JP5981822B2 - Sheet sticking device and sheet sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

A belt-shaped die bonding sheet, a belt-shaped base sheet temporarily attached to one surface side of the die bonding sheet, and a belt-shaped cover sheet temporarily attached to the other surface side of the die bonding sheet. 2. Description of the Related Art A sheet sticking apparatus that uses a sheet base material to stick a die bonding sheet to a wafer is known (for example, see Patent Document 1).
The laminated body which laminated | stacked the protective material in the position different from the adhesive sheet on a peeling sheet is disclosed by patent document 2, for example.

Japanese Patent Laying-Open No. 2005-306516 JP 2004-35836 A

  Since the sheet base material employed in the sheet sticking device described in Patent Document 1 must first peel only the cover sheet and then stick the adhesive sheet to the wafer, the adhesive sheet peels off together with the cover sheet. In order not to stutter, the temporary attachment force between the base sheet and the adhesive sheet must be set larger than the temporary attachment force between the cover sheet and the adhesive sheet. Moreover, when the laminated body as described in patent document 2 is employ | adopted for the sheet sticking apparatus described in patent document 1, not only the temporary attachment force of each release sheet and an adhesive sheet but each release sheet and protection You must also consider the temporary attachment strength with the material.

  However, for example, in the case of an adhesive sheet that does not have a sticking direction, such as a double-sided adhesive sheet or a single-layer adhesive sheet, if the temporary attachment force is set as described above, the laminate is set in the opposite direction. Causes the inconvenience that the adhesive sheet is taken up by the take-up roller together with the base sheet, and the adhesive sheet cannot be attached to the adherend.

  An object of the present invention is to provide a sheet sticking device that can arbitrarily select a release sheet on the side to be temporarily attached and peeled off an adhesive sheet from the first and second release sheets, and stick the adhesive sheet to an adherend. And providing a sheet sticking method.

In order to achieve the above-mentioned object, the sheet sticking device of the present invention is subjected to a predetermined treatment on one surface of the adhesive sheet, so that a temporary attachment force exceeding a predetermined temporary attachment force is obtained or less. The first release sheet is laminated through the temporary attachment force variable material, and the adhesive sheet is attached to the adherend from the laminate in which the second release sheet is laminated on the other surface of the adhesive sheet with the predetermined temporary attachment force. In the sheet sticking device, the temporary attachment force variable material is subjected to the predetermined process when the predetermined process is performed and the temporary attachment force exceeds the predetermined temporary attachment force and becomes less than that. A temporary attachment force before the predetermined temporary attachment force is greater than the predetermined temporary attachment force, and when the predetermined treatment is performed, the temporary attachment force exceeds the predetermined temporary attachment force, and the temporary attachment force exceeds the predetermined temporary attachment force. The temporary attachment force before the above process is applied is the predetermined temporary attachment force. And also smaller, feeding means for feeding the pre-Symbol laminate, and peeling means for delaminating the laminate, the delaminated by peeling means, first release sheet and the second said adhesive sheet is temporarily adhered and a pressing means for affixing two said adhesive sheet from either one above of the release sheet is pressed against the adherend, the implementation of the predetermined processing to the temporary force application variable material, the non-implementation, the stripping means In this case, a configuration is adopted in which processing means capable of selecting the release sheet on the side on which the adhesive sheet is temporarily attached is provided.

On the other hand, in the sheet sticking method of the present invention, one surface of the adhesive sheet is subjected to a temporary attachment force varying material that exceeds a predetermined temporary attachment force and has a temporary attachment force of less than or equal to a predetermined temporary attachment force. Te first release sheet is laminated to a sheet sticking method for sticking the other surface of the adhesive sheet from the predetermined temporary adhesive strength in the laminate in which the second release sheet is laminated to the adhesive sheet to an adherend In the case where the temporary attachment force variable material is subjected to the predetermined treatment and becomes a temporary attachment force exceeding the predetermined temporary attachment force and less than that, the temporary attachment force before the predetermined treatment is applied is When the predetermined temporary attachment force is greater than the predetermined temporary attachment force and exceeds the predetermined temporary attachment force, the predetermined processing is performed. The previous temporary attachment force is smaller than the predetermined temporary attachment force. A feeding step of feeding the pre-Symbol stack, either the a peeling step of the laminate to delaminate, delaminated by the delamination step, the adhesive sheet is first release sheet and of the second release sheet which is temporarily stuck or the other performs a pressing step of attaching presses the adhesive sheet to an adherend from above, the implementation of the predetermined processing to the temporary force application variable material, the non-implementation, the adhesive sheet is temporarily adhered in the peeling step The structure which performs the process process which can select the peeling sheet of the side to be performed is employ | adopted.

  According to the sheet sticking device of the present invention as described above, the processing means performs or does not perform the predetermined processing on the laminated body on which the temporary attachment force variable material is stacked, so that the first and second release sheets The release sheet on the side that is temporarily attached and peeled off the adhesive sheet can be selected at will (the first and second release sheet on the side that is peeled off without temporarily attaching the adhesive sheet) It can be selected as desired), and the inconvenience that the adhesive sheet cannot be applied to the adherend can be solved regardless of the orientation of the laminate.

  In addition, by providing the inspection means, the inspection means can detect the orientation regardless of the orientation of the laminate, so that the inconvenience that the adhesive sheet cannot be attached to the adherend is eliminated. be able to. In addition, among the first and second release sheets, the release sheet on the side to temporarily attach and peel the adhesive sheet having an abnormality can be selected at will (in the first and second release sheets, The release sheet on the side to be peeled off without temporarily attaching the abnormal adhesive sheet can be selected at will), and the problem of sticking the abnormal adhesive sheet to the adherend can be solved.

(A) is a perspective view of the laminated body which concerns on 1st Embodiment of this invention, (B) is sectional drawing of (A). The front view of the sheet sticking apparatus which concerns on 1st Embodiment and 2nd Embodiment. (A)-(D) are operation | movement explanatory drawings of the sheet sticking apparatus which concerns on 1st Embodiment. (A) is a perspective view of the laminated body which concerns on 2nd Embodiment, (B) is sectional drawing of (A). (A)-(D) is operation | movement explanatory drawing of the sheet sticking apparatus which concerns on 2nd Embodiment.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
As shown in FIG. 1, the laminate LS <b> 1 in the first embodiment has a predetermined shape of an adhesive sheet AS and a first peeling layer laminated on one surface (upper surface in FIG. 1B) side of the adhesive sheet AS. The sheet RL1, the second release sheet RL2 stacked on the other surface (the lower surface in FIG. 1B) side of the adhesive sheet AS, and one surface (FIG. 1) are provided on the outer side in the surface direction of the adhesive sheet AS. A spacer part SP in which the first release sheet RL1 is laminated on the (B) middle upper surface side and the second release sheet RL2 is laminated on the other surface (lower surface in FIG. 1B) side, and the first release sheet RL1 A first temporary attachment force variable material VL1 as a temporary attachment force variable material that is provided between the adhesive sheet AS and a predetermined treatment and that has a temporary attachment force that exceeds the predetermined temporary attachment force by being subjected to a predetermined treatment; 2 is provided between the release sheet RL2 and the spacer part SP, Processing is constituted by a second temporary force application variable material VL2 as temporary force application variable material to be less temporary adhesive strength exceeds a predetermined temporary adhesive strength by being subjected.

The adhesive sheet AS is composed of a single adhesive layer and can be exemplified by one having a thickness of about 1 μm to 5000 μm. The thickness may be greater or less than that, and the first temporary adhering force variable material VL1 It is provided at a predetermined interval between the second release sheet RL2.
The spacer portion SP is configured in a belt shape and includes an arc-shaped concave portion SPA corresponding to the outer periphery of the adhesive sheet AS, and is provided between the second temporary attachment force variable material VL2 and the first release sheet RL1. Examples of what constitutes the spacer portion SP include those having the same composition and configuration as the adhesive sheet AS, those composed of paper, resin, varnish, printing ink, and the like, and those appropriately combined. You may use what can be hardened | cured by fixing energy, such as a hot air, an ultraviolet-ray, infrared rays, a microwave, cold wind, natural wind.
The first and second release sheets RL1 and RL2 can be exemplified by those having a thickness of about 1 μm to 5000 μm, and may be thicker or thinner than those, and may be made of paper, resin, or the like. Moreover, it is comprised with strip | belt-shaped members, such as what combined them suitably, and peeling agents, such as a silicon treatment, are laminated | stacked on at least one surface (both surfaces which face in FIG.2 (B)). Note that the part where the first or second temporary attachment force variable materials VL1 and VL2 are laminated may not have the release agent.

The first and second temporary adhering force variable materials VL1 and VL2 can be exemplified by those having a thickness of about 1 μm to 5000 μm, and the thickness may be larger or smaller. The first and second temporary adhering force variable materials VL1 and VL2 can be formed of an adhesive whose adhesive strength is reduced by irradiating energy rays such as ultraviolet rays, infrared rays, and microwaves, which are predetermined treatments. The same composition and configuration may be used, or different compositions and configurations may be used.
Accordingly, the temporary attachment force between the adhesive sheet AS and the first release sheet RL1 (hereinafter referred to as “first sheet temporary attachment force”) is a predetermined temporary attachment force, that is, the temporary attachment force between the adhesive sheet AS and the second release sheet RL2 (hereinafter “ When the energy beam is not irradiated, the first sheet temporary attachment force does not become equal to or less than the second sheet temporary attachment force, as shown in FIG. As shown in the lower left figure, the peeling mode is such that the adhesive sheet AS is peeled from the second peeling sheet RL2. On the other hand, when the energy beam is irradiated, the first sheet temporary attachment force exceeds the second sheet temporary attachment force and becomes less than that, and the adhesive sheet AS is peeled off as shown in the lower right diagram of FIG. It becomes the peeling mode peeled from the sheet RL1. Thereby, the release sheet of the side which temporarily adhere | attaches and peels adhesive sheet AS among 1st, 2nd release sheets RL1 and RL2 can be selected at will.
Further, the temporary attachment force between the spacer portion SP and the second release sheet RL2 (hereinafter referred to as “second spacer temporary attachment force”) is a predetermined temporary attachment force, that is, the temporary attachment force between the spacer portion SP and the first release sheet RL1 (hereinafter referred to as “first release sheet RL1”). If the energy beam is not irradiated, the second spacer temporary attachment force does not become lower than the first spacer temporary attachment force, and the lower left of FIG. As shown in the figure, the spacer portion SP is peeled off from the first release sheet RL1. On the other hand, when the energy beam is irradiated, the second spacer temporary attachment force exceeds the first spacer temporary attachment force and becomes less than that, and the spacer portion SP is peeled off from the second release sheet RL2. Thereby, among the first and second release sheets RL1 and RL2, the release sheet on the side on which the spacer portion SP is temporarily attached and released can be selected as desired.
The first temporary attachment variable material VL1 is provided along the longitudinal direction in the center of the first release sheet RL1, and the temporary attachment force between the first temporary attachment variable member VL1 and the adhesive sheet AS regardless of whether or not the energy beam is irradiated. Is set smaller than the adhesive force between the wafer WF as the adherend and the adhesive sheet AS.
The second temporary attachment force variable material VL2 includes a concave portion VL2A corresponding to the concave portion SPA formed in the spacer portion SP, and is provided along the longitudinal direction on both sides of the second release sheet RL2.

Next, a sheet sticking apparatus for sticking the adhesive sheet AS of the laminate LS1 to the wafer WF as an adherend will be described.
In the following, without giving a reference figure, for example, when directions such as up, down, left, right, or front and back are indicated, all of FIG. The top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction orthogonal to the page. .

  The sheet sticking apparatus 1 includes a feeding means 2 for feeding the laminate LS1, a first peeling means 3 as a peeling means for peeling the laminate LS1, and a first temporary attachment force variable material VL1 and a second temporary attachment force variable material VL2. The processing means 4 capable of selecting a release sheet from which the adhesive sheet is temporarily attached and peeled off by the first peeling means 3 depending on whether or not the predetermined processing is performed, and feeding the laminate LS1 to the processing means 4 One of the first and second release sheets RL1 and RL2 provided on the upstream side in the direction, inspected with the inspection means 5 for inspecting the laminate LS1, and delaminated by the first release means 3 and temporarily attached with the adhesive sheet AS On the other hand, pressing means 7 for pressing and sticking the adhesive sheet AS to the wafer WF from above, and a first one for peeling one of the first and second release sheets RL1 and RL2 from the adhesive sheet AS attached to the wafer WF. And a peeling means 8 in its entirety above the table 92 with a support surface 91 for supporting the wafer WF by a suction means such as vacuum pumps and vacuum ejector (not shown) is supported on a frame (not shown).

  The feeding means 2 is driven by a support roller 21 that supports the laminated body LS1, a guide roller 22, a drive roller 24 that is driven by a rotation motor 23 as a drive device, and a rotation motor 25 as a drive device. The left-side partial sheet LS1L is sandwiched between the drive roller 26 and the drive roller 26 that winds up the laminate LS1 portion (hereinafter referred to as “left-side partial sheet LS1L”) that is peeled off by the 1 peeling means 3 and fed to the left side. A pinch roller 27 and a collection roller 29 that is driven by a rotation motor 28 as a driving device and collects the left partial sheet LS1L are provided.

  The first peeling means 3 includes a peeling roller 31 around which a laminated body LS1 portion peeled by the first peeling means 3 and fed to the right side (hereinafter referred to as “right row partial sheet LS1R”), a guide roller 32, And a collection roller 34 that is driven by a rotation motor 33 as a drive device and collects the right partial sheet LS1R.

  The processing means 4 is disposed on both sides of the laminate LS1, and irradiates the first temporary energy variable material VL1 or the second temporary energy variable material VL2 with the first and second energy rays EW1, EW2 as a predetermined process. First and second energy beam irradiation means 41 and 42 are provided.

  The inspection means 5 includes an optical sensor, an ultrasonic sensor, an imaging means such as a camera, a sensor 51 including a contact type sensor, and the like. The inspection means 5 is provided on both sides of the stacked body LS1, and includes, for example, an adhesive sheet AS and a spacer portion SP. The first and second temporary attachment force variable materials VL1 and VL2 are inspected for abnormalities such as breakage, dirt, chipping and displacement, and the position of the first temporary attachment force variable material VL1 between the layers of the stacked body LS1 and the layers of the stacked body LS1 The position of the second temporary attachment force variable material VL2 can be inspected (position confirmation).

  The pressing means 7 includes a linear motor 73 as a driving device supported by a first slider 72 of a linear motor 71 as a driving device, and a pressing roller 75 rotatably supported by a slider 74 of the linear motor 73. Yes.

  The second peeling means 8 includes a linear motor 81 as a driving device supported by the second slider 76 of the linear motor 71 and a peeling supported by the slider 82 of the linear motor 81 via a rotation motor 83 as a driving device. A pinch roller 85 that sandwiches the left partial sheet LS1L between the roller 84 and the peeling roller 84 is provided.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, the operator sets the stacked body LS1 as shown in FIG. At that time, when the laminated body LS1 is divided into the right row partial sheet LS1R and the left row partial sheet LS1L with the peeling roller 31 as a boundary, the first sheet temporary attachment force is larger than the second sheet temporary attachment force, and the second spacer temporary attachment force is increased. Since the adhesion force is larger than the first spacer temporary adhesion force, the adhesive sheet AS is easily peeled off from the second release sheet RL2, and the spacer portion SP is easily peeled off from the first release sheet RL1. As a result, the first release sheet RL1 to which the adhesive sheet AS is temporarily attached via the first temporary attachment force variable material VL1 is formed as the left partial sheet LS1L without compromising any technique. 2 The second release sheet RL2 to which the spacer portion SP is temporarily attached via the temporary attachment force variable material VL2 is formed as the right partial sheet LS1R.

  Next, the feeding means 2 drives the rotation motors 23, 25, 28, the second peeling means 8 drives the rotation motor 83, the first peeling means 3 drives the rotation motor 33, and the laminate LS1. When the detecting means (not shown) detects that the adhesive sheet AS has reached a predetermined position, the feeding means 2, the second peeling means 8, and the first peeling means 3 are rotated by the rotation motors 23, 25, 28, respectively. The drive of 83 and 33 is stopped. At the time of this extension, when the inspection means 5 drives the sensor 51 to inspect the laminate LS1 and no abnormality is confirmed in the adhesive sheet AS, as shown in FIG. The first release sheet RL1 to which the adhesive sheet AS is temporarily attached via the material VL1 is used as the left-side partial sheet LS1L, and the second release to which the spacer portion SP is temporarily attached via the second temporary attachment force variable material VL2 The sheet RL2 is the right partial sheet LS1R.

Thereafter, when the wafer WF is placed on the support surface 91 of the table 92 by a transfer means (not shown), the suction means (not shown) is driven to hold the wafer WF by suction. As a result, as shown in FIG. 2, the wafer WF is positioned immediately below the adhesive sheet AS.
Then, the pressing means 7 drives the linear motors 73 and 71 to lower the pressing roller 75 and move the pressing roller 75 in the right direction, whereby the adhesive sheet AS is pressed from above the first release sheet RL1. Affixed to wafer WF. Thereafter, when the detecting means (not shown) detects that the pressing roller 75 has reached the position indicated by the two-dot chain line in FIG. 2, the pressing means 7 stops driving the linear motor 71.

Next, after the second peeling means 8 drives the linear motor 81 and lowers the peeling roller 84 and the pinch roller 85, the rotation motor 83 is driven to rotate the peeling roller 84 and at the same time the pressing means 7 is linear. The motor 71 is driven to move the rollers 84 and 85 to the right. Thereby, 1st peeling sheet RL1 is peeled from adhesive sheet AS, and adhesive sheet AS is affixed on the wafer WF. Thereafter, when detection means (not shown) detects that each of the rollers 84 and 85 has reached the position indicated by a two-dot chain line in FIG. 2, the pressing means 7 and the second peeling means 8 are moved to the linear motor 71 and the rotation motor 83. Then, the linear motors 73 and 81 are driven to raise the pressing roller 75 and the rollers 84 and 85.
Next, after a suction unit (not shown) is stopped and the suction and holding of the wafer WF is released, a transfer unit (not shown) holds the wafer WF with the adhesive sheet affixed and transfers it to another process.

  Then, with the second peeling means 8 stopping the rotation motor 83, the pressing means 7 drives the linear motor 71 to return the pressing roller 75 and the rollers 84 and 85 to the positions indicated by the solid lines in FIG. . In synchronism with this movement, the feeding means 2 drives the rotation motors 23, 25, 28, feeds the laminate LS 1 from the support roller 21, winds the left partial sheet LS 1 L with the collection roller 29, and first peeling means 3 drives the rotation motor 33 to wind the right partial sheet LS1R by the collection roller 34. Thereafter, the same operation as described above is repeated.

  Here, when an abnormality is confirmed in the adhesive sheet AS by the inspection unit 5, the processing unit 4 drives the first energy beam irradiation unit 41, and as shown in FIG. 3B, the first temporary attachment force variable material VL1. Is irradiated with the first energy beam EW1. Thereby, the first sheet temporary attachment force becomes smaller than the second sheet temporary attachment force, the adhesive sheet AS in which an abnormality is detected is fed out in a state of being temporarily attached to the right partial sheet LS1R by the first peeling means 3, Collected by the collection roller 34.

Further, as shown by a two-dot chain line in FIG. 2, when the laminated body LS1 is set on the support roller 21 in the reverse direction, the position where the first or second temporary attachment force variable materials VL1 and VL2 are laminated is shown. The reverse set can be confirmed by the inspection means 5 inspecting. When receiving this confirmation, the processing means 4 drives the first and second energy beam irradiation means 41 and 42, and as shown in FIG. 3C, the first and second temporary attachment force variable materials VL1 and VL2 are applied. The second and first energy rays EW2 and EW1 are irradiated. Thereby, the first sheet temporary attachment force becomes smaller than the second sheet temporary attachment force, and the second spacer temporary attachment force becomes smaller than the first spacer temporary attachment force. As a result, the second release sheet RL2 on which the adhesive sheet AS and the second temporary attachment force variable material VL2 are temporarily attached is formed as the left-side partial sheet LS1L, and the spacer portion SP and the first temporary attachment force variable material VL1 are formed. Temporarily attached first release sheet RL1 is formed as right partial sheet LS1R.
In addition, when abnormality is confirmed in the adhesive sheet AS by the inspection unit 5, the processing unit 4 stops driving the second energy beam irradiation unit 42 without stopping the driving of the first energy beam irradiation unit 41. As shown in FIG. 3D, the irradiation of the second energy beam EW2 to the first temporary attachment variable material VL1 is stopped. Thereby, since the first sheet temporary attachment force is larger than the second sheet temporary attachment force, the adhesive sheet AS in which the abnormality is detected is fed out in a state of being temporarily attached to the right-side partial sheet LS1R by the first peeling means 3, Collected by the collection roller 34.

  According to the first embodiment as described above, the processing unit 4 may or may not irradiate the first energy ray EW1 on the stacked body LS1 on which the first temporary attachment force variable material VL1 is stacked. Among the two release sheets RL1 and RL2, the release sheet on the side to which the adhesive sheet AS is temporarily attached and peeled can be selected at will (the first and second release sheets RL1 and RL2, the adhesive sheet AS The release sheet on the side to be peeled off without being temporarily attached can be selected at will), and the adhesive sheet AS cannot be attached to the wafer WF regardless of the orientation of the laminate LS1. Can be resolved. In addition, among the first and second release sheets RL1 and RL2, the release sheet on the side to temporarily attach and peel the abnormal adhesive sheet AS can be selected at will (first and second release sheets). Of the sheets RL1 and RL2, the release sheet on the side to be peeled without temporarily attaching the abnormal adhesive sheet AS can be selected at will), and the abnormal adhesive sheet AS is stuck to the wafer WF. Can be solved.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
The laminated body LS2 of the second embodiment is different from the laminated body LS1 of the first embodiment in that the first temporary attachment force variable material VR1 and the second temporary attachment force variable material VL2 instead of the first temporary attachment force variable material VL1 and the second temporary attachment force variable material VL2. The difference is that a temporary attachment force variable material VR2 is provided.
That is, as shown in FIG. 4, the laminate LS <b> 2 includes an adhesive sheet AS having a predetermined shape, and a first release sheet RL <b> 1 laminated on one surface (upper surface in FIG. 4B) side of the adhesive sheet AS. The second release sheet RL2 laminated on the other surface (lower surface in FIG. 4B) side of the adhesive sheet AS, and one surface (FIG. 4B) provided on the outer side in the surface direction of the adhesive sheet AS. The first release sheet RL1 is laminated on the middle (upper surface) side and the second release sheet RL2 is laminated on the other surface (lower surface in FIG. 4B), the second release sheet RL2, and the adhesive sheet A first temporary attachment variable material VR1 as a temporary attachment force variable material provided between the AS and subjected to a predetermined treatment so that the temporary attachment force exceeds a predetermined temporary attachment force and becomes a temporary attachment force more than that; and a first release sheet It is provided between RL1 and the spacer part SP, and a predetermined process is performed. Is constituted by a second temporary force application variable material VR2 as temporary force application variable material comprising a more temporary adhesive strength exceeds a predetermined temporary wearing force is to be.

The first and second temporary attachment force variable materials VR1 and VR2 can be configured by an adhesive or the like that increases the adhesive force by irradiating energy rays such as ultraviolet rays, infrared rays, and microwaves, for example, for example, It can be formed in a strip shape having the same thickness and shape as the first temporary attachment force variable material VL1 and the second temporary attachment force variable material VL2.
Accordingly, when the second sheet temporary attachment force and the first spacer temporary attachment force are set to be smaller than the predetermined temporary attachment force, that is, the first sheet temporary attachment force and the second spacer temporary attachment force, respectively, when the energy beam is not irradiated. 4B, the adhesive sheet AS and the spacer portion SP are peeled off from the second release sheet RL2 and the first release sheet RL1, respectively. On the other hand, when the energy beam is irradiated, the second sheet temporary attachment force and the first spacer temporary attachment force exceed the first sheet temporary attachment force and the second spacer temporary attachment force and become more than that. FIG. As shown in FIG. 4, the adhesive sheet AS and the spacer portion SP are peeled off from the first release sheet RL1 and the second release sheet RL2, respectively. Thereby, the release sheet of the side which temporarily adhere | attaches and peels adhesive sheet AS among 1st, 2nd release sheets RL1 and RL2 can be selected at will.

Even when such a laminated body LS2 is adopted in the sheet sticking apparatus 1 shown in FIG. 2, when the laminated body LS2 is divided into the right row partial sheet LS2R and the left row partial sheet LS2L with the peeling roller 31 as a boundary, During the automatic operation of the sheet sticking apparatus 1 shown in FIG. 2, when no abnormality is confirmed in the adhesive sheet AS, the adhesive sheet AS is easily peeled from the second release sheet RL2, and the spacer portion SP is simply Is peeled from the first release sheet RL1. As a result, as shown in FIG. 5A, the first release sheet RL1 to which the adhesive sheet AS and the second temporary attachment force variable material VR2 are temporarily attached is formed as the left-side partial sheet LS2L, and the spacer portion SP. The second release sheet RL2 to which the first temporary attachment force variable material VR1 is temporarily attached is formed as the right partial sheet LS1R.
And when abnormality is confirmed by adhesive means AS by inspection means 5, processing means 4 drives the 2nd energy ray irradiation means 42, and as shown in Drawing 5 (B), it is in 1st temporary attachment force variable material VR1. Irradiate the second energy beam EW2. Thereby, the second sheet temporary attachment force becomes larger than the first sheet temporary attachment force, and the adhesive sheet AS in which an abnormality is detected is fed out in a state of being temporarily attached to the right-side partial sheet LS2R by the first peeling means 3, Collected by the collection roller 34.

Further, as shown in FIG. 5C, when the laminate LS2 is set on the support roller 21 in the reverse direction, the processing means 4 receives the confirmation of the inspection means 5 and the processing means 4 is the first and second energy beam irradiation means 41. , 42 are driven and the first and second temporary attachment force variable materials VR1, VR2 are irradiated with the first and second energy rays EW1, EW2, as shown in FIG. Thereby, the second sheet temporary attachment force becomes larger than the first sheet temporary attachment force, and the first spacer temporary attachment force becomes larger than the second spacer temporary attachment force. As a result, the second release sheet RL2 to which the adhesive sheet AS is temporarily attached via the first temporary attachment force variable material VR1 is formed as the left partial sheet LS2L, and the spacer portion via the second temporary attachment force variable material VR2. A first release sheet RL1 to which SP is temporarily attached is formed as a right partial sheet LS1R.
In this case, when an abnormality is confirmed in the adhesive sheet AS by the inspection unit 5, the processing unit 4 stops driving the first energy beam irradiation unit 41 without stopping driving the second energy beam irradiation unit 42, As shown in FIG. 5D, irradiation of the first energy beam EW1 to the first temporary attachment force variable material VR1 is stopped. Thereby, since the second sheet temporary attachment force is smaller than the first sheet temporary attachment force, the adhesive sheet AS in which an abnormality is detected is fed out in a state of being temporarily attached to the right-side partial sheet LS2R by the first peeling means 3, Collected by the collection roller 34.

  According to the second embodiment as described above, the same effect as that of the first embodiment can be obtained.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

In the laminates LS1 and LS2, the first temporary attachment force variable materials VL1 and VR1 are provided in a strip shape along the longitudinal direction of the first release sheet RL1, but the same shape as the adhesive sheet AS or a slightly larger circle or more than the adhesive sheet AS. You may make it interspersed as a rectangular sheet.
Further, it is linear without including the concave portion VL2A corresponding to the concave portion SPA formed in the second temporary attachment force variable material VL2 and the concave portion VR2A corresponding to the concave portion SPA formed in the second temporary attachment force variable material VR2. You may form in a strip shape.
Further, in the first embodiment, instead of at least one of the first temporary attachment force variable material VL1 and the second temporary attachment force variable material VL2 in which the temporary attachment force is reduced by the predetermined processing, the temporary attachment force is increased by the predetermined processing. In the second embodiment, instead of at least one of the first temporary attachment force variable material VR1 and the second temporary attachment force variable material VR2 in which the temporary attachment force is increased by the predetermined processing, the temporary processing force is temporarily determined by the predetermined processing. You may control what irradiation of the 1st and 2nd energy rays EW1 and EW2 as a predetermined | prescribed process is appropriately used for what has a low adhering power.
Furthermore, without providing the inspection means 5 in the sheet sticking apparatus 1, the operator may inspect the adhesive sheet AS visually and control the irradiation state of the energy rays EW1 and EW2 by manual input by the operator.
Furthermore, the first temporary attachment variable materials VL1 and VR1 may be provided between both the first release sheet RL1 and the second release sheet RL2 and the adhesive sheet AS. In this case, of the first and second release sheets RL1 and RL2, the peel force for temporarily attaching and peeling the adhesive sheet AS is larger than the peel force of the other release sheet, or the adhesive sheet AS What is necessary is just to set it as the structure which the process means 4 irradiates with an energy ray suitably so that the peeling force of the direction which wants to peel without temporarily attaching | attaching may become smaller than the peeling force of the other peeling sheet.
Further, the second temporary attachment force variable materials VL2 and VR2 may be provided between both the first release sheet RL1 and the second release sheet RL2 and the spacer portion SP. In this case, of the first and second release sheets RL1 and RL2, the spacer portion SP that is temporarily attached to be peeled off has a larger peel force than the other release sheet, or the spacer portion SP. What is necessary is just to set it as the structure which the process means 4 irradiates with an energy ray suitably so that the peeling force of the direction which wants to peel without temporarily attaching | attaching may become smaller than the peeling force of the other peeling sheet.
Further, the first temporary attachment force variable material VL1 and the second temporary attachment force variable material VL2 may be provided on the same surface side with respect to the first and second release sheets RL1 and RL2, or the first temporary attachment force variable material VR1 and the first temporary attachment force variable material VR1. You may provide 2 temporary attachment force variable material VR2 in the same surface side with respect to 1st, 2nd peeling sheet RL1 and RL2. In these cases, the processing unit 4 may be configured to be able to divide the region irradiated with the energy rays within the same plane.

  In addition, the type and material of the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS includes a base sheet and an adhesive layer in addition to the single adhesive layer as in the above-described embodiment. Two or more layers such as two layers, one having an intermediate layer between the base sheet and the adhesive layer, or other layers may be used. The semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, and the like. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, dicing tape, and die attach film, but any other sheet or film. A sheet having an arbitrary use and shape such as a tape can be applied. Further, the adherend may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. Moreover, as a to-be-adhered body, not only a glass plate, a steel plate, a resin plate, a board | substrate etc., and other members but the member, articles | goods, etc. of arbitrary forms can also be made into object. Furthermore, it is also possible to target a wafer in which a pattern circuit is formed on the surface of the wafer.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 ... Sheet sticking apparatus 2 ... Feeding means 3 ... 1st peeling means 4 ... Processing means 5 ... Inspection means 7 ... Pressing means AS ... Adhesive sheet RL1, RL2 ... 1st and 2nd peeling sheets RS1, RS2 ... Laminate VL1, VR1... First temporary attachment force variable material (temporary attachment force variable material)

Claims (2)

The first release sheet is laminated on one surface of the adhesive sheet via a temporary attachment force variable material that exceeds the predetermined temporary attachment force and becomes a temporary attachment force that is less than or equal to the predetermined temporary attachment force. A sheet sticking device for sticking the adhesive sheet to an adherend from a laminate in which the second release sheet is laminated with the predetermined temporary attachment force on the other surface of the adhesive sheet ,
When the temporary attachment force variable material is subjected to the predetermined treatment and becomes a temporary attachment force that exceeds the predetermined temporary attachment force and is less than that, the temporary attachment force before the predetermined treatment is applied is: If the predetermined temporary attachment force is greater than the predetermined temporary attachment force and the temporary attachment force exceeds the predetermined temporary attachment force, the pre-determined processing is performed. The temporary attachment force is smaller than the predetermined temporary attachment force,
And feeding means for feeding out the previous Symbol laminate,
Peeling means for peeling the laminate from each other;
Pressing means for pressing and adhering the adhesive sheet to the adherend from either one of the first release sheet and the second release sheet, which are delaminated by the peeling means and temporarily attached to the adhesive sheet; Prepared,
The implementation of the predetermined processing to the temporary force application variable material, the non-implementation, the sheet sticking apparatus characterized by having an adhesive sheet processing means with selectable release sheet on the side that is temporarily stuck with said peeling means. The first release sheet is laminated on one surface of the adhesive sheet via a temporary attachment force variable material that exceeds the predetermined temporary attachment force and becomes a temporary attachment force that is less than or equal to the predetermined temporary attachment force. A sheet sticking method for sticking the adhesive sheet to an adherend from a laminate in which the second release sheet is laminated with the predetermined temporary attachment force on the other surface of the adhesive sheet ,
When the temporary attachment force variable material is subjected to the predetermined treatment and becomes a temporary attachment force that exceeds the predetermined temporary attachment force and is less than that, the temporary attachment force before the predetermined treatment is applied is: If the predetermined temporary attachment force is greater than the predetermined temporary attachment force and the temporary attachment force exceeds the predetermined temporary attachment force, the pre-determined processing is performed. The temporary attachment force is smaller than the predetermined temporary attachment force,
And the feeding process of feeding the previous Symbol laminate,
A peeling step for delamination of the laminate,
A pressing step of pressing and adhering the adhesive sheet to an adherend from either one of the first release sheet and the second release sheet that have been delaminated in the peeling step and the adhesive sheet is temporarily attached; Done
The implementation of the predetermined processing to the temporary force application variable material, the non-implementation, the sheet sticking method adhesive sheet in the stripping step and performing a temporarily attached to the side of the release sheet can be selected process steps.

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