WO2010003707A1 - Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb - Google Patents
Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb Download PDFInfo
- Publication number
- WO2010003707A1 WO2010003707A1 PCT/EP2009/054320 EP2009054320W WO2010003707A1 WO 2010003707 A1 WO2010003707 A1 WO 2010003707A1 EP 2009054320 W EP2009054320 W EP 2009054320W WO 2010003707 A1 WO2010003707 A1 WO 2010003707A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid
- pump
- chamber
- inlet
- high vacuum
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
- F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
Definitions
- the present invention relates to a pump in the manner of a water jet pump for generating a high vacuum, in particular an ultra-high vacuum, with one of a fluid in a flow direction (s) can be flowed through chamber.
- the chamber includes
- At least one first inlet for the fluid which projects into the chamber and ends in a nozzle opening
- the present invention further relates to a method of operating such a pump.
- cryopumps To generate an ultrahigh vacuum turbomolecular pumps, cryopumps, sorption pumps, gate valves, displacement and jet pumps are used.
- jet pumps water jet pumps or pumps based on oils are used as liquid. With the help of these pumps only pressures of the vacuum can be achieved, which are in the range of the vapor pressure of the liquid used.
- known water jet and oil pumps can only be used as backing pumps for generating an advance vacuum, and must be able to be produced, in particular, by ultrahigh vacuums by means of downstream pumps, such as, for example, pumps.
- Turbomolecular pumps are supplemented.
- the pump systems constructed in this way are complex, expensive and expensive to maintain.
- the object of the invention is to provide a pump of simple construction, with which vacuums are to be produced up to the ultra-high vacuum range.
- it is the task of a pump with as few parts, especially with little or specify no moving parts in order to operate wear-free and cost-effective pump and to be able to produce the best possible ultra-high vacuum with simple means.
- a simple method for operating such a pump should be specified.
- the pump according to the invention for generating a high vacuum should be designed in the manner of a water jet pump or be of a corresponding type.
- it comprises at least one chamber through which a fluid can flow in a flow direction.
- This chamber has at least one first inlet for the fluid, which projects into the chamber and ends in a nozzle opening.
- the chamber has at least one outlet for the fluid, which, viewed in the flow direction, is arranged opposite the nozzle opening.
- the chamber has at least one second inlet, which opens into the chamber and is to be connected to a space to be evacuated.
- an ionic fluid should be provided as fluid for such a pump.
- means for conveying the ionic fluid at a predetermined speed and / or a predetermined pressure in the first inlet, which preferably comprise at least one feed pump.
- the pump can preferably be connected to or integrated in a closed fluid circuit, which comprises the delivery pump for generating a fluid pressure in the at least one first fluid inlet and which comprises a reservoir with a check valve for discharging gases, which is connected to the at least one fluid outlet and the feed pump.
- the ionic fluid to be provided for the pump may be a liquid and / or a liquid-gas mixture.
- a fluid and a corresponding gas can be used.
- the pressure in the space to be evacuated is adjustable depending on the ionic liquid used, in particular on the vapor pressure of the ionic liquid.
- the ionic fluid used is preferably a fluid which contains sulfate, hydrogensulfate, alkylsulfate, thiocyanate, phosphate, borate, tetrakishydrogen sulfate borate or silicate ions.
- the at least one second inlet is connected to an ultra-high vacuum chamber, for a gas exchange or gas removal between the ultra-high vacuum chamber and the at least one inlet.
- gas exchange an ultra-high vacuum in the ultra-high vacuum chamber can be generated, which is in the pressure range of 10 ⁇ 7 to 10 ⁇ 12 mbar.
- the pressure in the ultra-high vacuum chamber is dependent on the ionic liquid used, in particular on the vapor pressure of the ionic liquid.
- the at least one first fluid inlet and / or the at least one a second inlet and / or the at least one fluid outlet formed in the form of at least one tube.
- the method according to the invention for operating the pump comprises the steps:
- the so-called venturi effect is utilized by means of a corresponding design of the pump. This allows high flow velocities of the fluid in the chamber and thus particularly high negative pressures to be achieved at the second inlet, which can lead to corresponding high vacuums up to the area of the ultrahigh vacuums in a connected space to be evacuated.
- the invention is generally based on the idea that by the use of ionic fluids such as liquids in the specially designed jet pumps by the low vapor pressure of such fluids simple, reliable, low-wear and thus cheap a good ultra-high vacuum can be produced without the need of a variety of pump systems ,
- FIG. 1 is a highly schematic representation of a structure for producing an ultrahigh vacuum with a jet pump designed according to the invention.
- FIG. 2 shows a section from the chamber of the pump.
- FIG. 1 the construction of a system 1 for generating in particular an ultra-high vacuum HV is indicated.
- the system 1 comprises a pump 2 with a first fluid inlet 3 and a second inlet 4 and a fluid outlet 5.
- the pump 2 is integrated in a closed fluid circuit 9, which uses an ionic liquid as the fluid F.
- the pump works in the manner of a water jet pump, but its working fluid is not water, but an ionic liquid or a corresponding liquid-gas mixture.
- the flow direction of the fluid F is denoted by s. Concerning. the flow direction of the pump 2 is preceded by a feed pump 6, which generates a high fluid pressure in at least one tubular portion 9a of the fluid circuit 9 in front of the pump 2. Fluid F having a high flow rate and / or a high internal fluid pressure is thus pumped from the feed pump 6 to the pump 2 via the portion 9a of a piping system. There it occurs
- Fluid F via the first fluid inlet 3 in a chamber 11 of the pump 2 a.
- the inlet protrudes piece by piece into the chamber and is designed there as a nozzle with a nozzle opening 3a (see FIG.
- the fluid is greatly accelerated.
- the acceleration follows according to the so-called Venturi effect due to a corresponding design of the nozzle.
- the fluid flow rate is increased, for example, ten to a hundredfold or thousandfold. Fluid flow velocities up to the speed of sound are possible.
- the flow rate is dependent on the fluid pressure directly in front of the nozzle and the nozzle diameter in relation to the pipe diameter of the first fluid inlet 3.
- the fluid jet which at a high speed off the nozzle at the opening 3a exits, takes up parts of the gas in the chamber 11, for example, by collisions with the gas molecules and turbulence by friction in the gas in the chamber.
- the entrained with the fluid flow gas molecules occur on the nozzle opening 3a opposite the fluid outlet 5 from the chamber 11 with the fluid F together.
- the leaked from the chamber 11 via the fluid outlet 5 fluid F is directed into a storage tank 7.
- the fluid F is collected and entrained gas molecules can escape from the fluid and discharged through a check valve 8 to the environment or into another collecting container.
- the collected fluid from the reservoir 7 can then be supplied with the aid of another pipe system section 9c of the feed pump 6, which results in a closed fluid circuit 9 in the pipe system.
- the gas molecules entrained with the fluid F lead to a negative pressure at a second inlet 4 of the chamber 11 of the pump 2.
- a high-vacuum chamber 10 is via a pipeline system 12, eg a stainless steel pipeline , connected to the second inlet 4 of the pump chamber 11. Between the high-vacuum chamber 10 and the pump chamber 11 can thus take place a gas exchange or - transport.
- the negative pressure generated in the pump chamber 11 leads to a gas flow, which allows gas to flow from a higher gas pressure in the high vacuum chamber 10 to a lower gas pressure in the pump chamber 11.
- a gas pressure can be generated in the high-vacuum chamber 10 or a vacuum with a pressure which at least approximately corresponds to the vapor pressure of the fluid F used.
- high-vacuum gas pressures can be achieved, ie a high vacuum in a high-vacuum chamber 10 which extends into the ultra-high vacuum range of 10 -7 to 10 -12 mbar.
- Suitable ionic fluids for the pump according to the invention are known, for example, from "Angewandte Chemie", 2000, Vol. 112, pages 3926 to 3945. Accordingly, liquids are generally considered to be liquids of this kind which are used at low temperatures, in particular at temperatures below 100 ° C.
- a particularly advantageous property of such ionic liquids for use in the pump according to the invention is that they have a virtually non-measurable vapor pressure (at the customary application temperatures) and can thus be used in rooms to be evacuated When the pump is in operation, virtually no liquid evaporates, so that the aspirated gas is easily separated from the liquid.
- fluids F liquid or in a two-phase liquid-gas mixture
- fluids F which contain at least the major proportion (ie more than 50% by volume) of sulfate, hydrogensulfate, alkylsulfate, thiocyanate, phosphate, borate -, Tetrakishydrogensulfatoborat- or silicate ions.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011517045A JP2011527397A (ja) | 2008-07-11 | 2009-04-09 | ウォータジェット型のポンプならびにその運転方法 |
EP09779283A EP2307739A1 (de) | 2008-07-11 | 2009-04-09 | Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb |
US12/737,407 US20110110796A1 (en) | 2008-07-11 | 2009-04-09 | Water jet type pump and method for operation thereof |
CN2009801268753A CN102089527A (zh) | 2008-07-11 | 2009-04-09 | 喷水泵型的泵及其运行方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008032825.1 | 2008-07-11 | ||
DE102008032825A DE102008032825B3 (de) | 2008-07-11 | 2008-07-11 | Strahlpumpe sowie Verfahren zu deren Betrieb |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010003707A1 true WO2010003707A1 (de) | 2010-01-14 |
Family
ID=40765493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/054320 WO2010003707A1 (de) | 2008-07-11 | 2009-04-09 | Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb |
Country Status (7)
Country | Link |
---|---|
US (1) | US20110110796A1 (de) |
EP (1) | EP2307739A1 (de) |
JP (1) | JP2011527397A (de) |
CN (1) | CN102089527A (de) |
DE (1) | DE102008032825B3 (de) |
RU (1) | RU2463487C1 (de) |
WO (1) | WO2010003707A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021107660A1 (de) | 2021-03-26 | 2022-09-29 | Robert Staudacher | Hydrozyklon-Entgasungsvorrichtung |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011077079A1 (de) * | 2011-06-07 | 2012-12-13 | Siemens Aktiengesellschaft | Kühlung durch Dampfstrahlerzeugung |
DE102012220559A1 (de) * | 2012-11-12 | 2014-05-15 | Siemens Aktiengesellschaft | Kühlung für elektrische Generatoren |
US20150167697A1 (en) * | 2013-12-18 | 2015-06-18 | General Electric Company | Annular flow jet pump for solid liquid gas media |
NL2024887B1 (en) * | 2020-02-12 | 2021-09-15 | Vcu Tcd B V | Apparatus suitable for automatically picking and placing a flexible object |
CN113339492A (zh) * | 2021-07-07 | 2021-09-03 | 银川威力传动技术股份有限公司 | 电子喷射泵系统及应用其的新能源汽车减速器冷却润滑液压系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB925950A (en) * | 1961-02-15 | 1963-05-15 | Hick Hargreaves & Company Ltd | Improvements in and relating to vacuum producing equipment |
JPS58160599A (ja) * | 1982-03-17 | 1983-09-24 | Takuo Mochizuki | 減圧装置 |
JPS5932700A (ja) * | 1982-08-19 | 1984-02-22 | Nitsukuu Kogyo Kk | 液体噴射ポンプ |
WO2006029884A1 (de) * | 2004-09-17 | 2006-03-23 | Basf Aktiengesellschaft | Verfahren zum betrieb eines flüssigringverdichters |
DE102004046316A1 (de) * | 2004-09-24 | 2006-03-30 | Linde Ag | Verfahren und Vorrichtung zum Verdichten eines gasförmigen Mediums |
WO2006120145A1 (de) * | 2005-05-06 | 2006-11-16 | Linde Ag | Flüssigkeit zur verdichtung eines gasförmigen mediums und verwendung derselben |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4100765A (en) * | 1974-04-16 | 1978-07-18 | Kantor Frederick W | Rotary thermodynamic apparatus |
US4880357A (en) * | 1988-06-27 | 1989-11-14 | Mathers Terrence L | Method and apparatus for producing high vacuum |
FR2769054B1 (fr) * | 1997-10-01 | 2001-12-07 | Marwal Systems | Pompe a jet comprenant un gicleur de section variable |
DE10027995A1 (de) * | 2000-06-09 | 2001-12-13 | Merck Patent Gmbh | Ionische Flüssigkeiten II |
DE10238637A1 (de) * | 2002-08-19 | 2004-03-11 | Philipps-Universität Marburg | Verfahren und Vorrichtung zur Herstellung hoch kernspinpolarisierter Flüssigkeiten |
US6767192B2 (en) * | 2002-11-07 | 2004-07-27 | Varian, Inc. | Vapor jet pump with ejector stage in foreline |
US7638058B2 (en) * | 2005-04-07 | 2009-12-29 | Matheson Tri-Gas | Fluid storage and purification method and system |
DE102005026916A1 (de) * | 2005-06-10 | 2006-12-14 | Linde Ag | Verdichter und Verfahren zum Schmieren und/oder Kühlen eines Verdichters |
CN102023270A (zh) * | 2010-11-22 | 2011-04-20 | 李颖 | 电网参数智能传感器 |
-
2008
- 2008-07-11 DE DE102008032825A patent/DE102008032825B3/de not_active Expired - Fee Related
-
2009
- 2009-04-09 US US12/737,407 patent/US20110110796A1/en not_active Abandoned
- 2009-04-09 EP EP09779283A patent/EP2307739A1/de not_active Withdrawn
- 2009-04-09 RU RU2011105023/06A patent/RU2463487C1/ru not_active IP Right Cessation
- 2009-04-09 CN CN2009801268753A patent/CN102089527A/zh active Pending
- 2009-04-09 JP JP2011517045A patent/JP2011527397A/ja active Pending
- 2009-04-09 WO PCT/EP2009/054320 patent/WO2010003707A1/de active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB925950A (en) * | 1961-02-15 | 1963-05-15 | Hick Hargreaves & Company Ltd | Improvements in and relating to vacuum producing equipment |
JPS58160599A (ja) * | 1982-03-17 | 1983-09-24 | Takuo Mochizuki | 減圧装置 |
JPS5932700A (ja) * | 1982-08-19 | 1984-02-22 | Nitsukuu Kogyo Kk | 液体噴射ポンプ |
WO2006029884A1 (de) * | 2004-09-17 | 2006-03-23 | Basf Aktiengesellschaft | Verfahren zum betrieb eines flüssigringverdichters |
DE102004046316A1 (de) * | 2004-09-24 | 2006-03-30 | Linde Ag | Verfahren und Vorrichtung zum Verdichten eines gasförmigen Mediums |
WO2006120145A1 (de) * | 2005-05-06 | 2006-11-16 | Linde Ag | Flüssigkeit zur verdichtung eines gasförmigen mediums und verwendung derselben |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021107660A1 (de) | 2021-03-26 | 2022-09-29 | Robert Staudacher | Hydrozyklon-Entgasungsvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
EP2307739A1 (de) | 2011-04-13 |
JP2011527397A (ja) | 2011-10-27 |
RU2463487C1 (ru) | 2012-10-10 |
US20110110796A1 (en) | 2011-05-12 |
RU2011105023A (ru) | 2012-08-20 |
DE102008032825B3 (de) | 2010-01-14 |
CN102089527A (zh) | 2011-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2010003707A1 (de) | Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb | |
EP3374047B1 (de) | Entgasungsvorrichtung | |
WO2019105661A1 (de) | Gas-flüssigkeitsabscheider zum abscheiden von zumindest einem flüssigen bestandteil von einem gasförmigen bestandteil | |
WO2004056442A1 (de) | Verfahren und vorrichtung zur erzeugung einer reinflüssigkeit aus einer rohflüssigkeit | |
DE102017221302A1 (de) | Gas-Flüssigkeitsabscheider zum Abscheiden von zumindest einem flüssigen Bestandteil von einem gasförmigen Bestandteil | |
WO2014056724A1 (de) | Kolben-membranpumpe | |
DE102011108372A1 (de) | Schalldämpfung in einem Kältemittelkreislauf | |
WO2007006289A1 (de) | Verfahren zum abführen eines gases aus einer wärmepumpe und wärmepumpe | |
DE4222340A1 (de) | Wärmerohr | |
DE102012102088A1 (de) | Verdrängerpumpe mit Zwangsentlüftung | |
EP3341101B1 (de) | Einrichtung zur entgasung einer flüssigkeit | |
DE102005058617B4 (de) | Kraftstoffbehälter für ein Kfz | |
DE19882900B4 (de) | Schraubenrotor-Nassvakuumpumpe | |
DE102021119582A1 (de) | Rückstromsperre, Orbiterexzenterpumpe aufweisend die Rückstromsperre und Kraftfahrzeug aufweisend die Orbiterexzenterpumpe | |
EP3643396B1 (de) | Kontinuierlich arbeitende und fluidatmende fluidmischeinrichtung und verfahren zum betrieb einer solchen | |
WO2020104420A1 (de) | Vorrichtung zur entgasung von flüssigkeiten | |
DE102018208314A1 (de) | Ansaugkammer für eine Betriebsmittelpumpe, Betriebsmittelpumpe sowie Betriebsmittelbehälter | |
DE202012002883U1 (de) | Vakuum-Drehschieberpumpe | |
DE102011088363A1 (de) | Vorrichtung zum Einstellen eines Fluidfüllstandes in einem Gehäusebereich | |
WO2006061317A1 (de) | Vakuum-anlage mit einer schraubenpumpe mit zwischeneinlass | |
DE102016213295A1 (de) | Wärmepumpe mit einer Füllstands-regulierenden Drossel und Verfahren zum Herstellen einer Wärmepumpe | |
DE102017212813A1 (de) | Abwärmerückgewinnungssystem | |
DE102016113057A1 (de) | Vorrichtung zum Verdichten eines gasförmigen Fluids mit einer Anordnung zum Separieren eines Steuermassenstroms sowie Verfahren zum Separieren des Steuermassenstroms | |
DE102016201397A1 (de) | Wärmetauschereinrichtung für eine Kälteanlage | |
DE102015220321A1 (de) | Pumpengehäuse mit Bewehrung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980126875.3 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09779283 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2009779283 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 2011517045 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12737407 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011105023 Country of ref document: RU |