KR20110008177A - Apparatus and method for attaching sheet - Google Patents

Abstract

The table 13 which supports the to-be-adhered body W which has the to-be-adhered surface WS in several places, and the double-sided adhesive sheet A with which the 2nd peeling sheet RL2 was temporarily attached to the position which faces the to-be-adhered surface WS. The supply means 11 which supplies (), the sticking unit 12 which affixes the said double-sided adhesive sheet A to each to-be-adhered surface WS, and the double-sided adhesive sheet A to affixed to each to-be-adhered surface WS. A robot 15 for cutting the substrate according to the size of each adherend WS and a recovery means 19 for recovering the unnecessary adhesive sheet S1 generated on the outside of each adherend WS by the cutting. The sheet sticking apparatus 10 is comprised. The supply unit 11, the sticking unit 12, and the collection means 19 are also provided with the function of removing the 2nd peeling sheet RL2 which remains on each to-be-adhered surface WS.

Description

Sheet pasting device and pasting method {APPARATUS AND METHOD FOR ATTACHING SHEET}

This invention relates to a sheet sticking apparatus and a sticking method, More specifically, the sheet sticking which can cut a sheet according to the size of each to-be-adhered surface, while attaching a sheet to the to-be-adhered body which has a to-be-adhered surface in multiple places. An apparatus and a sticking method are related.

When laminating plate-like members such as glass, affixing an adhesive sheet made of a double-sided adhesive sheet or the like to the mating surface is performed, and the semiconductor wafer is a protective sheet on the front side and a die bonding sheet on the back side. Affixing an adhesive sheet is performed.

The apparatus and method for affixing such an adhesive sheet are disclosed by patent document 1, for example. The sheet sticking apparatus disclosed in this document has a structure which affixes an adhesive sheet with respect to a some semiconductor wafer substantially simultaneously, and cut | disconnects an adhesive sheet according to the magnitude | size of each semiconductor wafer.

Patent Document 1: WO 2007/018041 A1

(Initiation of invention)

(Tasks to be solved by the invention)

However, in the sheet sticking apparatus disclosed in Patent Literature 1, there is a problem that there are a plurality of tables for supporting a plurality of semiconductor wafers to be the adherend, which complicates the configuration of the support means, and the adherend to be supported by the support means. There exists a problem that the conveyance process of the said to-be-adhered body will increase with the number of.

[Purpose of invention]

SUMMARY OF THE INVENTION The present invention has been devised in view of such a problem, and an object thereof is to provide an adhesive sheet to a plurality of adherends at substantially the same time, and to provide a sheet sticking device and a patch that do not complicate the configuration of the support means for supporting the adherend. To provide a method.

In order to achieve the said objective, this invention is a sheet sticking apparatus which affixes the adhesive sheet which has an adhesive bond layer to one surface of a base material sheet to the to-be-adhered body which has a to-be-adhered surface in multiple places,

Support means for supporting the adherend, supply means for supplying an adhesive sheet to a position facing each of the adherends, affixing means for affixing the adhesive sheet to each adherend, and adhesion adhered to the adherends The cutting means which cut | disconnects a sheet according to the magnitude | size of each to-be-adhered surface, and the collection means which collect | recover the unnecessary adhesive sheet which generate | occur | produces on the outer side of each to-be-adhered surface are employ | adopted.

Moreover, this invention is a sheet sticking apparatus which affixes a double-sided adhesive sheet to the to-be-adhered body which has a to-be-adhered surface in multiple places,

Support means for supporting the to-be-adhered body, supply means for supplying a double-sided adhesive sheet having a release sheet attached to one surface to a position facing each of the to-be-adhered surfaces, and attaching the double-sided adhesive sheet to each to-be-adhered surface It is provided with a sticking means, the cutting means which cuts the double-sided adhesive sheet affixed to each said to-be-adhered surface to the magnitude | size of each to-be-adhered surface, and the collection | recovery means which collect | recovers the unnecessary adhesive sheet which arises in the outer side of each to-be-adhered surface by the said cutting, The said supply means, the sticking means, and a collection means can employ | adopt the structure which also has a function which removes the said peeling sheet adhering to the double-sided adhesive sheet affixed on each to-be-adhered surface.

Moreover, this invention is a sheet sticking method which affixes the adhesive sheet which has an adhesive bond layer to one surface of a base material sheet to the to-be-adhered body which has a to-be-adhered surface in multiple places,

A support step of supporting the adherend, a supply step of supplying an adhesive sheet to a position facing each of the adherends, a sticking step of attaching the adhesive sheet to each adherend, and adhesion of the adherends on the adherends The cutting method which cuts a sheet according to the magnitude | size of each to-be-adhered surface, and the collection method of including the collection | recovery process which collect | recovers the unnecessary adhesive sheet which generate | occur | produces on the outer side of each to-be-adhered surface by the said cutting | disconnection are employ | adopted.

Moreover, this invention is a sheet sticking method which affixes a double-sided adhesive sheet to the to-be-adhered body which has a to-be-adhered surface in multiple places,

A support step of supporting the adherend, a supply step of supplying a double-sided adhesive sheet having a release sheet attached to one surface to a position facing each of the adherends, and affixing the double-sided adhesive sheet to each adherend A bonding step, a cutting step of cutting the double-sided adhesive sheet affixed to each of the adherends according to the size of each adherend, a recovery step of recovering the unnecessary adhesive sheet generated on the outside of each adherend by the cutting; The method of including the removal process which removes the said peeling sheet adhering to the double-sided adhesive sheet affixed on each to-be-adhered surface by repeating the same process as a supply process, a sticking process, and a collection process can be employ | adopted.

According to the present invention, even when the adherend of the adhesive sheet in the adherend exists in a plurality of places, the adhesive sheet is attached to these adherends and cut to the size of each adherend, so that the adhesive sheet is only necessary for the adherend. Can be attached.

Moreover, even if a to-be-adhered surface is disperse | distributed in several places, since a to-be-adhered body is a single member, it does not require the several table like the conventional one.

Moreover, if a supply means, the sticking means, and a collection means are also equipped with the function which removes a peeling sheet, after attaching a double-sided adhesive sheet to a to-be-adhered surface, the exclusive apparatus for removing the peeling sheet adhering on the said to-be-adhered surface. The necessity of installing the can be eliminated, and the effective use of the supply means, the attaching means and the recovery means can be achieved.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic front view of the sheet sticking apparatus which concerns on this embodiment.
2 is a schematic perspective view of the sheet sticking device.
3 is a partial cross-sectional view of a table and a robot.
4 is a schematic perspective view showing a state of peeling a second release sheet from each adhered surface.

(The best mode for carrying out the invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings.

1, the schematic front view of the sheet sticking apparatus which concerns on embodiment of this invention is shown, and the schematic perspective view is shown in FIG. In these figures, the sheet sticking apparatus 10 is a table 13 (support means) which supports the plate-shaped adherend W which has the adherend surface WS distributed in the several place in substantially the same plane, and each adherence Supply unit 11 (supply means) which supplies the double-sided adhesive sheet A in the position which faces the surface WS, and apply | attaches the pressure, and affixes the said double-sided adhesive sheet A to each to-be-adhered surface WS. After attaching the double-sided adhesive sheet A to the sticking unit 12 (sticking means) and each to-be-adhered surface WS, the articulated joint which cuts the double-sided adhesive sheet A to the magnitude | size of each to-be-adhered surface WS. It is comprised by the robot 15 (cutting means) of a die | seat, and the collection | recovery means 19 which collect | recovers the unnecessary adhesive sheet S1 which arises in the outer side of each to-be-adhered surface WS.

As shown in FIG. 3 and FIG. 4, the adherend W has a substantially rectangular first plate-like body W1 and a concave portion at four in-plane surfaces of the first plate-like body W1. It consists of the substantially square 2nd plate-shaped object W2 by planar view arrange | positioned at 101. As shown in FIG. The to-be-adhered surface WS in this embodiment is located higher than the upper surface position of the 1st plate-shaped object W1, and the to-be-adhered body W is a plate-shaped body etc. which are not shown in figure through the double-sided adhesive sheet A to bond together. For example, it is used as component parts, such as a multilayer glass.

As shown in FIGS. 3 and 4, the table 13 has an approximately rectangular outer table 51 in plan view, and an approximately rectangular inner table in plan view disposed inside the outer table 51. It consists of 52. The outer table 51 can accommodate the inner table 52 which can be elevated by the lifting mechanism 52A, and is attached to the base plate BP via the lifting mechanism 51A. Thereby, the inner table 52 can be raised and lowered so that the height position of the adherend surface WS can be adjusted to a predetermined position with the upper surface of the outer table 51 as a reference position, while the outer table 51 is a pressing roller. On the basis of the pressing surface of (14), it is possible to move up and down in accordance with the thicknesses of the double-sided adhesive sheet A and the second release sheet RL2, so that the pressing force per unit area of the pressing roller 14 is kept substantially constant. It is installed. In addition, the inner table 51 can incorporate a heating means (not shown) in preparation for the case where the double-sided adhesive sheet A is thermally adhesive.

The said supply unit 11 supports the support roller which supports the raw material sheet R to which the pressure-sensitive adhesive double-sided adhesive sheet A was temporarily attached between 1st peeling sheet RL1 and 2nd peeling sheet RL2 ( 20), the peeling plate 22 which peels the 1st peeling sheet RL1 from the said raw material sheet R, and the winding roller which winds up the 1st peeling sheet RL1 in the middle of unwinding the raw material sheet R ( 23, a plurality of guide rollers 25 to 32 disposed between the support roller 20 and the winding roller 23, and the guide rollers 27 and 28, and the tension supported by the load cell 39 The measuring roller 40 is provided and comprised. The peel plate 22, the guide rollers 27, 28, 29, and the tension measuring roller 40 are integrally supported as the sticking angle holding means 37, and are moved by synchronous movement with the sticking unit 12. The double-sided adhesive sheet A to which the 2 release sheets RL2 were temporarily attached can be stuck to the to-be-adhered body W. FIG.

The sticking unit 12 is supported by a door frame 57 and is constituted by a pressing roller 14 provided to be liftable by a cylinder 59.

In addition, the said supply unit 11 and the sticking unit 12 are the same as that of what was disclosed in Japanese Patent Application No. 2005-198806 for which it applied by this applicant, and its detailed description is abbreviate | omitted here.

As shown in FIG. 3, the robot 15 includes a robot main body 62 and a cutter blade 63 supported on the free end side of the robot main body 62. The robot body 62 is provided with a base portion 64, first arms 65A to sixth arms 65F disposed on an upper surface side of the base 64 portion and rotatably installed in the directions of arrows A to F; And a tool holding chuck 69 attached to the tip side of the sixth arm 65F. The second, third, and fifth arms 65B, 65C, and 65E are rotatably provided in the directions of arrows B, C, and E in the Y × Z plane in FIG. 3, respectively. The fourth and sixth arms 65A, 65D, and 65F are rotatably provided around the axis in the directions of arrows A, D, and F, respectively. Thereby, the double-sided adhesive sheet A to which the 2nd peeling sheet RL2 was temporarily attached can be cut | disconnected according to the magnitude | size of each to-be-adhered surface WS. In addition, the 2nd peeling sheet RL2 and the double-sided adhesive sheet A which generate | occur | produced on the outer side of the to-be-adhered surface WS by this cutting | disconnection are called unnecessary adhesive sheet S1.

The recovery means 19 includes a peeling roller portion 18 composed of rollers 80 and 81 supported by the moving frame F, a driving roller 90 rotating by driving the motor M, and a rotary arm. It is supported by the free end side of 91, and is comprised by the collection | recovery roller 93 which press-contacts the outer peripheral surface of the drive roller 90 via the spring 92. As shown in FIG. The moving frame F consists of the front frame F1 and the rear frame F2 connected through the connecting member 83, and is supported by the single axis robot 85 and the guide rail 61 in the X-axis direction. It is movable. Thereby, the uniaxial robot 85 and the motor M drive synchronously, and the movement frame F is moved to the left direction in FIG. 1, and the unnecessary adhesive sheet S1 is adhered to the peeling roller part 18 by a to-be-adhered body. It peels from (W), it winds up with the collection roller 93, and is collect | recovered.

Next, the operation of the present embodiment will be described. In addition, since the sticking operation of the double-sided adhesive sheet A is substantially the same as that of Japanese Patent Application No. 2005-198806, the description is simplified.

(Supporting process)

The robot 15 supports the suction arm 100 (see FIG. 2) by the tool holding chuck 69, and moves the adherend W onto the inner table 52. Thereafter, the robot 15 is changed from the suction arm 100 to the cutter blade 63 by the tool holding chuck 69 and supported, thereby preparing for cutting.

(Supply process)

As shown in FIG. 1, the double-sided adhesive sheet A to which the 2nd peeling sheet RL2 was temporarily attached from the raw material sheet | seat R supported by the support roller 20 has each adhered surface of the to-be-adhered body W ( Supplied at a location facing WS). In addition, this supply was already performed by the collection | recovery process in the series of sheet sticking operation performed previously (refer the collection | recovery process of the following).

(Sticking step)

While the sticking angle holding means 37 moves downward to the left in FIG. 1, the sticking unit 12 moves to the left in the drawing in synchronization with the movement, so that the pressing roller 14 moves the second peeling sheet RL2. It presses on the double-sided adhesive sheet A temporarily attached to and adheres to the to-be-adhered surface WS.

(Cutting process)

The double-sided adhesive sheet A affixed to each adherend surface WS of the adherend W is cut by the robot 15 to the size of the adherend surface W together with the second peeling sheet RL2. .

(Recovery process)

The recovery means 19 moves to the left side in FIG. 1, and the unnecessary roller sheet S1 generated on the outer side of the adherend surface WS by the drive of the peeling roller 18 and the motor M is recovered. It is wound up by (93) and collected. Thereafter, the sticking angle holding means 37 moves upward, while the sticking unit 12 and the collecting means 19 return to the position shown in FIG. 1 in synchronization with the movement. During this return operation, the motor M is brought into the locked state so that the new double-sided adhesive sheet A is pulled out of the supply unit 11 by a predetermined length.

(Removal process)

After the above operation is performed, on the adherend surface WS, the second peeling sheet RL2 is left in a state in which the double-sided adhesive sheet A is temporarily attached. This remaining 2nd peeling sheet RL2 can be removed again by performing the same operation | movement as (supply process), (sticking process), and (recovery process). That is, (supply process) The double-sided adhesive sheet A to which the 2nd peeling sheet RL2 was newly attached is supplied to the position which faces the to-be-adhered surface WS. (Attaching step) The double-sided adhesive sheet A is affixed on the adherend surface WS by the synchronous drive between the sticking angle holding means 37 and the sticking unit 12. (Recovery Step) The recovery means 19 moves to the left side in FIG. 1, and the newly drawn double-sided adhesive sheet A is peeled from the adherend W and recovered by the recovery roller 93. By these operations, as shown in FIG. 4, the 2nd peeling sheet RL2 left on the to-be-adhered surface WS is stuck to the double-sided adhesive sheet A, and is removed on the to-be-adhered surface WS. Then, when the sticking angle holding means 37, the sticking unit 12, and the collection means 19 are driven synchronously to return to the position shown in Fig. 1, a new double-sided adhesive sheet A is pulled out a predetermined length. .

In this way, the to-be-adhered body W in which only the double-sided adhesive sheet A was stuck on the to-be-adhered surface WS is conveyed to a post process by the robot 15 which supported the adsorption arm 100, and predetermined process is performed. do. Then, the same operation is repeated.

Therefore, according to this embodiment, even if it has a several to-be-adhered surface WS in the single to-be-adhered body W, integral conveyance or conveyance is enabled and the double-sided adhesive sheet A is affixed substantially simultaneously. can do.

Moreover, even if there are more than one surface which affixes the double-sided adhesive sheet A, since the to-be-adhered body W is a single plate-shaped object, it can carry out the conveyance or conveyance quickly, and supports the to-be-adhered body W Tables can also be easily configured.

As mentioned above, although the best structure, method, etc. for implementing this invention are disclosed by the said description, this invention is not limited to this.

In other words, the present invention is mainly illustrated and described with respect to specific embodiments, but without departing from the technical spirit and the desired range of the present invention, and with respect to the embodiments, the shapes, positions, or arrangements of the embodiments described above, Therefore, those skilled in the art can make various changes.

For example, in the said embodiment, although the case where the double-sided adhesive sheet A was affixed on the to-be-adhered surface WS was shown and demonstrated, this invention is not limited to this, An adhesive bond layer is made to one surface of a base material sheet. It is good also as the sheet sticking apparatus 10 which sticks this installed adhesive sheet S to the to-be-adhered surface WS. In this case, the 2nd peeling sheet RL2 is used as a base sheet, the double-sided adhesive sheet A is used as an adhesive bond layer, the adhesive sheet S is comprised, and a removal process may be skipped.

Moreover, in the said embodiment, although the case where 2nd peeling sheet RL2 was removed from double-sided adhesive sheet A in the same operation | movement as when affixing double-sided adhesive sheet A to a to-be-adhered surface WS was demonstrated, You may convey to the post process from the table 13, without peeling 2 peeling sheet RL2.

In addition, the raw material sheet which does not have the said 1st peeling sheet RL1 can also be used, and in this case, the guide rollers 30 and 31, the winding roller 23, etc. become unnecessary.

In addition, the planar shape of a to-be-adhered surface is not limited to the structural example of illustration, A circular shape, an ellipse, a polygon, etc. may be sufficient, and a combination thereof may be sufficient as it.

Moreover, the sheet sticking apparatus 10 of this invention can be employ | adopted as the sheet sticking apparatus which affixes a protective sheet to the circuit surface of a semiconductor wafer, or the mounting apparatus which integrates a semiconductor wafer and a ring frame via an adhesive sheet.

10 sheet pasting device
11 Supply unit (feed means)
12 sticking unit (sticking means)
13 tables (support means)
15 Robot (Cutting Means)
19 Recovery Means
A double-sided adhesive sheet (adhesive layer)
RL1 first peeling sheet
RL2 2nd peeling sheet (base material sheet)
S adhesive sheet
S1 unnecessary adhesive sheet
W adherend
WS deposition surface

Claims (4)

In the sheet sticking apparatus which affixes the adhesive sheet which has an adhesive bond layer to one surface of a base material sheet to the to-be-adhered body which has a to-be-adhered surface in several places,
Support means for supporting the adherend;
Supply means for supplying an adhesive sheet to a position facing each of the adherends;
Bonding means for affixing the adhesive sheet to each adherend;
Cutting means for cutting the adhesive sheet affixed to each of the adherends according to the size of each adherend;
And a recovery means for collecting the unnecessary adhesive sheet generated on the outside of each adhered surface by the cutting. In the sheet sticking apparatus which affixes a double-sided adhesive sheet to the to-be-adhered body which has a to-be-adhered surface in several places,
Support means for supporting the adherend;
Supply means for supplying a double-sided adhesive sheet having a release sheet temporarily attached to one surface to a position facing each of the above-described adherends;
Bonding means for affixing the double-sided adhesive sheet to each adherend;
Cutting means for cutting the double-sided adhesive sheet affixed to each of the adherends according to the size of each adherend;
A recovery means for recovering the unnecessary adhesive sheet generated on the outside of each adhered surface by the cutting;
The said sheet supply means, the sticking means, and a collection means are also equipped with the function to remove the said peeling sheet adhering to the double-sided adhesive sheet affixed on each to-be-adhered surface, The sheet sticking apparatus characterized by the above-mentioned. In the sheet sticking method which affixes the adhesive sheet which has an adhesive bond layer to one surface of a base material sheet to the to-be-adhered body which has a to-be-adhered surface in several places,
A support step for supporting the adherend;
A supplying step of supplying an adhesive sheet to a position facing each of the adherends;
A sticking step of attaching the adhesive sheet to each adherend;
A cutting step of cutting the adhesive sheet affixed to each of the adherends according to the size of each adherend;
And a recovery step of recovering the unnecessary adhesive sheet generated on the outside of each adhered surface by the cutting. In the sheet sticking method which affixes a double-sided adhesive sheet to the to-be-adhered body which has a to-be-adhered surface in several places,
A support step for supporting the adherend;
A supplying step of supplying a double-sided adhesive sheet having a release sheet adhering to one surface to a position facing the respective adherends;
A sticking step of attaching the double-sided adhesive sheet to each adherend;
A cutting step of cutting the double-sided adhesive sheet affixed to each of the adherends according to the size of each adherend;
A recovery step of recovering the unnecessary adhesive sheet generated on the outside of each adhered surface by the cutting;
And a removing step of removing the release sheet that is temporarily attached to the double-sided adhesive sheet affixed to each adhered surface by repeating the same steps as the supplying step, the sticking step, and the recovering step.

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