US20110110796A1 - Water jet type pump and method for operation thereof - Google Patents

Water jet type pump and method for operation thereof Download PDF

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Publication number
US20110110796A1
US20110110796A1 US12/737,407 US73740709A US2011110796A1 US 20110110796 A1 US20110110796 A1 US 20110110796A1 US 73740709 A US73740709 A US 73740709A US 2011110796 A1 US2011110796 A1 US 2011110796A1
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United States
Prior art keywords
pump
feed
fluid
chamber
ions
Prior art date
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Abandoned
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US12/737,407
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English (en)
Inventor
Vladimir Danov
Bernd Gromoll
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Siemens AG
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Siemens AG
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Filing date
Publication date
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Assigned to SIEMENS AKTIENGESELLSCHAFT reassignment SIEMENS AKTIENGESELLSCHAFT ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DANOV, VLADIMIR, GROMOLL, BERND
Publication of US20110110796A1 publication Critical patent/US20110110796A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type

Definitions

  • the present invention relates to a pump in the style of a water-jet pump for creating a high vacuum.
  • turbomolecular pumps For creating an ultra-high vacuum, turbomolecular pumps, cryopumps, sorption pumps, rotary plunger pumps, positive displacement pumps and jet pumps are used.
  • jet pumps water-jet pumps or pumps based on oils as liquid are used. Only vacuum pressures which lie within the range of the vapor pressure of the liquid which is used can be achieved by these pumps. Therefore, known water-jet pumps and oil pumps can be used only as fore-pumps for creating a fore-vacuum, and for creating especially ultra-high vacuums have to be supplemented by downstream pumps such as turbo-molecular pumps.
  • the pump systems which are constructed in this way are complex, expensive and labor-intensive in maintenance.
  • a pump with as few parts as possible, above all with few or no movable parts in order to be able to operate the pump in a wear-free and cost-effective manner, and with a simple way to create an ultra-high vacuum which is as beneficial as possible.
  • a simple method for operating such a pump is to be disclosed.
  • the inventors propose a pump for creating a high vacuum, especially for creating an ultra-high vacuum, is to be constructed in the style of a water-jet pump or of a corresponding type.
  • a pump for creating a high vacuum is to be constructed in the style of a water-jet pump or of a corresponding type.
  • it comprises at least one chamber which is exposable to throughflow by a fluid in one flow direction.
  • This chamber has at least one first feed for the fluid, which projects into the chamber and terminates in a nozzle orifice.
  • the chamber has at least one outlet for the fluid, which is arranged opposite the nozzle orifice, as seen in the flow direction.
  • the chamber has at least one second feed which leads into the chamber and is to be connected to a space which is to be evacuated.
  • An ionic fluid is used as the fluid for such a pump.
  • the pump can preferably be connected to a closed fluid circuit or integrated into this, which comprises the feed pump for creating a fluid pressure in the at least one first fluid feed and which comprises a storage tank with a check valve for discharging gases, which storage tank is connected to the at least one fluid outlet and to the feed pump.
  • the ionic fluid which is to be provided for the pump may be a liquid and/or also a liquid-gas mixture. If applicable, a corresponding gas can also be used as fluid.
  • the pressure in the space which is to be evacuated can be adjusted in dependence upon the ionic liquid which is used, especially upon the vapor pressure of the ionic liquid.
  • a fluid which contains sulfate ions, hydrogen sulfate ions, alkyl sulfate ions, thiocyanate ions, phosphate ions, borate ions, tetrakis hydrogen sulfate oborate ions, or silicate ions is preferably selected.
  • the at least one second feed is preferably connected to an ultra-high vacuum chamber for an exchange or removal of gas between the ultra-high vacuum chamber and the at least one feed.
  • an ultra-high vacuum which lies within the pressure range of 10 ⁇ 7 to 10 ⁇ 12 mbar, can be created in the ultra-high vacuum chamber.
  • the pressure in the ultra-high vacuum chamber is dependent upon the ionic liquid which is used, especially upon the vapor pressure of the ionic liquid.
  • the at least one first fluid feed and/or the at least one second feed and/or the at least one fluid outlet are, or is, designed in the form of at least one pipe in each case.
  • the inventors also propose a method for operating the pump, which involves:
  • the so-called Venturi effect is utilized by a corresponding design of the pump.
  • high flow velocities of the fluid in the chamber and therefore particularly high negative pressures at the second feed are to be achieved which can lead to corresponding high vacuums into the range of ultra-high vacuums in a connected space which is to be evacuated.
  • FIG. 1 shows in a greatly schematized view a construction for creating an ultra-high vacuum with a jet pump.
  • FIG. 2 shows a detail of the chamber of the pump.
  • FIG. 1 the construction of a system 1 for creating especially an ultra-high vacuum HV is shown.
  • the system 1 comprises a pump 2 with a first fluid feed 3 and a second feed 4 and also a fluid outlet 5 .
  • the pump 2 is integrated into a closed fluid circuit 9 which uses an ionic liquid as fluid F.
  • the pump functions in the manner of a water-jet pump, wherein its operating medium, however, is not water but an ionic liquid or a corresponding liquid-gas mixture.
  • the flow direction of the fluid F is identified by s.
  • a feed pump 6 is connected upstream to the pump 2 and creates a high fluid pressure in at least one pipe-like section 9 a of the fluid circuit 9 upstream of the pump 2 .
  • Fluid F at a high flow velocity and/or at a high internal fluid pressure is therefore pumped by the feed pump 6 to the pump 2 via the section 9 a of a pipe system.
  • the fluid F enters a chamber 11 of the pump 2 there via the first fluid feed 3 .
  • the feed projects a little into the chamber and is designed there as a nozzle with a nozzle orifice 3 a (cf. FIG. 2 ).
  • the fluid is sharply accelerated in the process.
  • the acceleration is brought about according to the so-called Venturi effect on account of a corresponding design of the nozzle.
  • the fluid flow velocity is increased for example tenfold to a hundred fold or thousand fold. Fluid flow velocities up to sonic speed are possible.
  • the flow velocity is dependent upon the fluid pressure directly in front of the nozzle and upon the nozzle diameter in proportion to the piping diameter of the first fluid feed 3 .
  • the fluid jet which discharges at high velocity from the nozzle at its orifice 3 a , absorbs portions of the gas which is in the chamber 11 , for example as a result of impacts with the gas molecules and vortices as a result of friction in the gas in the chamber.
  • the gas molecules which are entrained with the fluid flow discharge from the chamber 11 together with the fluid F at the fluid outlet 5 which lies opposite the nozzle orifice 3 a.
  • the fluid F which discharges from the chamber 11 via the fluid outlet 5 is directed into a storage tank 7 .
  • the fluid F is collected there and entrained gas molecules can escape from the fluid and, via a check valve 8 , be discharged to the environment or into a further collecting tank.
  • the collected fluid from the storage tank 7 can then be fed to the feed pump 6 by a further section 9 c of the piping system, with which a completed fluid circuit 9 in the piping system results.
  • the gas molecules which are entrained and transported away with the fluid F lead to a negative pressure at a second feed 4 of the chamber 11 of the pump 2 .
  • a high-vacuum chamber 10 is connected to the second feed 4 of the pump chamber 11 via a piping system 12 , for example a stainless steel pipe.
  • a piping system 12 for example a stainless steel pipe.
  • the negative pressure which is created in the pump chamber 11 leads to a flow of gas, which gas can flow from a higher gas pressure in the high-vacuum chamber 10 to a lower gas pressure in the pump chamber 11 . Only when a pressure balance has taken place, i.e.
  • a gas pressure or a vacuum with a pressure which corresponds at least approximately to the vapor pressure of the fluid F which is used can be created in the high-vacuum chamber 10 .
  • an ionic fluid as the operating medium of the pump 2 , high-vacuum gas pressures can be achieved, i.e. a high vacuum in a high-vacuum chamber 10 which reaches into the ultra-high vacuum range of 10 ⁇ 7 to 10 ⁇ 12 mbar.
  • Ionic fluids which are suited to the pump are known for example from “Angewandte Chemie” (Applied Chemistry), 2000, Volume 112, pages 3926 to 3945. According to this, liquids which at low temperatures, particularly at temperatures below 100° C., are melting salts with non-molecular, ionic character, are generally considered as such fluids.
  • An especially advantageous property of such ionic liquids for use in the pump is that these have a practically non-measurable vapor pressure (at the usual application temperatures). Therefore, in spaces which are to be evacuated, negative pressures, which correspond to the vapor pressure of the liquids which are to be used, can be achieved. During operation of the pump, practically no liquid evaporates so that the drawn-in gas is easy to separate from the liquid.
  • fluids F liquid or in a two-phase liquid-gas mixture
  • fluids F which contain sulfate ions, hydrogen sulfate ions, alkyl sulfate ions, thiocyanate ions, phosphate ions, borate ions, tetrakis hydrogen sulfate oborate ions, or silicate ions, at least as the chief portion (i.e. more than 50% by volume).

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US12/737,407 2008-07-11 2009-04-09 Water jet type pump and method for operation thereof Abandoned US20110110796A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008032825A DE102008032825B3 (de) 2008-07-11 2008-07-11 Strahlpumpe sowie Verfahren zu deren Betrieb
DE102008032825.1 2008-07-11
PCT/EP2009/054320 WO2010003707A1 (de) 2008-07-11 2009-04-09 Pumpe nach art einer wasserstrahlpumpe sowie verfahren zu deren betrieb

Publications (1)

Publication Number Publication Date
US20110110796A1 true US20110110796A1 (en) 2011-05-12

Family

ID=40765493

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/737,407 Abandoned US20110110796A1 (en) 2008-07-11 2009-04-09 Water jet type pump and method for operation thereof

Country Status (7)

Country Link
US (1) US20110110796A1 (de)
EP (1) EP2307739A1 (de)
JP (1) JP2011527397A (de)
CN (1) CN102089527A (de)
DE (1) DE102008032825B3 (de)
RU (1) RU2463487C1 (de)
WO (1) WO2010003707A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150167697A1 (en) * 2013-12-18 2015-06-18 General Electric Company Annular flow jet pump for solid liquid gas media
US9882455B2 (en) 2012-11-12 2018-01-30 Siemens Aktiengesellschaft Cooling system for electric generators
CN113339492A (zh) * 2021-07-07 2021-09-03 银川威力传动技术股份有限公司 电子喷射泵系统及应用其的新能源汽车减速器冷却润滑液压系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011077079A1 (de) * 2011-06-07 2012-12-13 Siemens Aktiengesellschaft Kühlung durch Dampfstrahlerzeugung
NL2024887B1 (en) * 2020-02-12 2021-09-15 Vcu Tcd B V Apparatus suitable for automatically picking and placing a flexible object
DE102021107660A1 (de) 2021-03-26 2022-09-29 Robert Staudacher Hydrozyklon-Entgasungsvorrichtung

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144721A (en) * 1974-04-16 1979-03-20 Kantor Frederick W Rotary thermodynamic apparatus
US4880357A (en) * 1988-06-27 1989-11-14 Mathers Terrence L Method and apparatus for producing high vacuum
US6364625B1 (en) * 1997-10-01 2002-04-02 Marwal Systems Jet pump comprising a jet with variable cross-section
US20040091364A1 (en) * 2002-11-07 2004-05-13 Marsbed Hablanian Vapor jet vacuum pump having ejector stage in foreline conduit
US7153974B2 (en) * 2000-06-09 2006-12-26 Merck Gmbh Ionic liquids II
US20070258828A1 (en) * 2004-09-24 2007-11-08 Linde Aktiengesellschaft Method and Device for Compressing a Gaseous Medium
US20070269309A1 (en) * 2004-09-17 2007-11-22 Basf Aktiengesellschaft Method for Operating a Liquid Ring Compressor
US20080166243A1 (en) * 2005-05-06 2008-07-10 Michael Kotschan Liquid for Compressing a Gaseous Medium and Use of the Same
US7896954B2 (en) * 2005-04-07 2011-03-01 Matheson Tri-Gas, Inc. Fluid storage and purification method and system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB925950A (en) * 1961-02-15 1963-05-15 Hick Hargreaves & Company Ltd Improvements in and relating to vacuum producing equipment
JPS58160599A (ja) * 1982-03-17 1983-09-24 Takuo Mochizuki 減圧装置
JPS5932700A (ja) * 1982-08-19 1984-02-22 Nitsukuu Kogyo Kk 液体噴射ポンプ
DE10238637A1 (de) * 2002-08-19 2004-03-11 Philipps-Universität Marburg Verfahren und Vorrichtung zur Herstellung hoch kernspinpolarisierter Flüssigkeiten
DE102005026916A1 (de) * 2005-06-10 2006-12-14 Linde Ag Verdichter und Verfahren zum Schmieren und/oder Kühlen eines Verdichters
CN102023270A (zh) * 2010-11-22 2011-04-20 李颖 电网参数智能传感器

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144721A (en) * 1974-04-16 1979-03-20 Kantor Frederick W Rotary thermodynamic apparatus
US4880357A (en) * 1988-06-27 1989-11-14 Mathers Terrence L Method and apparatus for producing high vacuum
US6364625B1 (en) * 1997-10-01 2002-04-02 Marwal Systems Jet pump comprising a jet with variable cross-section
US7153974B2 (en) * 2000-06-09 2006-12-26 Merck Gmbh Ionic liquids II
US20040091364A1 (en) * 2002-11-07 2004-05-13 Marsbed Hablanian Vapor jet vacuum pump having ejector stage in foreline conduit
US20070269309A1 (en) * 2004-09-17 2007-11-22 Basf Aktiengesellschaft Method for Operating a Liquid Ring Compressor
US7927080B2 (en) * 2004-09-17 2011-04-19 Basf Aktiengesellschaft Method for operating a liquid ring compressor
US20070258828A1 (en) * 2004-09-24 2007-11-08 Linde Aktiengesellschaft Method and Device for Compressing a Gaseous Medium
US7896954B2 (en) * 2005-04-07 2011-03-01 Matheson Tri-Gas, Inc. Fluid storage and purification method and system
US20080166243A1 (en) * 2005-05-06 2008-07-10 Michael Kotschan Liquid for Compressing a Gaseous Medium and Use of the Same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9882455B2 (en) 2012-11-12 2018-01-30 Siemens Aktiengesellschaft Cooling system for electric generators
US20150167697A1 (en) * 2013-12-18 2015-06-18 General Electric Company Annular flow jet pump for solid liquid gas media
CN113339492A (zh) * 2021-07-07 2021-09-03 银川威力传动技术股份有限公司 电子喷射泵系统及应用其的新能源汽车减速器冷却润滑液压系统

Also Published As

Publication number Publication date
RU2011105023A (ru) 2012-08-20
EP2307739A1 (de) 2011-04-13
RU2463487C1 (ru) 2012-10-10
WO2010003707A1 (de) 2010-01-14
CN102089527A (zh) 2011-06-08
JP2011527397A (ja) 2011-10-27
DE102008032825B3 (de) 2010-01-14

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Owner name: SIEMENS AKTIENGESELLSCHAFT, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:DANOV, VLADIMIR;GROMOLL, BERND;SIGNING DATES FROM 20101203 TO 20101207;REEL/FRAME:025686/0295

STCB Information on status: application discontinuation

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