WO2009152915A2 - Verfahren zur galvanischen kupferbeschichtung und vorrichtung zur durchführung eines solchen verfahrens - Google Patents
Verfahren zur galvanischen kupferbeschichtung und vorrichtung zur durchführung eines solchen verfahrens Download PDFInfo
- Publication number
- WO2009152915A2 WO2009152915A2 PCT/EP2009/003655 EP2009003655W WO2009152915A2 WO 2009152915 A2 WO2009152915 A2 WO 2009152915A2 EP 2009003655 W EP2009003655 W EP 2009003655W WO 2009152915 A2 WO2009152915 A2 WO 2009152915A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- copper
- container
- bath
- carbonate
- electrolytic
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/04—Tubes; Rings; Hollow bodies
Definitions
- the invention relates to a method for galvanic copper coating and an apparatus for carrying out such a method.
- the object is achieved by a method according to claim 1.
- the workpiece is a printing cylinder.
- An advantageous development is the subject matter of claim 2, wherein the copper carbonate is preferably supplied to over 90% as basic copper carbonate.
- a further advantageous development is the subject of claim 3, wherein the copper carbonate is preferably supplied to over 90% in the form of copper (II) hydroxide carbonate.
- the object is also achieved by a use of copper carbonate according to claim 9, wherein the acid copper bath is preferably a sulfuric copper bath, and also by a galvanizing apparatus according to claim 10.
- the acid copper bath is preferably a sulfuric copper bath
- a galvanizing apparatus according to claim 10.
- An advantageous development is the subject of claim 11, wherein the second container is preferred a suspension of copper carbonate in water.
- FIG. 1 shows a section through a schematic structure of a
- Electroplating plant for the coating of a workpiece seen along the line I - I of Fig. 2, and Fig. 2 shows a simplified section through the schematic structure of
- FIG. 1 and FIG. 2 show a galvanizing plant 10 with an upper tank (tank) 12 and a lower tank (tank) 14.
- an electrolytic bath 32 In the lower tub 14 are an electrolytic bath 32, a heater 16, a cooling 18, a circulating device 20, e.g. in the form of a pump and / or stirrer, and a controllable depletion device 22 for reducing copper concentration as needed.
- an electrolytic bath 30 In the upper tub 12 are an electrolytic bath 30, an insoluble, dimensionally stable anode 40, a circulating device 54 and a two rotary bearings 44, 46 mounted shaft 42 which is driven by a motor 48 and a height adjustment device 49 can be raised and lowered.
- a gravure cylinder 50 On the shaft 42 to be coated workpiece 50, in particular a gravure cylinder 50 is attached.
- a DC device e.g., current controlled rectifier
- a DC device 52 is contacted with its negative terminal on the shaft 42 and its positive terminal on the anode 40.
- a fluid connection 24 with a controllable pump 26 allows pumping of the electrolytic bath 32 from the lower tub 14 into the upper tub 12, and fluid communication 28 with a controllable valve 29 allows draining the electrolytic bath 30 into the lower tub 14.
- a container 60 referred to below as external container 60, is provided as a so-called bypass and contains an electrolytic bath 34 and a circulating device 36, in particular an agitator 36.
- a fluid connection 64 having a controllable pump 66 and a filter 67 allows pumping of the electrolytic bath 34 from the reservoir 60 into the lower tub 14, and fluid communication 68 with a controllable valve 69 allows the electrolytic bath 32 to drain into the reservoir 60 the filter 67 (For example in the form of so-called filter cartridges), the electrolytic bath 32, 34 is filtered or cleaned.
- a Nachdos ists subjecter (chute) 70 is filled with copper carbonate 74 and connected via a controllable valve 71 to the container 60, preferably integrated into this.
- a Nachdos ists subjecter (chute) 76 is filled with copper carbonate 79 and connected via a controllable valve 78 to the lower tray 14.
- An energy meter 84 is provided on the DC device 52, a copper concentration meter 81 in the upper tub 12, a copper concentration meter 82 in the lower tub 14, and a copper concentration meter 83 in the external box 60.
- a control device 80, the signals of the energy meter 84 and the copper concentration meters 81, 82 and 83 are supplied via lines, and the control device 80 is for driving or output of control signals via control lines with the controllable (metering) valves 29, 69th , 71 and 78, connected to the controllable (metering) pumps 26 and 66 and to the controllable depletion device 22.
- the printing cylinder 50 For electroplating the printing cylinder 50 with copper, this is e.g. to 20% to 100%, preferably about 50% lowered into the electrolytic bath 30 and rotated continuously over the motor 48.
- the current flowing between the anode 40 and the printing cylinder (cathode) 50 copper is deposited on the printing cylinder 50 depending on the current density.
- the electrolytic bath 30, 32 contains a copper sulfate solution and optionally further additives.
- Successful experiments were carried out with a sulfuric acid copper bath (sulphurous copper electrolyte), which had the following constituents, the data referring in each case to one liter of the electrolytic bath 30, 32: 40-70 g / l, preferably 45-60 g / l, more preferably 55 g / l sulfuric acid (H 2 SO 4 )
- the temperature of the electrolytic bath is for example between 18 0 C and 60 0 C.
- the electrolytic bath can either be finished (e.g., "ROTOCOPPER make-up” from IPT International Plating Technologies GmbH) or, e.g. from the constituents copper sulfate solution, demineralized water, concentrated sulfuric acid and a hardness additive (for example ROTOCOPPER HS from IPT International Plating Technologies GmbH).
- the electrolytic bath is initially filled in the lower trough 14 and brought there via the heater 16 and cooling 18 to the predetermined temperature. For coating, the electrolytic bath 32 is then pumped via the pump 26 into the upper tank 12.
- the electrolytic baths 30 and 32 have similar properties, and by increasing the copper concentration in the lower one Tray 14, for example, the copper concentration in the upper tray 12 can be increased.
- the electrolytic bath 34 is supplied with copper carbonate which dissolves in the sulfuric acid electrolytic bath 34. This will increases or maintains the concentration of copper. Carbon dioxide, which escapes or sucks as gas, is formed during dissolution.
- the copper carbonate should preferably have the following properties (in each case individually or also together):
- the replenishment of the copper carbonate can be done in various ways.
- the copper carbonate 79 is fed either as such or as a suspension in (demineralized) water (copper carbonate is insoluble in water) from the Nachdos mecanics knowner 76 via the controllable valve 78 of the lower trough 14 as needed, the Circulating device 20 is preferably activated.
- additional dosing via an additional container is preferably activated.
- the copper carbonate 74 can be supplied in the same way, either as such or as a suspension in water from the Nachdos mecanics livinger 70 via the controllable valve 71 to the electrolytic bath 34 in the external container 60 as needed.
- the electrolytic bath 34 with the increased copper concentration is pumped by the pump 66 into the lower tub 14 to also increase the copper concentration there, and via the controllable valve 68 electrolytic bath 32 is placed in the external container 60.
- the electrolytic bath 32 with the increased copper concentration is pumped via the pump 26 into the upper trough 12 in order to increase the copper concentration there as well.
- Another possibility is to add into the electrolytic bath 34 in the external container 60 so much copper carbonate that the solution is in saturation, and a part of the copper carbonate settles as a bottom body at the bottom 35 of the container 34.
- the agitator 36 is used.
- the copper concentration in the saturated solution (eg, 70 g / L) is higher than that in the electrolytic baths 32 and 30 (eg, 58 g / L), and to increase the copper concentration in the electrolytic baths 32 and 30, the saturated solution 34 becomes over controlled pump 66 is pumped into the lower tray 14 and optionally electrolytic bath 32 filled from the lower tray 14 via the controllable valve 69 into the container 60, wherein for determining the amount to be pumped into the lower tray 14 preferably the measured values of the copper concentration measuring devices 82 and 83 are used.
- the copper concentration achieved in the saturated solution in a sulfuric acid copper bath having the above-mentioned properties with addition of copper carbonate was tested in experiments at a temperature of about 40 0 C with about Measured 85 g / l of copper, and at a temperature of about 60 0 C with about 100 g / l copper.
- the supply of the copper carbonate is preferably carried out automatically by the control device 80.
- controllable valve 78 is opened until the intended amount of copper carbonate 79 has entered the electrolytic bath 32,
- controllable valve 71 is opened until the intended amount of copper carbonate 74 has entered the electrolytic bath 34, e.g. the controllable pump 66 and the controllable valve 69 are controlled so that a constant exchange between the electrolytic baths 32 and 34 takes place, and
- controllable pump 66 is activated until the intended amount of saturated high-concentration electrolytic bath 34 has entered the lower tub 14 and, if necessary, the external container 60 via the controllable valve 69 electrolytic bath 32 and over the controllable valve 71 supplied copper carbonate.
- the replenishment takes place e.g. continuously, in which case the amount is set per unit time, or cyclically at predetermined times or after a predetermined amount of deposition.
- the copper wire sections act as soluble anodes, and as copper dissolves, the changing size of the copper wire sections causes variations in the properties of the electrolytic bath.
- the copper wire sections are dissolved, slag residues and organic contaminants usually arise.
- the metering of the copper wire sections into the anode region is difficult and usually occurs manually. Preference is therefore given to an additional use of copper wire sections.
- the insoluble, dimensionally stable anode 40 is e.g. an expanded metal sheet of titanium or niobium, each additionally coated with mixed oxides, e.g. Iridium or lead oxide can be coated.
- Mixed oxides e.g. Iridium or lead oxide can be coated.
- Solid lead anodes of a lead-tin-silver alloy are also possible.
- the surface of the anode 40 is e.g. latticed or closed, and the shape of the anode 40 for coating a printing cylinder for the printing industry is e.g. a half cylinder cut along the axis.
- the DC device 52 operates e.g. in a voltage range of 7 to 15 V, and the predetermined current is selected depending on the surface to be coated and the desired deposition rate.
- the set current density is up to 60 A / dm 2 depending on the desired deposition rate.
- a deposition rate of 6 ⁇ m / min was achieved with a copper coating of a gravure roll of predetermined quality, wherein a further increase in the deposition rate appears possible.
- Fine-grained and firmly adhering copper layers could be produced with the described galvanic deposition.
- the replacement of the electrolytic bath 30, 32, 34 between the containers 12, 14 and 60 can be done in other ways than with pump and valve, and the arrangement of the containers to each other can be done differently.
- the depletion device can be omitted in a subsequent dosing with copper carbonate, since the maximum concentration of copper achievable therewith is lower than e.g. in a subsequent dosing with copper wire sections.
- a copper methanesulfonic acid bath or a phosphate copper bath is conceivable instead of the sulfuric acid copper bath.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Automation & Control Theory (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112009001255T DE112009001255A5 (de) | 2008-05-28 | 2009-05-22 | Verfahren zur galvanischen Kupferbeschichtung und Vorrichtung zur Durchführung eines solchen Verfahrens |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008026985.9 | 2008-05-28 | ||
DE102008026985 | 2008-05-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009152915A2 true WO2009152915A2 (de) | 2009-12-23 |
WO2009152915A3 WO2009152915A3 (de) | 2010-03-11 |
Family
ID=41213451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/003655 WO2009152915A2 (de) | 2008-05-28 | 2009-05-22 | Verfahren zur galvanischen kupferbeschichtung und vorrichtung zur durchführung eines solchen verfahrens |
Country Status (2)
Country | Link |
---|---|
DE (2) | DE102009023124A1 (de) |
WO (1) | WO2009152915A2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9120674B2 (en) | 2011-07-29 | 2015-09-01 | Wacker Chemie Ag | Process for cleaning polycrystalline silicon chunks |
EP3467157A1 (de) | 2017-10-09 | 2019-04-10 | IPT - International Plating Technologies GmbH | Zusammensetzung zur nachdosierung eines metalls |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104264208B (zh) * | 2014-09-30 | 2017-05-24 | 任晓东 | 一种千斤顶电镀装置的冷却机构 |
CN104233439B (zh) * | 2014-09-30 | 2016-10-05 | 任晓东 | 一种千斤顶的电镀装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4164456A (en) * | 1978-06-15 | 1979-08-14 | Dart Industries Inc. | Electrolytic process |
US4428802A (en) * | 1980-09-19 | 1984-01-31 | Kabushiki Kaisha Suwa Seikosha | Palladium-nickel alloy electroplating and solutions therefor |
EP0181430A1 (de) * | 1984-11-13 | 1986-05-21 | Olin Corporation | Systeme zur Herstellung einer elektroplattierten und/oder bearbeiteten Metallfolie |
US5186811A (en) * | 1991-04-18 | 1993-02-16 | Nippon Cmk Corp. | Method of manufacturing printed wiring boards |
US6024856A (en) * | 1997-10-10 | 2000-02-15 | Enthone-Omi, Inc. | Copper metallization of silicon wafers using insoluble anodes |
US20010017266A1 (en) * | 1998-06-19 | 2001-08-30 | Gerald Maresch | Process and apparatus for preparing and replenishing an electrolyte in an electrolyte bath |
US6458262B1 (en) * | 2001-03-09 | 2002-10-01 | Novellus Systems, Inc. | Electroplating chemistry on-line monitoring and control system |
EP1887108A1 (de) * | 2005-05-25 | 2008-02-13 | Think Laboratory Co., Ltd. | Verkupferungsverfahren und -vorrichtung für tiefdruckzylinder |
-
2009
- 2009-05-20 DE DE102009023124A patent/DE102009023124A1/de not_active Withdrawn
- 2009-05-22 WO PCT/EP2009/003655 patent/WO2009152915A2/de active Application Filing
- 2009-05-22 DE DE112009001255T patent/DE112009001255A5/de not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4164456A (en) * | 1978-06-15 | 1979-08-14 | Dart Industries Inc. | Electrolytic process |
US4428802A (en) * | 1980-09-19 | 1984-01-31 | Kabushiki Kaisha Suwa Seikosha | Palladium-nickel alloy electroplating and solutions therefor |
EP0181430A1 (de) * | 1984-11-13 | 1986-05-21 | Olin Corporation | Systeme zur Herstellung einer elektroplattierten und/oder bearbeiteten Metallfolie |
US5186811A (en) * | 1991-04-18 | 1993-02-16 | Nippon Cmk Corp. | Method of manufacturing printed wiring boards |
US6024856A (en) * | 1997-10-10 | 2000-02-15 | Enthone-Omi, Inc. | Copper metallization of silicon wafers using insoluble anodes |
US20010017266A1 (en) * | 1998-06-19 | 2001-08-30 | Gerald Maresch | Process and apparatus for preparing and replenishing an electrolyte in an electrolyte bath |
US6458262B1 (en) * | 2001-03-09 | 2002-10-01 | Novellus Systems, Inc. | Electroplating chemistry on-line monitoring and control system |
EP1887108A1 (de) * | 2005-05-25 | 2008-02-13 | Think Laboratory Co., Ltd. | Verkupferungsverfahren und -vorrichtung für tiefdruckzylinder |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9120674B2 (en) | 2011-07-29 | 2015-09-01 | Wacker Chemie Ag | Process for cleaning polycrystalline silicon chunks |
EP3467157A1 (de) | 2017-10-09 | 2019-04-10 | IPT - International Plating Technologies GmbH | Zusammensetzung zur nachdosierung eines metalls |
DE102018124325A1 (de) | 2017-10-09 | 2019-04-11 | Ipt International Plating Technologies Gmbh | Zusammensetzung zur Nachdosierung eines Metalls |
Also Published As
Publication number | Publication date |
---|---|
DE102009023124A1 (de) | 2009-12-03 |
WO2009152915A3 (de) | 2010-03-11 |
DE112009001255A5 (de) | 2011-04-28 |
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