WO2009125649A1 - Apparatus and method for attaching sheet - Google Patents
Apparatus and method for attaching sheet Download PDFInfo
- Publication number
- WO2009125649A1 WO2009125649A1 PCT/JP2009/055011 JP2009055011W WO2009125649A1 WO 2009125649 A1 WO2009125649 A1 WO 2009125649A1 JP 2009055011 W JP2009055011 W JP 2009055011W WO 2009125649 A1 WO2009125649 A1 WO 2009125649A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- adherend
- adhesive sheet
- sheet
- double
- sticking
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
Definitions
- the present invention relates to a sheet sticking apparatus and a sticking method, and more particularly, sticking a sheet to an adherend having a plurality of adherend surfaces, and cutting the sheet according to the size of each adherend surface.
- the present invention relates to a sheet sticking device and a sticking method.
- an adhesive sheet made of a double-sided adhesive sheet or the like is applied to the mating surface, and a semiconductor wafer has a protective sheet or a back surface on its front side.
- An adhesive sheet such as a die bonding sheet is attached to the side.
- An apparatus and a method for applying such an adhesive sheet are disclosed in Patent Document 1, for example.
- the sheet sticking device disclosed in this document is configured to stick adhesive sheets to a plurality of semiconductor wafers substantially simultaneously and cut the adhesive sheets according to the size of each semiconductor wafer.
- Patent Document 1 has a disadvantage that the configuration of the support means becomes complicated due to a plurality of tables that support a plurality of semiconductor wafers to be adhered. There is an inconvenience that the number of steps of conveying the adherend increases according to the number of adherends supported by the means.
- the present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to be able to affix an adhesive sheet to a plurality of adherend surfaces substantially simultaneously, and to support the adherend. It is in providing the sheet sticking apparatus and the sticking method which do not make the structure of this.
- the present invention provides a sheet sticking apparatus for sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations.
- a cutting means for cutting the adhered adhesive sheet according to the size of each adherent surface, and a recovery means for collecting an unnecessary adhesive sheet generated outside each adherent surface by the cutting are adopted. Yes.
- the present invention provides a sheet sticking apparatus for sticking a double-sided adhesive sheet to an adherend having an adherend surface at a plurality of locations.
- Support means for supporting the adherend, supply means for supplying a double-sided adhesive sheet with a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces, and the double-sided adhesive sheet for each adherent surface
- a sticking means for sticking to the surface; a cutting means for cutting the double-sided adhesive sheet attached to each of the adherend surfaces according to the size of each of the adherend surfaces; and an unnecessary adhesive sheet generated on the outside of the adherend surface by the cutting Recovery means, and the supply means, the sticking means, and the recovery means are also provided with a function of removing the release sheet temporarily attached to the double-sided adhesive sheet attached to each adherend surface.
- a configuration can also be adopted.
- the present invention provides a sheet sticking method for sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations.
- a supporting step of supporting the adherend a supplying step of supplying an adhesive sheet to a position facing each of the adherend surfaces, an attaching step of attaching the adhesive sheet to each adherend surface, and each of the adherend surfaces
- the present invention provides a sheet attaching method for attaching a double-sided adhesive sheet to an adherend having an adherend surface at a plurality of locations.
- a supporting step for supporting the adherend a supplying step for supplying a double-sided adhesive sheet having a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces, and the double-sided adhesive sheet for each surface to be adhered
- a sticking step for sticking to the surface a cutting step for cutting the double-sided adhesive sheet affixed to each of the adherend surfaces in accordance with the size of each adherent surface, and an unnecessary adhesive sheet generated on the outside of the adherend surface by the cutting
- a removal step of removing the release sheet temporarily attached to the double-sided adhesive sheet attached to each adherent surface by repeating the same steps as the supply step, the sticking step and the collecting step.
- the method of including can be taken.
- the adherend surface of the adhesive sheet in the adherend is present at a plurality of locations, by attaching the adhesive sheet to these adherend surfaces and cutting to the size of each adherent surface, An adhesive sheet can be affixed only to a necessary part of the adherend. Further, even if the adherend surface is dispersed at a plurality of locations, the adherend itself is a single member, and thus a plurality of conventional tables are not required. Further, if the supply means, the sticking means, and the collecting means are also provided with a function of removing the release sheet, the double-sided adhesive sheet is temporarily attached to the adherend surface after being stuck to the adherend surface. The necessity of providing a dedicated device for removing the release sheet can be eliminated, and the supply means, the sticking means, and the collecting means can be effectively used.
- the schematic front view of the sheet sticking apparatus which concerns on this embodiment.
- the schematic perspective view of the said sheet sticking apparatus The fragmentary sectional view of a table and a robot.
- the schematic perspective view which shows the state which peels a 2nd peeling sheet from each to-be-adhered surface.
- FIG. 1 shows a schematic front view of a sheet sticking apparatus according to the present embodiment
- FIG. 2 shows a schematic perspective view thereof.
- a sheet sticking apparatus 10 includes a table 13 (support means) for supporting a plate-like adherend W having adherend surfaces WS dispersed in a plurality of locations within a substantially same plane, and each adherend surface WS.
- a supply unit 11 for supplying the double-sided adhesive sheet A to a position facing the substrate
- a sticking unit 12 for applying a pressing force and sticking the double-sided adhesive sheet A to each adherend surface WS
- an articulated robot 15 cutting means that cuts the double-sided adhesive sheet A in accordance with the size of each adherent surface WS, and for each adherent surface WS
- a collecting means 19 for collecting the unnecessary adhesive sheet S1 generated outside.
- the adherend W is arranged in a first plate-like body W1 having a substantially square shape in plan view, and in four recesses 101 in the plane of the first plate-like body W1. And a second plate-like body W2 having a substantially square shape in plan view.
- the adherend surface WS in the present embodiment is positioned higher than the upper surface position of the first plate-like body W1, and the adherend W is bonded to a plate-like body (not shown) via the double-sided adhesive sheet A.
- it is used as a component such as a multilayer glass.
- the table 13 includes an outer table 51 having a substantially square shape in plan view, and an inner table 52 having a substantially rectangular shape in plan view disposed inside the outer table 51.
- the outer table 51 can receive the inner table 52 provided so as to be movable up and down via the lifting mechanism 52A, and is provided so as to be lifted and lowered relative to the base plate BP via the lifting mechanism 51A.
- the inner table 52 can be moved up and down so that the height position of the adherend surface WS is adjusted to a predetermined position with the upper surface of the outer table 51 as a reference position, while the outer table 51 is pressed against the pressing surface of the pressing roller 14.
- the inner table 51 can incorporate a heating unit (not shown) in preparation for the case where the double-sided adhesive sheet A is heat-sensitive adhesive.
- the supply unit 11 includes a support roller 20 that supports a raw fabric R on which a pressure-sensitive adhesive double-sided adhesive sheet A is temporarily attached between a first release sheet RL1 and a second release sheet RL2, and an original fabric R Between the peel plate 22 that peels off the first release sheet RL1 from the original fabric R, the winding roller 23 that winds up the first release sheet RL1, and the support roller 20 and the winding roller 23.
- a plurality of guide rollers 25 to 32 arranged, and a tension measuring roller 40 arranged between the guide rollers 27 and 28 and supported by the load cell 39 are provided.
- the peel plate 22, the guide rollers 27, 28, and 29 and the tension measuring roller 40 are integrally supported as a sticking angle maintaining means 37, and the second release sheet RL2 is temporarily attached by the synchronous movement with the sticking unit 12.
- the double-sided adhesive sheet A can be attached to the adherend W.
- the affixing unit 12 includes a pressing roller 14 that is supported by a portal frame 57 and that can be moved up and down by a cylinder 59.
- the supply unit 11 and the pasting unit 12 are the same as those disclosed in Japanese Patent Application No. 2005-198806 filed by the present applicant, and detailed description thereof is omitted here.
- the robot 15 includes a robot body 62 and a cutter blade 63 supported on the free end side of the robot body 62.
- the robot body 62 includes a base portion 64, first arm 65A to sixth arm 65F disposed on the upper surface side of the base 64 portion and provided to be rotatable in the directions of arrows A to F, and the tip of the sixth arm 65F. And a tool holding chuck 69 attached to the side.
- the second, third, and fifth arms 65B, 65C, and 65E are rotatably provided in the directions of arrows B, C, and E, respectively, in the Y ⁇ Z plane in FIG.
- the sixth arms 65A, 65D, and 65F are rotatably provided in the directions of arrows A, D, and F, respectively, around their axes.
- the double-sided adhesive sheet A temporarily attached with the second release sheet RL2 can be cut according to the size of each adherend surface WS.
- the second release sheet RL2 and the double-sided adhesive sheet A generated on the outside of the adherend surface WS by this cutting are referred to as an unnecessary adhesive sheet S1.
- the collection means 19 is supported on the free end side of the rotating arm 91 by a peeling roller section 18 composed of rollers 80 and 81 supported by a moving frame F, a driving roller 90 that rotates by driving of a motor M, and a spring 92. And a collection roller 93 that is in pressure contact with the outer peripheral surface of the drive roller 90.
- the moving frame F includes a front frame F1 and a rear frame F2 connected via a connecting member 83.
- the moving frame F is supported by the single-axis robot 85 and the guide rail 61 and can move in the X-axis direction. As a result, the single-axis robot 85 and the motor M are driven synchronously to move the moving frame F to the left in FIG. 1, and the separation roller unit 18 separates and collects the unnecessary adhesive sheet S1 from the adherend W.
- the roller 93 is wound up and collected.
- the robot 15 supports the suction arm 100 (see FIG. 2) with the tool holding chuck 69 and transfers the adherend W onto the inner table 52. Thereafter, the robot 15 is moved from the suction arm 100 to the cutter blade 63 and supported by the tool holding chuck 69 to prepare for cutting.
- the double-sided adhesive sheet A on which the second release sheet RL2 is temporarily attached is supplied from the original fabric R supported by the support roller 20 to a position facing each adherend surface WS of the adherend W. Is done. This supply has already been performed by the collection process in the series of sheet pasting operations performed previously (see the collection process described later).
- the double-sided adhesive sheet A affixed to each adherend surface WS of the adherend W is cut by the robot 15 according to the size of the adherend surface W together with the second release sheet RL2.
- the second release sheet RL2 is left temporarily attached to the double-sided adhesive sheet A on the adherend surface WS.
- the remaining second release sheet RL2 can be removed again by performing the same operations as in the (supplying step), (sticking step), and (collecting step). That is, (supplying step) The double-sided adhesive sheet A newly attached with the second release sheet RL2 is supplied to a position facing the adherend surface WS. (Pasting step) The double-sided adhesive sheet A is stuck to the adherend surface WS by the synchronous drive of the sticking angle maintaining means 37 and the sticking unit 12. (Recovery Step) The recovery means 19 moves to the left side in FIG.
- the newly drawn double-sided adhesive sheet A is peeled off from the adherend W and recovered by the recovery roller 93.
- the second release sheet RL2 left on the adherend surface WS is affixed to the double-sided adhesive sheet A and removed from the adherend surface WS.
- the sticking angle maintaining means 37, the sticking unit 12 and the collecting means 19 are driven synchronously and returned to the position shown in FIG. 1, a new double-sided adhesive sheet A is pulled out by a predetermined length.
- the adherend W in which only the double-sided adhesive sheet A is stuck on the adherend surface WS is transported to a subsequent process by the robot 15 that supports the suction arm 100 and is subjected to predetermined processing. . Thereafter, the same operation is repeated.
- the single adherend W has a plurality of adherend surfaces WS, it can be integrally transferred or conveyed, and at the same time, the double-sided adhesive sheet A can be affixed. Further, even if there are a plurality of surfaces to which the double-sided adhesive sheet A is to be attached, the adherend W is a single plate-like body, and therefore can be quickly transferred or conveyed.
- the table for supporting the can also be configured easily.
- the adhesive sheet S may be configured using the second release sheet RL2 as the base sheet and the double-sided adhesive sheet A as the adhesive layer, and the removing step may be omitted.
- a raw material not having the first release sheet RL1 can be used.
- the guide rollers 30, 31 and the winding roller 23 are not necessary.
- planar shape of the adherend surface is not limited to the illustrated configuration example, and may be a circle, an ellipse, a polygon, or a combination thereof.
- the sheet sticking apparatus 10 of the present invention can be employed as a sheet sticking apparatus for sticking a protective sheet to a circuit surface of a semiconductor wafer, or a mounting apparatus for integrating a semiconductor wafer and a ring frame via an adhesive sheet. .
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
Abstract
Description
このような接着シートを貼付するための装置及び方法は、例えば、特許文献1に開示されている。同文献に開示されたシート貼付装置は、複数の半導体ウエハに対して接着シートを略同時に貼付し、各半導体ウエハの大きさに合わせて接着シートを切断する構成となっている。
An apparatus and a method for applying such an adhesive sheet are disclosed in Patent Document 1, for example. The sheet sticking device disclosed in this document is configured to stick adhesive sheets to a plurality of semiconductor wafers substantially simultaneously and cut the adhesive sheets according to the size of each semiconductor wafer.
本発明は、このような不都合に着目して案出されたものであり、その目的は、複数の被着面に略同時に接着シートを貼付することができ、また被着体を支持する支持手段の構成を複雑にすることのないシート貼付装置及び貼付方法を提供することにある。 [Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to be able to affix an adhesive sheet to a plurality of adherend surfaces substantially simultaneously, and to support the adherend. It is in providing the sheet sticking apparatus and the sticking method which do not make the structure of this.
前記被着体を支持する支持手段と、前記各被着面に臨む位置に接着シートを供給する供給手段と、前記接着シートを各被着面に貼付する貼付手段と、前記各被着面に貼付された接着シートを各被着面の大きさに合わせて切断する切断手段と、前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収手段とを備える、という構成を採っている。 In order to achieve the above object, the present invention provides a sheet sticking apparatus for sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations.
A support means for supporting the adherend, a supply means for supplying an adhesive sheet to a position facing each of the adherend surfaces, an attaching means for sticking the adhesive sheet to each adherend surface, and each adherend surface. A cutting means for cutting the adhered adhesive sheet according to the size of each adherent surface, and a recovery means for collecting an unnecessary adhesive sheet generated outside each adherent surface by the cutting are adopted. Yes.
前記被着体を支持する支持手段と、一方の面に剥離シートが仮着された両面接着シートを前記各被着面に臨む位置に供給する供給手段と、前記両面接着シートを各被着面に貼付する貼付手段と、前記各被着面に貼付された両面接着シートを各被着面の大きさに合わせて切断する切断手段と、前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収手段とを備え、前記供給手段と貼付手段と回収手段とは、各被着面に貼付された両面接着シートに仮着されている前記剥離シートを除去する機能をも備える、という構成を採ることもできる。 Further, the present invention provides a sheet sticking apparatus for sticking a double-sided adhesive sheet to an adherend having an adherend surface at a plurality of locations.
Support means for supporting the adherend, supply means for supplying a double-sided adhesive sheet with a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces, and the double-sided adhesive sheet for each adherent surface A sticking means for sticking to the surface; a cutting means for cutting the double-sided adhesive sheet attached to each of the adherend surfaces according to the size of each of the adherend surfaces; and an unnecessary adhesive sheet generated on the outside of the adherend surface by the cutting Recovery means, and the supply means, the sticking means, and the recovery means are also provided with a function of removing the release sheet temporarily attached to the double-sided adhesive sheet attached to each adherend surface. A configuration can also be adopted.
前記被着体を支持する支持工程と、前記各被着面に臨む位置に接着シートを供給する供給工程と、前記接着シートを各被着面に貼付する貼付工程と、前記各被着面に貼付された接着シートを各被着面の大きさに合わせて切断する切断工程と、前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収工程とを含む、という手法を採っている。 Further, the present invention provides a sheet sticking method for sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations.
A supporting step of supporting the adherend, a supplying step of supplying an adhesive sheet to a position facing each of the adherend surfaces, an attaching step of attaching the adhesive sheet to each adherend surface, and each of the adherend surfaces A cutting step of cutting the adhered adhesive sheet according to the size of each adherent surface, and a recovery step of collecting an unnecessary adhesive sheet generated outside the adherend surface by the cutting. Yes.
前記被着体を支持する支持工程と、一方の面に剥離シートが仮着された両面接着シートを前記各被着面に臨む位置に供給する供給工程と、前記両面接着シートを各被着面に貼付する貼付工程と、前記各被着面に貼付された両面接着シートを各被着面の大きさに合わせて切断する切断工程と、前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収工程と、前記供給工程、貼付工程及び回収工程と同様の工程を繰り返して各被着面に貼付された両面接着シートに仮着されている前記剥離シートを除去する除去工程とを含む、という手法を採ることができる。 Further, the present invention provides a sheet attaching method for attaching a double-sided adhesive sheet to an adherend having an adherend surface at a plurality of locations.
A supporting step for supporting the adherend, a supplying step for supplying a double-sided adhesive sheet having a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces, and the double-sided adhesive sheet for each surface to be adhered A sticking step for sticking to the surface, a cutting step for cutting the double-sided adhesive sheet affixed to each of the adherend surfaces in accordance with the size of each adherent surface, and an unnecessary adhesive sheet generated on the outside of the adherend surface by the cutting And a removal step of removing the release sheet temporarily attached to the double-sided adhesive sheet attached to each adherent surface by repeating the same steps as the supply step, the sticking step and the collecting step. The method of including can be taken.
また、被着面が複数箇所に分散していても、被着体自体は単一の部材であるため、従来のような複数のテーブルを要しない。
更に、供給手段と貼付手段と回収手段とが剥離シートを除去する機能をも備えた構成であれば、両面接着シートを被着面に貼付した後に、当該被着面上に仮着されている剥離シートを除去するための専用装置を設ける必要性を排除でき、供給手段、貼付手段及び回収手段の有効利用を図ることができる。 According to the present invention, even if the adherend surface of the adhesive sheet in the adherend is present at a plurality of locations, by attaching the adhesive sheet to these adherend surfaces and cutting to the size of each adherent surface, An adhesive sheet can be affixed only to a necessary part of the adherend.
Further, even if the adherend surface is dispersed at a plurality of locations, the adherend itself is a single member, and thus a plurality of conventional tables are not required.
Further, if the supply means, the sticking means, and the collecting means are also provided with a function of removing the release sheet, the double-sided adhesive sheet is temporarily attached to the adherend surface after being stuck to the adherend surface. The necessity of providing a dedicated device for removing the release sheet can be eliminated, and the supply means, the sticking means, and the collecting means can be effectively used.
11 供給ユニット(供給手段)
12 貼付ユニット(貼付手段)
13 テーブル(支持手段)
15 ロボット(切断手段)
19 回収手段
A 両面接着シート(接着剤層)
RL1 第1の剥離シート
RL2 第2の剥離シート(基材シート)
S 接着シート
S1 不要接着シート
W 被着体
WS 被着面 DESCRIPTION OF
12 Sticking unit (sticking means)
13 Table (support means)
15 Robot (cutting means)
19 Collection means A Double-sided adhesive sheet (adhesive layer)
RL1 first release sheet RL2 second release sheet (base sheet)
S Adhesive sheet S1 Unnecessary adhesive sheet W Substrate WS Substrate surface
ロボット15が工具保持チャック69で吸着アーム100(図2参照)を支持し、被着体Wを内側テーブル52上に移載する。その後、ロボット15は、工具保持チャック69で吸着アーム100からカッター刃63に持ち替えて支持し、切断に備えることとなる。 (Support process)
The
図1に示されるように、支持ローラ20に支持された原反Rから第2の剥離シートRL2が仮着された両面接着シートAが被着体Wの各被着面WSに臨む位置に供給される。なお、この供給は、先に行われた一連のシート貼付動作における回収工程により既に行われている(後述の回収工程参照)。 (Supply process)
As shown in FIG. 1, the double-sided adhesive sheet A on which the second release sheet RL2 is temporarily attached is supplied from the original fabric R supported by the
貼付角度維持手段37が図1中左下方に移動する一方、その移動に同期して貼付ユニット12が同図中左側に移動することで、押圧ローラ14が第2の剥離シートRL2に仮着された両面接着シートAを押圧して被着面WSに貼付することとなる。 (Attaching process)
While the sticking angle maintaining means 37 moves to the lower left in FIG. 1, the sticking
被着体Wの各被着面WSに貼付された両面接着シートAは、ロボット15によって、第2の剥離シートRL2と共に被着面Wの大きさに合わせて切断される。 (Cutting process)
The double-sided adhesive sheet A affixed to each adherend surface WS of the adherend W is cut by the
回収手段19が図1中左側に移動するとともに、剥離ローラ部18とモータMの駆動により、被着面WSの外側に生じた不要接着シートS1を回収ローラ93で巻き取って回収する。その後、貼付角度維持手段37が上方へ移動する一方、その移動に同期して貼付ユニット12と回収手段19とが図1に示される位置に復帰する。この復帰動作中、モータMがロック状態とされることで供給ユニット11から新たな両面接着シートAが所定長さ引き出されることとなる。 (Recovery process)
As the collecting means 19 moves to the left in FIG. 1, the unnecessary adhesive sheet S 1 generated outside the adherend surface WS is wound up and collected by the collecting
以上の動作が行われた後、被着面WS上には、第2の剥離シートRL2が両面接着シートAに仮着された状態で残されていることとなる。この残された第2の剥離シートRL2は、再び(供給工程)、(貼付工程)及び(回収工程)と同様の動作を行うことで除去することができる。すなわち、(供給工程)新たに第2の剥離シートRL2が仮着された両面接着シートAを被着面WSに臨む位置に供給する。(貼付工程)貼付角度維持手段37と貼付ユニット12との同期駆動によって、両面接着シートAを被着面WSに貼付する。(回収工程)回収手段19が図1中左側に移動し、新たに引き出された両面接着シートAを被着体Wから剥離して回収ローラ93で回収する。これらの動作により、図4に示されるように、被着面WS上に残された第2の剥離シートRL2は、両面接着シートAに貼付されて被着面WS上から除去されることとなる。その後、貼付角度維持手段37、貼付ユニット12及び回収手段19が同期駆動して図1に示される位置に復帰するときに、新たな両面接着シートAが所定長さ引き出される。 (Removal process)
After the above operation is performed, the second release sheet RL2 is left temporarily attached to the double-sided adhesive sheet A on the adherend surface WS. The remaining second release sheet RL2 can be removed again by performing the same operations as in the (supplying step), (sticking step), and (collecting step). That is, (supplying step) The double-sided adhesive sheet A newly attached with the second release sheet RL2 is supplied to a position facing the adherend surface WS. (Pasting step) The double-sided adhesive sheet A is stuck to the adherend surface WS by the synchronous drive of the sticking
また、両面接着シートAを貼付すべき面が複数であっても、被着体Wは単一の板状体であるため、その移載若しくは搬送を迅速に行うことができ、被着体Wを支持するテーブルも簡易に構成することができる。 Therefore, according to such an embodiment, even if the single adherend W has a plurality of adherend surfaces WS, it can be integrally transferred or conveyed, and at the same time, the double-sided adhesive sheet A can be affixed.
Further, even if there are a plurality of surfaces to which the double-sided adhesive sheet A is to be attached, the adherend W is a single plate-like body, and therefore can be quickly transferred or conveyed. The table for supporting the can also be configured easily.
すなわち、本発明は、主に特定の実施形態に関して特に図示、説明されているが、本発明の技術的思想及び目的の範囲から逸脱することなく、以上説明した実施形態に対し、形状、位置若しくは配置等に関し、必要に応じて当業者が様々な変更を加えることができるものである。 As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
That is, the present invention has been illustrated and described mainly with respect to specific embodiments, but the shape, position, or position of the above-described embodiments can be reduced without departing from the scope of the technical idea and object of the present invention. With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Claims (4)
- 複数箇所に被着面を有する被着体に、基材シートの一方の面に接着剤層を有する接着シートを貼付するシート貼付装置において、
前記被着体を支持する支持手段と、
前記各被着面に臨む位置に接着シートを供給する供給手段と、
前記接着シートを各被着面に貼付する貼付手段と、
前記各被着面に貼付された接着シートを各被着面の大きさに合わせて切断する切断手段と、
前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収手段とを備えたことを特徴とするシート貼付装置。 In a sheet sticking apparatus for sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations,
A support means for supporting the adherend;
Supply means for supplying an adhesive sheet to a position facing each of the adherend surfaces;
Affixing means for affixing the adhesive sheet to each adherend surface;
Cutting means for cutting the adhesive sheet affixed to each adherend surface according to the size of each adherend surface;
A sheet affixing device comprising: a collection unit that collects an unnecessary adhesive sheet that is generated on the outside of each adherend surface by the cutting. - 複数箇所に被着面を有する被着体に、両面接着シートを貼付するシート貼付装置において、
前記被着体を支持する支持手段と、
一方の面に剥離シートが仮着された両面接着シートを前記各被着面に臨む位置に供給する供給手段と、
前記両面接着シートを各被着面に貼付する貼付手段と、
前記各被着面に貼付された両面接着シートを各被着面の大きさに合わせて切断する切断手段と、
前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収手段とを備え、
前記供給手段と貼付手段と回収手段とは、各被着面に貼付された両面接着シートに仮着されている前記剥離シートを除去する機能をも備えていることを特徴とするシート貼付装置。 In a sheet sticking apparatus for sticking a double-sided adhesive sheet to an adherend having an adherend surface at a plurality of locations,
A support means for supporting the adherend;
Supply means for supplying a double-sided adhesive sheet with a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces;
Affixing means for affixing the double-sided adhesive sheet to each adherend surface;
Cutting means for cutting the double-sided adhesive sheet attached to each adherend surface according to the size of each adherend surface;
A recovery means for recovering an unnecessary adhesive sheet generated on the outside of each adherent surface by the cutting,
The sheet feeding apparatus, wherein the supply unit, the pasting unit, and the collecting unit also have a function of removing the release sheet temporarily attached to the double-sided adhesive sheet that is pasted on each adherend surface. - 複数箇所に被着面を有する被着体に、基材シートの一方の面に接着剤層を有する接着シートを貼付するシート貼付方法において、
前記被着体を支持する支持工程と、
前記各被着面に臨む位置に接着シートを供給する供給工程と、
前記接着シートを各被着面に貼付する貼付工程と、
前記各被着面に貼付された接着シートを各被着面の大きさに合わせて切断する切断工程と、
前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収工程とを含むことを特徴とするシート貼付方法。 In a sheet sticking method of sticking an adhesive sheet having an adhesive layer on one surface of a base sheet to an adherend having an adherend surface at a plurality of locations,
A supporting step for supporting the adherend;
A supplying step of supplying an adhesive sheet to a position facing each of the adherend surfaces;
Affixing step of affixing the adhesive sheet to each adherend surface;
A cutting step of cutting the adhesive sheet affixed to each adherend surface according to the size of each adherend surface;
And a recovery step of recovering an unnecessary adhesive sheet generated on the outside of each adherend surface by the cutting. - 複数箇所に被着面を有する被着体に、両面接着シートを貼付するシート貼付方法において、
前記被着体を支持する支持工程と、
一方の面に剥離シートが仮着された両面接着シートを前記各被着面に臨む位置に供給する供給工程と、
前記両面接着シートを各被着面に貼付する貼付工程と、
前記各被着面に貼付された両面接着シートを各被着面の大きさに合わせて切断する切断工程と、
前記切断によって各被着面の外側に生ずる不要接着シートを回収する回収工程と、
前記供給工程、貼付工程及び回収工程と同様の工程を繰り返して各被着面に貼付された両面接着シートに仮着されている前記剥離シートを除去する除去工程とを含むことを特徴とするシート貼付方法。 In the sheet sticking method of sticking the double-sided adhesive sheet to the adherend having the adherend surface in a plurality of places,
A supporting step for supporting the adherend;
Supplying a double-sided adhesive sheet with a release sheet temporarily attached to one surface to a position facing each of the adherend surfaces;
A sticking step of sticking the double-sided adhesive sheet to each adherend surface;
A cutting step of cutting the double-sided adhesive sheet affixed to each adherend surface according to the size of each adherend surface;
A recovery step of recovering an unnecessary adhesive sheet generated outside each adherend surface by the cutting;
A removal step of removing the release sheet temporarily attached to the double-sided adhesive sheet affixed to each adherent surface by repeating the same steps as the supplying step, the attaching step and the collecting step Pasting method.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009801128495A CN101990708A (en) | 2008-04-08 | 2009-03-16 | Apparatus and method for attaching sheet |
KR1020107022887A KR101497639B1 (en) | 2008-04-08 | 2009-03-16 | Apparatus and method for attaching sheet |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008100347A JP5113599B2 (en) | 2008-04-08 | 2008-04-08 | Sheet sticking device and sticking method |
JP2008-100347 | 2008-04-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009125649A1 true WO2009125649A1 (en) | 2009-10-15 |
Family
ID=41161784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/055011 WO2009125649A1 (en) | 2008-04-08 | 2009-03-16 | Apparatus and method for attaching sheet |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5113599B2 (en) |
KR (1) | KR101497639B1 (en) |
CN (1) | CN101990708A (en) |
WO (1) | WO2009125649A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014072229A (en) * | 2012-09-27 | 2014-04-21 | Lintec Corp | Sheet sticking device and sheet sticking method |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012074657A (en) * | 2010-09-30 | 2012-04-12 | Disco Abrasive Syst Ltd | Auxiliary tool for sticking adhesive sheet |
JP2014030066A (en) * | 2013-11-14 | 2014-02-13 | Lintec Corp | Sheet sticking device and sheet sticking method |
JP2017130575A (en) * | 2016-01-21 | 2017-07-27 | 株式会社ディスコ | Fixture and processing method with fixture |
JP6678516B2 (en) * | 2016-05-31 | 2020-04-08 | リンテック株式会社 | Sheet sticking device and sticking method |
JP6779579B2 (en) * | 2017-01-31 | 2020-11-04 | 株式会社ディスコ | Judgment method, measuring device, and adhesive tape sticking device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007019239A (en) * | 2005-07-07 | 2007-01-25 | Lintec Corp | Sheet pasting apparatus and pasting method |
WO2007018041A1 (en) * | 2005-08-11 | 2007-02-15 | Lintec Corporation | Sheet application device and application method |
JP2008147249A (en) * | 2006-12-06 | 2008-06-26 | Nitto Denko Corp | Substrate adhering method and apparatus using same method |
JP2008172159A (en) * | 2007-01-15 | 2008-07-24 | Nitto Denko Corp | Method for adhering adhesive tape and adhesive tape adhering appratus using the method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2919938B2 (en) * | 1990-09-26 | 1999-07-19 | 日東電工株式会社 | How to cut an adhesive tape attached to a thin plate |
JP4311522B2 (en) * | 2002-03-07 | 2009-08-12 | 日東電工株式会社 | Adhesive sheet attaching method and apparatus, and semiconductor wafer processing method |
-
2008
- 2008-04-08 JP JP2008100347A patent/JP5113599B2/en active Active
-
2009
- 2009-03-16 WO PCT/JP2009/055011 patent/WO2009125649A1/en active Application Filing
- 2009-03-16 KR KR1020107022887A patent/KR101497639B1/en active IP Right Grant
- 2009-03-16 CN CN2009801128495A patent/CN101990708A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007019239A (en) * | 2005-07-07 | 2007-01-25 | Lintec Corp | Sheet pasting apparatus and pasting method |
WO2007018041A1 (en) * | 2005-08-11 | 2007-02-15 | Lintec Corporation | Sheet application device and application method |
JP2008147249A (en) * | 2006-12-06 | 2008-06-26 | Nitto Denko Corp | Substrate adhering method and apparatus using same method |
JP2008172159A (en) * | 2007-01-15 | 2008-07-24 | Nitto Denko Corp | Method for adhering adhesive tape and adhesive tape adhering appratus using the method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014072229A (en) * | 2012-09-27 | 2014-04-21 | Lintec Corp | Sheet sticking device and sheet sticking method |
Also Published As
Publication number | Publication date |
---|---|
KR101497639B1 (en) | 2015-03-02 |
CN101990708A (en) | 2011-03-23 |
KR20110008177A (en) | 2011-01-26 |
JP2009253083A (en) | 2009-10-29 |
JP5113599B2 (en) | 2013-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4906518B2 (en) | Adhesive tape attaching method and adhesive tape attaching apparatus using the same | |
JP5113599B2 (en) | Sheet sticking device and sticking method | |
JP2012216606A (en) | Substrate transfer method and substrate transfer device | |
JP4746017B2 (en) | Sheet sticking device and sticking method | |
JP5421746B2 (en) | Sheet peeling apparatus and peeling method | |
JP6219197B2 (en) | Sheet sticking device and sticking method | |
JP5558840B2 (en) | Sheet peeling apparatus and peeling method | |
JP4787713B2 (en) | Sheet sticking device and sticking method | |
JP5113646B2 (en) | Sheet sticking device and sticking method | |
JP5789463B2 (en) | Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method | |
JP5449937B2 (en) | Sheet peeling apparatus and peeling method | |
JP5421748B2 (en) | Sheet peeling apparatus and peeling method | |
JP5093852B2 (en) | Sheet sticking device and sticking method | |
JP5453035B2 (en) | Sheet peeling apparatus and peeling method | |
JP2011233697A (en) | Sheet peeling apparatus and peeling method | |
JP5534923B2 (en) | Sheet peeling apparatus and peeling method | |
JP5421749B2 (en) | Sheet peeling apparatus and peeling method | |
JP5421747B2 (en) | Sheet peeling apparatus and peeling method | |
JP7208747B2 (en) | Sheet sticking device and sheet sticking method | |
JP7382719B2 (en) | Sheet cutting device and sheet cutting method | |
JP2012164840A (en) | Sheet peeling device and peeling method | |
JP7149775B2 (en) | Sheet sticking device and sheet sticking method | |
JP5623056B2 (en) | Sheet peeling apparatus and peeling method | |
JP2010278282A (en) | Sheet sticking device and sticking method | |
JP5690896B2 (en) | Sheet peeling apparatus and peeling method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980112849.5 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09729255 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 20107022887 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09729255 Country of ref document: EP Kind code of ref document: A1 |