JP5973302B2 - Laminated body - Google Patents

Description

  The present invention relates to a laminate.

A belt-shaped die bonding sheet, a belt-shaped base sheet temporarily attached to one surface side of the die bonding sheet, and a belt-shaped cover sheet temporarily attached to the other surface side of the die bonding sheet. 2. Description of the Related Art A sheet sticking apparatus that uses a sheet base material to stick a die bonding sheet to a wafer is known (for example, see Patent Document 1).
The laminated body which laminated | stacked the protective material in the position different from the adhesive sheet on a peeling sheet is disclosed by patent document 2, for example.

Japanese Patent Laying-Open No. 2005-306516 JP 2004-35836 A

  The sheet base material employed in the sheet sticking apparatus described in Patent Document 1 first peels only the cover sheet, and then the adhesive sheet must be stuck to the wafer. Therefore, the temporary attachment force between the base sheet and the adhesive sheet must be set larger than the temporary attachment force between the cover sheet and the adhesive sheet. Moreover, when the laminated body as described in patent document 2 is employ | adopted for the sheet sticking apparatus described in patent document 1, not only the temporary attachment force of each release sheet and an adhesive sheet but each release sheet and protection You must also consider the temporary attachment strength with the material. That is, in such a laminate (a laminate having at least a three-layer structure), when one or a plurality of laminate components are peeled from the laminate, where each laminate component is temporarily attached and peeled off. Such a disadvantage is caused because the layer form after peeling (hereinafter referred to as “layer form after peeling”) is not clear.

  The objective of this invention is providing the laminated body which can clarify the layer form after peeling.

In order to achieve the above object, a laminate of the present invention includes an adhesive sheet having a predetermined shape, a first release sheet temporarily attached to one surface side of the adhesive sheet, and the other surface side of the adhesive sheet. A second release sheet temporarily attached to the adhesive sheet, and a spacer portion provided on the outer side in the surface direction of the adhesive sheet, the first release sheet and the second release sheet on one surface side and the other surface side of the spacer portion. A sheet is temporarily attached, and a temporary attachment force between the first release sheet and the adhesive sheet is larger than a temporary attachment force between the second release sheet and the adhesive sheet. A temporary attachment force increasing region is provided , and the temporary attachment force between the second release sheet and the spacer portion is larger than the temporary attachment force between the first release sheet and the spacer portion. the second temporary adhesion force increased area is provided, that We have adopted the growth.

On the other hand, another laminate of the present invention is temporarily attached to an adhesive sheet having a predetermined shape, a first release sheet temporarily attached to one surface side of the adhesive sheet, and the other surface side of the adhesive sheet. A second release sheet and a spacer portion provided on the outer side in the surface direction of the adhesive sheet, and the first release sheet and the second release sheet are temporarily attached to one surface side and the other surface side of the spacer portion. Between the second release sheet and the adhesive sheet, there is a first temporary attachment force reduction region in which the temporary attachment force is a temporary attachment force that is smaller than the temporary attachment force between the first release sheet and the adhesive sheet. A second temporary attachment force reduction between the first release sheet and the spacer portion, wherein the temporary attachment force is a temporary attachment force that is smaller than the temporary attachment force between the second release sheet and the spacer portion; An area is provided, and the adhesive sheet and the first temporary attachment force are reduced. Region and the second temporary adhesion force reduction area, their planar shapes are adopted a configuration that is formed smaller than the first release sheet and the second release sheet.

  According to the laminate of the present invention as described above, the first temporary attachment force increasing region is provided between the first release sheet and the adhesive sheet, and according to another laminate of the present invention, the second release sheet Since the first temporary adhesive force reduction region is provided between the adhesive sheet and the adhesive sheet, when the second release sheet is released in any laminate, the adhesive sheet is released from the first release sheet together with the second release sheet. Can be prevented, and the layer form after peeling can be clarified.

  Further, in the laminate of the present invention, a second temporary attachment force increasing region is provided between the second release sheet and the spacer portion, and in another laminate of the present invention, between the first release sheet and the spacer portion. If the second temporary attachment force reduction region is provided on the second release sheet, in any laminate, when the second release sheet is released, only the second release sheet remains with the spacer portion temporarily attached onto the first release sheet. Can be prevented from peeling off, and the layer form after peeling can be clarified.

(A) is a perspective view of the laminated body which concerns on 1st Embodiment of this invention, (B) is sectional drawing of (A). The front view of the sheet sticking apparatus which concerns on 1st Embodiment and 2nd Embodiment. (A) is a perspective view of the laminated body which concerns on 2nd Embodiment of this invention, (B) is sectional drawing of (A).

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
As shown in FIG. 1, the laminated body LS1 in the first embodiment includes an adhesive sheet AS having a predetermined shape, a spacer portion SP provided on the outer side in the surface direction of the adhesive sheet AS, and one surface of the adhesive sheet AS ( The first release sheet RL1 temporarily attached to the upper surface in FIG. 1B and the one surface (upper surface in FIG. 1B) side of the spacer portion SP, and the other surface of the adhesive sheet AS (FIG. 1 ( B) provided between the second release sheet RL2 temporarily attached to the middle lower surface) side and the other surface of the spacer part SP (lower surface in FIG. 1B), and between the first release sheet RL1 and the adhesive sheet AS. Between the second release sheet RL2 and the spacer portion SP, and the temporary attachment force increasing region PR1 in which the temporary attachment force is larger than the temporary attachment force between the second release sheet RL2 and the adhesive sheet AS. The temporary attachment force is provided in the first release sheet RL Is constituted by a second temporary adhesion force increased area PR2 made large becomes temporarily stuck force than the temporary adhesive strength between the spacer SP and.

The adhesive sheet AS is composed of a single adhesive layer and can be exemplified by one having a thickness of about 1 μm to 5000 μm. The thickness may be larger or smaller, and the first temporary adhesion increasing region PR1 and It is provided at a predetermined interval between the second release sheet RL2.
The spacer portion SP is formed in a band shape, and includes an arc-shaped concave portion SPA corresponding to the outer periphery of the adhesive sheet AS, and is provided between the second temporary attachment force increasing region PR2 and the first release sheet RL1. Examples of what constitutes the spacer portion SP include those having the same composition and configuration as the adhesive sheet AS, those composed of paper, resin, varnish, printing ink, and the like, and those appropriately combined. You may use what can be hardened | cured by fixing energy, such as a hot air, an ultraviolet-ray, infrared rays, a microwave, cold wind, natural wind.
The first and second release sheets RL1 and RL2 can be exemplified by those having a thickness of about 1 μm to 5000 μm, and may be thicker or thinner than those, and may be made of paper, resin, or the like. Moreover, it is comprised with strip | belt-shaped members, such as what combined them suitably, and peeling agents, such as a silicon treatment, are laminated | stacked on at least one surface (both surfaces which face in FIG.2 (B)). It should be noted that the part where the first or second temporary attachment force increasing regions PR1 and PR2 are laminated may not have a release agent.

The first and second temporary attachment force increasing regions PR1 and PR2 can be exemplified by those having a thickness of about 0 μm to 5000 μm, and may be larger than that. The first and second temporary attachment force increasing regions PR1 and PR2 are formed by applying an adhesive or a primer on the first and second release sheets RL1 and RL2, or the surfaces of the release agents of the first and second release sheets RL1 and RL2. Can be formed by subjecting the surface to an unevenness treatment or by heat-treating the part temporarily attached with the adhesive sheet AS or the spacer portion SP, which may have the same composition or configuration, or may have different compositions or configurations. .
The first temporary attachment force increasing region PR1 is provided along the longitudinal direction at the center of the first release sheet RL1, and the temporary attachment force between the first temporary attachment force increasing region PR1 and the adhesive sheet AS is the wafer WF as an adherend. And the adhesive force between the adhesive sheet AS and the adhesive sheet AS.
The second temporary attachment force increasing region PR2 includes a concave portion PR2A corresponding to the concave portion SPA formed in the spacer portion SP, and is provided along the longitudinal direction on both sides of the second release sheet RL2.

Next, a sheet sticking apparatus for sticking the adhesive sheet AS of the laminate LS1 to the wafer WF as an adherend will be described.
In the following, without giving a reference figure, for example, when directions such as up, down, left, right, or front and back are indicated, all of FIG. The top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction orthogonal to the page. .

  The sheet sticking apparatus 1 includes a feeding unit 2 that feeds out the laminate LS1, a first peeling unit 3 that delaminates the laminate LS1, and a first peeling unit 3 that is delaminated by the first peeling unit 3 and temporarily attached with an adhesive sheet AS. A pressing unit 7 that presses and adheres the adhesive sheet AS to the wafer WF from the release sheet RL1 and a second release unit 8 that peels the first release sheet RL1 from the adhesive sheet AS attached to the wafer WF are illustrated. The whole is supported by a frame (not shown) above a table 92 having a support surface 91 for supporting the wafer WF by suction means such as a vacuum pump or a vacuum ejector.

  The feeding means 2 is driven by a support roller 21 that supports the laminated body LS1, a guide roller 22, a driving roller 24 that is driven by a rotating motor 23 as a driving device, and a rotating motor 25 that is a driving device. Driving to wind up the unnecessary laminate LS8 from which the spacer portion SP is temporarily attached onto the second release sheet RL2 from the body LS1 via the second temporary attachment force increasing region PR2 and the used laminate LS9 from which the adhesive sheet AS has been peeled off A pinch roller 27 that sandwiches the used laminated body LS9 between the roller 26 and the driving roller 26, and a collection roller 29 that is driven by a rotation motor 28 as a driving device and collects the used laminated body LS9. Yes.

  The first peeling means 3 includes a peeling roller 31 around which the unnecessary laminate LS8 is wound, a guide roller 32, and a collection roller 34 that is driven by a rotation motor 33 as a drive device and collects the unnecessary laminate LS8. I have.

  The pressing means 7 includes a linear motor 73 as a driving device supported by a first slider 72 of a linear motor 71 as a driving device, and a pressing roller 75 rotatably supported by a slider 74 of the linear motor 73. Yes.

  The second peeling means 8 includes a linear motor 81 as a driving device supported by the second slider 76 of the linear motor 71 and a peeling supported by the slider 82 of the linear motor 81 via a rotation motor 83 as a driving device. A pinch roller 85 that sandwiches the used laminate LS9 between the roller 84 and the peeling roller 84 is provided.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, the operator sets the stacked body LS1 as shown in FIG. At that time, when the laminate LS1 is divided into the unnecessary laminate LS8 and the used laminate LS9 to which the adhesive sheet AS is temporarily attached with the peeling roller 31 as a boundary, the temporary attachment force increasing region PR1 and the adhesive sheet AS are temporarily attached. The adhesive force is larger than the temporary attachment force between the second release sheet RL2 and the adhesive sheet AS, and the temporary attachment force between the second temporary attachment force increasing region PR2 and the spacer portion SP is the temporary attachment force between the first release sheet RL1 and the spacer portion SP. The adhesive sheet AS is easily peeled off from the second release sheet RL2, while the spacer portion SP is easily peeled off from the first release sheet RL1, and is unnecessary without imposing any technique on the operator. The laminated body LS8 and the used laminated body LS9 to which the adhesive sheet AS is temporarily attached are formed.
Then, the feeding means 2 drives the rotation motors 23, 25, and 28, the second peeling means 8 drives the rotation motor 83, and the first peeling means 3 drives the rotation motor 33, and the laminate LS1. When the detecting means (not shown) detects that the adhesive sheet AS has reached a predetermined position, the feeding means 2, the second peeling means 8, and the first peeling means 3 are rotated by the rotation motors 23, 25, 28, respectively. The drive of 83 and 33 is stopped.

Thereafter, when the wafer WF is placed on the support surface 91 of the table 92 by a transfer means (not shown), the suction means (not shown) is driven to hold the wafer WF by suction. As a result, as shown in FIG. 2, the wafer WF is positioned immediately below the adhesive sheet AS.
Then, the pressing means 7 drives the linear motors 73 and 71 to lower the pressing roller 75 and move the pressing roller 75 in the right direction, whereby the adhesive sheet AS is pressed from above the first release sheet RL1. Affixed to wafer WF. Thereafter, when the detecting means (not shown) detects that the pressing roller 75 has reached the position indicated by the two-dot chain line in FIG. 2, the pressing means 7 stops driving the linear motor 71.

Next, after the second peeling means 8 drives the linear motor 81 and lowers the peeling roller 84 and the pinch roller 85, the rotation motor 83 is driven to rotate the peeling roller 84 and at the same time the pressing means 7 is linear. The motor 71 is driven to move the rollers 84 and 85 to the right. Thereby, 1st peeling sheet RL1 is peeled from adhesive sheet AS, and adhesive sheet AS is affixed on the wafer WF. Thereafter, when detection means (not shown) detects that each of the rollers 84 and 85 has reached the position indicated by a two-dot chain line in FIG. 2, the pressing means 7 and the second peeling means 8 are moved to the linear motor 71 and the rotation motor 83. Then, the linear motors 73 and 81 are driven to raise the pressing roller 75 and the rollers 84 and 85.
Next, after a suction unit (not shown) is stopped and the suction and holding of the wafer WF is released, a transfer unit (not shown) holds the wafer WF with the adhesive sheet affixed and transfers it to another process.

  Then, with the second peeling means 8 stopping the rotation motor 83, the pressing means 7 drives the linear motor 71 to return the pressing roller 75 and the rollers 84 and 85 to the positions indicated by the solid lines in FIG. . In synchronism with this movement, the feeding means 2 drives the rotation motors 23, 25, 28, feeds the laminated body LS1 from the support roller 21, winds up the used laminated body LS9 by the collection roller 29, and first peeling means. 3 drives the rotation motor 33 and winds up the unnecessary laminate LS8 by the collection roller 34. At this time, since the post-peeling layer form of the laminate LS1 is clarified, the new adhesive sheet AS is securely peeled from the first release sheet RL1 without being peeled off from the first release sheet RL1. 1 is transported to a position capable of facing the wafer WF while temporarily attached to the release sheet RL1. Thereafter, the same operation as described above is repeated.

  According to the first embodiment as described above, since the first temporary attachment force increasing region PR1 is provided between the first release sheet RL1 and the adhesive sheet AS, when the second release sheet RL2 is released, the adhesive sheet The laminated body LS1 which can prevent AS from adhering to the said 2nd peeling sheet RL2 and peeling from 1st peeling sheet RL1, and can make the layer form after peeling clear can be provided.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
The laminated body LS2 of the second embodiment is different from the laminated body LS1 of the first embodiment in that the first temporary attachment force decreasing region PL1 and the second temporary attachment force increasing region PR1 instead of the first temporary attachment force increasing region PR1 and the second temporary attachment force increasing region PR2. The difference is that a temporary attachment force reduction region PL2 is provided.
That is, as shown in FIG. 3, the laminated body LS <b> 2 includes an adhesive sheet AS having a predetermined shape, a spacer portion SP provided on the outer side in the surface direction of the adhesive sheet AS, and one surface of the adhesive sheet AS (FIG. 3 ( B) first release sheet RL1 temporarily attached to the middle upper surface) side and one surface of spacer portion SP (upper surface in FIG. 3B), and the other surface of adhesive sheet AS (in FIG. 3B) A second release sheet RL2 temporarily attached to the lower surface) side and the other surface (lower surface in FIG. 3B) side of the spacer portion SP, and provided between the second release sheet RL2 and the adhesive sheet AS. Is provided between the first release sheet RL1 and the spacer portion SP, and the first temporary attachment force reduction region PL1 where the temporary attachment force is smaller than the temporary attachment force between the first release sheet RL1 and the adhesive sheet AS. , Their temporary attachment force is the second release sheet RL2 and the scan Is constituted by a second temporary adhesion force decreasing region PL2 to be a small becomes temporarily stuck force than the temporary adhesive strength between the p o portion SP.

  The first and temporary attachment force decreasing regions PL1 and PL2 can be formed, for example, in a strip shape having the same thickness and shape as the first and second temporary attachment force increasing regions PR1 and PR2, and are made of silicon resin, fluorine resin, or long-chain alkyl resin. The release agent can be controlled by controlling the type of the release agent, or by differentiating the release agent polymerization method or the release agent composition.

  Even when such a laminate LS2 is employed in the sheet sticking apparatus 1 shown in FIG. 2, the laminate LS2 is reduced on the second release sheet RL2 with the spacer portion SP and the first temporary attachment force reduced by using the peeling roller 31 as a boundary. When dividing into an unnecessary laminate in which the region PL1 is temporarily attached and a used laminate in which the adhesive sheet AS is temporarily attached and the second temporary attachment force reduction region PL2 is temporarily attached on the first release sheet RL1, During the automatic operation of the sheet sticking apparatus 1 shown in FIG. 2, the adhesive sheet AS is easily peeled from the second release sheet RL2, and the spacer portion SP is easily peeled from the first release sheet RL1, A used laminate is formed.

  According to the second embodiment as described above, since the second temporary attachment force decreasing region PL1 is provided between the second release sheet RL2 and the adhesive sheet AS, the same effect as that of the first embodiment can be obtained. .

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

In the laminated bodies LS1 and LS2, the first temporary attachment force increasing region PR1 and the first temporary attachment force decreasing region PL1 are provided in a strip shape along the longitudinal direction of the first release sheet RL1, but the same shape as the adhesive sheet AS or the adhesive sheet AS. It may be scattered as a slightly larger circular or polygonal sheet.
Further, it is linear without including the concave portion PR2A corresponding to the concave portion SPA formed in the second temporary attachment force increasing region PR2 and the concave portion PL2A corresponding to the concave portion SPA formed in the second temporary attachment force decreasing region PL2 (only the illustration is omitted). You may form in a strip shape.
Furthermore, although the laminated bodies LS1 and LS2 are formed in a strip shape in which a plurality of adhesive sheets AS are temporarily attached, a single wafer in which one adhesive sheet AS is temporarily attached to the laminated bodies LS1 and LS2 may be used. .
Moreover, in the said embodiment, although the adhesive sheet AS of laminated body LS1 and LS2 was stuck on the wafer WF using the sheet sticking apparatus 1, an operator may stick the adhesive sheet AS on the wafer WF manually.
Further, in the first embodiment described above, the temporary attachment force between the second release sheet RL2 and the adhesive sheet AS is smaller than the temporary attachment force between the first release sheet RL1 and the adhesive sheet AS. The first temporary attachment force decreasing region PL1 equivalent to the second embodiment may be provided, and the temporary attachment force between the first release sheet RL1 and the spacer part SP is the second release sheet RL2 and the spacer part SP. A second temporary attachment force reduction region PL2 equivalent to the second embodiment, which has a temporary attachment force smaller than the temporary attachment force, may be provided.
In the second embodiment described above, the temporary attachment force between the first release sheet RL1 and the adhesive sheet AS is larger than the temporary attachment force between the second release sheet RL2 and the adhesive sheet AS. The first temporary attachment force increasing region PR1 equivalent to the first embodiment may be provided, and the temporary attachment force between the second release sheet RL2 and the spacer part SP is the first release sheet RL1 and the spacer part SP. A second temporary attachment force increasing region PR2 equivalent to that of the first embodiment, which has a temporary attachment force larger than the temporary attachment force, may be provided.

  In addition, the type and material of the adhesive sheet AS in the present invention are not particularly limited. For example, the adhesive sheet AS includes a base sheet and an adhesive layer in addition to the single adhesive layer as in the above-described embodiment. Two or more layers such as two layers, one having an intermediate layer between the base sheet and the adhesive layer, or other layers may be used. The semiconductor wafer can be exemplified by a silicon semiconductor wafer, a compound semiconductor wafer, and the like. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, dicing tape, and die attach film, but any other sheet or film. A sheet having an arbitrary use and shape such as a tape can be applied. Further, the adherend may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. Moreover, as a to-be-adhered body, not only a glass plate, a steel plate, a resin plate, a board | substrate etc., and other members but the member, articles | goods, etc. of arbitrary forms can also be made into object. Furthermore, it is also possible to target a wafer in which a pattern circuit is formed on the surface of the wafer.

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

AS ... Adhesive sheet LS1, LS2 ... Laminate PL1, PL2 ... First and second temporary attachment force decreasing regions PR1, PR2 ... First and second temporary attachment force increasing regions RL1, RL2 ... First and second release sheets SP ... Spacers Part

Claims (2)

An adhesive sheet of a predetermined shape;
A first release sheet temporarily attached to one side of the adhesive sheet;
A second release sheet temporarily attached to the other surface side of the adhesive sheet ;
A spacer portion provided on the outside in the surface direction of the adhesive sheet,
The first release sheet and the second release sheet are temporarily attached to one surface side and the other surface side of the spacer portion,
Between the first release sheet and the adhesive sheet, a first temporary attachment force increasing region is provided in which the temporary attachment force is larger than the temporary attachment force between the second release sheet and the adhesive sheet. It is,
Between the second release sheet and the spacer portion, there is provided a second temporary attachment force increasing region in which the temporary attachment force is larger than the temporary attachment force between the first release sheet and the spacer portion. laminate, characterized in that it is. An adhesive sheet of a predetermined shape;
A first release sheet temporarily attached to one side of the adhesive sheet;
A second release sheet temporarily attached to the other surface side of the adhesive sheet ;
A spacer portion provided on the outside in the surface direction of the adhesive sheet ,
The first release sheet and the second release sheet are temporarily attached to one side and the other side of the spacer part,
Between the second release sheet and the adhesive sheet, there is provided a first temporary attachment force reduction region in which the temporary attachment force is a temporary attachment force that is smaller than the temporary attachment force between the first release sheet and the adhesive sheet. It is,
Between the first release sheet and the spacer portion, a second temporary attachment force reduction region is provided in which the temporary attachment force is a temporary attachment force that is smaller than the temporary attachment force between the second release sheet and the spacer portion. And
The laminate, wherein the adhesive sheet, the first temporary attachment force reduction region, and the second temporary attachment force reduction region are formed to have a smaller planar shape than the first release sheet and the second release sheet. .

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