hole and the vibrating portion are opposed to each other through the pressurizing chamber.
  • the pressure in the vicinity of the through hole forming portion of the pressurizing chamber can be varied efficiently. Therefore, higher atomization performance can be obtained.
  • the vibration part is formed in a plate shape protruding to the opposite side to the through hole forming part.
  • the pressure in the portion near the through hole forming portion of the pressurizing chamber can be changed more efficiently. Therefore, higher atomization performance can be obtained.
  • the vibrating part is formed in a curved surface having a focal point, and the through hole forming part passes through the focal point of the vibrating part from an arbitrary point of the vibrating part. It arrange
  • the through-hole forming portion is arranged at a position smaller than the wavefront generated from at least the vibrating portion.
  • a through hole forming part may be arranged in a region between the vibrating part and the focal point.
  • a curved surface having a focus includes a spherical surface, an elliptical surface, a paraboloid, and the like.
  • the curved vibrating portion has a larger area than the through-hole forming portion. In this case, the vibration can be focused on the entirety of the through-hole forming portion, and vibration propagation to the plurality of through-holes can be facilitated.
  • the focal point is not only a geometrical focal point, but also when a wavefront generated from a curved vibrating section propagates through a medium, the wavefront is minimal when the wavefront once converges and then diffuses.
  • the vibration part is formed in a plate shape protruding toward the through hole forming part side, and the through hole forming part, the through hole forming part of the vibration part,
  • the distance between the facing portions is a distance at which the liquid in the pressurized chamber is supplied by capillary action between the through hole forming portion and the vibrating portion.
  • the piezoelectric body has a rotational symmetry axis. According to this configuration, the vibration part can be vibrated more efficiently.
  • the piezoelectric body is cylindrical. According to this configuration, the vibration part can be vibrated more efficiently.
  • the vibrating portion and the piezoelectric body are integrally formed.
  • the vibration part and the piezoelectric body can be manufactured in the same process. Therefore, the manufacturing cost of the atomizer can be reduced.
  • the bonding strength between the vibration part and the piezoelectric body can be increased.
  • the piezoelectric vibration element vibrates in a cylindrical breath.
  • the pressurized chamber is filled with a liquid.
  • the atomizer further includes a liquid supply member that is disposed in the pressurizing chamber and supplies the liquid in the pressurizing chamber to the through-hole forming portion. ing.
  • a piezoelectric vibrator having a cylindrical piezoelectric body polarized in the radial direction is connected to the outer edge portion of the vibrating portion. For this reason, the stress variation along the surface direction is given to the vibration part, and as a result, the vibration part vibrates. Therefore, the vibrating portion can be vibrated efficiently regardless of the shape of the vibrating portion. Therefore, it is possible to make the shape of the vibration part suitable for applying pressure fluctuation to the pressurizing chamber. As a result, high atomization performance can be realized.
  • FIG. 1 is a schematic partial cross-sectional perspective view of an atomizer according to a first embodiment.
  • FIG. 2 is a schematic cross-sectional view of the atomizer according to the first embodiment.
  • FIGS. 3A to 3C are schematic cross-sectional views for explaining an atomization aspect of the atomizer according to the first embodiment.
  • FIG. 4 is a schematic partial cross-sectional perspective view of an atomizer according to a second embodiment.
  • FIG. 5 is a schematic partial cross-sectional perspective view of an atomizer according to a third embodiment.
  • FIG. 6 is a schematic partial cross-sectional perspective view of an atomizer according to a fourth embodiment.
  • FIG. 7 is a schematic perspective view of the piezoelectric vibrator according to the fifth embodiment.
  • FIG. 8 is a schematic cross-sectional view of the piezoelectric vibrator according to the fifth embodiment.
  • FIG. 9 is a schematic development view of electrodes of the piezoelectric vibrator in the fifth embodiment.
  • FIG. 10 is a schematic cross-sectional view of an atomizer described in Patent Document 1.
  • FIG. 11 is a schematic cross-sectional view of an atomizer described in Patent Document 2.
  • the atomizers 1 to 3 shown in FIGS. 1 to 5 as examples.
  • the atomizers 1 to 3 are merely examples.
  • the present invention is not limited to the atomizers 1 to 3 at all.
  • FIG. 1 is a schematic partial cross-sectional perspective view of an atomizer according to a first embodiment.
  • FIG. 2 is a schematic cross-sectional view of the atomizer according to the first embodiment.
  • the atomizer 1 of the present embodiment includes an atomizer body 10 and a piezoelectric vibrator 20.
  • the atomizer body 10 includes a pressurizing chamber section 11 and a flange 12.
  • the pressurizing chamber partitioning portion 11 includes a disk-shaped upper wall portion 11b, a disk-shaped bottom wall portion 11c, and a peripheral wall portion 11d.
  • the bottom wall portion 11c faces the upper wall portion 11b.
  • the peripheral wall portion 11d connects the peripheral edge of the upper wall portion 11b and the peripheral edge of the bottom wall portion 11c.
  • the upper wall portion 11b, the bottom wall portion 11c, and the peripheral wall portion 11d define a pressurizing chamber 11a filled with a liquid to be atomized.
  • the liquid supply member which absorbs liquids, such as a nonwoven fabric may be arrange
  • a flange portion 12 is connected to a joint portion between the bottom wall portion 11c and the peripheral wall portion 11d.
  • the flange portion 12 extends outward.
  • the flange portion 12 is provided with a pipe portion 12a.
  • a liquid supply passage 12a1 is formed inside the pipe portion 12a. A liquid to be atomized is supplied to the pressurizing chamber 11a through the liquid supply passage 12a1.
  • liquid to be atomized is not particularly limited. Specific examples of the liquid to be atomized include water, aqueous solutions, organic solvents such as alcohol and petroleum.
  • the liquid to be atomized may be, for example, a fragrance, a deodorant, an insecticide, an insect repellent, a perfume, a lotion, or a detergent.
  • the material of the atomizer body 10 is not particularly limited.
  • the atomizer body 10 can be formed of, for example, synthetic resin, metal, glass, ceramic, paper, or the like. Specifically, in this embodiment, the atomizer body 10 is formed of ceramic. More specifically, the piezoelectric body 20a and the atomizer body 10 to be described later are integrally formed of piezoelectric ceramic. For this reason, the atomizer 1 can be manufactured with few manufacturing processes. Therefore, the manufacturing cost of the atomizer 1 can be reduced. Moreover, the rigidity and intensity
  • a through hole forming portion 13 is provided at the center of the upper wall portion 11b.
  • One or a plurality of through holes 13a are formed in the through hole forming portion 13 at equal intervals.
  • the through hole 13a is formed so as to face the pressurizing chamber 11a. As will be described in detail later, in the atomizer 1, the liquid is discharged as mist from the through-hole 13a.
  • the shape dimension of the through-hole formation part 13 is not specifically limited as long as the through-hole 13a is formed at least.
  • the through-hole formation part 13 does not need to be formed integrally with the upper wall part 11b.
  • a disc-shaped through-hole forming part formed separately may be attached to the upper wall part.
  • the through hole 13a is compared with the case where the upper wall portion 11b and the through hole forming portion 13 are formed integrally. Can be easily formed.
  • the shape and size of the through hole 13a and the number of the through holes 13a are appropriately designed according to the diameter of the mist to be generated, the property of the liquid to be atomized (for example, viscosity), and the desired atomization performance. be able to.
  • the diameter of the mist to be generated is 5 ⁇ m
  • the diameter of the through hole 13a can be about 5 ⁇ m.
  • the through-hole 13a may be a cylindrical hole whose diameter does not change in the penetration direction.
  • the through hole 13a may be a hole having a portion whose diameter changes in the through direction.
  • the through-hole 13a may be a hole that tapers outward in the penetration direction.
  • the planar shape of the through-hole 13a may not be circular.
  • the planar shape of the through hole 13a may be, for example, a polygonal shape or an elliptical shape.
  • the vibration part 14 is provided in the center part of the bottom wall part 11c.
  • the vibration portion 14 is a portion that vibrates in the vertical direction z shown in FIG. 2 and applies pressure fluctuation to the pressurizing chamber 11a when the piezoelectric vibrator 20 is driven.
  • the vibrating part 14 is disposed so as to face the through hole 13a through the pressurizing chamber 11a.
  • the vibration part 14 is formed in a plate shape protruding to the opposite side to the through hole forming part 13. That is, the vibration part 14 is formed in a dome shape. More specifically, as illustrated in FIG. 2, the vibration unit 14 is formed in a curved surface having a focal point F such as a spherical shape, an elliptical shape, or a parabolic shape.
  • the through hole 13 a is disposed in a region A between the focal point F and the vibration part 14. In other words, the vibration part 14 is formed in a shape in which the through hole 13 a is located in the region A between the focal point F and the vibration part 14.
  • the piezoelectric vibrator 20 includes a cylindrical piezoelectric body 20a and first and second electrodes 20b and 20c.
  • the piezoelectric body 20a has a rotationally symmetric axis. Specifically, in the present embodiment, the piezoelectric body 20a is formed in a cylindrical shape. One end portion of the piezoelectric body 20 a is connected to the outer edge portion of the vibrating portion 14. The piezoelectric body 20 a is formed integrally with the vibration unit 14.
  • the piezoelectric material constituting the piezoelectric body 20a is not particularly limited. Specific examples of the piezoelectric material include lead zirconate titanate (PZT) ceramics.
  • the first and second electrodes 20b and 20c are electrodes for applying a voltage to the piezoelectric body 20a.
  • the first electrode 20b is formed on the inner peripheral surface of the piezoelectric body 20a.
  • the second electrode 20c is formed on the outer peripheral surface of the piezoelectric body 20a.
  • the first and second electrodes 20b and 20c are not particularly limited as long as a voltage can be applied to the piezoelectric body 20a.
  • the first and second electrodes 20b and 20c can be formed of, for example, a metal such as Ag, Cu, Au, Pt, Ni, or Sn, or an alloy such as a Cr / Ni alloy or a Ni / Cu alloy.
  • a protective film may be formed on the surfaces of the first and second electrodes 20b and 20c.
  • the protective film is not particularly limited as long as it has higher water resistance than the first and second electrodes 20b and 20c.
  • the protective film can be formed of an elastic resin such as a silicone resin, a polyurethane resin, or a polyester resin.
  • Examples of the method for forming the first and second electrodes 20b and 20c include a thin film forming method such as a sputtering method and a vapor deposition method, a method using a conductive paste, and the like.
  • the piezoelectric body 20a is polarized in the radial direction of the piezoelectric body 20a by applying a voltage of about 3 kV / mm between the first and second electrodes 20b and 20c, for example. Therefore, when an AC voltage is applied between the first and second electrodes 20b and 20c, the piezoelectric vibrator 20 vibrates in the radial direction of the piezoelectric body 20a (hereinafter referred to as “cylindrical respiratory vibration”). To do. This cylindrical respiratory vibration is caused by at least one of the d31 mode and the d33 mode.
  • the cylindrical breathing vibration is a vibration having a mode as shown in FIG. That is, as shown in FIGS. 3A to 3C, when a voltage is applied between the first and second electrodes 20b and 20c, the cylindrical piezoelectric body 20a expands and contracts due to the piezoelectric effect. Repeat with the diameter. For this reason, the stress fluctuation
  • FIG. As a result, the vibration unit 14 vibrates along the vertical direction z. For this reason, irrespective of the shape of the vibration part 14, the vibration part 14 can be vibrated efficiently. Therefore, the shape of the vibration part 14 can be made a structure suitable for applying the pressure fluctuation of the pressurizing chamber 11a. For example, even if the vibrating portion 14 is formed in a dome shape as in the present embodiment, the vibrating portion 14 can be vibrated with high efficiency in the present embodiment using cylindrical respiratory vibration. Therefore, high atomization performance can be realized.
  • the through hole forming unit 13 has an arbitrary distance from the arbitrary point of the vibrating unit 14 to the through hole forming unit 13 through the focal point F of the vibrating unit 14. It arrange
  • the vibrating portion 14 is formed in a curved shape having a focal point F, and the through hole 13 a is disposed in a region A between the focal point F and the vibrating portion 14. Accordingly, it is possible to effectively vary the pressure in the region near the through hole 13a in the pressurizing chamber 11a. As a result, higher atomization performance can be realized.
  • the piezoelectric body 20a has a cylindrical shape having a rotational symmetry axis. Therefore, higher atomization performance can be realized.
  • the vibration of the piezoelectric body 20a may be self-excited or separately excited.
  • the vibration of the piezoelectric body 20a is a separate excitation, the resonance frequency fluctuates when a liquid adheres to the surface of the piezoelectric vibrator 20. For this reason, a control circuit for preventing the frequency from changing is required. Therefore, the vibration of the piezoelectric body 20a is preferably self-excited.
  • the waveform of the voltage applied to the piezoelectric body 20a may be, for example, a sine wave, a sawtooth wave, a square wave, or the like. Especially, it is preferable that the waveform of the voltage applied to the piezoelectric body 20a is a square wave. This is because higher atomization efficiency can be obtained by applying a square wave to the piezoelectric body 20a.
  • the on / off control of atomization is performed by on / off control of the voltage applied to the piezoelectric body 20a.
  • the waveform of the voltage applied to the piezoelectric body 20a may be subjected to AM modulation or FM modulation.
  • FIG. 4 is a schematic partial cross-sectional perspective view of an atomizer according to a second embodiment.
  • the shape of the vibrating portion is not limited to a dome shape.
  • the vibration unit 14 may be formed in a flat plate shape.
  • FIG. 5 is a schematic partial cross-sectional perspective view of an atomizer according to a third embodiment.
  • the vibration part 14 is formed in the plate shape which protrudes in the through-hole formation part 13 side.
  • the vibration part 14 includes a facing part 14a facing the through hole 13a.
  • the distance between the facing portion 14a and the through hole forming portion 13 is a distance at which the liquid in the pressurizing chamber 11a is supplied between the through hole forming portion 13 and the facing portion 14a by capillary action. . That is, the liquid can enter the portion 11a1 of the pressurizing chamber 11a located between the through hole forming portion 13 and the facing portion 14a by capillary action. For this reason, a liquid can be efficiently supplied to the whole through-hole formation part 13 in which atomization is performed.
  • FIG. 6 is a schematic partial cross-sectional perspective view of an atomizer according to a fourth embodiment.
  • the liquid supply part 21 which supplies the liquid in the pressurization chamber 11a to the through-hole formation part 13 is arrange
  • the liquid supply unit 21 is a member that supplies a liquid by capillary action, and includes, for example, felt, nonwoven fabric, woven fabric, non-woven paper, capillary, and the like.
  • the pressurizing chamber 11a is not necessarily filled with liquid.
  • the vibration of the vibration unit 14 propagates to the liquid supply unit 21 and the liquid located on the surface of the liquid supply unit 21 facing the through-hole forming unit 13 is atomized. For this reason, it is preferable that a certain amount of gap is formed between the through-hole forming part 13 and the liquid supply part 21.
  • the thickness dimension of the liquid supply unit 21 is not particularly limited, but is preferably about 0.05 mm to 0.2 mm, for example. Further, the surface of the liquid supply unit 21 facing the through hole forming unit 13 is preferably formed in a concave shape. In these cases, the atomization efficiency can be further increased.
  • FIG. 7 is a schematic perspective view of the piezoelectric vibrator according to the fifth embodiment.
  • FIG. 8 is a schematic cross-sectional view of the piezoelectric vibrator according to the fifth embodiment.
  • FIG. 9 is a schematic development view of electrodes of the piezoelectric vibrator in the fifth embodiment.
  • the first electrode 20b is formed on the inner peripheral surface of the piezoelectric body 20a
  • the second electrode 20c is formed on the outer peripheral surface of the piezoelectric body 20a.
  • the present invention is not limited to this configuration.
  • both of the first and second electrodes may be formed on the outer peripheral surface, or both may be formed on the inner peripheral surface.
  • the first and second electrodes 20b and 20c are formed in a comb-tooth shape to be inserted into each other, and both are formed of the piezoelectric body 20a. It is provided on the outer peripheral surface. As shown in FIG. 8, the piezoelectric body 20a is polarized between the electrode fingers of the first and second electrodes 20b and 20c. The polarization of the piezoelectric body 20a can be performed by applying a voltage between the first and second electrodes 20b and 20c.

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Abstract

L'invention concerne un atomiseur présentant des performances d'atomisation élevées. L'atomiseur (1) présente un corps d'atomiseur (10) et un vibrateur piézoélectrique (20). Une chambre de mise sous pression (11a) alimentée en liquide est formée à l'intérieur du corps d'atomiseur (10). Le corps d'atomiseur (10) comprend une section de formation de trou traversant (13) et une section de vibration (14). Un trou traversant (13a) est formé à l'intérieur de la section de formation de trou traversant (13) et débouche dans la chambre de mise sous pression (11a). La section de vibration (14) est en contact avec la chambre de mise sous pression (11a). Le vibrateur piézoélectrique (20) fait vibrer la section de vibration (14). Le vibrateur piézoélectrique (20) présente un corps piézoélectrique tubulaire (20a), une première électrode (20b) et une seconde électrode (20c). Une extrémité du corps piézoélectrique (20a) est assemblée au bord extérieur de la section de vibration (14). Les première et seconde électrodes (20b, 20c) appliquent une tension au corps piézoélectrique (20a).
PCT/JP2010/072681 2010-01-12 2010-12-16 Atomiseur WO2011086810A1 (fr)

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JP2011549888A JP5423813B2 (ja) 2010-01-12 2010-12-16 霧化器

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JP2010004150 2010-01-12
JP2010-004150 2010-01-12

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WO2011086810A1 true WO2011086810A1 (fr) 2011-07-21

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014121688A (ja) * 2012-12-21 2014-07-03 Omron Healthcare Co Ltd 霧化装置
JP2018507735A (ja) * 2015-03-16 2018-03-22 ザ プロクター アンド ギャンブル カンパニー 材料を分配するためのシステム及び方法
WO2022151904A1 (fr) * 2021-01-18 2022-07-21 深圳麦克韦尔科技有限公司 Plaque céramique piézoélectrique et dispositif d'atomisation électronique
CN115515705A (zh) * 2020-06-03 2022-12-23 株式会社村田制作所 气泡产生装置及气泡产生系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54174935U (fr) * 1978-05-30 1979-12-10
JPH06262109A (ja) * 1993-03-16 1994-09-20 Matsushita Electric Ind Co Ltd 霧化装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5862411A (ja) * 1981-10-12 1983-04-13 Matsushita Electric Ind Co Ltd 霧化装置
JPH0663474A (ja) * 1992-08-20 1994-03-08 Matsushita Electric Ind Co Ltd 霧化装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54174935U (fr) * 1978-05-30 1979-12-10
JPH06262109A (ja) * 1993-03-16 1994-09-20 Matsushita Electric Ind Co Ltd 霧化装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014121688A (ja) * 2012-12-21 2014-07-03 Omron Healthcare Co Ltd 霧化装置
JP2018507735A (ja) * 2015-03-16 2018-03-22 ザ プロクター アンド ギャンブル カンパニー 材料を分配するためのシステム及び方法
CN115515705A (zh) * 2020-06-03 2022-12-23 株式会社村田制作所 气泡产生装置及气泡产生系统
CN115515705B (zh) * 2020-06-03 2024-06-11 株式会社村田制作所 气泡产生装置及气泡产生系统
WO2022151904A1 (fr) * 2021-01-18 2022-07-21 深圳麦克韦尔科技有限公司 Plaque céramique piézoélectrique et dispositif d'atomisation électronique

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JP5423813B2 (ja) 2014-02-19

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