WO2011036826A1 - 収納トレイ - Google Patents
収納トレイ Download PDFInfo
- Publication number
- WO2011036826A1 WO2011036826A1 PCT/JP2010/003080 JP2010003080W WO2011036826A1 WO 2011036826 A1 WO2011036826 A1 WO 2011036826A1 JP 2010003080 W JP2010003080 W JP 2010003080W WO 2011036826 A1 WO2011036826 A1 WO 2011036826A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- storage tray
- storage
- liquid crystal
- crystal display
- display panel
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
Definitions
- the present invention relates to a storage tray used for storing flat articles (hereinafter referred to as “plate-like objects”) such as liquid crystal display panels.
- a storage tray provided with a recess according to the shape of the desired product in order to prevent the product from being scratched or soiled. Is used as packaging.
- a plurality of concave portions having the same shape are usually two-dimensionally arranged, and products are stored one by one in these concave portions.
- a storage tray for example, one having a structure in which one or a plurality of concave portions are provided on one surface of a flat plate and an article having a corresponding shape and size is fitted and stored in each of the concave portions is disclosed.
- a storage tray for example, one having a structure in which one or a plurality of concave portions are provided on one surface of a flat plate and an article having a corresponding shape and size is fitted and stored in each of the concave portions is disclosed.
- two moving frames that slide along the long side and the short side are provided inside the rectangular outer frame, respectively, and the peripheral edge of the rectangular flat plate-like article is formed by these moving frames and the remaining two sides of the outer frame.
- a storage tray configured to support is disclosed (for example, see Patent Document 2).
- the storage tray is slidably attached to the upper surface of the bottom plate, and has a plurality of receivers each having a receiving seat that supports the peripheral edge of the article, and a sliding area of the receiver.
- the storage tray described in Patent Document 3 has a problem in that the storage work becomes complicated because it is necessary to slide the support according to the size of the flat article to be stored.
- a small flat article such as a cellular phone
- the present invention has been made in view of the above-described problems, and provides an inexpensive storage tray that can reliably prevent damage to stored articles and can be easily stored. For the purpose.
- a storage tray of the present invention is formed in a storage tray main body, a storage recess body for storing a plate-like object, and provided in the storage recess, And a plurality of support members are provided on the surface of the storage recess so that the tip portions of the plurality of support members are arranged in an arc shape.
- the plate-like object can be supported by the plurality of support members even when the size of the plate-like object is smaller than the size of the storage recess. Therefore, it is possible to prevent the stored plate-like object from greatly vibrating in the vertical direction or the horizontal direction due to vibration or dropping during transportation. As a result, damage to the plate-like object can be prevented even when the size of the plate-like object is smaller than the size of the storage recess.
- the plate-like object can be stored in the storage recess without sliding a member such as a receiver according to the size of the plate-like object to be stored. Therefore, the storing operation can be easily performed.
- the support member may be configured to have flexibility.
- the plate-like object can be accommodated corresponding to the size change of the plate-like object.
- the support member is composed of a support column attached to the surface of the storage recess and a tip attached to the support column, the diameter of the tip is R 1 , When the diameter is R 2 , a configuration in which a relationship of R 1 > R 2 is established may be adopted.
- the plate-like object when the plate-like object is supported by the plurality of support members, the plate-like object can be held by the two tip portions provided in each of the adjacent support members. Accordingly, it is possible to reliably prevent vibrations in the vertical direction of the stored plate-like object, and as a result, it is possible to further prevent damage to the plate-like object caused by vibration during transportation or dropping. it can.
- the support column portion may have a substantially cylindrical shape
- the tip portion may have a substantially spherical shape
- the surface of the storage recess may have a substantially arc shape in cross section, and the plurality of support members may be arranged in an arc along the surface of the storage recess.
- the storage tray main body may be formed of any material selected from the group consisting of ABS resin, polypropylene resin, foamed PET resin, and polystyrene resin.
- the support member may be formed of any material selected from the group consisting of polyvinyl chloride, ABS resin, polypropylene resin, foamed PET resin, and polystyrene resin.
- the support member and the storage tray main body may be formed of the same material.
- the support member can be formed by, for example, press molding, the support member can be easily manufactured and the manufacturing cost can be suppressed.
- the storage tray of the present invention has an excellent characteristic that it can reliably prevent the stored articles from being damaged and can be easily stored. Therefore, the present invention is suitably used for a storage tray whose plate-like object is a liquid crystal display panel.
- FIG. 4 is a cross-sectional view taken along line AA in FIG. 3. It is sectional drawing which shows the state which accommodated the liquid crystal display panel in the storage recessed part of the storage tray which concerns on the 1st Embodiment of this invention. It is sectional drawing for demonstrating the softness
- FIG. 11 is a sectional view taken along line BB in FIG. 10.
- FIG. 1 is a perspective view of a storage tray according to the first embodiment of the present invention.
- the storage tray 1 in the present embodiment is formed in a two-dimensional array on a storage tray main body 1a and an upper surface 2 of the storage tray main body 1a, and has a plate shape such as a liquid crystal display panel.
- a plurality of storage recesses 3 are provided as storage units for storing objects.
- twelve storage recesses 3 are provided in the storage tray 1.
- the number of the storage recesses 3 is not particularly limited as long as at least one storage recess 3 is provided in the storage tray 1.
- the storage tray 1 includes a plurality of position defining recesses 5 arranged on the upper surface 2.
- the position regulating recess 5 is provided to fix and define the positions of the upper and lower storage trays 1 when the plurality of storage trays 1 are stacked in multiple stages.
- the position regulating recess 5 is provided in the vicinity of the side portion 4 of the storage tray 1 and around the storage recess 3.
- the bottom of the position defining recess 5 provided in the upper storage tray 1 is fitted into the position defining recess 5 provided in the lower storage tray 1.
- the position restricting recess 5 is provided so that the plate-like object stored in the lower storage recess 3 does not come into contact with the upper storage tray 1 when the storage tray 1 is stacked up and down. It also has a function of ensuring a gap between the upper surface 2 of the tray 1 and the lower surface 6 of the upper storage tray 1.
- FIG. 2 is a perspective view showing the liquid crystal display panel stored in the storage tray according to the first embodiment of the present invention.
- the liquid crystal display panel 10 includes a TFT substrate 7 on which a plurality of TFTs (Thin-Film Transistors) serving as switching elements are formed, a CF substrate 8 disposed to face the TFT substrate 7, and a TFT And a liquid crystal layer (not shown) provided between the substrate 7 and the CF substrate 8.
- TFT substrate 7 and the CF substrate 8 are each formed in a rectangular plate shape, and the liquid crystal display panel 10 is also formed in a rectangular plate shape.
- a polarizing plate (not shown) is provided on the surface of the TFT substrate 7, and a polarizing plate 9 is provided on the surface of the CF substrate 8.
- a circuit component 12 for controlling the driving of the liquid crystal display panel 10 is mounted on the TFT substrate 7, and a flexible printed circuit board 13 for supplying a signal to the circuit component 12 is connected. Further, the flexible printed circuit board 13 is formed with terminal portions 15 connected to an external board (not shown).
- the liquid crystal display panel 10 is an example of a plate-like object stored in the storage tray 1, and the plate-like object stored is not limited to this.
- FIG. 3 is an enlarged perspective view of a storage recess provided in the storage tray according to the first embodiment of the present invention
- FIG. 4 is a cross-sectional view taken along line AA of FIG.
- the storage recess 3 is provided with a plurality of pins 16 that are flexible support members that support the liquid crystal display panel 10 stored in the storage recess 3.
- the pin 16 protrudes from the surface 3 a of the storage recess 3.
- the pin 16 includes a column portion 17 attached to the surface 3 a of the storage recess 3 and a tip portion 18 attached to the liquid crystal display panel support side end portion of the column portion 17. ing.
- pillar part 17 has a substantially cylindrical shape
- tip part 18 has a substantially spherical shape.
- tip part 18 have a softness
- the storage recess 3 is formed so that the surface 3 a has a substantially arc-shaped cross section, and the plurality of pins 16 protruding from the surface 3 a of the storage recess 3 are The arcs are arranged along the surface 3 a of the storage recess 3. That is, the plurality of pins 16 are provided on the surface 3 a of the housing recess 3 so that the tip portions 18 of the plurality of pins 16 are arranged in an arc shape.
- the material for forming the storage tray main body 1a in the present embodiment is not particularly limited, but from the viewpoint of improving the moldability of the storage tray 1 and reducing the cost and weight, for example, It is preferably formed of a material such as ABS resin, polypropylene resin, foamed PET resin, or polystyrene resin.
- the material for forming the pin 16 is not particularly limited, but from the viewpoint of imparting flexibility to the pin 16 (that is, the column portion 17 and the tip portion 18) with an inexpensive and versatile material. It is preferably formed of a material such as polyvinyl chloride, ABS resin, polypropylene resin, foamed PET resin, or polystyrene resin.
- the pin 16 may be formed of the same material as that of the storage tray body 1a. With such a configuration, the pin 16 can be formed (processed) by, for example, press molding, so that the manufacturing of the pin 16 is facilitated and the manufacturing cost can be suppressed.
- FIG. 5 shows a state in which the liquid crystal display panel 10 is stored in the storage recess 3 of the storage tray 1 described above.
- the tip 18 of the pin 16 protruding from the surface 3 a of the storage recess 3 comes into contact with the liquid crystal display panel 10, and the pin 16 The liquid crystal display panel 10 is supported.
- the plurality of pins 16 are provided on the surface 3a of the storage recess 3 so that the tip portions 18 of the plurality of pins 16 are arranged in an arc shape, as shown in FIG. Even if the size of the liquid crystal display panel 10 is smaller than the size of the housing recess 3, the liquid crystal display panel 10 can be supported by the plurality of pins 16.
- the liquid crystal display panel 10 it is possible to prevent the stored liquid crystal display panel 10 from greatly vibrating in the vertical direction or the horizontal direction due to vibration or dropping during transportation. As a result, the liquid crystal display can be compared with the size of the storage recess 3. Even if the size of the panel 10 is small, the liquid crystal display panel 10 can be prevented from being damaged.
- the liquid crystal display panel 10 is stored in the storage concave portion without sliding a member such as a receiving member in accordance with the size of the liquid crystal display panel to be stored. 3 can be stored. Therefore, the storing operation can be easily performed.
- the plurality of pins 16 are provided on the surface 3a of the storage recess 3 so that the tip portions 18 of the plurality of pins 16 are arranged in an arc shape, as shown in FIG. A plurality of (two in FIG. 8) liquid crystal display panels 10 having different sizes can be stored in one storage recess 3. As described above, since the pins 16 have flexibility, it is not necessary to change the arrangement of the pins 16 according to the size of the liquid crystal display panel 10 to be accommodated.
- the pin 16 since the pin 16 has flexibility, as shown in FIG. 6, the column portion 17 of the pin 16 is flexibly deformed according to the size of the liquid crystal display panel 10 (in this case, in the drawing). In the direction of arrow X). Therefore, the liquid crystal display panel 10 can be accommodated in response to the size change of the liquid crystal display panel 10.
- the liquid crystal display panel 10 can be stored regardless of the size of the liquid crystal display panel 10 (any size of the liquid crystal display panel 10 to be stored), and vibration during transportation It is possible to prevent the liquid crystal display panel 10 from being damaged due to or falling.
- the diameter R 1 of the tip end portion 18 is configured to be larger than the diameter R 2 of the column portion 17 (that is, R 1 > R 2 ). Therefore, when the liquid crystal display panel 10 is supported by the pins 16, as shown in FIG. 7, the two tip portions 18 provided on each of the adjacent pins 16 cause a vertical direction (in this case, as shown in FIG. 7).
- the liquid crystal display panel 10 can be held in the direction of the arrow Y). As a result, since it is possible to reliably prevent vibration in the vertical direction of the stored liquid crystal display panel 10, it is possible to further prevent damage to the liquid crystal display panel 10 due to vibration during transportation or dropping. it can.
- the support column portion 17 has a substantially cylindrical shape
- the tip portion 18 has a substantially spherical shape.
- tip part 18 have a softness
- the plurality of pins 16 projecting from the surface 3a of the storage recess 3 are arranged in an arc shape along the surface 3a of the storage recess 3, so that the plurality of pins 16 can be configured with a simple configuration. It becomes possible to arrange the front-end
- FIG. 9 is a perspective view of a storage tray according to the second embodiment of the present invention
- FIG. 10 is an enlarged perspective view of a storage recess provided in the storage tray according to the second embodiment of the present invention
- 11 is a cross-sectional view taken along the line BB of FIG. Note that the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. Further, since the liquid crystal display panel to be accommodated is the same as that described in the first embodiment, detailed description thereof is omitted here. Also in the present embodiment, a liquid crystal display panel will be described as an example of the plate-like material.
- the storage recess 3 is formed so that the surface 3a thereof has a substantially rectangular cross section.
- a plurality of pins 21 protrude from the surface 3 a of the storage recess 3.
- the plurality of pins 21 are provided on the surface 3 a of the housing recess 3 so that the tips 22 of the plurality of pins 21 are arranged in an arc shape.
- the material for forming the pin 21 is not particularly limited, but from the viewpoint of cost reduction, it is the same material as the storage tray body 1a, that is, ABS resin, polypropylene resin, foamed PET resin. Further, it is preferably formed of a material such as polystyrene resin. With this configuration, as in the first embodiment described above, the pin 21 can be formed (processed) by, for example, press molding, which facilitates the manufacture of the pin 21 and the manufacturing cost. Can be suppressed.
- the pin 21 of the present embodiment may not have flexibility.
- FIG. 12 shows a state where the liquid crystal display panel 10 is stored in the storage recess 3 of the storage tray 20 described above. As shown in FIG. 12, when the liquid crystal display panel 10 is stored in the storage recess 3, the tip 22 of the pin 21 protruding from the surface 3a of the storage recess 3 comes into contact with the liquid crystal display panel 10, and the pin 21 The liquid crystal display panel 10 is supported.
- the plurality of pins 21 are provided on the surface 3a of the storage recess 3 so that the tip portions 22 of the plurality of pins 21 are arranged in an arc shape in the storage recess 3, as shown in FIG. Even when the size of the liquid crystal display panel 10 is smaller than the size of the storage recess 3, the liquid crystal display panel 10 can be supported by the plurality of pins 21.
- the liquid crystal display panel 10 it is possible to prevent the stored liquid crystal display panel 10 from greatly vibrating in the vertical direction or the horizontal direction due to vibration or dropping during transportation. As a result, the liquid crystal display can be compared with the size of the storage recess 3. Even if the size of the panel 10 is small, the liquid crystal display panel 10 can be prevented from being damaged.
- the liquid crystal display panel 10 is stored without sliding a member such as a receiver according to the size of the liquid crystal display panel to be stored. It can be stored in the recess 3. Therefore, the storing operation can be easily performed.
- the plurality of pins 21 are provided on the surface 3a of the storage recess 3 so that the tip portions 22 of the plurality of pins 21 are arranged in an arc shape in the storage recess 3, as shown in FIG. As shown in FIG. 6, a plurality of (two in FIG. 12) liquid crystal display panels 10 having different sizes can be stored in one storage recess 3.
- the pin 21 can be supported by the pin 21 in a state where the liquid crystal display panel 10 is inclined as shown in FIG. Therefore, the liquid crystal display panel 10 can be accommodated in response to the size change of the liquid crystal display panel 10.
- the liquid crystal display panel 10 can be used regardless of the size of the liquid crystal display panel 10 (regardless of the size of the liquid crystal display panel 10 accommodated).
- the display panel 10 can be stored, and the liquid crystal display panel 10 can be prevented from being damaged due to vibration or dropping during transportation.
- the surface 3 a of the storage recess 3 is formed so as to have a substantially circular arc shape or a substantially rectangular cross section.
- tips of a plurality of pins are arranged in an arc shape.
- the surface 3 a of the storage recess 3 is formed to have a polygonal cross section so that the tip portions 22 of the plurality of pins 21 are arranged in an arc shape in the storage recess 3.
- a configuration in which a plurality of pins 21 are provided may be employed.
- the present invention is suitable for a storage tray used for storing a plate-like object such as a liquid crystal display panel.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Liquid Crystal (AREA)
Abstract
Description
図1は、本発明の第1の実施形態に係る収納トレイの斜視図である。図1に示すように、本実施形態における収納トレイ1は、収納トレイ本体1aと、収納トレイ本体1aが有する上面2に2次元的に配列されて形成されるとともに、液晶表示パネル等の板状物を収納するための収納部としての複数の収納凹部3とを備えている。
次に、本発明の第2の実施形態について説明する。図9は、本発明の第2の実施形態に係る収納トレイの斜視図であり、図10は、本発明の第2の実施形態に係る収納トレイに設けられた収納凹部の拡大斜視図であり、図11は、図10のB-B断面図である。なお、上記第1の実施形態と同様の構成部分については同一の符号を付してその説明を省略する。また、収納される液晶表示パネルについては、上述の第1の実施形態において説明したものと同様であるため、ここでは詳しい説明を省略する。また、本実施形態においても、板状物として、液晶表示パネルを例に挙げて説明する。
1a 収納トレイ本体
2 上面
3 収納凹部
3a 収納凹部の表面
5 位置規制用凹部
10 液晶表示パネル(板状物)
16 ピン(支持部材)
17 支柱部
18 先端部
20 収納トレイ
21 ピン(支持部材)
22 先端部
Claims (9)
- 収納トレイ本体と、
前記収納トレイ本体に形成され、板状物を収納するための収納凹部と、
前記収納凹部に設けられるとともに、前記板状物を支持するための複数の支持部材と
を備え、
前記複数の支持部材の先端部が円弧状に配列されるように、前記複数の支持部材が前記収納凹部の表面に設けられていることを特徴とする収納トレイ。 - 前記支持部材は柔軟性を有することを特徴とする請求項1に記載の収納トレイ。
- 前記支持部材は、前記収納凹部の表面に取り付けられた支柱部と、該支柱部に取り付けられた前記先端部とにより構成され、前記先端部の径をR1、前記支柱部の径をR2とした場合に、R1>R2なる関係が成立することを特徴とする請求項1または請求項2に記載の収納トレイ。
- 前記支柱部は略円柱形状を有するとともに、前記先端部は略球形状を有することを特徴とする請求項3に記載の収納トレイ。
- 前記収納凹部の表面が断面略円弧形状を有するとともに、前記複数の支持部材は、前記収納凹部の表面に沿って円弧状に配列されていることを特徴とする請求項1~請求項4のいずれか1項に記載の収納トレイ。
- 前記収納トレイ本体が、ABS樹脂、ポリプロピレン樹脂、発泡PET樹脂およびポリスチレン樹脂からなる群より選択されるいずれかの材料により形成されていることを特徴とする請求項1~請求項5のいずれか1項に記載の収納トレイ。
- 前記支持部材が、ポリ塩化ビニル、ABS樹脂、ポリプロピレン樹脂、発泡PET樹脂、およびポリスチレン樹脂からなる群より選択されるいずれかの材料により形成されていることを特徴とする請求項1~請求項6のいずれか1項に記載の収納トレイ。
- 前記支持部材と前記収納トレイ本体が同一の材料により形成されていることを特徴とする請求項1~請求項5のいずれか1項に記載の収納トレイ。
- 前記板状物が液晶表示パネルであることを特徴とする請求項1~請求項8のいずれか1項に記載の収納トレイ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010800364968A CN102470980B (zh) | 2009-09-28 | 2010-04-30 | 收纳盘 |
JP2011532894A JP5357261B2 (ja) | 2009-09-28 | 2010-04-30 | 収納トレイ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009222412 | 2009-09-28 | ||
JP2009-222412 | 2009-09-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011036826A1 true WO2011036826A1 (ja) | 2011-03-31 |
Family
ID=43795596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2010/003080 WO2011036826A1 (ja) | 2009-09-28 | 2010-04-30 | 収納トレイ |
Country Status (3)
Country | Link |
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JP (1) | JP5357261B2 (ja) |
CN (1) | CN102470980B (ja) |
WO (1) | WO2011036826A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018003576A1 (ja) * | 2016-06-30 | 2018-01-04 | 日本電産サンキョー株式会社 | 搬送システム |
KR101906988B1 (ko) | 2017-02-10 | 2018-10-12 | 바이옵트로 주식회사 | 디스플레이용 팔레트 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI664118B (zh) * | 2017-11-27 | 2019-07-01 | 住華科技股份有限公司 | 承載裝置 |
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KR101320106B1 (ko) * | 2006-12-29 | 2013-10-18 | 엘지디스플레이 주식회사 | 글래스 지지핀 및 이를 구비한 반송 정반 |
CN100519359C (zh) * | 2007-03-03 | 2009-07-29 | 大连海事大学 | 一种用于电子产品的纸浆模塑包装制品 |
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JP2011042384A (ja) * | 2009-08-20 | 2011-03-03 | Panasonic Liquid Crystal Display Co Ltd | 搬送トレイ |
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2010
- 2010-04-30 WO PCT/JP2010/003080 patent/WO2011036826A1/ja active Application Filing
- 2010-04-30 CN CN2010800364968A patent/CN102470980B/zh not_active Expired - Fee Related
- 2010-04-30 JP JP2011532894A patent/JP5357261B2/ja not_active Expired - Fee Related
Patent Citations (4)
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JPH03169042A (ja) * | 1989-11-28 | 1991-07-22 | Nec Corp | 半導体素子用チップトレー |
JP2004140049A (ja) * | 2002-10-16 | 2004-05-13 | Sumitomo Mitsubishi Silicon Corp | ウェーハトレイ |
JP2006273405A (ja) * | 2005-03-30 | 2006-10-12 | Matsushita Electric Ind Co Ltd | 半導体装置用の収納トレイ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018003576A1 (ja) * | 2016-06-30 | 2018-01-04 | 日本電産サンキョー株式会社 | 搬送システム |
KR101906988B1 (ko) | 2017-02-10 | 2018-10-12 | 바이옵트로 주식회사 | 디스플레이용 팔레트 |
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JPWO2011036826A1 (ja) | 2013-02-14 |
JP5357261B2 (ja) | 2013-12-04 |
CN102470980A (zh) | 2012-05-23 |
CN102470980B (zh) | 2013-11-13 |
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