WO2010058441A1 - Équipement de test, procédé de test et programme - Google Patents
Équipement de test, procédé de test et programme Download PDFInfo
- Publication number
- WO2010058441A1 WO2010058441A1 PCT/JP2008/003395 JP2008003395W WO2010058441A1 WO 2010058441 A1 WO2010058441 A1 WO 2010058441A1 JP 2008003395 W JP2008003395 W JP 2008003395W WO 2010058441 A1 WO2010058441 A1 WO 2010058441A1
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- WO
- WIPO (PCT)
- Prior art keywords
- phase
- test
- predetermined
- under test
- relative phase
- Prior art date
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- 238000005070 sampling Methods 0.000 claims abstract description 22
- 239000004065 semiconductors Substances 0.000 description 69
- 238000004458 analytical methods Methods 0.000 description 15
- 238000000034 methods Methods 0.000 description 15
- 230000004044 response Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 101710035323 CLK1 Proteins 0.000 description 3
- 102100018256 Dual specificity protein kinase CLK1 Human genes 0.000 description 3
- 101710005140 RCK2 Proteins 0.000 description 3
- 101710037208 STB1 Proteins 0.000 description 3
- 101710026268 VANGL2 Proteins 0.000 description 3
- 102100015008 Vang-like protein 2 Human genes 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 3
- 230000000630 rising Effects 0.000 description 3
- KLSJWNVTNUYHDU-UHFFFAOYSA-N 4H-1,2,4-triazol-3-amine Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 2
- 101710037203 STB2 Proteins 0.000 description 2
- 101710026269 VANGL1 Proteins 0.000 description 2
- 102100015007 Vang-like protein 1 Human genes 0.000 description 2
- 230000003111 delayed Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001360 synchronised Effects 0.000 description 2
- 281000187030 Computer 2000 companies 0.000 description 1
- 280000233134 Hardware Resources companies 0.000 description 1
- 230000001276 controlling effects Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000001419 dependent Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reactions Methods 0.000 description 1
- 230000003287 optical Effects 0.000 description 1
- 230000002093 peripheral Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuit
- G01R31/3193—Tester hardware, i.e. output processing circuit with comparison between actual response and known fault free response
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
- G11C29/50012—Marginal testing, e.g. race, voltage or current testing of timing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C29/56012—Timing aspects, clock generation, synchronisation
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2008/003395 WO2010058441A1 (fr) | 2008-11-19 | 2008-11-19 | Équipement de test, procédé de test et programme |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020117008127A KR101221080B1 (ko) | 2008-11-19 | 2008-11-19 | 시험 장치, 시험 방법, 및 프로그램 |
JP2010539052A JPWO2010058441A1 (ja) | 2008-11-19 | 2008-11-19 | 試験装置、試験方法、および、プログラム |
PCT/JP2008/003395 WO2010058441A1 (fr) | 2008-11-19 | 2008-11-19 | Équipement de test, procédé de test et programme |
TW98138993A TW201028707A (en) | 2008-11-19 | 2009-11-17 | Test device, test method and recording medium |
US13/084,561 US20120123726A1 (en) | 2008-11-19 | 2011-04-12 | Test apparatus, test method, and storage medium |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/084,561 Continuation US20120123726A1 (en) | 2008-11-19 | 2011-04-12 | Test apparatus, test method, and storage medium |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010058441A1 true WO2010058441A1 (fr) | 2010-05-27 |
Family
ID=42197888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/003395 WO2010058441A1 (fr) | 2008-11-19 | 2008-11-19 | Équipement de test, procédé de test et programme |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120123726A1 (fr) |
JP (1) | JPWO2010058441A1 (fr) |
KR (1) | KR101221080B1 (fr) |
TW (1) | TW201028707A (fr) |
WO (1) | WO2010058441A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8625222B2 (en) * | 2012-02-03 | 2014-01-07 | Lsi Corporation | Storage device having calibration circuitry providing programmable phase update values |
KR102059467B1 (ko) | 2013-06-28 | 2019-12-27 | 에스케이하이닉스 주식회사 | 반도체 장치 및 이를 포함하는 반도체 시스템 |
KR20160075105A (ko) * | 2014-12-19 | 2016-06-29 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그의 구동방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000147062A (ja) * | 1998-11-10 | 2000-05-26 | Matsushita Electric Ind Co Ltd | 半導体検査装置および半導体検査方法 |
JP2002181899A (ja) * | 2000-12-15 | 2002-06-26 | Advantest Corp | タイミング校正方法 |
JP2004125574A (ja) * | 2002-10-01 | 2004-04-22 | Advantest Corp | 試験装置、及び試験方法 |
JP2005025294A (ja) * | 2003-06-30 | 2005-01-27 | Fujitsu Ltd | 複数システムにおける入出力要求優先制御装置 |
JP2005293808A (ja) * | 2004-04-05 | 2005-10-20 | Advantest Corp | 試験装置、位相調整方法、及びメモリコントローラ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI238256B (en) * | 2000-01-18 | 2005-08-21 | Advantest Corp | Testing method for semiconductor device and its equipment |
WO2005012930A1 (fr) * | 2003-07-31 | 2005-02-10 | Advantest Corporation | Dispositif de test |
KR101090573B1 (ko) * | 2003-07-31 | 2011-12-08 | 주식회사 아도반테스토 | 클록 환승 장치 및 시험 장치 |
US7421355B2 (en) * | 2006-02-27 | 2008-09-02 | Advantest Corporation | Measuring apparatus, measuring method, testing apparatus, testing method, and electronic device |
US7856330B2 (en) * | 2006-02-27 | 2010-12-21 | Advantest Corporation | Measuring apparatus, testing apparatus, and electronic device |
JP4707608B2 (ja) * | 2006-05-19 | 2011-06-22 | 株式会社アドバンテスト | 測定回路及び試験装置 |
DE112007003570T5 (de) * | 2007-06-27 | 2010-08-26 | Advantest Corp. | Erfassungsgerät und Prüfgerät |
-
2008
- 2008-11-19 JP JP2010539052A patent/JPWO2010058441A1/ja active Granted
- 2008-11-19 WO PCT/JP2008/003395 patent/WO2010058441A1/fr active Application Filing
- 2008-11-19 KR KR1020117008127A patent/KR101221080B1/ko not_active IP Right Cessation
-
2009
- 2009-11-17 TW TW98138993A patent/TW201028707A/zh unknown
-
2011
- 2011-04-12 US US13/084,561 patent/US20120123726A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000147062A (ja) * | 1998-11-10 | 2000-05-26 | Matsushita Electric Ind Co Ltd | 半導体検査装置および半導体検査方法 |
JP2002181899A (ja) * | 2000-12-15 | 2002-06-26 | Advantest Corp | タイミング校正方法 |
JP2004125574A (ja) * | 2002-10-01 | 2004-04-22 | Advantest Corp | 試験装置、及び試験方法 |
JP2005025294A (ja) * | 2003-06-30 | 2005-01-27 | Fujitsu Ltd | 複数システムにおける入出力要求優先制御装置 |
JP2005293808A (ja) * | 2004-04-05 | 2005-10-20 | Advantest Corp | 試験装置、位相調整方法、及びメモリコントローラ |
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KR101221080B1 (ko) | 2013-01-11 |
KR20110059758A (ko) | 2011-06-03 |
US20120123726A1 (en) | 2012-05-17 |
TW201028707A (en) | 2010-08-01 |
JPWO2010058441A1 (ja) | 2012-04-12 |
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