WO2011001872A1 - 電界/磁界プローブ - Google Patents
電界/磁界プローブ Download PDFInfo
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- WO2011001872A1 WO2011001872A1 PCT/JP2010/060657 JP2010060657W WO2011001872A1 WO 2011001872 A1 WO2011001872 A1 WO 2011001872A1 JP 2010060657 W JP2010060657 W JP 2010060657W WO 2011001872 A1 WO2011001872 A1 WO 2011001872A1
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- Prior art keywords
- magnetic field
- electric field
- fixed
- optical
- fibre
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- 230000005684 electric field Effects 0.000 title claims abstract description 44
- 239000000523 sample Substances 0.000 title claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 239000010453 quartz Substances 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000010287 polarization Effects 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 21
- 239000000382 optic material Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 abstract description 37
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 3
- 238000005452 bending Methods 0.000 abstract description 3
- 230000000644 propagated effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000036039 immunity Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- -1 bismuth-substituted yttrium iron Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
- G01R15/247—Details of the circuitry or construction of devices covered by G01R15/241 - G01R15/246
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
- G01R29/0885—Sensors; antennas; probes; detectors using optical probes, e.g. electro-optical, luminescent, glow discharge, or optical interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
Definitions
- the present invention relates to a probe for measuring an electric field or a magnetic field using a laser beam and an electro-optic (EO) material or a magneto-optic (MO) material.
- EO electro-optic
- MO magneto-optic
- a probe capable of detecting an xyz three-component with high accuracy in an electric field or a magnetic field is desired.
- a probe using a laser beam and an optical material has been developed. Yes.
- the probe consists of an optical measuring instrument such as a laser light source and an EO / MO material.
- the electric field / magnetic field is incident on these materials, and the refractive index of the material changes according to the electric field / magnetic field strength. Measured to the basic principle.
- the light emitted from the laser light source propagates through the space and enters the EO / MO material, and the optical measuring device and the EO / MO material are all connected by an optical fiber, and the laser light is transmitted through the fiber.
- the optical measuring device and the EO / MO material are all connected by an optical fiber, and the laser light is transmitted through the fiber.
- Microfabrication of EO / MO material enables high spatial resolution measurement in a minute area, so such a probe can be used for performance evaluation, fault diagnosis, or electrical design of high-density electronic circuits and components. It is expected to show power.
- Japanese Patent Application Laid-Open No. 2007-57324 is an example of an optical fiber type measurement system that optically detects electric field strength, magnetic field strength, and the like. This technique is intended to prevent the detection sensitivity from changing before and after the change in the ambient temperature and the magnitude of the stress in the polarization maintaining fiber.
- Electromagnetic field probes that use laser light have advantages such as broadband, minimally invasiveness, and high spatial resolution, but have the problem that their sensitivity is greatly affected by changes in the polarization state.
- a stress is applied to the fiber and bending or shaking occurs, the polarization state of light propagating in the fiber changes, and the signal level due to electric field detection or magnetic field detection varies greatly. There is a problem of doing.
- a probe according to the present invention includes a polarization control unit that affects a polarization state of incident laser light, and an electro-optic material on which laser light output from the polarization control unit is incident via an optical fiber, or An electric field / magnetic field sensor unit including the magneto-optical material, and an analysis unit that generates a detection value of the electric field or magnetic field of the electric field / magnetic field sensor unit based on the laser light output from the electro-optical material or the magneto-optical material.
- the electro-optic material or the magneto-optic material is fixed to the substrate.
- the optical fiber is fixed in the tube.
- the polarization control component is fixed in the housing.
- the electric field / magnetic field sensor unit made of the fiber and the EO / MO material is fixed on, for example, a quartz substrate, and a fiber other than the sensor unit is used. Is fixed in an acrylic tube, for example.
- a polarization adjustment component such as a polarization controller or an analyzer is incorporated in the housing so that the fiber connected to the component is not subjected to stress due to wind pressure or contact.
- FIG. 1 is a conceptual diagram of an electric field / magnetic field probe device using a conventional laser beam and an optical material.
- FIG. 2 is a conceptual diagram of the probe according to the first embodiment of the present invention.
- FIG. 3 is a conceptual diagram of the electric field / magnetic field sensor section in the probe of the first embodiment of the present invention.
- FIG. 4 is a conceptual diagram of a probe according to the second embodiment of the present invention.
- FIG. 5 is a conceptual diagram of an electric field / magnetic field sensor section in the probe of the second embodiment of the present invention.
- FIG. 6 is a conceptual diagram of a probe according to the third embodiment of the present invention.
- FIG. 1 is a conceptual diagram of an electric field / magnetic field probe device using a conventional laser beam and an optical material.
- the light emitted from the laser light source 1 passes through the core of the single mode fiber 2, is polarized by the polarization controller 3, passes through the optical circulator 4, and then travels to the EO / MO material 8. Since the refractive index of the EO / MO material changes in proportion to the external electric field / magnetic field, the light propagating in the material feels a change in the refractive index according to the external electric field / magnetic field and is subjected to polarization modulation. Thereafter, the light passes through the circulator and passes through the analyzer 5 to become intensity-modulated light.
- an electrical signal is detected by the RF spectrum analyzer 7.
- an electric signal proportional to the strength of the external electric field / magnetic field can be obtained.
- the polarization state changes, and the signal detected by the RF spectrum analyzer 7 varies depending on the degree of disturbance. There was a problem.
- FIG. 2 shows a first embodiment of the present invention, which is an embodiment for solving the above-mentioned problem.
- FIG. 3 is an enlarged view of the electric field / magnetic field sensor unit 12 in FIG.
- the EO / MO material 8 constituting the electric field / magnetic field sensor 12 and the single mode fiber 2 for guiding the light introduced thereto are attached and fixed.
- a portion of the single mode fiber 2 other than the end where the electric field / magnetic field sensor 12 is disposed is disposed inside the tube 11 and fixed to the tube 11.
- the substrate 14 is fixed to the tube 11 as follows. First, as a material of the tube 11, a material having a cylindrical cross section perpendicular to the longitudinal direction is prepared. This material has a predetermined thickness between the inner cylindrical surface facing the hollow interior where the single mode fiber 2 is disposed and the outer cylindrical surface. The diameter of the inner cylindrical surface is smaller than the width direction of the substrate. One end of such a material is cut out to form a semi-cylindrical shape. By cutting, a thick portion between the inner cylindrical surface and the outer cylindrical surface is exposed. The substrate 14 is fixed to the tube 11 by applying an adhesive to the thick portion and bringing the surface of the substrate 14 into close contact with the application surface. It is preferable that a part of the substrate 14 is inserted into the cylindrical surface inside the tube 11 because stability of the relative position between the substrate 14 and the tube 11 is improved.
- polarization adjustment components such as the polarization controller 3 and the analyzer 5 are incorporated in the housing 10.
- the polarization controller 3, the optical circulator 4, and the analyzer 5 are fixed to the casing.
- the housing 10 and the tube 11 are fixed so as not to move relative to each other.
- the tube 11 and the substrate 14 are also fixed so as not to move relative to each other.
- Laser light is introduced into the polarization controller 3 from one terminal 13 via an optical fiber.
- the output light of the polarization controller 3 is introduced into the single mode fiber 2 on the electric field / magnetic field sensor unit 12 side through the polarization maintaining fiber 9 and the optical circulator 4.
- the light introduced into the single mode fiber 2 passes through the EO / MO material 8 and is reflected by the electric field / magnetic field sensor unit 12.
- the reflected light is introduced into the single mode fiber 2.
- the reflected light of the single mode fiber 2 is introduced in the direction of the analyzer 5 by the optical circulator 4.
- the light that has passed through the analyzer 5 is output from the other terminal 13 toward the RF spectrum analyzer.
- the RF spectrum analyzer connected to the terminal 13 functions as an analysis unit that generates a signal indicating the detected value of the electric field or magnetic field of the electric field / magnetic field sensor unit 12.
- the housing 10, the tube 11, and the substrate 14 can suppress the stress that the fiber connected to each component receives due to wind pressure or contact.
- the optical path on the emission side is folded back 180 degrees with respect to the optical path on the incident side by the optical circulator 4.
- the polarization controller 3 that is the optical component on the incident side and the analyzer 5 that is the optical component on the output side with the electric field / magnetic field sensor 12 interposed therebetween are housed in the same casing. The stress property can be improved.
- FIG. 4 shows a second embodiment of the present invention.
- a probe capable of measuring three components of an electric field or a magnetic field that are orthogonal to each other. Fix on the substrate.
- the plurality of single mode fibers 2 other than the electric field / magnetic field sensor unit 12 are housed and fixed in the same tube 11. Further, polarization adjusting parts such as three types of polarization controllers and analyzers are incorporated in the same housing 10 so that the fiber connected to the parts is not subjected to stress due to wind pressure or contact.
- FIG. 5 is a conceptual diagram of the electric field / magnetic field sensor part in the probe of the second embodiment of the present invention.
- the three single mode fibers 2 and the EO / MO material 8 formed at the tip thereof are both bonded and fixed on the substrate 14.
- Three fibers with EO / MO materials formed at the tips are used to independently detect one of the three components of the electric field / magnetic field.
- optical components for making optical paths in the three EO / MO materials perpendicular to each other are fixed to the substrate 14.
- the first triangular prism 15 is disposed in the first fiber so that light enters the EO / MO material 8 in a direction perpendicular to the incident optical path.
- a second triangular prism 15 is arranged in the second fiber so that light is incident on the EO / MO material 8 in a direction perpendicular to the incident optical path and also perpendicular to the outgoing light of the first triangular prism.
- the third fiber is provided with a glass spacer 16 so that the optical path lengths of the prisms of the first and second fibers are equal.
- Laser light is introduced into the three sets of polarization controllers 3 from the plurality of input terminals 13.
- This laser light may be introduced from a plurality of laser light sources provided corresponding to each of the plurality of input terminals 13, or the laser light is selectively supplied to any of the plurality of input terminals 13. It may be introduced from a single laser light source attached via a changeover switch.
- the light is output from the plurality of input terminals 13 via the first triangular prism 15, the second triangular prism 15, and the glass spacer 16, introduced into an RF spectrum analyzer, and analyzed, thereby generating an electric field or magnetic field. It can be detected by being decomposed into three components. Since three sets of optical components for measuring three components are supported by the same housing 10, tube 11 and substrate 14, it is possible to suppress stress due to wind pressure, contact, etc. with a small number of additional components. is there.
- FIG. 6 shows a third embodiment of the present invention.
- a probe capable of measuring three components orthogonal to each other of an electric field or a magnetic field, and fixing an electric field / magnetic field sensor composed of three single mode fibers 2 and an EO / MO material formed on the tip thereof on a substrate, Fibers other than the electric field / magnetic field sensor unit 12 are housed in the tube 11 and fixed.
- polarization adjusting components such as three types of polarizers, polarization controllers, and analyzers are incorporated in the housing 10 so that fibers connected to the components are not subjected to stress due to wind pressure or contact.
- signal polarization due to disturbance applied to the fiber is always linearly polarized after passing through the polarizer regardless of the polarization state of the light incident on the polarizer. Can be further suppressed.
- the input side optical fiber in FIG. 4 is a polarization maintaining fiber 9
- the casing 10 and the tube 11 are made of resin such as acrylic
- the substrate 14 in FIG. 5 is made of quartz. Probe.
- the casing 10 and the tube 11 and the tube 11 and the substrate 14 are connected using, for example, an epoxy resin adhesive.
- a single crystal of a compound (BSO) made of bismuth, silicon, and oxygen is used as the EO material
- a single crystal of bismuth-substituted yttrium iron garnet (Bi-YIG) is used as the MO material.
- an immunity evaluation probe for an electronic circuit In order to know the malfunction mechanism of an electronic device, it is necessary to accurately detect the electric field / magnetic field distribution in the vicinity of the electronic circuit inside the device. By using the probe of the present invention, accurate three-component measurement of an electric field or magnetic field in the vicinity of an electronic circuit becomes possible, and knowledge for knowing the malfunctioning mechanism of the device can be obtained.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
Abstract
Description
Claims (3)
- 入射したレーザ光の偏光状態に影響を与える偏光制御部と、
前記偏光制御部から出力されたレーザ光が光ファイバを介して入射する電気光学材料又は磁気光学材料を備えた電界/磁界センサ部と、
前記電気光学材料又は磁気光学材料から出力されたレーザ光に基づいて、前記電界/磁界センサ部の電界又は磁界の検出値を生成する分析部とを具備し、
前記電気光学材料又は前記磁気光学材料は基板に固定され、
前記光ファイバはチューブ内に固定され、
前記偏光制御部品は筐体内に固定された
プローブ。 - 請求項1に記載のプローブであって、
前記基板は石英であり、
前記チューブ及び前記筐体は樹脂製である
プローブ。 - 請求項1又は2に記載のプローブであって、
前記偏光制御部は、同一の前記筐体に固定され、それぞれにレーザ光が入力する複数の偏光制御部品を備え、
前記電界/磁界センサ部は、前記複数の偏光制御部品にそれぞれ対応し、同一の前記チューブ内に固定された複数の光ファイバを介してレーザ光が入射する複数の電気光学材料又は磁気光学材料を備え、
前記複数の電気光学材料又は磁気光学材料には、電界又は磁界の互いに異なる成分を検出するために互いに異なる光学部品が単一の前記基板に取り付けられた
プローブ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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US13/380,485 US9182427B2 (en) | 2009-06-29 | 2010-06-23 | Probe for electric/magnetic field |
CN201080029283.2A CN102472785B (zh) | 2009-06-29 | 2010-06-23 | 电/磁场探头 |
JP2011520873A JP5590340B2 (ja) | 2009-06-29 | 2010-06-23 | 電界/磁界プローブ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-153787 | 2009-06-29 | ||
JP2009153787 | 2009-06-29 |
Publications (1)
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WO2011001872A1 true WO2011001872A1 (ja) | 2011-01-06 |
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PCT/JP2010/060657 WO2011001872A1 (ja) | 2009-06-29 | 2010-06-23 | 電界/磁界プローブ |
Country Status (4)
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US (1) | US9182427B2 (ja) |
JP (2) | JP5590340B2 (ja) |
CN (1) | CN102472785B (ja) |
WO (1) | WO2011001872A1 (ja) |
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CN106377813B (zh) * | 2012-09-04 | 2020-03-24 | 汾沃有限公司 | 用于血液处理系统的界面检测器 |
CN103105541B (zh) * | 2013-01-30 | 2015-03-25 | 中国电子科技集团公司第三十八研究所 | 一种用于检测电磁干扰辐射性能的近场探头及其使用方法 |
CN103995468B (zh) * | 2014-05-26 | 2017-01-11 | 天津大学 | 基于遗传算法的光纤扰动系统的偏振控制方法及其装置 |
CN104535942A (zh) * | 2015-01-15 | 2015-04-22 | 上海理工大学 | 金属衬底支撑的微纳光纤高灵敏的磁场探针及其方法 |
CN105911531B (zh) * | 2016-04-08 | 2018-04-03 | 中国电子科技集团公司第三十八研究所 | 一种用于相控阵天线现场校准的装置 |
CN106093599B (zh) * | 2016-06-21 | 2020-07-14 | 中国电子科技集团公司第三十八研究所 | 一种光学探头与电磁场测量设备及它们的测量方法 |
NL2020586B1 (en) * | 2018-03-14 | 2019-09-26 | Dare!! B V | Probe with antenna |
CN111413650B (zh) * | 2020-03-27 | 2021-06-22 | 北京交通大学 | 一种复合涂层测磁光纤及其制备方法 |
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2010
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- 2010-06-23 WO PCT/JP2010/060657 patent/WO2011001872A1/ja active Application Filing
- 2010-06-23 CN CN201080029283.2A patent/CN102472785B/zh active Active
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2012
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Also Published As
Publication number | Publication date |
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US9182427B2 (en) | 2015-11-10 |
CN102472785A (zh) | 2012-05-23 |
JP5621837B2 (ja) | 2014-11-12 |
JP2013054041A (ja) | 2013-03-21 |
US20120121217A1 (en) | 2012-05-17 |
JPWO2011001872A1 (ja) | 2012-12-13 |
CN102472785B (zh) | 2014-10-08 |
JP5590340B2 (ja) | 2014-09-17 |
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