WO2011016542A1 - 膨張黒鉛シート - Google Patents
膨張黒鉛シート Download PDFInfo
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- WO2011016542A1 WO2011016542A1 PCT/JP2010/063349 JP2010063349W WO2011016542A1 WO 2011016542 A1 WO2011016542 A1 WO 2011016542A1 JP 2010063349 W JP2010063349 W JP 2010063349W WO 2011016542 A1 WO2011016542 A1 WO 2011016542A1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/21—After-treatment
- C01B32/22—Intercalation
- C01B32/225—Expansion; Exfoliation
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
- C04B35/522—Graphite
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
Definitions
- the present invention relates to an expanded graphite sheet, and more particularly to an expanded graphite sheet in a use stage in which all impurities are extremely low.
- the flexible expanded graphite sheet itself has been well known in the past, and this graphite sheet is usually anodized or acid (for example, mixed acid obtained by adding nitric acid or the like to agricultural sulfuric acid) to natural scale-like graphite or quiche graphite. Oxidized by dipping, washed with water, dried, then subjected to heat expansion treatment to produce expanded graphite, and the expanded graphite obtained in this way is produced by compression molding with a press or roll.
- the This expanded graphite sheet is not only excellent in chemical resistance, heat resistance, heat and electrical conductivity, which is a characteristic of graphite, but also has a great flexibility and compression recovery property and also has a large anisotropy. It is widely used as various packing materials, high-temperature insulation materials, and heat diffusion materials.
- the expanded graphite sheet is made from natural flake graphite or quiche graphite, the expanded graphite sheet contains a large amount of impurities such as Si, Fe and Al.
- impurities such as Si, Fe and Al.
- the S content is large.
- this expanded graphite sheet is used under conditions such as heating, reduced pressure, or gas replacement, there is a drawback that the atmosphere is contaminated by these impurities.
- the S content is high as an impurity, this defect tends to be particularly prominent.
- the present inventors have proposed a high-purity flexible expanded graphite sheet having an S content of 15 ppm or less and a total impurity other than S of 20 ppm or less.
- the conventional method can provide an expanded graphite sheet having a very low impurity content.
- impurities are present in the expanded graphite sheet. May be included. This is probably because the expanded graphite sheet is packed and transported after manufacture, and then taken out from the packing material and used, and impurities are attached in the packing and transport stage. When such inconvenience occurs, there is a problem that the product (silicon single crystal in the above example) is adversely affected, leading to a decrease in quality or a decrease in yield.
- the present invention is a production stage of the expanded graphite sheet, and when the expanded graphite sheet is actually used, by suppressing the inclusion of impurities in the expanded graphite sheet, the quality of the product and the yield are reduced. It aims at providing the expanded graphite sheet which can suppress this.
- the present invention is characterized in that all impurities are at a level below the detection limit. If it is the said structure, even when it is a case where the said expanded graphite sheet is actually used (For example, when using as a member of the apparatus which manufactures the thing for which purity is required, such as a silicon single crystal manufacturing apparatus), it expands. It can suppress that a large amount of impurities are contained in a graphite sheet. Therefore, a decrease in quality or a decrease in yield due to adverse effects on a product (for example, a silicon single crystal) can be suppressed.
- the impurities include Al, B, Be, Ca, Cu, Fe, K, Li, Mg, Na, Ni, S, Si, Ti, V, and Zn, and Al, B, Be , Ca, Cu, Fe, Li, Mg, Ni, S, Ti, V, and Zn are measured by the ICP emission method, the amounts of K and Na are measured by the atomic absorption method, and the amount of Si is absorbed. Measured by photometric method.
- the above impurities are in the use stage in a state where the expanded graphite sheet is taken out of the packing material after being packed with the packing material.
- the amount of Al is less than 0.08 mass ppm
- the amount of B is less than 0.1 mass ppm
- the amount of Be is less than 0.02 mass ppm
- the amount of Ca is less than 0.04 mass ppm
- the amount of Cu is 0.08 mass.
- Fe is less than 0.04 mass ppm
- K is less than 0.1 mass ppm
- Li is less than 0.01 mass ppm
- Mg is less than 0.02 mass ppm
- Na is 0.05 mass.
- Ni amount is less than 0.1 mass ppm
- S amount is less than 1.0 mass ppm
- Si amount is less than 0.1 mass ppm
- Ti amount is less than 0.09 mass ppm
- V amount is 0.07 mass.
- the amount of Zn is less than 0.1 mass ppm.
- the packaging material contains B, Ba, Ca, Cu, Li, Ni, Mn, Mo, Ti, and Pb, and all the elements are measured when measured by the ICP-MS method. Each level is below the detection limit.
- the packaging material contains Al, Fe, Cr, Mg, Na, V, and Zn, and the amount of Al is 2 ⁇ 10 ⁇ 7 mol when measured by the ICP-MS method. / M 2 or less, Fe amount is 3 ⁇ 10 ⁇ 7 mol / m 2 or less, Cr amount is 2 ⁇ 10 ⁇ 7 mol / m 2 or less, Mg amount is 2 ⁇ 10 ⁇ 7 mol / m 2 or less, The amount of Na is 5 ⁇ 10 ⁇ 7 mol / m 2 or less, the amount of V is 2 ⁇ 10 ⁇ 7 mol / m 2 or less, and the amount of Zn is 2 ⁇ 10 ⁇ 7 mol / m 2 or less.
- the present invention when the expanded graphite sheet is used, and when the expanded graphite sheet is actually used, by suppressing the inclusion of impurities in the expanded graphite sheet, the quality of the product and the yield are decreased. There is an excellent effect that can be suppressed.
- Sectional drawing of the single crystal pulling apparatus using the expanded graphite sheet in the use stage of this invention Sectional drawing of the high-pressure impregnation apparatus using the expanded graphite sheet in the use stage of this invention.
- an expanded graphite sheet (hereinafter sometimes abbreviated as a carbon sheet) having a bulk density of 0.7 to 1.3 g / cm 3 (preferably 0.8 to 1.0 g / cm 3 ) in a container is 800. Hold at ⁇ 1000 ° C. for usually 1 to 10 hours.
- the reason why the temperature is set to 800 ° C. or higher is that if the temperature is lower than that, the vapor pressure of the halogenated impurity does not reach and vaporization and volatilization cannot be sufficiently achieved.
- the temperature is kept at the above temperature for 3 to 5 hours, and then the temperature is gradually raised and maintained at 2450 to 2500 ° C. for 5 to 24 hours (preferably 7 to 15 hours).
- the holding time is limited to 5 to 24 hours. If the holding time is less than 5 hours, the halogenated organic matter does not sufficiently permeate into the graphite sheet, and impurities existing in the sheet are used as halide to increase the vapor pressure. This is because the evaporation / volatilization of impurities is in a steady state even after 24 hours, and the obtained effect is small.
- the bulk density of the expanded graphite sheet is restricted to 0.7 to 1.3 g / cm 3 because the strength is insufficient when it is less than 0.7 g / cm 3 while the bulk density is 1.3 g / cm 3. This is because if it exceeds 3 , it takes time to increase the purity and the cost increases.
- the internal pressure of the container is maintained at about 1 to 100 Torr (preferably 10 to 40 Torr) from the start of heating, and therefore, it is convenient for discharging degass that is slightly volatilized at this stage. Note that the pressure in the container is restricted to 1 to 100 Torr because the effect of reducing the pressure is small when the pressure exceeds 100 Torr, and it takes time to increase the purity and the cost is high.
- the pressure inside the container is a pressure gauge as a sum (total pressure) of vapor pressures (partial pressures) of various compounds such as halides, chlorinated or / and fluorinated impurities, or residual N 2 gas at the time of substitution.
- total pressure total pressure
- partial pressures partial pressures
- a halogenated organic gas such as dichlorodifluoromethane, for example, dichlorodifluoromethane
- a halogenated organic gas such as dichlorodifluoromethane, for example, dichlorodifluoromethane
- a reduced pressure state for example, about 1 to 7 liters NPT / kg is supplied for about 3 to 8 hours.
- the halogenated organic gas used for high purity is necessary to increase the vapor pressure by using impurities contained in the carbon sheet, especially metal impurities as halogen salts, and to increase the purity of the carbon sheet as a base material by evaporation and volatilization thereof.
- impurities contained in the carbon sheet especially metal impurities as halogen salts
- metal impurities as halogen salts especially metal impurities as halogen salts
- any of those conventionally used for graphite materials can be used.
- fluorine and fluorine compounds can be used, and chlorine or fluorine gases can be used simultaneously. You may use together.
- compounds containing fluorine and chlorine in the same molecule such as monochlorotrifluoromethane, trichloromonofluoromethane, cyclodifluoroethane, trichloromonofluoroethane, and the like can also be used.
- H 2 shows a high purification effect with respect to the types of impurities, such as sulfur, etc.
- desulfurization can be carried out more completely if H 2 gas is continuously supplied after the supply of halogenated organic substances is stopped.
- the temperature is lower than 800 ° C.
- the reactivity between sulfur and hydrogen gas is not good, which is not preferable.
- the pressure is higher than 100 Torr, the effect of reducing the pressure is reduced.
- the pressure is lower than 1 Torr, the absolute amount of hydrogen gas to be supplied decreases, and sulfur cannot be sufficiently removed by the hydrogen gas.
- the high purification operation when the high purification operation is completed, it is preferable to further raise the temperature in the furnace and to maintain the temperature at 3000 ° C. for about 10 to 30 hours to complete the process. After that, the furnace is cooled. At that time, the pressure in the container is strongly reduced to 10 ⁇ 2 to 10 ⁇ 4 Torr at about 2000 ° C., and the high purity carbon sheet with less outgas and S is cooled. Can be obtained. In addition, it is thought that gas, such as halogenated organic substance gas and outgas, can come in and out from the side surface direction of a sheet
- gas such as halogenated organic substance gas and outgas
- the energization is stopped, and the container is filled with N 2 gas and returned to normal pressure and room temperature while being replaced, and then compression molding is performed by, for example, rolling with a press or roll by a normal compression molding means.
- a vacuum type high frequency furnace can be used in the impurity removal (purification step), which has the advantages as shown in the following (1) and (2).
- Impurities of the halogenated and / or hydrogenated carbon sheet are likely to volatilize and dissipate to the outside because the atmosphere is under reduced pressure, and even faster, despite the use of a small amount of halogenated organic gas, A high purity graphite material is obtained.
- the expanded graphite sheet produced as described above is packed with a packing material, it is transported, and the expanded graphite sheet is further taken out of the packing material and used in an actual apparatus. All impurities are below the detection limit. At this time, among impurities, Al, B, Be, Ca, Cu, Fe, K, Li, Mg, Na, Ni, S, Si, Ti, V, and Zn are at levels below the detection limit. It is important that With the above configuration, even if the expanded graphite sheet is actually used, the expanded graphite sheet can be prevented from containing a large amount of impurities, so the quality is deteriorated due to adverse effects on the product etc. Or the fall of a yield is suppressed.
- FIG. 1 is a cross-sectional view of a single crystal pulling apparatus.
- 1 is a spacer made of the expanded graphite sheet sheet of the present invention
- 2 is a heat insulating material also made of the expanded graphite sheet sheet of the present invention.
- 3 is a graphite heater
- 4 is a graphite crucible
- 5 is a quartz crucible
- 6 is a graphite mount
- 7 is silicon
- 8 is a single crystal
- 9 is a pulling device.
- a quartz crucible 5 is placed directly on the spacer 1, and molten silicon 7 exists in the quartz crucible 5. Therefore, when impurities are deposited from the spacer 1, the quality of the silicon single crystal 8 is immediately affected, and the quartz crucible 5 is contaminated and damaged. However, such a problem does not occur if the high purity sheet is used as in the present invention. Further, since the heat insulating material 2 is also installed on the inner surface of the single crystal pulling apparatus, impurities from the heat insulating material 2 contaminate the atmosphere in the apparatus, not only adversely affect the silicon single crystal 8, but also the contamination in the apparatus. Corrosion may also occur, but since the sheet of the present invention has a high purity, such a worry hardly occurs.
- FIG. 2 is a cross-sectional view of a metal high-pressure impregnation device (particularly a metal impregnation device for carbon material).
- the example which used this invention sheet for the spacer 14 which is material is shown.
- 15 is a carbon material to be impregnated with metal
- 16 is a porous cage
- 17 is a molten metal
- 18 is a resistance heating element
- 19 is an exhaust pipe
- 20 is a crucible. Even if it is placed in this apparatus, the purity of the heat insulating materials 11 to 13 installed on the inner surface of the apparatus is greatly affected, and the sheet of the present invention is highly suitable because of its high purity.
- Natural scaly graphite immersed in a mixture of 7 to 25 parts by weight of potassium permanganate in concentrated sulfuric acid with respect to 100 parts by weight of graphite is heated to 800 to 1000 ° C. and expanded to a volume of 140 to 160 cm 3 / g.
- An expanded graphite sheet having a bulk density of 1.0 g / cm 3 was manufactured by roll press molding and subjected to heat treatment at 10 Toor and 1000 ° C. for 10 hours in a gas atmosphere of difluoromethane, and then the temperature was gradually raised. The temperature was maintained at 2450-2500 ° C. for 10 hours.
- the internal pressure of the container was strongly reduced to 10 ⁇ 2 Torr, and the container was filled with N 2 gas and returned to normal pressure and normal temperature while being replaced.
- the thickness increase rate at this time was 11%, and a high purity expanded graphite sheet having a bulk density of 0.9 g / cm 3 was obtained. Since the ash content of this sheet was measured, the results are shown in Table 1.
- the present invention can be used as a spacer and a heat insulating material for a single crystal pulling apparatus, a heat insulating material and a spacer for a high pressure impregnation apparatus, and the like.
- Spacer 2 Insulating material 11-13: Insulating material 14: Spacer
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Abstract
Description
このようなことを考慮して、本願発明者らは、S含量が15ppm以下でS以外の全不純物が20ppm以下の高純度可撓性膨張黒鉛シートを提案した。
上記構成であれば、実際に当該膨張黒鉛シートを使用する場合(例えば、シリコン単結晶製造装置等、純度が要求される物を製造する装置の一部材として使用する場合)であっても、膨張黒鉛シートに多量の不純物が含まれるのを抑制できる。したがって、製品(例えば、シリコン単結晶)に悪影響を及ぼすことに起因する品質の低下或いは歩留りの低下が抑えられる。
容器内圧力は、加熱を開始した時点から1~100Torr(好ましくは、10~40Torr)程度に保たれ、このためこの段階で僅かに揮散してくる脱ガスの排出には好都合である。尚、容器内圧力を1~100Torrに規制するのは、圧力が100Torrを超えると減圧にした効果が少なく、高純度化に時間がかかってコスト高となる一方、1Torr未満になると、ハロゲン量が少なくなって、高純度化が不十分となったり、生成ガスの除去に多大のポンプ動力を要してコスト高となるからである。尚、容器内圧力は、ハロゲン化物、塩素化又は/及びフッ素化された不純物、又は置換時の残存N2ガス等の種々の化合物の蒸気圧(分圧)の総和(全圧)として圧力計に示されるものをいう。
その後、炉を冷却するのであるが、その際、約2000℃に於いて容器内圧力を10-2~10-4Torrに強減圧し、冷却することにより、アウトガス及びSの少ない高純度炭素シートを得ることができる。なお、ハロゲン化有機物ガスやアウトガス等のガスはシートの側面方向から出入りできるようになっているものと考えられる。
尚、上記不純物除去(高純度化工程)において真空式高周波熱炉を使用することができ、このことは、下記(1)(2)に示すような利点がある。
上記構成であれば、実際に当該膨張黒鉛シートを使用する場合であっても、膨張黒鉛シートに多量の不純物が含まれるのを抑制できるので、製品等に悪影響を及ぼすことに起因する品質の低下或いは歩留りの低下が抑えられる。
(1)単結晶引上装置のスペーサー及び断熱材として使用した例
図1は単結晶引上装置の断面図である。図1中、1は本発明の膨張黒鉛シートシートから成るスペーサーであり、2が同じく本発明の膨張黒鉛シートシートから成る断熱材である。尚、図1中、3は黒鉛ヒーター、4は黒鉛ルツボ、5は石英ルツボ、6は黒鉛架台、7はシリコン、8は単結晶、9はその引上用装置を示す。スペーサー1上には直接石英ルツボ5が載置され、この石英ルツボ5内には溶融シリコン7が存在する。したがって、スペーサー1から不純物が析出されると、直ちにシリコン単結晶8の品質に影響し、また石英ルツボ5を汚染、損傷する。しかるに本発明の如く高純度シートであれば、このような支障は生じない。また断熱材2も単結晶引上装置の内面に設置されているため、断熱材2からの不純物が装置内の雰囲気を汚染し、シリコン単結晶8に悪影響を与えるばかりでなく、装置内の汚染腐食も生じる恐れがあるが、本発明シートは高純度であるためそのような心配は殆ど生じない。
図2は金属の高圧含浸装置(特に、炭素材への金属含浸装置)の断面図であり、この装置の断熱材11~13及び緩衝材たるスペーサー14に本発明シートを使用した例を示している。尚、図2中、15は金属を含浸すべき炭素材、16は多孔性カゴ、17は溶融金属、18は抵抗式発熱体、19は排気管、20はルツボを示す。この装置に置いても装置内面に設置される断熱材11~13の純度が大きく影響し、本発明のシートは高純度であるため極めて好適である。
次に、梱包材であるシュペレン35Nタイプ〔宇部フィルム株式会社製であって、各元素の量を表2に示す。純度分析は、表面を酸洗いにて不純物を採取することにより行った(サンプリング面積1250cm2)。〕で上記膨張黒鉛シートを梱包し、常温状圧で24時間放置した後、梱包材から膨張黒鉛シートを取り出した。この使用段階における膨張黒鉛シートの灰分について測定したので、その結果を表3に示す。
2:断熱材
11~13:断熱材
14:スペーサー
Claims (6)
- 全不純物がそれぞれ、検出限界未満の水準となっていることを特徴とする膨張黒鉛シート。
- 上記不純物には、Al、B、Be、Ca、Cu、Fe、K、Li、Mg、Na、Ni、S、Si、Ti、V、及びZnが含まれており、且つ、Al、B、Be、Ca、Cu、Fe、Li、Mg、Ni、S、Ti、V、及びZnの量はICP発光法により測定され、K、及びNaの量は原子吸光法により測定され、Siの量は吸光光度法により測定される、請求項1記載の膨張黒鉛シート。
- 上記Alの量が0.08mass ppm未満、Bの量が0.1mass ppm未満、Beの量が0.02mass ppm未満、Caの量が0.04mass ppm未満、Cuの量が0.08mass ppm未満、Feの量が0.04mass ppm未満、Kの量が0.1mass ppm未満、Liの量が0.01mass ppm未満、Mgの量が0.02mass ppm未満、Naの量が0.05mass ppm未満、Niの量が0.1mass ppm未満、Sの量が1.0mass ppm未満、Siの量が0.1mass ppm未満、Tiの量が0.09mass ppm未満、Vの量が0.07mass ppm未満、及びZnの量が0.1mass ppm未満である、請求項2記載の膨張黒鉛シート。
- 上記不純物は、膨張黒鉛シートを梱包材で梱包した後、当該梱包材から取り出した状態の使用段階におけるものである、請求項1~3の何れか1項に記載の膨張黒鉛シート。
- 上記梱包材には、B、Ba、Ca、Cu、Li、Ni、Mn、Mo、Ti、及びPbが含まれており、且つ、ICP-MS法により測定した場合に、全ての元素が、それぞれ検出限界未満の水準となっている、請求項4に記載の膨張黒鉛シート。
- 上記梱包材には、Al、Fe、Cr、Mg、Na、V、及びZnが含まれており、且つ、ICP-MS法により測定した場合に、Alの量が2×10-7mol/m2以下、Feの量が3×10-7mol/m2以下、Crの量が2×10-7mol/m2以下、Mgの量が2×10-7mol/m2以下、Naの量が5×10-7mol/m2以下、Vの量が2×10-7mol/m2以下、及びZnの量が2×10-7mol/m2以下である、請求項5に記載の膨張黒鉛シート。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG2012004545A SG177725A1 (en) | 2009-08-07 | 2010-08-06 | Expanded graphite sheet |
EP10806541.8A EP2463234A4 (en) | 2009-08-07 | 2010-08-06 | PLATE OF IMPROVED GRAPHITE |
US13/382,185 US8765093B2 (en) | 2009-08-07 | 2010-08-06 | Expanded graphite sheet |
KR1020127005996A KR101760150B1 (ko) | 2009-08-07 | 2010-08-06 | 팽창 흑연 시트 |
CN201080030449.2A CN102471070B (zh) | 2009-08-07 | 2010-08-06 | 膨胀石墨薄片 |
Applications Claiming Priority (2)
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JP2009185011A JP5512188B2 (ja) | 2009-08-07 | 2009-08-07 | 膨張黒鉛シート |
JP2009-185011 | 2009-08-07 |
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WO2011016542A1 true WO2011016542A1 (ja) | 2011-02-10 |
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PCT/JP2010/063349 WO2011016542A1 (ja) | 2009-08-07 | 2010-08-06 | 膨張黒鉛シート |
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US (1) | US8765093B2 (ja) |
EP (1) | EP2463234A4 (ja) |
JP (1) | JP5512188B2 (ja) |
KR (1) | KR101760150B1 (ja) |
CN (1) | CN102471070B (ja) |
MY (1) | MY169895A (ja) |
SG (1) | SG177725A1 (ja) |
TW (1) | TWI471264B (ja) |
WO (1) | WO2011016542A1 (ja) |
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MY192217A (en) * | 2011-08-24 | 2022-08-09 | Kaneka Corp | Graphite film and method for producing graphite film |
US10501594B2 (en) | 2011-08-24 | 2019-12-10 | Kaneka Corporation | Graphite film and method for producing graphite film |
JP5782996B2 (ja) * | 2011-11-01 | 2015-09-24 | 信越半導体株式会社 | 単結晶の製造方法 |
JP6578611B2 (ja) * | 2013-11-25 | 2019-09-25 | 独立行政法人国立高等専門学校機構 | 空気電池用正極及びこの正極を用いた空気電池 |
WO2017047979A1 (ko) * | 2015-09-17 | 2017-03-23 | 김인구 | 폭발방지용 팽창흑연 시이트가 접착된 휴대용 가스렌지 |
JP2021091564A (ja) * | 2019-12-09 | 2021-06-17 | イビデン株式会社 | 膨張黒鉛シート用材料、膨張黒鉛シート、膨張黒鉛シート用材料の製造方法及び膨張黒鉛シートの製造方法 |
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JPH0421509A (ja) | 1990-05-16 | 1992-01-24 | Toyo Tanso Kk | 高純度可撓性膨張黒鉛シート及びその製造方法 |
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US4888242A (en) * | 1986-05-27 | 1989-12-19 | Toyo Tanson Co., Ltd. | Graphite sheet material |
KR100642923B1 (ko) | 2002-06-18 | 2006-11-03 | 도요탄소 가부시키가이샤 | 가요성을 갖는 고순도 팽창 흑연시트와 그 제조방법, 및상기 시트를 이용한 카본 도가니의 내층 |
JP2008266061A (ja) * | 2007-04-18 | 2008-11-06 | Toyo Tanso Kk | 膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置 |
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JPH0421509A (ja) | 1990-05-16 | 1992-01-24 | Toyo Tanso Kk | 高純度可撓性膨張黒鉛シート及びその製造方法 |
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MY169895A (en) | 2019-05-31 |
CN102471070B (zh) | 2014-05-14 |
JP5512188B2 (ja) | 2014-06-04 |
TWI471264B (zh) | 2015-02-01 |
JP2011037653A (ja) | 2011-02-24 |
US8765093B2 (en) | 2014-07-01 |
TW201121886A (en) | 2011-07-01 |
EP2463234A4 (en) | 2015-02-18 |
US20120107222A1 (en) | 2012-05-03 |
KR101760150B1 (ko) | 2017-07-20 |
EP2463234A1 (en) | 2012-06-13 |
SG177725A1 (en) | 2012-02-28 |
KR20120075460A (ko) | 2012-07-06 |
CN102471070A (zh) | 2012-05-23 |
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