WO2010140534A1 - Moteur linéaire - Google Patents

Moteur linéaire Download PDF

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Publication number
WO2010140534A1
WO2010140534A1 PCT/JP2010/059006 JP2010059006W WO2010140534A1 WO 2010140534 A1 WO2010140534 A1 WO 2010140534A1 JP 2010059006 W JP2010059006 W JP 2010059006W WO 2010140534 A1 WO2010140534 A1 WO 2010140534A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnets
magnet
along
armature
linear motor
Prior art date
Application number
PCT/JP2010/059006
Other languages
English (en)
Japanese (ja)
Inventor
一将 伊藤
美佐 中山
信一 山口
興起 仲
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2011518419A priority Critical patent/JP5398830B2/ja
Priority to DE112010002248T priority patent/DE112010002248T5/de
Priority to KR1020117026389A priority patent/KR101258790B1/ko
Priority to CN201080024264.0A priority patent/CN102804567B/zh
Publication of WO2010140534A1 publication Critical patent/WO2010140534A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2793—Rotors axially facing stators
    • H02K1/2795—Rotors axially facing stators the rotor consisting of two or more circumferentially positioned magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information

Definitions

  • the present invention relates to a linear motor including a field and an armature opposed to the field.
  • a field having a plate-shaped base and a plurality of magnets arranged on the base, an armature core provided opposite to the field, and opposed to the magnet, and a coil provided on the armature core And a linear motor including an armature that moves along the direction in which the magnets are arranged is known (see, for example, Patent Document 1).
  • the base has a plurality of mounting holes along the direction in which the magnets are arranged at both ends along a straight line that is perpendicular to the direction in which the magnets are arranged and is parallel to the facing surface of the armature core that faces the magnets. Is formed.
  • the field is attached to the support member through the fastening bolts through these attachment holes.
  • the dimension of the magnet along the straight line parallel to the facing surface of the armature core that is perpendicular to the direction in which the magnets are arranged and opposed to the magnet is larger than the dimension of the armature core along the straight line.
  • the dimension between the mounting holes along the straight line must be increased. As a result, there is a problem that the size of the base portion along the straight line is increased, and the linear motor is increased in size.
  • the present invention provides a linear motor capable of increasing the amount of magnetic flux from a magnet interlinked with an armature core and suppressing an increase in size.
  • the linear motor according to the present invention includes a base and a field having a plurality of magnets arranged on the base, an armature core facing the magnet, and a coil provided on the armature core, and the magnet
  • An armature that moves relative to the field along the direction in which the magnets are arranged, and when the magnet is viewed along the direction in which the magnets are arranged, When the entire region faces the magnet and is viewed along a direction perpendicular to the facing surface, a part of the plurality of magnets is along a straight line that intersects the direction in which the magnets are arranged.
  • the base has the magnet from the magnet Mounting holes are formed in a region in the opposite direction to the direction.
  • the linear motor of the present invention when viewed along the direction in which the magnets are arranged, the entire area of the facing surface of the armature core faces the magnet, and the facing surface of the armature core faces the magnet.
  • some of the plurality of magnets are displaced in one direction with respect to the armature core along a straight line intersecting the direction in which the magnets are arranged, and one end of the magnet is It protrudes from the child core, the rest is shifted in one direction opposite to the armature core, one end protrudes from the armature core, and the base is attached to the region in the direction opposite to the magnet shift direction Since the hole is formed, the dimension of the magnet along the straight line parallel to the facing surface of the armature core that is perpendicular to the direction in which the magnets are arranged and that faces the magnet is set to the size of the armature core along the straight line.
  • the magnetic flux from the magnet linked to the armature core It can be increased, further, it is possible to
  • FIG. 10 is a cross-sectional view taken along line XX in FIG. 9. It is a perspective view which shows a linear motor in case the opposing magnet of FIG. 9 has shifted
  • FIG. 12 is a cross-sectional view taken along line XII-XII in FIG. 11. It is a top view which shows the field of the linear motor which concerns on Embodiment 6 of this invention.
  • FIG. 1 is a plan view showing a linear motor according to this embodiment
  • FIG. 2 is a front view showing the linear motor of FIG.
  • the linear motor according to this embodiment includes a field 1 and an armature 2 facing the field 1.
  • the field 1 has a flat base 3 and a plurality of magnets 4 arranged on the base 3 at equal intervals along a straight line. All the magnets 4 are formed in the same rectangular parallelepiped shape.
  • the armature 2 has an armature core 5 facing the magnet 4 and a coil 6 provided on the armature core 5.
  • the armature 2 is supported by a guide device (not shown) that guides the armature 2 along the direction in which the magnets 4 are arranged while maintaining a predetermined gap length with the armature 2. Yes.
  • the armature core 5 is magnetized by energizing the coil 6. The armature 2 moves with respect to the field 1 along the direction in which the magnets 4 are arranged using the magnetic force generated between the armature core 5 and the magnet
  • the base 3 is made of iron.
  • the base 3 is not limited to iron but may be any material that can be magnetized by the surrounding magnetic field.
  • the magnets 4 are arranged so that adjacent poles are different from each other.
  • one direction along a straight line that is perpendicular to the direction in which the magnets 4 are arranged, that is, the moving direction of the armature 2 and is parallel to the facing surface 5 a of the armature core 5 facing the magnet 4 is A.
  • Each magnet 4 has a longitudinal direction along the A direction.
  • the dimension L2 along the A direction of each magnet 4 is larger than the dimension L1 of the armature core 5 along the A direction.
  • the adjacent magnets 4 are offset from the armature core 5 by the same amount in the opposite directions along the A direction.
  • shift amount of the adjacent magnet 4 does not need to be the same.
  • each magnet 4 Since each magnet 4 is displaced by the same amount with respect to the armature core 5, when viewed along a direction perpendicular to the facing surface 5a, one end portion 4a of each magnet 4 is away from the armature core 5 in the A direction. Projecting evenly along.
  • the one end 4a of each magnet 4 is not limited to the A direction, but along a straight line that intersects the direction in which the magnets 4 are arranged when viewed from a direction perpendicular to the facing surface 5a of the armature core 5. What is necessary is just to protrude from the armature core 5.
  • each magnet 4 and the end of the armature core 5 along the A direction are along the direction in which the magnets 4 are arranged when viewed along the direction perpendicular to the facing surface 5a. It is on the same straight line. Therefore, when viewed along the direction in which the magnets 4 are arranged, the entire region of the facing surface 5 a of the armature core 5 faces the magnet 4.
  • the other end 4b of each magnet 4 may protrude from the armature core 5 when viewed along a direction perpendicular to the facing surface 5a. However, in this case, the protruding amount of the other end 4b is made smaller than the protruding amount of the one end 4a.
  • a plurality of mounting holes 3 a through which fastening bolts (not shown) pass are formed in the base portion 3 so as to avoid the magnets 4.
  • the field 1 is attached to a support member (not shown) by a fastening bolt passed through the attachment hole 3a.
  • the mounting hole 3a is formed in the region of the base 3 in the direction opposite to the direction in which the magnet 4 is displaced from the magnet 4 when viewed along a direction perpendicular to the facing surface 5a.
  • a part of the mounting hole 3a has a base portion along the A direction rather than a straight line passing between the end portions 4a on the projecting side of each magnet 4 when viewed along a direction perpendicular to the facing surface 5a. 3 is inside.
  • FIG. 3 is a side view showing the main part of the linear motor when the dimension L2 of the magnet 4 and the dimension L1 of the armature core 5 are equal along the direction A
  • FIG. 4 is a side view showing the main part of the linear motor of FIG. FIG.
  • the magnetic flux from the region of the magnet 4 facing the end of the armature core 5 is linked to the armature core 5.
  • the amount of interlinkage magnetic flux increases.
  • the counter electromotive force generated in the coil 6 can be increased.
  • the maximum deflection D generated in the base portion 3 of the linear motor according to this embodiment will be described.
  • An attractive force acts between the field 1 and the armature 2 by a magnetic force. Therefore, the base 3 is bent toward the armature 2 at the intermediate portion along the A direction. Considering only the region where the field 1 and the armature 2 are opposed to each other, the attractive force acting between the field 1 and the armature 2 is substantially uniform across the mounting holes 3a along the A direction. Since the load is applied to the base 3, the maximum deflection D of the base 3 is calculated by the following equation (1).
  • I is determined by the cross-sectional shape of the base 3.
  • I is calculated by the following formula (2) using the thickness h and the width b of the base 3. .
  • I (1/12) ⁇ b ⁇ h3 (2)
  • the following equation (3) is obtained.
  • the maximum deflection D increases as L3 increases. It is conceivable that when the maximum deflection D increases, the field 1 and the armature 2 rub against each other and at least one of the field 1 and the armature 2 is damaged.
  • the thickness h of the base 3 must be increased in order to prevent the maximum deflection D from increasing. Therefore, in the conventional linear motor, the field 1 is enlarged, and the weight of the linear motor is increased. On the other hand, in the linear motor according to this embodiment, it is possible to suppress an increase in the dimension L3 between the mounting holes 3a along the A direction, so that the thickness h of the base portion 3 is reduced. However, it is possible to design the maximum deflection D substantially equal to that of the conventional linear motor.
  • a part of the plurality of magnets 4 with respect to the armature core 5 when viewed along the direction perpendicular to the facing surface 5a One end portion 4a protrudes from the armature core 5 by shifting in the A direction, and the other end portion 4a protrudes from the armature core 5 by shifting in the opposite direction to the A direction with respect to the armature core 5, Since the mounting hole 3a is formed in a region opposite to the direction in which the magnet 4 is displaced from the magnet 4, the dimension L2 of the magnet 4 along the A direction is set to the dimension L1 of the armature core 5 along the A direction.
  • each attachment hole 3 a can be disposed in the vicinity of each magnet 4 along the moving direction of the magnet 4.
  • the mounting holes 3a can be formed at equal intervals along the moving direction of the armature 2.
  • many attachment holes 3a can be formed.
  • the other end 4b of the magnet 4 and the end of the armature core 5 along the A direction are the same along the direction in which the magnets 4 are arranged. Since it is on a straight line, the dimension L3 between the mounting holes 3a along the A direction can be minimized.
  • the linear motor in which the dimension of the field 1 along the direction in which the magnets 4 are arranged is larger than the dimension of the armature 2 along the same direction has been described.
  • a linear motor may be used in which the size of the field 1 along the direction in which the magnets 4 are arranged is smaller than the size of the armature 2 along the same direction.
  • each mounting hole 3a is arranged in the vicinity of each magnet 4 along the moving direction of the magnet 4.
  • FIG. It may be decreased.
  • FIG. FIG. 6 is a plan view showing the linear motor according to this embodiment.
  • the field 1 includes a plurality of magnet groups 7 each composed of two magnets 4 arranged side by side.
  • the magnet group 7 When viewed along a direction perpendicular to the facing surface 5 a of the armature core 5, the magnet group 7 is displaced along the A direction with respect to the armature core 5. That is, when the magnets 4 of the magnet group 7 are displaced in the same direction and viewed along a direction perpendicular to the facing surface 5a of the armature core 5, one end portion 4a of each magnet 4 has the armature core 5 Protruding from.
  • the adjacent magnet groups 7 When viewed along the direction perpendicular to the facing surface 5a, the adjacent magnet groups 7 are shifted from the armature core 5 by the same amount in the opposite directions along the A direction. In addition, the deviation
  • the mounting hole 3a formed in the base portion 3 is formed in a region of the base portion 3 in a direction opposite to the direction in which the magnet group 7 is displaced from the magnet group 7 when viewed along a direction perpendicular to the facing surface 5a. Yes.
  • Other configurations are the same as those in the first embodiment.
  • the linear motor according to this embodiment since at least one of the magnets 4 whose deviation directions are the same is adjacent to each other, the field 1 and the armature The pulsation frequency of the force along the A direction acting on 2 can be changed. As a result, the natural frequency of the mechanical device using the linear motor can be avoided.
  • the magnet group 7 comprised from the two magnets 4 located in a line was demonstrated, the magnet group 7 comprised from the three or more magnets 4 located in a line may be sufficient.
  • FIG. 7 is a diagram showing an increase rate of the back electromotive force of the linear motor according to this embodiment.
  • the case where the dimension L1 of the armature core 5 along the A direction is equal to the dimension L2 of the magnet 4 along the A direction is calculated as 0%.
  • the broken line shown in FIG. 7 is a reference straight line for comparing the linearity of the graph showing the back electromotive force.
  • the protruding length (L 2 -L 1) that the one end portion 4 a of the magnet 4 protrudes from the armature core 5 is The gap length gap between the field 1 and the armature 2 is 5 times or less.
  • Other configurations are the same as those in the first embodiment. It may be the same as in the second embodiment.
  • the protrusion length (L 2 -L 1) that the one end 4 a of the magnet 4 protrudes from the armature core 5 is represented by the field 1 and the armature 2. It is particularly desirable that the gap length gap be between 3 and below.
  • FIG. FIG. 8 is a plan view showing the linear motor according to this embodiment.
  • the magnet 4 is inclined by a predetermined angle with respect to the A direction.
  • Other configurations are the same as those in the first embodiment. It may be the same as in the second embodiment or the third embodiment.
  • the cogging torque can be reduced.
  • FIG. FIG. 9 is a perspective view showing the linear motor according to this embodiment
  • FIG. 10 is a cross-sectional view taken along the line XX of FIG.
  • the linear motor according to this embodiment includes a pair of field magnets 1 facing each other and an armature 2 provided between the field magnets 1.
  • the armature 2 is opposed to each field 1.
  • Each field 1 has a flat base portion 3 and a plurality of magnets 4 arranged on the base portion 3, as in the first embodiment.
  • Each field 1 has the same direction in which magnets 4 are arranged.
  • one direction along a straight line that is perpendicular to the direction in which the magnets 4 are arranged and is parallel to the facing surface 5a of the armature core 5 facing the magnets 4 is defined as an A direction.
  • the magnets 4 in the opposing field 1 are opposed to each other. Further, when the magnets 4 in the opposed field 1 are displaced in the opposite directions along the A direction with respect to the armature core 5, when viewed along a direction perpendicular to the facing surface 5 a of the armature core 5. Further, one end 4 a of each magnet 4 protrudes from the armature core 5.
  • Each field 1 has a mounting hole 3a formed in the region of the base 3 in the direction opposite to the direction of displacement of the magnet 4 from the magnet 4 when viewed along the direction perpendicular to the facing surface 5a. Is the same as in the first embodiment. Other configurations may be the same as those in any of Embodiments 2 to 4.
  • the armature core 5 is attracted by the magnet 4. Since the center of the magnet 4 is shifted along the A direction with respect to the center of the armature core 5 when viewed along the direction perpendicular to the facing surface 5a, as shown in FIG.
  • the direction of the attractive force by the magnet 4 is inclined in the A direction from the direction perpendicular to the facing surface 5a.
  • the opposing magnets 4 are displaced in the opposite directions along the A direction, the component along the A direction of the attractive force with which each magnet 4 attracts the armature core 5 is canceled out.
  • the field 1 is provided in a pair so as to face each other, the armature 2 is provided between each field 1, and the magnet in each field 1 is provided. 4 are opposed to each other, and the magnets 4 opposed to each other are offset in opposite directions, so that the opposed magnets 4 cancel the components along the A direction of the attractive force that attracts the armature core 5. Can do.
  • FIG. 13 is a plan view showing the field 1 of the linear motor according to this embodiment.
  • the linear motor according to this embodiment further includes a cover 8 in which the field 1 covers the magnet 4 together with the base 3. Thereby, it can suppress that a foreign material is pinched
  • a cover 8 in which the field 1 covers the magnet 4 together with the base 3.
  • the cover 8 is formed with a through hole 8 a communicating with the mounting hole 3 a of the base 3.
  • a fastening bolt (not shown) is passed through the through hole 8a and the attachment hole 3a, and the field 1 is attached to a support member (not shown).
  • the cover 8 is made of aluminum which is a nonmagnetic material.
  • the cover 8 is not limited to aluminum, and may be made of austenitic stainless steel or plastic. Thereby, it can prevent that the magnet 4 and a fastening bolt contact. Further, it is possible to prevent the fastening bolt and the cover 8 from sucking each other. Further, the magnetic flux from the magnet 4 can pass through the cover 8 and be linked to the armature core 5.
  • the cover 8 is preferably made of plastic. The plastic can easily form the through hole 8a as compared with iron or the like.
  • the fastening bolt is a magnet. Even if it attracts

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Abstract

L'invention porte sur un moteur linéaire dans lequel il est possible d'éviter un agrandissement de la dimension d'une section de base d'aimants, même lorsque la dimension des aimants, suivant une ligne droite qui est perpendiculaire à la direction dans laquelle les aimants sont alignés et qui est parallèle à une face opposée d'un noyau d'induit faisant face aux aimants, est rendue plus grande que la dimension du noyau d'induit le long de cette ligne droite. Le moteur linéaire comprend : un système d'excitation (1) qui comprend la section de base (3) et de multiples aimants (4) alignés sur cette section de base (3) ; et un induit (2) qui comprend le noyau d'induit (5) qui fait face aux aimants (4), et qui se déplace dans la direction dans laquelle les aimants (4) sont alignés. La superficie entière de la face opposée du noyau d'induit (5) fait face aux aimants (4), en vue dans la direction dans laquelle les aimants (4) sont alignés ; et chacun des aimants (4) adjacent l'un à l'autre ont leurs centres qui s'écartent du centre du noyau d'induit (5) dans des sens mutuellement différents ; et des trous de montage (3a) sont formés sur les sections de base (3) au niveau de zones se trouvant dans des sens opposés au sens d'écartement des aimants (4), en vue dans une direction perpendiculaire à la face opposée (5a).
PCT/JP2010/059006 2009-06-04 2010-05-27 Moteur linéaire WO2010140534A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011518419A JP5398830B2 (ja) 2009-06-04 2010-05-27 リニアモータ
DE112010002248T DE112010002248T5 (de) 2009-06-04 2010-05-27 Linearmotor
KR1020117026389A KR101258790B1 (ko) 2009-06-04 2010-05-27 리니어 모터
CN201080024264.0A CN102804567B (zh) 2009-06-04 2010-05-27 直线电动机

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009135370 2009-06-04
JP2009-135370 2009-06-04

Publications (1)

Publication Number Publication Date
WO2010140534A1 true WO2010140534A1 (fr) 2010-12-09

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ID=43297670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/059006 WO2010140534A1 (fr) 2009-06-04 2010-05-27 Moteur linéaire

Country Status (6)

Country Link
JP (1) JP5398830B2 (fr)
KR (1) KR101258790B1 (fr)
CN (1) CN102804567B (fr)
DE (1) DE112010002248T5 (fr)
TW (1) TWI441423B (fr)
WO (1) WO2010140534A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7449085B2 (ja) 2019-12-20 2024-03-13 キヤノン株式会社 リニアモータ、ステージ装置、リソグラフィ装置及び物品の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103780043B (zh) * 2013-11-22 2016-05-11 杭州娃哈哈科技有限公司 一种降低齿槽力的直线电机
WO2019065002A1 (fr) * 2017-09-26 2019-04-04 三菱電機株式会社 Moteur et son procédé de fabrication
KR102416447B1 (ko) * 2020-08-07 2022-07-05 현대무벡스 주식회사 이송 대차용 코어리스 리니어 모터

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Publication number Priority date Publication date Assignee Title
JP2000209839A (ja) * 1999-01-13 2000-07-28 Yaskawa Electric Corp 可動巻線型リニアモ―タ
JP2001262936A (ja) * 2000-03-17 2001-09-26 Matsushita Electric Works Ltd 自動ドア
JP2002119041A (ja) * 2000-10-10 2002-04-19 Matsushita Electric Ind Co Ltd リニアアクチュエータ
JP2009072030A (ja) * 2007-09-14 2009-04-02 Thk Co Ltd リニアモータ及びリニアモータの取り付け方法

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Publication number Priority date Publication date Assignee Title
DE19547686A1 (de) 1995-12-20 1997-06-26 Indramat Gmbh Elektrischer Synchron-Linearmotor und Verfahren zur Ermittlung des Kommutierungsoffsets eines Linearantriebs mit einem solchen elektrischen Synchron-Linearmotor
JP5113436B2 (ja) * 2007-06-18 2013-01-09 三菱電機株式会社 リニアモータ駆動の軸送り装置
CN100581031C (zh) * 2008-05-05 2010-01-13 哈尔滨工业大学 横向磁通永磁直线电机

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000209839A (ja) * 1999-01-13 2000-07-28 Yaskawa Electric Corp 可動巻線型リニアモ―タ
JP2001262936A (ja) * 2000-03-17 2001-09-26 Matsushita Electric Works Ltd 自動ドア
JP2002119041A (ja) * 2000-10-10 2002-04-19 Matsushita Electric Ind Co Ltd リニアアクチュエータ
JP2009072030A (ja) * 2007-09-14 2009-04-02 Thk Co Ltd リニアモータ及びリニアモータの取り付け方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7449085B2 (ja) 2019-12-20 2024-03-13 キヤノン株式会社 リニアモータ、ステージ装置、リソグラフィ装置及び物品の製造方法

Also Published As

Publication number Publication date
DE112010002248T5 (de) 2013-01-03
JPWO2010140534A1 (ja) 2012-11-15
CN102804567A (zh) 2012-11-28
KR101258790B1 (ko) 2013-04-29
KR20120009483A (ko) 2012-01-31
TWI441423B (zh) 2014-06-11
CN102804567B (zh) 2015-11-25
JP5398830B2 (ja) 2014-01-29
TW201108568A (en) 2011-03-01

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