WO2009129668A1 - 太阳能硅晶片检测机台和检测方法 - Google Patents

太阳能硅晶片检测机台和检测方法 Download PDF

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Publication number
WO2009129668A1
WO2009129668A1 PCT/CN2008/001929 CN2008001929W WO2009129668A1 WO 2009129668 A1 WO2009129668 A1 WO 2009129668A1 CN 2008001929 W CN2008001929 W CN 2008001929W WO 2009129668 A1 WO2009129668 A1 WO 2009129668A1
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WIPO (PCT)
Prior art keywords
silicon wafer
solar silicon
carrier
machine
carriers
Prior art date
Application number
PCT/CN2008/001929
Other languages
English (en)
French (fr)
Inventor
林汉声
Original Assignee
中茂电子(深圳)有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN2008100432809A external-priority patent/CN101567405B/zh
Priority claimed from CN 200810043702 external-priority patent/CN101648186B/zh
Application filed by 中茂电子(深圳)有限公司 filed Critical 中茂电子(深圳)有限公司
Priority to KR1020097023212A priority Critical patent/KR101400817B1/ko
Publication of WO2009129668A1 publication Critical patent/WO2009129668A1/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10—Testing of PV devices, e.g. of PV modules or single PV cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention relates to a testing machine, in particular to a solar silicon wafer testing machine. ⁇ Background technique ⁇
  • Mineral resources such as crude oil are depleting, and the refining process is endless.
  • Natural resources such as solar energy, have the inexhaustible and inexhaustible advantages of environmental protection and become the protagonists of the next generation of energy.
  • Solar panels can be converted into electrical energy to convert the received light energy into electrical energy for use as one of the better alternative solutions.
  • the main component of the solar panel is a solar silicon wafer.
  • the left side of the figure is the light receiving surface of the solar silicon wafer 1 , hereinafter referred to as the first surface 12
  • the right side is the solar silicon wafer 1 flipped 180 degrees.
  • the non-light-receiving surface is hereinafter referred to as the second surface 14.
  • electrodes 122, 142 are disposed on the first side 12 and the second side 14 of the solar silicon wafer 1, respectively. Therefore, both sides of the solar silicon wafer 1 need to be inspected.
  • the inspection is mainly divided into: printing detection, color separation detection, and luminous efficiency detection.
  • the exterior part mainly uses the optical interpretation of the automated machine to despise the solar silicon wafer for scratches, water marks, white spots, broken wires, dirt and offset.
  • the color of each silicon wafer is slightly different, and can be divided into light blue, dark blue, blue purple, purple, brown and other colors according to the main frequency of the reflected light. Although color does not affect its photoelectric conversion performance, it affects the aesthetics of future assembly. Therefore, the purchase of solar silicon wafer manufacturers has many requirements for color separation detection. Photoelectric conversion efficiency and electrical performance are important factors, but because the inspection process is special, it can be set up elsewhere.
  • the more common operation mode is to flip the solar silicon wafer directly or into the container 16 by a waterwheel-type load-bearing structure by 180 degrees after detecting a certain surface. That is, the other side is detected as shown in Fig. 2, and then turned back.
  • the continuous inversion process there is a stress concentration effect at the lower end of the gravity direction, and a slightly faster speed may cause edge damage or micro-crake, the former may be visually observed, and the latter may increase the detection trouble.
  • the waterwheel design with two flips the radius is too small, the angular acceleration in the gravity-related direction is high and easy to be damaged; if the radius is too large, it takes up a huge space. Even if you try to reduce the radius, in the direction of the process to It requires less than three times the storage space of the solar silicon wafer and the running space of twice the diameter of the waterwheel, so that the overall size of the machine cannot be reduced.
  • solar silicon wafers have a length to width of 5 ⁇ to 6 ⁇ , but a thickness of only a few tenths of a millimeter (mm), which is quite fearful of collision
  • the current technology is, for example, a styrofoam box as a dispensing container, each stack of boxes. Load tens to hundreds of silicon wafers, and ensure the safety of the stack of silicon wafers during the transfer process by buffering the styrofoam box.
  • the sorting machine When one of the styrofoam boxes is full, the sorting machine will temporarily stop operating. The operator removes the fully loaded styrofoam box and replenishes an empty styrofoam box to the position; the detection efficiency of the sorting machine UPH (Unit per Hour) is thus constrained. As a result, some manufacturers have switched to high-capacity cassettes that can carry, for example, six hundred solar panels, as a container to reduce the frequency of downtime.
  • Each category corresponds to two cards. One is the current card and the other is the backup card. When the card is fully loaded, the backup card is used as the current card. Use the cassette, and at this time, the operator updates the fully loaded card and resets it to the backup card. This repeated rotation makes the machine run without pause. However, due to the low price of the mechanical arm, the nozzle, the conveying track, the cassette, etc., such a large-scale structure multiplication will make the automatic machine completely absent. Competitiveness.
  • the solar silicon wafer can be subjected to double-sided inspection at high speed, without using a container, and can be embedded with different detection modules, or according to the commissioned subject. Requesting a more detailed classification will greatly increase the flexibility, efficiency and yield yield of such tests.
  • the classification function of the loading container can be supplemented in the middle, and the classification mode can be modularly connected to the existing inspection machine, the most common classification is fully automated.
  • the relatively unpopular classification can be based on cost considerations and high-capacity cartridges. In this way, machine management will be able to handle both cost and efficiency considerations, making automated inspection of silicon wafers more efficient, and eliminating the need for valuable working hours classification systems, which should be the best solution.
  • Another object of the present invention is to provide a solar silicon wafer inspection machine that optimizes the detection process, automatically replenishes and displaces the carrier, greatly improves the classification efficiency, and enables the solar silicon wafer to complete all the inspections in the shortest time.
  • Still another object of the present invention is to provide a solar silicon wafer inspection machine that expands the elasticity into a detection module that can increase different detection items.
  • Another object of the present invention is to provide a solar silicon wafer inspection machine that is matched with the classification, detects the color classification at the same time, and matches the specified detection requirements, and becomes the state of the factory to be packaged after the detection is completed.
  • Another object of the present invention is to provide an automatic replenishing and displacement carrying device, which can greatly improve the classification efficiency, and realize a solar silicon wafer detecting machine with a carrying device moving device that fully automates the measurement and classification of solar silicon wafers.
  • Still another object of the present invention is to provide a streamlined detection machine structure and a spare space for placement.
  • a solar silicon wafer inspection machine having a carrying device moving device that saves plant space and machine management manpower related resources.
  • Still another object of the present invention is to provide a solar silicon wafer inspection machine having a carrier device moving device that can be modularized and applied to the downstream detection process of the existing inspection machine.
  • Still another object of the present invention is to provide a solar silicon wafer sorting system having a load carrying device shifting device that greatly reduces the downtime and the number of times, and the ratio of performance to cost far exceeds that of the existing solar silicon wafer inspection and classification system.
  • the present invention discloses a solar silicon wafer inspection machine for detecting a solar silicon wafer to be tested piece by piece, and the silicon wafers respectively have a first surface and a second surface opposite to each other and respectively provided with electrodes
  • the base includes: a base; a set of pick-and-place feeding devices disposed on the base and taking the tested silicon wafer from the first side; a set of the base is disposed on the base to receive the receiving device from the picking and feeding device a carrier detecting device for detecting a second surface of the silicon wafer and moving along a radial direction and detecting a characteristic of the first surface of the silicon wafer; a set of the base is disposed on the base and the device from the first surface is extracted from the load detecting device a sampling device for measuring a silicon wafer; a set of second surface detecting devices disposed on the base, corresponding to one of the feeding device or the sorting device; and a group for receiving the bearing detecting device and the second The surface detects the information of the device and
  • the solar silicon wafer detecting method using the above machine is for detecting the tested solar silicon wafers one by one, and the silicon wafers respectively have a first surface and a second surface which are opposite to each other and are respectively provided with electrodes, and the machine includes a set of picking and feeding devices; a set of second side detecting devices corresponding to the picking device; a set of load detecting devices; a set of picking and sorting devices including a set of pickers and a plurality of carriers; and a set of processing devices
  • the method comprises the steps of: a) drawing the silicon wafer from the first side by the picking device to expose the second side of the solar wafer under test; b) detecting by the second surface detecting device The second surface of the solar silicon wafer, and the obtained data is output to the processing device; c) the measured solar silicon wafer is transported to the load detecting device in a manner that the second downward facing surface is carried by the carrying detecting device; d) detecting, by the load detecting device, the first surface characteristic of the solar
  • the invention discloses a solar silicon wafer inspection machine with a carrier moving device, comprising: a susceptor formed with a plurality of carrying positions; a set of picking and sorting devices disposed on the pedestal and taking the silicon wafer under test from the carrying detecting device from the first surface; a carrier for receiving the solar silicon wafer released by the transfer picking device; a set for stacking a plurality of carriers and having a predetermined end position such that when the carrier at the end position is removed from the stack, the rest is lifted a carrier for the next carrier to the end position; a set for stacking a plurality of carriers and having a predetermined storage position such that when the storage position is placed into a carrier, the remaining carriers are moved A storage device in which the storage position is vacated; and a plurality of transfer devices for transporting the carrier between the end position, the carrying position, and the storage position.
  • the solar silicon wafer feeding and the bearing detecting device can be quickly provided, in addition to the solar silicon wafer, the synchronous optical device can be synchronously detected; the detection is completed, and the sorting device can be directly distributed according to the setting.
  • the color or grade of solar silicon wafer is placed in the carrier; and the carrier located in the supply device and the storage device is moved by the moving device; and the frequently-discovered silicon wafer classification is processed; and only the relevant interface with the old test machine needs to be adjusted, ie
  • the automatic performance of the original organic table can be greatly improved; and the second surface detecting device can be used for detecting the second surface without flipping the solar silicon wafer, whether it is disposed at the sampling device or the sampling device end, see the present invention. Performance.
  • Figure 1 is a perspective view showing the appearance of the front and back sides of a common solar silicon wafer
  • FIG. 2 is a schematic perspective view of a common solar silicon wafer water tank type test mode
  • FIG. 3 is a perspective view showing the appearance of a solar silicon wafer inspection machine of the present invention.
  • Figure 4 is a block diagram of a first embodiment of the present invention.
  • Figure 5 is a perspective view showing the main part of the first embodiment of the present invention.
  • Figure 6 is a perspective view of the feeding device of the first embodiment of the present invention.
  • FIG. 7 is a perspective view of a carrier detecting device according to a first embodiment of the present invention.
  • Figure 8 is a perspective view showing the sorting device of the first embodiment of the present invention.
  • Figure 9 is a block diagram of the capture sorting device of Figure 8.
  • Figure 10 is a flow chart showing the detection of the first embodiment of the present invention.
  • Figure 11 is a block diagram of a second embodiment of the present invention.
  • Figure 12 is a perspective view showing the main part of a second embodiment of the present invention.
  • Figure 13 is a plan view of a machine table according to a third embodiment of the present invention.
  • Figure 14 is a side elevational view of the machine table of the third embodiment of the present invention
  • Figure 15 is a plan view showing a machine table according to a third embodiment of the present invention
  • Figure 16 is a block diagram of a machine table according to a third embodiment of the present invention.
  • Figure 17 is a perspective view of a transfer device according to a third embodiment of the present invention.
  • FIGS. 19 to 20 are schematic views showing the operation of the transfer device according to the third embodiment of the present invention.
  • 21 to 23 are fourth embodiments of the present invention.
  • the solar silicon wafer inspection machine table 2 includes a base 3, a picking and feeding device 4, a load detecting device 5, a picking and sorting device 6, a second surface detecting device 7, and a processing device. The relationship between the function of the device and the device is described later.
  • the second surface detecting device 7 is disposed corresponding to the picking and feeding device 4; and the processing device 8 is disposed in the base 3 of the solar silicon wafer detecting machine 2
  • the air pressure changing device supplies at least a part of the positive and negative pressure adjustment of the whole machine. In order to avoid the surface disorder of the related pipeline, the connecting pipeline is not drawn.
  • Figure 6 is a perspective view of the picking and feeding device 4, the picking and feeding device 4 includes a pivot 42 for pivoting in the direction of gravity, and an array of suction nozzles 46 disposed on the pivot 42.
  • the picking and feeding device 4 includes a pivot 42 for pivoting in the direction of gravity, and an array of suction nozzles 46 disposed on the pivot 42.
  • four sets of nozzles 46 are pivoted counterclockwise along the pivot 42 with the pivot 42 at right angles to each other for suction of the object under test.
  • the second surface detecting means 7 is disposed at a first position corresponding to the loop 44, i.e., 90 degrees counterclockwise in the direction of the loop 44.
  • the picking device 4 further includes a plurality of loading seats 48.
  • one of the sets of feeders 482 can be held at the picking position corresponding to the suction nozzle 46, and the other set is available. Fill in the new material.
  • the carrier detecting device 5 includes a set of optical detectors 52, a carrier moving member 54, and a set of optical-electrical characteristic detectors 56.
  • the optical detector 52 is for analyzing and detecting the appearance of the first surface of the object to be tested, or even the color;
  • the carrier moving member 54 disposed on the base includes two belts 542 arranged in parallel with each other in the detecting direction and a pulley for driving the two belts 542. 544.
  • the capturing and sorting device 6 includes a conveying member 62 which is disposed along the detecting direction and engages the load bearing detecting device.
  • the sorting direction of the present example is perpendicular to the detecting conveying direction, and the robot arm 64 has a set of self-conveying members 62. The sample is taken up and released to the picker 642 of the carrier 66.
  • the carrier 66 is divided into a plurality of groups in this example, and a guide member 68 for accommodating the carrier 66 is conveniently disposed in the lower direction of the carrier 66 in the sorting direction.
  • a single group sorting device 6 is shown.
  • the number of groups of the sorting device 6 can be increased in a connection manner to provide classification.
  • the carrier included in the sorting device 6 is divided into three rows as shown in FIG. 3, in order to avoid unnecessarily unexpected situations when the rows of the carriers 66 are removed from the base 3, the present case is as shown in FIG. , each row of carriers as a group, for each The group carrier sets a set of buttons as the stoppers 60.
  • the driving processing device 8 stops the group of robot arms 64 to release the tested solar silicon wafer to the corresponding group carrier, but can still maintain the normal supply and delivery of the other group of robot arms and the carrier, thereby improving production. Out of efficiency.
  • step 900 the silicon wafer is sucked from the first surface by picking up the feeding device to expose the second side of the solar wafer to be tested; and then step 902 is to use the second surface detecting device.
  • the second side of the solar silicon wafer is tested and the resulting data is output to a processing device.
  • step 904 the tested solar silicon wafer is transported to the load bearing detecting device in a second downward facing manner, and is carried by the carrying detecting device.
  • step 906 the first surface characteristic of the solar silicon wafer is detected by the carrying detecting device, and transmitted. To the processing device.
  • a final step 908 the processing device determines the classification of the solar silicon wafer under test, and commands the picker of the sorting device to suck the first side of the solar silicon wafer from the load bearing detecting device, and places it on the second side, and places it on one of the plurality of carriers. Corresponding classification.
  • the automatic detection is performed one by one, and according to the results of the trial operation of the present inventors, the detection rate of the prototype can reach 2400 pieces/hour. Compared with common products, the efficiency cannot be described by multiplication.
  • the second embodiment of the present invention is referred to FIG. 11, which is a block diagram of the second embodiment, and has a structure similar to that of the first embodiment.
  • the solar silicon wafer inspection machine 2 includes a base 3', a picking and feeding device 4', a load detecting device 5' and a picking and sorting device 6'.
  • the second surface detecting device 7' is arranged in the picking and sorting device 6'.
  • the front end can also exert the benefits of the present invention, and the processing device 8' provides detection signal transceiving and processing, which is the hub of automatic detection.
  • the inner side of the base 3 of the solar silicon wafer inspection machine 2 is disposed with a processing device 8' and a gas pressure conversion device 22'.
  • Material device 4 this example is a linear feed.
  • the bearing detection device 5' s transportation and detection, the second surface detecting device 7' detects the second side, and the sorting device 6' performs the final classification.
  • the basic concept is similar to that of the first embodiment and will not be described again.
  • the third embodiment shown in FIG. 13 and FIG. 14 is a top view and a side view of the inspection machine 2" respectively.
  • the rear end classification system is integrated into the inspection machine 2" in a modular design.
  • the utility model is applied to the modification of a common existing testing machine (not shown).
  • the sorting system is connected to the sorting end side of the detecting machine 2" detecting device, and the warning device such as the warning light is set at an appropriate position. 29".
  • FIG. 15 , FIG. 16 and FIG. 17 are connected to the detected signal from the above detection, and uses the detected solar silicon wafer classification information to perform drive control and division of the machine.
  • the transfer device 37 is used in the supply device 35", and the storage device 36 "Transporting multiple carriers 66".
  • the base 3" of the present example is disposed with six load-bearing positions 322", and each load-bearing position 322" is for accommodating one of the above-mentioned carriers, and as shown in FIG. 17, corresponding to each The group carrier 66" has a picker 642" for horizontally displacing the silicon wafer.
  • the picker 642" can use the nozzle to pick up the silicon wafer and release The silicon wafer is corresponding to the carrier 66" in the above-described carrying position 322".
  • the classification system of this example will utilize the drive of the processing device to connect the supply device 35" and the storage device 36", and the supply device 35" and the storage device 36" are filled with the carrier 66". Whether or not it is determined whether or not the lifter 371" and the conveyor belt 372" are moved to the storage position 361" shown in Fig. 18, and at the same time, the uppermost carrier is stacked in the carrier stack accommodated by the supply device 35". Up to the end position 351" corresponding to the transfer device, waiting for the picker to pick up the silicon wafer transferred from the transport member.
  • the number of carriers that can be accommodated in the supply device 35" is not limited to six, and the receiving carrier can also be selected at the bottom of the supply device 35", and in the figure
  • the blank portion is only an explanation and not a necessary restriction.
  • any one of the six carrying positions described in the present document has reached a predetermined loading capacity.
  • the processing device will drive.
  • An empty carrier 66" is ready to replace, and the elevator 371" corresponding to the position is commanded to lower the carrier 66", whereby the conveyor belt 372" moves the full load carrier 66" to the upper right of the figure,
  • the storage device 36 on the right side shown in Fig. 18 is advanced in direction, and the vacant carrier 66" is replenished to the original position.
  • the storage position 361" that arrives at the storage device 36" is stacked above the existing stack of carriers in the storage device 36", and the storage device 36" is lowered next to the stack, leaving the clearance of the storage position 361".
  • the classification system continues to perform the sorting operation until all the carriers in the supply device 35" have been delivered or are about to be exhausted, or the storage space of the storage device 36" is full or full, and the warning is required.
  • An operator (not shown) is required to intervene to supplement the carrier that is missing in the supply device 35", or to remove the carrier stack of the fully loaded solar silicon wafer that is about to be stacked with the storage device 36".
  • the fourth embodiment shown in Figs. 21 to 23 is illustrated as a shifting device 37" equipped with a shifter, and in Fig. 21, a carrier 66" for accommodating a silicon wafer is full.
  • the second surface detecting device is disposed at the front end or the rear end, it is possible to provide another surface inspection without flipping the solar silicon wafer, and naturally there is no concern of damaging the solar silicon wafer.
  • the loading and unloading of the carrier are located at the position of the supply device and the storage device of the rear end classification system, this action does not interfere with the ongoing classification operation of the solar silicon wafer sorting system, and the picker can still hand the silicon wafer to The corresponding carrier is accommodated. That is, even if an operator takes care of several inspection machines at the same time, there is no need to wait for any machine, and it is only necessary to properly handle the warning device. In this way, the operator can manage multiple machines at the same time with ease. Thus, all of the above objects of the present application can be effectively achieved by the present invention.

Description

太阳能硅晶片检测机台和检测方法
【技术领域】
本发明是关于一种检测机台， 尤其是一种太阳能硅晶片检测机台。 【背景技术】
矿产资源如原油等日渐枯竭， 且炼制过程污染不绝； 而天然资源如太阳 能，具有取之不尽、用之不竭且无环保困扰的优势，成为下一代能源的主角。 太阳能板可进行光电转换， 将所接收光能转换为电能以供利用， 为替代能源 较优的解决方案之一。
组成太阳能板主要的部件为太阳能硅晶片， 如图 1所示， 图中左侧呈现 为太阳能硅晶片 1的受光面， 以下称为第一面 12、右侧呈现为太阳能硅晶片 1翻转 180度的非受光面， 以下称为第二面 14。 为将光电流导出， 太阳能硅 晶片 1的第一面 12与第二面 14分别布设有电极 122、 142。 因此， 太阳能硅 晶片 1的两面均需检验。
检验主要区分为： 外观 (printing)检测、 分色检测、 及发光效率检测。 外 观部分主要利用自动化机台的光学判读， 捡视太阳能硅晶片是否有刮痕、 水 痕、 白点、 断线、 脏污及对位偏移等状况。 另由于太阳能硅晶片的工艺及原 料等因素， 每片硅晶片呈现的颜色均有些许差异， 并可依照反射光的主要频 率， 分为由浅蓝、 深蓝、 蓝紫、 紫、 棕等诸多颜色， 色彩虽不影响其光电转 换效能， 却影响日后组装的美观性， 故采购太阳能硅晶片厂商对此分色检测 多有要求。 光电转换效能与电气性能为相当重要的影响因素， 但因检验流程 较特殊， 亦可另设于他处。
目前的太阳能硅晶片检测机台大部分偏重进行外观检测， 且较常见的操 作模式是在检测某一面后，将太阳能硅晶片利用机械直接或放入容器 16以水 车式的承载结构翻转 180度， 即如图 2所示检测另一面， 而后再翻回。 连续 的翻转过程中， 沿重力方向的下端存在应力集中效应， 且速度稍快即可能造 成边缘破损或结构微裂 (micro-crake),前者犹可目测，后者更是增加检测的困 扰。
加以， 两次翻转的水车设计， 半径过小， 在重力相关方向的角加速度高 而易受损； 半径过大则占据庞大空间。 即使努力缩小半径， 在流程的方向至 少需占用三倍于太阳能硅晶片的置放空间、及水车翻转直径两倍的运转空间， 使得机台的整体尺寸无法减小。
再者， 虽然太阳能硅晶片长宽尺寸达 5吋至 6吋， 但厚度仅十分之几毫 米 (mm)， 相当畏惧碰撞， 因此目前技术是以例如保丽龙盒作为分装容器， 每 盒叠置装载数十至数百片硅晶片， 藉由保丽龙盒的缓冲， 确保整叠硅晶片在 搬移过程的安全。
尤其当太阳能硅晶片的使用普及后， 除光电转换效率等实质性能外， 消 费者更因美观因素而要求整批货品的配色要一致， 故实际产出的太阳能硅晶 片将于分类机台中， 经历相关电气性能与色泽的检测与分类， 藉由分类机台 依照外观色泽、 与良品或不良品等电气性能的因素分类， 由分类机台的机械 臂吸取经检测与分类的硅晶片， 多个保丽龙盒则分别置放于分类机台上， 以 承接并装载由机械臂所释放、 检测与分类完成的硅晶片。
当其中一个保丽龙盒装满时， 分类机台将暂时停止运作， 由操作人员取 下满载的保丽龙盒， 并递补一个空保丽龙盒至该位置； 分类机台的检测效率 UPH(Unit per Hour)从而受到牵制。因此， 部分厂商改以可承载例如六百片太 阳能硅晶片的高容量卡匣作为容器， 以降低停机的频率。
然而， 一方面太阳能硅晶片极易受损， 且轻微撞击所造成的微裂 (micro-crack)不易以肉眼察觉，却大幅影响产品的电气性能；为避免数百片硅 晶片叠置， 受自身重力挤压所造成的大规模微裂， 导致硅晶片大量损坏， 必 须在六百片硅晶片的堆叠中， 以每隔例如五十片插入一片薄保丽龙片作为缓 冲， 此种插入流程将增加实际操作的复杂度。 另方面， 要将硅晶片由承载数 百片硅晶片的卡匣中整批取出， 也极易因操作人员的轻微疏忽碰撞卡匣而破 片。 且考量太阳能硅晶片的材质与极薄的厚度， 对操作人员安全也构成相当 的风险； 因此， 市场上又兴起低容量卡匣的做法。 但无论采用高容量卡匣或 低容量卡匣， 仍然有相同的 「卡匣满载、 就需停机」 问题存在。
有研究人员提出将分类卡匣倍增， 每一分类分别对应两个卡匣， 其一为 现使用卡匣， 另一为备份卡匣， 当现使用卡匣满载， 则改以备份卡匣为现使 用卡匣， 并趁此时间命操作人员更新已满载的卡厘， 重设为备份卡匣； 如此 反复轮替， 使机台的运转不需暂停。 但是， 由于机械臂、 吸嘴、 输送轨道、 卡匣等装置的价格不低， 如此大规模的结构倍增， 将使自动化机台完全不具 竞争力。
且深入检视可发现，实际分类时，最常被检选的类别竟然大致符合 80/20 法则， 亦即， 依照电气性能与色泽等因素， 最常被检选归类的头几类占据极 大的百分比例， 较冷门的多数类别则仅涉及极少量的硅晶片， 最频繁出现的 两、 三种分类， 通常占所有硅晶片的六、 七成以上。
因此， 若能提供一种将检测机构与流程安排最佳化， 可使太阳能硅晶片 高速循序接受双面的检测， 无须使用容器， 更可配合嵌入不同的检测模组， 或依委托受测者要求， 进行更精细分类， 将可大幅提升此类检测的弹性、 效 率与产出良率。
此外， 若能一并提供一种自动化提供与置换硅晶片装载容器， 并具中途 补充装载容器功能、 可模组化衔接于现有检测机台的分类模式， 使最常见的 分类被全面自动化管制， 相对冷门的分类则可依照成本考量而以高容量卡匣 容置因应。 如此， 机台管理将于成本与效率双重考量因素间游刃有余， 让硅 晶片的自动化检测更有效率， 且不再耗用宝贵工时的分类系统， 应为最佳解 决方案。
【发明内容】
因此， 本发明目的之一在于提供一种全程无翻转、 降低太阳能硅晶片损 坏风险， 而可进行双面检测的太阳能硅晶片检测机台。
本发明另一目的在于提供一种检测流程最佳化，自动递补并位移承载器， 大幅提升分类效率， 使太阳能硅晶片于最短时间内完成所有检测的太阳能硅 晶片检测机台。
本发明再一目的在于提供一种使弹性扩充成为可增加不同检测项目检测 模组的太阳能硅晶片检测机台。
本发明更有一目的在于提供一种配合分类， 检测同时进行颜色分类， 配 合指定检测需求， 检测完成后即成为待包装出厂状态的太阳能硅晶片检测机 台。
本发明又有一目的在于提供一种自动递补并位移承载装置， 大幅提升分 类效率， 实现太阳能硅晶片捡测分类全面自动化的具有承载装置搬移装置的 太阳能硅晶片检测机台。
本发明又另一目的， 在于提供一种精简检测机台结构与备品置放空间， 节约厂房空间与机台管理人力相关资源的具有承载装置搬移装置的太阳能硅 晶片检测机台。
本发明又再一目的， 在于提供一种可模组化、 并视需求衔接应用于现有 检测机台中下游检测流程的具有承载装置搬移装置的太阳能硅晶片检测机 台。
本发明仍又一目的， 在于提供一种大幅减少停机时间与次数， 效能与造 价的比值远远超越现有太阳能硅晶片检测分类系统的具有承载装置搬移装置 的太阳能硅晶片分类系统。
因此， 本发明揭示一种太阳能硅晶片检测机台， 供逐片检测受测太阳能 硅晶片， 且硅晶片分别具有彼此相反、 且分别布设有电极的一个第一面及一 个第二面， 该机台包括： 一个基座； 一组设于该基座、 并自该第一面汲取该 受测硅晶片的汲取入料装置； 一组设于该基座、 承接来自该汲取入料装置的 受测硅晶片的第二面而沿一个径向搬移、 并检测该硅晶片第一面特性的承载 检测装置； 一组设于该基座、 并自该第一面汲取来自该承载检测装置的该受 测硅晶片的汲取分类装置； 一组设于该基座、 对应该汲取入料装置或汲取分 类装置之一的第二面检测装置； 及一组用以接收来自该承载检测装置及第二 面检测装置的资讯， 并指令该汲取分类装置的处理装置。
利用上述机台的太阳能硅晶片检测方法， 是供逐片检测受测太阳能硅晶 片， 且硅晶片分别具有彼此相反、 且分别布设有电极的一个第一面及一个第 二面， 该机台包含一组汲取入料装置； 一组对应该汲取入料装置的第二面检 测装置； 一组承载检测装置； 一组包括一组汲取器及多个承载器的汲取分类 装置； 及一组处理装置， 所述方法包括下列步骤： a)由该汲取入料装置以暴 露该受测太阳能硅晶片第二面的方式， 由该第一面吸取该硅晶片； b)以该第 二面检测装置检测该太阳能硅晶片第二面，并将所得资料输出至该处理装置； c)将该受测太阳能硅晶片以该第二面向下、 受该承载检测装置承载的方式， 输送至该承载检测装置； d)由该承载检测装置检测该太阳能硅晶片第一面特 性， 并传输至该处理装置； e)该处理装置判断该受测太阳能硅晶片的分类， 并指令该汲取分类装置的汲取器自该承载检测装置吸取该太阳能硅晶片第一 面， 并以第二面向下， 置放至承载器之一对应分类者。
本发明揭示一种具有承载器搬移装置的太阳能硅晶片检测机台， 包括： 一个形成有多个承载位置的基座； 一组设于该基座、 并自该第一面汲取来自 该承载检测装置的受测硅晶片的汲取分类装置;多个分别置于上述承载位置、 承接该传送汲取装置释放的太阳能硅晶片的承载器;一组供堆叠多个承载器、 并具有一个预定端部位置、 使得当位于端部位置的承载器自该堆叠中被移出 时、 升降其余承载器使该下一承载器至端部位置的供应装置； 一组供堆叠多 个承载器、 并具有一个预定收纳位置、 使得当该收纳位置被置入一个承载器 时、 移动其余承载器使该收纳位置被空出的收纳装置； 及一组供将承载器在 端部位置、 承载位置、 及收纳位置间搬移承载器的搬移装置。
藉由汲取入料装置， 快速提供太阳能硅晶片进料、 承载检测装置除输送 太阳能硅晶片外， 更可同步由相关光学装置进行检测； 检测完成， 汲取分类 装置可直接依设定， 分送不同颜色或等级的太阳能硅晶片置入承载器； 并通 过搬移装置搬移位于供应装置及收纳装置的承载器； 而处理频繁出现的硅晶 片分类； 且仅需调整与旧型测试机台的相关介面， 即可大幅提升原有机台的 自动化效能;且第二面检测装置无论配置于汲取入料装置或汲取分类装置端， 皆可在不翻转太阳能硅晶片状况下进行第二面的检测， 更见本发明的效能。
【附图说明】
图 1是常见太阳能硅晶片正反两面外观立体示意图；
图 2是常见太阳能硅晶片水车式受测模式立体示意图；
图 3是本发明太阳能硅晶片检测机台外观立体示意图；
图 4是本发明第一实施例的方块图；
图 5是本发明第一实施例主要部份的立体示意图；
图 6是本发明第一实施例汲取入料装置的立体示意图；
图 7是本发明第一实施例承载检测装置的立体示意图；
图 8是本发明第一实施例汲取分类装置的立体示意图；
图 9是图 8的汲取分类装置的方块图；
图 10是本发明第一实施例的检测流程图；
图 11是本发明第二实施例的方块图；
图 12是本发明第二实施例主要部份的立体示意图；
图 13是本发明第三实施例的机台的俯视图；
图 14是本发明第三实施例机台的立面侧视图； 图 15是本发明第三实施例的机台的平面图；
图 16是本发明第三实施例的机台的方块图；
图 17是本发明第三实施例的搬移装置的立体示意图；
图 18是本发明第三实施例的供应装置与收纳装置互动的侧向动作示 图 19~20是本发明第三实施例的搬移装置作动示意图;
图 21~23是本发明第四实施例。
【主要元件符号说明】
1...太阳能硅晶片 12...第一面
14...第二面 122、 142...电极
16...容器 2、 2，、 2"...太阳能硅晶片检测机台
22、 22'...气压变换装置 29"...警示装置
3、 3，、 3"...基座 322"、 322"，...承载位置
35"...供应装置 351"、 351"，...端部位置
36"...收纳装置 361 "、 361"，收纳位置
37"、 37"，...搬移装置 371"...升降器
372"...输送带
4、 4'...汲取入料装置 42...枢轴
44...回圈 46...吸嘴
48...入料座 482...入料器
5、 5'...承载检测装置 52...光学检测器
54...承载移动件 542...皮带
544...皮带轮 56...光-电特性检测器
6、 6'...汲取分类装置 62、 62"...输送件
60...止动件 64...机械臂
66、 66"、 66，"...承载器 68...导滑件
642、 642"...汲取器
7、 7'…第二面检测装置 8、 8'...处理装置
900 908...步骤 【具体实施方式】
有关本发明的前述及其它技术内容、 特点与功效， 在以下配合说明书附 图的较佳实施例的详细说明中， 将可清楚地呈现。
图 3为本发明的外观立体示意图，太阳能硅晶片检测机台 2包含基座 3、 汲取入料装置 4、 承载检测装置 5、 汲取分类装置 6、 第二面检测装置 7、 及 处理装置， 各装置的机能与装置间关联性容后叙述。
图 4及图 5为本发明的第一实施例， 第二面检测装置 7是被对应于汲取 入料装置 4设置;且处理装置 8配置于太阳能硅晶片检测机台 2的基座 3内， 气压变换装置 则供应全机至少一部份的正负压力调节，为避免相关管线造 成图面紊乱， 连结管线并未绘出。
图 6为汲取入料装置 4的立体示意图， 汲取入料装置 4包括供沿重力方 向枢转的枢轴 42、及设置于枢轴 42的数组吸嘴 46， 在本例中， 四组吸嘴 46 彼此以直角相间隔地随枢轴 42沿一个回圈 44逆时针枢转而供吸取受测物。 第二面检测装置 7是设置于对应回圈 44的第一位置， 亦即依回圈 44方向逆 时针枢转 90度处。 汲取入料装置 4更包括多个入料座 48。 本例中， 藉设置 两组可相对于枢轴 42的切向滑动的入料座 48， 可保持其中一组入料器 482 在对应于吸嘴 46的汲取位置， 而另一组则可供填入新料。
承载检测装置 5如图 7所示， 包括一组光学检测器 52、 承载移动件 54、 及一组光-电特性检测器 56。 光学检测器 52是供分析检测受测物的第一面外 观，甚至颜色；设置于基座的承载移动件 54则包括沿检测方向彼此平行配置 的两条皮带 542及驱动两条皮带 542的皮带轮 544。 汲取分类装置 6如图 8 所示， 包括沿检测方向、衔接前述承载捡测装置而设置的输送件 62; 本例的 分类方向与检测输送方向呈垂直， 机械臂 64具有一组自输送件 62上汲取受 测物、 并释放至承载器 66的汲取器 642。
承载器 66在本例中是被区分为多个组， 下方分别设置有将承载器 66沿 分类方向， 使承载器 66移出基座外， 方便取放承载器 66的导滑件 68。第一 实施例中虽仅绘示单组汲取分类装置 6， 实施本发明时， 更可以连接方式增 加汲取分类装置 6的组数， 以提供分类所需。 当汲取分类装置 6所包括的承 载器如图 3所示被分为三排， 为避免分别将各排承载器 66移出基座 3外时， 产生不必要的意外状况， 本案如图 9所示， 分别以每排承载器为一组， 对每 组承载器设置一组按钮作为止动件 60。 当操作人员按压按钮时， 将驱动处理 装置 8停止该组机械臂 64对该对应组承载器释放受测太阳能硅晶片，但仍可 维持其它组机械臂与承载器的正常供输， 从而提升产出效率。
运用上述架构， 实际操作流程如图 10: 起始步骤 900由汲取入料装置以 暴露受测太阳能硅晶片第二面的方式， 由第一面吸取硅晶片； 其次步骤 902 以第二面检测装置检测太阳能硅晶片第二面，并将所得资料输出至处理装置。 接续于步骤 904将受测太阳能硅晶片以第二面向下、 受承载检测装置承载的 方式， 输送至承载检测装置； 进行步骤 906时， 由承载检测装置检测太阳能 硅晶片第一面特性， 并传输至处理装置。
最终步骤 908， 处理装置判断受测太阳能硅晶片的分类， 并指令汲取分 类装置的汲取器自承载检测装置吸取太阳能硅晶片第一面，并以第二面向下， 置放至多个承载器之一对应分类。 依步骤 900至步骤 908， 周而复始逐片进 行自动化检测， 依据目前发明人的试运转结果， 原型机检测速率可达 2400 片 /小时， 与常见产品相较， 效率已不能仅以倍增形容。
本发明的第二实施例敬请参考图 11， 为第二实施例的方块图， 结构与第 一实施例相仿。太阳能硅晶片检测机台 2，包括基座 3'、汲取入料装置 4'、承 载检测装置 5'与汲取分类装置 6'，本例将第二面检测装置 7'安排于汲取分类 装置 6'前端， 一样可发挥本发明的效益， 处理装置 8'则提供检测讯号收发与 处理， 为自动化检测的中枢。
进一步说明第二实施例，敬请参考图 12，太阳能硅晶片检测机台 2，的基 座 3，的内侧配置处理装置 8'与气压变换装置 22'， 基座 3'上方左侧为汲取入 料装置 4，， 本例为直线性进料。 承载检测装置 5'职司运输及检测， 第二面检 测装置 7'检测第二面， 汲取分类装置 6'则进行最终的分类。基本构想与第一 实施例相仿， 不再赘述。
如图 13与图 14所示第三实施例，分别为检测机台 2"的俯视图与立面侧 视图，该后端分类系统以模组化的设计融入该检测机台 2"， 当然亦可应用于 如常见现有检测机台 (图未示)的改装， 基本上， 该分类系统衔接于该检测机 台 2"检测装置的分类端侧，并于适当位置设置例如警示灯号的警示装置 29"。
请一并参考图 15、 图 16及图 17， 其系接续来自上述检测完毕的检测讯 号， 利用检测所得的太阳能硅晶片分类信息， 就此进行机台的驱动控制与分 类操作， 除配置于具有多个承载位置 322"的基座 3"上的收纳装置 36"与供 应装置 35"外， 更藉由搬移装置 37"用以在供应装置 35"、 及收纳装置 36" 间搬移多个承载器 66"。
由图 15细俯视观察，本例的该基座 3"上间隔有六个承载位置 322"配置， 每个承载位置 322"供容置一个上述承载器， 而如图 17所示， 对应每一组承 载器 66"， 有一可水平位移汲取硅晶片所用的汲取器 642"， 当输送件 62"输 送硅晶片抵达对应的承载位置 322", 汲取器 642"可利用吸嘴汲取硅晶片， 并释放硅晶片于上述承载位置 322"中所对应的承载器 66"。
当然由图 16及图 17更清楚知悉本例的分类系统将利用处理装置的驱动， 连结供应装置 35"及收纳装置 36" ,且供应装置 35"及收纳装置 36"视承载器 66"填满与否， 决定是否通过升降器 371 "及输送带 372"移动至图 18所示的 收纳位置 361" , 并同时令供应装置 35"所容纳的承载器堆叠中， 最上方的承 载器被顶高至对应于搬移装置的端部位置 351"，以等候汲取器汲取输送件传 递来的硅晶片。 当然， 如熟于此技术者所能轻易理解， 供应装置 35"中所能 容纳的承载器数量并非限于六个， 接收承载器处亦可选择位在供应装置 35" 的底部， 且图示中留空部份也仅是说明而非必要限制条件。
如图 19及图 20先后所示， 当前文所述的六个承载位置中的任一个承载 器已达预定装载容量， 对应中央汲取器 642"的承载器 66"已经满载， 则处理 装置将驱动一个空置的承载器 66"预备替补， 且指令对应该位置的升降器 371"令承载器 66"下降， 藉此， 输送带 372"将此满载承载器 66"向图式右上 方移动， 往图 18所示右侧的收纳装置 36"方向前进， 且让空置的承载器 66" 补上原来位置。 当然， 如同前文， 收纳装置 36"的最上层位置也经常保持净 空， 故满载的承载器将抵达收纳装置 36"的收纳位置 361 "， 堆叠于收纳装置 36"中既有的承载器堆叠上方，收纳装置 36"随即将此堆叠下降，保留收纳位 置 361 "的净空。
如前段所述， 如此周而复始， 分类系统不断进行分类动作， 直至供应装 置 35"中所有承载器皆已送出或即将耗尽， 或收纳装置 36"的收纳空间已满 或将满， 方才需要警示并要求操作人员 (图未示)介入， 以补充供应装置 35" 中所欠缺的承载器， 或移出即将堆满收纳装置 36"的已满载太阳能硅晶片的 承载器堆叠。 如图 21至图 23所示的第四实施例， 于此例释为一装配有位移器的天车 的搬移装置 37"，， 图 21中， 有一容纳硅晶片的承载器 66"，已满， 并可明了 位于基座上的端部位置 351，"及收纳位置 361" '皆为净空状态； 于图 22、 23 中， 利用搬移装置 37"，， 满载承载器 66"'被移动至收纳位置 361"'， 且端部 位置 351"，由前文所示的升降机构于端部位置 351，"获得一清空承载器 66"'; 随后， 由搬移装置 37，"将清空承载器 66'"移动至遗留的承载位置 322"', 并 令处于收纳位置 36Γ"的满载承载器 66"'下降。
依照上述各实施例说明， 无论第二面检测装置配置于前端或后端， 皆可 在不翻转太阳能硅晶片的状况下提供另面检测， 自然无损坏太阳能硅晶片的 顾虑。 且因承载器的装填与取出， 均位于后端分类系统的供应装置与收纳装 置的位置， 此动作并不干涉太阳能硅晶片分类系统持续进行中的分类动作， 汲取器依然可将硅晶片交由对应的承载器容置。 亦即， 即使一位操作人员同 时兼顾数台检测机台， 也无须固定守候任一机台， 仅需在警示装置警示时适 度处理。 如此， 操作人员可同时管理多部机台而游刃有余。 因而藉由本发明 确实可以有效达成本申请的所有上述目的。
以上所述仅为本发明的较佳实施例而已， 不能以此限定本发明实施的范 围， 即凡依本发明申请的保护范围及发明说明书内容所作简单的等效变化与 修饰， 皆应仍属本发明专利涵盖的范围内。

Claims

权 利 要 求 书
1.一种太阳能硅晶片检测机台， 是供逐片捡测受测太阳能硅晶片， 且所述硅 晶片分别具有彼此相反、 且分别布设有电极的一个第一面及一个第二面， 所述机台包括：
一个基座；
设于所述基座、 并自所述第一面汲取所述受测硅晶片的汲取入料装 置；
设于所述基座、 承接来自所述汲取入料装置的受测硅晶片的第二面而 沿一个径向搬移、 并检测所述硅晶片第一面特性的承载检测装置；
设于所述基座、 并自所述第一面汲取来自承载检测装置的所述受测硅 晶片的汲取分类装置；
设于所述基座、 对应汲取入料装置或汲取分类装置之一的第二面检测 装置； 及
用以接收来自所述承载检测装置及第二面检测装置的资讯，并指令所 述汲取分类装置的处理装置。
2.如权利要求 1所述的机台， 其特征在于： 所述机台更包括一组气压变换装 置。
3.如权利要求 2所述的机台， 其特征在于： 所述汲取入料装置包括：
设置于所述基座、 供沿重力方向枢转的枢轴； 及
设置于所述枢轴、随枢轴沿一个回圈枢转、并联通至所述气压变换装 置、 供吸取所述受测太阳能硅晶片的吸嘴。
4.如权利要求 3所述的机台， 其特征在于： 所述第二面检测装置是设置于对 应所述回圈的第一位置;及所述汲取入料装置更包括一组具有多个入料座、 且所述入料座是可在一个对应所述回圈的汲取位置及一个远离汲取位置的 入料位置间移动的入料器。
5.如权利要求 1、 2、 3或 4所述的机台， 其特征在于： 所述承载检测装置包 括一组光学检测器。
6.如权利要求 1、 2、 3或 4所述的机台， 其特征在于： 所述承载检测装置包 括沿该径向设置于所述基座的承载移动件1。
7.如权利要求 6所述的机台， 其特征在于： 所述承载移动件包括两条平行皮 带及带动二条皮带的皮带轮。
8.如权利要求 1、 2、 3或 4所述的机台， 其特征在于： 所述承载检测装置包 括一组光-电特性检测器。
9.如权利要求 1、 2、 3或 4所述的机台， 其特征在于： 所述汲取分类装置包 括：
沿所述径向、 衔接承载检测装置设置于基座的输送件；
沿一个与所述径向夹一个角度、并跨越输送件的分类方向， 在一个对 应输送件的取片位置、 与远离输送件的释放位置间移动的机械臂， 所述机 械臂更具有一组供在取片位置由所述输送件上汲取受测太阳能硅晶片、 并 至释放位置释放受测太阳能硅晶片的汲取器； 及
多个分别可分离地沿机械臂分类方向设置于基座、 供承载受测太阳能 硅晶片的承载器。
10.如权利要求 9所述的机台， 其特征在于： 所述承载器被区分为多个组， 所 述机台更包含供分别将所述组承载器沿一个与径向夹一个角度的取出方 向， 在一个对应所述汲取器的上述释放位置、及一个暴露至基座外的取出 位置间移动的导滑件。
11.如权利要求 10所述的机台， 其特征在于： 更包括多个分别对应所述组承 载器、并驱动处理装置停止汲取分类装置的机械臂对所述对应组承载器释 放上述受测太阳能硅晶片的止动件。
12如权利要求 1、 2、 3或 4所述的机台， 其特征在于： 所述基座具有多个承 载位置， 且汲取分类装置包括：
多个分别置于承载位置、 承接汲取器释放的太阳能硅晶片的承载器； 供堆叠多个承载器、 并具有一个预定端部位置、 使得当位于端部位置 的承载器自堆叠中被移出时、 升降其余承载器使下一承载器至端部位置的 供应装置；
供堆叠多个承载器、 并具有一个预定收纳位置、 使得当收纳位置被置 入一个承载器时、 移动其余承载器使收纳位置被空出的收纳装置； 及
供将承载器在端部位置、 承载位置、 及收纳位置间搬移承载器的搬移装 置。
13.如权利要求 12所述的机台， 其特征在于： 所述承载位置是被区分为多个 组， 且汲取分类装置更包括：
沿一个径向传送太阳能硅晶片的输送件； 及
供自输送件汲取太阳能硅晶片的汲取器。
14.如权利要求 12所述的机台， 其特征在于： 所述承载位置是被区分为多个 组， 且汲取分类装置更包括- 沿该径向、 衔接承载检测装置设置于基座的输送件； 及
多个组数目对应于承载器分组数目、 与输送件径向夹一个角度设置、 供自输送件汲取太阳能硅晶片的汲取器。
15.如权利要求 12所述的机台， 其特征在于： 所述搬移装置包括：
多个分别对应所述承载位置设置、 供在承载位置及多个对应承载位 置的搬移位置间升降承载器的升降器； 及
至少一组贯穿搬移位置中多个搬移位置的输送带。
16.如权利要求 12所述的机台，. 其特征在于： 更包括当所述供应装置及 /或收 纳装置中堆叠的承载器达一个预定数量时， 发出警示的警示装置。
17.—种太阳能硅晶片检测方法， 是供逐片检测所述受测太阳能硅晶片， 且硅 晶片分别具有彼此相反、 且分别布设有电极的一个第一面及一个第二面， 所述机台包括汲取入料装置； 对应所述汲取入料装置的第二面检测装置； 承载检测装置； 包括一组汲取器及多个承载器的汲取分类装置； 及处理装 置， 该方法包括下列步骤：
a)由所述汲取入料装置以暴露所述受测太阳能硅晶片第二面的方式， 由第一面吸取所述硅晶片；
b)以所述第二面检测装置检测所述太阳能硅晶片第二面， 并将所得资 料输出至处理装置；
c)将所述受测太阳能硅晶片以第二面向下、 受所述承载检测装置承载 的方式， 输送至承载检测装置；
d)由所述承载检测装置检测所述太阳能硅晶片第一面特性， 并传输至 处理装置；
e)所述处理装置判断所述受测太阳能硅晶片的分类， 并指令所述汲取 分类装置的汲取器自所述承载检测装置吸取太阳能硅晶片第一面， 并 以第二面向下， 置放至所述对应该分类的一个承载器。
18.—种具承载器搬移装置太阳能硅晶片检测机台， 包括：
形成具有多个承载位置的基座；
设于所述基座、并自第一面汲取来自所述承载检测装置的受测硅晶片 的汲取分类装置；
多个分别置于所述承载位置、承接传送汲取装置释放的太阳能硅晶片 的承载器；
供堆叠多个承载器、 并具有一个预定端部位置、 使得当位于端部位 置的承载器自堆叠中被移出时、 升降其余承载器使下一承载器至端部位 置的供应装置；
供堆叠多个承载器、 并具有一个预定收纳位置、 使得当收纳位置被 置入一个承载器时、 移动其余承载器使收纳位置被空出的收纳装置； 及 供将所述承载器在端部位置、 承载位置、 及收纳位置间搬移承载器 的搬移装置。
19.如权利要求 18所述的机台， 其特征在于： 所述承载位置是被区分为多个 组， 且所述组汲取分类装置包括：
沿一个径向传送太阳能硅晶片的输送件； 及
供自输送件汲取太阳能硅晶片的汲取器。
20.如权利要求 18所述的机台， 其特征在于： 所述承载位置是被区分为多个 组， 且所述汲取分类装置包括：
沿径向、 衔接承载捡测装置设置于基座的输送件； 及
多个组数目对应于承载器分组数目、与输送件径向夹一个角度设置、 供自输送件汲取太阳能硅晶片的汲取器。
21.如权利要求 18所述的机台， 其特征在于： 所述搬移装置包括：
多个分别对应承载位置设置、供在承载位置及多个对应承载位置的 搬移位置间升降承载器的升降器； 及
至少一组贯穿搬移位置中多个搬移位置的输送带。
22.如权利要求 18所述的机台， 其特征在于： 更包含当供应装置及 /或该收纳 装置中堆叠的承载器达一个预定数量时， 发出警示的警示装置。
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CN114582765A (zh) * 2022-05-07 2022-06-03 苏州鼎纳自动化技术有限公司 一种晶片颜色检测设备
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CN114582765B (zh) * 2022-05-07 2022-07-08 苏州鼎纳自动化技术有限公司 一种晶片颜色检测设备
CN114582765A (zh) * 2022-05-07 2022-06-03 苏州鼎纳自动化技术有限公司 一种晶片颜色检测设备
CN117699185A (zh) * 2024-02-06 2024-03-15 广州蓝海机器人系统有限公司 一种硅片包装线及工作方法

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